With Means For Controlling Gas Flow Patents (Class 372/58)
  • Patent number: 10268128
    Abstract: A lithographic apparatus comprising an illumination system configured to condition a radiation beam, a support structure constructed to support a patterning device, the patterning device being capable of imparting the radiation beam with a pattern in its cross-section to form a patterned radiation beam, a substrate table constructed to hold a substrate, and a projection system configured to project the patterned radiation beam onto the substrate, the lithographic apparatus being provided with a first cooling fluid circuit which is configured to cool components to a first temperature, and provided with a second cooling fluid circuit which is configured to cool components to a second temperature that is lower than the first temperature.
    Type: Grant
    Filed: June 14, 2016
    Date of Patent: April 23, 2019
    Assignee: ASML Netherlands B.V.
    Inventors: Franciscus Johannes Joseph Janssen, Johannes Paul Marie De La Rosette, Edwin Cornelis Kadijk, Nicolas Alban Lallemant, Jan Liefooghe, Markus Rolf Werner Matthes, Marcel Johannus Elisabeth Hubertus Muitjens, Hubert Matthieu Richard Steijns, André Gillis Van De Velde, Marinus Aart Van Den Brink
  • Patent number: 10205297
    Abstract: A narrow band excimer laser apparatus includes a line narrowing module that narrows the spectral line width of laser light, a nitrogen gas introducing unit, a first valve that restricts the flow of nitrogen gas from the introducing unit into a casing of the module, an exhaust unit that causes gas to flow out from the casing, an exhaust pump for exhausting the gas from the casing, a second valve that restricts the exhausting of gas from the exhaust unit, an atmosphere discharge unit that discharges the gas within the casing into the atmosphere, a third valve that restricts the discharge of gas into the atmosphere, and a control unit that closes the second valve while opening the first and third valves, supplies nitrogen gas into the casing, then closes the third valve while opening the first and second valves, drives the exhaust pump, and causes laser oscillation thereafter.
    Type: Grant
    Filed: March 6, 2018
    Date of Patent: February 12, 2019
    Assignee: Gigaphoton Inc.
    Inventors: Hirotaka Miyamoto, Osamu Wakabayashi
  • Patent number: 10037896
    Abstract: A fabrication method includes: (1) forming a wire array on a fabrication substrate; (2) forming a porous layer within a portion of the fabrication substrate below the wire array; (3) separating the porous layer and the wire array from a remaining portion of the fabrication substrate; and (4) affixing top ends of the wire array to a target substrate.
    Type: Grant
    Filed: September 26, 2013
    Date of Patent: July 31, 2018
    Assignee: The Board of Trustees of the Leland Stanford Junior University
    Inventors: Jeffrey Weisse, Xiaolin Zheng
  • Patent number: 9887514
    Abstract: A first calculation unit calculates an acceleration factor of lifetime consumption of the light source with as case of a standard temperature and standard drive condition as a reference, a second calculation unit calculates a whole lifetime or remaining lifetime of individual light sources relative to a performance index of the individual light sources or a change rate of the performance index, a computation unit obtains an effective cumulative driving time at which the magnitude of influence imparted on the lifetime is equivalent with a case of driving at the standard temperature and standard drive condition, by calculating a time integral of the acceleration factor, and a recording unit records the effective cumulative driving time and the whole lifetime or remaining lifetime together with an optical output characteristic of the light source.
    Type: Grant
    Filed: July 3, 2017
    Date of Patent: February 6, 2018
    Assignee: FANUC CORPORATION
    Inventors: Hiroshi Takigawa, Satoshi Kagiwada
  • Patent number: 9837780
    Abstract: The excimer laser apparatus may include a laser chamber configured to contain gas, a pair of electrodes provided in the laser chamber, a power source unit configured to supply a pulse voltage between the pair of electrodes, a gas supply unit configured to supply gas into the laser chamber, a gas exhaust unit configured to partially exhaust gas from within the laser chamber, and a gas control unit configured to control the gas supply unit and the gas exhaust unit, where a replacement ratio of gas to be replaced from within the laser chamber increases as deterioration of the pair of electrodes progresses, the deterioration being represented by a deterioration parameter of the pair of electrodes.
    Type: Grant
    Filed: May 10, 2016
    Date of Patent: December 5, 2017
    Assignee: Gigaphoton Inc.
    Inventors: Takeshi Asayama, Osamu Wakabayashi, Kouji Kakizaki
  • Patent number: 9732766
    Abstract: An electric motor-driven compressor includes a housing assembly comprising a motor housing and a compressor housing mounted thereto. The compressor housing contains a centrifugal compressor wheel that is mounted on a shaft of the motor rotor and also defines an air inlet that leads air into the compressor wheel, and a volute that collects the compressed air. Air bearings rotatably support the shaft. Cooling air passages are defined in the housing assembly for supplying cooling air to the air bearings. A diffuser between the exit of the compressor wheel and the volute serves to diffuse the compressed air. The compressor includes a heat shield formed separately from the compressor housing and the motor housing and disposed between them. The heat shield defines one wall of the diffuser and also cooperates with the housing assembly to define part of the cooling air passages for the cooling air supplied to the bearings.
    Type: Grant
    Filed: March 26, 2014
    Date of Patent: August 15, 2017
    Assignee: Honeywell International Inc.
    Inventors: Glenn F. Thompson, Mike Guidry, John Mason, Rick Johnson, Patrick Beresewicz
  • Patent number: 9722386
    Abstract: A laser oscillator comprises a heat exchanger which cools a gas medium. The heat exchanger includes a cooling part which performs heat exchange between the gas medium and a cooling medium, a tubular member fixed to a frame body, and a foreign matter collection container. The tubular member is disposed so that the gas medium which flows out of the cooling part moves along an outer surface of the tubular member and then changes a proceeding direction to flow into an inlet portion. The foreign matter collection container collects foreign matters which are separated from a flow of the gas medium.
    Type: Grant
    Filed: September 14, 2016
    Date of Patent: August 1, 2017
    Assignee: Fanuc Corporation
    Inventors: Risa Ito, Tetsuhisa Takazane, Yuji Nishikawa
  • Patent number: 9673685
    Abstract: An improved system for monitoring vibration of an electric machine is disclosed. According to one embodiment, sensors are positioned in a plane orthogonal to the motor shaft and each sensor detects vibration along at least one axis of the motor. The sensors are oriented such that the polarity of each sensor is reversed. The pairs of sensors may be used to isolate specific vibrations within the motor. According to another embodiment, a sensor may be mounted directly to the motor shaft. The sensor on the motor shaft directly detects vibrations along the motor shaft. Optionally, a second sensor may be mounted to a fixed location within the motor housing, and the combination of the sensor on the motor shaft and the sensor at a fixed location may be used to isolate specific vibrations within the motor. A motor controller may adjust operation of the motor to reduce the isolated vibration.
    Type: Grant
    Filed: April 2, 2014
    Date of Patent: June 6, 2017
    Assignee: Rockwell Automation Technologies, Inc.
    Inventors: Mark Cooper, Kelly J. Bronk, Wei Qian, Zhenhuan Yuan, Shankernarayan Ramanarayanan, Manas Sawant, Shun Feng, Robert H. Schmidt
  • Patent number: 9590380
    Abstract: There was the problem that the pressure of the laser medium rises from the target value by the heat when generating laser light. The laser oscillator includes a controller, laser medium flow path, resonator part, blower, pressure detecting part, laser medium supply-exhaust part, and temporary stop command part. The controller controls the resonator part to stop to generate laser light if a temporary stop is commanded, controls the blower 18 to slow the rotational speed of the blower from the first rotational speed to the second rotational speed, and controls the laser medium supply-exhaust part so that the pressure is the second target value lower than the pressure at the time when the rotational speed of the blower is the second rotational speed.
    Type: Grant
    Filed: February 10, 2016
    Date of Patent: March 7, 2017
    Assignee: Fanuc Corporation
    Inventor: Akihiko Nishio
  • Patent number: 9536551
    Abstract: A laser processing method processes spots on an object in a scan area with a laser beam emitted from a laser emitter. The method includes steps of covering the scan area in such a way as to transmit the laser beam and define a closed space over the scan area, jetting an inert gas into the closed space so that the jetted inert gas forms a gas curtain sweeping along the scan area in the closed space, and discharging the inert gas from the closed space while maintaining a positive pressure in the closed space, thereby removing plumes from the spots processed with the laser beam and preventing the spots from oxidizing. The method is capable of stably laser-processing the object without changing the color of the processed spots.
    Type: Grant
    Filed: January 20, 2012
    Date of Patent: January 3, 2017
    Assignee: NHK SPRING CO., LTD.
    Inventor: Tadashi Tokiwa
  • Patent number: 9492884
    Abstract: In a laser processing machine 100 including a plurality of element units containing at least a laser blower unit 3, an optical-path purge unit 24, and a temperature controlling unit 8, a measurement unit and a control unit 10 are provided. The measurement unit measures an elapsed time from a final trigger at which a laser processing operation of the laser processing machine has stopped and no user operation is applied with respect to the laser processing machine. The control unit 10 stops the element units based on the elapsed time after the final trigger, when a condition specified for each of the element units is satisfied.
    Type: Grant
    Filed: September 13, 2011
    Date of Patent: November 15, 2016
    Assignee: Mitsubishi Electric Corporation
    Inventors: Mototoshi Kumaoka, Tomohiro Kyoto, Naoki Miyamoto
  • Patent number: 9497840
    Abstract: A method and apparatus for creating and utilizing dual laser curtains from a single laser source in a laser produced plasma (LPP) extreme ultraviolet (EUV) light system is disclosed. A polarizing beam splitter creates two beams of orthogonal polarization from a single laser, and the beams are used to generate two laser curtains. Sensors detect flashes from droplets of target material as they pass through the curtains. One sensor may detect the position of the droplets relative to a desired trajectory to the irradiation site so that the orientation of a droplet generator may be adjusted to direct subsequent droplets to the irradiation site, as in the prior art. A second sensor may detect each droplet as it passes through a curtain to determine when a source laser should generate a pulse so that the pulse will arrive at the irradiation site at the same time as the droplet, so that a signal may be sent to the source laser to fire at the correct time.
    Type: Grant
    Filed: February 6, 2014
    Date of Patent: November 15, 2016
    Assignee: ASML Netherlands B.V.
    Inventor: Martijn Wehrens
  • Patent number: 9484704
    Abstract: A laser oscillator comprising an electric discharge excitation part having a discharge tube, and generates laser by excitation discharge of a laser gas flow through the inside of the discharge tube, an optical resonance part which has optical components attached to outsides of end walls of the discharge tube, and resonates laser generated in the discharge tube, and blower piping which connects an intake port and exhaust port of the discharge tube to form a circulation path of laser gas. The end walls of the discharge tube are provided with through holes which connect the inside of the discharge tube and the optical components, and blocking members are arranged in the through holes so as to block the flow of laser gas through the through holes toward the optical components.
    Type: Grant
    Filed: May 14, 2015
    Date of Patent: November 1, 2016
    Assignee: FANUC CORPORATION
    Inventor: Hiroyuki Yoshida
  • Patent number: 9470140
    Abstract: It is intended to implement an electric supercharger that has a simplified architecture, is easy to assemble, produces reduced vibration and noise, and has a motor inverter, making it possible to minimize losses in motor output and rotary-shaft output. The electric supercharger is provided with the following: an integrated housing with a built-in electric motor and motor inverter; and a ball bearing and damper-sleeve structure arranged on both sides of the electric motor. The damper-sleeve structure comprises a large-diameter sleeve, a spring guide, a coil spring, and a ball bearing. A gap is formed between the ball bearings and a sleeve and the large-diameter sleeve. The inner ring or outer ring of the ball bearings are supported by various support members disposed on both sides. An elastic O-ring that elastically supports the sleeve and large-diameter sleeve is provided on the outside of the sleeves.
    Type: Grant
    Filed: July 5, 2012
    Date of Patent: October 18, 2016
    Assignee: MITSUBISHI HEAVY INDUSTRIES, LTD.
    Inventors: Byeongil An, Motoki Ebisu, Hiroshi Suzuki
  • Patent number: 9357625
    Abstract: An initial pulse of radiation is generated; a section of the initial pulse of radiation is extracted to form a modified pulse of radiation, the modified pulse of radiation including a first portion and a second portion, the first portion being temporally connected to the second portion, and the first portion having a maximum energy that is less than a maximum energy of the second portion; the first portion of the modified pulse of radiation is interacted with a target material to form a modified target; and the second portion of the modified pulse of radiation is interacted with the modified target to generate plasma that emits extreme ultraviolet (EUV) light.
    Type: Grant
    Filed: July 7, 2014
    Date of Patent: May 31, 2016
    Assignee: ASML Netherlands B.V.
    Inventors: Yezheng Tao, John Tom Stewart, IV, Jordan Jur, Andrew LaForge, Daniel Brown, Jason M. Arcand, Alexander A. Schafgans, Michael A. Purvis
  • Patent number: 9331449
    Abstract: A gas laser oscillator includes a first control valve for controlling an amount of laser gas supplied into a gas container, a second control valve for controlling an amount of laser gas exhausted from the gas container, and a controller for controlling openings of the first and second control valves. The controller includes a storage unit for storing data indicating a relationship between the laser gas pressure in the gas container, the opening of the second control valve, and the exhaust amount of laser gas, a gas pressure control unit for controlling the openings of the first and second control valves, respectively, such that the laser gas pressure becomes closer to a reference gas pressure, and a gas consumption amount control unit for controlling the openings of the first and second control valves, respectively, such that the exhaust amount of laser gas becomes closer to a target consumption amount.
    Type: Grant
    Filed: July 13, 2015
    Date of Patent: May 3, 2016
    Assignee: FANUC CORPORATION
    Inventors: Munekazu Matsuda, Hiroyuki Yoshida
  • Patent number: 9240665
    Abstract: A gas laser apparatus includes a receptacle for enclosing a laser gas, a laser oscillator that emits a laser beam, a pressure detecting unit that detects gas pressure inside the receptacle, an exhausting unit that discharges a gas from the receptacle, a feeding unit that supplies a laser gas into the receptacle, a pressure storing unit configured to store the pressure detected by the pressure detecting unit and retain stored information even when a power supply is shut off, a comparing unit that compares pressure inside the receptacle when the gas laser apparatus has stopped suddenly with pressure inside the receptacle when the gas laser apparatus is restarted thereafter, and a determining unit that determines whether or not a gas should be discharged from the receptacle and whether or not the laser gas should be supplied into the receptacle based on the result of the comparison.
    Type: Grant
    Filed: February 19, 2015
    Date of Patent: January 19, 2016
    Assignee: FANUC CORPORATION
    Inventor: Akihiko Nishio
  • Patent number: 9241395
    Abstract: A method and apparatus for improved control of the trajectory and timing of droplets of target material in a laser produced plasma (LPP) extreme ultraviolet (EUV) light system is disclosed. A droplet illumination module generates two laser curtains for detecting the droplets. The first curtain is used for detecting the position of the droplets relative to a desired trajectory to the irradiation site so that the position of a droplet generator may be adjusted to direct the droplets to the irradiation site, as in the prior art. A droplet detection module detects each droplet as it passes through the second curtain, determines when the source laser should generate a pulse so that the pulse arrives at the irradiation site at the same time as the droplet, and sends a signal to the source laser to fire at the correct time.
    Type: Grant
    Filed: September 26, 2013
    Date of Patent: January 19, 2016
    Assignee: ASML Netherlands B.V.
    Inventors: Vahan Senekerimyan, Martijn Wehrens
  • Patent number: 9083139
    Abstract: A mount for an optical element such as in a laser, optical amplifier, or other optical system, is disclosed. The mount is a mounting vane (100) for cooling the optical element (125) by a fluid stream. The optical element may be a gain medium generating heat. The mounting vane comprises: an input section with a leading edge (110) for meeting the fluid stream; a diffuser section (130) which tapers to a trailing edge (135); and a plane section (120) with an aperture for receiving the optical element (125) for cooling by the fluid stream, the plane section arranged between the input section and diffuser section, wherein the diffuser section (130) includes one or more flow guiding fins (140) protruding from the diffuser section. The mounting vane may be stacked with a plurality of other mounting vanes in a manifold. The shape of the vane plate results in a turbulent fluid flow improving the heat exchange between a laser disc heated by optical pumping and a cryogenic He gas used for cooling.
    Type: Grant
    Filed: December 21, 2012
    Date of Patent: July 14, 2015
    Assignee: THE SCIENCE AND TECHNOLOGY FACILITIES COUNCIL
    Inventors: Klaus Ertel, Michael Fitton, Tristan Davenne
  • Patent number: 9077141
    Abstract: The invention refers to a laser device comprising a tubular space formed by at least two resonator tubes (12) for a gas to be excited, excitation means (50) for each of the at least two resonator tubes for exciting the gas in the resonator tube for generating laser light, a partially reflecting output coupler (42) for coupling out a laser beam, and at least one gas reservoir container (60) which forms a gas reservoir, the gas reservoir container being free of excitation means and in fluidic communication with the tubular space, wherein the gas reservoir container is arranged between the at least two resonator tubes and connected to the tubular space at two separate connecting portions (20).
    Type: Grant
    Filed: July 19, 2012
    Date of Patent: July 7, 2015
    Assignee: ALLTEC ANGEWANDTE LASERLICHT TECHNOLOGIE GMBH
    Inventors: Kevin L. Armbruster, Brad D. Gilmartin, Peter J. Kueckendahl, Bernard J. Richard, Daniel J. Ryan
  • Patent number: 9036676
    Abstract: Singlet oxygen metastables can be formed. A catalytic coating is formed on an interior surface of a flow reactor, and an oxygen containing species is flowed into the flow reactor to produce singlet oxygen metastables by a chemical reaction in the presence of the catalytic coating.
    Type: Grant
    Filed: January 16, 2014
    Date of Patent: May 19, 2015
    Assignee: Physical Sciences, Inc.
    Inventors: W. Terry Rawlins, Seonkyung Lee, Steven J. Davis
  • Patent number: 8958453
    Abstract: A laser oscillator includes: a optical resonator having an orthogonal mirror and a partial reflection mirror; a laser gas acting as a laser medium; and a 90-degree folding mirror acting as a polarization selecting element. The orthogonal mirror has two reflecting surfaces orthogonal to each other. The 90-degree folding mirror is arranged such that the polarization direction of the laser oscillated light is parallel to the reference axis set in a plane perpendicular to an optical axis of the optical resonator. The orthogonal mirror is arranged such that the polarization direction of the laser oscillated light is parallel to the valley line of the orthogonal mirror. This configuration can compensate anisotropy of optical characteristics in a laser medium, and stably generate linearly polarized laser light having excellent isotropy in a simple manner.
    Type: Grant
    Filed: September 17, 2010
    Date of Patent: February 17, 2015
    Assignee: Mitsubishi Electric Corporation
    Inventors: Shuichi Fujikawa, Junichi Nishimae, Tatsuya Yamamoto, Yoichi Tanino
  • Patent number: 8942271
    Abstract: A blower apparatus includes a blower casing; an elastic member for mounting a mounting portion that projects on an outer circumferential portion of the blower casing, to a blower support member disposed on the inlet side of the mounting portion; and a flange portion provided on the inlet side of the mounting portion. At least three elastic members are disposed in the same plane that is almost orthogonal to a rotation shaft, and adhesion surfaces are provided on both ends, in the rotation shaft direction, of each elastic member. The mounting portion is fixed to one of the adhesion surfaces, and the blower support member is fixed to the other of the adhesion surfaces. The flange portion is provided so as to oppose the blower support member through a gap having a thickness less than a thickness, in the rotation shaft direction, of the elastic member.
    Type: Grant
    Filed: June 9, 2011
    Date of Patent: January 27, 2015
    Assignee: Mitsubishi Electric Corporation
    Inventors: Kouji Funaoka, Takayuki Nakayama, Tomohiro Kyoto
  • Patent number: 8913642
    Abstract: In a slab laser, a gas mixture containing carbon dioxide CO2 is formed as a laser-active medium in a discharge space which is formed between two plate-shaped metal electrodes, the flat faces of which are located opposite one another. A resonator mirror is arranged on each of the mutually opposite end faces of the discharge space, the mirrors forming an unstable resonator parallel to the flat faces. At least one of the mutually facing flat faces is provided either on the entire flat face with a dielectric layer the thickness of which is greater on at least one sub-surface than in the remaining area of the flat face, or the at least one flat face is provided with a dielectric layer exclusively on at least one sub-surface.
    Type: Grant
    Filed: July 25, 2013
    Date of Patent: December 16, 2014
    Assignee: Rofin-Sinar Laser GmbH
    Inventors: Florian Engel, Stefan Ruppik, Volker Scholz, Hermann Hage
  • Patent number: 8897331
    Abstract: Upon starting the lasing device after having a stop state, gas retaining in the gas circulation path and the optical resonator is released through the gas release valve opened by the gas pressure controller. During a time calculated by the open-time calculator in response to the immediately preceding stop time of the lasing device, laser medium gas in the piping between the laser medium gas supply device and the gas supply valve is released, together with the retaining gas, through the gas supply valve opened by the gas pressure controller. The structure reduces costs by using decreased number of valves and suppresses consumption of laser medium gas.
    Type: Grant
    Filed: May 15, 2014
    Date of Patent: November 25, 2014
    Assignee: Panasonic Corporation
    Inventors: Atsuki Yamamoto, Tetsuji Nishimura
  • Patent number: 8885684
    Abstract: A CO2 gas laser device according to the present invention amplifies CO2 laser light that oscillates repeatedly in short pulses having a pulse width of 100 ns or less, and cools a CO2 laser gas which is excited by continuous discharge by circulating the CO2 laser gas by means of forced convection. Therein, an angle ? defined by the optical axis of the amplified CO2 laser beam and the flow direction of the CO2 laser gas caused by the forced convection is determined by both a discharge cross sectional area and a discharge length of a volume in which the CO2 laser gas is excited by discharge, whereby increasing the gain of pulsed laser to achieve pulsed laser light having an extremely high average output power.
    Type: Grant
    Filed: June 20, 2011
    Date of Patent: November 11, 2014
    Assignee: Mitsubishi Electric Corporation
    Inventors: Yoichi Tanino, Junichi Nishimae, Tatsuya Yamamoto, Shuichi Fujikawa
  • Patent number: 8873599
    Abstract: A tri-axially orthogonal gas laser device in which an optical axis of an optical resonator, a direction in which a laser gas is supplied into the optical resonator, and a direction of discharge for exciting the laser gas are mutually orthogonal to one another, the device including: an exciting unit including a blower supplying the laser gas in ?X direction to the optical axis of the optical resonator, and a discharge electrode pair which is shifted on a gas upstream side with respect to the optical axis; and an exciting unit including a blower for supplying the laser gas in +X direction to the optical axis of the optical resonator, and a discharge electrode pair which is shifted on a gas upstream side with respect to the optical axis
    Type: Grant
    Filed: August 26, 2011
    Date of Patent: October 28, 2014
    Assignee: Mitsubishi Electric Corporation
    Inventors: Tatsuya Yamamoto, Naoki Miyamoto, Junichi Nishimae, Shuichi Fujikawa
  • Patent number: 8855166
    Abstract: A system and method of operating a high repetition rate gas discharge laser system. The system includes a gas discharge chamber having a hot chamber output window heated by the operation of the gas discharge laser chamber, an output laser light pulse beam path enclosure downstream of the hot chamber window and comprising an ambient temperature window, a cooling mechanism cooling the beam path enclosure intermediate the output window and the ambient window. The gas discharge chamber can include a longitudinally and axially compliant ground rod, including a first end connected to a first chamber wall, a second end connected to a second chamber wall, the second chamber wall opposite the first chamber wall and a first portion formed into a helical spring, the ground rod providing mechanical support for a preionizer tube.
    Type: Grant
    Filed: January 17, 2012
    Date of Patent: October 7, 2014
    Assignee: Cymer, LLC
    Inventors: Richard C. Ujazdowski, Richard M. Ness, J. Martin Algots, Vladimir B. Fleurov, Frederick A. Palenschat, Walter D. Gillespie, Bryan G. Moosman, Thomas D. Steiger, Brett D. Smith, Thomas E. McKelvey
  • Patent number: 8842704
    Abstract: An RF power-supply for driving a carbon dioxide CO2 gas-discharge laser includes a plurality of power-oscillators phase-locked to a common reference oscillator. Outputs of the phase-locked power-oscillators are combined by a power combiner for delivery, via an impedance matching network, to discharge-electrodes of the laser. In one example the powers are analog power-oscillators. In another example, the power-oscillators are digital power-oscillators.
    Type: Grant
    Filed: December 28, 2011
    Date of Patent: September 23, 2014
    Assignee: Coherent, Inc.
    Inventors: David P. Schmelzer, W. Shef Robotham, Jr., Frederick W. Hauer, Joel Fontanella
  • Patent number: 8837549
    Abstract: Continuous mass flow gas replenishment may be implemented in a gas lasing device, such as a gas laser or amplifier, by using a restrictive orifice to bleed one or more gases into a reservoir and/or discharge chamber of the gas laser or amplifier at a predefined mass flow rate. The mass flow rate is a function of the pressure drop across the restrictive orifice resulting from the pressure differential between the depleted gas and the source gas. Thus, gases may be added as needed such that the gas total pressure, as well as the constituent partial pressures, is maintained within a desired range throughout the laser or amplifier fill lifetime. The continuous mass flow gas replenishment may thus make up the lost partial pressure of reactive gases in gas lasing devices in a manner that is less complicated and is less expensive than other continuous flow methodologies.
    Type: Grant
    Filed: November 23, 2012
    Date of Patent: September 16, 2014
    Assignee: IPG Microsystems LLC
    Inventors: Jeffrey P. Sercel, Dana K. Sercel, Michael Von Dadelszen, Daniel B. Masse, Bruce R. Jenket
  • Patent number: 8831057
    Abstract: In a laser device having at least one gas-purged laser resonator which is arranged in a purging gas circuit which has upstream of the laser resonator both a low pressure generator for generating a purging gas excess pressure in the purging gas circuit and, between the low pressure generator and the laser resonator, a cleaning device for cleaning the purging gas, the purging gas being air, according to the invention the purging gas circuit has downstream of the laser resonator between the laser resonator and the low pressure generator an intake opening which is permanently open towards the atmosphere, the purging gas pressure (p1) generated by the low pressure generator being greater than the atmospheric air pressure (p0).
    Type: Grant
    Filed: April 19, 2012
    Date of Patent: September 9, 2014
    Assignee: TRUMPF Laser GmbH + Co. KG
    Inventors: Sven Schad, Lutz Schuler, Jürgen Mösner
  • Publication number: 20140247855
    Abstract: Upon starting the lasing device after having a stop state, gas retaining in the gas circulation path and the optical resonator is released through the gas release valve opened by the gas pressure controller. During a time calculated by the open-time calculator in response to the immediately preceding stop time of the lasing device, laser medium gas in the piping between the laser medium gas supply device and the gas supply valve is released, together with the retaining gas, through the gas supply valve opened by the gas pressure controller. The structure reduces costs by using decreased number of valves and suppresses consumption of laser medium gas.
    Type: Application
    Filed: May 15, 2014
    Publication date: September 4, 2014
    Applicant: Panasonic Corporation
    Inventors: Atsuki Yamamoto, Tetsuji Nishimura
  • Patent number: 8817833
    Abstract: A gas laser includes discharge tubes connected to together by corner housings, each corner housing including a first cooling channel configured to allow flow of a first coolant. A heat exchanger circuit includes a plurality of second cooling channels configured to allow flow of a second coolant. Each second cooling channel is operable to cool laser gas prior to the laser gas entering into one of the corner housings. The gas laser further includes a temperature control device, in which the temperature control device is selected from the group consisting of a laser gas cooling device, a coolant temperature control assembly, and combinations thereof. The temperature control device is operable to maintain a temperature difference of less than approximately 5 K between the first coolant flowing through the first cooling channel of the corner housing and the laser gas entering into the corner housing.
    Type: Grant
    Filed: December 14, 2012
    Date of Patent: August 26, 2014
    Assignee: TRUMPF Laser-und Systemtechnik GmbH
    Inventor: Michael von Borstel
  • Patent number: 8811446
    Abstract: The gas laser oscillator apparatus of the present invention has laser gas sealed in a vacuum chamber under a decompressed condition lower than atmospheric pressure; a discharge means for exciting the laser gas; a blower means for blowing the laser gas; a laser-gas flow passage as a circulation passage of the laser gas between the discharge means and the blower means; and a gas compression means for discharging a predetermined amount of the laser gas from the laser-gas flow passage. The gas decompression means is structured on the application of Bernoulli's principle. The gas decompression means has a sequence for decreasing the ratio of air mixed into the laser gas below a predetermined level with use of a part of pressurized gas used in a laser processing machine or the gas laser oscillator apparatus.
    Type: Grant
    Filed: January 17, 2013
    Date of Patent: August 19, 2014
    Assignee: Panasonic Corporation
    Inventors: Hiroyuki Hayashikawa, Hitoshi Hongu, Takayuki Yamashita
  • Publication number: 20140226693
    Abstract: The invention refers to a laser device comprising a tubular space formed by at least two resonator tubes (12) for a gas to be excited, excitation means (50) for each of the at least two resonator tubes for exciting the gas in the resonator tube for generating laser light, a partially reflecting output coupler (42) for coupling out a laser beam, and at least one gas reservoir container (60) which forms a gas reservoir, the gas reservoir container being free of excitation means and in fluidic communication with the tubular space, wherein the gas reservoir container is arranged between the at least two resonator tubes and connected to the tubular space at two separate connecting portions (20).
    Type: Application
    Filed: July 19, 2012
    Publication date: August 14, 2014
    Inventors: Kevin L. Armbruster, Brad D. Gilmartin, Peter J. Kueckendahl, Bernard J. Richard, Daniel J. Ryan
  • Patent number: 8792529
    Abstract: A gas laser oscillator includes a discharge section for exciting laser gas, a blowing section for transmitting the laser gas, and a laser gas flowing path for forming a circulation route of the laser gas between the discharge section and the blowing section. The blowing section is formed of a rotary part to be rotated by a shaft driver and a non-rotary part not to be rotated. The rotary part includes a rotary shaft to which an impeller is mounted at an end, the shaft driver for rotating the rotary shaft, an upper bearing and a lower bearing coupled to the rotary shaft. The rotary part is detachable from the non-rotary part.
    Type: Grant
    Filed: February 16, 2010
    Date of Patent: July 29, 2014
    Assignee: Panasonic Corporation
    Inventors: Hiroyuki Hayashikawa, Hitoshi Hongu, Nobuo Shinno
  • Publication number: 20140105238
    Abstract: A discharge-pumped gas laser device may include a laser chamber, a pair of discharge electrodes provided in the laser chamber, a fan with a magnetic bearing being provided in the laser chamber and configured to be capable of circulating a gas in the laser chamber, a housing configured to contain the laser chamber, and a magnetic bearing controller connected to the magnetic bearing electrically, being capable of controlling the magnetic bearing, and provided in the housing separately from the laser chamber.
    Type: Application
    Filed: October 9, 2013
    Publication date: April 17, 2014
    Applicant: Gigaphoton Inc.
    Inventors: Akihiko KUROSU, Junichi FUJIMOTO, Yosuke ISHIZUKA, Takashi MATSUNAGA, Osamu WAKABAYASHI
  • Publication number: 20140105237
    Abstract: The gas laser oscillator apparatus of the present invention has laser gas sealed in a vacuum chamber under a decompressed condition lower than atmospheric pressure; a discharge means for exciting the laser gas; a blower means for blowing the laser gas; a laser-gas flow passage as a circulation passage of the laser gas between the discharge means and the blower means; and a gas compression means for discharging a predetermined amount of the laser gas from the laser-gas flow passage. The gas decompression means is structured on the application of Bernoulli's principle. The gas decompression means has a sequence for decreasing the ratio of air mixed into the laser gas below a predetermined level with use of a part of pressurized gas used in a laser processing machine or the gas laser oscillator apparatus.
    Type: Application
    Filed: January 17, 2013
    Publication date: April 17, 2014
    Applicant: Panasonic Corporation
    Inventors: Hiroyuki Hayashikawa, Hitoshi Hongu, Takayuki Yamashita
  • Publication number: 20140086270
    Abstract: A blower apparatus includes a blower casing; an elastic member for mounting a mounting portion that projects on an outer circumferential portion of the blower casing, to a blower support member disposed on the inlet side of the mounting portion; and a flange portion provided on the inlet side of the mounting portion. At least three elastic members are disposed in the same plane that is almost orthogonal to a rotation shaft, and adhesion surfaces are provided on both ends, in the rotation shaft direction, of each elastic member. The mounting portion is fixed to one of the adhesion surfaces, and the blower support member is fixed to the other of the adhesion surfaces. The flange portion is provided so as to oppose the blower support member through a gap having a thickness less than a thickness, in the rotation shaft direction, of the elastic member.
    Type: Application
    Filed: June 9, 2011
    Publication date: March 27, 2014
    Applicant: Mitsubishi Electric Corporation
    Inventors: Kouji Funaoka, Takayuki Nakayama, Tomohiro Kyoto
  • Patent number: 8670475
    Abstract: Singlet oxygen metastables can be formed. A catalytic coating is formed on an interior surface of a flow reactor, and an oxygen containing species is flowed into the flow reactor to produce singlet oxygen metastables by a chemical reaction in the presence of the catalytic coating.
    Type: Grant
    Filed: June 26, 2009
    Date of Patent: March 11, 2014
    Assignee: Physical Sciences, Inc.
    Inventors: W. Terry Rawlins, Seonkyung Lee, Steven J. Davis
  • Publication number: 20140023101
    Abstract: A single-cavity dual-electrode discharge cavity and an excimer laser including such a discharge cavity are disclosed. The discharge cavity may comprise a cavity body and two sets of main discharge electrodes. The cavity body may comprise a left chamber and a right chamber arranged to form a symmetric dual-chamber cavity. The left and right chambers can interface and communicate with each other at a plane of symmetry of the entire discharge cavity. The two sets of main discharge electrodes can be disposed in the left and right chambers on the upper side, respectively. According to the present disclosure, the single-cavity configuration can be used to achieve functions of dual-cavity configurations, such as MOPA, MOPO, and MOPRA. Thus, it is possible to reduce system complexities and also ensure synchronization of discharging in the discharge cavity.
    Type: Application
    Filed: September 27, 2013
    Publication date: January 23, 2014
    Applicant: Academy of Opto-Electronics, Chinese Academy of Sciences
    Inventors: Yu Wang, Yi Zhou, Jinbin Ding, Bin Liu, Lijia Zhang, Jiangshan Zhao, Pengfei Sha
  • Publication number: 20140003459
    Abstract: A pre-irradiation system and method may be used in a gas discharge lasing device to provide multiple ultraviolet (UV) pre-irradiation discharges per electrical feed-through into a gas discharge chamber of the lasing device. One or more high-voltage electrical feed-throughs are electrically connected to one or more high-voltage electrodes that provide multiple discharge paths to a current return electrode to allow multiple pre-irradiation discharges per feed-through in response to high-voltage pulses applied via the feed-through(s). The discharge paths may include spark gap discharge paths and/or tracking discharge paths across an insulator. In some embodiments, multiple discharge paths are formed between respective tracking locators on a high voltage electrode and/or a current return electrode. In other embodiments, multiple discharge paths are formed between respective discharge locations on a high voltage electrode surrounded by an insulator, which spark or track to a current return electrode.
    Type: Application
    Filed: December 20, 2012
    Publication date: January 2, 2014
    Applicant: IPG Microsystems LLC
    Inventors: Jeffrey P. Sercel, Dana K. Sercel, Michael Von Dadelszen, Daniel B. Masse, Bruce R. Jenket
  • Patent number: 8611390
    Abstract: A fan for circulating laser gas in a gas laser, the fan having a shaft which is supported by at least one radial bearing and at least one axial gas bearing. The axial gas bearing has at least two rotating bearing faces, one or both being structured with a groove pattern, and at least two stationary bearing faces that are arranged at both sides of a plate.
    Type: Grant
    Filed: August 3, 2012
    Date of Patent: December 17, 2013
    Assignee: TRUMPF Maschinen AG
    Inventors: Andreas Lehr, Patrick Bon, Kenworthy Molyneaux Alexander
  • Publication number: 20130315274
    Abstract: A gas laser device including a blower circulating a laser gas along a gas passage; a pressure detection section detecting a gas pressure of the laser gas in the gas passage; a gas supply and exhaust section supplying the laser gas to the gas passage and exhausting the laser gas from the gas passage; an instruction section instructing a temporary stop of a laser oscillation by a laser oscillator; and a control section controlling the blower and the gas supply and exhaust section in response to an instruction from the instruction section. The control section, once the instruction section instructs the temporary stop, controls the blower to reduce the rotation of the blower or stop the rotation of the blower and controls the gas supply and exhaust section so that the gas pressure detected is a second target gas pressure corresponding to a first target gas pressure during the rotation of the blower.
    Type: Application
    Filed: May 7, 2013
    Publication date: November 28, 2013
    Applicant: FANUC CORPORATION
    Inventors: Takafumi MURAKAMI, Akihiko NISHIO
  • Patent number: 8585224
    Abstract: An optical arrangement, e.g. a projection exposure apparatus (1) for EUV lithography, includes: a housing (2) enclosing an interior space (15); at least one, preferably reflective optical element (4-10, 12, 14.1-14.6) arranged in the housing (2); at least one vacuum generating unit (3) for the interior space (15) of the housing (2); and at least one vacuum housing (18, 18.1-18.10) arranged in the interior space (15) and enclosing at least the optical surface (17, 17.1, 17.2) of the optical element (4-10, 12, 14.1-14.5). A contamination reduction unit is associated with the vacuum housing (18.1-18.10) and reduces the partial pressure of contaminating substances, in particular of water and/or hydrocarbons, at least in close proximity to the optical surface (17, 17.1, 17.2) in relation to the partial pressure of the contaminating substances in the interior space (15).
    Type: Grant
    Filed: February 10, 2013
    Date of Patent: November 19, 2013
    Assignees: Carl Zeiss SMT GmbH, ASML Netherlands b.V.
    Inventors: Dirk Heinrich Ehm, Stephan Muellender, Thomas Stein, Johannes Hubertus Josephina Moors, Bastiaan Theodoor Wolschrijn, Dieter Kraus, Richard Versluis, Marcus Gerhardus Hendrikus Meijerink
  • Publication number: 20130235894
    Abstract: A tri-axially orthogonal gas laser device in which an optical axis of an optical resonator, a direction in which a laser gas is supplied into the optical resonator, and a direction of discharge for exciting the laser gas are mutually orthogonal to one another, the device including: an exciting unit including a blower supplying the laser gas in ?X direction to the optical axis of the optical resonator, and a discharge electrode pair which is shifted on a gas upstream side with respect to the optical axis; and an exciting unit including a blower for supplying the laser gas in +X direction to the optical axis of the optical resonator, and a discharge electrode pair which is shifted on a gas upstream side with respect to the optical axis
    Type: Application
    Filed: August 26, 2011
    Publication date: September 12, 2013
    Applicant: MITSUBISHI ELECTRIC CORPORATION
    Inventors: Tatsuya Yamamoto, Naoki Miyamoto, Junichi Nishimae, Shuichi Fujikawa
  • Patent number: 8509280
    Abstract: The gas laser oscillator apparatus of the present invention has a temperature-detecting mechanism disposed at the bearings of the bellows section. The temperature-detecting mechanism detects temperature rise in the bearings and calculates a maintenance cycle with reference to the predetermined data on relationship between temperature and the lifetime of the bearings. Disposed at the bearings, the temperature-detecting mechanism outputs a signal that indicates a replacement cycle according to the temperature of the bearings. More preferable, the temperature-detecting mechanism has a sensor at a tip end of a spring having a pressure force smaller than a load applied to the bearings in advance. To enhance accuracy of temperature detection, the spring is wrapped around with heat insulating material so as not to be exposed to outside temperature.
    Type: Grant
    Filed: April 7, 2010
    Date of Patent: August 13, 2013
    Assignee: Panasonic Corporation
    Inventors: Tetsuji Nishimura, Hiroyuki Hayashikawa, Nobuo Shinno
  • Publication number: 20130182737
    Abstract: Continuous mass flow gas replenishment may be implemented in a gas lasing device, such as a gas laser or amplifier, by using a restrictive orifice to bleed one or more gases into a reservoir and/or discharge chamber of the gas laser or amplifier at a predefined mass flow rate. The mass flow rate is a function of the pressure drop across the restrictive orifice resulting from the pressure differential between the depleted gas and the source gas. Thus, gases may be added as needed such that the gas total pressure, as well as the constituent partial pressures, is maintained within a desired range throughout the laser or amplifier fill lifetime. The continuous mass flow gas replenishment may thus make up the lost partial pressure of reactive gases in gas lasing devices in a manner that is less complicated and is less expensive than other continuous flow methodologies.
    Type: Application
    Filed: November 23, 2012
    Publication date: July 18, 2013
    Applicant: IPG MICROSYSTEMS LLC
    Inventor: IPG MICROSYSTEMS LLC
  • Publication number: 20130170516
    Abstract: A method and system for performing injects of halogen gas into the chambers of a two chamber gas discharge laser such as a MOPA excimer laser for allowing operation of the laser within acceptable parameters and compensating for ageing effects without the necessity of performing refills is described. A parameter reflecting efficiency of the laser is measured, and the change in the parameter with respect to the length of laser operation is estimated. The change in the parameter with respect to the pressure in one of the chambers is also measured. At a given time, the total change in the value of the parameter is estimated, and from this change in pressure that is needed to reverse the change in the value of the parameter is calculated. The pressure in the chamber is then changed to correct for the amount of time that the laser has been in operation.
    Type: Application
    Filed: December 28, 2011
    Publication date: July 4, 2013
    Applicant: Cymer, Inc.
    Inventor: Daniel J. Riggs
  • Patent number: 8432949
    Abstract: A laser device includes an optical resonator, a microwave driven discharge device, and a source for a second gas. The microwave driven discharge device is disposed relative to the optical resonator. The microwave driven discharge device operates at a discharge power and gas flow rate to produce a selected amount of energetic singlet oxygen metastables flowing in the direction of the optical resonator. The second source for the second gas is disposed between the optical resonator and the microwave driven discharge device. The second gas reacts with the selected amount of energetic singlet oxygen metastables to form an excited species in an amount sufficient to support lasing of the excited species in the optical resonator.
    Type: Grant
    Filed: September 14, 2010
    Date of Patent: April 30, 2013
    Assignee: Physical Sciences Inc.
    Inventors: W. Terry Rawlins, David B. Oakes, Seonkyung Lee, Steven J. Davis