Abstract: A deformable mirror is provided that can include a mirror assembly having a reflective face sheet with a reflective surface on a front side of the reflective face sheet. The mirror assembly can also comprise one or more ferrous materials positioned within and making up or forming, in part, the mirror assembly. The deformable mirror can also include one or more electromagnets operable to generate a magnetic field that acts on the ferrous materials to deform the reflective face sheet.

Abstract: A 3D-printed reflective optic providing very high specific stiffness through the utilization of a hollow shelled design, with closed back, filled with high-stiffness internal volumetric space-filling open-cell lattice structures. Structurally-integrated sacrificial structures are included for the purposes of reduction or elimination of tooling during post-processing operations.

Abstract: A telescope including a fastener plate, a primary mirror carried by a front face of the plate, and a secondary mirror held facing the primary mirror by a support, wherein the support includes a primary sleeve mounted around the primary mirror, a secondary sleeve mounted around the secondary mirror, and arms connecting the secondary sleeve to the primary sleeve, and in that the arms are curved towards the primary mirror.

Abstract: A quartz glass plate has a quartz glass plate body and a quartz glass member adhered to the quartz glass plate body through an adhesive layer, where the adhesive layer contains silica, and a sum of concentrations of Li, Na, and K ions, being alkali metal ions and Ca ions, being alkaline earth metal ions contained in the adhesive layer is 10 ppm by mass or less. Consequently, a step with a uniform thickness can be formed, and a quartz glass plate is not easily damaged by irradiation with a light containing an ultraviolet ray.

Abstract: A system for fastening a mirror to a support is disclosed including intermediate structures, for example bipod structures. At least some of the intermediate structures are provided with torsion devices making it possible to at least partially compensate for optical aberrations of an instrument that includes the mirror. Each torsion device may comprise an elastic element and a variator. The variator is designed to control a deformation of the elastic element, resulting in a torque which is applied to the mirror.

Abstract: A laminate including a glass plate and a coating layer, wherein the coating layer includes one or more components selected from the group consisting of silicon nitride, titanium oxide, alumina, niobium oxide, zirconia, indium tin oxide, silicon oxide, magnesium fluoride, and calcium fluoride, wherein a ratio (dc/dg) of a thickness dc of the coating layer to a thickness dg of the glass plate is in a range of 0.05×10?3 to 1.2×10?3, and wherein a radius of curvature r1 of the laminate with negating of self-weight deflection is 10 m to 150 m.

Abstract: A dispersive element is provided with a dispersive crystal for spectrally dispersing X-rays, a first support layer supporting the dispersive crystal, and a second support layer supporting the first support layer. The first support layer is greater in a thermal expansion coefficient than the dispersive crystal. The second support layer is smaller in a thermal expansion coefficient than the first support layer and is greater in rigidity than the first support layer.

Abstract: A method for assembling a vehicular interior rearview mirror assembly includes providing a mirror mount, a mirror casing, a mirror reflective element at the mirror casing, and a toggle mechanism, which includes a body portion and a toggle lever joined to the body portion. A lower pivot mount of the toggle mechanism is inserted into a lower receiving portion of the mirror casing and an upper pivot mount of the toggle mechanism is inserted into an upper receiving portion of the mirror casing. An outer surface of the body portion corresponds with adjacent outer surfaces of the mirror casing. With a pivot element of the toggle mechanism attached at the mirror mount, and when the toggle lever pivots relative to the lower receiving portion of the mirror casing, the mirror casing pivots relative to the body portion to flip the mirror head between a first orientation and a second orientation.

Abstract: A laminate including a glass plate and a coating layer, wherein the coating layer includes one or more components selected from the group consisting of silicon nitride, titanium oxide, alumina, niobium oxide, zirconia, indium tin oxide, silicon oxide, magnesium fluoride, and calcium fluoride, wherein a ratio (dc/dg) of a thickness dc of the coating layer to a thickness dg of the glass plate is in a range of 0.05×10?3 to 1.2×10?3, and wherein a radius of curvature r1 of the laminate with negating of self-weight deflection is 10 m to 150 m.

Abstract: In an observation method, measurement values of an object of measurement at a plurality of different positions in a plane that intersects a depth direction are acquired from an optical coherence tomography instrument (S100). In the observation method, measurement values are integrated in the depth direction at each of the plurality of positions (S104). In the observation method, a shrinkage parameter of the object of measurement is calculated on the basis of the integrated values at each of the plurality of positions (S105).

Abstract: In an observation method, measurement values of an object of measurement at a plurality of different positions in a plane that intersects a depth direction are acquired from an optical coherence tomography instrument (S100). In the observation method, the measurement values at a same depth position at each of the plurality of positions are averaged (S104). In the observation method, the average values at each of the depth positions are integrated in the depth direction (S105). In the observation method, a shrinkage parameter of the object of measurement is calculated on the basis of the integrated value (S106).

Abstract: A mirror holding structure includes: a holder; at least one protrusion part provided to one of a mirror body and the holder; at least one reception part provided to the other of the mirror body and the holder and having an insertion hole in which the at least one protrusion part is to be inserted; and at least one elastic part located between an outer peripheral surface of the at least one protrusion part and an inner peripheral surface of the insertion hole and being elastic.

Abstract: An optical scanning device includes a mirror that includes a mirror reflection surface, and torsion bars that support the corresponding sides of the mirror and cause the mirror to rotate. The torsion bars are formed of a silicon active layer whose surface is exposed.

Abstract: An optical element serves for the beam guidance of imaging light in projection lithography. The optical element has a main body and at least one optical surface carried by the main body. At least one coupling unit is arranged on the main body. The coupling unit serves to attach a compensation weight element for compensating a figure deformation of the optical surface. The result is an optical element which can be provided at the use location with a relatively small figure deformation.

Abstract: A method of manufacturing the curved display device includes a process of manufacturing a cover glass assembly by attaching a transparent polymer film to the back surface of a thin film glass of a flat plate, a process of bending and inserting the cover glass assembly into a curved cavity of a mold and then molding an edge member so as to be integrated with an edge portion of the cover glass assembly to maintain the cover glass assembly in a bent state, and a process of attaching a flexible display panel to the back surface of the cover glass assembly in a curved state after molding the edge member. The curved display device includes a cover glass assembly, an edge member to maintain the cover glass assembly in a bent state, and a flexible display panel attached to the back surface of the cover glass assembly.

Abstract: An optical arrangement of a microlithographic projection exposure apparatus includes a mirror element having a mirror substrate, and a reflection region formed on a surface of the mirror substrate. The arrangement also includes at least one actuator configured to move the mirror element in at least one degree of freedom, and a mounting element, which acts on the mirror substrate. The mounting element alone holds the mirror element at least approximately in an equilibrium position, such that the at least one actuator is at least approximately free of forces in the equilibrium position.

Abstract: The present invention is primarily directed to cost-effective systems for using large reflective elements that track the sun on two axes to concentrate solar energy onto a receiver that can convert the sun's optical energy to a form usable for extensive displacement of combustion of fossil fuels. The structures of the tracker frame, tracking mechanism and tracker supports are co-optimized with the optical elements and the receiver for high efficiency, low cost, and ease of assembly, making moderate and large-scale implementations cost-competitive with fossil fuels for peak power, and, with suitable storage, for base-load power and dispatchable peaking power in sunny locations. Improvement to small-tracker two-axis systems and one-axis tracking systems that focus in two dimensions are also included, as are improvements in systems for space-based solar power.

Abstract: The present invention discloses a solar panel mirror unit (1) being shaped, such as curved, and having a sandwich structure, said sandwich structure comprising an outermost front reflecting layer (2), intended as the sun reflecting layer and therefore having a reflective coating, said outermost front reflecting layer (2) consisting of a first material having a first thermal expansion coefficient, an intermediate layer (4) having a honeycomb structure and being the core of the sandwich structure, and an innermost rear layer (5) consisting of a second material having a second thermal expansion coefficient, wherein said first and second thermal expansion coefficients are equal or substantially equal.

Abstract: A honeycomb structure comprises a front part and a rear part. The front and rear parts are honeycomb structures composed of a skin and of stiffeners as a single component, the stiffeners being formed of intermeshing blades oriented substantially perpendicularly to said skin. The two parts comprise protuberances on the stiffeners on the face opposite to the skin and these protuberances are disposed on the front and rear parts in such a manner that each protuberance of the front part is located opposite a protuberance of the rear part when the two parts are superposed. The two parts are assembled by attachment devices into which two opposing protuberances are inserted.

Abstract: A telescope, mirror assembly and method of forming an aspheric mirror is disclosed. The telescope includes the mirror assembly which has a substantially spherical surface contour in a relaxed state. A plurality of actuators distributed substantially along an outer edge of the mirror is configured to apply a load to the mirror assembly to deform the mirror to obtain a substantially aspheric surface contour.

Abstract: A solar energy collection system can include improved mounting hardware for reducing hardware costs and labor required for assembly. For example, mounting hardware can include surfaces for supporting part or all of the weight of a solar module as it is brought into contact with mounting hardware and then moved into a final engaged position. In some systems, a torque tube can include saddle mount assemblies that allow a solar module to be partially engaged and a registered with the saddle mount while being pivoted into a final locked engagement. Some systems can include arrangements sufficient to support the full weight of a solar module in a disengaged position, and as it is moved into a final engaged position. Some systems can include a configuration of apertures and interference or snap-fit features for providing tool-less connections, thereby simplifying the assembly process.

Abstract: A reflective optical element for a microlithographic projection exposure apparatus, a mask inspection apparatus or the like. The reflective optical element has an optically effective surface, an element substrate (12, 32, 42, 52), a reflection layer system (14, 34, 44, 54) and at least one deformation reduction layer (15, 35, 45, 55, 58). When the optically effective surface (11, 31, 41, 51) is irradiated with electromagnetic radiation, a maximum deformation level of the reflection layer system is reduced in comparison with a deformation level of an analogously constructed reflective optical element without the deformation reduction layer.

Abstract: A device serves for controlling temperature of an optical element provided in vacuum atmosphere. The device has a cooling apparatus having a radiational cooling part, arranged apart from the optical element, for cooling the optical element by radiation heat transfer. A controller serves for controlling temperature of the radiational cooling part. Further, the device comprises a heating part for heating the optical element. The heating part is connected to the controller for controlling the temperature of the heating part. The resulting device for controlling temperature in particular can be used with an optical element in a EUV microlithography tool leading to a stable performance of its optics.

Abstract: A multi-layer mirror comprising a front plate, a backing plate and spacers coupled between the front plate and the backing plate. The spacers are closely packed with one another and arranged in a manner where adjacent spacers contact one another and packing spaces are defined between groups of spacers in contact with one another. Each of the spacers comprises a plurality of ventilation holes extending between a bore of the spacer and an exterior of the spacer. For each spacer, the plurality of ventilation holes comprises a first ventilation hole in fluid communication with a first packing space defined at least in part by the spacer and a second ventilation hole, spaced apart from the first ventilation hole and in fluid communication with a second packing space defined at least in part by the spacer.

Abstract: In a substrate, particularly in a substrate for a mirror support, in which recesses are introduced in one surface, preferably in the back side of the substrate, as a result of which, in particular, bridging pieces are defined between the recesses, in order to achieve the situation that despite a reduced weight, a high rigidity still remains, which means only a slight sagging after its correct uptake in a holding device provided for it, it is provided that at least one first portion of the bridging pieces has a width that is different than a second portion of the bridging pieces.

Abstract: The present invention discloses a solar panel mirror unit (1) being shaped, such as curved, and having a sandwich structure, said sandwich structure comprising an outermost front reflecting layer (2), intended as the sun reflecting layer and therefore having a reflective coating, said outermost front reflecting layer (2) consisting of a first material having a first thermal expansion coefficient, an intermediate layer (4) having a honeycomb structure and being the core of the sandwich structure, and an innermost rear layer (5) consisting of a second material having a second thermal expansion coefficient, wherein said first and second thermal expansion coefficients are equal or substantially equal.

Abstract: An optical element includes a monolithic body portion, the monolithic body portion having an inner body portion, an outer body portion extending at least partially around the inner body portion, and exactly three flexural hinges connecting the inner body portion to the outer body portion. One of the inner body portion and the outer body portion defines an optical active portion configured to reflect, refract, or diffract light, and the other of the inner body portion and outer body portion defines a mount portion.

Abstract: An optical module includes a chamber capable of being evacuated and a mirror in the chamber. The mirror includes a plurality of individual mirrors. Each individual mirror includes: a mirror body including a reflection face; a support structure; and a thermally conductive portion that mechanically connects the support structure to the mirror body. For at least one individual mirror, the thermally conductive portion includes a plurality of thermally conductive strips arranged radially, adjacent thermally conductive strips being separated from each other, and each of the plurality of thermally conductive strips connecting the mirror body to the support structure. For at least one individual mirror, an actuator is associated with the mirror body, the actuator being configured to displace the mirror body relative to the support structure in at least one degree of freedom.

Abstract: An optical system including an optical element, a positioning mechanism configured to position the optical element into an operational position, and a temperature control mechanism configured to intermittently control the temperature of the optical element between operations. By alternatively positioning the optical element between an operational position and a position in thermal contact with the temperature control mechanism, the two mechanisms for positioning and controlling the temperature of the optical element are de-coupled from one another. As a result, the mechanism for each may be optimized In non-exclusive embodiments, the temperature control mechanism may be used to control the temperature of an individual optical element or a plurality of optical elements, such as for example, a fly's eye mirror used in an illumination unit of an EUV lithography tool.

Abstract: A projection objective for a microlithographic EUV projection exposure apparatus includes a first mirror and a second mirror. The first mirror includes a mirror substrate and a reflective coating carried by the mirror substrate. The second mirror includes a mirror substrate and a reflective coating carried by the mirror substrate. The first and second mirrors are configured so that, with otherwise equal irradiation by EUV light, the mirror substrate of the first mirror compacts less than the mirror substrate of the second mirror under the effect of the EUV light.

Abstract: A frame for optics used in interferometers that may include different materials having substantially similar, identical, or as close as practicable coefficients of thermal expansion from the material(s) used to make the beamsplitter and/or compensator without warping, bending, tilting or distorting the optics. The beamsplitter and/or compensator are mounted onto the frame of the interferometer using a three-point method of mounting, preferably using three pins for each component. Preferably, the pins are made of the same material as the beamsplitter and compensator, and all three components are made of Potassium Bromide (“KBr”) or Calcium Fluoride (“CaF2”) such that the optic instrument can operate to scan into the mid or far infrared. Stability in optical alignment is therefore achieved without requiring the optic instrument include only one material. The invention provides stability in situations where it is not possible to utilize a single material for every component of the interferometer.

Abstract: Ribbed mirrors allowing heat to be conducted past the glass during optical polish and application of coatings and methods of fabricating same. The method comprises placing a bridge of thermally conductive material in thermal contact with the mirror plate and the supporting rib at the interior angle. The preferred thermally conductive material is room temperature vulcanizing silicone. However, the room temperature vulcanizing silicone can be mixed with a powdered heat conductor such as diamond dust, aluminum oxide and silicon carbide. Alternatively, the thermally conductive fillet can be made from a segment of thermally conductive rigid material, such as copper, diamond, beryllium, silver and aluminum having an exterior angle matching the interior angle and a thermally conductive plastic such as room temperature vulcanizing silicone or thermally conductive grease, silicone or epoxy applied to surfaces of the exterior angle.

Abstract: Provided are a resinous reflecting optical element that achieves high mirror surface precision by mitigating the warping effects associated with contraction during resin hardening and suppressing the distortion of a mirror surface that results from resistance to mold release, and a scanning optical device that uses said reflecting optical element.

Abstract: A mirror and method for making the mirror are described. The mirror includes at least three layers. The first layer has an outer surface and an opposed inner surface, the outer surface being a reflective surface. The second layer is positioned between the inner surface of the first layer and an inner surface of a third layer. The second layer includes a structural member adhered to the inner surface of the first layer and to the inner surface of the third layer and is configured to resist changes in geometry of the first layer. The third layer has an outer surface opposed to the inner surface, and is formed from a material having properties and dimensions such that temperature induced changes in geometry of the first layer are substantially the same as temperature induced changes in geometry of the third layer.

Abstract: Briefly, in accordance with one or more embodiments, a scanner for a scanned beam display may comprise a scanning platform having a mirror disposed thereon to reflect a beam of light impinging on the mirror, a drive coil disposed on the scanning platform to scan the reflected beam of light in response to a drive current applied to the drive coil. The drive coil has coil winding segments having a narrower width in one or more regions of the drive coil, and has coil winding segments having a greater width in one or more other regions of the drive coil to provide a the drive coil with a reduced electrical resistance.

Abstract: A fundamental limit to the sensitivity of optical interferometry is thermal noise that drives fluctuations in the positions of the surfaces of the interferometer's mirrors, and thereby in the phase of the intracavity field. A scheme for substantially reducing this thermally driven phase noise is provided in which the strain-induced phase shift from a mirror's optical coating cancels that due to the concomitant motion of the substrate's surface. As such, although the position of the physical surface may fluctuate, the optical phase upon reflection can be largely insensitive to this motion.

Abstract: A structure such as an electronically deformable mirror contains a deformable membrane, an array of actuators located facing the membrane, each actuator being arranged to actuate local displacement of the membrane perpendicular to its surface. The actuators and the membrane are connected via an array of actuating connections. The actuating connections substantially transmit movement perpendicular to the second surface, but leave planar displacement and/or local rotation of the second surface substantially free. Preferably, the actuators contain an array of soft magnetic islands on a soft magnetic base plane, with actuator coils running around the islands and a system of sort magnetic walls on the base plane to separate the coils. The walls support a soft magnetic resilient surface that extend over of the islands and serve to drive the actuating connections.

Abstract: A MEMS vertical displacement device for vertically displacing and tilting a vertically displaceable platform. The vertically displaceable platform may be displaced using a plurality of recurve actuators configured to provide vertical displacement without horizontal movement. The vertically displaceable platform may be tilted about two axes to yield tilting that is advantageous in numerous applications. The recurve actuators may be thermal, piezoelectric or formed from other appropriate materials.

Abstract: The invention relates to an adaptive mirror based on a ceramic substrate having a corresponding reflector and piezoelectric actuators, a cooling device being integrated in the substrate. The invention likewise relates to a method for the production of such mirrors. The mirrors according to the invention are used for the modulation or deformation of a laser wavefront of high power.

Abstract: The present invention relates to the production of an adaptive deformable mirror for compensation of defects of a wavefront.

Abstract: A temperature-control device is used for controlling the temperature of an optical assembly with at least one optical body, the temperature of which is to be controlled, with at least one optical surface which can be acted upon by a heat flow. The temperature-control device has a heat sink to receive a heat flow, which is emitted by the optical body or a transmission body which is in thermal connection with the optical body. The heat sink is arranged adjacent to a peripheral region of the optical surface. The temperature-control device has a heating mechanism with at least one heating body, which is arranged adjacent to the optical body. The heating body is connected via a physical heat bridge to the heat sink.

Abstract: An optics element, such as an optical, IR, or X-ray mirror or mirror segment, is made by a combination of replication and lamination by depositing a first metallic layer on a replicating surface of a master or mandrel, depositing a light weight backing layer that adheres on the first metallic layer, and depositing a cover layer that adheres on the backing layer whereby the optics element comprises an in-situ deposited composite lamination of the first metallic layer, the backing layer, and the cover layer.

Abstract: The invention relates to an optical element for guiding and forming a laser beam, and to a method for recording beam parameters, particularly in a laser system, comprising a carrier substrate (40) and a coating (39), which is applied to at least one side of the carrier substrate (40), and comprising at least one temperature sensor (38). The temperature sensor (38) is comprised of a number of pixels arranged in a matrix, and each respective pixel has at least one temperature-sensitive element (39). The at least one temperature-sensitive element (39) of the pixel is constructed inside the carrier substrate (40) made of silicon.

Abstract: A light pulse multiprocessing unit has a half mirror and N delay elements, each having a refractive index n. The N delay elements are arranged on one side of the half mirror from one end of the half mirror toward the other end and have thicknesses ?, 2?, . . . , 2N?1? different from each other, where ? is the smallest thickness. The half mirror is placed in parallel in the proximity of an intermediate position between two mirrors and the N delay elements are arranged between one of the mirrors and the half mirror. Each of the N delay elements is a plane-parallel plate and is placed at an angle such that the direction of the normal line of the surface of the plane-parallel plate is different from a direction followed from one end of the half mirror toward the other end.

Abstract: A light-weight mirror blank assembly, having at least one sheet of corrugated material; and at least one face sheet in intimate contact with a surface of the sheet of corrugated material forming the light-weight mirror blank assembly. The light-weight mirror blank assembly has an areal density less than an equivalent blank assembly having a solid support structure for supporting a mirrored surface.

Abstract: A solar heliostat and system are described with various characteristics particularly suitable for concentrating systems with a relatively large number of small heliostats. Other features contribute to high performance, low cost, high durability, and high temperature operation, such as desired for high efficiency thermal power generation.

Abstract: A radius of curvature controlled mirror for controlling precisely the focal point of a laser beam or other light beam. The radius of curvature controlled mirror provides nearly spherical distortion of the mirror in response to differential expansion between the front and rear surfaces of the mirror. The radius of curvature controlled mirror compensates for changes in other optical components due to heating or other physical changes. The radius of curvature controlled mirror includes an arrangement for adjusting the temperature of the front surface and separately adjusting the temperature of the rear surface to control the radius of curvature. The temperature adjustment arrangements can include cooling channels within the mirror body or convection of a gas upon the surface of the mirror. A control system controls the differential expansion between the front and rear surfaces to achieve the desired radius of curvature.

Abstract: The invention relates to an optical instrument (1) comprising at least one mirror called the primary mirror (3), placed in a cavity (2) and comprising an active face capable of being subjected to instantaneous variations of the incident radiative flux. According to the invention, the cavity (2) comprises a rigid internal casing (20) around the mirror consisting of a material having a thermal inertia so as to damp the instantaneous variations of the incident radiative flux thereby making it possible to limit the temperature fluctuations of this cavity and, consequently, the temperature fluctuations of the mirror. The invention applies to the space field.

Abstract: A table comprising a base and a plurality of support members supported by the base is used to shape a mirror. The height of the plurality of support members is adjusted to form a predetermined shape. A mirror is placed over the plurality of support members, such that the mirror assumes the predetermined shape. A frame is then attached to the mirror such that when the mirror and frame are lifted off the table, the mirror substantially retains the predetermined shape.

Abstract: A mirror module for fastening to a structural element, comprises a mirror arrangement that includes at least one mirror stack and a first receiving device for holding the mirror arrangement. Each of the at least one mirror stack comprises at least one individual mirror made of a first material. The first receiving device is made of a second material which has a coefficient of thermal expansion adapted to the first material. For fastening the mirror module to the structural element, a second receiving device made of Invar is provided which holds the first receiving device of the mirror module.