Gas Patents (Class 372/55)
  • Patent number: 10305994
    Abstract: A way of synchronizing action execution across networked nodes using relative time. A command and a first time value can be received at a first networked device, where the first time value can correspond to a relative time at which an action is to occur. The command can be forwarded to another, second networked device along with a second relative time value that has been adjusted to take into account the elapsed time between the receipt of the command at the first device and the sending of the command to the second device. The action, which can include one or more events, can be caused to take place upon the execution of the command at about the first time value after the command was received at the first device and at about the second time value after the command was received at the second device.
    Type: Grant
    Filed: May 11, 2016
    Date of Patent: May 28, 2019
    Assignee: Google LLC
    Inventors: Girts Folkmanis, Paul Heninwolf
  • Patent number: 10211587
    Abstract: Systems and methods for optical pulse stretching or compression in time are provided. An apparatus of the subject invention can operate as an optical dispersive element for optical pulse stretching or compression in time, as well as laser scanning in space. An apparatus can include a spatial disperser arranged to divide a collimated optical pulsed beam into an array of collimated beams with equally spaced angles, a beam shaper configured to control the spreading angle of the beam array, and a cavity to sequentially reflect the individual beams within the beam array. The cavity can include two non-parallel surfaces, such as two non-parallel mirrors.
    Type: Grant
    Filed: June 8, 2015
    Date of Patent: February 19, 2019
    Assignee: Versitech Limited
    Inventors: Kin Man Kevin Tsia, Yiqing Ray Xu, Jingjiang Jayson Xu
  • Patent number: 10126267
    Abstract: A system, method, and apparatus for detecting at least one condition of interest relating to a tube, e.g. the presence of an air bubble. In some embodiments, the sensor includes antennas, a split-ring resonator, a frequency generator capable of generating frequencies in the microwave range, and a detection component. The detection component may estimate at least one parameter of received microwave energy in order to determine if a condition of interest exists.
    Type: Grant
    Filed: June 22, 2017
    Date of Patent: November 13, 2018
    Assignee: DEKA Products Limited Partnership
    Inventor: David Blumberg, Jr.
  • Patent number: 10107751
    Abstract: A gas sensor system is provided, comprising: a gas cell operable so as to receive a sample gas; a vacuum system fluidically coupled to the gas cell operable to maintain the sample gas within the gas cell at a sub-ambient pressure; a pressure sensor operable to sense a pressure of the sample gas; a thermally insulated enclosure having the gas cell therein; a heat source or heat exchanger operable to influence an interior temperature of the thermally insulated enclosure; a light source within the thermally insulated enclosure operable to provide a mid-infrared (mid-IR) light into and through the gas cell; a photodetector within the thermally insulated enclosure operable to receive the attenuated mid-IR; and a control system electronically coupled to the vacuum system and to the pressure sensor operable to maintain the sample gas within the gas cell at the predetermined pressure to within one torr (1 Torr).
    Type: Grant
    Filed: May 15, 2017
    Date of Patent: October 23, 2018
    Assignee: Thermo Fisher Scientific (Bremen) GmbH
    Inventors: James J. Scherer, Joshua B. Paul, Hans-Juerg Jost
  • Patent number: 10103509
    Abstract: The excimer laser device receives data on a target value of pulse energy from an external device and outputs a pulse laser beam. The excimer laser device includes a master oscillator, at least one power amplifier including a chamber provided in an optical path of the pulse laser beam outputted from the master oscillator, a pair of electrodes provided in the chamber, and an electric power source configured to apply voltage to the pair of electrodes, and a controller configured to control the electric power source of one power amplifier of the at least one power amplifier to stop applying the voltage to the pair of electrodes based on the target value of the pulse energy.
    Type: Grant
    Filed: December 10, 2017
    Date of Patent: October 16, 2018
    Assignee: Gigaphoton Inc.
    Inventors: Kouji Kakizaki, Akira Suwa, Osamu Wakabayashi, Hiroshi Umeda
  • Patent number: 10103353
    Abstract: The present application relates to an encapsulation film and an organic electronic device including the encapsulation film, and provides an encapsulation film and an organic electronic device which effectively prevents the penetration of moisture or oxygen from the outside into the organic electronic device and also achieves the light diffusion and extraction effects.
    Type: Grant
    Filed: March 27, 2015
    Date of Patent: October 16, 2018
    Assignee: LG Chem, Ltd.
    Inventors: Yoon Gyung Cho, Hyun Jee Yoo, Kyung Yul Bae, Suk Ky Chang, Jung Hyoung Lee, Jun Rye Choi
  • Patent number: 10074953
    Abstract: Anodes and cathodes for use in generating gas discharge laser light are disclosed. The improved anode has a transition portion that includes a substantially vertical sidewall to transition between the active portion and the end portion to reduce erosion-related issues. The improved cathode has thickened spine portions in enhanced erosion locations. The spine portions are thickened by removing material from the shoulder of the cathode stepped cross-section profile in those locations in order to improve the longevity of the cathode.
    Type: Grant
    Filed: September 30, 2015
    Date of Patent: September 11, 2018
    Assignee: Cymer, LLC
    Inventors: Siqi Luo, Richard Carl Ujazdowski, Walter Dale Gillespie, Thomas Patrick Duffey
  • Patent number: 10027082
    Abstract: A fiber laser oscillator includes a housing that accommodates an optical unit such that the optical unit is able to be drawn out of the housing; and a clean bench that is detachable to a side of the optical unit, and defines a closed space which is isolated from outside, in which a communication opening that is in communication with an internal space of the housing is defined in the clean bench.
    Type: Grant
    Filed: April 11, 2017
    Date of Patent: July 17, 2018
    Assignee: FANUC CORPORATION
    Inventor: Minoru Andou
  • Patent number: 9948055
    Abstract: A gas laser, including: a semiconductor laser, an optical beam-shaping system, a pair of electrodes, a discharge tube, a rear mirror, and an output mirror. The pair of electrodes includes two electrodes. The electrodes are symmetrically disposed at an outer layer of the discharge tube in parallel. The electrodes are connected to a radio-frequency power supply via a matching network, and the electrodes operate to modify working gas in the discharge tube through radio-frequency discharge. The rear mirror and the output mirror are disposed at two end surfaces of the discharge tube, respectively. The rear mirror, taken together with the output mirror and the discharge tube, form a resonant cavity. The output mirror is configured to output a laser beam.
    Type: Grant
    Filed: April 20, 2017
    Date of Patent: April 17, 2018
    Assignee: HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY
    Inventors: Hanyuan Chen, Yingxiong Qin, Hao Peng, Chenhao Wan, Sichen Long, Xiangxi Wu, Xiahui Tang
  • Patent number: 9927296
    Abstract: An adjustable mount for an optical device in a laser spectroscopy system is provided. The adjustable mount includes body configured to mount to a process and a reflector mount having a feature configured to mount an optical device. An interface between the body and the reflector mount allows relative motion between the reflector mount and the body. At least one alignment device is configured to engage the reflector mount and the body to fix a position of the reflector mount relative to the body. An optical device is removably mounted to the reflector mount independent of the alignment device and is sealed to the reflector mount.
    Type: Grant
    Filed: June 18, 2014
    Date of Patent: March 27, 2018
    Assignee: Rosemount Analytical Inc.
    Inventor: Peter Schachinger
  • Patent number: 9923333
    Abstract: A control method of the present invention is a control method of controlling a fiber laser including a plurality of LD modules constituting a plurality of groups. The control method includes the steps of: (a) detecting an intensity of laser light outputted from the fiber laser; and (b) controlling a driving current so that, in a case where the intensity of the laser light which intensity has been detected in the step (a) is lower than a predetermined lower limit threshold, a driving current for LD modules in a specific group among the plurality of groups is increased.
    Type: Grant
    Filed: June 27, 2016
    Date of Patent: March 20, 2018
    Assignee: FUJIKURA LTD.
    Inventor: Shinichi Sakamoto
  • Patent number: 9865448
    Abstract: A light source, with electrodes of alternating polarity attached to a substrate in an excimer ultraviolet (UV) lamp, for generating a plasma discharge between each of the electrodes. The shape of the substrate can shape and control the plasma discharge to reduce exposure of materials susceptible to attack by the halogens. The electrodes can be located such that the plasma discharge occurs in a region where it produces less contact of the halogens with the vulnerable areas of the lamp enclosure. The materials, such as the electrodes, substrate, and envelope, can be selected to withstand corrosive materials. In another embodiment, a plurality of sealed tubes, at least some of which contain an excimer gas are positioned between two electrodes.
    Type: Grant
    Filed: January 30, 2015
    Date of Patent: January 9, 2018
    Assignee: Ultraviolet Sciences, Inc.
    Inventors: James Randall Cooper, Ronald W. Chaffee
  • Patent number: 9831628
    Abstract: A system and method for automatically performing gas optimization after a refill in the chambers of a two chamber gas discharge laser is disclosed. The laser is fired at low power, and the gas in the amplifier laser chamber bled if necessary until the discharge voltage meets or exceeds a minimum value without dropping the pressure below a minimum value. The power output is increased to a burst pattern that approximates the expected operation of the laser, and the amplifier chamber gas bled again if necessary until the voltage and an output energy meet or exceed minimum values, or until the pressure is less than a minimum value. The gas in the master oscillator chamber is then bled if necessary until the output energy of the master oscillator meets or falls below a maximum value, again without dropping the pressure in the chamber below the minimum value. While the pressure is adjusted, bandwidth is also measured and adjusted to stay within a desired range.
    Type: Grant
    Filed: August 14, 2015
    Date of Patent: November 28, 2017
    Assignee: Cymer, LLC
    Inventors: Kevin O'Brien, Joshua Thornes, Michael Borrello
  • Patent number: 9819139
    Abstract: A gas laser oscillator includes laser gas circulation paths including first and second paths; a first discharge tube provided in the first path; a second discharge tube provided in the second path; a laser power supply for supplying a first high frequency power to the first discharge tube and supplying a second high frequency power having a different phase from the first high frequency power to the second discharge tube; and a matching unit including a first coil and a first capacitor, and a second coil and a second capacitor. Each value of the first coil, the first capacitor, the second coil, and the second capacitor is determined such that the difference between the peak value of a voltage applied to the first discharge tube and the peak value of a voltage applied to the second discharge tube falls within a predetermined range.
    Type: Grant
    Filed: October 4, 2016
    Date of Patent: November 14, 2017
    Assignee: FANUC CORPORATION
    Inventor: Masahiro Honda
  • Patent number: 9748727
    Abstract: A preliminary ionization discharge device used in a laser chamber of a laser apparatus using preliminary ionization includes a dielectric pipe; a preliminary ionization inner electrode provided inside the dielectric pipe; and a preliminary ionization outer electrode provided outside the dielectric pipe. The preliminary ionization outer electrode includes: a contact plate part configured to contact the dielectric pipe; and an elastic part configured to exert a force in a direction in which the contact plate part pushes the dielectric pipe.
    Type: Grant
    Filed: December 2, 2015
    Date of Patent: August 29, 2017
    Assignee: Gigaphoton Inc.
    Inventors: Kouji Kakizaki, Hiroaki Tsushima, Junichi Fujimoto, Natsushi Suzuki, Hisakazu Katsuumi
  • Patent number: 9735534
    Abstract: Disclosed are methods and apparatus for generating a sub-200 nm continuous wave (cw) laser. A laser apparatus includes a chamber for receiving at least a rare gas or rare gas mixtures and a pump laser source for generating at least one cw pump laser focused in the chamber for generating at least one laser-sustained plasma in the chamber. The laser apparatus further includes a system for forming an optical cavity in which the at least one laser-sustained plasma serves as an excitation source for producing at least one cw laser having a wavelength that is below about 200 nm. In one aspect, the at least one laser-sustained plasma has a shape that substantially matches a shape of the optical cavity.
    Type: Grant
    Filed: December 15, 2014
    Date of Patent: August 15, 2017
    Assignee: KLA-Tencor Corporation
    Inventors: Richard W. Solarz, Ilya Bezel, Anatoly Shchemelinin
  • Patent number: 9722385
    Abstract: A laser chamber for a discharge excited gas laser apparatus may include: a first discharge electrode disposed in the laser chamber; a second discharge electrode disposed to face the first discharge electrode in the laser chamber; a fan configured to flow laser gas between the first discharge electrode and the second discharge electrode; a first insulating member disposed upstream and downstream of a laser gas flow from the first discharge electrode; a metallic damper member disposed upstream of the laser gas flow from the second discharge electrode; and a second insulating member disposed downstream of the laser gas flow from the second discharge electrode.
    Type: Grant
    Filed: June 30, 2016
    Date of Patent: August 1, 2017
    Assignee: Gigaphoton Inc.
    Inventors: Hiroyuki Ikeda, Kouji Kakizaki, Hiroaki Tsushima, Hisakazu Katsuumi
  • Patent number: 9653876
    Abstract: A gas laser apparatus includes an actual laser output acquiring unit that acquires a first actual laser output at a predetermined laser output command after passage of a predetermined time from issuing of a first laser gas pressure command and acquires a second actual laser output at the predetermined laser output command after passage of the predetermined time from issuing of a second laser gas pressure command smaller than the first laser gas pressure command and a determining unit that determines whether the composition ratio of a laser gas in a gas container is normal or not by comparing the first actual laser output with a first reference output and comparing the second actual laser output with a second reference output smaller than the first reference output.
    Type: Grant
    Filed: January 27, 2016
    Date of Patent: May 16, 2017
    Assignee: Fanuc Corporation
    Inventors: Kenichi Yuda, Tetsuhisa Takazane
  • Patent number: 9597751
    Abstract: A method for producing a hole with side-delimiting flanks in a component using a laser beam is provided. A laser beam is directed onto the component. A side flank of the hole is traced with the laser beam. A partial volume of the hole is formed by vaporizing the component material. This is repeated until the whole volume is formed. The laser beam may be oriented so that it includes an angle of more than 8° with the traced side flank.
    Type: Grant
    Filed: March 17, 2009
    Date of Patent: March 21, 2017
    Assignee: SIEMENS AKTIENGESELLSCHAFT
    Inventors: Hans-Thomas Bolms, Jan Münzer, Thomas Podgorski, Lutz Wolkers
  • Patent number: 9597749
    Abstract: A laser waveguide (22) with a tubular wall (24) that conducts laser energy (30) from a near end (23) to a far end (27) of the waveguide. A filler feed wire (36) slides through the hollow center of the waveguide. A laser emitter (40) delivers laser beam energy (30) to a first end of the waveguide within an acceptance angle A. The laser beam may be non-parallel to an axis (25) of the waveguide by at least 20 degrees to provide room for the laser emitter beside the feed wire. The near end of the waveguide may be flared (23C) to accept a laser beam at a greater angle from the axis. The beam exits the waveguide (32) with an annular energy distribution about the feed wire, and may be focused toward the feed wire by a lens (34) having an axial hole (37) for the wire.
    Type: Grant
    Filed: May 26, 2015
    Date of Patent: March 21, 2017
    Assignee: SIEMENS ENERGY, INC.
    Inventor: Gerald J. Bruck
  • Patent number: 9535245
    Abstract: In one example a method of deceiving an optical augmentation device includes receiving an interrogation beam at an optical system from the optical augmentation device, encoding the interrogation beam with a false signature mis-identifying the optical system, and retro-reflecting the encoded interrogation beam to the optical augmentation device, without retro-reflecting the original interrogation beam.
    Type: Grant
    Filed: December 14, 2012
    Date of Patent: January 3, 2017
    Assignee: RAYTHEON COMPANY
    Inventor: Andrew Kowalevicz
  • Patent number: 9502853
    Abstract: A gas laser device having a function for properly controlling the gas pressure of a laser oscillator after an alarm is generated. A controller of the laser device has an alarm monitoring part which monitors as to whether an alarm is generated in the oscillator, by which discharge in the oscillator should be stopped; an alarm judging part which discriminates a type of the alarm generated in the oscillator; a gas pressure controlling part which controls a pressure of laser gas within a discharge tube of the oscillator; and a power supply controlling part which controls a power supply of the oscillator. The gas pressure controlling part controls the pressure of the laser gas within the discharge tube to an appropriate value, after the alarm is generated, based on one of a plurality of control patterns predetermined corresponding to the respective types of the alarm.
    Type: Grant
    Filed: October 1, 2015
    Date of Patent: November 22, 2016
    Assignee: Fanuc Corporation
    Inventor: Ryusuke Miyata
  • Patent number: 9463992
    Abstract: A laser material processing system which includes a pulsed fiber laser source having a continuous wavelength bandwidth of larger than 100 nm and pulse width of from 100 femtosecond to 1 microsecond, a broad band laser emitted from one core of an optical fiber, where the broad band laser is applied to a subject material to produce removal of the subject material and/or color change of the subject material.
    Type: Grant
    Filed: November 6, 2014
    Date of Patent: October 11, 2016
    Assignee: AdValue Photonics, Inc.
    Inventors: Shibin Jiang, Jihong Geng, Qing Wang
  • Patent number: 9450369
    Abstract: A dental laser system is configured to provide high peak laser power, low duty cycle laser pulses, yielding a low average laser power and thus a reduced need for cooling. The laser power system may be configured to provide the electrical power required to produce the low average laser power and not the high peak laser power, and may include a capacitor bank section configured to provide the electrical power needed to produce the high peak power laser pulses. The cooling system may be configured to provide laser cooling for the low average power level and thus may not require a refrigeration unit.
    Type: Grant
    Filed: November 25, 2015
    Date of Patent: September 20, 2016
    Assignee: Convergent Dental, Inc.
    Inventors: Nathan P. Monty, William H. Groves, Jr.
  • Patent number: 9425576
    Abstract: An excimer laser apparatus includes a gas supply unit, connected to a first receptacle that holds a first laser gas containing halogen gas and a second receptacle that holds a second laser gas having a lower halogen gas concentration than the first laser gas, that supplies the first laser gas and the second laser gas to the interior of the laser chamber. Gas pressure control in which the gas supply unit supplies the second laser gas to the interior of the laser chamber or a gas exhaust unit partially exhausts gas from within the laser chamber, and partial gas replacement control in which the gas supply unit supplies the first laser gas and the second laser gas to the interior of the laser chamber and the gas exhaust unit partially exhausts gas from within the laser chamber sequentially, may be selectively performed.
    Type: Grant
    Filed: September 16, 2014
    Date of Patent: August 23, 2016
    Assignee: GIGAPHOTON INC.
    Inventors: Tooru Abe, Takeshi Ohta, Hiroaki Tsushima, Osamu Wakabayashi
  • Patent number: 9419404
    Abstract: A carbon dioxide waveguide-laser includes an elongated resonator compartment and an elongated power supply compartment. The resonator and power-supply compartments are separated by a water-cooled heat sink.
    Type: Grant
    Filed: April 22, 2015
    Date of Patent: August 16, 2016
    Assignee: Coherent, Inc.
    Inventor: Eric R. Mueller
  • Patent number: 9350133
    Abstract: A method of controlling a laser apparatus may include: exchanging a gain medium in a chamber configured to output a laser beam by exciting the gain medium; first measuring, after the exchanging, pulse energy of a laser beam which is oscillated in the chamber under a specific gas pressure and a specific charge voltage; calculating an approximate expression indicating a relationship between the pulse energy of the laser beam and the gas pressure in the chamber and the charge voltage, or a table representing a correlationship between the pulse energy, the gas pressure and the charge voltage, based on the specific pressure, the specific charge voltage and the pulse energy in the first measuring; storing the approximate expression or the table; second measuring, after the first measuring, pulse energy Er of a laser beam oscillated in the chamber; calculating pulse energy Eec which is supposed to be obtained directly after the exchanging under the gas pressure and the charge voltage in the second measuring based on
    Type: Grant
    Filed: December 22, 2014
    Date of Patent: May 24, 2016
    Assignee: GIGAPHOTON INC.
    Inventors: Osamu Wakabayashi, Hiroaki Tsushima, Kouji Kakizaki
  • Patent number: 9343867
    Abstract: A gas laser system including a laser oscillator including a device which needs a predetermined standby time until normally starting an operation after stopping an operation due to reduction of a power supplied from a power source unit, a controller, a power reduction detection unit, and a nonvolatile storage unit storing time data of a first time point when the reduction of the supplied power is detected by the power reduction detection unit. The controller calculates an operation stop time of the device, based on time from the first time point to a second point time when a next system activation command is output, and inhibits operation resumption of the device when the operation stop time is within a predetermined standby time.
    Type: Grant
    Filed: January 29, 2015
    Date of Patent: May 17, 2016
    Assignee: FANUC CORPORATION
    Inventor: Ryusuke Miyata
  • Patent number: 9325143
    Abstract: Disclosed is an excimer laser composite cavity, comprising a laser discharge cavity, a laser output module, a line-width narrowing module, and a laser amplification module. The laser discharge cavity contains work gas for generating laser when it is activated by an excitation source. The laser discharge cavity, the laser output module, and the line-width narrowing module constitute a line-width narrowing cavity configured to narrow down a line-width of the laser generated by the work gas. The laser discharge cavity, the laser output module, and the laser amplification module constitute an amplification cavity configured to amplify power of the laser with the line-width having been narrowed down by the line-width narrowing cavity.
    Type: Grant
    Filed: December 20, 2012
    Date of Patent: April 26, 2016
    Assignee: ACADEMY OF OPTO-ELECTRONICS, CHINESE ACADEMY OF SCIENCE
    Inventors: Yi Zhou, Yaoying Shan, Yuanyuan Fan, Xingliang Song, Lijia Zhang, Huirong Cui, Yu Wang
  • Patent number: 9252552
    Abstract: A gas laser oscillator includes an output command part for outputting a power supply output command; a power supply unit for applying a discharge tube voltage corresponding to the power supply output command to the discharge tube to start discharge; a voltage detection part for detecting the discharge tube voltage; a discharge start determination part for determining whether or not the discharge has been started on the basis of a value detected by the voltage detection part when the power supply output command is gradually increased; and a sealability determination part for determining that sealability of the gas container has been reduced when a discharge start time from the application of the discharge tube voltage until when it is determined by the discharge start determination part that the discharge is started exceeds a predetermined first threshold value.
    Type: Grant
    Filed: June 5, 2015
    Date of Patent: February 2, 2016
    Assignee: FANUC CORPORATION
    Inventor: Masahiro Honda
  • Patent number: 9246297
    Abstract: A gas laser oscillator including discharge tubes, main discharge electrodes, auxiliary electrodes, an output mirror which outputs a laser, and a mechanical shutter which cuts off the laser output from the output mirror. To maintain the auxiliary discharge in the state where the laser output is zero, the base discharge command is set to a first command value when the mechanical shutter is closed, and is set to a second command value smaller than the first command value when the mechanical shutter is opened.
    Type: Grant
    Filed: February 24, 2015
    Date of Patent: January 26, 2016
    Assignee: Fanuc Corporation
    Inventor: Masahiro Honda
  • Patent number: 9147994
    Abstract: A gas laser system including: a laser oscillator; a power supply unit for supplying power to the laser oscillator; a power storage unit for storing the power supplied from the power supply unit; a power reduction detection unit for detecting a power reduction state where a value of the power supplied from the power supply unit falls below a power value enabling the laser oscillator to normally operate; and a control unit for controlling the gas supply and discharge unit by using the power stored in the power storage unit so as to seal the gas flow path, when the power reduction detection unit detects the power reduction state.
    Type: Grant
    Filed: January 6, 2015
    Date of Patent: September 29, 2015
    Assignee: FANUC CORPORATION
    Inventor: Ryusuke Miyata
  • Patent number: 9130337
    Abstract: A system and method for automatically performing gas optimization after a refill in the chambers of a two chamber gas discharge laser is disclosed. The laser is fired at low power, and the gas in the amplifier laser chamber bled if necessary until the discharge voltage meets or exceeds a minimum value without dropping the pressure below a minimum value. The power output is increased to a burst pattern that approximates the expected operation of the laser, and the amplifier chamber gas bled again if necessary until the voltage and an output energy meet or exceed minimum values, or until the pressure is less than a minimum value. The gas in the master oscillator chamber is then bled if necessary until the output energy of the master oscillator meets or falls below a maximum value, again without dropping the pressure in the chamber below the minimum value. While the pressure is adjusted, bandwidth is also measured and adjusted to stay within a desired range.
    Type: Grant
    Filed: September 10, 2014
    Date of Patent: September 8, 2015
    Assignee: Cymer, LLC
    Inventors: Kevin O'Brien, Joshua Thornes, Michael Borrello
  • Patent number: 9106055
    Abstract: Apparatus, systems, and methods using an optically pumped gas filled hollow fiber laser can be implemented in a variety of applications. In various embodiments, operation of an optically pumped gas filled hollow fiber laser is based on population inversion in the gas. Additional apparatus, systems, and methods are disclosed.
    Type: Grant
    Filed: January 21, 2011
    Date of Patent: August 11, 2015
    Assignees: STC.UNM, Kansas State University Research Foundation
    Inventors: Wolfgang G. Rudolph, Amarin Ratanavis, Vasudevan Nampoothiri, Kristan L. Corwin, Andrew M. Jones, Brian R. Washburn, Rajesh Kadel, John M. Zavada
  • Patent number: 9059558
    Abstract: A laser includes a total reflective mirror, an output mirror, a discharge lamp, and an active laser medium. The total reflective mirror, the output mirror, and the discharge lamp define a resonant cavity. The active laser medium is filled in the resonant cavity. The total reflective mirror includes a body, a metal film, and at least one microstructure. Each of the at least one microstructure is a step structure. The step structure includes a plurality of cylinders stacked with each other with respect to their diameters. Both the height and the diameter of the cylinders are in a range from about 0.5? to about 2?, while ? is a working wavelength of the laser.
    Type: Grant
    Filed: December 20, 2013
    Date of Patent: June 16, 2015
    Assignees: Tsinghua University, HON HAI PRECISION INDUSTRY CO., LTD.
    Inventors: Jing-Lei Zhu, Jun Zhu, Qun-Qing Li, Kai-Li Jiang, Chen Feng, Guo-Fan Jin, Shou-Shan Fan
  • Patent number: 9036676
    Abstract: Singlet oxygen metastables can be formed. A catalytic coating is formed on an interior surface of a flow reactor, and an oxygen containing species is flowed into the flow reactor to produce singlet oxygen metastables by a chemical reaction in the presence of the catalytic coating.
    Type: Grant
    Filed: January 16, 2014
    Date of Patent: May 19, 2015
    Assignee: Physical Sciences, Inc.
    Inventors: W. Terry Rawlins, Seonkyung Lee, Steven J. Davis
  • Patent number: 9018561
    Abstract: An apparatus and method of operation for a high power broad band elongated thin beam laser annealing light source, which may comprise a gas discharge seed laser oscillator having a resonance cavity, providing a seed laser output pulse; a gas discharge amplifier laser amplifying the seed laser output pulse to provide an amplified seed laser pulse output; a divergence correcting multi-optical element optical assembly intermediate the seed laser and the amplifier laser. The divergence correcting optical assembly may adjust the size and/or shape of the seed laser output pulse within a discharge region of the amplifier laser in order to adjust an output parameter of the amplified seed laser pulse output. The divergence correcting optical assembly may comprise a telescope with an adjustable focus. The adjustable telescope may comprise an active feedback-controlled actuator based upon a sensed parameter of the amplified seed laser output from the amplifier laser.
    Type: Grant
    Filed: September 17, 2008
    Date of Patent: April 28, 2015
    Assignee: Cymer, LLC
    Inventors: Richard L Sandstrom, Daniel J. W. Brown, Thomas Hoffmann, Jason D Robinson, Craig W Unick
  • Patent number: 9008143
    Abstract: The present invention aims to prevent, in a gas laser resonator, the deterioration in quality of discharge by reduction of the change of the pressure in a discharge chamber and the inflow of impurity gases, such as air, into the discharge chamber. A bracket 6 is attached to one end of a tube 1 interposing a gasket 13 only for sealing an opening of the discharge chamber 2 only and a gasket 14 for sealing both openings of the discharge chamber 2 and a buffer chamber 12. Also, a glass plate 8 and further a bracket 9 are attached to the other end of the tube 1 interposing a gasket 15 only for sealing the opening of the discharge chamber 2 and a gasket 16 for sealing both openings of the discharge chamber 2 and the buffer chamber 12. The pressure in the buffer chamber 12 is set lower than that of the discharge chamber 2 or set higher than the atmospheric pressure to decrease the inflow of the impurity gases to the discharge chamber 2.
    Type: Grant
    Filed: August 27, 2014
    Date of Patent: April 14, 2015
    Assignee: Via Mechanics, Ltd.
    Inventors: Hideho Yamamura, Goichi Ohmae, Nobuyoshi Ohtani
  • Patent number: 8989225
    Abstract: A laser apparatus includes a master oscillator capable of outputting a laser beam having a spectrum that includes at least three wavelength peaks, a multi-wavelength oscillation control mechanism capable of controlling energy of each of the wavelength peaks, a spectrum detecting unit that detects the spectrum of the above-mentioned laser beam, and a controller that controls the multi-wavelength oscillation control mechanism based on a detection result detected by the spectrum detecting unit.
    Type: Grant
    Filed: August 21, 2012
    Date of Patent: March 24, 2015
    Assignee: Gigaphoton Inc.
    Inventors: Kouji Kakizaki, Shinji Okazaki, Osamu Wakabayashi, Takashi Onose, Shinichi Matsumoto
  • Patent number: 8942271
    Abstract: A blower apparatus includes a blower casing; an elastic member for mounting a mounting portion that projects on an outer circumferential portion of the blower casing, to a blower support member disposed on the inlet side of the mounting portion; and a flange portion provided on the inlet side of the mounting portion. At least three elastic members are disposed in the same plane that is almost orthogonal to a rotation shaft, and adhesion surfaces are provided on both ends, in the rotation shaft direction, of each elastic member. The mounting portion is fixed to one of the adhesion surfaces, and the blower support member is fixed to the other of the adhesion surfaces. The flange portion is provided so as to oppose the blower support member through a gap having a thickness less than a thickness, in the rotation shaft direction, of the elastic member.
    Type: Grant
    Filed: June 9, 2011
    Date of Patent: January 27, 2015
    Assignee: Mitsubishi Electric Corporation
    Inventors: Kouji Funaoka, Takayuki Nakayama, Tomohiro Kyoto
  • Patent number: 8942270
    Abstract: A gas includes a housing having a symmetrical arrangement of upper and lower cooling members for removing heat generated in a gas-discharge excited by an electrode assembly. The electrode assembly is clamped between the cooling members and is itself essentially symmetrically arranged. The cooling members and the electrode assembly are mechanically isolated in the housing by a surrounding diaphragm-like arrangement that connects the cooling members to side-walls of the housing. An RF power-supply for supplying the electrode assembly is mounted on one of the sidewalls to avoid disturbing the symmetry of the cooling and electrode arrangements.
    Type: Grant
    Filed: February 22, 2008
    Date of Patent: January 27, 2015
    Assignee: Coherent, Inc.
    Inventor: Anthony J. DeMaria
  • Publication number: 20150014286
    Abstract: Subject matter of the invention is a CO2 laser that permits a rapid power modulation, particularly a highly efficient Q-switching. The key concept is the sub-division of the resonator into a high-power branch, containing inter alia the active medium (1), and a low-power feedback branch (14), in which the power-sensitive beam-shaping elements, particularly the modulators, are arranged. This is made possible by a suitable arrangement of a polarisation beam splitter (5) and a ?/4-phase shifter (2). The free adjustability of an angle ? between said two components permits the extremely flexible realisation of various operating modes, particularly the optimisation of the feedback degree during pulse generation.
    Type: Application
    Filed: January 31, 2013
    Publication date: January 15, 2015
    Inventor: Gisbert Staupendahl
  • Patent number: 8929414
    Abstract: A gas laser oscillator, including a power supply part supplying a discharge tube voltage corresponding to a power output command to a discharge tube so as to start a discharge in the discharge tube; a voltage detecting part detecting the discharge tube voltage; a current detecting part detecting an output current of the power supply part; a command voltage control part gradually increasing a power output command value output from the output command part; and a discharge start judgment part judging if the discharge in the discharge tube has started, based on a detected value of the voltage detecting part when gradually increasing the power output command value. The command voltage control part, if the output current becomes a predetermined threshold value or more when gradually increasing the power output command value, decreases the power output command value once, then again gradually increases the power output command value.
    Type: Grant
    Filed: September 5, 2013
    Date of Patent: January 6, 2015
    Assignee: Fanuc Corporation
    Inventors: Masahiro Honda, Tooru Nukui
  • Patent number: 8913642
    Abstract: In a slab laser, a gas mixture containing carbon dioxide CO2 is formed as a laser-active medium in a discharge space which is formed between two plate-shaped metal electrodes, the flat faces of which are located opposite one another. A resonator mirror is arranged on each of the mutually opposite end faces of the discharge space, the mirrors forming an unstable resonator parallel to the flat faces. At least one of the mutually facing flat faces is provided either on the entire flat face with a dielectric layer the thickness of which is greater on at least one sub-surface than in the remaining area of the flat face, or the at least one flat face is provided with a dielectric layer exclusively on at least one sub-surface.
    Type: Grant
    Filed: July 25, 2013
    Date of Patent: December 16, 2014
    Assignee: Rofin-Sinar Laser GmbH
    Inventors: Florian Engel, Stefan Ruppik, Volker Scholz, Hermann Hage
  • Patent number: 8902948
    Abstract: A degree of polarization control device includes: a calcium fluoride crystal substrate for transmitting a laser beam; a polarization monitor for measuring the degree of polarization of a laser beam transmitted through the calcium fluoride crystal substrate; and a controller for controlling the rotation angle of the calcium fluoride crystal substrate according to the degree of polarization measured by the polarization monitor; the calcium fluoride crystal substrate being formed by a flat plate having a laser beam entering surface and a laser beam exiting surface running in parallel with the (111) crystal face, the Brewster angle being selected for the incident angle, the rotation angle around the [111] axis operating as a central axis being controlled by the controller.
    Type: Grant
    Filed: July 22, 2013
    Date of Patent: December 2, 2014
    Assignee: Gigaphoton Inc.
    Inventors: Shinji Nagai, Fumika Yoshida, Osamu Wakabayashi, Kouji Kakizaki
  • Publication number: 20140348198
    Abstract: A carbon dioxide slab laser includes a top electrode and a bottom electrode. The top electrode has a socket formed at a geometric center and receives a contact ring in the recess of the socket. The contact ring includes radially inward extending biasing fingers. The biasing fingers contact a radio frequency (RF) energy feed through plug and engages the outer wall of the plug and retains it in the socket. The fingers disperse RF energy radially outward to the laser and provide for more even energy distribution that allows for more power. Grounding is also improved through grounding bars spaced apart longitudinally along the length of the bottom electrode. The transverse extending bars include contact elements having spaced apart fingers along the length of the contact element and providing multiple ground points to prevent focusing at a single grounding point.
    Type: Application
    Filed: March 14, 2014
    Publication date: November 27, 2014
    Inventors: Gerald L. Kern, Darryl Nelson, Nathan Monty
  • Patent number: 8897333
    Abstract: Efficient laser diode excited Thulium (Tm) doped solid state systems, directly matched to a combination band pump transition of Carbon Dioxide (CO2), have matured to the point that utilization of such in combination with CO2 admits effectively a laser diode pumped CO2 laser. The laser diode excited Tm solid state pump permits Continuous Wave (CW) or pulsed energy application. Appropriate optical pumping admits catalyzer free near indefinite gas lifetime courtesy of the absence of significant discharge driven dissociation and contamination. As a direct consequence of the preceding arbitrary multi isotopologue CO2, symmetric and asymmetric, gas mixes may be utilized without significant degradation or departure from initial mix specifications. This would admit, at raised pressure, a system continuously tunable from approximately 9 ?m to approximately 11.5 ?m, or sub picosecond amplification.
    Type: Grant
    Filed: March 2, 2012
    Date of Patent: November 25, 2014
    Inventor: Robert Neil Campbell
  • Patent number: 8897331
    Abstract: Upon starting the lasing device after having a stop state, gas retaining in the gas circulation path and the optical resonator is released through the gas release valve opened by the gas pressure controller. During a time calculated by the open-time calculator in response to the immediately preceding stop time of the lasing device, laser medium gas in the piping between the laser medium gas supply device and the gas supply valve is released, together with the retaining gas, through the gas supply valve opened by the gas pressure controller. The structure reduces costs by using decreased number of valves and suppresses consumption of laser medium gas.
    Type: Grant
    Filed: May 15, 2014
    Date of Patent: November 25, 2014
    Assignee: Panasonic Corporation
    Inventors: Atsuki Yamamoto, Tetsuji Nishimura
  • Patent number: 8891574
    Abstract: A degree of polarization control device includes: a calcium fluoride crystal substrate for transmitting a laser beam; a polarization monitor for measuring the degree of polarization of a laser beam transmitted through the calcium fluoride crystal substrate; and a controller for controlling the rotation angle of the calcium fluoride crystal substrate according to the degree of polarization measured by the polarization monitor; the calcium fluoride crystal substrate being formed by a flat plate having a laser beam entering surface and a laser beam exiting surface running in parallel with the (111) crystal face, the Brewster angle being selected for the incident angle, the rotation angle around the [111] axis operating as a central axis being controlled by the controller.
    Type: Grant
    Filed: March 21, 2012
    Date of Patent: November 18, 2014
    Assignee: Gigaphoton Inc.
    Inventors: Shinji Nagai, Fumika Yoshida, Osamu Wakabayashi, Kouji Kakizaki
  • Publication number: 20140334514
    Abstract: A CO2 laser device and a CO2 laser processing device for emitting a pulse laser having a high output and a stable beam diameter without depending on a repetition frequency. The CO2 laser device includes: laser gas being a CO2 laser medium; a near-concentric stable optical resonator in which a radius of curvature of at least one resonator mirror is set so as to be equal to a distance from an optical switch to the resonator mirror; an optical switch provided in the stable optical resonator; and transmission mirrors provided so that laser light generated from the stable optical resonator passes through the CO2 laser medium again.
    Type: Application
    Filed: October 23, 2012
    Publication date: November 13, 2014
    Applicant: MITSUBISHI ELECTRIC CORPORATION
    Inventor: Azusa Tanino