Abstract: An interferometric modulator comprising a substrate, a movable membrane and one or more stiction bumps disposed between the substrate and the movable membrane. The stiction bumps are configured to mitigate stiction between the substrate and the movable membrane.

Abstract: A reflective material is heated to reduce internal stress, and then a capping layer is formed over the reflective material. Heating the reflective material reduces the internal stress of the reflective material. Because the reflective material has reduced internal stress, a more continuous, stable and reliable capping layer is formed that is not subject to stress induced degradation over time due to the relaxing internal stress of the underlying reflective material. Thus, the capping layer remains intact and protects the reflective material residing beneath the capping layer from exposure to contaminants.

Abstract: A method for manufacturing a multilayer mirror that includes a substrate and a multilayer film formed on the substrate, and has a reflection surface shape includes the steps of estimating a surface shape variation amount as a difference between a surface shape of the substrate before the multilayer film is formed on the substrate and a surface shape of the multilayer mirror after the multilayer film is formed on the substrate, processing the surface shape of the substrate into a shape generated by subtracting the surface shape variation amount from the reflection surface shape, and forming the multilayer film on the substrate processed by the processing step.

Abstract: A deflector mirror is disclosed that includes a mirror substrate configured to vibrate in a reciprocating manner on beams as a torsional rotary shaft so as to deflect a light beam emitted from a light source. The mirror substrate includes multiple regions in each of portions thereof extending from the torsional rotary shaft to respective ends of the mirror substrate, the regions being different in flexural rigidity.

Abstract: An optical subassembly with an optical element, for example a mirror element (7), has an optical surface (9) and bearing points (12) arranged on the circumference. The optical element (7) is connected to a mount (13) at the bearing points (12) via connecting elements (14, 15, 16, 17, 18). Stress-decoupling cutouts, for example curved slots (11), are provided between the optical surface (9) and the bearing points (12).

Abstract: Briefly, in accordance with one or more embodiments, a MEMS device may comprise a coil frame having a drive coil disposed thereon and being supported by one or more suspension arms disposed along an axis of the coil frame, and a mirror platform having a mirror disposed thereon. The mirror platform may be coupled to the coil frame at connection points generally disposed along the axis in order to reduce deflection of the mirror platform to reduce stress on the mirror in order to maintain the relative flatness of the mirror surface. Furthermore, the mirror platform may include flexible members disposed near an edge of the mirror platform generally along the axis to isolate the mirror platform and the mirror from warping of the coil frame and twist of the suspension arms to further maintain the relative flatness of the mirror.

Abstract: A light-weight mirror blank assembly, having at least one sheet of corrugated material; and at least one face sheet in intimate contact with a surface of the sheet of corrugated material forming the light-weight mirror blank assembly. The light-weight mirror blank assembly has an areal density less than an equivalent blank assembly having a solid support structure for supporting a mirrored surface.

Abstract: A mirror structure includes a mirror, a reflective face, a cut in the mirror under the face, and a torsion arm attached to the mirror. Such a mirror structure often distorts a scanned image less than prior mirror structures because the cut uncouples the twist-induced strain in the torsion arm from the mirror face, and thus reduces the level of deformation that this strain imparts to the mirror face. Another mirror structure includes a base formed from a first material, a mirror attached to the base and formed from a second material, and a torsion arm attached to the base. Such a composite mirror structure often distorts a scanned image less than prior mirror structures because it reduces the acceleration-induced bending of the mirror and/or the twist-induced strain in the torsion arm, and thus reduces the level of deformation that this bending and/or strain impart to the mirror face.

Abstract: A lightweight mirror comprises a plurality of plates including an optical plate, a backing plate, spacer plates, and, if needed, one or more reinforcing plates. The plates are joined to one another thereby forming a unitary structure. The unitary structure comprising the plates is then formed into a predetermined optical mirror configuration.

Abstract: A method of making a mirror structure includes assembling a supporting isogrid framework, assembling an isogrid back plane, interconnecting the supporting isogrid framework with the isogrid back plane by a truss core, and disposing an optical surface on the supporting isogrid framework.

Abstract: Ribbed mirrors allowing heat to be conducted past the glass during optical polish and application of coatings and methods of fabricating same. The method comprises placing a bridge of thermally conductive material in thermal contact with the mirror plate and the supporting rib at the interior angle. The preferred thermally conductive material is RTV silicone. However, the RTV silicone can be mixed with a powdered heat conductor such as diamond dust, aluminum oxide and silicon carbide. Alternatively, the thermally conductive fillet can be made from a segment of thermally conductive rigid material, such as copper, diamond, beryllium, silver and aluminum having an exterior angle matching the interior angle and a thermally conductive plastic such as RTV silicone or thermally conductive grease, silicone or epoxy applied to surfaces of the exterior angle.

Abstract: Device of layered structures for optical reflectors and method for making the device. A device for providing environmental stability and mechanical integrity in space includes a substrate and a first silicon oxynitride layer on the substrate. The first silicon oxynitride layer has a tensile stress. Additionally, the device includes a second silicon oxynitride layer on the first silicon oxynitride layer. The second silicon oxynitride layer has a compressive stress.

Abstract: An apparatus and method for mitigating a cold edge effect within a lithography mirror is presented. The apparatus includes a heated annular zone formed on a substrate and a heated optical aperture zone formed on the heated annular zone, where each zone includes a resistive layer, and where the resistive layer of at least one zone is produced such that electrical conductivity varies by increasing from the center of the resistive layer to the periphery of the resistive layer. A wiring layer in each zone includes an insulating sublayer and contacts for coupling to a power supply. A time-constant heat load on the lithography mirror is maintained by placing additional electrical heat loads on the mirror according to the actinic heat load on the mirror. Maintaining the time-constant heat load can reduce or eliminate variation in image distortion that occurs as a result of changes in the actinic heat load.

Abstract: An object of the invention is to provide a mirror fixing method capable of reducing stress distortion of a surface of a mirror which constitutes an optical system, with hardly deforming a surface shape of the mirror. To this end, the present mirror fixing method is characterized in that a mirror part including a base plate formed with a mirror on one face thereof, is provided with a boss on the other face of the base plate opposite to the face on which the mirror is formed, and only the boss is fixed, so that the mirror part excluding the boss is not in contact with other members.

Abstract: An apparatus controls positions of plural mirror segments in a segmented mirror with an edge sensor system and a controller. Current mirror segment edge sensor measurements and edge sensor reference measurements are compared with calculated edge sensor bias measurements representing a global radius of curvature. Accumulated prior actuator commands output from an edge sensor control unit are combined with an estimator matrix to form the edge sensor bias measurements. An optimal control matrix unit then accumulates the plurality of edge sensor error signals calculated by the summation unit and outputs the corresponding plurality of actuator commands. The plural mirror actuators respond to the actuator commands by moving respective positions of the mirror segments. A predetermined number of boundary conditions, corresponding to a plurality of hexagonal mirror locations, are removed to afford mathematical matrix calculation.

Abstract: The present invention provides methods and apparatus for combining a pivoting mirror and support bracket such that the support bracket transmits little or no stresses to the torsional hinges of the mirror. The bracket includes an isolation slot extending from one edge toward a second edge and then preferably around the mounting areas of the hinge such that stresses applied to the mounting bracket will not be transmitted to each side of the mirror and thereby stress the mirror.

Abstract: An image display device includes a case having an opening, a luminous source image display displaying a first image, a focusing element receiving light from the source image display and focusing the light to form a second image that is viewable through the opening of the case, and an image source providing image information to the source image display so that the source image display displays the first image. The focusing element has a concave mirror and a mirror supporter that supports the concave mirror. The perimeter of the concave mirror has at least one straight- cut portion that has a line contact with the mirror supporter. The image information provided by the image source is changed with user interaction.

Abstract: A mirror, in particular an adaptive mirror configured as a laser beam guidance component. The mirror comprises a housing, to which a mirror element that is optionally deformable is allocated. The aim of the invention is to construct the mirror element with an oval, in particular elliptical shape.

Abstract: A mirror arrangement for reflecting electromagnetic radiation has a mirror body with a mirror side disposed towards the radiation to be reflected and at least one extension sensor located at the mirror body for detecting a deformation state of the mirror body. The mirror body includes semiconductor layer where the at least one extension sensor is located.

Abstract: A reflecting mirror supporting mechanism has a reflecting mirror with countersinks in the side thereof, a mirror holder (a base) for supporting the reflecting mirror, and leaf springs which urge a base-side face of each of the countersinks against the mirror holder. The reflecting mirror is movable in an in-plane direction of the reflecting mirror, and the base-side face in each of the countersinks is parallel with the rear of the reflecting mirror. A first pad is disposed in a space between the leaf spring and the base-side face. In a space between the rear of the reflecting mirror and the mirror holder, a second pad is provided which is flat in shape in a contact portion with the rear of the reflecting mirror and is spherical in shape in a contact portion with the mirror holder.

Abstract: A variable shape mirror comprises a frame member having an opening, and a thin film having a first region including a reflecting plane and a second region of higher rigidity than the first region disposed in the outer periphery of the first region, being supported in the opening of the frame member. Other variable shape mirror comprises a frame member having a first opening and a second opening, a first thin film having a reflecting plane, forming an electrode, and supported in the first opening of the frame member, a second thin film forming an electrode electrically conducting with the electrode of the first thin film, and supported in the second opening of the frame member, and a substrate bonded to the frame member at a specified interval, and having an electrode at a position opposite to the electrode of the second thin film.

Abstract: A variable-profile optical device includes a light-transmission elastic member in which an elasticity of a first surface is set to be higher than that of a second surface disposed opposite to the first surface, wherein a pressure is applied to the second surface of the elastic member, so that the second surface of the elastic member is selectively deformed, and a focus distance may be varied.

Abstract: Methods and apparatus are disclosed for peripherally supporting X-ray-reflective mirrors such as used in X-ray microlithography systems and other X-ray optical systems. The methods provide effective physical support while reducing certain deformations in the reflective surface of the mirror. An embodiment of the method or mirror-support apparatus utilizes multiple “pushing” and “pushing” devices that apply a compressive stress and tensile stress, respectively, to respective locations on the peripheral-side surface of the mirror. One or more pushing devices and one or more pulling devices can be used as required. For example, at time of mirror fabrication, respective pushing devices can be placed adjacent concave-deviation regions and respective pulling devices can be placed adjacent convex-deviation regions on the reflective surface of the mirror.

Abstract: An external rearview mirror includes a holder for affixing the mirror to a motor vehicle. A carrier plate is located in a housing that is secured to the holder. At least one mirror assembly with a mirror pane is mounted pivotally on the carrier plate in the housing. At least one means of adjustment is mounted on the carrier plate and bound to the mirror assembly. A base plate is attached to the carrier plate, the base plate having a honeycomb structure with a multiplicity of cells on at least one side. The cells are integral and normal to the base plate and may vary in both height and diameter.

Abstract: The present invention is generally directed to a method and assembly for elevating and supporting a microstructure of a MEM system generally by engaging a positioning system of the MEM system with a first elevator lifter. The MEM system generally includes a first microstructure (such as a mirror) disposed in vertically spaced relation to a substrate. The positioning system generally includes an actuator assembly movably interconnected with the substrate, an elevator pivotally interconnected with the substrate and further interconnected with the microstructure, and a tether interconnecting the actuator assembly and the elevator. The first elevator lifter is provided to engage the elevator to lift/elevate the microstructure away from the substrate generally after fabrication of the MEM system and prior to utilizing the microstructure in operation of the MEM system.

Abstract: Various embodiments of reinforced mirror microstructures for a surface micromachined optical system are disclosed. Multi-layered and structurally reinforced mirror microstructures are disclosed, including both two and three-layer microstructures. Adjacent structural layers in these multi-layered mirror microstructures may be structurally reinforced and interconnected by a plurality of vertically disposed columns, or by a plurality of at least generally laterally extending rails or ribs, or some combination thereof. Various embodiments of a single layered mirror microstructure with a structural reinforcement assembly that cantilevers from a lower surface thereof is also disclosed.

Abstract: An integrated actuator meniscus mirror includes an optical substrate having a mirror surface on one side and a support structure on the other and a plurality of actuators embedded in the support structure, spaced from and generally parallel to the mirror surface for applying bending moments to the mirror surface for controllably altering the shape of the mirror surface.

Abstract: Various embodiments of reinforced mirror microstructures for a surface micromachined optical system are disclosed. Multi-layered and structurally reinforced mirror microstructures are disclosed, including both two and three-layer microstructures. Adjacent structural layers in these multi-layered mirror microstructures may be structurally reinforced and interconnected by a plurality of vertically disposed columns, or by a plurality of at least generally laterally extending rails or ribs, or some combination thereof. Various embodiments of a single layered mirror microstructure with a structural reinforcement assembly that cantilevers from a lower surface thereof is also disclosed.

Abstract: Various embodiments of reinforced mirror microstructures for a surface micromachined optical system are disclosed. Multi-layered and structurally reinforced mirror microstructures are disclosed, including both two and three-layer microstructures. Adjacent structural layers in these multi-layered mirror microstructures may be structurally reinforced and interconnected by a plurality of vertically disposed columns, or by a plurality of at least generally laterally extending rails or ribs, or some combination thereof. Various embodiments of a single layered mirror microstructure with a structural reinforcement assembly that cantilevers from a lower surface thereof is also disclosed.

Abstract: The present invention provides an optical pickup deformable mirror used for correcting a spherical aberration caused by a difference in thickness of a cover glass of a recording medium, wherein the optical pickup deformable mirror is deformed into a rotation-symmetrical surface obtained by rotating a curve represented by the following expression f(r): f(r)=ar2+g(r) where r is the distance from the axis of rotational symmetry, a is an actual number except for 0, and g(r) satisfies |g(r)|≦1 &mgr;m.

Abstract: A variable shape mirror comprises a frame member having an opening, and a thin film having a first region including a reflecting plane and a second region of higher rigidity than the first region disposed in the outer periphery of the first region, being supported in the opening of the frame member. Other variable shape mirror comprises a frame member having a first opening and a second opening, a first thin film having a reflecting plane, forming an electrode, and supported in the first opening of the frame member, a second thin film forming an electrode electrically conducting with the electrode of the first thin film, and supported in the second opening of the frame member, and a substrate bonded to the frame member at a specified interval, and having an electrode at a position opposite to the electrode of the second thin film.

Abstract: An external rearview mirror includes a holder for affixing the mirror to a motor vehicle. A carrier plate is located in a housing that is secured to the holder. At least one mirror assembly with a mirror pane is mounted pivotally on the carrier plate in the housing. At least one means of adjustment is mounted on the carrier plate and bound to the mirror assembly. A base plate is attached to the carrier plate, the base plate having a honeycomb structure with a multiplicity of cells on at least one side. The cells are integral and normal to the base plate and may vary in both height and diameter.

Abstract: A flexible thin film is supported by a frame member through two end portions opposing each other. A reflection surface is provided on the flexible thin film to reflect light. A first electrode is provided integrally with the flexible thin film. A second electrode is substantially fixed to the frame member so as to oppose the first electrode on an opposite side of the reflection surface. A third electrode is substantially fixed to the frame member so as to oppose the first electrode on the same side as the reflection surface. An optical opening for introducing light into the reflection surface is provided on the side of the reflection surface. At least one of the second and third electrodes is divided in the direction connecting the two end portions. The configuration of the reflection surface is controlled to a desired configuration by applying a desired voltage selectively to between the first electrode and the divided second or third electrode.

Abstract: A variable-profile optical device includes a light-transmission elastic member in which an elasticity of a first surface is set to be higher than that of a second surface disposed opposite to the first surface, wherein a pressure is applied to the second surface of the elastic member, so that the second surface of the elastic member is selectively deformed, and a focus distance may be varied.

Abstract: An apparatus and method of maintaining a time-constant heat load on a lithography mirror. The mirror includes a resistive layer formed on a substrate, contacts for coupling a power supply to the resistive layer, an insulating sublayer formed on the resistive layer, a polished layer formed on the insulating layer, and a reflective layer formed on the polished layer. The time-constant heat load on the lithography mirror is maintained by placing an additional electrical heat load on the mirror according to the actinic heat load transmitted by the mask. Maintaining the time-constant heat load can reduce or eliminate variation in image distortion that occurs as a result of changes in actinic heat load on the lithography mirror. Independent temperature control can be used to mitigate “cold-edge effect.

Abstract: Various embodiments of reinforced mirror microstructures for a surface micromachined optical system are disclosed. Multi-layered and structurally reinforced mirror microstructures are disclosed, including both two and three-layer microstructures. Adjacent structural layers in these multi-layered mirror microstructures may be structurally reinforced and interconnected by a plurality of vertically disposed columns, or by a plurality of at least generally laterally extending rails or ribs, or some combination thereof. Various embodiments of a single layered mirror microstructure with a structural reinforcement assembly that cantilevers from a lower surface thereof is also disclosed.

Abstract: Various embodiments of reinforced mirror microstructures for a surface micromachined optical system are disclosed. Multi-layered and structurally reinforced mirror microstructures are disclosed, including both two and three-layer microstructures. Adjacent structural layers in these multi-layered mirror microstructures may be structurally reinforced and interconnected by a plurality of vertically disposed columns, or by a plurality of at least generally laterally extending rails or ribs, or some combination thereof. Various embodiments of a single layered mirror microstructure with a structural reinforcement assembly that cantilevers from a lower surface thereof is also disclosed.

Abstract: Various embodiments of reinforced mirror microstructures for a surface micromachined optical system are disclosed. Multi-layered and structurally reinforced mirror microstructures are disclosed, including both two and three-layer microstructures. Adjacent structural layers in these multi-layered mirror microstructures may be structurally reinforced and interconnected by a plurality of vertically disposed columns, or by a plurality of at least generally laterally extending rails or ribs, or some combination thereof. Various embodiments of a single layered mirror microstructure with a structural reinforcement assembly that cantilevers from a lower surface thereof is also disclosed.

Abstract: A lightweight mirror structure is formed from a unitary body of mirror blank material by using an abrasive water jet cutting apparatus to cut a plurality of cylindrical channels in the blank between and extending parallel to the mirror surface and the back surface of the mirror structure. The process may be employed to quickly produce inexpensive lightweight mirror structures.

Abstract: A rotatable mirror comprises: a substrate of at least one wafer of Silicon material, the substrate including a polished, flat surface of a predetermined shape; and a reflective medium disposed on the flat polished surface of the substrate, the medium being selected for an at least one wavelength of radiation to be reflected thereby. The rotatable mirror may be used in a mirror system for rotational scanning a radiation beam.

Abstract: An ultra fine and ultra rigid solid ceramic reflector, as well as a process for manufacturing a reflector, whereby ceramic material is applied on a first surface of a ceramic faceplate, preformed in accordance with the contour of the reflector, and is connected monolithically to the faceplate.

Abstract: An external rearview mirror includes a holder for affixing the mirror to a motor vehicle. A carrier plate is located in a housing that is secured to the holder. At least one mirror assembly with a mirror pane is mounted pivotally on the carrier plate in the housing. At least one means of adjustment is mounted on the carrier plate and bound to the mirror assembly. A base plate is attached to the carrier plate, the base plate having a honeycomb structure with a multiplicity of cells on at least one side. The cells are integral and normal to the base plate and may vary in both height and diameter.

Abstract: A micro-mirror comprises a membrane of a dielectric polymer layer between two metal layers for supplying a high frequency ac voltage thereto for dielectric heating of the membrane, and a further polymer layer adjacent to and forming a bimorph with the second metal layer, the membrane being supported around its periphery so that the membrane produces a mirror with a curvature, and hence a focal length, dependent upon the heating. Such micro-mirrors are useful in optical signal paths in optical components, including optical receivers and variable attenuators. A detected optical signal can be used in a feedback control path to control a high frequency ac voltage source connected to the two metal layers, and hence the focal length of the micro-mirror.

Abstract: A lightweight mirror structure is formed from a unitary body of mirror blank material by using an abrasive water jet cutting apparatus to cut a plurality of cylindrical channels in the blank between and extending parallel to the mirror surface and the back surface of the mirror structure. The process may be employed to quickly produce inexpensive lightweight mirror structures.

Abstract: The invention relates to a device for influencing a laser beam by means of an adaptive mirror (12) in the beam path, having a piezoelectric adjusting member (17) arranged on the back of the mirror (12), it being the case that, in order to achieve low-aberration deformation of the mirror (12) for the purpose of influencing the divergence of the beam, there is provided between the adjusting member (17) and the back (24) of the mirror (12) a pressure-transmitting device (19) which acts on a large area of the deformable surface of the mirror (12).

Abstract: A mirror for use in a catadioptric system, is provided which is a substantially circular mirror having a rotationally symmetric cross section by a set of points substantially close to a curve satisfied by a differential equation as follows: 2 ⁢ F ′ ⁡ ( x ) 1 - F ′ ⁡ ( x ) 2 = d ⁡ ( x ) - x F ⁡ ( x ) where x is the radius of the mirror and F(x) is the cross-sectional shape.

Abstract: The present invention relates to an optical element fixing device, and particularly to a prism mounting device for an optical device using light beam which passes through a prism or lens, a lens fixing device for aligning and fixing the center of a lens with a prescribed optical axis, and a device for fixing a reflecting mirror of an optical device. The invention can easily and securely position the prism to be press-contacted to the lens within a case, in which changes in the magnitude of press-contacting with the passage of time is very small. And, the lens can be securely fixed with its center accurately aligned with a prescribed optical axis. Besides, the reflecting mirror is fixed by a simple structure and a contact between the reflecting mirror and a plate spring is not limited to one point.

Abstract: A reflecting panel adjusting mechanism includes a support means for supporting a reflecting panel 1 at three points through spherical bearing units (7a, 7b and 7c) rotatable in all directions on axes (6a, 6b and 6c) turning only in the radial direction, the support means having turning arms (8a, 8b and 8c), etc; and jacks (9a, 9b and 9c) for moving the turning axes of the support means vertically; wherein inclination and height of the reflecting panel are adjusted.

Abstract: A method and apparatus for curvature-resistant micro-mirror structures to reduce light beam coupling loss due to mirror curvature in free-space micro-machined optical switches is presented. As a significant contributor to light beam coupling loss is the curvature of the micro-mirrors in these cross-connect systems, an improved thick mirror slab utilizing a phosopho-silicate glass (PSG) core is constructed. The PSG core is sandwiched between two poly-silicon layers, thus providing an enhanced, bending-resistant structure which protects the PSG core from the release etchant used in surface micro-machining and substantially reduces mirror curvature. The reflective layer is laid down on top of the enhanced, bending-resistant structure.

Abstract: A movable mirror supporting mechanism for supporting a movable mirror forming a part of an interferometric measurement system and having a rectangular cross-section onto an object, with a reflecting surface of said movable mirror being arranged normal to a measuring direction. The movable mirror supporting mechanism includes at least two fixtures for securing the movable mirror from above onto respective movable mirror supporting portions provided on the object. Positions on the movable mirror at which the movable mirror is secured onto the measuring object by the fixtures are defined to be out of that area of the reflecting surface of the movable mirror which is utilized for interferometric measurement.