Inductive Or Capactive Excitation Patents (Class 372/82)
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Patent number: 5347530Abstract: To provide a pulsed gas-discharge laser system, in particular a pulsed excimer laser system, comprising a resonator and a gas volume filled with laser gas in which a gas discharge is ignitable, a microwave discharge structure surrounding the gas volume at least partially for maintaining the gas discharge, a microwave source for generating a microwave pulse and a microwave line leading from the microwave source to the microwave discharge structure, in which the laser pulse power behaves overproportionally to the pumping power, it is proposed that there be coupled to the microwave line by a coupling element a resonant microwave storage structure which leads to the gas volume and extends with at least a partial section thereof between the microwave discharge structure and the microwave line, and that the microwave storage structure be of such design and coupled to the microwave line by the coupling element in such a way that it stores the energy from the microwave pulse emitted by the microwave source until theType: GrantFiled: February 11, 1993Date of Patent: September 13, 1994Assignee: Deutsche Forschungsanstalt fuer Luft- und Raumfahrt e.V.Inventors: Frank Gekat, Hans Klingenberg, Gerhard Krutina
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Patent number: 5343114Abstract: A high-pressure glow discharge lamp (1) having a planar discharge vessel (2) which is sealed in a vacuumtight manner, which surrounds a discharge space (3) filled with a gas mixture which forms excimers, and whose parallel walls (4, 5) are formed from a dielectric material. The surfaces (6, 7) of the walls (4, 5) remote from the discharge space (3) are provided with planar electrodes (8, 9). At least one (5) of these walls with its associated electrode (8) is at least partly transparent to the generated radiation. The gas mixture includes at least one of the rare gases Xe, Kr and Ar for forming an excimer and at least one of the halogens I.sub.2, Br.sub.2, Cl.sub.2 and F.sub.2. The partial pressure of the substance forming the excimer is at least 10 and at most 600 mbar in the case of Xe and/or Kr and at least 10 and at most 1000 mbar in the case of Ar. The partial pressure of the halogen is between 0.05 and 5% of the partial pressure of the substance forming the excimer.Type: GrantFiled: June 30, 1992Date of Patent: August 30, 1994Assignee: U.S. Philips CorporationInventors: Claus Beneking, Horst Dannert, Manfred Neiger, Volker Schorpp, Klaus Stockwald
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Patent number: 5315605Abstract: An ion laser apparatus includes an ion laser tube, a pipe member, and air cooling heat radiating fins. The ion laser tube base a laser capillary having a discharge path between an anode and a hot cathode and a feedback path for an internal gas. The pipe member constitutes a cooling liquid channel for causing a cooling liquid to flow in an outer peripheral portion of the laser capillary. The air cooling heat radiation fins directly radiate heat, which is generated by the laser capillary, without being through the cooling liquid.Type: GrantFiled: January 12, 1993Date of Patent: May 24, 1994Assignee: NEC CorporationInventor: Yoshio Nakazawa
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Patent number: 5313481Abstract: A laser modulator (10) having a low voltage assembly (12) with a plurality of low voltage modules (14) with first stage magnetic compression circuits (20) and magnetic assist inductors (28) with a common core (91), such that timing of the first stage magnetic switches (30b) is thereby synchronized. A bipolar second stage of magnetic compression (42) is coupled to the low voltage modules (14) through a bipolar pulse transformer (36) and a third stage of magnetic compression (44) is directly coupled to the second stage of magnetic compression (42). The low voltage assembly (12) includes pressurized boxes (117) for improving voltage standoff between the primary winding assemblies (34) and secondary winding (40) contained therein.Type: GrantFiled: September 29, 1993Date of Patent: May 17, 1994Assignee: The United States of America as represented by the United States Department of EnergyInventors: Edward G. Cook, Daniel L. Birx, Don G. Ball
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Patent number: 5313487Abstract: At least two types of preionization systems are provided at a backside of one of a pair of primary electrodes which are disposed in a spaced opposed relation with respect to each other for causing a large area, spatially uniform main discharge in a laser gas therebetween. This improves efficiency and stability in laser oscillations under repeated operations at a high rate of tens to hundreds of shots per second. In addition, without using the laser output power, the preionization timing is controlled such that an optimal preionization timing is realized. The optimal preionization timing is determined on the basis of a minimum discharge starting voltage between the primary electrodes or a minimum required time from the time of applying a high voltage between said first and second primary electrodes until the time the main discharge commences.Type: GrantFiled: May 22, 1992Date of Patent: May 17, 1994Assignee: Mitsubishi Denki Kabushiki KaishaInventors: Shuichi Fujikawa, Mitsuo Inoue, Yukio Sato, Haruhiko Nagai
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Patent number: 5305346Abstract: A transverse-type laser assembly is disclosed herein. This assembly defines a laser cavity containing a vapor or gaseous substance which lases when subjected to specific electrical discharge excitation between a pair of spaced-apart electrodes located within the cavity in order to produce a source of light. An arrangement located entirely outside the laser cavity is provided for inducing a voltage across the electrodes within the cavity sufficient to provide the necessary electrical discharge excitation to cause a vapor substance between the electrodes to lase.Type: GrantFiled: September 8, 1993Date of Patent: April 19, 1994Assignee: The United States of America as represented by the United States Department of EnergyInventor: Earl R. Ault
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Patent number: 5305085Abstract: A split gain multi-mode ring laser gyroscope is disclosed having a radio frequency excitation induction coil which also serves the magnetic mode suppression system, suppressing undesirable modes of the gain curve to achieve the split gain effect. The induction coil serves as an important common component of both the gain medium excitation and mode suppression systems. The induction coil is suitably configured to carry both AC and DC signals.Type: GrantFiled: September 22, 1988Date of Patent: April 19, 1994Assignee: Litton Systems, Inc.Inventor: Tae W. Hahn
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Patent number: 5305338Abstract: A switch device used for a laser device, includes series-parallel connected switch elements or modules. The switch elements or modules are simultaneously turned on by trigger signals from trigger circuits. The transmission lines for connecting the trigger circuits to respective switch elements are equal to one another in length. A protecting circuit is provided for the switch elements, and indicators are provided for indicating the shortcircuit of the switch elements. In the switch device, the number of wires for the switch elements is made small and heat generated from the switch elements is effectively radiated. The modules are easily stacked, and firmly connected to a control unit for controlling the switch elements. A discharge excited laser device using the switch device has a high efficiency and a long lifetime and is reliable.Type: GrantFiled: September 10, 1991Date of Patent: April 19, 1994Assignee: Mitsubishi Denki Kabushiki KaishaInventors: Hitoshi Wakata, Akihiro Suzuki, Kenyu Haruta, Haruhiko Nagai, Akihiko Iwata, Shinji Murata, Isamu Tanakura, Tomohiro Sasagawa, Yuito Kimura
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Patent number: 5293573Abstract: A stripline laser wherein the distance between a mirror and a stripline is minimized without modifying the characteristics of the laser is provided. The stripline laser prevents damaging of the mirror due to plasma discharge by providing at least two insulating strips arranged between oppositely polarized electrodes. Electrically conductive paths lie between the insulating strips. The insulating strips are arranged to guarantee a voltage division. The voltage division maintains the voltage of the electrically conductive path neighboring the mirror below a plasma-maintaining voltage.Type: GrantFiled: September 23, 1992Date of Patent: March 8, 1994Assignee: Siemens AktiengesellschaftInventors: Wolfgang Welsch, Hans Krueger
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Patent number: 5291512Abstract: A Bragg reflector for selecting a specific spectral line from an output of a free electron laser (FEL) driven in the Raman regime to feed back the spectral line to the FEL. The Bragg reflector comprises at least one reflector pipe (4A), and a plurality of ring-formed plates (8) with their outer peripheries fitted to the inner periphery of the reflector pipe. The plurality of the ring-formed plates are spaced apart from each other at a constant spacing prescribed so that the alignment of the ring-formed plates provide the Bragg reflection of microwaves or far-infrared waves of a prescribed wavelength.Type: GrantFiled: May 29, 1992Date of Patent: March 1, 1994Assignee: NEC CorporationInventor: Yoshinori Suzuki
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Patent number: 5287373Abstract: Solid state laser gain media of the composition Cr.sup.+3 :XYZF.sub.6 wherein X is an alkali metal ion; Y is an alkaline earth metal ion, Cd.sup.+2 or Mg.sup.+2 ; and Z is Al.sup.+3, Ga.sup.+3 or Sc.sup.+3 are provided with gradient Cr doping levels for reducing thermally generated stress/strain in the lasing operation.Type: GrantFiled: August 17, 1992Date of Patent: February 15, 1994Assignee: AlliedSignal Inc.Inventors: William R. Rapoport, Michael L. Shand, Dave Narasimhan
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Patent number: 5280536Abstract: A laser power supply including circuitry for converting standard, 115-120 volt, AC power from a wall outlet to current pulses for powering a laser, to generate a pulsed laser output beam having laser pulse amplitude and duration matching pre-selected parameters. In a preferred embodiment, the invention powers an argon laser tube and generates output laser beam pulses having power in the range from about 50 milliwatts to 2 watts, and duration in the range from about 0.01 second to 2 seconds. The invention converts standard AC power to current pulses having controlled duration, average amplitude, and ripple amplitude for powering a laser, and can produce laser output beam pulses with a turn-on time of less than 1 millisecond, with a switching frequency in the range from about 10 to 20 KHz without significant overshoot.Type: GrantFiled: October 11, 1991Date of Patent: January 18, 1994Assignee: Coherent, Inc.Inventors: Gregory Dumond, Robert J. Rorden, Ralph Saunders
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Patent number: 5278854Abstract: Bulk gallium arsenide having a high hold-off voltage is optically activated by a laser resulting in high power output. A high voltage input is applied to a semi-insulating gallium arsenide material. The gallium arsenide material is activated by laser light, thereby resulting in large current conduction. An external oscillating signal is superimposed on the high current resulting in a high power output.Type: GrantFiled: September 18, 1992Date of Patent: January 11, 1994Assignee: The United States of America as represented by the Secretary of the ArmyInventors: Anderson H. Kim, Maurice Weiner, Robert J. Youmans, Robert A. Pastore, Jr.
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Patent number: 5258994Abstract: A discharge-excited laser apparatus includes a pair of discharge electrodes extending in a direction of an optical axis; a plurality of charging capacitors charged by a power source; a plurality of peaking capacitors arranged in parallel in a longitudinal direction of the discharge electrodes and receiving energy accumulated in the charging capacitors; and a plurality of semiconductor switches arranged with conductive plates in the longitudinal direction of the discharge electrodes and connected in series and in parallel to the peaking capacitors. The construction of the semiconductor switches enables uniform shift of the energy in the charging capacitors to the peaking capacitors and reduction of inductance of a loop for capacity shifting.Type: GrantFiled: June 19, 1991Date of Patent: November 2, 1993Assignee: Mitsubishi Denki K.K.Inventors: Kenyu Haruta, Akihiro Suzuki, Akihiko Iwata, Yasushi Minamitani, Hitoshi Wakata, Tomohiro Sasagawa, Takashi Kumagai
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Patent number: 5255282Abstract: A gas laser of the excimer type in which an open waveguide is employed, in which the excimer medium is moved to and through the open waveguide in a direction transverse to the optical axis. A discharge cell is defined by the upper and lower slabs of the open waveguide, and if desired, a microwave source is provided which supplies microwave energy to the discharge cell volume to excite the excimer medium and to initiate discharge.Type: GrantFiled: November 25, 1991Date of Patent: October 19, 1993Assignee: Quantametrics Inc.Inventor: John L. Remo
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Patent number: 5245625Abstract: High-frequency-excited laser for high input powers, particularly a CO.sub.2 stripline laser. For supplying high-power high-frequency energy to a laser, a matching unit (2) for the impedance is integrated in the laser, whereby the matching unit (2) contains a L-C element, whereby the inductance L and the capacitance C are variable, whereby the inductance can be set on the basis of variation of the length of the voltaicly conductive parts of a high-frequency feed and of a high-frequency conductance, whereby the capacitor is constructed of an outer conductor (10) and of an inner conductor (3) coaxial thereto, and whereby a coaxial slide ring (27) externally movable in an axial direction is in communication with the outer conductor (10). The slide ring (27) adjoins a dielectric cylinder (28) between the outer conductor (10) and the inner conductor (3), the outer conductor (10) carrying the inner conductor (3). The high-frequency-excited laser is provided for CO.sub.2 stripline lasers.Type: GrantFiled: June 24, 1992Date of Patent: September 14, 1993Assignee: Siemens AktiengesellschaftInventor: Wolfgang Guenther
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Patent number: 5239551Abstract: A solid-state laser and method of operating the laser is described having a microwave driven (MWD) visible excimer fluorescence source for exciting a solid-state laser. The laser of this invention provides an efficient, compact, and tunable solid-state laser preferably for use with tunable vibronic laser crystals.Type: GrantFiled: February 19, 1992Date of Patent: August 24, 1993Inventors: Rosemary S. Roberts, David J. Mencin, Mark A. Prelas
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Patent number: 5224117Abstract: A gas laser is designed with the following features: The laser is a slab laser, in which a plasma space (5) of a limited height is formed for the laser-active plasma between mutually opposing surfaces (11, 21) of two wall parts (10, 20); the wall parts (10, 20) are components of a coupling chamber with at least one coupling wall (30), which is connected to at least one distribution chamber (40,), whereby by injecting the high-frequency energy through the coupling wall (30), the gas plasma is activated in the desired manner over its entire length. The high-frequency energy for exciting the plasma lies in the gigahertz range, for which a magnetron is used, for example.Type: GrantFiled: October 17, 1991Date of Patent: June 29, 1993Assignee: Siemens AktiengesellschaftInventors: Wolfgang Kruger, Hubert Grosse-Wilde
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Patent number: 5220576Abstract: Slab or stripline laser. In a slab or stripline laser that contains two electrodes (1, 26) and two resonator mirrors (2, 3), the electrodes (1, 26) are executed shape-stable and the mirrors (2, 3) and a second electrode (26) are secured to and carried by the first electrode (1). The invention is suitable for compact stripline lasers.Type: GrantFiled: August 29, 1991Date of Patent: June 15, 1993Assignee: Seimans AktiengesellschaftInventors: Hans Krueger, Walter Kirschner
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Patent number: 5206875Abstract: In order to improve a gasdynamic CO laser, comprising an excitation region, in which a laser gas is excited, a supersonic nozzle, through which the laser gas flows, a laser-active region penetrated by a resonator beam path and a closed laser gas circuit, in which the laser gas is cyclically conducted, such that this requires smaller pumping capacities and is therefore suitable for commercial uses, it is suggested that the supersonic nozzle be designed such that at a downstream outlet thereof the laser gas has a temperature in the region of approximately 80 to approximately 180 Kelvin.Type: GrantFiled: August 30, 1991Date of Patent: April 27, 1993Assignee: Deutsche Forschungsanstalt fuer Luft- und Raumfahrt e.V.Inventors: Hartwig Von Buelow, Eberhard Zeyfang
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Patent number: 5202894Abstract: Electric supply device for at least one metal vapor laser includes a convertor for converting an a.c. voltage into a d.c. voltage of fixed amplitude. Means are provided for supplying a pulse voltage with a maximum amplitude that can be regulated. An electric power charging circuit including a variable inductor is used for regulating the maximum amplitude of the pulse voltage for each laser.Type: GrantFiled: August 4, 1992Date of Patent: April 13, 1993Assignee: Commissariat a l'Energie AtomiqueInventor: Bernard Chaudanson
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Patent number: 5197079Abstract: High-power stripline laser. In a high-power stripline laser, a high beam quality and mode purity is achieved in that the mutual spacing of two electrodes that form waveguide surfaces for the laser emission and limit a discharge space are adjustable in a longitudinal direction and in a transverse direction of the discharge space and the metal spring is set to a desired value. The invention is suitable for high-power stripline lasers having high beam quality.Type: GrantFiled: August 26, 1991Date of Patent: March 23, 1993Assignee: Siemens AktiengesellschaftInventors: Hans Krueger, Walter Kirschner
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Patent number: 5140606Abstract: A CO.sub.2 slab waveguide laser (10) is disclosed including a pair of spaced apart electrodes (36,38) having opposed light reflecting surfaces. The electrodes are dimensioned in a manner to guide light in a plane perpendicular to the reflecting surfaces. Light parallel to the reflecting surfaces is not constrained other than by the resonator mirrors (30,32). The resonator structure includes a negative branch unstable resonator in the nonwaveguide dimension. A stable resonator is used in the waveguide dimension but the mirror spacing from the end of the guide is based in part on the configuration of the unstable resonator. A unique support structure is disclosed for maintaining the electrodes in a spaced apart orientation without confining the discharge. Further refinements are disclosed for cooling the laser and for accommodating thermal expansion of the parts.Type: GrantFiled: October 12, 1990Date of Patent: August 18, 1992Assignee: Coherent, Inc.Inventors: J. Michael Yarborough, James L. Hobart, Joseph Dallarosa
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Patent number: 5095490Abstract: An asymmetric RF excited gas laser includes an elongated chamber, a first reflector and a second reflector, a first supporting mechanism, a ribbon of a metal conductor and a impedance-matching circuit. The elongated chamber is of cross-sectional dimensions suitable for confining a laser gas discharge and is formed from a dielectric material. A laser gas is disposed in the elongated chamber. The first and second reflector reflect and guide light energy from the laser gas discharge within the elongated chamber so that the light energy is optically independent of the internal walls of the elongated chamber as the light energy travels longitudinally the length of the elongated chamber. The first supporting mechanism supports the elongated chamber and forms negative electrode. The first supporting mechanism has cooling tubes and is electrically coupled to ground. The ribbon of the metal conductor forms a positive electrode which is disposed along the elongated chamber.Type: GrantFiled: June 22, 1990Date of Patent: March 10, 1992Assignee: Directed Energy, Inc.Inventor: Leroy V. Sutter, Jr.
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Patent number: 5089787Abstract: An optically-coupled high frequency amplifier is disclosed herein. The ampliifer of the present invention includes a laser and a receiver coupled by an optical beam. The amplifier further includes a modulator responsive to an input signal for modulating the optical beam generated by the laser. The receiver produces an output signal in response to the modulated optical beam. A specific embodiment of the present invention further includes impedance matching means for increasing the maximum operating frequency of the laser and the receiver.Type: GrantFiled: July 1, 1991Date of Patent: February 18, 1992Assignee: California Institute of TechnologyInventors: Haila Wang, Amnon Yariv
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Patent number: 5079773Abstract: A phase-locked ridge waveguide gas laser includes a body that circumferentially bounds an elongated internal space extending along a longitudinal main plane and bisected by a longitudinal central plane. The internal space contains a gaseous lasing medium that is excited at radio frequency with attendant light emission from the gaseous medium. Mirrors are so positioned relative to the body as to provide lasing of the light emission. Respective ridges partition the internal space into a plurality of laser resonator cavities each sustaining a guided mode of the lasing light emission. Each of the cavities extends longitudinally of the body and is spaced from an adjacent cavity by a predetermined distance in a width direction of the internal space.Type: GrantFiled: January 15, 1991Date of Patent: January 7, 1992Assignee: United Technologies CorporationInventors: Richard A. Hart, Kennedy, Jr. John T., Leon A. Newman
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Patent number: 5065405Abstract: An improved sealed-off RF-excited gas laser and method for its manufacture. The resonator section of the laser consists of four optically reflecting longitudinal walls which define the laser bore and plasma section. A concave mirror is mounted on one end of the resonator and a flat or concave output coupler is mounted at the other end. The laser resonator operates in a non-waveguide non-free space mode utilizing wall reflections. Artifacts are introduced at the optically reflecting walls to define a stable oscillatory axis and mode structure by favoring the establishment of stable reflection points along the length of the walls. These artifacts are created by carefully defined bends and tapers in some of the walls to create high mode purity, stability and relatively uncritical optical alignments.Type: GrantFiled: January 24, 1990Date of Patent: November 12, 1991Assignee: Synrad, IncorporatedInventors: Peter Laakmann, Stanley R. Byron, Michael W. Barrett
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Patent number: 5062113Abstract: A repetitive voltage signal, such as a sinusoidal wave, is supplied to the anode of a step-recovery diode through an inductor. A variable voltage source is connected to the cathode of the step-recovery diode. Conduction of the step-recovery diode and cut-off of the reverse current flowing through it are repeated with a period identical to the period of the repetitive voltage signal. On account of the abrupt reverse current cut-off characteristic of the step-recovery diode, a voltage is induced in the inductor when the reverse current is cut off, thereby producing an abrupt voltage change at the junction point between the inductor and the step-recovery diode. This abrupt voltage change is converted by differentiation into a short pulse to drive a semiconductor laser diode.Type: GrantFiled: May 30, 1990Date of Patent: October 29, 1991Assignee: Hamamatsu Photonics K.K.Inventor: Akira Takahashi
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Patent number: 5058122Abstract: To provide more economical excitation of a high-power laser comprising a resonator having mirrors arranged in spaced, opposite relation to each other in the direction of a resonator axis and a beam path extending in both the direction of the resonator axis and a transverse direction perpendicular thereto, a gas-discharge volume permeated by the beam path and containing laser gas, and two facing wall surfaces extending substantially parallel to the resonator axis and to the transverse direction and enclosing between them and thereby delimiting the gas-discharge volume, it is propsoed that at least one wall surface be formed by a dielectric wall, that a microwave resonance structure separate from the laser gas in the gas-discharge volume be placed on the dielectric wall and have an opening facing the dielectric wall and bring about in an area of volume of the gas-discharge volume opposite the opening a microwave excitation of the laser gas, and that microwaves be introducible into the microwave resonance structType: GrantFiled: November 6, 1990Date of Patent: October 15, 1991Assignee: Deutsche Forschungsanstalt fuer Luft- und Raumfahrt e.V.Inventor: Frank Gekat
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Patent number: 5048032Abstract: A laser structure utilizes air cooling and RF induction excitation of a gaseous active medium. A means for exciting the active medium is provided including a switching power supply utilizing pulse width modulated switching to provide an RF energy output. The RF output is coupled to a tank circuit which comprises a capacitor, an inductor, and at least one coupling structure. A means for generating a magnetic field-along the axial length of the laser bore is provided and can comprise either permanent magnets or a DC source coupled to the coupling structure. The laser further includes means for dissipating heat from the laser bore by utilizing the coupling structures as convective cooling fins with forced air circulated thereabout.Type: GrantFiled: July 18, 1990Date of Patent: September 10, 1991Assignee: Spectra-PhysicsInventors: John P. Ekstrand, John P. Goldsborough, David L. Wright
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Patent number: 5043995Abstract: The invention relates to a process to electrically excite a laser gas, especially a CO.sub.2 --He--N.sub.2 mixture, which is admitted at an angle, preferably perpendicular, to the axial laser gas discharge gap, and which is ignited by means of bunched microwaves. In order to avoid the formation of wall boundary layers during the microwave excitation of a laser gas and in order to achieve a homogeneous, large-volume glow discharge, the microwaves are axially bunched into the laser gas discharge gap in the area of the laser gas inlet so that the microwaves and the ignited laser gas spread over the axial laser gas discharge gap.Type: GrantFiled: June 28, 1989Date of Patent: August 27, 1991Assignee: Messer GriesheimInventor: Wilfried Lackner
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Patent number: 5013959Abstract: A high-power radiator, especially for ultraviolet light, wherein in order to increase the efficiency in the case of UV high-power cylindrical radiators, the inner dielectrics (3) are very small in comparison with the outer dielectric tube. A privileged direction of radiation is achieved by eccentric arrangement of the dielectrics and outer electrodes (2) only on the surface adjacent to the inner dielectric (3), and simultaneous construction of the outer electrode (7) as a reflector.Type: GrantFiled: February 27, 1990Date of Patent: May 7, 1991Assignee: Asea Brown Boveri LimitedInventor: Ulrich Kogelschatz
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Patent number: 5008896Abstract: The invention relates to a gas laser having a discharge tube, through which the gas flows in an aixal direction and to which high-frequency electrodes are fitted externally, and having a high-frequency generator. In order to obtain a simpler construction and the smallest possible high-frequency losses, it is provided that the power output stage (12) of the high-frequency generator is disposed in the housing (1) of the laser resonator (2, 7, 8) and is directly connected to the electrodes (9, 10) via impedance adaptation elements (11).Type: GrantFiled: April 10, 1987Date of Patent: April 16, 1991Assignee: Rofin-Sinar Laser GmbHInventors: Hinrich Martinen, Karl-Heinz Knobbe, Samuel S. Simonsson, Peter Wirth
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Patent number: 5008894Abstract: A system for improved drive and matching between an RF power source and a plasma tube in a laser system. The system uses standard 50 or 75 ohm quarter wave transmission lines as the sole interconnect and matching elements between discharge electrodes and drive transistors. The drive transistos may be operated in deep saturation or as switches providing near square wave output to approach the 100 percent theoretical electrical efficiency of switching power supplies. The system features better initial breakdown, bettwer discharge uniformity and power stability under narrow drive pulse conditions, lower matching electrical losses, and extreme simplicity and low cost.Type: GrantFiled: March 30, 1990Date of Patent: April 16, 1991Assignee: Synrad, IncorporatedInventor: Peter Laakmann
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Patent number: 4987577Abstract: The gas discharge space into which microwaves are fed via a waveguide forms a laser housing in the form of a waveguide having a longitudinal ridge therein, the laser housing being preferably dimensioned such that its critical wavelength .lambda..sub.k is shorter than or equal to the wavelength .lambda..sub.o of the microwave frequency. The gas laser may advantageously be a CO.sub.2 gas laser.Type: GrantFiled: April 10, 1990Date of Patent: January 22, 1991Assignee: Siemens AktiengesellschaftInventors: Horst Seunik, Hans Krueger, Hubert Weber
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Patent number: 4980894Abstract: An ignitor for a preionizing means of an excimer laser has an electrically conductive core which projects into the gas space of the laser and which is surrounded by a jacket of a fluoroplastic. The jacket is brought into sealing engagement with the wall of the laser gas space by means of a pressure sleeve via mating conical surfaces.Type: GrantFiled: August 31, 1989Date of Patent: December 25, 1990Assignee: Lambda Physik Forschungs-und Entwicklungs-Gesellschaft mbHInventor: Gerd Steinfuhrer
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Patent number: 4978929Abstract: An oscillator circuit for supplying a gas discharge path. A self-oscillating oscillator is controlled by pulses whose width, amplitude, and/or frequency are regulated as necessary to stabilize the oscillator output power, energy, and/or voltage.Type: GrantFiled: December 20, 1989Date of Patent: December 18, 1990Assignee: Herfurth GmbHInventor: Karl-Heinz Knobbe
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Patent number: 4975920Abstract: A matching means (2) is arranged in a power source portion (5) including an RF power source (1), an output impedance (Z.sub.0) of the RF power source (1) is matched by the matching means with a impedance (Z.sub.L) of a laser tube (4) connected through a power transmitting means (3). Therefore, the laser tube (4) arranged in a laser emitting portion (6) is effectually supplied with an RF power generated by the RF power source (1), and a stable laser beam can be emitted from the laser tube (4) with a high efficiency.Type: GrantFiled: March 30, 1990Date of Patent: December 4, 1990Assignee: Fanuc LimitedInventor: Akira Egawa
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Patent number: 4945542Abstract: The laser diode modulator disclosed herein employs a series of field-effect transistors provided with an input circuit utilizing a succession of inductive elements arranged to form a lumped element transmission line of essentially constant characteristic impedance. The drain or output terminals of the transistors drive an output circuit employing a series of inductive elements which, together with shunt capacitors, form a singly terminated filter providing a graduated and decreasing characteristic impedance. The laser diode is connected as the termination of the filter.Type: GrantFiled: May 31, 1989Date of Patent: July 31, 1990Assignee: Massachusetts Institute of TechnologyInventor: Louis R. Brothers, Jr.
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Patent number: 4937834Abstract: A high-frequency discharge pumping laser device is provided, applying a high-frequency voltage to a laser tube to produce laser oscillation. The high-frequency discharge pumping laser device comprises a high-frequency power supply for generating the high-frequency voltage, and a matching circuit for gaining impedance matching between the high-frequency power supply and the laser tube. The matching circuit has a reactance having an intermediate point connected to ground of a high-frequency circuit. This arrangement reduces variations or fluctuations of the laser output due to a mutual current and a mutual impedance between discharge tube segments.Type: GrantFiled: March 13, 1989Date of Patent: June 26, 1990Assignee: Fanuc Ltd.Inventor: Akira Egawa
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Patent number: 4935933Abstract: A laser oscillator device applies a high-frequency voltage to a plurality of discharge regions (1a, 1b) through a dielectric to produce a high-frequency discharge for laser pumping. The laser oscillator device includes high-frequency power supplies (26a, 26b) for converting a DC power supply into high-frequency power supply outputs, output transformers (22a, 22b) for boosting the high-frequency power supply outputs and transmitting high-frequency electric power to the discharge regions, the output transformers having secondary windings with grounded midpoints, and current detectors (CT1a, CT1b) for detecting currents flowing through discharge tubes. Output currents of the high-frequency power supplies are controlled by feeding back the detected currents. Since the detected currents are not affected by mutual currents between electrodes, alarm conditions due to uncontrollable operation of a feedback loop and damage of parts are prevented from occurring, and stable current control is achieved.Type: GrantFiled: January 12, 1989Date of Patent: June 19, 1990Assignee: Fanuc LtdInventors: Norio Karube, Akira Egawa, Mitsuo Manabe
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Patent number: 4928248Abstract: A light source driving device for driving a light source such as a semiconductor laser comprises an input voltage generating section for superposing a pulse voltage on a predetermined DC voltage to provide an input voltage, a voltage converting section having an inductor and a step recovery diode, and a driving section having a delay element. The voltage converting section applies the input voltage through the inductor to the step recovery diode to provide a very short pulse voltage. The driving section applies the very short pulse voltage to the light source, and the delay element delays the very short pulse voltage, inverts the polarity thereof, and applies the inverted very short light pulse to the light source.Type: GrantFiled: May 3, 1989Date of Patent: May 22, 1990Assignee: Hamamatsu Photonics Kabushiki KaishaInventors: Akira Takahashi, Musubu Koishi
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Patent number: 4908585Abstract: An RF transformer employs at least three elongated conductive elements in generally parallel spaced relationship. At least a first inductive element is connected between a pair of the conductive elements to provide a desired field distribution. A diagnostic technique for determining the frequency shift of the transformer employs a perturbing object which is selectively longitudinally positioned within the transformer. The transformer has particular utility as an RF excited gas laser.Type: GrantFiled: February 27, 1989Date of Patent: March 13, 1990Inventor: Peter P. Chenausky
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Patent number: 4908524Abstract: A high voltage pulse power converter comprises a modified type E pulse charging network (74) in series with a nonlinear magnetic switch (76). The network comprises a ladder of charging elements (78) each of which comprises a shunt section of a pulse charging module (80) in parallel with a pulse receiving capacitor (82), and a series section comprising an inductance (84). The pulse charging module (80) steps up power from a low voltage power supply (102) through a transformer (110) to charge the pulse receiving capacitors (82); the pulse receiving capacitors (82) discharge simultaneously when sufficient volt seconds have been applied to the nonlinear magnetic switch (76).Type: GrantFiled: February 8, 1989Date of Patent: March 13, 1990Assignee: Rockwell International CorporationInventor: Richard J. Sojka
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Patent number: 4903276Abstract: The power supply includes an oscillator (20) which generates a radio-frequency signal amplified by an amplifier (21). The amplified signal is applied to a laser (22) to initiate and maintain a discharge in the laser gaseous active medium. Power control means (24) are provided operable after initiation of the discharge to adjust the power applied to the laser to the value required to operate the laser at maximum efficiency. Automatic gain control means (25) may be provided, responding to the output from a power meter (23).Type: GrantFiled: April 29, 1988Date of Patent: February 20, 1990Assignee: Ferranti, plcInventor: Iain E. Ross
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Patent number: 4891819Abstract: A transversely RF excited gas laser with an internally folded resonator includes an elongated chamber of cross-sectional dimensions suitable for confining a laser gas discharge, a plurality of reflectors and a laser gas. The reflectors form a stable folded laser resonator cavity of a compact geometry in order to efficiently extract laser power from the laser resonator cavity. There are at least two of the reflectors and at least one of the plurality of reflectors is concave. The laser gas is disposed in the folded resonator cavity which reflect and guide light energy from the laser gas discharge within the elongated chamber. The transversely RF excited gas laser with an internally folded resonator also includes a pair of electrodes and a pair of cooling electrodes. The electrodes are transversely disposed on the elongated chamber and excite the laser gas. The cooling electrodes are transversely disposed on the elongated chamber and electrically coupled to ground.Type: GrantFiled: January 17, 1989Date of Patent: January 2, 1990Inventors: Leroy V. Sutter, Jr., Harold A. Cameron, Michael R. Davison
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Patent number: 4890294Abstract: The invention relates to a plasma apparatus where plasma is generated utilizing microwave discharge and laser excitation is performed and plasma processing is performed. More specifically, in a plasma apparatus where a microwave from a microwave oscillator is transmitted through a microwave transmission path to a microwave circuit, and plasma is generated by a microwave discharge within the microwave circuit, a plasma generating medium for generating the plasma is filled in a space formed between a conductor wall constituting a part of the microwave circuit and a dielectric installed opposite to the conductor wall, and the microwave circuit forms microwave mode having an electric field component orthogonal to the boundary between the dielectric and the plasma.Type: GrantFiled: January 25, 1988Date of Patent: December 26, 1989Assignee: Mitsubishi Denki Kabushiki KaishaInventors: Junichi Nishimae, Kenji Yoshizawa, Masakazu Taki, Yoshihiro Ueda, Tadashi Yanagi, Akihiko Iwata
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Patent number: 4887272Abstract: A laser oscillator device applies a high-frequency voltage to a plurality of discharge regions through a dielectric for producing a high-frequency discharge for laser pumping. The laser oscillator device has current detectors (CT2a, CT2b) for detecting currents flowing from high-frequency power supplies (26a, 26b) into discharge tubes (1). The current detectors are disposed in positions to detect mutual currents between the adjacent discharge tubes. The currents detected by the current detectors (CT2a, CT2b) are used as feedback currents for preventing uncontrollable conditions of the currents due to a coupling current. The laser oscillator device also has a mechanism for preventing interference in the discharge regions.Type: GrantFiled: December 20, 1988Date of Patent: December 12, 1989Assignee: Fanuc LtdInventors: Norio Karube, Akira Egawa, Etsuo Yamazaki, Nobuaki Iehisa, Mitsuo Manabe
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Patent number: 4876693Abstract: Integrated laser head apparatus is disclosed for producing high energy pulses in pulsed gas lasers. The present invention provides high energy pulses over short time durations suitable for laser rangefinder systems due to an improvement in the arrangement of energy storage capacitors (22, 24) which keeps circuit inductance to a minimum. The pair of nested, ceramic capacitors (22, 24) are substantially cylindrical and are coupled through thin conductive layers (23). The capacitors are charged by a spark gap trigger (14), an inductor (18), and a charging resistor (52). The capacitors (22, 24) enclose a pressure vessel (28) which further encloses a laser resonator (12) including a laser output coupler mirror (42), totally reflective mirror (44), discharge electrodes (32, 34) and a central chamber (30) which contains a pressurized gaseous phase laser medium. The high voltage discharge electrode (32) is disposed coaxially with the surrounding capacitors (22, 24).Type: GrantFiled: December 26, 1984Date of Patent: October 24, 1989Assignee: Hughes Aircraft CompanyInventors: David J. Lucero, Claudio G. Parazzoli, Metin S. Mangir
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Patent number: 4875218Abstract: A radio frequency (RF) excited waveguide gas laser has a hollow waveguide defined by dielectric or lossy materials and metal electrodes coated by thin films with small absorptions so that the metal electrodes are separated from the filling gas and the waveguide loss is very low. With such thin films on the electrodes, a sealed-off, high-power, compact waveguide gas laser having an extended life is realized.Type: GrantFiled: March 7, 1986Date of Patent: October 17, 1989Assignee: Hitachi Cable Ltd.Inventors: Akihito Hongo, Tsuneo Shiota, Shigeo Nishida, Mitsunobu Miyagi, Yoshihiko Wagatsuma