Vaporizing Furnace Patents (Class 373/11)
  • Patent number: 11377724
    Abstract: In accordance with various embodiments, an electron beam evaporator can comprise the following: a tubular target; an electron beam gun for producing at least one vapor source on a removal surface of the tubular target by means of an electron beam; wherein the removal surface is a ring-shaped axial end surface or a surface of the tubular target that extends conically or in a curved fashion from the free end edge.
    Type: Grant
    Filed: February 23, 2018
    Date of Patent: July 5, 2022
    Assignee: VON ARDENNE ASSET GMBH & CO. KG
    Inventors: Ekkehart Reinhold, Joerg Faber
  • Patent number: 9846846
    Abstract: A method, system and computer-readable medium for analyzing contact studies for a call service center is presented. The method includes the steps of: acquiring data instances of a Collector tool from all persons monitoring contacts at a call service center during a given study period; retrieving a study design from a Planner tool to verify that acquired data instances conform to the study design; selecting data parameters for the acquired data instances, wherein the data parameters describe multiple features of the acquired data; automatically selecting an appropriate chart format that is appropriate for measurement units used by the data parameters; and creating a chart using the appropriate chart format and the data parameters. The steps in the method may all be automatically performed by an Analyzer logic.
    Type: Grant
    Filed: November 14, 2006
    Date of Patent: December 19, 2017
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventor: John A. Ricketts
  • Patent number: 9099278
    Abstract: The present invention relates to a protective enclosure for an ion gun and to a device for depositing materials through vacuum evaporation comprising such an enclosure and methods of using each. According to the invention, the protective enclosure comprises a side wall intended to surround said ion gun, and an open upper end, said protective enclosure having a longitudinal axis, a truncated tube shape on its open upper end resulting from an inclined surface relative to said longitudinal axis, and having a lower part and an upper part.
    Type: Grant
    Filed: March 9, 2011
    Date of Patent: August 4, 2015
    Assignee: ESSILOR INTERNATIONAL (COMPAGNIE GENERALE D'OPTIQUE)
    Inventors: Dominique Conte, Jean-Louis Sirjean
  • Publication number: 20020191667
    Abstract: An apparatus for growing a silicon ingot including a graphite crucible in which a quartz crucible is placed, a driving axis connected to a lower part of the graphite crucible to revolve and move the graphite crucible up and down so as to support the graphite crucible, a heating element to heat the graphite crucible, and an insulating wall to protect and thermally isolate the graphite crucible, heating means, and driving axis in part from the external environment. The driving axis includes a hollow axis part having a hollow inside, an insulating axis part attached to the bottom of the hollow axis part to inhibit heat transfer, and a cylindrical axis part attached to the bottom of the insulating axis part. The construction of the driving axis reduces a temperature gradient in the molten silicon, improving uniform heat distribution for increased silicon ingot quality.
    Type: Application
    Filed: December 31, 2001
    Publication date: December 19, 2002
    Inventors: Hong-woo Lee, Joon-young Choi, Hyon-Jong Cho
  • Patent number: 5977526
    Abstract: A heated view port for in-situ optical observation of a deposition chamber in a vessel under high vacuum application comprising a plurality of superimposed layers arranged in the shape of an annular band mounted around the view port substantially at the outer periphery thereof. The band includes a first layer of pyrolytic boron nitride, a second layer of pyrolytic graphite covering at least one surface of the pyrolytic boron nitride layer, an outer layer of pyrolytic boron nitride and two electrical contact terminals in contact with the pyrolytic graphite layer in an arrangement forming parallel resistive paths between the contact terminals. The terminal contacts are connected to an external source of electrical power.
    Type: Grant
    Filed: March 5, 1999
    Date of Patent: November 2, 1999
    Assignee: Board of Regents The University of Texas
    Inventors: Terry J. Mattord, Michael H. Gilbert, Sr.
  • Patent number: 5905753
    Abstract: In a rotational rod-fed electron-beam evaporation source used with sublimating rod material, the ingot rod can be free-standing with respect to the crucible. This means that the side of the ingot rod near the tip of the rod does not contact a cooling crucible. In this way, the system can be operated in a defocused position of the electron beam, and the sweep of the electron beam can go over the edge of the ingot rod tip. Using these features, a substantially radial sweep of the tip of an ingot rod that sweeps over the edge can produce a substantially flat evaporation pattern on the ingot rod, producing a good utilization of the expensive ingot rod material.
    Type: Grant
    Filed: June 23, 1997
    Date of Patent: May 18, 1999
    Assignee: The BOC Group, Inc.
    Inventors: Russell J. Hill, P. A. Joel Smith, Ping Chang
  • Patent number: 5878074
    Abstract: A crucible is disclosed for use in coating a substrate with deposition materials by electron-beam evaporation. The crucible is configured to be inserted into an evaporator pot; it has a bottom and at least one sidewall extending upwardly from the bottom and terminating in a rim, such that the bottom and sidewall define a reservoir for containing the deposition material, and the rim defines a mouth out of which the deposition material may evaporate. A lip extends upwardly from a predetermined section of the rim which shields the spattering of deposition of material onto the evaporator pot during the evaporation process. A improved method is also disclosed for performing electron-beam evaporation with the present invention crucible.
    Type: Grant
    Filed: July 31, 1997
    Date of Patent: March 2, 1999
    Assignee: Lucent Technologies Inc.
    Inventors: Barry S. Buchanan, Frances Deemer, Lloyd G. Walton
  • Patent number: 5861599
    Abstract: A rod-fed electron beam evaporation system having a rod-fed electron beam evaporation source for evaporating an ingot. The ingot is of rod-like configuration and has a peg-like element to self-engage a socket of a replacement ingot so that both ingot and replacement ingot are brought into alignment.
    Type: Grant
    Filed: June 9, 1997
    Date of Patent: January 19, 1999
    Assignee: The BOC Group, Inc.
    Inventors: P. A. Joel Smith, Ping Chang
  • Patent number: 5473627
    Abstract: A rotating all metal sealed fluid delivery system for supplying fluid to an apparatus, such as an electron beam source assembly, in an UHV environment includes a housing with fluid inlet and outlet ports therethrough, opposed fluid inlet and outlet lines, an inlet and outlet bellows within the housing, and a turntable mounted in an aperture in the housing for attachment to a rotatable spindle of the apparatus. A ultra high vacuum compression gasket forms an UHV seal between the spindle and the turntable. The bellows are attached at first ends to the inlet and outlet ports, and at opposite ends to the opposed inlet and outlet lines extending to the rotatable apparatus, through the spindle and the turntable into the housing. The bellows are coiled within the housing and separated by a non-abrasive plate. Following attachment to the ports and lines, the entire length of each bellows remains within a single plane during rotation along the same axis as the axis of rotation of the apparatus.
    Type: Grant
    Filed: September 2, 1993
    Date of Patent: December 5, 1995
    Assignee: MDC Vacuum Products Corporation
    Inventors: Nick Tsujimoto, Michael Weiss
  • Patent number: 5418348
    Abstract: An electron beam source assembly includes a water cooled crucible positioned substantially flush with the top of the block. A magnet is attached to each long sides of the rectangular block to establish parallel opposed pole magnets with the crucible therebetween. A smaller magnet is attached to each end of each longitudinal magnet to form a second and a third parallel magnet pair. The six magnets produce plano-convex magnetic field lines above the crucible, and additional plano-convex field lines of increased field strength extending outwardly from the end of the block having the four magnets. A magnetic base plate provides a low reluctance path to decrease magnetic flux at the crucible.
    Type: Grant
    Filed: October 29, 1992
    Date of Patent: May 23, 1995
    Assignee: MDC Vacuum Products, Inc.
    Inventors: Nick Tsujimoto, Jim Moore
  • Patent number: 5272718
    Abstract: A method and apparatus for forming a stream of molten material. The apparatus includes a melt container having a bottom wall in which is formed an aperture. A funnel is adapted and constructed to receive molten material from the aperture in the container, and includes a plurality of fluid-cooled metallic segments. The funnel segments define an inner funnel contour that decreases in cross-sectional area from the inlet end to the outlet end of the funnel. An electrically conductive coil surrounds the funnel, and has a shape corresponding to the outer shape of said funnel. A source of medium-frequency current in selective electrical connection with the coil. The method begins with the step of providing a predetermined quantity of molten material in a melt container. A metallic funnel is provided in fluid communication with the melt container, and includes a plurality of fluid-cooled funnel segments. The method also includes the step of providing an electrically conductive coil surrounding the funnel.
    Type: Grant
    Filed: April 10, 1992
    Date of Patent: December 21, 1993
    Assignee: Leybold Aktiengesellschaft
    Inventors: Otto W. Stenzel, Georg Sick, Michael Hohmann
  • Patent number: 5263044
    Abstract: Method for recognition of noble metals otherwise not recognizable in base material clusters includes using an electron beam furnace in which base material clusters are vaporized by means of an electron beam gun, and the vaporized materials are condensed as free atoms or are alloyed with other components of the base materials, and are able to be recovered by conventional recovery techniques once they are recognized. The base material includes the products of smelting processes, pellets of compacted raw material, like anode-mud or waste material, and the base materials are remelted utilizing the heat from electron beam guns for the remelting.
    Type: Grant
    Filed: July 31, 1992
    Date of Patent: November 16, 1993
    Inventor: Siegfried M. K. Bremer
  • Patent number: 5224971
    Abstract: In a typical method of separating isotopes, a linear material is fed between electrodes arranged in a vacuum vessel. Joule heat is generated by supplying a current to the linear material. A vapor flow is produced by heating and evaporating the linear material. Only a specific isotope in the vapor flow is selectively ionized by radiating a laser beam on the vapor flow. The ionized isotope is separated by using at least one of electric and magnetic fields. A typical isotope separating apparatus includes a vacuum vessel, a material feeder, a power source system, a laser optical system, and an ion separating unit. The material feeder feeds a linear material containing a plurality of types of isotopes between electrodes in the vacuum vessel. The power source system supplies a current to the linear material to heat and evaporate it.
    Type: Grant
    Filed: June 21, 1991
    Date of Patent: July 6, 1993
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Hidetoshi Mukaida, Hitomi Yamamoto, Motohisa Abe, Isao Imamura, Kazunori Shioda
  • Patent number: 5222074
    Abstract: A thermal decomposition cell for producing a molecular beam from a material gas, includes: a crucible maintained at a given temperature necessary for thermal decomposition of the material gas which is effused in the crucible in a given direction; and a thermal decomposition baffle provided in the crucible and heated to a given temperature necessary for thermal decomposition of the material gas for producing the molecular beam by thermal-decomposing of the material gas such that the material gas is baffled in substantially all directions, the thermal decomposition baffle being made of a given metal to cause the thermal decomposition of the material gas. The thermal decomposition baffle may comprise a fiber or a cloth made of the metal loaded in the crucible.
    Type: Grant
    Filed: June 3, 1991
    Date of Patent: June 22, 1993
    Assignee: Matsushita Electric Industrial Co., Ltd.
    Inventors: Kiyoshi Uchiyama, Tomoko Suzuki, Tatsuo Yokotsuka, Akira Takamori, Masato Nakajima
  • Patent number: 5216690
    Abstract: A grounded metallic shield which comprises an electrode enclosing the filament leads and emitters of an e-Gun in a high vacuum chamber of the type used in melting and casting metals and other materials and evaporation sources. The shield is spaced from the filament leads and emitters a distance in the order of the electron mean free path for the pressure uses within the high vacuum chamber. The structure and method of use thereof suppresses or eliminates arc-downs or glow discharges.
    Type: Grant
    Filed: March 11, 1992
    Date of Patent: June 1, 1993
    Inventor: Charles W. Hanks
  • Patent number: 5142549
    Abstract: Apparatus for recognition of metals in base materials includes an electron beam furnace in which base materials are vaporized by means of an electron beam gun and the vaporized materials are condensed as free atoms or are alloyed with other components of the base materials, and are able to be recovered by conventional recovery techniques once they are recognized. The base material includes the products of smelting processes, pellets of compacted raw material like anode-mud or waste material, and the base materials are remelted utilizing the heat from electron beam guns for the remelting.
    Type: Grant
    Filed: September 5, 1989
    Date of Patent: August 25, 1992
    Inventor: Siegfried M. K. Bremer
  • Patent number: 5111022
    Abstract: A circulating coolant reservoir is used to uniformly cool a removable crucible in an electron beam gun assembly for vaporizing material to be deposited at another location. The outer surface of the crucible is substantially immersed in the coolant reservoir and coolant is circulated around the outer surface from diametrically opposed inlet and outlet lines whose axes are tangent to the reservoir walls and with an upwardly spiraling groove in the crucible outer surface.
    Type: Grant
    Filed: August 23, 1989
    Date of Patent: May 5, 1992
    Assignee: TFI Telemark
    Inventors: James L. Harper, Charles H. Hill
  • Patent number: 5008897
    Abstract: The present invention provides a water cooled crucible adapted to be received in a crucible support element of an electron beam evaporation system. The crucible comprises a base wall and a sidewall upstanding from the base wall to form a rim and pocket located between the rim and the base wall for containing molten material to be evaporated. The support element has an inner surface surrounding the sidewall of the crucible to define an annular passage for circulating cooling water in a direction taken from the rim to the base wall of the crucible. The sidewall includes a thickened region positioned to conduct heat generated at the top surface of the molten material and having a thickness such that the outer surface contacts the inner surface of the support element. The thickened region has a plurality of circumferentially spaced, preferably spiral grooves defined at the outer surface of the thickened region.
    Type: Grant
    Filed: March 23, 1990
    Date of Patent: April 16, 1991
    Assignee: The BOC Group, Inc.
    Inventor: Gary B. Crumley
  • Patent number: 4983806
    Abstract: A device and method for cooling the edge of a top plate which partially surrounds an evaporant pocket in an electron beam gun. The invention involves the passage of coolant through a channel in the top plate. The channel is substantially parallel to and close enough to the edge of the top plate so that re-evaporation of evaporant condensed on the edge of the top plate is substantially prevented.
    Type: Grant
    Filed: March 1, 1990
    Date of Patent: January 8, 1991
    Inventors: James L. Harper, Charles H. Hill
  • Patent number: 4866239
    Abstract: A vapor source for the vacuum vaporization of a material which forms a positive meniscus with the wall of a crucible. The source comprises an electron-beam gun and a crucible for containing material to be vaporized. The crucible has a wall which makes an angle greater than about 35 degrees with the vertical; greater than 45.degree. is preferred. A molten pool of material to be vaporized has a positive meniscus which contacts the wall at an angle greater than 90.degree.. The positive meniscus enables a region of the wall just above the meniscus to be kept clear of condensed material. The source includes a means for adding molten material to the molten pool to maintain the meniscus in a desired range. If the pool level is sufficiently well controlled the meniscus can be maintained in the region free of condensed material and thus avoid the onset of a "thermal short".
    Type: Grant
    Filed: May 31, 1988
    Date of Patent: September 12, 1989
    Assignee: The BOC Group, Inc.
    Inventor: John C. Egermeier
  • Patent number: 4764739
    Abstract: A light induced unidirectional light switch is described wherein a unidirectionally emitting medium is obtained using the method of Doppler compensation by light-induced velocity-dependent light shifts. The emission in the emitting medium can be switched on by a pulse of laser light which acts as a light induced light switch.
    Type: Grant
    Filed: September 8, 1987
    Date of Patent: August 16, 1988
    Assignee: The United States of America as represented by the Secretary of the Navy
    Inventor: Michael M. Salour
  • Patent number: 4728772
    Abstract: An electron-beam heated vapor source for operation in vacuum is disclosed. The source comprises a magnet and a pair of parallel pole plates for deflecting the beam from an electron-beam gun through an angle of approximately 270.degree. into a crucible containing material to be vaporized by evaporation, sublimation or other process. A pole rod extends from each of the pole plates into the space between them. A means is provided for precisely adjusting the distance separating the pole rods while the vapor source is in vacuum. This adjustment enables the impact area of the beam, and thus, the deposition rate or other impact area related parameter to be optimized while the vapor source is in operation. Preferably, each pole rod extends through a clearance hole in the pole plate and the adjustment means comprises a rack integral with the rod and a pinion which can be driven by a control means located outside the vacuum chamber.
    Type: Grant
    Filed: July 16, 1986
    Date of Patent: March 1, 1988
    Assignee: The BOC Group, Inc.
    Inventor: P. A. Joel Smith
  • Patent number: 4530100
    Abstract: A vaporizer crucible for vacuum vapor-deposition apparatus, comprises a metallic body 1 having a recess 2 for accommodating vaporizing material and connected in a thermally-conductive manner to a cooling duct 7 which surrounds the recess 2 at least partially. For effectively preventing reduction in heat transfer in the event of the formation of vapor bubbles in the cooling medium at least one guide device 22 for imparting a swirling motion to the cooling medium flowing in the cooling duct 7 is provided in said duct. The guide device 22 preferably takes the form of a spiral element matching the path of the cooling duct.
    Type: Grant
    Filed: July 7, 1983
    Date of Patent: July 16, 1985
    Assignee: Leybold-Heraeus GmbH
    Inventors: Albert Feuerstein, Klaus-Jurgen Heimbach, Helmut Warscheit
  • Patent number: 4528939
    Abstract: The present invention is directed to a containment vessel which is particularly useful in melting aluminum. The vessel of the present invention is a multilayered vessel characterized by being electrically conductive, essentially nonwettable by and nonreactive with molten aluminum. The vessel is formed by coating a tantalum substrate of a suitable configuration with a mixture of yttria and particulate metal borides. The yttria in the coating inhibits the wetting of the coating while the boride particulate material provides the electrical conductivity through the vessel. The vessel of the present invention is particularly suitable for use in melting aluminum by ion bombardment.
    Type: Grant
    Filed: June 25, 1984
    Date of Patent: July 16, 1985
    Assignee: The United States of America as represented by the United States Department of Energy
    Inventors: Cressie E. Holcombe, Donald G. Scott
  • Patent number: RE35024
    Abstract: A grounded metallic shield which comprises an electrode enclosing the filament leads and emitters of an e-Gun in a high vacuum chamber of the type used in melting and casting metals and other materials and evaporation sources. The shield is spaced from the filament leads and emitters a distance in the order of the electron mean free path for the pressure uses within the high vacuum chamber. The structure and method of use thereof suppresses or eliminates arc-downs or glow discharges.
    Type: Grant
    Filed: March 24, 1994
    Date of Patent: August 22, 1995
    Inventor: Charles W. Hanks