By Electrical Conductivity Patents (Class 366/152.4)
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Patent number: 11839860Abstract: This in-line active and reverse calculating mass balance blending system can maintain a chemical at desired control points, such as with respect to concentration, temperature, and/or pressure, while the output flow rate is changing dynamically to a point of use. A blending unit is configured to receive and blend at least two species and deliver a mixture at selected concentrations to points of use. A controller can be configured to determine a mass balance to maintain the concentrations in the mixture using information from metrology systems and a flow in an output to the at least one point of use. The controller also can be configured to maintain a concentration in the mixture within a concentration range by controlling flow rates to the blending unit.Type: GrantFiled: May 1, 2022Date of Patent: December 12, 2023Assignee: DIVERSIFIED FLUID SOLUTIONS, LLCInventors: Darren Willey, Karl Urquhart, Joseph Watters, Christopher Donelson
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Patent number: 11465110Abstract: An inline buffer dilution system is provided that includes a first flow control valve fluidly connected to a supply of diluent liquid, second and third flow control valves fluidly connected to supplies of a first buffer and a second buffer, respectively, and a mixing pump fluidly connected to the first, second, and third flow control valves and configured to mix an amount of the diluent liquid, the first buffer, and the second buffer to produce a diluted buffer solution. The system further includes a backpressure control valve configured to generate a backpressure that promotes mixing within the mixing pump, and a controller configured to control the backpressure based on the amount of the diluent liquid, the first buffer, and the second buffer being mixed in the mixing pump, such that the mixing pump yields a minimum mixing threshold across a range of fluid flows.Type: GrantFiled: December 26, 2019Date of Patent: October 11, 2022Assignee: Asahi Kasei Bioprocess America, Inc.Inventor: Michael D. Brandt
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Patent number: 11400426Abstract: Systems and apparatuses for preparing a medical fluid are disclosed. In an example embodiment, a system is configured to initially control a dosing of a first concentrate, while not feeding a second concentrate, under feedback control via a concentration sensor to a first pump to feed the first concentrate. When a concentration has reached a preselected concentration level, a value for a feeding parameter for the first pump to feed the first concentrate is determined. Additionally, the system is configured to control the dosing of both the first and the second concentrates by switching the feedback control via the concentration sensor, from control of the first pump to control of a second pump to feed the second concentrate. During this time, the system controls the first pump to feed the first concentrate based on the determined value of the feeding parameter.Type: GrantFiled: September 14, 2018Date of Patent: August 2, 2022Assignee: Gambro Lundia ABInventors: Olof Jansson, Sture Hobro, Lennart Jonsson
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Patent number: 11318431Abstract: This in-line active and reverse calculating mass balance blending system can maintain a chemical at desired control points, such as with respect to concentration, temperature, and/or pressure, while the output flow rate is changing dynamically to a point of use. A blending unit is configured to receive and blend at least two species and deliver a mixture at selected concentrations to points of use. A controller can be configured to determine a mass balance to maintain the concentrations in the mixture using information from metrology systems and a flow in an output to the at least one point of use. The controller also can be configured to maintain a concentrations in the mixture within a concentration range by controlling flow rates to the blending unit.Type: GrantFiled: November 26, 2020Date of Patent: May 3, 2022Assignee: DIVERSIFIED FLUID SOLUTIONS, LLCInventors: Darren Willey, Karl Urquhart, Joseph Watters, Christopher Donelson
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Patent number: 11307212Abstract: A tissue processing apparatus for processing biological tissue. The tissue processing apparatus comprises a measurement probe that includes two measurement surfaces spaced apart from each other, wherein the measurement probe is configured to be inserted into a reagent receptacle so that the two measurement surfaces are at least partially immersed in reagent contained in the reagent receptacle. The tissue processing apparatus is configured to use the two measurement surfaces of the measurement probe to obtain at least one electrical measurement of reagent contained in the reagent receptacle before reagent is taken out from the reagent receptacle by the tissue processing apparatus. The tissue processing apparatus is configured to determine, based on the at least one electrical measurement, a concentration and/or a type of reagent contained in the reagent receptacle.Type: GrantFiled: June 22, 2021Date of Patent: April 19, 2022Assignee: SHANDON DIAGNOSTICS LIMITEDInventors: John Temple, Michael James Forshaw, David John Chan
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Patent number: 11267869Abstract: The present invention relates to a chromatography system (20) wherein the chromatography system comprises an eluting system (10) and a capturing system (11) consisting of at least two chromatography units (2,3) operated alone or in series and a capturing process employing in-line buffer dilution in, which concentrated buffers are blended with water and provided to the chromatography units.Type: GrantFiled: January 29, 2015Date of Patent: March 8, 2022Assignee: CMC BIOLOGICS A/SInventors: Simon Bergmann, Mads Laustsen
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Patent number: 10076735Abstract: A system and method for dosing at least two concentrates into water for on-line preparation of a medical fluid may include a main line for feeding of water, a first line with a first pump for feeding a first concentrate into the main line at a first mixing point, a second line with a second pump for feeding a second concentrate into the main line at a second mixing point, wherein a main concentration sensor measures the concentration in the main line downstream of the first and the second mixing points, wherein control of the dosing of the first concentrate is initially under feedback control from the main concentration sensor to the first pump, and when a value for a feeding parameter for the first pump is determined the feedback control is moved, so that the value for the feeding parameter is used to control the first pump.Type: GrantFiled: April 16, 2014Date of Patent: September 18, 2018Assignee: Gambro Lundia ABInventors: Olof Jansson, Sture Hobro, Lennart Jonsson
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Patent number: 9868930Abstract: A single use pH sensor housing for a single use container is provided. The single use pH sensor housing includes a compartment configured to house a single use pH sensor. In one embodiment, the single use pH sensor housing comprises an actuator configured, when actuated, to transition the single use pH sensor from a storage position to a deployed position. In the storage position, the pH sensor is in fluidic contact with a buffer solution. In the deployed position, the single use pH sensor is in fluidic contact with an interior of the single use container. During the transition from the storage position to the deployed position, the buffer solution moves from a sensor portion of the compartment to a storage portion of the compartment such that the buffer solution is isolated from contact with the interior of the single use container.Type: GrantFiled: April 22, 2016Date of Patent: January 16, 2018Assignee: Rosemount Analytical Inc.Inventors: Michalle Jane Alleman Adkins, Chang-Dong Feng
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Patent number: 9512398Abstract: Provided are electrokinetically-altered fluids (e.g., gas-enriched (e.g., oxygen-enriched) electrokinetic fluids) comprising an ionic aqueous solution of charge-stabilized gas-containing nanostructures in an amount sufficient to provide, upon contact with a cell, modulation of at least one of cellular membrane potential and cellular membrane conductivity. Further provided are the methods of making the electrokinetically-altered ionic aqueous fluid compositions. Particular aspects provide for regulating or modulating intracellular signal transduction associated by modulation of at least one of cellular membranes, membrane potential, membrane proteins such as membrane receptors, including but not limited to G-Protein Coupled Receptors (GPCR), and intercellular junctions (e.g., tight junctions, gap junctions, zona adherins and desmasomes). Other embodiments include particular methods of producing the electrokinetically-altered fluids.Type: GrantFiled: May 20, 2013Date of Patent: December 6, 2016Assignee: Revalesio CorporationInventors: Anthony B. Wood, Richard L. Watson, Gregory J. Archambeau
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Patent number: 9511333Abstract: Provided are electrokinetically-altered fluids (e.g., gas-enriched (e.g., oxygen-enriched) electrokinetic fluids) comprising an ionic aqueous solution of charge-stabilized oxygen-containing nanostructures in an amount sufficient to provide, upon contact with a cell, modulation of at least one of cellular membrane potential and cellular membrane conductivity. Further provided are the methods of making the electrokinetically-altered ionic aqueous fluid compositions. Particular aspects provide for regulating or modulating intracellular signal transduction associated by modulation of at least one of cellular membranes, membrane potential, membrane proteins such as membrane receptors, including but not limited to G-Protein Coupled Receptors (GPCR), and intercellular junctions (e.g., tight junctions, gap junctions, zona adherins and desmasomes). Other embodiments include particular methods of producing the electrokinetically-altered fluids.Type: GrantFiled: March 27, 2013Date of Patent: December 6, 2016Assignee: Revalesio CorporationInventors: Anthony B. Wood, Gregory J. Archambeau, Richard L. Watson
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Patent number: 9250255Abstract: A sample analyzer is provided that does not require a plurality of reagent containers containing the same type of reagent to be connected, that can continue measurement even when a reagent container becomes empty, and that allows the timing of replacement of the reagent container to be recognized suitably. A reagent storage section is provided that is connected to a reagent container containing a reagent through a fluid channel and that stores the reagent transferred from the reagent container. A message for prompting replacement of the reagent container is outputted when it is detected that the remaining amount in the reagent container is a predetermined amount or less. A message for prompting to suspend sample measurement in the measurement section is outputted when it is detected that the remaining amount in the reagent storage section is a predetermined amount or less.Type: GrantFiled: September 15, 2011Date of Patent: February 2, 2016Assignee: SYSMEX CORPORATIONInventors: Masaharu Shibata, Noriyuki Nakanishi
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Publication number: 20140340980Abstract: An accurate blending system for blending first and second liquid components includes a first feed adapted to communicate with a supply of the first component and a second feed adapted to communicate with a supply of the second component. A shear blender is in communication with the first and second feeds. A first sensor is in communication with an outlet of the shear blender. A controller is in communication with the first sensor so that a first characteristic of a solution exiting the shear blender can be detected. The controller is also in communication with the second feed so that delivery of the second component to the shear blender can be controlled based upon the detected first characteristic.Type: ApplicationFiled: April 22, 2014Publication date: November 20, 2014Applicant: Asahi Kasei Bioprocess, Inc.Inventor: Michael BRANDT
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Patent number: 8870444Abstract: An automated solution maker is provided. The automated solution maker mixes a chemical with a solvent to a desired concentration. The concentration of the solution is monitored by measuring the conductivity of the solution. Based upon this measurement, the concentration of the solution may be adjusted.Type: GrantFiled: June 29, 2012Date of Patent: October 28, 2014Assignee: Cargill, IncorporatedInventor: Clay Hildreth
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Publication number: 20130094324Abstract: A solution making system and apparatus are described. The solution maker mixes a chemical or slurry with a solvent to a desired concentration. The concentration of the solution is monitored by one or more methods. Based upon this measurement, the concentration of the solution may be adjusted.Type: ApplicationFiled: October 16, 2012Publication date: April 18, 2013Applicant: Cargill, IncorporatedInventor: Cargill, Incorporated
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Patent number: 8382364Abstract: An automated solution maker is provided. The automated solution maker mixes a chemical with a solvent to a desired concentration. The concentration of the solution is monitored by measuring the conductivity of the solution. Based upon this measurement, the concentration of the solution may be adjusted.Type: GrantFiled: February 18, 2009Date of Patent: February 26, 2013Assignee: Cargill, IncorporatedInventor: Clay Hildreth
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Publication number: 20130028042Abstract: A method for calibrating an apparatus for measuring shape factor is provided, wherein the method comprises determining aspect ratios for each of a plurality of kaolin samples and measuring the shape factors of each of the plurality of kaolin samples using the apparatus, wherein each of the kaolin samples includes potassium oxide in an amount less than about 0.1% by weight of each of the kaolin samples. The method further includes calibrating the apparatus based on a correlation between the aspect ratios and the shape factors.Type: ApplicationFiled: January 30, 2012Publication date: January 31, 2013Applicant: Imerys Pigments, Inc.Inventors: Robert J. Pruett, Jondahl Davis, Roger Wygant
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Publication number: 20130028043Abstract: Systems for controlling fluids in semiconductor processing systems are disclosed. The disclosed systems comprise a chemical blender, a reclaim tank, a dispense system, two chemical monitors, a controller, and a reclamation line in fluid communication with an outlet of the process station and coupled to the reclaim tank. The reclaim tank mixes solution from the chemical blender and the reclamation line. One of the two chemical monitors the mixed solution downstream from the dispense system. The controller is configured to flow the mixed solution to the process station upon determination by the first chemical monitor that at least one chemical compound in the mixed solution is at a predetermined concentration. The second chemical monitor monitors the reclaimed portion of the mixed solution to determine whether the at least one chemical compound is at a predetermined concentration before being reintroduced into the reclaim tank.Type: ApplicationFiled: July 31, 2012Publication date: January 31, 2013Applicant: Air Liquide Electronics U.S. LPInventors: Norbert FANJAT, Karl J. URQUART, Axel SOULET, Laurent LANGELLIER
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Publication number: 20120217192Abstract: A method for preparing a liquid flow having pre-defined characteristics by mixing liquid flows of at least two different component stock solutions with each other comprises the steps of determining a selected property value for one or more of the stock solutions by sensing, in a flow of each stock solution separately, at least one characteristic related to the property value for the stock solution, and based on the determined property value or values, mixing the stock solution flows in mixing ratios giving the desired mixed liquid flow. A system for carrying out the method comprises sensor means and a control unit, wherein the control unit is arranged to evaluate the characteristics sensed by the sensor means and provide relative ratios of stock solutions required to obtain a mixed liquid flow having the pre-defined characteristics.Type: ApplicationFiled: September 23, 2010Publication date: August 30, 2012Applicant: GE HEALTHCARE BIO-SCIENCES ABInventors: Torbjorn Blank, Enrique Carredano, Karl Ekstrom, Jan-Erik Lynga, Roger Nordberg, Mike Peters, Gustav Rodrigo, Henrik Sandegren, Lisa Stack
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Patent number: 8251569Abstract: An automated solution maker is provided. The automated solution maker mixes a chemical with a solvent to a desired concentration. The concentration of the solution is monitored by measuring the conductivity of the solution. Based upon this measurement, the concentration of the solution may be adjusted.Type: GrantFiled: August 31, 2010Date of Patent: August 28, 2012Assignee: Cargill, IncorporatedInventor: Clay Hildreth
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Patent number: 8123397Abstract: A disposable container is provided for mixing media. The container has at least one closable opening for introducing and/or removing media and has sensor mounts at spaced apart locations on the wall of the container. Each sensor mount has a front surface facing into the container and a rear surface sealed against the wall of the container. Sensors are embedded in the respective sensor mounts at positions adjacent the front surfaces. The sensors measure at least one specified parameter of the media at spaced apart locations in the container. The seals between the rear surfaces of the sensor mounts and the wall of the container ensure sterility for the media in the container.Type: GrantFiled: December 21, 2006Date of Patent: February 28, 2012Assignee: Sartorius Stedim Biotech GmbHInventors: Reinhard Baumfalk, Oscar-Werner Reif, Stefan Obermann, Dieter Schmidt
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Patent number: 7919534Abstract: Particular aspects provide compositions comprising an electrokinetically altered oxygenated aqueous fluid, wherein the oxygen in the fluid is present in an amount of at least 25 ppm. In certain aspects, the electrokinetically altered oxygenated aqueous fluid comprises electrokinetically modified or charged oxygen species present in an amount of at least 0.5 ppm. In certain aspects the electrokinetically altered oxygenated aqueous fluid comprises solvated electrons stabilized by molecular oxygen, and wherein the solvated electrons present in an amount of at least 0.01 ppm. In certain aspects, the fluid facilitates oxidation of pyrogallol to purpurogallin in the presence of horseradish peroxidase enzyme (HRP) in an amount above that afforded by a control pressure pot generated or fine-bubble generated aqueous fluid having an equivalent dissolved oxygen level, and wherein there is no hydrogen peroxide, or less than 0.1 ppm of hydrogen peroxide present in the electrokinetic oxygen-enriched aqueous fluid.Type: GrantFiled: October 25, 2007Date of Patent: April 5, 2011Assignee: Revalesio CorporationInventors: Anthony B. Wood, Gregory J. Archambeau, Richard L. Watson
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Patent number: 7905653Abstract: A method and apparatus for blending and supplying process materials. The method and apparatus are particularly applicable to the blending of ultra-high purity chemicals, the blending of abrasive slurries with other chemicals for the polishing of semiconductor wafers, and high-accuracy blending of chemicals. The apparatus may include a dispensing subsystem that supplies process materials to a mixing subsystem where they are blended with a static mixer. The method may include supplying process materials with a dispensing subsystem and blending the process materials in a static mixer.Type: GrantFiled: July 31, 2001Date of Patent: March 15, 2011Assignee: Mega Fluid Systems, Inc.Inventors: Jeffrey Alexander Wilmer, Daniel Kase Mackenzie, John Michael Lull, Eric A. Zadai, Michael Loren Walker
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Patent number: 7878703Abstract: Fire fighting equipment uses an electronically controlled direct injection foam delivery system. A water pump pumps water through a pipe. A foam pump pumps foam into a mixing chamber within the pipe to produce a water-foam mixture. A microprocessor-based control unit controls the water pump and foam pump. A conductivity sensor is coupled in-line with the pipe for monitoring conductivity of the mixture and providing a feedback signal to the control unit to regulate the foam pump. A speed sensor monitors the foam usage. A second conductivity sensor monitors conductivity of the water and provides a feedback signal to the control unit. The foam delivery system can be controlled by monitoring the flow rate of the water and regulating the foam pump to maintain a constant water and foam mixture. A temperature sensor compensates the regulation process for changes in water and foam mixture temperature.Type: GrantFiled: June 27, 2007Date of Patent: February 1, 2011Assignee: Waterous CompanyInventor: Geary E. Roberts
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Patent number: 7810987Abstract: An automated solution maker is provided. The automated solution maker mixes a chemical with a solvent to a desired concentration. The concentration of the solution is monitored by measuring the conductivity of the solution. Based upon this measurement, the concentration of the solution may be adjusted.Type: GrantFiled: July 27, 2005Date of Patent: October 12, 2010Assignee: Cargill, IncorporatedInventor: Clay Hildreth
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Patent number: 7494265Abstract: Embodiments of the present invention provide a system and method for continuous flow production of mixed fluids. The mixed fluids can comprise a mixture of different fluids or a mixture of the same fluid having different input properties such as temperature. In general, two streams of fluid of varying temperature are supplied to a mixer. The flow rate of each of the input fluids can be regulated to produce a mixed fluid at a desired flow rate and temperature. As an example, mass flow controllers can regulate the flow rates of a hot and cold stream of de-ionized water to produce a stream of de-ionized water at a desired flow rate and temperature.Type: GrantFiled: March 22, 2006Date of Patent: February 24, 2009Assignee: Entegris, Inc.Inventors: J. Karl Niermeyer, Robert F. McLoughlin, Joseph E. Smith
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Publication number: 20080279038Abstract: An accurate blending system for blending a feed liquid and first and second adjusting liquids includes a first feed means adapted to communicate with a supply of feed liquid, a second feed means adapted to communicate with a supply of the first adjusting liquid and a third feed means adapted to communicate with a supply of the second adjusting liquid. The first, second and third feed means may be pumps, valves or combinations thereof. A mixing device is in communication with the first, second and third feed means. First and second sensors are in communication with the mixing device. A controller communicates with the first and second sensors so that first and second characteristics of the solution in the mixing device can be detected. The controller also communicates with the first and second feed means so that delivery of first and second adjusting liquid to the mixing device can be controlled based upon the detected first and second characteristics of the solution in the mixing device.Type: ApplicationFiled: May 21, 2008Publication date: November 13, 2008Inventors: LOUIS BELLAFIORE, James Sanderson
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Publication number: 20080281001Abstract: Particular aspects provide compositions comprising an electrokinetically altered oxygenated aqueous fluid, wherein the oxygen in the fluid is present in an amount of at least 25 ppm. In certain aspects, the electrokinetically altered oxygenated aqueous fluid comprises electrokinetically modified or charged oxygen species present in an amount of at least 0.5 ppm. In certain aspects the electrokinetically altered oxygenated aqueous fluid comprises solvated electrons stabilized by molecular oxygen, and wherein the solvated electrons present in an amount of at least 0.01 ppm. In certain aspects, the fluid facilitates oxidation of pyrogallol to purpurogallin in the presence of horseradish peroxidase enzyme (HRP) in an amount above that afforded by a control pressure pot generated or fine-bubble generated aqueous fluid having an equivalent dissolved oxygen level, and wherein there is no hydrogen peroxide, or less than 0.1 ppm of hydrogen peroxide present in the electrokinetic oxygen-enriched aqueous fluid.Type: ApplicationFiled: October 25, 2007Publication date: November 13, 2008Applicant: Revalesio CorporationInventors: Anthony B. Wood, Gregory J. Archambeau, Richard L. Watson
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Publication number: 20080247265Abstract: The present invention provides an apparatus for the mixing or dilution of chemicals from one more sources that have been analyzed using laboratory analysis or an insitu-analyzer for concentration or molarity. The chemical is then transferred to a series of precisely calibrated vessels each of have a volume 10% of the next vessel. For example the main vessel may be 1 L in volume and the second vessel is 0.1 L in volume, the third is 0.01 L in volume and the fourth is 0.001 L in volume. The present system utilizes these two or more metered vessels which are connected to bulk chemical sources via intake lines. Each metered vessel contains an overflow tube, which drains any excess chemical by gravity flow from the metered vessel so as to adjust the chemical amount to a pre-calibrated desired level.Type: ApplicationFiled: April 9, 2007Publication date: October 9, 2008Inventor: Daniel H. Wilcox
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Patent number: 7344297Abstract: The invention is a method and apparatus for asynchronous blending and supply of chemical solutions. The method of the present invention includes a continuous blending system. This continuous blending system monitors the output and continuously adjusts the blending system to achieve a predetermined formulation of at least a first solution. A centralized monitoring system continuously evaluates the solutions and adjusts the output of the blender as needed to maintain the predetermined formulation of the solution. The system includes at least a first tank system. Any solutions that are delivered from this tank system are also continuously monitored, evaluated, and adjusted as needed by the centralized monitoring system.Type: GrantFiled: April 15, 2005Date of Patent: March 18, 2008Assignee: Air Liquide Electronics U.S. LPInventor: Karl J. Urquhart
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Publication number: 20070159920Abstract: Container and method for the mixing of media, in particular as a disposable container, which has at least one closable opening for the introduction and/or removal of the media and has a first sensor for measurement of at least one parameter of the mixture, in which at least one second sensor for measurement of the same parameter is arranged at a distance from the first sensor.Type: ApplicationFiled: December 21, 2006Publication date: July 12, 2007Applicant: Sartorius AGInventors: Reinhard Baumfalk, Oscar-Werner Reif, Stefan Obermann, Dieter Schmidt
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Patent number: 7147361Abstract: The present invention includes methods for introducing a dry material into a fluid stream in a way that ensures a predictable, highly accurate and consistent application of the material. The invention applies variable amounts of dry material regardless of whether the fluid stream flow rate is fixed or variable. The dry material is handled in dry bulk form and may be highly soluble or nearly insoluble. The dry bulk material is metered before being mixed into a slurry and injected to the fluid stream in a manner that continuously and automatically adjusts the application rate to compensate for varying fluid flow rates or chemical composition, in order to provide a precise fluid treatment level at all times. The present invention allows for the storage of large quantities of the dry process amendment as an integrated and dust-free function of the process.Type: GrantFiled: November 19, 2004Date of Patent: December 12, 2006Assignee: Wastewater Solutions, IncInventors: Randal G. Cecala, David R. Anson
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Patent number: 6979116Abstract: The present invention is an apparatus for introducing a dry material into a fluid stream in a way that ensures a predictable, highly accurate and consistent application of the material. The invention applies variable amounts of dry material regardless of whether the fluid stream flow rate is fixed or variable. The dry material is handled in dry bulk form and may be highly soluble or nearly insoluble. The dry bulk material is metered before being mixed into a slurry and injected to the fluid stream in a manner that continuously and automatically adjusts the application rate to compensate for varying fluid flow rates or chemical composition, in order to provide a precise fluid treatment level at all times. The present invention is capable of storing large quantities of the dry process amendment as an integrated and dust-free function of the apparatus.Type: GrantFiled: December 19, 2002Date of Patent: December 27, 2005Assignee: Wastewater Solutions, Inc.Inventors: Randal G. Cecala, David R. Anson
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Patent number: 6966688Abstract: An apparatus and method for mixing and dispensing a powder material in an aqueous solution wherein the powder material is premixed into solution by a spreader. The premix solution is subsequently dispensed in a diluted aqueous stream by a venturi proportioner. In a preferred manner a hopper is provided for the powder material which is partially positioned in a mixing chamber. A valve and spreader are positioned at the base of the hopper.Type: GrantFiled: February 23, 2005Date of Patent: November 22, 2005Assignee: JohnsonDiversey, Inc.Inventor: Claudio L. K. Lins
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Patent number: 6799883Abstract: Provided are a method and apparatus for continuously blending a chemical solution for use in semiconductor processing. The method involves the step of: mixing a first chemical stream with a second chemical stream in a controlled manner, to form a stream of a solution having a predetermined formulation. The apparatus allows one to practice the above method. The method and apparatus can accurately provide chemical solutions of desired concentration in a continuous manner. The invention has particular applicability in semiconductor device fabrication.Type: GrantFiled: December 20, 1999Date of Patent: October 5, 2004Assignee: Air Liquide America L.P.Inventors: Karl J. Urquhart, John B. Thompson, Joe G. Hoffman
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Patent number: 6764212Abstract: A chemical supply system comprises, as principal elements, a chemical storage tank in which a liquid chemical for cleaning is stored in the state of its formulated concentrate, a chemical supply apparatus connected to the chemical storage tank for positively performing chemical supply, a piping system connected to the chemical supply apparatus to form a supply flow passage that is a passage for ultrapure water which the liquid chemical is to be mixed with, a pair of discharge nozzles disposed at end portions of the piping system so as to oppose surfaces of a wafer set in a cleaning chamber to supply a cleaning liquid onto the surfaces. Thereby, remarkable miniaturization/simplification of a cleaning liquid supply system including chemical tanks is intended, it is made possible easily and rapidly to compound and supply a cleaning liquid at an accurate chemical concentration, and particles or the like being generated and mixing in a cleaning liquid, are suppressed to the extremity.Type: GrantFiled: November 9, 1999Date of Patent: July 20, 2004Assignee: Sipec CorporationInventors: Takahisa Nitta, Nobuhiro Miki, Yoshiaki Yamaguchi
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Publication number: 20040100860Abstract: A method and apparatus for blending and supplying process materials. The method and apparatus are particularly applicable to the blending of ultra-high purity chemicals, the blending of abrasive slurries with other chemicals for the polishing of semiconductor wafers, and high-accuracy blending of chemicals.Type: ApplicationFiled: July 18, 2003Publication date: May 27, 2004Inventors: Jeffrey A. Wilmer, Brian Alan McAllister, Daniel A. Swan, David E. Sittcrud
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Publication number: 20040057334Abstract: A method and apparatus for blending and supplying process materials. The method and apparatus are particularly applicable to the blending of ultra-high purity chemicals, the blending of abrasive slurries with other chemicals for the polishing of semiconductor wafers, and high-accuracy blending of chemicals. The apparatus may include a dispensing subsystem that supplies process materials to a mixing subsystem where they are blended with a static mixer. The method may include supplying process materials with a dispensing subsystem and blending the process materials in a static mixer.Type: ApplicationFiled: September 17, 2003Publication date: March 25, 2004Inventors: Jeffrey Alexander Wilmer, Daniel Kase Mackenzie, John Michael Lull, Eric A. Zadai
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Publication number: 20040052154Abstract: An apparatus for feeding slurry to an external device. The apparatus includes a preparation tank for preparing the slurry. A circulation pipe is connected to the preparation tank to circulate the slurry. A feeding pipe is connected between the preparation tank and the external device to feed the external device with the slurry. A pump sends the chemical solution in the preparation tank to the circulation pipe and the feeding pipe. A concentration detector is arranged downstream to the pump to detect the concentration of the slurry. A controller controls the concentration of the chemical solution in the preparation tank in accordance with the detection value of the concentration detector and controls the feeding of the chemical solution.Type: ApplicationFiled: September 16, 2003Publication date: March 18, 2004Applicant: FUJITSU VLSI LIMITEDInventors: Naoki Hiraoka, Hiroshi Osuda, Hotaka Yamamoto
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Publication number: 20030206484Abstract: A mixing apparatus that includes a drop on demand fluid dispenser for adding an additive fluid to a receiver liquid to produce a composite liquid that includes the receiver liquid and the additive fluid.Type: ApplicationFiled: May 1, 2002Publication date: November 6, 2003Inventors: Winthrop D. Childers, Mark A. Van Veen, Mohammad M. Samii, Steven W. Steinfield
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Patent number: 6632011Abstract: A mixing apparatus 1 comprising a chamber 12 with at least one inlet 16 allowing entry of a solute and a liquid solvent, at least one outlet 52 allowing exit of a solution of said solute and solution, and at least a separator 22 having at least one generally upwardly facing surface 40 and one generally downwardly facing surface 38a, wherein said surfaces define a passageway 50 allowing the solution of the solute and the solvent to pass through and out of the chamber 12, and wherein undissolved solute is descendable along the generally upwardly facing surface 40a.Type: GrantFiled: June 23, 2000Date of Patent: October 14, 2003Assignee: Process Automation International LimitedInventors: Paul Henington, Kwok Wai Wen
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Patent number: 6588927Abstract: The developer producing equipment of the present invention is equipped with a preparation tank to which a developer stock solution and pure water are supplied, and in which these ingredients are agitated, and a leveling tank which is connected to this preparation tank. The leveling tank is connected via piping to working equipment in which electronic circuits are formed. Furthermore, the preparation tank and leveling tank have first and second alkali concentration measuring means for measuring the alkali concentrations of the alkali type developer inside the respective tanks. In the preparation tank, either the amount of developer stock solution that is supplied to the tank or the amount of pure water that is supplied to the tank, or both, are adjusted on the basis of the measured value obtained by the first alkali concentration measuring means, so that an alkali type developer is prepared.Type: GrantFiled: February 6, 2002Date of Patent: July 8, 2003Assignee: Nagase & Co., Ltd.Inventors: Toshimoto Nakagawa, Shu Ogawa, Satoru Morita, Makoto Kikukawa, Takahiro Hozan
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Patent number: 6572255Abstract: A physically compact (saline) solution preparation apparatus includes a solution mixing tank coupled to sources of concentrate and diluent. A concentrate transport path is configured to both homogenize and deliver concentrate to the mixing tank, while the diluent transport path is controllably purged of potential contaminates prior to supplying the diluent to the mixing tank. A mixed solution transport path recirculates and thereby homogenizes the contents of the mixing container, and actively pumps out solution that has been mixed to a prescribed conductivity-based concentration, to one or more solution on demand storage reservoirs for respective instruments. The operation of the apparatus is based upon measured conductivity of the contents of the solution mixing tank, so that there is no need to conduct precursor volumetric measurements of either diluent or concentrate.Type: GrantFiled: April 24, 2001Date of Patent: June 3, 2003Assignee: Coulter International Corp.Inventor: Frederick K. Husher
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Publication number: 20020154567Abstract: A physically compact (saline) solution preparation apparatus includes a solution mixing tank coupled to sources of concentrate and diluent. A concentrate transport path is configured to both homogenize and deliver concentrate to the mixing tank, while the diluent transport path is controllably purged of potential contaminates prior to supplying the diluent to the mixing tank. A mixed solution transport path recirculates and thereby homogenizes the contents of the mixing container, and actively pumps out solution that has been mixed to a prescribed conductivity-based concentration, to one or more solution on demand storage reservoirs for respective instruments. The operation of the apparatus is based upon measured conductivity of the contents of the solution mixing tank, so that there is no need to conduct precursor volumetric measurements of either diluent or concentrate.Type: ApplicationFiled: April 24, 2001Publication date: October 24, 2002Inventor: Frederick K. Husher
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Publication number: 20020136087Abstract: The developer producing equipment of the present invention is equipped with a preparation tank to which a developer stock solution and pure water are supplied, and in which these ingredients are agitated, and a leveling tank which is connected to this preparation tank. The leveling tank is connected via piping to working equipment in which electronic circuits are formed. Furthermore, the preparation tank and leveling tank have first and second alkali concentration measuring means for measuring the alkali concentrations of the alkali type developer inside the respective tanks. In the preparation tank, either the amount of developer stock solution that is supplied to the tank or the amount of pure water that is supplied to the tank, or both, are adjusted on the basis of the measured value obtained by the first alkali concentration measuring means, so that an alkali type developer is prepared.Type: ApplicationFiled: February 6, 2002Publication date: September 26, 2002Inventors: Toshimoto Nakagawa, Shu Ogawa, Satoru Morita, Makoto Kikukawa, Takahiro Hozan
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Publication number: 20020085447Abstract: On-site blending and distribution of oxide abrasives with other constituents as used in semiconductor applications. Constituent blending is accomplished through weighing components individually into a blending tank. Some components may be added by injection or weight. Alternatively blends can be made to varying concentrations by passing the blended oxide solution in a closed circulation loop through a calibrated encapsulated torroid coil to measure electrical conductivity. The resulting conductivity output may be used to add one or more component.Type: ApplicationFiled: February 9, 2001Publication date: July 4, 2002Inventors: David L. Snyder, Karl J. Urquhart, Richard Swindell
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Publication number: 20020048213Abstract: A method and apparatus for blending and supplying process materials. The method and apparatus are particularly applicable to the blending of ultra-high purity chemicals, the blending of abrasive slurries with other chemicals for the polishing of semiconductor wafers, and high-accuracy blending of chemicals. The apparatus may include a dispensing subsystem that supplies process materials to a mixing subsystem where they are blended with a static mixer. The method may include supplying process materials with a dispensing subsystem and blending the process materials in a static mixer.Type: ApplicationFiled: July 31, 2001Publication date: April 25, 2002Inventors: Jeffrey Alexander Wilmer, Daniel Kase Mackenzie, John Michael Lull, Eric A. Zadai, Michael Loren Walker
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Publication number: 20020034122Abstract: The invention provides a process and system that utilizes conductivity measurements during mixing of chemical components to provide a slurry having a solids content within a qualification range. That is, by providing a reference conductivity value indicative of when a sufficient amount of at least two chemicals are combined and by monitoring conductivity while the chemicals are combined, the process and system of the present invention are able to provide a slurry having a solids content within a qualification range.Type: ApplicationFiled: June 7, 2001Publication date: March 21, 2002Inventor: Travis A. Lemke
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Patent number: 6290384Abstract: A method and apparatus for producing a liquid mixture in which mixture components are mixed to produce a product stream having a predetermined connection of a specified component. This mixing occurs within a fluidic network designed such that the components mix in inlet branches to form a first intermediate mixture having a lower concentration than that desired in the product stream. The specified component is metered into the intermediate product stream to produce a second intermediate product stream that is blended to produce a third intermediate product stream. The concentration of the specified component within the third intermediate product stream is measured and the metering pump is appropriately adjusted. The third intermediate product stream then passes through a recycle loop in which recycled product is mixed with an intermediate product stream to produce a liquid mixture stream that is divided into the recycle stream and a product stream.Type: GrantFiled: January 6, 2000Date of Patent: September 18, 2001Assignee: The BOC Group, Inc.Inventors: Peter M. Pozniak, Benjamin R. Roberts, Frank Jansen
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Patent number: 6247838Abstract: A method and apparatus for producing a liquid mixture in which mixture components are mixed to produce a product stream having a predetermined concentration of a specified component. This mixing occurs within a fluidic network designed such that the components mix in inlet branches to form a first intermediate mixture having a lower concentration than that desired in the product stream. The specified component is metered into the intermediate product stream to produce a second intermediate product stream that is blended to produce a third intermediate product stream. The concentration of the specified component within the third intermediate product stream is measured and the metering pump is appropriately adjusted. The third intermediate product stream then passes through a recycle loop in which recycled product is mixed with an intermediate product stream to produce a liquid mixture stream that is divided into the recycle stream and a product stream.Type: GrantFiled: November 24, 1998Date of Patent: June 19, 2001Assignee: The BOC Group, Inc.Inventors: Peter M. Pozniak, Benjamin R. Roberts, Frank Jansen
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Patent number: 6241378Abstract: The invention relates to a dosing apparatus for pastelike substances and mixtures thereof with a solvent by means of an injector, comprising an integrated shutoff device. The apparatus contains a detection device which detects the amount of paste according to conductimetry. The shutoff device is a dual piston valve closing an opening between the paste supply tube and an injector suction chamber as well as an opening between the solvent supply tube and an injector pre-chamber. The invention also relates to a method for dosing pastelike substances and the mixtures thereof with a solvent by means of such a device. By opening a shut-off device in a supply tube for a pressurized solvent, a dual piston valve moves against an opposing force. This releases a connection between a paste supply tube and an injection suction chamber, followed by a connection between the solvent supply tube and the injector pre-chamber.Type: GrantFiled: May 10, 1999Date of Patent: June 5, 2001Assignee: Henkel-Ecolab GmbH & Co. OHGInventors: Guenther Amberg, Wolfgang Huber, Klaus Rutz