Abstract: A semiconductor laser gain structure having a tapered gain region comprising cavity spoilers for receiving light which is reflected off of the output facet back into the semiconductor and removing it from the gain region so as to reduce or eliminate self oscillation. The boundaries of the gain region are also designed to have a very low refractive index gradient so as to minimize reflection of light off of the boundaries back into the gain region. The gain structure may be embodied in a semiconductor laser oscillator or semiconductor laser amplifier depending on whether the input facet is or is not, respectively, anti reflection coated. The output facet is anti-reflection coated in either embodiment.

Abstract: A discharge exciting excimer laser device comprises a pair of main discharge electrodes, a dielectric and an auxiliary electrode. The dielectric is in a cylindrical form and has a side opposed to one of the main discharge electrodes, which side is formed into a flat plate-like portion. The auxiliary electrode is embraced within the dielectric leaving a space and is opposed to one of the main discharge electrodes with the flat plate-like portion of the dielectric sandwiched therebetween. Such a construction increases laser output and improves insulating performance.

Abstract: An apparatus for preionization of a pulsed gas laser comprises corona preionization electrodes (12, 12') which are each arranged adjacent a respective associated main electrode (10, 10'). To generate an effective preionization with low constructional and circuit expenditure the preionization electrodes (12, 12') are set under voltage with the same high-voltage source (16) which also supplies the main electrodes (10, 10') with voltage. By means of an inductance (30) a time delay is set between the excitation of the preionization electrodes and the triggering of the main discharge between the main electrodes (10, 10').

Abstract: A pulsed gas-discharge laser, in particular an excimer laser, comprises main discharge electrodes (10, 10a) of erosion-resistant metal between which laser gas flows with high velocity to replace the laser gas between the main discharge electrodes from laser pulse to laser pulse. For preionizing the laser gas two X-ray radiation sources (30, 30a) are arranged adjacent one main discharge electrode (10). The flow path (18) of the laser gas is formed partially by flow bodies (16, 16a, 32, 32a) which consist of a material which has a high secondary emissive power with regard to the X-ray radiation. The secondary radiation is so configured that it promotes the preionization.

Abstract: An apparatus for preionization of gas in a pulsed gas laser by means of soft X-ray radiation comprises an elongated cathode (26) which is heated by thermal radiation or electron bombardment and which is arranged parallel to a likewise elongated anode (18) in an evacuated housing.

Abstract: A CO.sub.2 slab waveguide laser (10) is disclosed including a pair of spaced apart electrodes (36,38) having opposed light reflecting surfaces. The electrodes are dimensioned in a manner to guide light in a plane perpendicular to the reflecting surfaces. Light parallel to the reflecting surfaces is not constrained other than by the resonator mirrors (30,32). The resonator structure includes a negative branch unstable resonator in the nonwaveguide dimension. A stable resonator is used in the waveguide dimension but the mirror spacing from the end of the guide is based in part on the configuration of the unstable resonator. A unique support structure is disclosed for maintaining the electrodes in a spaced apart orientation without confining the discharge. Further refinements are disclosed for cooling the laser and for accommodating thermal expansion of the parts.

Abstract: Slab or stripline gas laser. A slab or stripline gas laser that contains two laser mirrors (4, 5) has a single construction that is extremely mode-stable. The gas laser has a first electrode (1) that carries laser mirrors (4, 5) and that is connected to the laser mirrors (4, 5) in a fixed angular position, and a second electrode (13) that is mechanically fixed relative to the first electrode but is positioned such that it does not contact the laser mirrors (4, 5). The laser structure can be used in CO.sub.2 waveguide lasers.

Abstract: The electrode consists of a metal carrier (1) and a surface layer (3), which has been deposited on the carrier and has a thickness of 0.1 to 20 .mu.m and consists of a material which differs from the carrier material and distinguishes from the carrier material by having a smaller work function and lower thermal and electrical conductivities and is selected from the group tungsten, niobium, tantalum, rhenium and chromium. The carrier (1) consists of a deeply drawable material. There is preferably also an interlayer (2) made of a highly conductive metal.

Abstract: Slab or stripline laser. In a slab or stripline laser that contains two electrodes (1, 26) and two resonator mirrors (2, 3), the electrodes (1, 26) are executed shape-stable and the mirrors (2, 3) and a second electrode (26) are secured to and carried by the first electrode (1). The invention is suitable for compact stripline lasers.

Abstract: Disclosed herein is an Internal Anode System for Ring Laser Gyroscopes comprising at least one internal anode electrically connected, through an active gaseous medium, with a cathode to form a compact and shortened DC discharge pathway for a ring laser gyroscope. The internal anode comprises a conductive coating covering a taped end of the intersection of at least two passageways within a monolithic ring laser. The coated taped end of said passageways communicates with an external power source through an electrical feedthrough placed under and around a dielectric mirror substrate and seal. The gain-bore region within the cavity is narrowed and acts as the cavity aperture, increasing the available gain per unit length and relieving the fabrication tolerances.

Abstract: A CO.sub.2 slab laser is disclosed having a pair of spaced apart electrodes defining a rectangular discharge region. RF energy is fed through the electrodes to excite the CO.sub.2 gas. A pair of mirrors are located adjacent the electrodes to define the resonant cavity. A recombinant surface is placed between the ends of the electrodes and the mirrors to quench oxidizing species generated by the discharge before they reach the mirrors. In this manner, the degradation of the mirrors is reduced so that the high power performance of the laser can be maintained. The recombinant surfaces can be defined by forming extension regions at the end of the electrodes between which the discharge is minimized. Alternatively, a mirror shield having a beam transmitting aperture can be used to quench the oxidizing species.

Abstract: In an axial flow gas laser, in particular a high-power CO.sub.2 laser with DC excitation, at least one discharge tube (1) of dielectric material, in particular quartz glass, is provided. First and second connection bodies (E1, E2) are sealingly connected to the discharge tube (1) or to connection necks branching off from it, in each case in the vicinity of an electrical and laser gas connection point, forming a connection chamber (K1, K2), and are connected to laser gas inlet lines (4) or outlet lines (9). The first connection body (E1) is connected to the anode potential and the second connection body (E2) to the cathode potential of a direct voltage source. The first and second connection bodies (E1, E2) are disposed with tubular axial spacing from one another, so that the discharge tube (1), with its gas chamber, forms a discharge path between the anode and cathode potentials.

Abstract: In order to improve a gasdynamic CO laser comprising a gas supply means supplying a laser gas, an excitation region, in which the laser gas is excited, a supersonic nozzle arranged downstream of the excitation region and having the laser gas flowing therethrough and a laser-active region which is penetrated by a resonator beam path, such that it is possible to excite the laser gas in a more optimum manner, it is suggested that the laser gas be excited in the excitation region by means of a high-frequency discharge in a high-frequency discharge region and that the high-frequency discharge region end in front of the supersonic nozzle.

Abstract: A cathode for use in a gas discharge device that is resistant to sputtering and therefore extends the life of the gas discharge device. The configuration of the cathode effectively uses the hollow cathode effect allowing the laser to operate with a lower excitation voltage. That configuration involves a body having a cavity therein and an entrance port to the cavity. Within the cavity there exists a protrusion extending from an interior surface toward the entrance port.

Abstract: A radio frequency excitation system is disclosed for use in conjunction with a ring laser gyroscope. The radio frequency excitation system is comprised of a closed resonant cavity which surrounds a helical coil driven at a high radio frequency at a range of 5 to 550 megahertz. This closed resonant coil surrounds one leg of a ring laser gyroscope which is carved out and exposed so that it may be surrounded by the resonant cavity. Using such a radio frequency excitation system eliminates the need for high power DC discharge components such as cathodes and anodes, as well as problems inherent with properly sealing the cathodes and anodes to the monolithic frame of the ring laser gyroscope.

Abstract: High-power stripline laser. In a high-power stripline laser, a high beam quality and mode purity is achieved in that the mutual spacing of two electrodes that form waveguide surfaces for the laser emission and limit a discharge space are adjustable in a longitudinal direction and in a transverse direction of the discharge space and the metal spring is set to a desired value. The invention is suitable for high-power stripline lasers having high beam quality.

Abstract: At least the opposing surface portions of the main electrodes of an excimer laser device are covered with materials which are resistive to chemical etching than nickel. The etching resistive material may be a platinum based alloy containing rhodium, ruthenium, iridium, or osmium; a nickel based alloy containing gold, platinum, rhodium, ruthenium, iridium, or osmium; or rhodium, ruthenium, iridium, or osmium. Thus, an excimer laser device is realized by which the lives of the electrodes and the laser gas are prolonged.

Abstract: A low noise pulsed light source utilizing a laser diode for generating a short pulsed light of a high repetitive frequency. The low noise pulsed light source includes a laser diode drived by an electric pulse generator for emitting repetitive pulsed light; a current source for supplying a bias current to the laser diode; and a photodetector for detecting the repetitive pulsed light emitted from the laser diode; and control means. The control means modulates at least one of the bias current from the current source and the amplitude of a pulse signal generated from the electric pulse generator in accordance with an output signal from the photodetector such that the intensity of the pulsed light is kept unchanged and any noise involved in the same is reduce. A feedback system including the photodetector and the control means has a peak in its frequency characteristics within a frequency band for light detecting in a light measuring system utilizing the low noise pulsed light source.

Abstract: A saturable reactor comprising a magnetic core (1) having an annular or an elongated race-track configuration, an electrical insulator (6) disposed around the magnetic core and a conductor winding (3) wound around the insulator (6). A coolant duct (7) is provided in the insulator to extend radially transversely across the magnetic core and having a radially separated inlet and outlet (8,9). A saturable reactor may comprises an annular magnetic core (51), a conductor winding including a first conductor (55) surrounded by the magnetic core (51) and a second conductor (56) disposed around the magnetic core and connected to the first conductor (55) through a load. A control winding (54) extends through the first and second conductors (55,56), and at least one of the first and second conductors (55,56) has a notch or a through hole (57,59) for insulatingly receiving the control winding (54) therein.

Abstract: A gas laser apparatus includes an insulating material layer covering the outside of a pair of metal electrodes disposed on the outer peripheral surface of a dielectric discharge tube. The insulating material layer thus provided electrically separates the metal electrodes and prevents a dielectric tube which would otherwise occur through an air gap between adjacent portions of the metal electrodes when a high-frequency voltage is applied across the metal electrodes.

Abstract: A cathode for a laser generator includes a monolithic substrate consisting essentially of a nonconductive material and including a thin film of a conductive material deposited thereon. The substrate has an inner and outer surface, the thin film substantially contiguously covers the substrate and prevents exposure of the substrate over the life of the cathode, and the conductive thin film is oversprayed onto a portion of the substrate's outer surface so as to allow electrical contact from the outer surface to the inner surface.

Abstract: A cathode for a laser generator consists of a monolithic body consisting essentially of beryllium and beryllium oxide where the beryllium oxide has a concentration greater than 4%. The monolithic substrate may be comprised of a conductive or nonconductive material. A thin film of beryllium having a controlled amount of BeO is deposited onto the substrate so as to be thick enough to continuously cover the substrate and so as to prevent exposure of the substrate over the life of the cathode. The BeO content is greater than 4.0%. The BeO layer is deposited by a conventional thin film deposition method such as e-beam deposition, i-beam deposition, molecular beam epitaxy or other deposition processes. The BeO may advantageously be deposited using a Be target with a 4.0% BeO content, a Be target in an oxygen atmosphere, or a Be and a BeO target sputtered together.

Abstract: A novel gas laser apparatus is disclosed, which comprises a hermetic container with a gas laser medium sealed therein, a plurality of main discharge electrodes arranged in the hermetic container for causing the main discharge in the gas laser medium thereby to generate a laser beam, and a device for subjecting the discharge space between the main discharge electrodes to preionization over a wide range thereof before the main discharge by use of a reflected laser beam or an ultraviolet ray lamp.

Abstract: In the disclosed laser system, electrodes establish discharge channels between and parallel to the surfaces of an open two-dimensional waveguide. An optical resonator forms an axis transverse to the channels between the surfaces. An electromagnetic arrangement forms an alternating magnetic field transverse to the discharges and the axis to produce a back-and-forth magnetic force on the discharge current flow and create a time-average homogeneity of the discharge in the waveguide cavity. A circulating arrangement cools and circulates laser gas through the cavity parallel to the discharge channels.

Abstract: A CO.sub.2 slab waveguide laser (10) is disclosed including a pair of spaced apart electrodes (36,38) having opposed light reflecting surfaces. The electrodes are dimensioned in a manner to guide light in a plane perpendicular to the reflecting surfaces. Light parallel to the reflecting surfaces is not constrained other than by the resonator mirrors (30,32). The resonator structure includes a negative branch unstable resonator in the nonwaveguide dimension. A stable resonator is used in the waveguide dimension but the mirror spacing from the end of the guide is based in part on the configuration of the unstable resonator. A unique support structure is disclosed for maintaining the electrodes in a spaced apart orientation without confining the discharge. Further refinements are disclosed for cooling the laser and for accommodating thermal expansion of the parts.

Abstract: A discharge tube for a high-speed axial-flow type discharge pumping gas laser device is provided, in which a capacitive load medium (9) under metal electrodes (2a, 2b) has convexly curved faces opposed to each other and constitutes a discharge tube. With this construction, the distribution of a laser oscillation gain within the discharge tube (1) is made uniform, and a single-mode laser beam is obtained.

Abstract: A hollow cathode type metal ion laser utilizing negative glow discharge for generating a laser beam. A hollow cathode is inserted into a glass tube, and there are provided springs between opposite ends of the hollow cathode and adjacent ends of the glass tube respectively.

Abstract: At least one pair of electrodes (5a, 5b) are provided on the surface of a dielectric discharge tube (1), and radiating fins (2a, 2b) are attached to a part of the electrodes (5a, 5b). A ceramic clamp (3) and a stainless-steel backup plate (4) are engaged with recessed portions of the radiating fins (2a, 2b), to thereby fix the radiating fins (2a, 2b) in position. Accordingly, a rise in the temperature of the electrodes is reduced by radiating heat through the radiating fins, whereby a separation or deterioration of the electrodes (5a, 5b) is prevented.

Abstract: A compact RF excited annular laser system has a stable resonator with a high quality output beam. The stable resonator has internal axiconical and annular mirrors to conform with the annular lasing medium, and to convert the annular beam into a compact cylindrical beam. Mode control is achieved by a combination of diffractive effects in both the annular beam and the compact beam.

Abstract: An asymmetric RF excited gas laser includes an elongated chamber, a first reflector and a second reflector, a first supporting mechanism, a ribbon of a metal conductor and a impedance-matching circuit. The elongated chamber is of cross-sectional dimensions suitable for confining a laser gas discharge and is formed from a dielectric material. A laser gas is disposed in the elongated chamber. The first and second reflector reflect and guide light energy from the laser gas discharge within the elongated chamber so that the light energy is optically independent of the internal walls of the elongated chamber as the light energy travels longitudinally the length of the elongated chamber. The first supporting mechanism supports the elongated chamber and forms negative electrode. The first supporting mechanism has cooling tubes and is electrically coupled to ground. The ribbon of the metal conductor forms a positive electrode which is disposed along the elongated chamber.

Abstract: Multiple discharge gas laser apparatus. A compact apparatus for simultaneously or individually generating a plurality of laser output beams in a selected pattern suitable for marking objects, for communications, or for remote chemical sensing or other remote sensing applications, among other uses, where all of the electrodes providing lasing gas excitation are located in a single gas volume and share a single output coupler is described. In this manner, all of the output beams are parallel in far field, to the extent variations in mode structure permit, without the necessity of undertaking detailed optical adjustments. Moreover, the focal plane of the output laser radiation is insensitive to significant positional variation of focusing optics utilized to increase the intensity thereof for marking purposes. Electrodes can be utilized for more than one discharge; that is, the direction of the discharge can be selected to involve any adjacent electrode having opposite charge polarity.

Abstract: In a CO or CO.sub.2 waveguide laser of the sealed-off type having transversal excitation, an enhancement of the useful life is achieved in that the electrodes 1 and 2 of metal that serve as waveguiding surfaces are coated with a layer insensitive to oxidation by the adjoining plasma and which has a roughness that is adequately low for the waveguiding. The invention can be particularly advantageously utilized for CO.sub.2 ribbon conductor or stripline lasers.

Abstract: A laser apparatus comprises a hollow waveguide containing a lasing gas composition; structure for directing radiation into the waveguide and for directing radiation out of the waveguide; and electrical exciting structure operatively associated with at least part of the waveguide. The waveguide defines a convoluted, continuously curved path having a helicoidal shape. The waveguide has a concave, non-closed transverse section with an open inner portion and is disposed within a gas-tight container containing the lasing gas composition. The waveguide is a laterally open groove formed internally in a cylindrical block disposed within the container.

Abstract: Disclosed is a laser apparatus for effecting laser oscillation by exciting a laser medium by discharge between an anode and a cathode opposedly arranged to each other in a discharge tube, comprising means disposed in the discharge tube to support both the electrodes movably along the axial direction of the discharge tube so as to prevent warp of the electrodes on laser oscillation and keep the parallelism therebetween with high accuracy. Also disclosed is a laser apparatus comprising main discharge means for effecting laser oscillation by exciting a laser medium by generating discharge, and preionization means for generating ionization previously to the discharge by the main discharge means so as to stabilize laser oscillation under a high gas pressure and a high current density.

Abstract: A discharge device, especially for a gas laser, has a discharge chamber through which a gas flows at high velocity and the gas discharge burns as a steady-field discharge between an anode and a cathode lying opposite the anode as the main electrodes extending transversely of the gas flow. To obtain a high ionization rate with a low alternating-current power consumption, while at the same time pre-ionizing the entire volume of incoming gas present between the cathode and anode, at least two pre-ionizing electrodes are present, one of which is in front of the cathode and the other in front of the anode in the direction of flow, and the pre-ionizing electrodes are out of phase with one another.

Abstract: Discharge tubes formed of metal fluoride gases are used in apparatus for emitting high frequency laser and fluorescent light. The discharge tubes are resistant to corrosion from halogen-containing gas mixtures subjected to high frequency excitation in the apparatus.

Abstract: Disclosed is a getter assembly for a gas discharge device in which the getter assembly consists of a snap-ring wherein the snap-ring includes a depression or trough for holding the getter material. The getter assembly is intended to be placed in an opening in a gas discharge device providing the function of a getter.

Abstract: A laser cathode is formed by placing a conductive hemisphere on the side of the lasing cavity. Material is sputtered from the hemisphere to form a conductive layer on the cavity side and on the seal which bonds the hemisphere to the side. A protective oxide layer is formed on the sputtered layer and the hemisphere by filling the cathode with oxygen and passing a current through it.

Abstract: A laser employing a dispenser cathode is provided with a tubular enclosure surrounding that cathode. The tubular enclosure serves as a support for the bore and the optical chamber on either side of the dispenser cathode and is insulated from ambient temperature conditions by a ballast reservoir housed in a jacket encircling the tubular enclosure. The jacket has peripheral sidewalls spaced apart from the tubular enclosure. Lateral end walls connect the opposite extremities of the peripheral sidewalls in a sealing engagement to the exterior of the tubular enclosure. Communication between the interior of the jacket and the interior of the tubular support is afforded through an aperture formed in the tubular support at a location remote from the dispenser cathode. Leads for the dispenser cathode are disposed in a sealing engagement through the end walls of the jacket and enter the interior of the tubular support through the aperture formed therethrough.

Abstract: An excitation circuit for TE lasers serves to generate a homogeneous high pressure glow discharge between laser electrodes within a gas space of a laser chamber. A fast acting high voltage switch of a pulse forming network is a multi-channel pseudo-spark switch and is preferably integrated with the laser. The switch is formed of a parallel circuit including a number of individual pseudo-spark switches with gaps. The total multi-channel pseudo-spark switch is filled with an ionizable low pressure gas filling at a given pressure. Voltage is applied to the anode and the cathode in such a way that the resulting gas discharge is located on the left-hand branch of the Paschen curve. The switch of the excitation circuit can also be used as a separate structural element for triggering an electrical high voltage switch circuit, and also for so-called flat plane laser systems.

Abstract: A compact excimer laser, including a housing structure having a plurality of walls forming an internal laser cavity. A gas is located within the laser cavity and with the gas capable of lasing action. A pair of spaced electrodes are located within the laser cavity and form an electrical discharge area between the electrodes for stimulating gas within the discharge area to lasing action in accordance with an electrical discharge between the electrodes. One of the pair of electrodes is located along a central position within the cavity and is grounded to the housing structure. The other of the pair of electrodes is located adjacent to but spaced from one of the walls of the housing structure and with the other electrode mounted on a main insulator member.

Abstract: A gas laser is provided having a cathode which is essentially tubularly designed and surrounds an end of a laser capillary which faces toward it. The cathode has a tube termination which serves the purpose of protecting tube parts situated there behind from the plasma of the laser. It surrounds a beam passage opening which insures that the laser beam can pass through in unattenuated fashion. This beam passage opening can be made smaller and the shielding can thus be improved since an extension of the mount for the optical elements of the laser projects into the interior of the laser, and the cathode is fixed to the extension at least in a radial direction. The invention is particularly suited for helium-neon lasers.

Abstract: A laser is provided comprising a laser envelope and a gain medium disposed in the laser envelope. The gain medium comprises a compound subject to dissociation into a plurality of components. Circuitry is included for generating an electrical discharge in the laser envelope, a portion of the electrical discharge passing through the gain medium and disassociating a portion of the compound thereof into the plurality of components. The discharge generating circuitry comprises a cathode, the cathode comprising a first portion for emitting the electrical discharge toward an anode. Such first portion comprises a catalyst for aiding the recombination of the dissociated plurality of components. The first portion of the cathode sputters particulates therefrom during the electrical discharge and a surface is disposed within the laser envelope for collecting the sputtered particulates.

Abstract: A laser beam generated between a total reflector and an output coupler is turned back by plural reflectors which are mounted in a discharge region along two main electrodes at 45.degree., and the discharge region is divided into plural divided discharge regions, thus, a diameter of an output laser beam is reduced to a diameter of the divided discharge regions.

Abstract: A radio frequency (RF) driven laser system having a starter electrode and discharge control circuitry which facilitates the starting of the laser by ionizing a portion of the gain medium. The starter electrode is aligned with the main electrode but is much smaller and is energized only during the start-up period. RF power is coupled to the main and starter electrodes via RF amplifiers feeding power through a 90.degree. hybrid combiner to impedance matching networks which are individually adjusted for each electrode. The matching network coupled to the starter electrode provides a very high, Tesla coil type, RF voltage to the electrode. Once the start cycle is complete, a time delay circuit shuts down the starter circuit and all power from the two RF amplifiers is steered to the main electrode.

Abstract: A discharge chamber is swept at high velocity by a gas discharge which burns as a steady-field discharge between an anode extending in the direction of flow and at least three single cathodes arrayed in tandem in the direction of flow. The discharge chamber is defined transversely of the direction of flow by sidewalls, the anode forming the one first sidewall and running parallel to the plane defined by the single cathodes. To achieve a long cathode life at maximum power input, and especially to achieve sufficient cooling of the downstream single cathodes, without the need for additional technical measures and components, the second sidewall defining the discharge chamber on the side facing the single cathodes continuously varies in distance from the opposite first sidewall and the anode in the area of the single cathodes.

Abstract: A compact excimer laser, including a housing structure having a plurality of walls forming an internal laser cavity. A gas is located within the laser cavity and with the gas capable of lasing action. A pair of spaced electrodes are located within the laser cavity and form an electrical discharge area between the electrodes for stimulating gas within the discharge area to lasing action in accordance with an electrical discharge between the electrodes. One of the pair of electrodes is located along a central position within the cavity and is grounded to the housing structure. The other of the pair of electrodes is located adjacent to but spaced from one of the walls of the housing structure an with the other electrode mounted on a main insulator member.

Abstract: A laser system includes three or more narrow-gap laser discharge channels mounted radially about a common axis. The laser discharge volumes may be excited by RF radiation, microwave radiation or by means of the MAGPIE system. The laser discharge channels may be mounted in an optical resonator having a common unstable cavity mode, a toric resonator, with or without feedback, or a retro-reflected toric unstable resonator. A pair of adjacent discharge channels may be coupled to form a ring microwave resonator, and the ring resonator may be formed by a continuous double ridged waveguide. Excitation for the continuous double ridged waveguide is optimally produced by a magnetron.

Abstract: A compact excimer laser, including a housing structure having a plurality of walls forming an internal laser cavity. A gas is located within the laser cavity and with the gas capable of lasing action. A pair of spaced electrodes are located within the laser cavity and form an electrical discharge area between the electrodes for stimulating gas within the discharge area to lasing action in accordance with an electrical discharge between the electrodes. One of the pair of electrodes is located along a central position within the cavity and is grounded to the housing structure. The other of the pair of electrodes is located adjacent to but spaced from one of the walls of the housing structure and with the other electrode mounted on a main insulator member.

Abstract: A compact excimer laser, including a housing structure having a plurality of walls forming an internal laser cavity. A gas is located within the laser cavity and with the gas capable of lasing action. A pair of spaced electrodes are located within the laser cavity and form an electrical discharge area between the electrodes for stimulating gas within the discharge area to lasing action in accordance with an electrical discharge between the electrodes. One of the pair of electrodes is located along a central position within the cavity and is grounded to the housing structure. The other of the pair of electrodes is located adjacent to but spaced from one of the walls of the housing structure and with the other electrode mounted on a main insulator member.