Abstract: A laser chamber of a discharge-excitation-type gas laser apparatus may include a container which contains laser gas therein; a pair of discharge electrodes arranged in the container; a cross flow fan configured to supply the laser gas to a discharge space between the discharge electrodes, the cross flow fan including a rotation shaft with which the cross flow fan rotates in a predetermined rotation direction and a plurality of blades, each longitudinal direction of which is parallel to an axial direction of the rotation shaft; and a stabilizer arranged outside a rotation trajectory of the cross flow fan, and arranged such that a difference between a maximum position and a minimum position of an end portion in the rotation direction on a side opposite to the rotation direction is larger than 0 and is smaller than an interval of two blades adjacent to each other among the plurality of blades.

Abstract: An optical element for a deep-ultraviolet light source includes a crystalline substrate; a coating on an exterior surface of the crystalline substrate, the coating having a thickness along a direction that extends away from the exterior surface; and a structure on and/or in the coating, the structure including a plurality of features that extend away from the crystalline substrate along the direction. The features include an amorphous dielectric material and are arranged such that an index of refraction of the structure varies along the direction.

Abstract: A method includes driving, while producing a burst of pulses at a pulse repetition rate, a spectral feature adjuster among a set of discrete states at a frequency correlated with the pulse repetition rate; and in between the production of the bursts of pulses (while no pulses are being produced), driving the spectral feature adjuster according to a driving signal defined by a set of parameters. Each discrete state corresponds to a discrete value of a spectral feature. The method includes ensuring that the spectral feature adjuster is in one of the discrete states that corresponds to a discrete value of the spectral feature of the amplified light beam when a pulse in the next burst is produced by adjusting one or more of: an instruction to the lithography exposure apparatus, the driving signal to the spectral feature adjuster, and/or the instruction to the optical source.

Abstract: Systems, methods, and computer programs for increasing a contrast for a lithography system are disclosed. In one aspect, a method of optimizing a process for imaging a feature on a substrate using a photolithography system is disclosed, the method including obtaining an optical spectrum of a light beam for the imaging, wherein the light beam includes pulses having a plurality of different wavelengths, and narrowing the optical spectrum of the pulses of the light beam for the imaging to improve a quality metric of the imaging.

Abstract: A system includes a laser source operable to provide a laser beam, a laser amplifier having a gain medium operable to provide energy to the laser beam when the laser beam passes through the laser amplifier, and a residual gain monitor operable to provide a probe beam and operable to derive a residual gain of the laser amplifier from the probe beam when the probe beam passes through the laser amplifier while being offset from the laser beam in time or in path.

Abstract: An electromagnetic signal analysis apparatus includes a frequency spectrum obtaining unit 11 to obtain a frequency spectrum that is generated based on an electromagnetic signal obtained by a spectral device 20 and represents a property value with respect to a frequency, a water vapor fitting processing unit 12 to fit a waveform of a single fitting function or a composite waveform, of a plurality of fitting functions to a frequency spectrum at a frequency at which absorption of the electromagnetic waves by water vapor is increased, and a property analyzing unit 14 to analyze a property of a liquid sample using at least two values that determine a characteristic of the fitting function used for the fitting, so that the frequency spectrum, at the frequency at which absorption of the electromagnetic waves by water vapor generated from surfaces of the liquid sample is increased is processed to analyze the property of the liquid sample.

Abstract: Disclosed is an optical component, being configured to function as an optical frequency converter in a broadband radiation source device. The optical component comprises a gas cell, and a hollow-core photonic crystal fiber at least partially enclosed within said gas cell. The local cavity volume of said gas cell, where said hollow-core photonic crystal fiber is enclosed within the gas cell, comprises a maximum value of 36 cm3 per cm of length of said hollow-core photonic crystal fiber.

Abstract: A laser processing system includes: a wavelength-variable laser device configured to output each of a laser beam at an absorption line as a wavelength at which light is absorbed by oxygen and a laser beam at a non-absorption line as a wavelength at which the amount of light absorption by oxygen is smaller than at the absorption line; an optical system configured to irradiate a workpiece with the laser beam; and a laser control unit configured to control the wavelength-variable laser device, set the wavelength of the laser beam output from the wavelength-variable laser device to be the non-absorption line when laser processing is performed on the surface of the workpiece in gas containing oxygen, and set the wavelength of the laser beam output from the wavelength-variable laser device to be the absorption line when ozone cleaning is performed on the surface of the workpiece in gas containing oxygen.

Abstract: A sensor element, a sensor arrangement, and a method for manufacturing a sensor element and a sensor arrangement are disclosed. In an embodiment, a sensor element includes a ceramic main body having at least one electrode arranged at the main body and having at least one contact piece for the electrical contacting of the electrode, wherein the contact piece is fastened to the electrode by welding or bonding.

Abstract: An excimer laser apparatus according to the present disclosure includes an etalon spectrometer configured to measure a fringe waveform of a laser beam; and a controller configured to obtain area of a first ratio in a spectral space obtained based on a result of the measurement by the etalon spectrometer, calculate a first spectral line width of the laser beam based on the obtained area of the first ratio, and calibrate a first spectral line width based on a correlation function representing correlation between the first spectral line width and a second spectral line width of the laser beam measured by a reference meter.

Abstract: A laser welding device includes a welding head configured to emit a laser beam to a working point, a shield gas supplying nozzle configured to supply shield gas to the working point, and a high-speed air supplying nozzle configured to supply a high-speed air stream between the shield gas supplying nozzle and the welding head, the high-speed air stream having a flow rate that is larger than a flow rate of the shield gas, and being supplied in a horizontal direction directly above the shield gas supplied to the working point, or in a direction orthogonal to an emission direction of the laser beam. The high-speed air supplying nozzle is disposed in a range from 80 mm to 200 mm, both inclusive, above the working point, or in a range equal to or lower than a half of a working distance between an emission surface of the laser beam of the welding head and the working point, and supplies the high-speed air stream in a belt shape.

Abstract: The present disclosure relates, generally, to lasers and, more particularly, to lasers with a setback aperture. In one in illustrative embodiment, a laser comprises front and rear resonator mirrors, an output window positioned near the front resonator mirror, and a plurality of waveguide walls extending between the front and rear resonator mirrors and extending between the rear resonator mirror and an aperture defined by the plurality of waveguide walls, such that a laser beam formed between the front and rear resonator mirrors will propagate in free-space between the aperture and the output window so that a first cross-sectional profile of the laser beam at the aperture will be different than a second cross-sectional profile of the laser beam at the output window.

Abstract: A laser device may include a light source configured to emit a laser beam in burst operation, an optical sensor configured to acquire a cross sectional image of the laser beam during a certain period for every certain cycle, an image processor configured to receive an input of an image signal of the cross sectional image outputted from the optical sensor and output beam relating information about the laser beam, a beam traveling direction adjuster configured to adjust a traveling direction of the laser beam, and a controller configured to control the beam traveling direction adjuster based on the beam relating information when at least a part of a period in which the optical sensor acquires the cross sectional image is overlapped with a period in which the light source emits a laser beam.

Abstract: A laser chamber may include a first discharge electrode, a second discharge electrode, a fan making a laser gas flow through a discharge space between the first and second discharge electrodes, a first insulating member disposed on upstream side and downstream side of the first discharge electrode in the laser gas flow, a first metal damper member disposed on upstream side of the second discharge electrode and a second insulating member disposed on downstream side of the second discharge electrode in the laser gas flow, and a second metal damper member disposed on downstream side of the second insulating member in the laser gas flow. In a boundary portion between the second metal damper member and the second insulating member, a first discharge space side surface of the second metal damper member may be located further toward the opposite side to the discharge space than a second discharge space side surface of the second insulating member.

Abstract: The present disclosure provides an electric vehicle, a vehicle-mounted charger and a method for controlling the same. The method includes: obtaining a first predetermined discharging-period Tm for controlling the H bridge in a first manner and a second predetermined discharging-period Tn for controlling the H bridge in a second manner when the vehicle-mounted charger starts to charge a power battery of the electric vehicle; and performing an alternate control on the H bridge in the first manner or the second manner according to the first predetermined discharging-period Tm and the second predetermined discharging-period Tn, so as to perform a temperature balanced control over the first switch transistor, the second switch transistor, the third switch transistor and the fourth switch transistor.

Abstract: Methods, devices and systems for linear polarization of a laser beam are provided. In one aspect, a polarization system includes: a first polarizer having a first polarizer surface for linear polarization of a laser beam propagating in a first direction and striking the first polarizer surface at a first angle, a phase shifter configured to rotate a polarization direction of the linearly polarized laser beam transmitted at the first polarizer surface by a predetermined rotation angle, and a second polarizer having a second polarizer surface, the linearly polarized laser beam striking the second polarizer surface at a second angle after having passed through the phase shifter and being transmitted by the second polarizer surface. An incidence plane of the laser beam striking the second polarizer surface is rotated by the predetermined rotation angle relative to an incidence plane of the laser beam striking the first polarizer surface.

Abstract: Methods and apparatus for controlling laser firing timing and hence bandwidth in a laser capable of operating at any one of multiple repetition rates.

Abstract: Efficient laser diode excited Thulium (Tm) doped solid state systems, directly matched to a combination band pump transition of Carbon Dioxide (CO2), have matured to the point that utilization of such in combination with CO2 admits effectively a laser diode pumped CO2 laser. The laser diode excited Tm solid state pump permits Continuous Wave (CW) or pulsed energy application. Appropriate optical pumping admits catalyzer free near indefinite gas lifetime courtesy of the absence of significant discharge driven dissociation and contamination. As a direct consequence of the preceding arbitrary multi isotopologue CO2, symmetric and asymmetric, gas mixes may be utilized without significant degradation or departure from initial mix specifications. This would admit, at raised pressure, a system continuously tunable from approximately 9 ?m to approximately 11.5 ?m, or sub picosecond amplification.

Abstract: A lens driving apparatus comprising: a stepping motor for driving a lens; a rotation detection sensor for detecting a rotation position of the stepping motor; and a controller which is capable of switching between open-loop control that performs position instruction in accordance with a predetermined pattern and closed-loop control that performs position instruction on the basis of follow-up delay, changes and accelerates the velocity for advancing the position of the stepping motor on the basis of a fixed velocity pattern by open-loop control when the lens starts moving, and transitions to the closed-loop control upon the velocity corresponding to the velocity pattern reaching a predetermined value.

Abstract: A laser annealing apparatus including a carrying platform with a fixing surface, a laser source and a driving device. The laser source is configured to emit a laser beam toward the fixing surface, the laser beam having an illumination area which covers a center of the fixing surface and extends toward an edge of the fixing surface, in an extending direction of the illumination area the illumination area having a length which is not less than a distance between the center of the fixing surface and the edge of the fixing surface. The driving device is configured to drive the carrying platform to rotate around the center of the fixing surface.

Abstract: A way of synchronizing action execution across networked nodes using relative time. A command and a first time value can be received at a first networked device, where the first time value can correspond to a relative time at which an action is to occur. The command can be forwarded to another, second networked device along with a second relative time value that has been adjusted to take into account the elapsed time between the receipt of the command at the first device and the sending of the command to the second device. The action, which can include one or more events, can be caused to take place upon the execution of the command at about the first time value after the command was received at the first device and at about the second time value after the command was received at the second device.

Abstract: Systems and methods for optical pulse stretching or compression in time are provided. An apparatus of the subject invention can operate as an optical dispersive element for optical pulse stretching or compression in time, as well as laser scanning in space. An apparatus can include a spatial disperser arranged to divide a collimated optical pulsed beam into an array of collimated beams with equally spaced angles, a beam shaper configured to control the spreading angle of the beam array, and a cavity to sequentially reflect the individual beams within the beam array. The cavity can include two non-parallel surfaces, such as two non-parallel mirrors.

Abstract: A system, method, and apparatus for detecting at least one condition of interest relating to a tube, e.g. the presence of an air bubble. In some embodiments, the sensor includes antennas, a split-ring resonator, a frequency generator capable of generating frequencies in the microwave range, and a detection component. The detection component may estimate at least one parameter of received microwave energy in order to determine if a condition of interest exists.

Abstract: A gas sensor system is provided, comprising: a gas cell operable so as to receive a sample gas; a vacuum system fluidically coupled to the gas cell operable to maintain the sample gas within the gas cell at a sub-ambient pressure; a pressure sensor operable to sense a pressure of the sample gas; a thermally insulated enclosure having the gas cell therein; a heat source or heat exchanger operable to influence an interior temperature of the thermally insulated enclosure; a light source within the thermally insulated enclosure operable to provide a mid-infrared (mid-IR) light into and through the gas cell; a photodetector within the thermally insulated enclosure operable to receive the attenuated mid-IR; and a control system electronically coupled to the vacuum system and to the pressure sensor operable to maintain the sample gas within the gas cell at the predetermined pressure to within one torr (1 Torr).

Abstract: The present application relates to an encapsulation film and an organic electronic device including the encapsulation film, and provides an encapsulation film and an organic electronic device which effectively prevents the penetration of moisture or oxygen from the outside into the organic electronic device and also achieves the light diffusion and extraction effects.

Abstract: The excimer laser device receives data on a target value of pulse energy from an external device and outputs a pulse laser beam. The excimer laser device includes a master oscillator, at least one power amplifier including a chamber provided in an optical path of the pulse laser beam outputted from the master oscillator, a pair of electrodes provided in the chamber, and an electric power source configured to apply voltage to the pair of electrodes, and a controller configured to control the electric power source of one power amplifier of the at least one power amplifier to stop applying the voltage to the pair of electrodes based on the target value of the pulse energy.

Abstract: Anodes and cathodes for use in generating gas discharge laser light are disclosed. The improved anode has a transition portion that includes a substantially vertical sidewall to transition between the active portion and the end portion to reduce erosion-related issues. The improved cathode has thickened spine portions in enhanced erosion locations. The spine portions are thickened by removing material from the shoulder of the cathode stepped cross-section profile in those locations in order to improve the longevity of the cathode.

Abstract: A fiber laser oscillator includes a housing that accommodates an optical unit such that the optical unit is able to be drawn out of the housing; and a clean bench that is detachable to a side of the optical unit, and defines a closed space which is isolated from outside, in which a communication opening that is in communication with an internal space of the housing is defined in the clean bench.

Abstract: A gas laser, including: a semiconductor laser, an optical beam-shaping system, a pair of electrodes, a discharge tube, a rear mirror, and an output mirror. The pair of electrodes includes two electrodes. The electrodes are symmetrically disposed at an outer layer of the discharge tube in parallel. The electrodes are connected to a radio-frequency power supply via a matching network, and the electrodes operate to modify working gas in the discharge tube through radio-frequency discharge. The rear mirror and the output mirror are disposed at two end surfaces of the discharge tube, respectively. The rear mirror, taken together with the output mirror and the discharge tube, form a resonant cavity. The output mirror is configured to output a laser beam.

Abstract: An adjustable mount for an optical device in a laser spectroscopy system is provided. The adjustable mount includes body configured to mount to a process and a reflector mount having a feature configured to mount an optical device. An interface between the body and the reflector mount allows relative motion between the reflector mount and the body. At least one alignment device is configured to engage the reflector mount and the body to fix a position of the reflector mount relative to the body. An optical device is removably mounted to the reflector mount independent of the alignment device and is sealed to the reflector mount.

Abstract: A control method of the present invention is a control method of controlling a fiber laser including a plurality of LD modules constituting a plurality of groups. The control method includes the steps of: (a) detecting an intensity of laser light outputted from the fiber laser; and (b) controlling a driving current so that, in a case where the intensity of the laser light which intensity has been detected in the step (a) is lower than a predetermined lower limit threshold, a driving current for LD modules in a specific group among the plurality of groups is increased.

Abstract: A light source, with electrodes of alternating polarity attached to a substrate in an excimer ultraviolet (UV) lamp, for generating a plasma discharge between each of the electrodes. The shape of the substrate can shape and control the plasma discharge to reduce exposure of materials susceptible to attack by the halogens. The electrodes can be located such that the plasma discharge occurs in a region where it produces less contact of the halogens with the vulnerable areas of the lamp enclosure. The materials, such as the electrodes, substrate, and envelope, can be selected to withstand corrosive materials. In another embodiment, a plurality of sealed tubes, at least some of which contain an excimer gas are positioned between two electrodes.

Abstract: A system and method for automatically performing gas optimization after a refill in the chambers of a two chamber gas discharge laser is disclosed. The laser is fired at low power, and the gas in the amplifier laser chamber bled if necessary until the discharge voltage meets or exceeds a minimum value without dropping the pressure below a minimum value. The power output is increased to a burst pattern that approximates the expected operation of the laser, and the amplifier chamber gas bled again if necessary until the voltage and an output energy meet or exceed minimum values, or until the pressure is less than a minimum value. The gas in the master oscillator chamber is then bled if necessary until the output energy of the master oscillator meets or falls below a maximum value, again without dropping the pressure in the chamber below the minimum value. While the pressure is adjusted, bandwidth is also measured and adjusted to stay within a desired range.

Abstract: A gas laser oscillator includes laser gas circulation paths including first and second paths; a first discharge tube provided in the first path; a second discharge tube provided in the second path; a laser power supply for supplying a first high frequency power to the first discharge tube and supplying a second high frequency power having a different phase from the first high frequency power to the second discharge tube; and a matching unit including a first coil and a first capacitor, and a second coil and a second capacitor. Each value of the first coil, the first capacitor, the second coil, and the second capacitor is determined such that the difference between the peak value of a voltage applied to the first discharge tube and the peak value of a voltage applied to the second discharge tube falls within a predetermined range.

Abstract: A preliminary ionization discharge device used in a laser chamber of a laser apparatus using preliminary ionization includes a dielectric pipe; a preliminary ionization inner electrode provided inside the dielectric pipe; and a preliminary ionization outer electrode provided outside the dielectric pipe. The preliminary ionization outer electrode includes: a contact plate part configured to contact the dielectric pipe; and an elastic part configured to exert a force in a direction in which the contact plate part pushes the dielectric pipe.

Abstract: Disclosed are methods and apparatus for generating a sub-200 nm continuous wave (cw) laser. A laser apparatus includes a chamber for receiving at least a rare gas or rare gas mixtures and a pump laser source for generating at least one cw pump laser focused in the chamber for generating at least one laser-sustained plasma in the chamber. The laser apparatus further includes a system for forming an optical cavity in which the at least one laser-sustained plasma serves as an excitation source for producing at least one cw laser having a wavelength that is below about 200 nm. In one aspect, the at least one laser-sustained plasma has a shape that substantially matches a shape of the optical cavity.

Abstract: A laser chamber for a discharge excited gas laser apparatus may include: a first discharge electrode disposed in the laser chamber; a second discharge electrode disposed to face the first discharge electrode in the laser chamber; a fan configured to flow laser gas between the first discharge electrode and the second discharge electrode; a first insulating member disposed upstream and downstream of a laser gas flow from the first discharge electrode; a metallic damper member disposed upstream of the laser gas flow from the second discharge electrode; and a second insulating member disposed downstream of the laser gas flow from the second discharge electrode.

Abstract: A gas laser apparatus includes an actual laser output acquiring unit that acquires a first actual laser output at a predetermined laser output command after passage of a predetermined time from issuing of a first laser gas pressure command and acquires a second actual laser output at the predetermined laser output command after passage of the predetermined time from issuing of a second laser gas pressure command smaller than the first laser gas pressure command and a determining unit that determines whether the composition ratio of a laser gas in a gas container is normal or not by comparing the first actual laser output with a first reference output and comparing the second actual laser output with a second reference output smaller than the first reference output.

Abstract: A laser waveguide (22) with a tubular wall (24) that conducts laser energy (30) from a near end (23) to a far end (27) of the waveguide. A filler feed wire (36) slides through the hollow center of the waveguide. A laser emitter (40) delivers laser beam energy (30) to a first end of the waveguide within an acceptance angle A. The laser beam may be non-parallel to an axis (25) of the waveguide by at least 20 degrees to provide room for the laser emitter beside the feed wire. The near end of the waveguide may be flared (23C) to accept a laser beam at a greater angle from the axis. The beam exits the waveguide (32) with an annular energy distribution about the feed wire, and may be focused toward the feed wire by a lens (34) having an axial hole (37) for the wire.

Abstract: A method for producing a hole with side-delimiting flanks in a component using a laser beam is provided. A laser beam is directed onto the component. A side flank of the hole is traced with the laser beam. A partial volume of the hole is formed by vaporizing the component material. This is repeated until the whole volume is formed. The laser beam may be oriented so that it includes an angle of more than 8° with the traced side flank.

Abstract: In one example a method of deceiving an optical augmentation device includes receiving an interrogation beam at an optical system from the optical augmentation device, encoding the interrogation beam with a false signature mis-identifying the optical system, and retro-reflecting the encoded interrogation beam to the optical augmentation device, without retro-reflecting the original interrogation beam.

Abstract: A gas laser device having a function for properly controlling the gas pressure of a laser oscillator after an alarm is generated. A controller of the laser device has an alarm monitoring part which monitors as to whether an alarm is generated in the oscillator, by which discharge in the oscillator should be stopped; an alarm judging part which discriminates a type of the alarm generated in the oscillator; a gas pressure controlling part which controls a pressure of laser gas within a discharge tube of the oscillator; and a power supply controlling part which controls a power supply of the oscillator. The gas pressure controlling part controls the pressure of the laser gas within the discharge tube to an appropriate value, after the alarm is generated, based on one of a plurality of control patterns predetermined corresponding to the respective types of the alarm.

Abstract: A laser material processing system which includes a pulsed fiber laser source having a continuous wavelength bandwidth of larger than 100 nm and pulse width of from 100 femtosecond to 1 microsecond, a broad band laser emitted from one core of an optical fiber, where the broad band laser is applied to a subject material to produce removal of the subject material and/or color change of the subject material.

Abstract: A dental laser system is configured to provide high peak laser power, low duty cycle laser pulses, yielding a low average laser power and thus a reduced need for cooling. The laser power system may be configured to provide the electrical power required to produce the low average laser power and not the high peak laser power, and may include a capacitor bank section configured to provide the electrical power needed to produce the high peak power laser pulses. The cooling system may be configured to provide laser cooling for the low average power level and thus may not require a refrigeration unit.

Abstract: An excimer laser apparatus includes a gas supply unit, connected to a first receptacle that holds a first laser gas containing halogen gas and a second receptacle that holds a second laser gas having a lower halogen gas concentration than the first laser gas, that supplies the first laser gas and the second laser gas to the interior of the laser chamber. Gas pressure control in which the gas supply unit supplies the second laser gas to the interior of the laser chamber or a gas exhaust unit partially exhausts gas from within the laser chamber, and partial gas replacement control in which the gas supply unit supplies the first laser gas and the second laser gas to the interior of the laser chamber and the gas exhaust unit partially exhausts gas from within the laser chamber sequentially, may be selectively performed.

Abstract: A carbon dioxide waveguide-laser includes an elongated resonator compartment and an elongated power supply compartment. The resonator and power-supply compartments are separated by a water-cooled heat sink.

Abstract: A method of controlling a laser apparatus may include: exchanging a gain medium in a chamber configured to output a laser beam by exciting the gain medium; first measuring, after the exchanging, pulse energy of a laser beam which is oscillated in the chamber under a specific gas pressure and a specific charge voltage; calculating an approximate expression indicating a relationship between the pulse energy of the laser beam and the gas pressure in the chamber and the charge voltage, or a table representing a correlationship between the pulse energy, the gas pressure and the charge voltage, based on the specific pressure, the specific charge voltage and the pulse energy in the first measuring; storing the approximate expression or the table; second measuring, after the first measuring, pulse energy Er of a laser beam oscillated in the chamber; calculating pulse energy Eec which is supposed to be obtained directly after the exchanging under the gas pressure and the charge voltage in the second measuring based on

Abstract: A gas laser system including a laser oscillator including a device which needs a predetermined standby time until normally starting an operation after stopping an operation due to reduction of a power supplied from a power source unit, a controller, a power reduction detection unit, and a nonvolatile storage unit storing time data of a first time point when the reduction of the supplied power is detected by the power reduction detection unit. The controller calculates an operation stop time of the device, based on time from the first time point to a second point time when a next system activation command is output, and inhibits operation resumption of the device when the operation stop time is within a predetermined standby time.

Abstract: Disclosed is an excimer laser composite cavity, comprising a laser discharge cavity, a laser output module, a line-width narrowing module, and a laser amplification module. The laser discharge cavity contains work gas for generating laser when it is activated by an excitation source. The laser discharge cavity, the laser output module, and the line-width narrowing module constitute a line-width narrowing cavity configured to narrow down a line-width of the laser generated by the work gas. The laser discharge cavity, the laser output module, and the laser amplification module constitute an amplification cavity configured to amplify power of the laser with the line-width having been narrowed down by the line-width narrowing cavity.

Abstract: A gas laser oscillator includes an output command part for outputting a power supply output command; a power supply unit for applying a discharge tube voltage corresponding to the power supply output command to the discharge tube to start discharge; a voltage detection part for detecting the discharge tube voltage; a discharge start determination part for determining whether or not the discharge has been started on the basis of a value detected by the voltage detection part when the power supply output command is gradually increased; and a sealability determination part for determining that sealability of the gas container has been reduced when a discharge start time from the application of the discharge tube voltage until when it is determined by the discharge start determination part that the discharge is started exceeds a predetermined first threshold value.