Control Of Pulse Characteristics Patents (Class 372/25)
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Publication number: 20140226147Abstract: An electro-optical distance measuring device includes a laser driver for a laser diode for emitting laser light pulses. The laser driver has a laser diode voltage supply for providing a voltage below a laser threshold voltage of the laser diode, an inductive component in a supply path of the laser diode, and an electronic switching element. The electronic switching element is arranged in an interacting manner such that a current flow through the inductive component can be generated in a first switching position of the switching element and the current flow can be conducted through the laser diode in a second switching position of the switching element. One of the laser light pulses can be emitted as the result of a switch from the first switching position to the second switching position, and laser light cannot be emitted in the static first switching position or the static second switching position.Type: ApplicationFiled: September 4, 2012Publication date: August 14, 2014Applicant: LEICA GEOSYSTEMS AGInventors: Reto Metzler, Bernhard Fiegl, Kurt Giger
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Patent number: 8804779Abstract: A system, apparatus, and method may provide laser beams of two or more wavelengths from diode pumped solid-state laser sources (220, 222, 224). The beam paths of these laser beams with different wavelengths, which are generated by the laser sources (220, 222, 224), may be aligned along a common optical axis 280 by an optical configuration, to treat at least one target area. Frequency-doubled laser beams, output from a plurality of diode pumped solid state laser cavities, may be passed through fold mirrors (M2, M5, M8), and combined on a common optical axis 280, using one or more combiner mirrors (M10, M11, M12), to unify the beam paths. Selected laser beams may be delivered to a target using one or more delivery systems.Type: GrantFiled: May 4, 2010Date of Patent: August 12, 2014Assignee: Lumenis Ltd.Inventors: David Haydn Mordaunt, Steven Scott Christensen, Allison Albrecht Ferro, David A. Dewey
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Patent number: 8804787Abstract: A laser system includes a semiconductor laser having a laser driver coupled thereto. An output of the semiconductor laser is optically coupled to an input of an optical splitter that provides outputs including or coupled to a first branch having a first branch fiber coupled to a feedback reflector which provides a cavity boundary that defines a passive secondary cavity for the semiconductor laser, and a second branch including a back reflection reduction device. The roundtrip attenuation from an output facet of the laser to the feedback reflector is from ?30 dB to ?80 dB. The laser driver provides sufficient drive stability so that a frequency variation of the semiconductor laser is less than one free spectral range (FSR) of the secondary cavity. An output of said system is taken after the back reflection reduction device.Type: GrantFiled: August 13, 2013Date of Patent: August 12, 2014Assignee: Gooch and Housego PLCInventors: Steven Michael Coleman, Alexander Rosiewicz
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Patent number: 8803027Abstract: A thin beam laser crystallization apparatus for selectively melting a film deposited on a substrate is disclosed having a laser source producing a pulsed laser output beam, the source having an oscillator comprising a convex reflector and a piano output coupler; and an optical arrangement focusing the beam in a first axis and spatially expanding the beam in a second axis to produce a line beam for interaction with the film.Type: GrantFiled: May 23, 2007Date of Patent: August 12, 2014Assignee: Cymer, LLCInventor: Thomas Hofmann
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Publication number: 20140219300Abstract: A system and method for high power parametric amplification based on performing amplification in a frequency domain after time domain pulses are optically Fourier transformed, to overcome bandwidth limitations. In a nutshell, a first optical Fourier transformation of a seed spectrum is performed and parametric amplification is carried out in this spatially dispersed frequency plane. As a consequence, individual parts of the spectrum can be amplified using an optical amplification medium comprising a series of optical amplification units, such as different narrowband crystals, placed one next to each other. Each crystal is tuned independently to optimize its corresponding spectral slice. A second optical Fourier transformation recovers the time domain laser pulses. This method enables scalability of amplified bandwidth and pulse energy at the same time.Type: ApplicationFiled: August 16, 2012Publication date: August 7, 2014Applicant: INSTITU NATIONAL DE LA RECHERCHE SCIENTIFIQUEInventors: Bruno E. Schimidt, Francois Legare, Heide Ibrahim
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Publication number: 20140219299Abstract: Seed pulse generators for fiber amplifier systems include a seed pump controller coupled to a seed pump laser diode. A photodetector is situated to detect seed pulse generation, and is coupled to the seed pump controller so that seed pumping is decreased upon pulse detection. For a laser diode pump source, a pump current can be pulsed to produce a seed pulse and then decreased to a bias level such as a DC bias current that is less than a pump laser threshold current. Single seed pulses can be generated with reduced pulse jitter.Type: ApplicationFiled: February 4, 2013Publication date: August 7, 2014Applicant: NLIGHT PHOTONICS CORPORATIONInventor: nLight Photonics Corporation
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Patent number: 8798108Abstract: An embodiment relates to a device for generating a short duration laser pulse, which comprises: means for generating a laser beam and for filtering same, arranged in such a way as to generate an input laser beam providing an input laser pulse; a transparent slide comprising a non-linear scattering material; the laser generation means being arranged so that the slide widens the spectrum of the input laser pulse by phase self-modulation in order to generate a wide-spectrum laser pulse; compression means adapted for compressing the wide-spectrum laser pulse in order to generate a short duration laser pulse; wherein the laser generation means are arranged so that the input beam is spatially uniform on the transparent slide and has a break integral B lower than three when the input beam passes through the transparent slide.Type: GrantFiled: July 31, 2009Date of Patent: August 5, 2014Assignee: Ecole PolytechniqueInventors: GĂ©rard Mourou, Gilles Cheriaux, Christophe Radier
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Patent number: 8798107Abstract: A method and device are provided for generating bursts of sub-pulses, preferably in the picosecond range. Seed pulses are first generated, and then phase modulated to spread their spectral profile to several time-dependent spectral components. The phase modulated seed pulses are then spectrally filtered to remove spectral components and retain only selected ones, creating gaps in the amplitude profile of the seed pulses which therefore form bursts of sub-pulses. Various parameters such as the modulation amplitude, the modulation frequency, the spectral characteristics of the filters and the overall amplitude of the seed pulses may be controlled to provide a great versatility and adaptability.Type: GrantFiled: November 23, 2009Date of Patent: August 5, 2014Assignee: Institut National d'OptiqueInventors: Pascal Deladurantaye, Louis Desbiens, Vincent Roy, Yves Taillon
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Patent number: 8792156Abstract: An illumination system is disclosed for providing dual-excitation wavelength illumination for non-linear optical microscopy and micro-spectroscopy. The illumination system includes a laser system, an optical splitting means, a frequency shifting system, and a picosecond amplifier system. The laser system includes a laser for providing a first train of pulses at a center optical frequency ?1. The optical splitting means divides the first train of pulses at the center optical frequency ?1 into two trains of pulses. The frequency shifting system shifts the optical frequency of one of the two trains of pulses to provide a frequency shifted train of pulses. The picosecond amplifier system amplifies the frequency shifted train of pulses to provide an amplified frequency-shifted train of pulses having a pulse duration of at least 0.5 picoseconds.Type: GrantFiled: January 17, 2012Date of Patent: July 29, 2014Assignees: President and Fellows of Harvard College, The Arizona Board of Regents on Behalf of the University of ArizonaInventors: Khanh Kieu, Nasser Peyghambarian, Xiaoliang Sunney Xie, Christian W. Freudiger, Dan Fu
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Publication number: 20140204396Abstract: An electro-optical distance measuring device includes a laser driver for a laser diode for emitting laser light pulses. The measuring device further includes a laser diode voltage supply having a cascade of at least two voltage regulators, each of which provides an output voltage at a level below a laser threshold voltage of the laser diode. By changing from a first to a second switching position of an electronic switching element of the measuring device, one of the laser light pulses can be emitted and, in the steady-state first and the steady-state second switching positions, no laser light is emitted.Type: ApplicationFiled: December 19, 2013Publication date: July 24, 2014Applicant: LEICA GEOSYSTEMS AGInventors: Kurt GIGER, Reto METZLER, Bernhard FIEGL
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Patent number: 8787410Abstract: Compact high brightness light sources for the mid and far IR spectral region, and exemplary applications are disclosed based on passively mode locked Tm fiber comb lasers. In at least one embodiment the coherence of the comb sources is increased in a system utilizing an amplified single-frequency laser to pump the Tm fiber comb laser. The optical bandwidth generated by the passively mode locked Tm fiber comb laser is further decreased by using simultaneous 2nd and 3rd order dispersion compensation using either appropriate chirped fiber Bragg gratings for dispersion compensation, or fibers with appropriately selected values of 2nd and 3rd order dispersion. Fibers with large anomalous values of third order dispersion, or fibers with large numerical apertures, for example fibers having air-holes formed in the fiber cladding may be utilized.Type: GrantFiled: February 14, 2011Date of Patent: July 22, 2014Assignee: Imra America, Inc.Inventor: Martin Fermann
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Patent number: 8780947Abstract: The invention relates to a mirror arrangement for guiding a laser beam in a laser system having at least one first end mirror and one second end mirror, wherein said end mirrors define a resonator having an optical resonator axis, wherein the laser beam is guided into the resonator as an input laser beam and is guided out of the resonator again after multiple reflection at the first and second end mirrors as an output laser beam. The sequence of reflections at the first and second end mirror thereby determines a direction of rotation between the first and second end mirror, defined as an axis of rotation relative to the resonator axis, whereby a first beam path is defined and the laser beam circulates in a direction of rotation between the first and second end mirrors in the resonator defined as an axis of rotation relative to the resonator axis.Type: GrantFiled: November 19, 2010Date of Patent: July 15, 2014Assignee: High Q Laser GmbHInventors: Joachim Meier, Ulrike Wegner, Maximilian Josef Lederer
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Patent number: 8780440Abstract: A chirped pulse amplification system includes a laser source providing an input laser pulse along an optical path. The input laser pulse is characterized by a first temporal duration. The system also includes a multi-pass pulse stretcher disposed along the optical path. The multi-pass pulse stretcher includes a first set of mirrors operable to receive input light in a first plane and output light in a second plane parallel to the first plane and a first diffraction grating. The pulse stretcher also includes a second set of mirrors operable to receive light diffracted from the first diffraction grating and a second diffraction grating. The pulse stretcher further includes a reflective element operable to reflect light diffracted from the second diffraction grating. The system further includes an amplifier, a pulse compressor, and a passive dispersion compensator disposed along the optical path.Type: GrantFiled: May 18, 2010Date of Patent: July 15, 2014Assignee: Lawrence Livermore National Security, LLCInventors: Andrew James Bayramian, William A. Molander
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Patent number: 8774240Abstract: A frequency-drift amplification device for a pulsed laser, including: a stretcher for time-stretching an incident laser pulse; at least one amplifying medium for amplifying the laser pulse; a main compressor for time-compressing the laser pulse to a desired duration for an output pulse of the amplification device; and at least one adjustment compressor between the stretcher and the main compressor, and in which the laser pulse undergoes four diffractions on diffraction gratings to time-compress the stretched laser pulse to a duration that is greater than the desired duration for the output pulse of the amplification device.Type: GrantFiled: September 30, 2011Date of Patent: July 8, 2014Assignee: Ecole PolytechniqueInventor: Gilles Cheriaux
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Patent number: 8774239Abstract: An ultrafast laser generating system comprises a laser signal generator, a laser signal amplifier and a beam splitting element. The laser signal generator is configured to generate a first nanosecond pulse laser. The laser amplifier is configured to amplify the first nanosecond pulse laser from the laser signal generator so as to generate a second nanosecond pulse laser, which includes a picosecond pulse laser. The beam splitting element is configured to receive the second nanosecond pulse laser and split the picosecond pulse laser from the second nanosecond pulse laser.Type: GrantFiled: February 14, 2012Date of Patent: July 8, 2014Assignee: Industrial Technology Research InstituteInventors: Yao Wun Jhang, Hsin Chia Su, Chien Ming Huang, Chieh Hu, Hong Xi Tsau, Shih Ting Lin
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Patent number: 8766137Abstract: An optical transmitting unit transmits a pulsed laser beam oscillated by a pulsed laser beam oscillator to a focusing unit in a laser processing apparatus. A wavelength band expanding unit expands the wavelength band of the pulsed laser beam, and a pulse width expanding unit increases the pulse width of the expanded pulsed laser beam. A focusing lens focuses the expanded pulsed laser beam. An optical fiber transmits the focused pulsed laser beam through a collimating lens and a pulse width compressing unit compresses the pulse width of the collimated pulsed laser beam to restore the original pulse width for transmission.Type: GrantFiled: October 26, 2011Date of Patent: July 1, 2014Assignee: Disco CorporationInventor: Keiji Nomaru
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Publication number: 20140177661Abstract: There is provided a pulse shaping device including a pulse generator configured to generate pulsed light by using a semiconductor laser for emitting light of a predetermined wavelength, and an optical member provided in a subsequent stage of the pulse generator and configured to compress a pulse time width of the pulsed light. The pulsed light has a first frequency dispersion state. The optical member imparts a second frequency dispersion state to the pulsed light, the second frequency dispersion state being a frequency dispersion state opposite to the first frequency dispersion state.Type: ApplicationFiled: December 10, 2013Publication date: June 26, 2014Applicant: Sony CorporationInventors: Kenji Tanaka, Michio Oka
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Patent number: 8761215Abstract: A digital pulse shaping module provides a digital waveform such as a pulse shape, gating or a synchronizing digital signal for use with a pulsed laser oscillator. The digital pulse shaping module includes a waveform data generator that generates N-bit words having a number N of bits. A serializer is further provided to receive the N-bit words from the waveform data generator and outputs each bit individually in a series of bits corresponding to the digital waveform. The digital pulse shaping module further includes a delay module that provides a fine delay in the outputting of the bits by the serializer. This fine delay corresponds to a number of bits smaller than N, impacting on the timing of the outputted signal at the bit level. A pulse shaping generator has a plurality of digital pulse shaping modules.Type: GrantFiled: December 7, 2011Date of Patent: June 24, 2014Assignee: Institut National d'OptiqueInventors: Michel Jacob, Pascal Deladurantaye, Yves Taillon
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Patent number: 8760753Abstract: The present invention relates to a device (12) and to a method for amplifying light impulses (13). The device comprises a stretcher (15) stretching the light impulses over time, at least one amplifier (16) amplifying the stretched light impulses, and a compressor (17) compressing the stretched and amplified light impulses, wherein the amplifier (16) applies a non-linear phase generated by self-phase modulation to the stretched light impulses. In order to provide a device and a method for amplifying light impulses, by means of which light impulses having higher light impulse quality and light impulse peak power can be generated, the invention proposes that means for spectrally shaping the light impulses are disposed ahead of the amplifier (16) in the beam path, wherein the means for spectrally shaping the light impulses bring about a spectral trimming of the light impulses.Type: GrantFiled: December 23, 2009Date of Patent: June 24, 2014Assignees: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V., Friedrich-Schiller-Universitaet JenaInventors: Jens Limpert, Enrico Seise, Damian Schimpf, Fabian Roeser, Andreas Tuennermann
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Patent number: 8761213Abstract: A frequency-doubled OPS-laser having a desired output wavelength of 532 nm is tunable about that wavelength by a temperature tuned birefringent filter (BRF). The temperature of the BRF is varied while measuring transmission of a sample of the output through a Nd:YAG crystal having an absorption peak at a wavelength of about 532.4 nm. The peak is detected as a minimum of transmission and the temperature at which that minimum occurs is recorded. From wavelength-change-versus-temperature data for the BRF a temperature is calculated at which the output wavelength has the desired value and is maintained at that value to stabilize the output wavelength.Type: GrantFiled: October 1, 2012Date of Patent: June 24, 2014Assignee: Coherent GmbHInventors: Wolf Seelert, Vasiliy Ostroumov
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Patent number: 8761216Abstract: The invention is a method and apparatus for creating a color and optical density selectable visible mark on an anodized aluminum specimen. The method includes providing a laser marking system having a laser, laser optics and a controller operatively connected to said laser to control laser pulse parameters and a controller with stored laser pulse parameters, selecting the stored laser pulse parameters associated with the desired color and optical density, directing the laser marking system to produce laser pulses having laser pulse parameters associated with the desired color and optical density including temporal pulse widths greater than about 1 and less than about 1000 picoseconds to impinge upon said anodized aluminum.Type: GrantFiled: January 11, 2013Date of Patent: June 24, 2014Assignee: Electro Scientific Industries, Inc.Inventors: Haibin Zhang, Glenn Simenson, Robert Hainsey, David Barsic, Jeffrey Howerton, Wayne Crowther, Patrick Leonard
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Patent number: 8750344Abstract: In a laser pump arrangement for a laser medium that amplifies a laser beam, comprising at least one laser pump source (1?) with a plurality of emitters for generating partial pumping streams (TPS1?, TPS2?), the partial pumping streams (TPS1?, TPS2?) are led through a coupling optic to a homogenizer (3?) and then are thoroughly mixed in one axis through multiple reflections. In the process, the homogenizer (3?) and the laser medium are designed and disposed such that the pump stream exiting the homogenizer (3?) is led directly onto or into the laser medium while maintaining divergence in the mixing axis (DA), wherein the partial pumping streams (TPS1?, TPS2?) are projected, in particular focused, directly onto or into the laser medium in a projection axis (PA) that is perpendicular to the mixing axis (DA).Type: GrantFiled: November 6, 2009Date of Patent: June 10, 2014Assignee: High Q Laser GmbHInventors: Daniel Kopf, Maximilian Lederer
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Publication number: 20140153597Abstract: An apparatus for generating a short-pulse laser using a temporally modulated sideband gain is provided. The apparatus includes a laser diode and an external reflector. By use of a time difference resulted by a nanosecond laser pulse signal at the external reflector, a sideband gain is obtained for generating a short-pulse picosecond laser output.Type: ApplicationFiled: May 28, 2013Publication date: June 5, 2014Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTEInventors: Yao-Wun JHANG, Chien-Ming Huang, Hsin-Chia Su, Shih-Ting Lin, Chih-Lin Wang, Hong-Xi Tsau
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Publication number: 20140153596Abstract: A pulse multiplier includes a beam splitter and one or more mirrors. The beam splitter receives a series of input laser pulses and directs part of the energy of each pulse into a ring cavity. After circulating around the ring cavity, part of the pulse energy leaves the ring cavity through the beam splitter and part of the energy is recirculated. By selecting the ring cavity optical path length, the repetition rate of an output series of laser pulses can be made to be a multiple of the input repetition rate. The relative energies of the output pulses can be controlled by choosing the transmission and reflection coefficients of the beam splitter. This pulse multiplier can inexpensively reduce the peak power per pulse while increasing the number of pulses per second with minimal total power loss.Type: ApplicationFiled: December 11, 2012Publication date: June 5, 2014Applicant: KLA-Tencor CorporationInventors: Yung-Ho Alex Chuang, Justin Dianhuan Liou, J. Joseph Armstrong, Yujun Deng
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Patent number: 8736954Abstract: High power parallel fiber arrays for the amplification of high peak power pulses are described. Fiber arrays based on individual fiber amplifiers as well as fiber arrays based on multi-core fibers can be implemented. The optical phase between the individual fiber amplifier elements of the fiber array is measured and controlled using a variety of phase detection and compensation techniques. High power fiber array amplifiers can be used for EUV and X-ray generation as well as pumping of parametric amplifiers.Type: GrantFiled: April 27, 2012Date of Patent: May 27, 2014Assignee: IMRA America, Inc.Inventors: Martin E. Fermann, Ingmar Hartl, Andrius Marcinkevicius, Liang Dong
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Patent number: 8737438Abstract: A laser crystallization apparatus and method are disclosed for selectively melting a film such as amorphous silicon that is deposited on a substrate. The apparatus may comprise an optical system for producing stretched laser pulses for use in melting the film. In still another aspect of an embodiment of the present invention, a system and method are provided for stretching a laser pulse. In another aspect, a system is provided for maintaining a divergence of a pulsed laser beam (stretched or non-stretched) at a location along a beam path within a predetermined range. In another aspect, a system may be provided for maintaining the energy density at a film within a predetermined range during an interaction of the film with a shaped line beam.Type: GrantFiled: August 9, 2012Date of Patent: May 27, 2014Assignee: Cymer, LLCInventors: Palash P. Das, Thomas Hofmann, Jesse D. Davis, Richard L. Sandstrom
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Patent number: 8737439Abstract: The invention relates to an optical assembly (1) comprising a pulsed light source (2) for generating primary light pulses (4), a pulse splitter (5) for splitting said primary light pulses (4) into first and second secondary light pulses (7), and a delay element (8) for delaying said second secondary light pulses (7) relative to said first secondary light pulses (6), where the pulse repetition rate of said pulsed light source (2) is variable in order to change a temporal delay between different secondary light pulses (6,7) The invention is characterized in that said optical assembly (1) comprises a thermal insulation (12), a temperature stabilizer (16) or a temperature compensator (13) for said delay element (8) and/or a control circuit (27) for determining and controlling a drift of said pulse repetition rate.Type: GrantFiled: January 23, 2013Date of Patent: May 27, 2014Assignee: Menlo Systems GmbHInventors: Rafal Wilk, Ronald Holzwarth, Michael Mei
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Patent number: 8731008Abstract: A source of femtosecond laser pulses (50) comprising a 980 nm picosecond seed pulse source (12), a Ytterbium (Yb) doped fiber amplifier (14) operating in the three-level regime, a passive air-clad fiber (52) and a pulse compressor (16). The seed pulses are spectrally broadened due to self phase modulation (SPM) in the air-clad Yb doped fiber (18) and further broadened due to SPM in the passive core of the passive air-clad fiber (52), to produce sufficient spectral broadening to allow the pulses to be compressed in the dispersion compensator (16) into femtosecond pulses. The Yb doped fiber may have a phosphosilicate host composition in order to mitigate photodarkening.Type: GrantFiled: November 28, 2008Date of Patent: May 20, 2014Assignee: Fianium Ltd.Inventors: John Redvers Clowes, Anatoly Borisovich Grudinin, Pascal Dupriez
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Patent number: 8730570Abstract: Techniques and devices for using a chirped fiber Bragg grating to compress amplified laser pulses.Type: GrantFiled: July 1, 2010Date of Patent: May 20, 2014Assignee: Calmar Optcom, Inc.Inventor: Anthony Hong Lin
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Publication number: 20140133503Abstract: Systems and methods of high efficiency amplification of pulsed laser output for high energy ultra-short pulse laser systems are provided herein. According to some embodiments, methods for amplifying pulsed laser output for high energy ultra-short pulse laser systems include receiving pulsed laser output and amplifying the pulsed laser output by propagating the pulsed laser output through a non-silica based gain medium that has been doped with a concentration of rare earth ions, wherein the concentration of the rare earth ions within the gain medium is approximately greater than one percent by weight.Type: ApplicationFiled: November 9, 2012Publication date: May 15, 2014Inventors: Xiang Peng, Kyungbum Kim, Michael M. Mielke
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Patent number: 8724207Abstract: Recent invention of longitudinally chirped volume Bragg gratings has dramatically changed a design of high power femtosecond lasers. Replacing of bulky pairs of conventional surface gratings with compact and robust chirped volume Bragg gratings for stretching and compression of laser pulses in chirped-pulse-amplification systems enabled decrease of size and weight of those systems by several times. The methods and devices enable substantial increase of stretching time and compression to shorter pulses, enhancement of stretched and compressed beams quality by stationary or dynamic shaping of gratings, and shaping of laser pulses in both temporal and spectral domains.Type: GrantFiled: January 13, 2011Date of Patent: May 13, 2014Assignees: University of Central Florida Research Foundation, Inc., Optigrate CorporationInventors: Oleksiy Andrusyak, Almantas Galvanauskas, Leonid B. Glebov, Larissa Glebova, Julien Lumeau, Sergiy Mokhov, Eugeniu Rotari, Vadim I. Smirnov, Boris Ya Zeldovich
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Publication number: 20140126591Abstract: A pulsed laser oscillator includes at least one first electrooptical element that polarizes light according to an applied voltage and a voltage control unit that applies a voltage to the first electrooptical element and controls the voltage. The voltage control unit changes over time a voltage value applied to the first electrooptical element, to control a pulse width of laser light.Type: ApplicationFiled: January 9, 2014Publication date: May 8, 2014Applicant: V TECHNOLOGY CO., LTD.Inventors: Koichi KAJIYAMA, Michinobu Mizumura, Tetsuya Kiguchi, Daisuke Ishii, Yoshikatsu Yanagawa, Masami Takimoto
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Patent number: 8717670Abstract: A fiber-MOPA includes a seed-pulse source followed by fiber amplifier stages. The seed pulse source delivers signal pulses for performing a laser operation and delivers radiation between the seed pulses to maintain the collective average of the seed pulse power and intermediate radiation power constant. Keeping this average power constant keeps the instantaneous available gain of the fiber amplifier stages constant. This provides that the seed pulse delivery can be changed from one regime to a next without a period of instability between the regimes.Type: GrantFiled: June 17, 2011Date of Patent: May 6, 2014Assignee: Coherent, Inc.Inventors: Andrei Starodoumov, Ronald Lambert, Michael Snadden, Andreas Diening
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Patent number: 8718103Abstract: The present invention relates to an apparatus for generating an ultra-short ultra-high intensity pulse laser, comprising: a pulse laser providing unit which generates an ultra-short ultra-high intensity pulse laser, stretches pulse width, then selects and provides only a pulse laser having a predetermined polarizing angle; a polarization characteristic adjusting unit which divides the pulse laser provided by the pulse laser providing unit into S-polarizing component light and P-polarizing component light, varies the phase difference and amplitude difference between the S-polarizing component light and the P-polarizing component light, and combines the two types of light to generate a pulse laser with varied polarization characteristics; and a pulse compression unit which compresses the pulse width of the pulse laser, the polarization characteristics of which are varied by the polarization characteristic adjusting unit, and outputs the pulse laser.Type: GrantFiled: March 11, 2011Date of Patent: May 6, 2014Assignee: Electronics and Telecommunications Research InstituteInventors: Nam-Soo Myung, Seung-Hwan Kim
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Patent number: 8718106Abstract: An apparatus includes a pulsed laser source that produces a pulsed laser beam at an input repetition rate and an input pulse power; a passive pulse splitter that receives the pulsed laser beam and outputs a signal including a plurality of sub-pulses for each input pulse of the pulsed laser beam, where the sub-pulses have a repetition rate that is greater than the input repetition rate and at least two of the sub-pulses have power less than the input pulse power; a sample accommodating structure configured to accommodate a sample placed in the path of a sample beam that is formed from the beam that exits the pulse splitter; and a detector that receives a signal of interest emitted from a sample accommodated by the sample accommodating structure based on the incident sample beam.Type: GrantFiled: May 3, 2011Date of Patent: May 6, 2014Assignee: Howard Hughes Medical InstituteInventors: Na Ji, Eric Betzig
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Patent number: 8718105Abstract: A laser source (10) for emitting an output beam (12) includes a first gain medium (16B) that generates a first beam (16A), a second gain medium (18B) that generates a second beam (18A), a common feedback assembly (28) positioned in the path of the first beam (16A) and the second beam (18), and a control system (32). The common feedback assembly (28) redirects at least a portion of the first beam (16A) back to the first gain medium (16B), and at least a portion of the second beam (18A) back to the second gain medium (18B). The control system (32) selectively and individually directs power to the first gain medium (16B) and the second gain medium (18). Additionally, the common feedback assembly (28) can include a feedback mover (46) that continuously adjusts the angle of incidence of the first beam (16A) and the second beam (18A) on the feedback assembly (28).Type: GrantFiled: March 14, 2011Date of Patent: May 6, 2014Assignee: Daylight Solutions, Inc.Inventors: Miles James Weida, David F. Arnone
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Patent number: 8707921Abstract: A method for operating a laser device which has a laser-active solid and a preferably passive Q-switch in which the laser device is acted upon by pumped light for generating a laser pulse. The radiation spontaneously emitted by the laser device is analyzed for drawing a conclusion about an operating state of the laser device, in particular about a laser pulse being generated.Type: GrantFiled: May 26, 2008Date of Patent: April 29, 2014Assignee: Robert Bosch GmbHInventor: Heiko Ridderbusch
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Patent number: 8704200Abstract: An EUV light source is disclosed which may comprise a plurality of targets, e.g., tin droplets, and a system generating pre-pulses and main-pulses with the pre-pulses for irradiating targets to produce expanded targets. The system may further comprise a continuously pumped laser device generating the main pulses with the main pulses for irradiating expanded targets to produce a burst of EUV light pulses. The system may also have a controller varying at least one pre-pulse parameter during the burst of EUV light pulses. In addition, the EUV light source may also include an instrument measuring an intensity of at least one EUV light pulse within a burst of EUV light pulses and providing a feedback signal to the controller to vary at least one pre-pulse parameter during the burst of EUV light pulses to produce a burst of EUV pulses having a pre-selected dose.Type: GrantFiled: April 6, 2012Date of Patent: April 22, 2014Assignee: Cymer, LLCInventors: Alexander N. Bykanov, Igor V. Fomenkov
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Patent number: 8698399Abstract: A method of sustaining a plasma, by focusing a first wavelength of electromagnetic radiation into a gas within a volume, where the first wavelength is substantially absorbed by a first species of the gas and delivers energy into a first region of a plasma having a first size and a first temperature. A second wavelength of electromagnetic radiation is focused into the first region of the plasma, where the second wavelength is different than the first wavelength and is substantially absorbed by a second species of the gas and delivers energy into a second region of the plasma region within the first region of the plasma having a second size that is smaller than the first size and a second temperature that is greater than the first temperature.Type: GrantFiled: February 12, 2010Date of Patent: April 15, 2014Assignee: KLA-Tencor CorporationInventors: Ilya V. Bezel, Anatoly Shchemelinin, Eugene Shifrin, Matthew W. Derstine, Richard W. Solarz
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Patent number: 8693508Abstract: A light source apparatus includes an optical resonator formed by an optical amplification medium and an optical switch. The optical switch includes a saturable absorber and changes its transmittance or reflectance when receiving an optical pulse emitted from a light irradiation source which includes a wavelength-tunable light source. The light source apparatus emits amplified light from the optical resonator in correspondence with the center wavelength of the optical pulse from the wavelength-tunable light source. The relationship between a length L and an effective refractive index n of the optical resonator and a repetition frequency f of the optical pulse satisfies a condition L<c/(nf), and a relationship between the length L and a recovery time ? in which the changed transmittance or reflectance of the optical switch recovers satisfies a condition ?>(nL)/c.Type: GrantFiled: July 28, 2011Date of Patent: April 8, 2014Assignee: Canon Kabushiki KaishaInventor: Tomohiro Yamada
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Patent number: 8693514Abstract: The present invention enables simultaneous setting or automatic setting of a pulse peak and a pulse width of a light pulse. In a configuration comprising a light emitting element outputting laser light, a driving current supply section supplying a driving current to the light emitting element, a modulator applying a modulation voltage for pulse modulation of the laser light to the light emitting element, and a modulation control section controlling a modulation pattern as a pattern of pulse modulation of the modulation voltage for the modulator, the modulation control section sets a modulation voltage value in the modulation pattern based on information on a driving current value, and sends information on the modulation pattern to the modulator so that the modulation voltage reaches the set value.Type: GrantFiled: April 7, 2010Date of Patent: April 8, 2014Assignee: Megaopto Co., Ltd.Inventor: Shinobu Tamaoki
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Publication number: 20140092927Abstract: A femtosecond laser based laser processing system having a femtosecond laser, frequency conversion optics, beam manipulation optics, target motion control, processing chamber, diagnostic systems and system control modules. The femtosecond laser based laser processing system allows for the utilization of the unique heat control in micromachining, and the system has greater output beam stability, continuously variable repetition rate and unique temporal beam shaping capabilities.Type: ApplicationFiled: December 9, 2013Publication date: April 3, 2014Applicant: IMRA AMERICA, INC.Inventors: Lawrence Shah, James M. Bovatsek, Alan Y. Arai, Tadashi Yamamoto, Rajesh S. Patel, Donald J. Harter
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Patent number: 8687665Abstract: Semiconductor light-emitting devices; methods of forming semi-conductor light emitting devices, and methods of operating semi-conductor light emitting devices are provided. A semiconductor light-emitting device includes a first laser section monolithically integrated with a second laser section on a common substrate. Each laser section has a phase section, a gain section and at least one distributed Bragg reflector (DBR) structure. The first laser section and the second laser section are optically coupled to permit optical feedback therebetween. Each phase section is configured to independently tune a respective one of the first laser section and second laser section relative to each other.Type: GrantFiled: September 15, 2011Date of Patent: April 1, 2014Assignee: Sandia CorporationInventors: Anna Tauke-Pedretti, Erik J. Skogen, Gregory A. Vawter, Weng W. Chow
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Patent number: 8687662Abstract: Methods and systems for generating pulses of laser radiation at higher repetition rates than those of available excimer lasers are disclosed that use multiple electronic triggers for multiple laser units and arrange the timings of the different triggers with successive delays, each delay being a fraction of the interval between two successive pulses of a single laser unit. Methods and systems for exposing nanoscale patterns using such high-repetition-rate lasers are disclosed.Type: GrantFiled: May 16, 2013Date of Patent: April 1, 2014Assignee: Anvik CorporationInventor: Kanti Jain
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Patent number: 8685599Abstract: A method of pulsed laser intrinsic marking can provide a unique identifier to detect tampering or counterfeiting.Type: GrantFiled: February 23, 2012Date of Patent: April 1, 2014Assignee: Sandia CorporationInventors: David P. Adams, Joel Patrick McDonald, Bradley Howell Jared, V. Carter Hodges, Deidre Hirschfeld, Dianna S. Blair
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Patent number: 8687661Abstract: In order to maintain a constant laser output pulse power in a RF-energized, sealed-off, diffusion cooled, pulsed, CO2 gas-discharge laser, each laser output pulse is generated by train or burst of shorter RF pulses. When the time between laser output pulses becomes short enough that the power in one pulse would be reduced by gas-discharge heating effects of a previous pulse, power in the RF pulse trains is varied by varying the duration or duty cycle of pulses in the bursts, thereby keeping output-pulse power in the laser output pulses constant. RF pulses in any burst can have a different duration for tailoring the temporal shape of a corresponding laser-output pulse.Type: GrantFiled: May 9, 2012Date of Patent: April 1, 2014Assignee: Coherent, Inc.Inventors: Peter Rosenthal, John Kennedy, Vern Seguin, David Allie
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Patent number: 8675700Abstract: A laser system in this disclosure may include: a master oscillator configured to output pulsed laser light, a coherence reduction optical system configured to reduce coherence of the pulsed laser light from the master oscillator, and a controller configured to control the coherence reduction optical system so that a speckle of the pulsed laser light varies.Type: GrantFiled: March 22, 2012Date of Patent: March 18, 2014Assignee: Gigaphoton, Inc.Inventors: Shuntaro Watanabe, Takashi Onose, Osamu Wakabayashi
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Patent number: 8675697Abstract: A master oscillator system may include a grating configured to function as one resonator mirror in an optical resonator, a spectral bandwidth tuning unit configured to tune the spectral bandwidth of a laser beam transmitted within the optical resonator, a storage unit configured to store a control value of the spectral bandwidth tuning unit corresponding to a desired spectral bandwidth and a controller configured to control the spectral bandwidth tuning unit based on the control value stored in the storage unit.Type: GrantFiled: August 29, 2012Date of Patent: March 18, 2014Assignee: Gigaphoton Inc.Inventors: Satoshi Tanaka, Hiroshi Tanaka, Osamu Wakabayashi
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Patent number: 8675699Abstract: A laser pulse synthesis system is provided. A further aspect of the present system uses a phase-only modulator to measure ultrashort laser pulses. An additional aspect achieves interferences between split subpulses even though the subpulses have different frequencies. Yet another aspect of a laser system employs multi-comb phase shaping of a laser pulse. In another aspect, a laser system includes pulse characterization and arbitrary or variable waveform generation through spectral phase comb shaping.Type: GrantFiled: January 22, 2010Date of Patent: March 18, 2014Assignee: Board of Trustees of Michigan State UniversityInventors: Marcos Dantus, Vadim V. Lozovoy
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Publication number: 20140064308Abstract: A laser processing apparatus, a filter device and a method are used for controlling a pulse laser, which is controllable in terms of its pulse energy and of a temporal triggering of laser pulses, during material processing of an object, in particular during the marking of a plastics-based document. The method includes comparing a pulse energy signal which assumes voltage values, in temporal correlation with a clock signal, which represent a pulse energy for the laser pulses for processing, with a threshold value condition and generating a logic result signal. The clock signal is passed to a gate and controlling the gate using the logic result signal and generating a retrieval signal thereby. An energy control signal is provided which has a voltage according to a specification of a control voltage. The retrieval signal and the energy control signal are used to control the pulse laser.Type: ApplicationFiled: November 18, 2011Publication date: March 6, 2014Applicant: BUNDESDRUCKEREI GMBHInventor: Daniel Mysliwitz