Electrically Or Mechanically Variable (e.g., Tunable, Adjustable) Patents (Class 359/578)
  • Patent number: 11442328
    Abstract: Provided is an optical device including a first wavelength variable interference filter in which a first reflective film and a second reflective film face each other with a first gap in between; a second wavelength variable interference filter in which a third reflective film and a fourth reflective film face each other with a second gap in between; and a first substrate having a transmissive property, which has a first surface and a second surface which is opposite in direction to the first surface, in which the second reflective film is provided on the first surface of the first substrate, and in which the third reflective film is provided on the second surface of the first substrate.
    Type: Grant
    Filed: September 26, 2019
    Date of Patent: September 13, 2022
    Inventors: Yasushi Matsuno, Teruyuki Nishimura
  • Patent number: 11431377
    Abstract: In ultra-wideband or impulse radio terahertz wireless communication, the atmosphere reshapes terahertz pulses via group delay dispersion (GDD). Without correction, this can degrade the achievable data transmission rate. An apparatus comprising a stratified structure having a front end and a back end is disclosed. The structure comprises a plurality of adjacent layers of differing refractive indices, wherein each layer has a refractive index different from an immediately adjacent layer. The structure further includes a backing layer at the back end. The structure defines a GDD, which can be adjusted, and the structure is configured to introduce the GDD to a received terahertz signal and thereby produce a compensated terahertz signal when the received terahertz signal is reflected by the structure. The GDD of the structure is configured to substantially cancel out the GDD effects caused by the atmosphere on the terahertz signal.
    Type: Grant
    Filed: September 10, 2020
    Date of Patent: August 30, 2022
    Assignee: The Board of Regents for the Oklahoma Agricultural and Mechanical Colleges
    Inventors: John F. O'Hara, Karl Louthan Strecker
  • Patent number: 11391629
    Abstract: An interferometer includes a holding element having an actuation recess, a first mirror element arranged on the holding element opposite the actuation recess, and a second mirror element arranged opposite the first mirror element at a mirror distance, to form an optical slit. The first mirror element is arranged between the second mirror element and the holding element and the optical slit is spatially separated from the actuation recess by the first mirror element. The interferometer further includes an electrode pair including a first actuation electrode in one of the mirror elements and a second actuation electrode on a side of the actuation recess opposite the first actuation electrode. The mirror distance can be varied by applying an electrical voltage to the electrode pair.
    Type: Grant
    Filed: April 10, 2019
    Date of Patent: July 19, 2022
    Assignee: Robert Bosch GmbH
    Inventors: Ralf Noltemeyer, Christian Huber, Reinhold Roedel, Benedikt Stein, Christoph Schelling, Christoph Daniel Kraemmer
  • Patent number: 11258510
    Abstract: A wavelength-tunable optical filter control apparatus in an optical access system that uses wavelength-multiplexed optical signal of a plurality of wavelength channels includes a wavelength-tunable optical filter configured to pass an optical signal of a specific wavelength channel among the plurality of wavelength channels; a light receiving element configured to convert the optical signal that has passed through the wavelength-tunable optical filter into an electrical signal; a signal quality determining unit configured to determine a quality of the electrical signal; and a wavelength-tunable optical filter control unit configured to acquire a light intensity of the electrical signal and control a wavelength of the wavelength-tunable optical filter based on the acquired light intensity and a determination result of the quality of the electrical signal.
    Type: Grant
    Filed: May 9, 2019
    Date of Patent: February 22, 2022
    Assignee: Nippon Telegraph and Telephone Corporation
    Inventors: Takeshi Imai, Takuya Kanai, Kota Asaka
  • Patent number: 11194152
    Abstract: Electrically tunable Fabry-Perot interferometers which are produced with micromechanical (MEMS) technology. Producing interferometers with prior art processes includes costly and complicated production phases. Therefore, it has not been possible to apply interferometers in consumer mass products. According to the present solution, the Fabry-Perot cavity is made by removing a sacrificial layer (112) which has been polymer material. A mirror layer (113, 117-120) which is produced above the sacrificial layer can be made with atomic layer deposition technology, for example. According to a preferable embodiment, electrodes (106b, 115b) of the mirror structures are formed by using sputtering or evaporation. With the present solution it is possible to avoid the above mentioned problems related with prior art.
    Type: Grant
    Filed: July 29, 2019
    Date of Patent: December 7, 2021
    Assignee: TEKNOLOGIAN TUTKIMUSKESKUS VTT
    Inventors: Martti Blomberg, Hannu Kattelus, Riikka Puurunen
  • Patent number: 11194180
    Abstract: A method may include thinning a silicon wafer to a particular thickness. The particular thickness may be based on a passband frequency spectrum of an adjustable optical filter. The method may also include covering a surface of the silicon wafer with an optical coating. The optical coating may filter an optical signal and may be based on the passband frequency spectrum. The method may additionally include depositing a plurality of thermal tuning components on the coated silicon wafer. The plurality of thermal tuning components may adjust a passband frequency range of the adjustable optical filter by adjusting a temperature of the coated silicon wafer. The passband frequency range may be within the passband frequency spectrum. The method may include dividing the coated silicon wafer into a plurality of silicon wafer dies. Each silicon wafer die may include multiple thermal tuning components and may be the adjustable optical filter.
    Type: Grant
    Filed: May 2, 2018
    Date of Patent: December 7, 2021
    Assignee: IL-VI DELAWARE, INC.
    Inventors: Li Zhang, Bangjia Wu, Huiping Li
  • Patent number: 11161325
    Abstract: A dynamic multi-pane insulating assembly and system including methods for dynamically maintaining the thermal resistance value of the assembly and system. The dynamic multi-pane insulating assembly and system includes an interior pane and first and second exterior panes. The first exterior pane and a first side of the interior pane defines an evacuated gap in communication with a vacuum source and a second side of the interior pane and the second exterior pane defines a pressurized gap in communication with the source of pressurized gas.
    Type: Grant
    Filed: March 26, 2020
    Date of Patent: November 2, 2021
    Assignee: Kattmann Elias, LLC
    Inventors: Thomas Tyler Kattmann, Christian Michael Elias, Christopher Ryan Price
  • Patent number: 11118972
    Abstract: A light detection device includes a Fabry-Perot interference filter, a light detector, a spacer that has a placement surface on which a portion outside a light transmission region in a bottom surface of the interference filter is placed, and an adhesive member that adheres the interference filter and the spacer to each other. Elastic modulus of the adhesive member is smaller than elastic modulus of the spacer. At least a part of a lateral surface of the interference filter is located on the placement surface such that a part of the placement surface of the spacer is disposed outside the lateral surface. The adhesive member is disposed in a corner portion formed by the lateral surface of the interference filter and the part of the placement surface of the spacer and contacts each of the lateral surface and the part of the placement surface.
    Type: Grant
    Filed: April 19, 2016
    Date of Patent: September 14, 2021
    Assignee: HAMAMATSU PHOTONICS K.K.
    Inventors: Masaki Hirose, Katsumi Shibayama, Takashi Kasahara, Toshimitsu Kawai, Takehiko Yashiro, Mitsushi Mineno, Shigeru Suzuki
  • Patent number: 11112307
    Abstract: A spectroscopic camera includes an interference filter including a pair of reflection films and an imaging device that captures image light passing through the pair of reflection films. The interference filter is provided with a marker that changes the characteristic in accordance with which the image light passes, and the marker is provided in a position where the marker overlaps with the optical path of the image light that passes through the pair of reflection films.
    Type: Grant
    Filed: July 24, 2020
    Date of Patent: September 7, 2021
    Inventors: Tomonori Matsushita, Teruyuki Nishimura, Kei Kudo
  • Patent number: 11090685
    Abstract: Disclosed are methods of fabricating an integrated computational element for use in an optical computing device. One method includes providing a substrate that has a first surface and a second surface substantially opposite the first surface, depositing multiple optical thin films on the first and second surfaces of the substrate via a thin film deposition process, and thereby generating a multilayer film stack device, cleaving the substrate to produce at least two optical thin film stacks, and securing one or more of the at least two optical thin film stacks to a secondary optical element for use as an integrated computational element (ICE).
    Type: Grant
    Filed: November 9, 2018
    Date of Patent: August 17, 2021
    Assignee: Halliburton Energy Services, Inc.
    Inventors: David L. Perkins, Michael T. Pelletier, James M. Price
  • Patent number: 10951167
    Abstract: A semiconductor device that generates or detects terahertz waves includes a semiconductor layer that has a gain of the generated or detected terahertz waves; a first electrode connected to the semiconductor layer; a second electrode that is arranged at a side opposite to the side at which the first electrode is arranged with respect to the semiconductor layer and that is electrically connected to the semiconductor layer; a third electrode electrically connected to the second electrode; and a dielectric layer that is arranged around the semiconductor layer and the second electrode and between the first electrode and the third electrode and that is thicker than the semiconductor layer. The dielectric layer includes an area including a conductor electrically connecting the second electrode to the third electrode. The area is filled with the conductor.
    Type: Grant
    Filed: May 23, 2016
    Date of Patent: March 16, 2021
    Assignee: CANON KABUSHIKI KAISHA
    Inventor: Yasushi Koyama
  • Patent number: 10838195
    Abstract: A Fabry-Perot interference filter includes a substrate that has a first surface, a first laminate that has a first mirror portion, a second laminate that has a second mirror portion facing the first mirror portion via a gap, an intermediate layer that defines the gap between the first laminate and the second laminate, and a first terminal. The intermediate layer has a first inner surface surrounding the first terminal. The first inner surface is curved such that an edge portion of the intermediate layer on the substrate side is positioned on the first terminal side relative to an edge portion of the intermediate layer on a side opposite to the substrate.
    Type: Grant
    Filed: July 5, 2017
    Date of Patent: November 17, 2020
    Assignee: HAMAMATSU PHOTONICS K.K.
    Inventors: Takashi Kasahara, Katsumi Shibayama, Masaki Hirose, Toshimitsu Kawai, Hiroki Oyama, Yumi Kuramoto
  • Patent number: 10782653
    Abstract: An actuator apparatus includes a pair of substrates facing each other; a plurality of bias actuators that each vary a gap dimension of a gap between the pair of substrates; a gap detection portion that detects the gap dimension; and a voltage control unit that controls driving of each of the bias actuators on the basis of the detected gap dimension. The bias actuators are located asymmetric relative to a driving central axis and are mutually independently driven; and the voltage control unit derives driving parameters for use in driving the bias actuators, on the basis of voltages and gap dimensions obtained by sequentially switching and driving the bias actuators on by one.
    Type: Grant
    Filed: June 29, 2018
    Date of Patent: September 22, 2020
    Assignee: Seiko Epson Corporation
    Inventor: Nozomu Hirokubo
  • Patent number: 10764571
    Abstract: A test fixture for holding and testing portions of an optical device, such as a plurality of cameras of an eyewear device. The test fixture includes a relay lens such that the fixture can be positioned close to a test screen displaying a patterned test image and reducing the size and cost of parts. The test fixture includes one or more lasers configured to easily and quickly align the test fixture. The test fixture includes an actuator for selectively positioning the cameras behind the relay lens to check for image quality.
    Type: Grant
    Filed: April 22, 2019
    Date of Patent: September 1, 2020
    Assignee: Snap Inc.
    Inventor: Alan E. Baron
  • Patent number: 10712200
    Abstract: A spectroscopic apparatus includes: a spectroscopic module; a temperature detector that detects a temperature of the spectroscopic module; and a module controller that controls the spectroscopic module, in which the spectroscopic module includes an interference filter that has a gap changing unit which changes a dimension of a gap between a pair of reflection films, and a capacity detection circuit that outputs a detection signal in accordance with an electrostatic capacity between the pair of reflection films, and in which the module controller corrects a target value of the detection signal that is output from the capacity detection circuit, based on a temperature characteristic of the spectroscopic module and a detection temperature that is detected by the temperature detector, and controls the voltage that is to be applied to the gap changing unit, that the detection signal that is output from the capacity detection circuit is the corrected target value.
    Type: Grant
    Filed: February 25, 2019
    Date of Patent: July 14, 2020
    Assignee: Seiko Epson Corporation
    Inventor: Nozomu Hirokubo
  • Patent number: 10664080
    Abstract: A touch panel, a touch detection method thereof, and a display device are provided. The touch panel includes an electrowetting substrate and a touch substrate which are disposed opposite to each other and a conductive fluid drop disposed between the electrowetting substrate and the touch substrate. The electrowetting substrate includes a first base substrate, a control electrode, and a first insulating layer; the conductive fluid drop is disposed at a side of the first insulating layer away from the control electrode, and corresponds to the control electrode; the touch substrate includes a second base substrate and a touch electrode unit disposed at a side of the second base substrate close to the electrowetting substrate; the touch electrode unit and the conductive fluid drop are disposed opposite to each other.
    Type: Grant
    Filed: June 30, 2017
    Date of Patent: May 26, 2020
    Assignees: BOE Technology Group Co., Ltd., Beijing BOE Display Technology Co., Ltd.
    Inventors: Zhixiao Yao, Ming Tian, Jiarong Liu, Xiaoyi Zheng
  • Patent number: 10581518
    Abstract: [Problem] To provide an optical transmission/reception device, an optical communication system, an optical communication method, and a program which are capable of securing the confidentiality of information included in an optical signal even when the optical signal is transferred to a device that is not an original transmission destination device.
    Type: Grant
    Filed: March 14, 2018
    Date of Patent: March 3, 2020
    Assignee: NEC Corporation
    Inventor: Ryota Abe
  • Patent number: 10234608
    Abstract: Implementations of the present invention relate to apparatuses, systems, and methods for blocking, attenuating, or filtering neuroactive wavelengths of the visible light spectrum and reducing or preventing the symptoms affiliated with exposure to those wavelengths. Nanoparticles of a predetermined composition, size, and structure are dispersed in a host medium to create an optical notch filter, thereby attenuating only a narrow range of the visible spectrum.
    Type: Grant
    Filed: November 14, 2014
    Date of Patent: March 19, 2019
    Assignee: University of Utah Research Foundation
    Inventors: Steven M. Blair, Pradeep Kasinadhuni, Steve McDaniel, Bradley Jay Katz
  • Patent number: 10066994
    Abstract: A Fabry Perot resonator spacer is provided. The Fabry Perot resonator spaced includes a tetrahedral body, the tetrahedral body being made of a material having a Poisson ratio and defining a plurality of triangular faces, a plurality of edges, and a plurality of corners, wherein each one of the plurality of corners is truncated to form a mounting surface in a mounting plane. The spacer further includes a first mirror channel configured to receive a first optical element, a second mirror channel configured to receive a second optical element, and an optical cavity extending linearly through the tetrahedral body between the first mirror channel and the second mirror channel.
    Type: Grant
    Filed: December 18, 2014
    Date of Patent: September 4, 2018
    Assignee: RAYTHEON COMPANY
    Inventor: Makan Mohageg
  • Patent number: 10054859
    Abstract: A real-time variable parameter micro-nano optical field modulation system includes a light source, a 4F optical system and a set of light wave modulation optical components. The 4F optical system includes a first optical assembly and a second optical assembly arranged along an optical path in sequence. The light wave modulation optical components are arranged between the first optical assembly and the second optical assembly, and generate optical field distribution with adjustable patterns and structural parameters thereof on a back focal plane of the system by segmented modulation of sub-wavefronts.
    Type: Grant
    Filed: January 6, 2016
    Date of Patent: August 21, 2018
    Assignee: SOOCHOW UNIVERSITY
    Inventors: Yan Ye, Fengchuan Xu, Guojun Wei, Yishen Xu, Donglin Pu, Linsen Chen
  • Patent number: 10028039
    Abstract: Assemblies include a micronode having an optical connector, a coaxial connector port and a housing that includes a plurality of mounting bores. The assembly further includes a filter having a housing that underlies the micronode housing, the filter housing including a plurality of mounting bores, the mounting bores of the filter housing aligning with the mounting bores of the micronode housing. The filter further includes a first optical connector configured to receive an optical drop cable, a second optical connector configured to receive an optical cable and an optical pigtail cord that is connected to the optical connector of the micronode.
    Type: Grant
    Filed: November 13, 2015
    Date of Patent: July 17, 2018
    Assignee: ADTRAN, Inc.
    Inventor: Mark O. Vogel
  • Patent number: 9995862
    Abstract: An optical filter includes: a first variable wavelength bandpass filter that can extract light of a first wavelength band (400 to 460 nm), the first wavelength band having a first spectral band having a central wavelength equal to a first wavelength in the first wavelength band and a second spectral band having a central wavelength equal to a second wavelength in the first wavelength band; and a second variable wavelength bandpass filter that can extract light of a second wavelength band (480 to 540 nm) adjacent to the first wavelength band, the second wavelength band having a third spectral band having a central wavelength equal to a third wavelength in the second wavelength band and a fourth spectral band having a central wavelength equal to a fourth wavelength in the second wavelength band.
    Type: Grant
    Filed: September 9, 2015
    Date of Patent: June 12, 2018
    Assignee: Seiko Epson Corporation
    Inventors: Tomonori Matsushita, Tatsuo Urushidani
  • Patent number: 9991969
    Abstract: An optical or optoelectronic receiver and module, and methods of making and using the same, are disclosed. The receiver includes a photodetector, a first microelectromechanical device configured to reflect a multi-wavelength optical signal, a thin film filter configured to receive the multi-wavelength optical signal reflected by the first microelectromechanical device and separate a single-wavelength optical signal from the multi-wavelength optical signal, a first lens configured to focus the single-wavelength optical signal on the photodetector, and a second microelectromechanical device configured to reflect the single-wavelength optical signal towards the first lens. Each wavelength of the multi-wavelength optical signal represents or corresponds to a unique channel over which the receiver receives optical signals. The present receiver and methods enable low-cost, high-volume manufacturing of multi-channel optical or optoelectronic receivers.
    Type: Grant
    Filed: March 23, 2016
    Date of Patent: June 5, 2018
    Assignee: Source Photonics (Chengdu) Co., Ltd.
    Inventors: Jian Yang, Chao Tian, Sheng Z. Zhang, Mark Heimbuch
  • Patent number: 9921100
    Abstract: A photometric device (1) measuring light emitted from a measuring object such as a display (2) includes two types of filters including interference filters (20X, 20Y, and 20Z) and an LVF (21), a disk (22) supporting the interference filters and the LVF, a motor (23) rotatably drive the disk to cause the light emitted from the measuring object to scan the interference filters and the LVF sequentially, a photoreceptor (13) converting light passed through the interference filters and light passed through the LVF to an electrical signal, a photometric controller (14) outputting photometric information based on the electrical signal of the light passed through the interference filters and converted by the photoreceptor and the electrical signal of the light passed through the LVF and converted by the photoreceptor.
    Type: Grant
    Filed: May 18, 2017
    Date of Patent: March 20, 2018
    Assignee: TOPCON TECHNOHOUSE CORPORATION
    Inventor: Yuzo Izaki
  • Patent number: 9912407
    Abstract: An optical relay device is provided which is capable of outputting control signal light without equipping a light source for the control signal light and capable of flexibly managing and changing a wavelength of the control signal light in accordance with a state of a network. The optical relay device includes an optical receiving unit that receives a wavelength multiplexed optical signal, a control unit that specifies a first wavelength and outputting notification information, and a processing unit that selects an optical signal having the first wavelength from the received wavelength multiplexed optical signal, applying intensity-modulation in accordance with the notification information to the selected optical signal, adding the intensity-modulated optical signal back to the wavelength multiplexed optical signal, and outputting the wavelength multiplexed optical signal.
    Type: Grant
    Filed: February 27, 2015
    Date of Patent: March 6, 2018
    Assignee: NEC Corporation
    Inventor: Ryuji Aida
  • Patent number: 9909920
    Abstract: A photometric device (1) measuring light emitted from a measuring object such as a display (2) includes interference filters (20X, 20Y, and 20Z) selectively transmitting a particular wavelength corresponding to a respective one of tristimulus values, an LVF (21) separating and transmitting incident light, a disk (22) supporting the interference filters and the LVF, a motor (23) rotatably drive the disk to cause the light emitted from the measuring object to scan the interference filters and the LVF sequentially, a photoreceptor (13) converting light passed through the interference filters and light passed through the LVF to an electrical signal, and a photometric controller (14) outputting photometric information based on the electrical signal of the light passed through the interference filters and converted by the photoreceptor and the electrical signal of the light passed through the LVF and converted by the photoreceptor.
    Type: Grant
    Filed: May 18, 2017
    Date of Patent: March 6, 2018
    Assignee: Topcon Technohouse Corporation
    Inventor: Yuzo Izaki
  • Patent number: 9874740
    Abstract: A Fabry-Perot tunable filter comprises a membrane device. The membrane device includes a support structure having an optical port. Also, the membrane device has an optical membrane structure separated from the support structure over the optical port. The optical membrane structure includes a center body portion and an outer body portion. Tethers extend radially from the center body portion to the outer body portion of the optical membrane structure. The center body portion has an area that is about equal or smaller than the area of the optical port.
    Type: Grant
    Filed: May 25, 2012
    Date of Patent: January 23, 2018
    Assignee: Axsun Technologies, Inc.
    Inventors: Vaibhav Mathur, Peter S. Whitney, James W. Getz
  • Patent number: 9769554
    Abstract: A semiconductor integrated device, comprising: a package defining an internal space and having an acoustic-access opening in acoustic communication with an environment external to the package; a MEMS acoustic transducer, housed in the internal space and provided with an acoustic chamber facing the acoustic-access opening; and a filtering module, which is designed to inhibit passage of contaminating particles having dimensions larger than a filtering dimension and is set between the MEMS acoustic transducer and the acoustic-access opening. The filtering module defines at least one direct acoustic path between the acoustic-access opening and the acoustic chamber.
    Type: Grant
    Filed: November 17, 2015
    Date of Patent: September 19, 2017
    Assignees: STMICROELECTRONICS (MALTA) LTD, STMICROELECTRONICS S.R.L.
    Inventors: Roberto Brioschi, Silvia Adorno, Kenneth Fonk
  • Patent number: 9678363
    Abstract: The present invention is drawn to an optical article comprising: (a) a photochromic substrate comprising at least one photochromic dye, and (b) an interference coating having a specific gradient thickness providing for a gradient reflectance. It also pertains to a process for making such an optical article.
    Type: Grant
    Filed: September 19, 2014
    Date of Patent: June 13, 2017
    Assignee: ESSILOR INTERNATIONAL (COMPAGNIE GENERALE D'OPTIQUE)
    Inventors: Ker Chin Dave Ang, Andrew Pelayo, Francisco De Ayguavives
  • Patent number: 9678259
    Abstract: An optical filter device includes an interference filter and a housing. The interference filter includes a fixed substrate, a movable substrate joined to the fixed substrate, a fixed reflective film provided on the fixed substrate, and a movable reflective film provided on the movable substrate and opposed to the fixed reflective film across an inter-reflective film gap. The housing includes a base substrate on which the interference filter is arranged. A fixing member is arranged between the movable substrate and the base substrate. The movable substrate is fixed to the base substrate by the fixing member in one place excluding a region where the movable reflective film is provided.
    Type: Grant
    Filed: February 13, 2013
    Date of Patent: June 13, 2017
    Assignee: Seiko Epson Corporation
    Inventors: Yasushi Matsuno, Akira Sano
  • Patent number: 9541752
    Abstract: An optical filter device has a light interference filter and a casing. The light interference filter has a fixed substrate, a movable substrate joined to the fixed substrate, a fixed reflection film provided on the fixed substrate, and a movable reflection film provided on the movable substrate. The casing has a base substrate and a lid that forms an internal space with the base substrate. The movable substrate has a holding portion provided on a surface opposite to the fixed substrate, outside a light interference region, as viewed in a plan view. The base substrate has a light transmission hole corresponding to a light transmission region. An outer peripheral edge of the light transmission hole faces the holding portion. The surface opposite to the fixed substrate of the movable substrate is joined to the base substrate.
    Type: Grant
    Filed: February 3, 2014
    Date of Patent: January 10, 2017
    Assignee: Seiko Epson Corporation
    Inventors: Daisuke Saito, Yasushi Matsuno
  • Patent number: 9459387
    Abstract: An optical filter includes first and second substrates, first and second mirrors, and first and second electrodes. The first substrate has a flat surface. The second substrate includes a first surface, a second surface and a third surface, the second surface surrounding the first surface in a plan view, the third surface surrounding the second surface in a plan view, a height of the first surface above the second surface being lower than a height of the third surface above the second surface, the first surface and the second surface facing the flat surface of the first substrate. The first mirror is disposed on the flat surface of the first substrate. The second mirror is disposed on the first surface of the second substrate, the second mirror facing the first mirror. The first electrode is disposed on the flat surface of the first substrate. The second electrode is disposed on the second surface of the second substrate, the second electrode facing the first electrode.
    Type: Grant
    Filed: December 2, 2014
    Date of Patent: October 4, 2016
    Assignee: Seiko Epson Corporation
    Inventor: Tsukasa Funasaka
  • Patent number: 9377357
    Abstract: A filter includes a fixed substrate, a movable substrate opposed to the fixed substrate, a first reflection film provided on a surface of the fixed substrate facing the movable substrate, a second reflection film provided on the movable substrate and opposed to the first reflection film across a gap, a first electrode provided on the surface of the fixed substrate facing the movable substrate, a second electrode provided on the movable substrate and opposed to the first electrode, bonding parts provided on opposing surfaces of the fixed and movable substrates and bonding the fixed substrate to the movable substrate, and a groove part provided in at least one of the opposing surfaces, and the gap is in communication with an exterior of the filter via the groove part.
    Type: Grant
    Filed: July 13, 2012
    Date of Patent: June 28, 2016
    Assignee: Seiko Epson Corporation
    Inventors: Tomonori Matsushita, Yasushi Matsuno
  • Patent number: 9347887
    Abstract: A wavelength variable interference filter includes a fixed substrate, a movable substrate, a fixed reflective film provided on the fixed substrate, a movable reflection film provided on the movable substrate and opposed to the fixed reflective film via an inter-reflective film gap, a fixed electrode provided on the fixed substrate, a movable electrode provided on the movable substrate and opposed to the fixed electrode via an inter-electrode gap, a fixed charging preventing electrode provided along the outer circumferential edge of the fixed electrode and in non-contact with the fixed electrode and grounded, and a movable charging preventing electrode provided along the outer circumferential edge of the movable electrode and in non-contact with the movable electrode and grounded.
    Type: Grant
    Filed: September 25, 2012
    Date of Patent: May 24, 2016
    Assignee: Seiko Epson Corporation
    Inventors: Nozomu Hirokubo, Akira Sano
  • Patent number: 9348072
    Abstract: An interference filter is fixed with respect to a base substrate by a fixing member which is disposed on one portion which is on the outer side of a filter region. Accordingly, since the periphery end of the interference filter, other than a portion (end portion) in which the fixing member is disposed, becomes a floated state (free end), it is possible to suppress the warping of the interference filter even when there is the difference in coefficients of thermal expansion with the base substrate. Further, spacer portions which are lower than the height of the fixing member are formed outside the filter region and on the portion separated from the fixing member. At the time of the impact, since the spacer portions come in contact with the base substrate to function as stoppers, it is possible to suppress occurrence of peeling-off or cracks on the fixing member.
    Type: Grant
    Filed: December 19, 2013
    Date of Patent: May 24, 2016
    Assignee: Seiko Epson Corporation
    Inventor: Shigemitsu Koike
  • Patent number: 9335537
    Abstract: A variable wavelength interference filter includes a stationary substrate provided with a stationary reflecting film, a movable substrate provided with a movable reflecting film, a first electrostatic actuator, and a second electrostatic actuator which can be driven independently of the first electrostatic actuator, two first partial actuators constituting the first electrostatic actuator have the same shape as each other in the plan view, and are arranged at regular angular intervals and with the same distance with respect to the filter center point, and two second partial actuators constituting the second electrostatic actuator have the same shape as each other in the plan view, and are arranged at regular angular intervals and with the same distance with respect to the filter center point.
    Type: Grant
    Filed: April 17, 2013
    Date of Patent: May 10, 2016
    Assignee: Seiko Epson Corporation
    Inventor: Akira Sano
  • Patent number: 9268144
    Abstract: A method for producing a mirror plate for a Fabry-Perot interferometer includes providing a base slab, which includes a substrate coated with a reflective multilayer coating, forming one or more intermediate layers on the base slab such that the lowermost intermediate layer substantially consists of silica, and such that the multilayer coating is at least partially covered by the lowermost intermediate layer, forming one or more capacitive sensor electrodes by depositing conductive material on top of the intermediate layers, and removing material of the lowermost intermediate layer by etching in order to form an exposed aperture portion of the multilayer coating.
    Type: Grant
    Filed: June 16, 2014
    Date of Patent: February 23, 2016
    Assignee: TEKNOLOGIAN TUTKIMUSKESKUS VTT
    Inventors: Anna Rissanen, Jarkko Antila
  • Patent number: 9234795
    Abstract: A spectroscopic measurement apparatus includes: a wavelength tunable interference filter including a fixed substrate having a fixed reflection film, a movable substrate having a movable reflection film, and an electrostatic actuator that changes a gap value of an inter-reflection-film gap by applying a voltage to bend the movable substrate; a detector that detects a light level; and a controller that measures a spectral characteristic of light under measurement. The controller includes a filter driver that applies a drive voltage to the electrostatic actuator to change the inter-reflection-film gap, a detected light level acquisition unit that acquires light levels detected by the detector, and a target light level acquisition unit that acquires a light level corresponding to an oscillation center of the movable substrate as a target light level based on how the detected light level transitions and a natural oscillation cycle that the movable substrate has.
    Type: Grant
    Filed: October 23, 2012
    Date of Patent: January 12, 2016
    Assignee: Seiko Epson Corporation
    Inventor: Akira Sano
  • Patent number: 9229220
    Abstract: An etalon is provided with a fixed substrate and a movable substrate opposed to the fixed substrate. The fixed substrate is provided with a first bonding surface to be bonded to the movable substrate via a bonding film and a first electrode surface on which a part of the first electrode is formed. The movable substrate is provided with a second bonding surface to be bonded to the first bonding surface via the bonding film and a second electrode surface on which a part of the second electrode is formed. In the state in which the fixed substrate and the movable substrate are bonded to each other with the bonding film, the first electrode formed on the first electrode surface and the second electrode formed on the second electrode surface have contact with each other.
    Type: Grant
    Filed: August 4, 2014
    Date of Patent: January 5, 2016
    Assignee: Seiko Epson Corporation
    Inventors: Akira Sano, Nozomu Hirokubo
  • Patent number: 9134470
    Abstract: An optical filter includes a first substrate, a second substrate that is opposed to the first substrate, a first reflecting section that is disposed between the first substrate and the second substrate, a second reflecting section that is disposed between the first reflection section and the second substrate, a first gap existing between the first reflecting section and the second reflecting section, a first electrode that is disposed between the first substrate and the second substrate, a second electrode that is disposed between the first electrode and the second substrate, a second gap existing between the first electrode and the second electrode, and a third electrode that is disposed between the first substrate and the second electrode. The second gap is larger than the first gap.
    Type: Grant
    Filed: November 13, 2014
    Date of Patent: September 15, 2015
    Assignee: Seiko Epson Corporation
    Inventor: Akira Sano
  • Patent number: 9122140
    Abstract: The disclosure generally relates to refractive polarization converters, polarized color combiners using the refractive polarization converters, and in particular polarized color combiners using the refractive polarization converters that can be useful in small size format projectors such as pocket projectors. The disclosed refractive polarization converters include at least one birefringent prism that can separate an unpolarized light beam into divergent polarized light beams having orthogonal polarization directions.
    Type: Grant
    Filed: December 22, 2011
    Date of Patent: September 1, 2015
    Assignee: 3M Innovative Properties Company
    Inventor: Andrew J. Ouderkirk
  • Patent number: 9110055
    Abstract: A nanocoaxial sensor includes an outer conductor, an inner conductor, a dielectric material disposed between the outer and inner conductors, a nanocavity sized to allow target species to enter the nanocavity between the outer and inner conductors, and an active sensing element immobilized within the nanocavity on at least one of the inner or outer conductors. The active sensing element is adapted to selectively capture the at least one of the target species.
    Type: Grant
    Filed: November 16, 2007
    Date of Patent: August 18, 2015
    Assignee: The Trustees of Boston College
    Inventors: Dong Cai, Thomas Chiles, Krzysztof Kempa, Michael Naughton, Zhifeng Ren, Paudel Trilochan
  • Publication number: 20150138640
    Abstract: An optical filter device includes a variable wavelength interference filter having a pair of reflecting films opposed to each other, and an electrostatic actuator adapted to change a gap dimension between the pair of reflecting films, and at least one bandpass filter disposed on an optical axis of the pair of reflecting films, and the bandpass filter includes a plurality of transmission wavelength bands in which light is transmitted.
    Type: Application
    Filed: November 18, 2014
    Publication date: May 21, 2015
    Inventor: Tomonori MATSUSHITA
  • Patent number: 9030403
    Abstract: A pixel circuit includes a first control electrode and a second control electrode between which a mechanical shutter is put, and a first control voltage application circuit for inputting a first control voltage to the first control electrode according to an image signal. The first control voltage application circuit includes an input transistor, a retaining capacitor and a first transistor. One of current terminals of the input transistor is connected to a signal line. A gate of the input transistor is connected to a scanning line. One terminal of the retaining capacitor is input with a capacitor control signal and the other terminal is connected to the input transistor. The first transistor has a gate connected to the retaining capacitor and two current terminals, one of which is connected to a first control electrode and the other of which is input with a first control signal.
    Type: Grant
    Filed: October 12, 2012
    Date of Patent: May 12, 2015
    Assignee: Pixtronix, Inc.
    Inventors: Hajime Akimoto, Toshio Miyazawa
  • Patent number: 9030743
    Abstract: An optical filter includes: a first substrate; a second substrate opposed to the first substrate; a first reflecting film provided to the first substrate; a second reflecting film provided to the second substrate and opposed to the first reflecting film; a first electrode provided to the first substrate in a peripheral area of the first reflecting film; a second electrode provided to the first substrate in a peripheral area of the first electrode; a third electrode provided to the second substrate and opposed to the first electrode; and a fourth electrode provided to the second substrate and opposed to the second electrode.
    Type: Grant
    Filed: March 2, 2011
    Date of Patent: May 12, 2015
    Assignee: Seiko Epson Corporation
    Inventor: Akira Sano
  • Publication number: 20150124324
    Abstract: A wavelength variable interference filter includes: a first movable mirror disposed on a first substrate; a second movable mirror disposed so as to be opposed to the first movable mirror with a predetermined gap interposed therebetween; and an electrostatic actuator which varies the length of the gap between the mirrors. The first substrate has a first movable portion on which the first movable mirror is disposed, and a first linkage portion which holds the first movable portion in such a manner that the first movable portion can shift in the thickness direction of the substrate. The second substrate has a second movable portion on which the second movable mirror is disposed, and a second linkage portion which holds the second movable portion in such a manner that the second movable portion can shift in the thickness direction of the substrate.
    Type: Application
    Filed: January 7, 2015
    Publication date: May 7, 2015
    Inventors: Nozomu HIROKUBO, Koji KITAHARA
  • Patent number: 9019611
    Abstract: An optical module (colorimetry sensor) includes an interference filter, and a transparent substrate to which a first substrate of the interference filter is fixed, having a second thermal expansion coefficient which has a value different from a first thermal expansion coefficient. The interference filter is fixed to the transparent substrate through an adhesive layer made of gel-like resin, and the adhesive layer alleviates stress generated due to a difference in the thermal expansion coefficients between the interference filter and the transparent substrate.
    Type: Grant
    Filed: April 24, 2014
    Date of Patent: April 28, 2015
    Assignee: Seiko Epson Corporation
    Inventor: Kazunori Sakurai
  • Publication number: 20150103343
    Abstract: An apparatus for performing spectroscopy incorporates, between an EM source and a detector, an optical filter comprising a pair of mirrors opposed along the optical axis and shaped to provide an optical cavity with stable resonance and having a cavity length of at most 50 ?m and a mode at a wavelength within said band of wavelengths for bandpass filtering EM radiation passing therethrough. The actuator system is arranged to move the mirrors relative to each other along the length of the optical cavity for tuning the wavelength of said mode.
    Type: Application
    Filed: May 3, 2013
    Publication date: April 16, 2015
    Applicant: ISIS INNOVATION LIMITED
    Inventors: Jason Michael Smith, Claire Vallance
  • Patent number: 9007687
    Abstract: Methods and apparatus for providing a tunable absorption-emission band in a wavelength selective device are disclosed. A device for selectively absorbing incident electromagnetic radiation includes an electrically conductive surface layer including an arrangement of multiple surface elements. The surface layer is disposed at a nonzero height above a continuous electrically conductive layer. An electrically isolating intermediate layer defines a first surface that is in communication with the electrically conductive surface layer. The continuous electrically conductive backing layer is provided in communication with a second surface of the electrically isolating intermediate layer. When combined with an infrared source, the wavelength selective device emits infrared radiation in at least one narrow band determined by a resonance of the device. In some embodiments, the device includes a control feature that allows the resonance to be selectively modified.
    Type: Grant
    Filed: December 23, 2013
    Date of Patent: April 14, 2015
    Assignee: FLIR Systems, Inc.
    Inventors: Irina Puscasu, Edward A. Johnson
  • Publication number: 20150092272
    Abstract: A variable wavelength interference filter includes a stationary substrate, a stationary reflecting film disposed on the entire surface of the stationary substrate opposed to a movable substrate, and formed of a multilayer film, a movable reflecting film opposed to the stationary reflecting film, and a first mirror electrode disposed on the stationary reflecting film.
    Type: Application
    Filed: September 15, 2014
    Publication date: April 2, 2015
    Inventors: Susumu SHINTO, Akira SANO