Abstract: A wavelength reference device can be used to self-calibrate an optical channel monitor. The device includes a broadband source, a thermal source, and an optical filter, which can include one or more filters. A housing can house each of these components or can house at least the broadband source and thermal source. The broadband source emits an optical signal along an optical path. The thermal source in thermal communication with the broadband source can adjust the operating temperature of the broadband source within a temperature range. The temperature range is configured to shift optical power of the broadband source with respect to a multi-band wavelength division multiplexing (WDM) range such that the optical power meets a minimum power level towards lower and higher frequencies of the range. The optical filter(s) positioned in the optical path can filter the optical signal to create a spectral shape for use in wavelength referencing.

Abstract: An optoelectronic module includes an optical filter and can have a relatively small overall height. The module includes a semiconductor die for the optical filter, where the die has a cavity in its underside. The cavity provides space to accommodate an optoelectronic device such as a light sensor or light emitter. Such an arrangement can reduce the overall height of the module, thereby facilitating its integration into a host device in which space is at a premium.

Abstract: A lithography system includes an extreme ultraviolet (EUV) light source, a reticle stage, a reflection layer, and a plurality of light permeable protrusions. The EUV light source is configured for generating an EUV light beam. The reticle stage is configured for holding a reticle with a front surface of the reticle facing in a downward direction. The reflection layer is below the reticle stage. The light permeable protrusions are formed on the reflection layer. Each of the light permeable protrusions includes a bouncing surface facing in a direction that forms an acute angle with the downward direction. A first portion of the EUV light beam from the EUV light source passes through the bouncing surface of each of the light permeable protrusions to the reflection layer and is reflected to the reticle by the reflection layer.

Abstract: Provided is a structural birefringence-type inorganic wave plate having excellent heat resistance and durability, and a fine pattern. Also provided is a manufacturing method for an inorganic wave plate by which, even in the case of a fine pattern, productivity is high, and a desired phase difference is easily achieved and stably obtained. This inorganic wave plate is obtained by utilizing a selective interaction between a polymer having a repeating unit containing a carbonyl group, and a metallic oxide precursor, the inorganic wave plate having a wire grid structure provided with a transparent substrate, and grid-shaped protruding portions arranged at a pitch shorter than the wavelength of light in a used band on at least one surface of the transparent substrate and extending in a predetermined direction, the main component of the grid-shaped protruding portion being a metallic oxide.

Abstract: In ultra-wideband or impulse radio terahertz wireless communication, the electromagnetic signal may experience group delay dispersion (GDD). Without correction, this can degrade the achievable data transmission rate. An apparatus comprising a stratified structure having a front portion and a back portion is disclosed. The structure comprises a plurality of adjacent layers of differing refractive indices, wherein each layer has a refractive index different from an immediately adjacent layer. The structure further includes a backing layer at the back portion. The structure defines a GDD, which can be adjusted, and the structure is configured to introduce the GDD to an incident electromagnetic signal and thereby produce a dispersion-compensated electromagnetic signal when the incident signal is reflected by the structure. The GDD of the structure is configured to substantially cancel out the dispersive effects experienced by the electromagnetic signal in the signal path.

Abstract: An optical transceiver includes processing circuitry to calculate, when test signals are sent to a transmission line from a transmitter and a receiver receives the test signals having passed through a wavelength filter, a bandwidth of the received test signals, the transmitter generating, as the test signals, a collection of narrowband signals, the narrowband signals having a narrower bandwidth than a bandwidth of the wavelength filter and having different frequencies, and the wavelength filter included in an optical splitter inserted in the transmission line, and the collection of narrowband signals including a narrowband signal having a higher frequency than a highest frequency in the bandwidth of the wavelength filter and a narrowband signal having a lower frequency than a lowest frequency in the bandwidth of the wavelength filter, and to determine a modulation rate and a modulation level of the transmission signal depending on the calculated bandwidth.

Abstract: One disclosed embodiment includes techniques for temperature-dependent reference image correction in structured light projectors that may be used for generating three-dimensional (3D) scene depth maps. The techniques disclosed herein include receiving an indication of a temperature (e.g., an actual current operating temperature or a change in the current operating temperature relative to an established reference temperature) associated with one or more components of a projector and then determining, based on the temperature indication, an amount of adjustment needed to correct a reference pattern image based on an estimated effective focal length change of the projector. Next, a reference pattern image may be appropriately adjusted, e.g.

Abstract: Optical system comprising two optical fibres which are configured to define between them a Fabry-Perot cavity, and a connecting element bonded to each of the two optical fibres, the connecting element defining a through-passage, at least one of the two optical fibres comprising an end portion arranged in the through-passage and bonded to the connecting element, the two optical fibres extending along an axis and being separated from one another by a distance Le parallel to the axis, one of the optical fibres being bonded to the connecting element at a first bonding zone, and the other optical fibre being bonded to the connecting element at a second bonding zone separated from the first bonding zone by distance parallel to the axis.

Abstract: An optical filter includes a substrate; a first mirror on the substrate; a cavity layer on the first mirror; and a second mirror on the cavity layer. Each of the first and second mirrors provide high reflection, low transmission and low absorption over a targeted stopband. The cavity layer defines a resonant transmission band within the targeted stopband with the resonant band wavelength depending on the optical thickness of the cavity layer. The cavity layer includes a material having a non-linear response to incident irradiance such that cavity absorption changes with irradiance and suppresses cavity resonance at high irradiance. The material having the non-linear response to the incident irradiance includes a two-dimensional (2D) material.

Abstract: A test fixture for holding and testing portions of an optical device, such as a plurality of cameras of an eyewear device. The test fixture includes a relay lens such that the fixture can be positioned close to a test screen displaying a patterned test image and reducing the size and cost of parts. The test fixture includes one or more lasers configured to easily and quickly align the test fixture. The test fixture includes an actuator for selectively positioning the cameras behind the relay lens to check for image quality.

Abstract: An optical module includes a support layer, a device layer which is provided on the support layer, and a movable mirror which is mounted in the device layer. The device layer has a mounting region in which the movable mirror is mounted, and a driving region which is connected to the mounting region. A space corresponding to at least the mounting region and the driving region is formed between the support layer and the device layer. The mounting region is disposed between a pair of elastic support regions included in the driving region and is supported by the pair of elastic support regions.

Abstract: A light module includes an optical element and a base on which the optical element is mounted. The optical element has an optical portion which has an optical surface; an elastic portion which is provided around the optical portion such that an annular region is formed; and a pair of support portions which is provided such that the optical portion is sandwiched in a first direction along the optical surface and in which an elastic force is applied and a distance therebetween is able to be changed in accordance with elastic deformation of the elastic portion. The base has a main surface, and a mounting region in which an opening communicating with the main surface is provided. The support portions are inserted into the opening in a state where an elastic force of the elastic portion is applied.

Abstract: A spectral filter module includes a spectral filter that splits light having a wavelength corresponding to an input drive voltage from incident light and outputs the light, a drive unit that outputs the drive voltage based on an input wavelength command value, and a drive controller that outputs the wavelength command value and changes the wavelength command value every time a trigger signal is input from the outside.

Abstract: A diffractive optical element comprises a substrate, a first resin layer arranged on the substrate and a second resin layer arranged on the first resin layer. Each of the first resin layer and the second resin layer includes a grating section, or a layer portion, for forming a diffraction grating and a base section, or another layer portion, held in contact with the grating section. Either the first resin layer or the second resin layer has a lower transmittance portion in the base section thereof that shows an internal transmittance relative to a wavelength of 400 nm which is lower than that of the grating section of the resin layer by not less than 2% and not more than 6%.

Abstract: A light path adjustment mechanism includes a support, a carrier, an optical plate member and a plurality of actuators. The carrier is disposed on the support and connected to the support via a first elastic member and a second elastic member. The carrier includes a first side, a second side opposite the first side, a third side and a fourth side opposite the third side, and each of the third side and the fourth side is located between the first side and the second side. The actuators are disposed on at most three sides of the first side, the second side, the third side and the fourth side, and the actuators are disposed at least on the first side and the third side.

Abstract: An optical filter device includes a wavelength variable interference filter that includes a pair of reflective films which face each other, and a fixed substrate in which one of the pair of reflective films is provided; a base to which the fixed substrate is fixed; and a fixing member which fixes one place on the fixed substrate to the base, a surface which is on other place of the one place of the substrate and the base are disposed with a gap therebetween.

Abstract: Provided is an optical device including a first wavelength variable interference filter in which a first reflective film and a second reflective film face each other with a first gap in between; a second wavelength variable interference filter in which a third reflective film and a fourth reflective film face each other with a second gap in between; and a first substrate having a transmissive property, which has a first surface and a second surface which is opposite in direction to the first surface, in which the second reflective film is provided on the first surface of the first substrate, and in which the third reflective film is provided on the second surface of the first substrate.

Abstract: In ultra-wideband or impulse radio terahertz wireless communication, the atmosphere reshapes terahertz pulses via group delay dispersion (GDD). Without correction, this can degrade the achievable data transmission rate. An apparatus comprising a stratified structure having a front end and a back end is disclosed. The structure comprises a plurality of adjacent layers of differing refractive indices, wherein each layer has a refractive index different from an immediately adjacent layer. The structure further includes a backing layer at the back end. The structure defines a GDD, which can be adjusted, and the structure is configured to introduce the GDD to a received terahertz signal and thereby produce a compensated terahertz signal when the received terahertz signal is reflected by the structure. The GDD of the structure is configured to substantially cancel out the GDD effects caused by the atmosphere on the terahertz signal.

Abstract: An interferometer includes a holding element having an actuation recess, a first mirror element arranged on the holding element opposite the actuation recess, and a second mirror element arranged opposite the first mirror element at a mirror distance, to form an optical slit. The first mirror element is arranged between the second mirror element and the holding element and the optical slit is spatially separated from the actuation recess by the first mirror element. The interferometer further includes an electrode pair including a first actuation electrode in one of the mirror elements and a second actuation electrode on a side of the actuation recess opposite the first actuation electrode. The mirror distance can be varied by applying an electrical voltage to the electrode pair.

Abstract: A wavelength-tunable optical filter control apparatus in an optical access system that uses wavelength-multiplexed optical signal of a plurality of wavelength channels includes a wavelength-tunable optical filter configured to pass an optical signal of a specific wavelength channel among the plurality of wavelength channels; a light receiving element configured to convert the optical signal that has passed through the wavelength-tunable optical filter into an electrical signal; a signal quality determining unit configured to determine a quality of the electrical signal; and a wavelength-tunable optical filter control unit configured to acquire a light intensity of the electrical signal and control a wavelength of the wavelength-tunable optical filter based on the acquired light intensity and a determination result of the quality of the electrical signal.

Abstract: Electrically tunable Fabry-Perot interferometers which are produced with micromechanical (MEMS) technology. Producing interferometers with prior art processes includes costly and complicated production phases. Therefore, it has not been possible to apply interferometers in consumer mass products. According to the present solution, the Fabry-Perot cavity is made by removing a sacrificial layer (112) which has been polymer material. A mirror layer (113, 117-120) which is produced above the sacrificial layer can be made with atomic layer deposition technology, for example. According to a preferable embodiment, electrodes (106b, 115b) of the mirror structures are formed by using sputtering or evaporation. With the present solution it is possible to avoid the above mentioned problems related with prior art.

Abstract: A method may include thinning a silicon wafer to a particular thickness. The particular thickness may be based on a passband frequency spectrum of an adjustable optical filter. The method may also include covering a surface of the silicon wafer with an optical coating. The optical coating may filter an optical signal and may be based on the passband frequency spectrum. The method may additionally include depositing a plurality of thermal tuning components on the coated silicon wafer. The plurality of thermal tuning components may adjust a passband frequency range of the adjustable optical filter by adjusting a temperature of the coated silicon wafer. The passband frequency range may be within the passband frequency spectrum. The method may include dividing the coated silicon wafer into a plurality of silicon wafer dies. Each silicon wafer die may include multiple thermal tuning components and may be the adjustable optical filter.

Abstract: A dynamic multi-pane insulating assembly and system including methods for dynamically maintaining the thermal resistance value of the assembly and system. The dynamic multi-pane insulating assembly and system includes an interior pane and first and second exterior panes. The first exterior pane and a first side of the interior pane defines an evacuated gap in communication with a vacuum source and a second side of the interior pane and the second exterior pane defines a pressurized gap in communication with the source of pressurized gas.

Abstract: A light detection device includes a Fabry-Perot interference filter, a light detector, a spacer that has a placement surface on which a portion outside a light transmission region in a bottom surface of the interference filter is placed, and an adhesive member that adheres the interference filter and the spacer to each other. Elastic modulus of the adhesive member is smaller than elastic modulus of the spacer. At least a part of a lateral surface of the interference filter is located on the placement surface such that a part of the placement surface of the spacer is disposed outside the lateral surface. The adhesive member is disposed in a corner portion formed by the lateral surface of the interference filter and the part of the placement surface of the spacer and contacts each of the lateral surface and the part of the placement surface.

Abstract: A spectroscopic camera includes an interference filter including a pair of reflection films and an imaging device that captures image light passing through the pair of reflection films. The interference filter is provided with a marker that changes the characteristic in accordance with which the image light passes, and the marker is provided in a position where the marker overlaps with the optical path of the image light that passes through the pair of reflection films.

Abstract: Disclosed are methods of fabricating an integrated computational element for use in an optical computing device. One method includes providing a substrate that has a first surface and a second surface substantially opposite the first surface, depositing multiple optical thin films on the first and second surfaces of the substrate via a thin film deposition process, and thereby generating a multilayer film stack device, cleaving the substrate to produce at least two optical thin film stacks, and securing one or more of the at least two optical thin film stacks to a secondary optical element for use as an integrated computational element (ICE).

Abstract: A semiconductor device that generates or detects terahertz waves includes a semiconductor layer that has a gain of the generated or detected terahertz waves; a first electrode connected to the semiconductor layer; a second electrode that is arranged at a side opposite to the side at which the first electrode is arranged with respect to the semiconductor layer and that is electrically connected to the semiconductor layer; a third electrode electrically connected to the second electrode; and a dielectric layer that is arranged around the semiconductor layer and the second electrode and between the first electrode and the third electrode and that is thicker than the semiconductor layer. The dielectric layer includes an area including a conductor electrically connecting the second electrode to the third electrode. The area is filled with the conductor.

Abstract: A Fabry-Perot interference filter includes a substrate that has a first surface, a first laminate that has a first mirror portion, a second laminate that has a second mirror portion facing the first mirror portion via a gap, an intermediate layer that defines the gap between the first laminate and the second laminate, and a first terminal. The intermediate layer has a first inner surface surrounding the first terminal. The first inner surface is curved such that an edge portion of the intermediate layer on the substrate side is positioned on the first terminal side relative to an edge portion of the intermediate layer on a side opposite to the substrate.

Abstract: An actuator apparatus includes a pair of substrates facing each other; a plurality of bias actuators that each vary a gap dimension of a gap between the pair of substrates; a gap detection portion that detects the gap dimension; and a voltage control unit that controls driving of each of the bias actuators on the basis of the detected gap dimension. The bias actuators are located asymmetric relative to a driving central axis and are mutually independently driven; and the voltage control unit derives driving parameters for use in driving the bias actuators, on the basis of voltages and gap dimensions obtained by sequentially switching and driving the bias actuators on by one.

Abstract: A test fixture for holding and testing portions of an optical device, such as a plurality of cameras of an eyewear device. The test fixture includes a relay lens such that the fixture can be positioned close to a test screen displaying a patterned test image and reducing the size and cost of parts. The test fixture includes one or more lasers configured to easily and quickly align the test fixture. The test fixture includes an actuator for selectively positioning the cameras behind the relay lens to check for image quality.

Abstract: A spectroscopic apparatus includes: a spectroscopic module; a temperature detector that detects a temperature of the spectroscopic module; and a module controller that controls the spectroscopic module, in which the spectroscopic module includes an interference filter that has a gap changing unit which changes a dimension of a gap between a pair of reflection films, and a capacity detection circuit that outputs a detection signal in accordance with an electrostatic capacity between the pair of reflection films, and in which the module controller corrects a target value of the detection signal that is output from the capacity detection circuit, based on a temperature characteristic of the spectroscopic module and a detection temperature that is detected by the temperature detector, and controls the voltage that is to be applied to the gap changing unit, that the detection signal that is output from the capacity detection circuit is the corrected target value.

Abstract: A touch panel, a touch detection method thereof, and a display device are provided. The touch panel includes an electrowetting substrate and a touch substrate which are disposed opposite to each other and a conductive fluid drop disposed between the electrowetting substrate and the touch substrate. The electrowetting substrate includes a first base substrate, a control electrode, and a first insulating layer; the conductive fluid drop is disposed at a side of the first insulating layer away from the control electrode, and corresponds to the control electrode; the touch substrate includes a second base substrate and a touch electrode unit disposed at a side of the second base substrate close to the electrowetting substrate; the touch electrode unit and the conductive fluid drop are disposed opposite to each other.

Abstract: [Problem] To provide an optical transmission/reception device, an optical communication system, an optical communication method, and a program which are capable of securing the confidentiality of information included in an optical signal even when the optical signal is transferred to a device that is not an original transmission destination device.

Abstract: Implementations of the present invention relate to apparatuses, systems, and methods for blocking, attenuating, or filtering neuroactive wavelengths of the visible light spectrum and reducing or preventing the symptoms affiliated with exposure to those wavelengths. Nanoparticles of a predetermined composition, size, and structure are dispersed in a host medium to create an optical notch filter, thereby attenuating only a narrow range of the visible spectrum.

Abstract: A Fabry Perot resonator spacer is provided. The Fabry Perot resonator spaced includes a tetrahedral body, the tetrahedral body being made of a material having a Poisson ratio and defining a plurality of triangular faces, a plurality of edges, and a plurality of corners, wherein each one of the plurality of corners is truncated to form a mounting surface in a mounting plane. The spacer further includes a first mirror channel configured to receive a first optical element, a second mirror channel configured to receive a second optical element, and an optical cavity extending linearly through the tetrahedral body between the first mirror channel and the second mirror channel.

Abstract: A real-time variable parameter micro-nano optical field modulation system includes a light source, a 4F optical system and a set of light wave modulation optical components. The 4F optical system includes a first optical assembly and a second optical assembly arranged along an optical path in sequence. The light wave modulation optical components are arranged between the first optical assembly and the second optical assembly, and generate optical field distribution with adjustable patterns and structural parameters thereof on a back focal plane of the system by segmented modulation of sub-wavefronts.

Abstract: Assemblies include a micronode having an optical connector, a coaxial connector port and a housing that includes a plurality of mounting bores. The assembly further includes a filter having a housing that underlies the micronode housing, the filter housing including a plurality of mounting bores, the mounting bores of the filter housing aligning with the mounting bores of the micronode housing. The filter further includes a first optical connector configured to receive an optical drop cable, a second optical connector configured to receive an optical cable and an optical pigtail cord that is connected to the optical connector of the micronode.

Abstract: An optical filter includes: a first variable wavelength bandpass filter that can extract light of a first wavelength band (400 to 460 nm), the first wavelength band having a first spectral band having a central wavelength equal to a first wavelength in the first wavelength band and a second spectral band having a central wavelength equal to a second wavelength in the first wavelength band; and a second variable wavelength bandpass filter that can extract light of a second wavelength band (480 to 540 nm) adjacent to the first wavelength band, the second wavelength band having a third spectral band having a central wavelength equal to a third wavelength in the second wavelength band and a fourth spectral band having a central wavelength equal to a fourth wavelength in the second wavelength band.

Abstract: An optical or optoelectronic receiver and module, and methods of making and using the same, are disclosed. The receiver includes a photodetector, a first microelectromechanical device configured to reflect a multi-wavelength optical signal, a thin film filter configured to receive the multi-wavelength optical signal reflected by the first microelectromechanical device and separate a single-wavelength optical signal from the multi-wavelength optical signal, a first lens configured to focus the single-wavelength optical signal on the photodetector, and a second microelectromechanical device configured to reflect the single-wavelength optical signal towards the first lens. Each wavelength of the multi-wavelength optical signal represents or corresponds to a unique channel over which the receiver receives optical signals. The present receiver and methods enable low-cost, high-volume manufacturing of multi-channel optical or optoelectronic receivers.

Abstract: A photometric device (1) measuring light emitted from a measuring object such as a display (2) includes two types of filters including interference filters (20X, 20Y, and 20Z) and an LVF (21), a disk (22) supporting the interference filters and the LVF, a motor (23) rotatably drive the disk to cause the light emitted from the measuring object to scan the interference filters and the LVF sequentially, a photoreceptor (13) converting light passed through the interference filters and light passed through the LVF to an electrical signal, a photometric controller (14) outputting photometric information based on the electrical signal of the light passed through the interference filters and converted by the photoreceptor and the electrical signal of the light passed through the LVF and converted by the photoreceptor.

Abstract: A photometric device (1) measuring light emitted from a measuring object such as a display (2) includes interference filters (20X, 20Y, and 20Z) selectively transmitting a particular wavelength corresponding to a respective one of tristimulus values, an LVF (21) separating and transmitting incident light, a disk (22) supporting the interference filters and the LVF, a motor (23) rotatably drive the disk to cause the light emitted from the measuring object to scan the interference filters and the LVF sequentially, a photoreceptor (13) converting light passed through the interference filters and light passed through the LVF to an electrical signal, and a photometric controller (14) outputting photometric information based on the electrical signal of the light passed through the interference filters and converted by the photoreceptor and the electrical signal of the light passed through the LVF and converted by the photoreceptor.

Abstract: An optical relay device is provided which is capable of outputting control signal light without equipping a light source for the control signal light and capable of flexibly managing and changing a wavelength of the control signal light in accordance with a state of a network. The optical relay device includes an optical receiving unit that receives a wavelength multiplexed optical signal, a control unit that specifies a first wavelength and outputting notification information, and a processing unit that selects an optical signal having the first wavelength from the received wavelength multiplexed optical signal, applying intensity-modulation in accordance with the notification information to the selected optical signal, adding the intensity-modulated optical signal back to the wavelength multiplexed optical signal, and outputting the wavelength multiplexed optical signal.

Abstract: A Fabry-Perot tunable filter comprises a membrane device. The membrane device includes a support structure having an optical port. Also, the membrane device has an optical membrane structure separated from the support structure over the optical port. The optical membrane structure includes a center body portion and an outer body portion. Tethers extend radially from the center body portion to the outer body portion of the optical membrane structure. The center body portion has an area that is about equal or smaller than the area of the optical port.

Abstract: A semiconductor integrated device, comprising: a package defining an internal space and having an acoustic-access opening in acoustic communication with an environment external to the package; a MEMS acoustic transducer, housed in the internal space and provided with an acoustic chamber facing the acoustic-access opening; and a filtering module, which is designed to inhibit passage of contaminating particles having dimensions larger than a filtering dimension and is set between the MEMS acoustic transducer and the acoustic-access opening. The filtering module defines at least one direct acoustic path between the acoustic-access opening and the acoustic chamber.

Abstract: The present invention is drawn to an optical article comprising: (a) a photochromic substrate comprising at least one photochromic dye, and (b) an interference coating having a specific gradient thickness providing for a gradient reflectance. It also pertains to a process for making such an optical article.

Abstract: An optical filter device includes an interference filter and a housing. The interference filter includes a fixed substrate, a movable substrate joined to the fixed substrate, a fixed reflective film provided on the fixed substrate, and a movable reflective film provided on the movable substrate and opposed to the fixed reflective film across an inter-reflective film gap. The housing includes a base substrate on which the interference filter is arranged. A fixing member is arranged between the movable substrate and the base substrate. The movable substrate is fixed to the base substrate by the fixing member in one place excluding a region where the movable reflective film is provided.

Abstract: An optical filter device has a light interference filter and a casing. The light interference filter has a fixed substrate, a movable substrate joined to the fixed substrate, a fixed reflection film provided on the fixed substrate, and a movable reflection film provided on the movable substrate. The casing has a base substrate and a lid that forms an internal space with the base substrate. The movable substrate has a holding portion provided on a surface opposite to the fixed substrate, outside a light interference region, as viewed in a plan view. The base substrate has a light transmission hole corresponding to a light transmission region. An outer peripheral edge of the light transmission hole faces the holding portion. The surface opposite to the fixed substrate of the movable substrate is joined to the base substrate.

Abstract: An optical filter includes first and second substrates, first and second mirrors, and first and second electrodes. The first substrate has a flat surface. The second substrate includes a first surface, a second surface and a third surface, the second surface surrounding the first surface in a plan view, the third surface surrounding the second surface in a plan view, a height of the first surface above the second surface being lower than a height of the third surface above the second surface, the first surface and the second surface facing the flat surface of the first substrate. The first mirror is disposed on the flat surface of the first substrate. The second mirror is disposed on the first surface of the second substrate, the second mirror facing the first mirror. The first electrode is disposed on the flat surface of the first substrate. The second electrode is disposed on the second surface of the second substrate, the second electrode facing the first electrode.

Abstract: A filter includes a fixed substrate, a movable substrate opposed to the fixed substrate, a first reflection film provided on a surface of the fixed substrate facing the movable substrate, a second reflection film provided on the movable substrate and opposed to the first reflection film across a gap, a first electrode provided on the surface of the fixed substrate facing the movable substrate, a second electrode provided on the movable substrate and opposed to the first electrode, bonding parts provided on opposing surfaces of the fixed and movable substrates and bonding the fixed substrate to the movable substrate, and a groove part provided in at least one of the opposing surfaces, and the gap is in communication with an exterior of the filter via the groove part.

Abstract: An interference filter is fixed with respect to a base substrate by a fixing member which is disposed on one portion which is on the outer side of a filter region. Accordingly, since the periphery end of the interference filter, other than a portion (end portion) in which the fixing member is disposed, becomes a floated state (free end), it is possible to suppress the warping of the interference filter even when there is the difference in coefficients of thermal expansion with the base substrate. Further, spacer portions which are lower than the height of the fixing member are formed outside the filter region and on the portion separated from the fixing member. At the time of the impact, since the spacer portions come in contact with the base substrate to function as stoppers, it is possible to suppress occurrence of peeling-off or cracks on the fixing member.