Support Patents (Class 372/65)
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Patent number: 11146034Abstract: A laser oscillator unit includes an amplification unit configured to amplify laser light and emit amplified laser light from an emitting portion; a case covering the amplification unit; and an outer support mechanism and an inner support mechanism provided on the case. The case is formed with a window portion. An outer movable leg allows the case to slide in a radial direction around an outer fixed leg. An inner movable leg allows the amplification unit to slide in the radial direction around an inner fixed leg. A straight line passing through a center of the outer fixed leg and a center of the inner fixed leg intersects with a straight line passing through the emitting portion and the window, and a laser optical axis emitted from the emitting portion and a laser optical axis emitted from the window portion coincide with each other.Type: GrantFiled: January 23, 2019Date of Patent: October 12, 2021Assignee: PANASONIC INDUSTRIAL DEVICES SUNZ CO., LTD.Inventors: Taku Otani, Takayoshi Miyazaki, Tetsuji Takamido
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Patent number: 10250007Abstract: A laser apparatus of the present disclosure may include: a frame; a first amplifier positioned to the frame; a first input optical system positioned to the frame and configured to cause a pulse laser beam generated by an external device to enter the first amplifier; and a first output optical system positioned to the frame and configured to cause a pulse laser beam having exited from the first amplifier in a first direction to exit in a second direction that is different from the first direction.Type: GrantFiled: May 4, 2016Date of Patent: April 2, 2019Assignee: Gigaphoton Inc.Inventor: Yasufumi Kawasuji
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Patent number: 9753178Abstract: An example method for stabilizing a sensor component includes: positioning the sensor component relative to a support with retaining members in contact with the sensor component, a first of the retaining members being a resilient biasing member and a second one of the retaining members being an adjustable retaining member; adjusting the adjustable retaining member to reposition the sensor component and deform the resilient retaining member; immobilizing the sensor component with an additional, rigid retaining member in contact with the sensor component; and filling a space between the sensor component and the support with a glue. An example holder of a sensor component includes support members; retaining members adapted to cooperatively adjustably retain the sensor component support members; and an additional, rigid retaining member adapted to cooperate with other retaining members to fixedly retain the sensor component.Type: GrantFiled: November 25, 2014Date of Patent: September 5, 2017Assignee: BANNER ENGINEERING CORPORATIONInventors: Thomas Beckey, Neal Andrew Schumacher, Wade David Oberpriller
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Patent number: 8942270Abstract: A gas includes a housing having a symmetrical arrangement of upper and lower cooling members for removing heat generated in a gas-discharge excited by an electrode assembly. The electrode assembly is clamped between the cooling members and is itself essentially symmetrically arranged. The cooling members and the electrode assembly are mechanically isolated in the housing by a surrounding diaphragm-like arrangement that connects the cooling members to side-walls of the housing. An RF power-supply for supplying the electrode assembly is mounted on one of the sidewalls to avoid disturbing the symmetry of the cooling and electrode arrangements.Type: GrantFiled: February 22, 2008Date of Patent: January 27, 2015Assignee: Coherent, Inc.Inventor: Anthony J. DeMaria
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Patent number: 8913642Abstract: In a slab laser, a gas mixture containing carbon dioxide CO2 is formed as a laser-active medium in a discharge space which is formed between two plate-shaped metal electrodes, the flat faces of which are located opposite one another. A resonator mirror is arranged on each of the mutually opposite end faces of the discharge space, the mirrors forming an unstable resonator parallel to the flat faces. At least one of the mutually facing flat faces is provided either on the entire flat face with a dielectric layer the thickness of which is greater on at least one sub-surface than in the remaining area of the flat face, or the at least one flat face is provided with a dielectric layer exclusively on at least one sub-surface.Type: GrantFiled: July 25, 2013Date of Patent: December 16, 2014Assignee: Rofin-Sinar Laser GmbHInventors: Florian Engel, Stefan Ruppik, Volker Scholz, Hermann Hage
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Patent number: 8848758Abstract: A gas-discharge waveguide CO2 laser has a Z-shaped folded waveguide formed by three ceramic tubes. Ends of the adjacent tubes are shaped and fitted together to form a common aperture. The tubes are held fitted together by spaced-apart parallel discharge electrodes. Four minors are arranged to form a laser-resonator having a longitudinal axis extending through the tubes.Type: GrantFiled: November 11, 2013Date of Patent: September 30, 2014Assignee: Coherent, Inc.Inventors: Anthony J. DeMaria, R. Russel Austin
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Patent number: 8611391Abstract: A gas-discharge waveguide CO2 laser has a Z-shaped folded waveguide formed by three ceramic tubes. Ends of the adjacent tubes are shaped and fitted together to form a common aperture. The tubes are held fitted together by spaced-apart parallel discharge electrodes. Four mirrors are arranged to form a laser-resonator having a longitudinal axis extending through the tubes.Type: GrantFiled: May 3, 2011Date of Patent: December 17, 2013Assignee: Coherent, Inc.Inventors: Anthony J. DeMaria, R. Russel Austin
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Patent number: 8416827Abstract: An oscillator housing includes a main body unit that is shaped into a frame and formed of a metallic material and a cover unit that is formed of a metallic material to cover openings of the main body unit, and has an outer wall that has an arc cross section perpendicular to the optical axis and extends in the optical axis direction and side walls that are connected to the both ends of the outer wall in the optical axis direction. When the cover unit is fixed to the main body unit with a fixing member, the outer wall having an arc shape is configured such that force is generated in the height direction towards the outside of the oscillator housing on the connecting portion of the cover unit with the main body unit.Type: GrantFiled: May 19, 2009Date of Patent: April 9, 2013Assignee: Mitsubishi Electric CorporationInventors: Kouji Funaoka, Masahiko Hasegawa, Kazuo Sugihara
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Patent number: 8395131Abstract: A method for high-dose Grid radiotherapy utilizing a three-dimensional (3D) dose lattice formation is described herein. The 3D dose lattice can be achieved by, but not limited to, three technical approaches: 1) non-coplanar focused beams; 2) multileaf collimator (MLC)-based intensity modulated radiation therapy (IMRT) or aperture-modulated arc; and 3) heavy charged particle beam. The configuration of a 3D dose lattice is comprised of the number, location, and dose of dose vertices. The optimal configuration of a 3D dose lattice can be achieved by manual calculations or by automating the calculations for a generic algorithm. The objective of the optimization algorithm is to satisfy three conditions via iteration until they reach their global minimum. With 3D dose lattice, high doses of radiation are concentrated at each lattice vertex within a tumor with drastically lower doses between vertices (peak-to-valley effect), leaving tissue outside of the tumor volume minimally exposed.Type: GrantFiled: June 20, 2010Date of Patent: March 12, 2013Inventors: Xiaodong Wu, Mansoor M. Ahmed, Alan Pollack
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Patent number: 8331416Abstract: In a stripline laser, a gas mixture containing carbon dioxide is situated as a laser-active medium between two plate-type electrodes lying with their flat sides opposite one another. The electrodes define a discharge space, at whose end sides lying opposite one another a resonator mirror is respectively arranged. The resonator mirrors form an unstable resonator. To operate the stripline laser in the 9.3 ?m band and/or in the 9.6 ?m band, the electrodes are provided with a passivation layer on their flat sides. The passivation layer, of at least one electrode, contains silicon dioxide in a region covering a partial area of a flat side. A distance between the electrodes is set such that the attenuation of laser beams in the 10.3 ?m band and in the 10.6 ?m band is greater than the attenuation of laser beams in the 9.3 ?m band and/or in the 9.6 ?m band.Type: GrantFiled: May 25, 2012Date of Patent: December 11, 2012Assignee: Rofin Sinar Laser GmbHInventors: Hermann Hage, Volker Scholz, Florian Engel
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Patent number: 8319901Abstract: Discharge tubes, each of which includes a glass tube and a ferrule that has a substantially cylindrical shape and is fitted to each end portion of the glass tube, are supported by a plurality of pairs of relay connectors (or supporting members) provided on the front side of a chassis having substantially a plate-shaped configuration. When a discharge tube is supported by relay connectors, stoppers provided on the relay connectors lock the ferrules so that axial movement of the discharge tube relative to the relay connectors is restricted.Type: GrantFiled: June 4, 2007Date of Patent: November 27, 2012Assignees: Sharp Kabushiki Kaisha, Japan Aviation Electronics Industry, LimitedInventors: Yoshiki Takata, Kenichi Iwamoto, Takaaki Kudo, Naofumi Ikenaga
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Patent number: 8290017Abstract: A carbon-dioxide (CO2) gas-discharge slab laser includes elongated discharge-electrodes in a sealed enclosure. Radio Frequency (RF) power is supplied to the electrodes via an impedance matching network and a co-axial electrical low inductance transmission line feed-through sealed to the enclosure. The feed-trough includes two spring contacts which are configured to be spring compression push-fit in grooves in edges of the discharge-electrodes. A central conductor of the feed-through is fluid cooled. A capacitor of the impedance matching network is assembled on the central conductor as an integral part of the feed-trough.Type: GrantFiled: September 19, 2011Date of Patent: October 16, 2012Assignee: Coherent, Inc.Inventors: Leon A. Newman, Vernon A. Seguin, Lanny Laughman, Adrian Papanide
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Patent number: 8265116Abstract: A carbon-dioxide (CO2) gas-discharge slab laser includes elongated discharge-electrodes in a sealed enclosure. Radio Frequency (RF) power is supplied to the electrodes via an impedance matching network and a co-axial electrical low inductance transmission line feed-through sealed to the enclosure. The feed-trough includes two spring contacts which are configured to be spring compression push-fit in grooves in edges of the discharge-electrodes. A central conductor of the feed-through is fluid cooled. A capacitor of the impedance matching network is assembled on the central conductor as an integral part of the feed-trough.Type: GrantFiled: June 9, 2009Date of Patent: September 11, 2012Assignee: Coherent, Inc.Inventors: Leon A. Newman, Vernon A. Seguin, Lanny Laughman, Adrian Papanide
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Publication number: 20120120974Abstract: A system and method of operating a high repetition rate gas discharge laser system. The system includes a gas discharge chamber having a hot chamber output window heated by the operation of the gas discharge laser chamber, an output laser light pulse beam path enclosure downstream of the hot chamber window and comprising an ambient temperature window, a cooling mechanism cooling the beam path enclosure intermediate the output window and the ambient window. The gas discharge chamber can include a longitudinally and axially compliant ground rod, including a first end connected to a first chamber wall, a second end connected to a second chamber wall, the second chamber wall opposite the first chamber wall and a first portion formed into a helical spring, the ground rod providing mechanical support for a preionizer tube.Type: ApplicationFiled: January 17, 2012Publication date: May 17, 2012Inventors: Richard C. Ujazdowski, Richard M. Ness, J. Martin Algots, Vladimir B. Fleurov, Frederick A. Palenschat, Walter D. Gillespie, Bryan G. Moosman, Thomas D. Steiger, Brett D. Smith, Thomas E. McKelvey
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Patent number: 8135051Abstract: A gas laser oscillator includes a plurality of discharge tube arrays, each discharge tube array including a plurality of electrical discharge tubes, a support mechanism supporting the plurality of discharge tube arrays, and an optical part optically connecting the plurality of discharge tube arrays. The support mechanism includes a discharge tube linking holder and an elastic member. The elastic member joins the discharge tube linking holder to a first support rod arranged at an upper side as seen in a direction of gravity.Type: GrantFiled: July 14, 2009Date of Patent: March 13, 2012Assignee: Fanuc LtdInventors: Takanori Sato, Takafumi Murakami, Yuji Nishikawa
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Patent number: 7970038Abstract: An RF excited gas discharge laser is disclosed including a housing holding the lasing gas. An electrode assembly is mounted within the housing. The electrode assembly includes a pair of elongated planar electrodes mounted in face to face relationship with a narrow gap therebetween. A pair of planar dielectric plates are positioned along the side edges of the gap to seal the discharge region. The plates extend part of the way into the gap from both sides edges of the electrodes. The inner surfaces of the electrodes are provided with an opposed trench in the region surrounding the inner edges of the plates. In this way, the exposure of the inner edges of the plates to the discharge is minimized improving performance.Type: GrantFiled: July 2, 2008Date of Patent: June 28, 2011Assignee: Coherent, Inc.Inventors: Christian J. Shackleton, Raul Martin Wong Gutierrez
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Patent number: 7876804Abstract: A first optical base having a high-reflection mirror and a second optical base having a partial-reflection mirror are arranged in parallel to each other on both sides of an oscillator housing. A guide light source emits a guide light for aligning optical components in an optical path of a laser light emitted from an optical resonator and adjusting a processing point on a target object. An optical-component supporting unit includes optical components that guide the laser light in a direction perpendicular to an optical axis of the optical resonator. The guide light source is arranged on the second optical base.Type: GrantFiled: April 20, 2007Date of Patent: January 25, 2011Assignee: Mitsubishi Electric CorporationInventors: Koji Funaoka, Masahiko Hasegawa, Yasunari Matsumoto, Motoaki Tamaya
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Publication number: 20100014552Abstract: A gas laser oscillator including a plurality of discharge tube arrays, each including a plurality of electrical discharge tubes aligning in an axial direction thereof; a support mechanism supporting the discharge tube arrays with axes thereof extending in directions parallel to each other; and an optical part optically connecting the discharge tube arrays to each other with all of the electrical discharge tubes being arranged optically in series. The optical part includes an output mirror and a rear mirror, disposed at a pair of electrical discharge tubes located at opposite ends of an optically serial arrangement of the discharge tube arrays supported by the support mechanism; and a returning mirror disposed at an optical connection between the discharge tube arrays supported by the support mechanism.Type: ApplicationFiled: July 14, 2009Publication date: January 21, 2010Applicant: FANUC LTDInventors: Takanori SATO, Takafumi MURAKAMI, Yuji NISHIKAWA
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Patent number: 7583718Abstract: Certain example embodiments of this invention relate to waveguide lasers (e.g., RF-excited waveguide lasers). Certain example embodiments of this invention provide an optical mounting scheme for use with a waveguide laser. In certain example embodiments, a carrier including an optic holder may be provided. An optic may be mounted to the carrier via a face-sealing epoxy. An optic interface may be formed at least in part by the epoxy. The optic interface may be a thin layer of a substantially uniform thickness located between the carrier and optic face. The carrier and/or the optic holder of the carrier may be beveled proximate to where the optic interface is formed and, optionally, proximate to where the epoxy is applied. In certain example embodiments, the epoxy may be applied to only the optic's face and/or to the optic holder's face.Type: GrantFiled: June 26, 2007Date of Patent: September 1, 2009Assignee: Videojet Technologies Inc.Inventor: Nathan P. Monty
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Patent number: 7558308Abstract: A low inductance, hermetically sealed, RF shielded feed-through is provided for exciting low impedance discharges associated with high power CO2 slab lasers. The feed-through mechanically obtains RF contact, preferably, at the center of the length of the electrodes that are inserted within the long laser housing, thereby making it easier to obtain a uniform electric field distribution along the length of the electrodes.Type: GrantFiled: February 14, 2008Date of Patent: July 7, 2009Assignee: Coherent, Inc.Inventors: Christian J. Shackleton, Thomas J. Hennessey, Jr., Vernon Seguin, Frederick W. Hauer
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Patent number: 7502399Abstract: A package for a laser diode component is described. This comprises a carrier, which has on a front side a mounting region for a laser diode chip or laser diode bar, and at least one holding device, which is arranged on the carrier and has at least one aperture, in which an electrical terminal conductor is held. The holding device is designed for surface mounting. Moreover, a laser diode component with such a package and a method for producing a laser diode component are described. In the method, preferably a plurality of carriers are provided together in an interconnected assembly and are loaded with laser diodes. Subsequently, holding devices each with at least one electrical terminal conductor are fitted on the carriers.Type: GrantFiled: July 11, 2006Date of Patent: March 10, 2009Assignee: Osram Opto Semiconductors GmbHInventor: Christian Ferstl
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Publication number: 20080279247Abstract: A transversally electrically excited gas discharge laser for generating light pulses with a high pulse repetition rate. The gas discharge laser has components include a gas-tight discharge tube with opposed wall passages and front ends. The discharge tube includes ceramic material with laser gas sealed therein. The components also include partial metal layers disposed on the discharge tube. Decoupling and holding elements including support trays are disposed in the wall passages, with the support trays being adhered with solder to the discharge tube via the partial metal layers. The components also include a pair of electrodes extending axially and disposed in the decoupling and holding elements so as to form a gas discharge path. The components also include a pair of rod-shaped electrodes disposed in the discharge tube that are substantially parallel to the main electrodes and operable to control the starting conditions of gas discharge.Type: ApplicationFiled: May 23, 2006Publication date: November 13, 2008Applicant: LTB-Lasertechnik Berlin GmbHInventors: Matthias Scholz, Johannes Schurack, Edgar Spranz, Karl Heinz Segsa, Joachim Mueller
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Publication number: 20080205473Abstract: A low inductance, hermetically sealed, RF shielded feed-through is provided for exciting low impedance discharges associated with high power CO2 slab lasers. The feed-through mechanically obtains RF contact, preferably, at the center of the length of the electrodes that are inserted within the long laser housing, thereby making it easier to obtain a uniform electric field distribution along the length of the electrodes.Type: ApplicationFiled: February 14, 2008Publication date: August 28, 2008Inventors: Christian J. Shackleton, Thomas V. Hennessey, Vernon Seguin, Frederick W. Hauer
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Patent number: 7372202Abstract: The invention is directed to a method and apparatus for phase-locking microdischarge device arrays and an ac, rf, or pulse-excited microdischarge. The invention provides output from a non-laser optical source that is a phase-locked array of microdischarges formed of microdischarge cavities containing discharge filler and excitation electrodes. In exemplary embodiments, entire arrays of microdischarge device optical emitters that are not lasers can be fabricated into a surface area having a largest dimension smaller than the coherence length of at least one of the emissions produced by the individual elements. In other embodiments, arrays of microdischarge devices configured in a Fresnel pattern constitute a lens suitable for both producing and focusing light.Type: GrantFiled: April 22, 2004Date of Patent: May 13, 2008Assignee: The Board of Trustees of the University of IllinoisInventors: J. Gary Eden, Ju Gao, Sung-o Kim
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Patent number: 7369596Abstract: A chamber for a gas discharge laser is disclosed and may include a chamber housing having a wall, the wall having an inside surface surrounding a chamber volume and an outside surface, the wall also being formed with an orifice. For the chamber, at least one electrical conductor may extend through the orifice to pass an electric current into the chamber volume. A member may be disposed between the conductor and the wall for preventing gas flow through the orifice to allow a chamber pressure to be maintained in the volume. The chamber may further comprise a pressurized compartment disposed adjacent to the orifice for maintaining a pressure on at least a portion of the outside surface of the wall to reduce bowing of the wall near the orifice due to chamber pressure.Type: GrantFiled: June 5, 2006Date of Patent: May 6, 2008Assignee: Cymer, Inc.Inventors: Thomas D Steiger, William N. Partlo
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Patent number: 6920170Abstract: Plate springs as coupling members can absorb deformation of an oscillator case due to heat and do not transmit the deformation to two optical bases constituting an optical resonator, and it is thereby possible to maintain an appropriate positional relation between the optical cases. A harmful deformation force is produced due to imperfect alignment deformation of bellows each of which is connected between the oscillator case and each optical base. The plate springs can also suppress the force acting on the two optical bases, and it is thereby possible to keep a laser optical axis of a laser beam to be a fixed position.Type: GrantFiled: October 24, 2002Date of Patent: July 19, 2005Assignee: Mitsubishi Denki Kabushiki KaishaInventors: Shoichiro Hara, Koji Funaoka, Takao Ohara, Satoshi Nishida
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Patent number: 6895029Abstract: A nitride semiconductor laser chip 103 is fixed to a submount 102 serving as a mount member with solder 107. The submount 102 is made of a material having a thermal expansion coefficient higher than that of a nitride semiconductor substrate, and has a thickness equal to or greater than 1.2 times the thickness of the layered nitride semiconductor structure composed of an n-type GaN substrate 1 and a layered nitride semiconductor portion 2. Between the n-type GaN substrate 1 and the submount 102 is laid a metal film having a thickness of from 1 to 50 ?m.Type: GrantFiled: September 26, 2002Date of Patent: May 17, 2005Assignee: Sharp Kabushiki KaishaInventor: Daisuke Hanaoka
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Patent number: 6845114Abstract: A vertical cavity organic laser device, that includes: an organic laser cavity including: a bottom dielectric stack for receiving and transmitting pump beam light and being reflective to laser light over a predetermined range of wavelengths; an organic active region for receiving transmitted pump beam light from the bottom dielectric stack and for emitting the laser light; a top dielectric stack for reflecting transmitted pump beam light and laser light from the organic active region back into the organic active region, wherein a combination of the bottom and the top dielectric stacks and the organic active region produces the laser light; the device further including an external pump beam light source for optically pumping light to the organic laser cavity; and a positioner for locating the organic laser cavity in a spaced relationship to the external pump beam light source.Type: GrantFiled: October 16, 2002Date of Patent: January 18, 2005Assignee: Eastman Kodak CompanyInventors: David L. Patton, Joseph A. Manico, Edward Covannon, John P. Spoonhower
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Patent number: 6804284Abstract: An optical element holding and extraction device is provided. The device includes an optical element, an optical element holder having a tubular gripping portion and a tubular extraction portion connected at one end to the tubular gripping portion, and a retainer that is slideably carried on the tubular extraction portion. The diameter of the tubular extraction portion is less than the tubular gripping portion. In addition, the tubular gripping portion grips the peripheral edge of the optical clement. The device may be used in a variety of gas lasers, including excimer lasers.Type: GrantFiled: February 22, 2000Date of Patent: October 12, 2004Assignee: TuiLaser AGInventors: Hans Kodeda, Helmut Frowein
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Patent number: 6798820Abstract: An adjusting device for a multi-beam source unit includes a mounting bracket, a base member rotatably mounted on the mounting bracket and a multi-beam laser diode provided with light emitting points positioned substantially in a straight line with respect to each other. The multi-beam laser diode is mounted on the base member and radiates a laser beam from the light emitting points. The base member rotates such that the laser beam is radiated onto a predetermined position of an image recording plane of a scanning optical system.Type: GrantFiled: December 8, 2000Date of Patent: September 28, 2004Assignee: Ricoh Company, Ltd.Inventors: Hiroyuki Okuwaki, Osamu Kawazoe, Yasuhiro Naoe
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Patent number: 6798814Abstract: The invention relates to a gas discharge laser including a discharge tube (1), in which a gas is present and which has at least one aperture (19) through which a laser beam emerges or at which a laser beam is reflected. For withdrawing a partial amount of the gas contained in the discharge tube (1), at least one gas withdrawal point (9) is present, from which the withdrawn gas is supplied to a sintered filter (11) for being cleaned. The cleaned gas may be led in via at least one gas inlet point (27) in the zone of the aperture (19). The invention further relates to a method of operating a gas discharge laser, and the use of a sintered filter for cleaning gas withdrawn from a discharge tube (1) of a gas discharge laser.Type: GrantFiled: July 25, 2002Date of Patent: September 28, 2004Assignee: TuiLaser AGInventors: Stephan Geiger, Claus Strowitzki, Tobias Pflanz, Ansgar Matern, Thomas Petracek, Martin Kappels, Andreas Goertler
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Patent number: 6795483Abstract: In a laser apparatus, precision of wavelength control, wavelength stability and speed of wavelength control are increased, and an optical component is prevented from being polluted. A ball screw is used a feed screw of a feed screw mechanism that changes the orientation angle of the optical component.Type: GrantFiled: August 28, 2000Date of Patent: September 21, 2004Assignee: Komatsu, Ltd.Inventors: Satoru Bushida, Motoharu Nakane
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Patent number: 6693940Abstract: A solid state laser, includes laser rod tubes (10, 117) crimped onto each end of a laser rod (15, 121) with PTFE seal rings (25, 118) compressed between the laser rod and the laser rod tube. The compressed seal rings provide an improved leak tight seal in a laser pumping chamber. Each laser rod tube (10) provides a mounting and holding area (20) for supporting the laser rod ends therein while protecting and sealing the end faces of the laser rod. A swaging tool (40) and method for swaging the laser rod tube (10) onto the laser rod (15) to provide a compression fit are provided. The compression seal and swaging method are usable in a variety of leak tight sealing applications.Type: GrantFiled: November 13, 2002Date of Patent: February 17, 2004Assignee: GSI Lumonics Ltd.Inventor: Glyn Edwards
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Patent number: 6674780Abstract: A gas drawing/refilling and sealing structure for a laser gas storage container of the present invention includes a sealed container and a blocking member, wherein the body of the container is provided with a gas passage having a gas inlet end and a blocking end. The gas passage is further provided with a communicating section to make connection of the gas passage to the container. The blocking member is mounted on the blocking end, gas is drawn out of or injected into the container via the gas inlet end when the gas inlet end is opened; the gas is cut off when the gas inlet end is closed, and the container is sealed at the same time. Thereby, manufacturing and test of the laser equipment can be more convenient, and the superiority of products can be increased.Type: GrantFiled: January 29, 2003Date of Patent: January 6, 2004Assignee: Great Computer Corp.Inventor: Jin-Sheng Lai
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Patent number: 6646503Abstract: A circuit configuration for detecting a functional disturbance has a first and a second differential amplifier. The outputs of the differential amplifiers are connected to the inputs of a gate. One input of the differential amplifiers is in each case connected to a reference potential terminal. The respective other input of the first and second differential amplifiers is connected to a monitoring means, which responds in the event of a change in the supply voltage at a supply potential terminal of the circuit configuration.Type: GrantFiled: November 18, 2002Date of Patent: November 11, 2003Assignee: Infineon Technologies AGInventors: Robert Allinger, Siegfried Tscheternigg
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Patent number: 6628693Abstract: A discharge electrode for a laser device which can cause stable main discharge to occur is provided. To this end, the discharge electrode includes a cathode base (8) made of an insulating material for sealing up a chamber opening (7) provided in a laser chamber (2) for containing laser gases, a cathode (5) attached to the cathode base (8) with a bottom surface (5A) of the cathode (5) in contact therewith, and a plurality of high-voltage feeder rods (12) disposed in a longitudinal direction, penetrating through the cathode base (8) from an outside of the laser chamber (2) which supplies a high-voltage current to the cathode (5), in which an O-ring groove (22) for sealing in the laser gases is formed on the bottom surface of the cathode (5) to surround a plurality of holes (24) for fixing the high-voltage feeder rods (12) disposed on the bottom surface of the cathode (5).Type: GrantFiled: September 18, 2000Date of Patent: September 30, 2003Assignee: Komatsu Ltd.Inventors: Takanobu Ishihara, Hirotoshi Inoue, Tsukasa Hori
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Patent number: 6618422Abstract: A preionization device for a gas laser comprises an internal preionization electrode having a dielectric housing around it and an external preionization electrode displaced from the dielectric housing by a small gap. The dielectric housing includes two cylindrical regions of differing outer radii of curvature. An open end of the housing has a larger radius of curvature than the other end which is closed. The internal electrode connects to circuitry external to the discharge chamber via a conductive feedthrough which penetrates through the housing. The external circuitry prevents voltage oscillations caused by residual energy stored as capacitance in the dielectric housing. The external preionization electrode, which is connected electrically to one of the main discharge electrodes, is formed to shield the internal preionization electrode from the other main discharge electrode to prevent arcing therebetween.Type: GrantFiled: May 22, 2001Date of Patent: September 9, 2003Assignee: Lambda Physik AGInventors: Igor Bragin, Ulrich Rebhan, Uwe Stamm, Dirk Basting
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Patent number: 6587491Abstract: A support section is provided on one side of a stem, which is secured such that at least two leads are projected from both sides. A heat sink section is formed on the upper portion of the support section in a wide width extending to the side of the projecting two leads. A laser chip is mounted on the heat sink section. As a consequence, in the event of a laser chip having a large chip size and a large calorific value, the heat sink section is large-sized to improve heat dissipation characteristics, thereby obtaining a semiconductor laser having a small outside diameter and a thin type optical pickup.Type: GrantFiled: October 5, 2000Date of Patent: July 1, 2003Assignee: Rohm Co., Ltd.Inventor: Takeshi Yamamoto
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Patent number: 6567456Abstract: A novel dual-mirror mirror mount assembly for achieving polarization of a light beam in a gaseous laser is presented. The assembly includes a mirror mount structure open at one end and having a hollow cavity therein. A pair of mirrors are hard-sealed to the mirror mount structure. The first mirror is partially reflective and the second mirror is maximally reflective. The second mirror is arranged at a predetermined angle N with respect to the first mirror such that a light beam entering said mirror mount structure follows a beam path hitting the first mirror, reflecting off the first mirror and hitting the second mirror, and then retro-reflecting back on itself along the beam path of the entering light beam. The polarization function of a Brewster window is thus achieved without the use of an intra-cavity Brewster window.Type: GrantFiled: August 23, 1999Date of Patent: May 20, 2003Assignee: Research Electro-Optics, Inc.Inventor: Jon C. Sandberg
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Patent number: 6493375Abstract: An adjustable mounting unit for an optical element of a gas laser is provided. The typical gas laser for which the mounting unit will be used comprises a tube having a first end wall at one end and a second end wall at the other end, an optical axis extending longitudinally through the tube, and a port in the first end wall through which the optical axis passes. The mounting unit includes a rigid support structure having an aperture therein and an optical element mounted within the aperture. In addition, at least three adjustable mounting devices are used to attach the support structure to the laser tube. The mounting points are preferably selected so that they are displaced in an axial direction by substantially the same amount due to dimensional changes in the laser occurring during operation of the laser. When attached to the laser, the rigid support is spaced apart from the laser tube to allow for the adjustment of the angular positioning of the optical element.Type: GrantFiled: February 22, 2000Date of Patent: December 10, 2002Assignee: TuiLaser AGInventors: Hans Kodeda, Helmut Frowein, Claus Strowitzki, Alexander Hohla
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Patent number: 6473444Abstract: A laser bar assembly module having a metal base plate (20) to support a diode or a laser diodes strip (22), this base plate being provided with a groove or area (21) holding the diode or diodes strip in position, a support (24) on which the metal base plate is installed, this support being provided with a flat laser bar bearing surface (26), this flat surface projecting along a direction perpendicular to it beyond the groove or area (21) holding the diode or diodes strip in position.Type: GrantFiled: March 15, 2000Date of Patent: October 29, 2002Assignee: Commissariat a l'Energie AtomiqueInventor: Gérard Deschaseaux
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Patent number: 6438289Abstract: A light emitting and receiving device consists of a light propagating member provided with a light emitting means for converting first electrical signals into first optical signals, and a light receiving means for receiving and converting second optical signals into second electrical signals. The light receiving means is disposed coaxially with an optical fiber. The light propagating member is situated between the optical fiber and the light receiving means. The light emitting means emits the first optical signals into the optical fiber, and the light propagating member receives from the optical fiber and propagates therethrough the second optical signals to the light receiving means. Loss of optical power is suppressed, and a downsized light emitting and receiving device is attained.Type: GrantFiled: April 19, 2000Date of Patent: August 20, 2002Assignee: Yazaki CorporationInventor: Naoshi Serizawa
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Patent number: 6421364Abstract: Reflective powder, such as barium sulfate, within a reflector chamber of a solid-state optical pumping laser is effectively isolated from coolant-water, preventing contact therewith. Degeneration of reflectors and diminution of lasing magnitude is avoided. Water seals are shielded from substantially all light from the flashlamps by a light barrier. Ultraviolet light from the flashlamps is blocked from contacting the water seals. Degradation of the seals is eliminated; and water leakage-contact with the reflective powder is prevented.Type: GrantFiled: December 22, 2000Date of Patent: July 16, 2002Inventor: Robert W. Lubrano
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Patent number: 6404794Abstract: An excimer laser apparatus comprises a container sealing a laser gas including a halogen gas therein, a pair of discharge electrodes disposed in the container for inducing an electric discharge capable of oscillating a laser light, and a circulating fan with a shaft for producing a high-speed laser gas stream between a pair of the discharge electrodes. Both ends of the shaft are rotatably supported by rotor-stator mechanisms, or one end of the shaft is rotatably supported by a rotor-stator mechanism, and the other end of the shaft is supported by a magnetic bearing. The rotor-stator mechanism comprises a rotor attached to the shaft of the circulating fan, a stator provided at a position opposed to the rotor, an electric motor winding provided in the stator for applying torque to the rotor, and a position control winding provided in the stator for producing a magnetic force to levitate and support the rotor.Type: GrantFiled: October 2, 2000Date of Patent: June 11, 2002Assignee: Ebara CorporationInventors: Shinichi Sekiguchi, Masaru Osawa, Satoshi Mori, Tadashi Sato, Toshiharu Nakazawa
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Patent number: 6208674Abstract: A feedthrough structure of a gas discharge laser chamber conducts electric power through the wall of a sealed gas enclosure to a single piece electrode inside the enclosure. The feedthrough structure includes a single piece integrated main insulator larger than the electrode. The main insulator is compressed between the electrode and the wall of the enclosure. The surfaces forming interfaces between the electrode and the single piece insulator are the insulator and the wall are all very smooth to permit the parts to expand and contract as the chamber temperature varies. The feedthrough structure also provides mechanical support and alignment for the electrode and includes seals to prevent gas leakage around the feedthrough structure.Type: GrantFiled: August 31, 1999Date of Patent: March 27, 2001Assignee: Cymer, Inc.Inventors: R. Kyle Webb, William N. Partlo
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Patent number: 6134256Abstract: The performance of an RF excited gas laser having a discharge region with a generally curvilinear orthogonal cross-section, the shorter of the two dimensions of the discharge region cross-section being the spacing between non-conductive sidewalls which collisionally cool the discharge and are rotatable for guiding laser light, is enhanced by excitation field shaping. The field shaping includes use of a non-conductive member disposed between a high voltage field establishing electrode and a sidewall of the discharge region.Type: GrantFiled: May 4, 1998Date of Patent: October 17, 2000Assignee: QSource, Inc.Inventor: Peter Chenausky
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Patent number: 6104735Abstract: The present invention provides an electric discharge gas laser having a laser cavity in which is contained a laser gas and a fan for circulating the laser gas. The fan is supported by an active radial magnetic bearing system and driven by a brushless DC motor in which the rotor of the motor and the rotors of at least two radial bearings are sealed within the gas environment of the laser cavity and the motor stator and the coils of the bearing magnets are located outside the gas environment. No thrust bearing is provided. Axial positioning of the shaft is provided by reluctance centering produced by the at least two radial magnetic bearings and the brushless DC motor. In a preferred embodiment the motor stator is larger in the axial direction than the rotor to increase the magnetic centering effect.Type: GrantFiled: April 13, 1999Date of Patent: August 15, 2000Assignee: Cymer, Inc.Inventor: R. Kyle Webb
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Patent number: 6097749Abstract: A cost-effective and accurate light source deice for use in an image forming apparatus and including semiconductor lasers is disclosed. The device needs only a minimum number of parts, obviates displacements during assembly, and allows collimator lenses to be adhered by photo-curable adhesive. Even when temperature around the device varies, the distance between the semiconductor lasers in a beam pitch direction varies little.Type: GrantFiled: April 7, 1998Date of Patent: August 1, 2000Assignee: Ricoh Company, Ltd.Inventors: Yasuhiro Naoe, Hiroyuki Okuwaki, Osamu Kawazoe
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Patent number: 6026103Abstract: An electric discharge gas laser having a laser cavity in which is contained a laser gas and a fan for circulating the laser gas. The fan is supported in position radially by a roller bearing system and axially at least in part by magnetic forces. In a preferred embodiment the magnetic forces are supplied by a brushless DC motor in which the rotor of the motor is sealed within the gas environment of the laser cavity and the motor stator is located outside the gas environment. The magnetic center of the rotor is offset from the center of the stator to produce a magnetic reluctance generated force on the shaft that acts axially on the shaft toward the non-drive end and is reacted by a ball and plate bearing assembly mounted along the axis of rotation at the opposite end of the shaft.Type: GrantFiled: April 13, 1999Date of Patent: February 15, 2000Assignee: Cymer, Inc.Inventors: I. Roger Oliver, Igor V. Fomenkov, William N. Partlo
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Patent number: 5901167Abstract: A gas laser design (10) includes, an elongated sealed tube (21) filled with a gas, a power supply for exciting the gas, an optical resonator (24,25) for producing directional optical energy, and a fan/electronics package assembly (50), all of which are surrounded and enclosed by an external housing (30,70,90) forming a passageway in the space between the tube and the housing for providing cooling air therethrough. The passageway is divided into two physically separated cooling air paths by a horizontal surface (21a or 41). The lower space is a dual L-shaped path defining the first cooling air path downwardly at the inlet end of the tube in the vertical air channels (31,32) formed by the contoured shape of the tube and rearwardly (33) through the spaces (27,29) between the horizontal fins (26,28) of the tube to an outlet (101) at the rear of the tube.Type: GrantFiled: April 30, 1997Date of Patent: May 4, 1999Assignee: Universal Laser Systems, Inc.Inventors: Yefim P. Sukhman, Christian Julian Risser, Mikhail E. Ryskin