With Internal Atmosphere Control (e.g., Pressure, Vacuum, Etc.) Patents (Class 373/110)
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Patent number: 11578405Abstract: A carbon nanotube (CNT) growth apparatus includes: a body; an inlet cap; an outlet cap; insulation extending through a portion of an interior of the body, the insulation including a first stage and a second stage, a flow tube extending through the inlet cap and passing coaxially through the first stage of the insulation, the flow tube configured to receive and flow a fluid to the interior of the body; a gas heater including a plurality of heat pipes configured to be inserted in the first stage of the insulation, the plurality of heat pipes being disposed adjacent to the flow tube; a substrate heater incorporated in the second stage of the insulation; and a temperature controller configured to adjust a temperature of the gas heater and substrate heater, wherein a removed portion of the second stage is configured to provide an unobstructed view of the substrate.Type: GrantFiled: April 23, 2019Date of Patent: February 14, 2023Assignee: King Fahd University of Petroleum and MineralsInventors: Khaled Mezghani, Kahraman Demir, Adnen Mezghani, Ouail Balah
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Patent number: 11053585Abstract: A reactor system and related methods are provided which may include a heating element in a wafer tray. The heating element may be used to heat the wafer tray and a substrate or wafer seated on the wafer tray within a reaction chamber assembly, and may be used to cause sublimation of a native oxide of the wafer.Type: GrantFiled: November 26, 2019Date of Patent: July 6, 2021Inventors: John Tolle, Eric Hill
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Patent number: 9891000Abstract: A vacuum heat treating furnace for the heat treatment of metal parts includes a pressure vessel and a hot zone enclosure that defines a hot zone therein. A heating element array inside the hot zone enclosure includes a first heating element, a second heating element, and a center heating element. The first and second heating elements are suspended on opposing sides of the hot zone enclosure. The center heating element is suspended vertically from the hot zone enclosure between the first and second heating elements. The center heating element is adapted to be connected to the first and second heating elements to form a continuous circuit therewith. The center heating element may be connected to the first and second heating elements with removable/reusable fasteners to provide for reconfiguration of the hot zone to accommodate different size workloads.Type: GrantFiled: August 11, 2014Date of Patent: February 13, 2018Assignee: Ipsen, Inc.Inventor: Craig A. Moller
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Patent number: 9538584Abstract: A tapping device and method using induction heat for melt comprises melting furnace made of steel; heating unit disposed in the upper part in the melting furnace and made of graphite material; induction coil wound around the heating unit; insulator disposed adjacent to the bottom surface of the lower part of the melting furnace; supporter disposed outside the insulator; and firebricks disposed on the bottom surface of melting furnace and outside the supporter.Type: GrantFiled: December 30, 2013Date of Patent: January 3, 2017Assignee: KOREA HYDRO & NUCLEAR POWER CO., LTD.Inventors: Hyun Je Cho, Cheon Woo Kim, Young Il Kim, Sang Woo Lee, Seung Chul Park, Jong Gil Park, Tae Won Hwang
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Patent number: 8134100Abstract: A heat processing furnace comprises: a processing vessel for receiving an object to be processed by a heat process; a cylindrical heat insulation member surrounding the processing vessel; a helical heating resistor arranged along an inner peripheral surface of the heat insulation member; a support member for supporting the heating resistor. The support member includes a base part positioned on an inside of the heating resistor, and a plurality of support pieces extending radially outward from the base part through spaces between adjacent portions of the heating resistor so as to support the heating resistor, the support member being formed to have a comb-like shape. An upper surface part of each of the support pieces is formed to have a curved shape in order to reduce a frictional resistance generated when the heating resistor is moved upon a thermal expansion and a thermal shrinkage thereof.Type: GrantFiled: May 29, 2008Date of Patent: March 13, 2012Assignee: Tokyo Electron LimitedInventors: Makoto Kobayashi, Ken Nakao
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Patent number: 8066814Abstract: A crystal-growing furnace having a slurry drainage duct structure includes a furnace body, a supporting table, a loading frame, a plurality of eaves elements, and a set of eaves gutters. The supporting table includes a table plate and a plurality of supporting posts. The loading frame includes a lower plate and four side plates, where four elongated eaves boards descend from sides of the lower plate. Four eaves gutters, having V-shaped grooves, are connected with one another and disposed beneath the four eaves elements correspondingly. Any high-temperature silicon slurry leaks from a furnace crucible will be guided by the elongated eaves boards into the V-shaped grooves of the eaves gutters to prevent the silicon slurry from flowing along the periphery of the table plate and down to the supporting posts.Type: GrantFiled: May 28, 2008Date of Patent: November 29, 2011Assignee: Green Energy Technology Inc.Inventors: Shiow-Jeng Lew, Hur-Lon Lin
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Patent number: 7888622Abstract: A heat-processing furnace comprises: a processing vessel for housing an object to be processed to thermally heat the object to be processed; a cylindrical heat insulating member surrounding the processing vessel; a helical heating resistor disposed along an inner circumferential surface of the heat insulating member; and support members axially disposed on the inner circumferential surface of the heat insulating member, for supporting the heating resistor at predetermined pitches. A plurality of terminal plates are disposed outside the heating resistor at suitable intervals therebetween and attached to the heating resistor, the terminal plates radially passing through the heat insulating member to be extended outside. A plurality of fixing plates are disposed outside the heating resistor at suitable intervals therebetween and attached to the heating resistor, the fixing plates being fixed in the heat insulating member.Type: GrantFiled: September 20, 2007Date of Patent: February 15, 2011Assignee: Tokyo Electron LimitedInventors: Ken Nakao, Kenichi Yamaga, Makoto Kobayashi
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Patent number: 7792177Abstract: A method and a furnace for electrical calcination enables utilization of volatile matters of petroleum coke or anthracite during electrical calcination, i.e. conventional calcination or semi-graphitization. The furnace includes an anode, a cathode, and a furnace body. The furnace body includes an annular inner wall, an annular fume duct disposed circumferentially outside of the annular inner wall, an annular outer wall for heat preservation disposed circumferentially outside of the annular fume duct, and an air passage disposed in the annular outer wall. The air passage is in communication with the fume duct and outer atmosphere, respectively. An outlet opening for the volatile matters, in communication with a hearth of the furnace body, is disposed in the fume duct. The combustible volatile matters of the petroleum coke, anthracite, or other raw material are sufficiently utilized during electrical calcination, therefore the energy is saved and the environmental pollution is reduced.Type: GrantFiled: August 30, 2006Date of Patent: September 7, 2010Assignee: China Aluminum International Engineering Corporation LimitedInventors: Kaixiang Yang, Yi Sun, Dongsheng Cui
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Patent number: 7700898Abstract: Heat treatment equipment and a method of driving the same are provided. The heat treatment equipment includes: a process tube having an aperture at one side thereof; a sealing unit for opening or closing the aperture; and a pressure sensor for measuring sealing pressure between the sealing unit and the one side of the process tube. In the heat treatment equipment, the aperture of the process tube can be sealed according to the sealing pressure of the sealing unit so that the process tube can be precisely sealed.Type: GrantFiled: September 28, 2006Date of Patent: April 20, 2010Assignee: Samsung Electronics Co., Ltd.Inventors: Dae-Man Seo, Jang-Hyeok Lee, Dae-Woo Kim
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Patent number: 7604698Abstract: A cooling structure for the body of a crystal-growing furnace includes an upper body and a lower body. The upper body includes an outer upper shell and an inner upper shell, wherein an upper enclosing space is formed between the outer upper shell and the inner upper shell. The lower body includes an outer lower shell and an inner lower shell, wherein a lower enclosing space is formed between the outer lower shell and the inner lower shell. A plurality of water pipes are arranged, respectively, around the upper and the lower enclosing spaces, wherein plural spraying holes are provided on each of the water pipes. With the help of a pump, water from an outside water source is drawn through the spraying holes of the water pipes so as to cool down the body of the crystal-growing furnace. In adding an exhaust fan, warm air in the upper enclosing spaces can be driven out speedily.Type: GrantFiled: May 28, 2008Date of Patent: October 20, 2009Assignee: Green Energy Technology Inc.Inventors: Shiow-Jeng Lew, Hur-Lon Lin
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Patent number: 7003985Abstract: In accordance with the invention, the polymeric coating is removed from a coated optical fiber by disposing the fiber within a non-oxidizing environment and applying sufficient heat to volatilize at least a portion of the polymeric coating. The result is that the coating material bursts from the fiber, yielding a clean glass surface virtually free of surface flaws. In a preferred embodiment the non-oxidizing environment is inert gas and the heat is provided by resistive filament heaters.Type: GrantFiled: October 1, 2001Date of Patent: February 28, 2006Inventors: Robert F. Swain, Andrew D. Yablon
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Patent number: 6895032Abstract: A high-pressure processing apparatus for supplying a pressure medium into a high-pressure processing chamber 4, which is formed in a pressure vessel 1 to treat a workpiece at a high pressure, is provided. The pressure vessel 1 includes a first vessel section 2 and a second vessel section 3, which can be separated from each other in the axial direction, wherein the high-pressure processing chamber 4 is formed between the first and second vessel sections 2 and 3. Furthermore, a face seal section 5 for tightly sealing the high-pressure processing chamber 4 is formed in the abutment of the first and second vessel sections 2 and 3. A press apparatus 7 for providing an axial force to the face seal section 5 is disposed and the press apparatus 7 has a space 15 for storing a supplementary apparatus, such as a stirrer or the like at a position corresponding to the axial center of the pressure vessel 1.Type: GrantFiled: July 24, 2003Date of Patent: May 17, 2005Assignee: Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd.)Inventors: Katsumi Watanabe, Takahiko Ishii, Shogo Sarumaru, Hideshi Yamane
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Patent number: 6834072Abstract: A method rebakes and graphitizes pitch-impregnated carbon bodies in an encapsulated Castner-type lengthwise graphitization furnace in one step. A furnace shell is constructed of element modules and can carry out the method. A furnace utilizes the furnace shell. The oxygen content in the interior of the furnace is kept below 4% by volume. The method is carried out under atmospheric pressure or at pressures that differ only slightly from the atmospheric pressure.Type: GrantFiled: April 16, 2003Date of Patent: December 21, 2004Assignee: SGL Carbon GmbH & Co.Inventors: Johann Daimer, Stefan Gschwandtner, Franz Kalchschmid, Franz Kals, Walter Lhotzky, Franz Liebhart, Gerhard Putz, Hubert Putz
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Patent number: 6349108Abstract: An electric resistance high temperature vacuum furnace having radiant heating units evenly spaced around the sides and ends of the furnace hot zone. Pairs of units are automatically regulated both radially and longitudinally according to the temperature required by the workload in the hot zone. The units each comprise parallel aligned elements electrically connected in series at their one ends. Each element has lengthwise surfaces angularly disposed from each other to form a beam structure of high section modulus for stiffness and resistance to sagging. Also, the angles of the element surfaces facing a heat-reflective assembly substantially enable all of the energy radiated toward the assembly to be reflected into the hot zone in addition to the direct radiation from the surfaces facing the hot zone. The furnace includes a re-circulating cooling system for rapid cooling of the furnace and workload.Type: GrantFiled: March 8, 2001Date of Patent: February 19, 2002Assignee: PV/T, Inc.Inventor: Lennie L. Ashburn
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Patent number: 6160836Abstract: An electro-smokeless extraction/recovery system for converting shredded scrap tires to carbon black and steel and fluid discharge of oil, gas and solvent chemicals. A reaction vessel is formed with a side wall and a bottom plate. The bottom plate is provided with a plurality of heat apertures and a plurality of drain apertures. The vessel also has an open top for receipt of waste and shredded scrap tires. The lid is adapted to be removably placed over the top. A plurality of electrical heating elements are positioned through the bottom of the reaction vessel to heat the waste and shredded scrap tires within the vessel. A plurality of hollow drain members each have a side wall and a top with an open bottom positioned in sealing relationship with drain apertures. Vertically extending openings on at least a portion of a side wall extend upwardly from the bottom plate to a location adjacent to the top to effect the flow of fluid discharge from the reaction vessel.Type: GrantFiled: October 12, 1999Date of Patent: December 12, 2000Inventor: Jack L. Hansen
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Patent number: 6111227Abstract: An electrically heated furnace wherein electrical heating elements are mounted and supported so that they face the inner furnace walls and are isolated from direct communication with articles being treated within the furnace such that clean air flows over the heating elements providing oxygen to create an aluminum oxide coating on the heating elements and maintains a clean atmosphere about the heating elements. Air circulation from exterior the furnace is through ports in the furnace walls and over the electrical heating elements; exhaust from the furnace is through ports in the furnace walls into a plenum and out through a flue creating pressure differentials with the pressure in the furnace area where articles are being subjected to heat is lower than the atmosphere and the area in which the heating elements are located.Type: GrantFiled: June 4, 1999Date of Patent: August 29, 2000Inventor: Steven B. Cress
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Patent number: 5993202Abstract: The present invention prevents a lowering of the baking quality of a baked product due to a variation in the temperature distribution in a baking furnace due to the inflow of air into the baking furnace. A baking furnace has an inlet disposed in a clean room and an outlet disposed in a normal pressure room lower in pressure than the clean room. The baking furnace is provided with a differential pressure gauge, a controller, an inverter, and an exhaust fan installed in a return duct, the arrangement being such that the difference in pressure between the clean room and the normal pressure room is detected by the differential pressure gauge and the operation of the exhaust fan is controlled by the controller according to the detected differential pressure, so that the air flowed in through the inlet is discharged through the return duct. Thus, the air is prevented from flowing into the baking furnace.Type: GrantFiled: October 5, 1998Date of Patent: November 30, 1999Assignee: Matsushita Electric Industrial Co., Ltd.Inventors: Fumio Yamazaki, Hiroshi Asanuma
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Patent number: 5987053Abstract: A high temperature vacuum furnace which has an internal thermal insulation system to reduce heat losses and an external vacuum vessel which is designed to safely dissipate all heat generated within the furnace to the surrounding air. The vacuum vessel wall remains at a low enough temperature to ensure structural integrity and at a low enough temperature to protect elastomer seals without the use of water cooling.Type: GrantFiled: September 3, 1997Date of Patent: November 16, 1999Inventor: Richard Dyson Webb
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Patent number: 5898727Abstract: The present invention provides a processing apparatus for eliminating pores in via holes of a silicon semiconductor. The apparatus includes a high-pressure vessel divided into at least two vessel component members in the axial direction thereof, at least one of which has a cooling unit, a frame for holding a load acting in the axial direction of the high-pressure vessel in processing a workpiece to be processed in the high-pressure vessel, an actuator for moving the vessel component members of the high-pressure vessel in the axial direction thereof so as to load and unload the workpiece, a sealing unit fitted to a portion for loading and unloading the workpiece, which is formed when the vessel component members are moved in the axial direction of the vessel, and a retractable cotter unit for transmitting a load acting in the axial direction of the high-pressure vessel to the frame.Type: GrantFiled: April 28, 1997Date of Patent: April 27, 1999Assignees: Kabushiki Kaisha Kobe Seiko Sho, Nihon Shinku Gijutsu Kabushiki KaishaInventors: Takao Fujikawa, Takahiko Ishii, Tomomitsu Nakai, Yoshihiko Sakashita
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Patent number: 5838716Abstract: A method of testing a dry oxidation furnace for leaks which permit the entry of moisture into the oxidizing ambient is described. Such moisture, when present in sufficient concentration, can cause a high degree of boron depletion in silicon at p-type contact interfaces in the manufacture of p-channel MOSFETs. The depleted silicon presents a high resistance component to the contact thereby compromising its performance. A test wafer is subjected to a non-oxidizing ambient in the furnace according to a prescribed procedure. Measurements of the thickness of an oxide layer on the test wafer before and after the procedure indicate the presence of a leak of sufficient proportions to cause a deterioation of contact performance if the oxide grown during the test procedure exceeds between about 25 to 35 Angstroms. The procedure is also useful as a simple means of monitoring an oxidation furnace to provide a record of performance and signal the development of trends which suggest appropriate remedial maintenance.Type: GrantFiled: June 3, 1997Date of Patent: November 17, 1998Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Hui-Hua Chang, Yu-Jen Yu, Chi-Fu Ni
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Patent number: 5708678Abstract: Method to equalize the temperature in a heating furnace (10) with a controlled-oxidization ambient, the furnace (10) comprising at least one insulated chamber (11) cooperating with a supporting and conveying surface defined by a plurality of rollers (12), the rollers (12) including rings (35) to bear slabs (19), a plurality of burners (18) being comprised in cooperation with the upper part of the furnace (10), whereas a plurality of aspiration intakes (21) is included in cooperation with the lower part of the furnace (10), the feed to the burners (18) being adjusted in such a way as to ensure a strongly oxidizing atmosphere within the furnace (10) so as to obtain a desired and controllable layer of scale on the surface of a slab (19) in the furnace (10), this strongly oxidizing atmosphere being conveyed so as to surround and lap continuously and evenly the whole periphery of the slab (19), the furnace (10) cooperating downstream with a descaling assembly (22) to remove the layer of scale thus formed.Type: GrantFiled: September 12, 1996Date of Patent: January 13, 1998Assignee: Danieli & C. Officine Meccaniche SpAInventors: Fabio Fasoli, Roberto Millone
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Patent number: 5550858Abstract: An improved cooling arrangement is disclosed for an industrial heat treat furnace. The furnace includes a closed end cylindrical heat treat chamber in which a plenum plate is suspended adjacent the rear end thereof. The plenum plate has a central underpressure opening and a fan between the rearward end of the furnace and the plate develops a wind mass which circulates into the furnace chamber and is drawn back into the fan through the plates central underpressure opening. Between the plenum plate and the furnace rearward end is positioned a first fixed fan diffuser followed by a second fixed fan diffuser. The first fan diffuser permits wind mass flow therethrough when the fan is rotated in a first direction but not in a second direction and similarly the second fan diffuser permits wind mass flow therethrough when the fan is rotated in a second direction but not in a first direction.Type: GrantFiled: June 6, 1995Date of Patent: August 27, 1996Assignee: Surface Combustion, Inc.Inventors: Max Hoetzl, Daniel E. Goodman
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Patent number: 5524020Abstract: A high temperature vacuum heat treating furnace has a hot zone, including heating elements and thermal insulation, which is movable between a heating location at least partly surrounding a load space and a cooling location remote from the load space. A cooling gas plenum around the hot zone in the heating location can eject cooling gas toward a load in the load space after the hot zone is retracted. Cooling rates approximately comparable to a furnace operable at four bar pressure can thereby be obtained in a furnace rated for no more than two bar internal pressure.Type: GrantFiled: August 23, 1994Date of Patent: June 4, 1996Assignee: Grier-Jhawar-Mercer, Inc.Inventors: Suresh C. Jhawar, John K. Grier, Brian K. Grier, Ardishir Rashidi
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Patent number: 5473628Abstract: A ring section furnace device for the calcination of carbon bodies includes a number of serially connected chambers with or without lids on top. Each chamber contains a number of cassettes the walls of which have therein vertical and/or horizontal flue gas channels. A flue gas exhaust system from each chamber leads to a main ring duct. The furnace is fitted with an additional, separately attached ring duct, and each of the chambers is fitted with a recovery device in the form of a lid, manifold, or a similar device with a closeable opening or joining pipe, which allows for exhaust removal of the air used for cooling the cassettes through a pipe connection fitted between the additional ring duct and the recovery device on the chamber.Type: GrantFiled: November 6, 1992Date of Patent: December 5, 1995Assignee: Norsk Hydro a.s.Inventors: Gudmund Tokvam, Tormod Naterstad
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Patent number: 5461214Abstract: Performance of a high temperature diffusion furnace is enhanced by an improved multi-furnace module design. The furnace is constructed of materials suitable for clean room environments with an adjustable leveling frame assembly. A slide out assembly and heating element alignment mechanism of individual furnace tube modules with a heating element hoist mechanism allows for enhanced maintainability. Heat treatment performance is improved by a sealed heating element with individual furnace module cooling system. Improved thermocouple positioning and composition has also enhanced heat treatment process control and heating element maintainability.Type: GrantFiled: June 15, 1992Date of Patent: October 24, 1995Assignee: Thermtec, Inc.Inventors: Kevin B. Peck, Ronald E. Erickson, Stephen H. Matthews
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Patent number: 5414927Abstract: A high strength graphite material is fabricated into a sheet, the sheet is bent into a tube, and the tube is retained in that shape for use in a high temperature furnace. The retained tube is rigid and can replace prior art machined blocks of lower strength graphite in a furnace. The tube can also be further machined and/or further deformed to achieve more complex shapes.Type: GrantFiled: March 30, 1993Date of Patent: May 16, 1995Inventors: Larry D. Fiel, Jamie Lorzadeh
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Patent number: 5299225Abstract: A lengthwise graphitization furnace for the conversion of a string of amorphous carbon bodies to graphite has an open semi-cylindrical shell of corrugated steel modules lined with cast refractory. The combination of the corrugated shell and cast refractory liner contributes to faster heat transfer by both convection and radiation, and to greater mechanical and thermal stability. The furnace is designed in modules allowing for easy replacement of worn components.Type: GrantFiled: May 20, 1992Date of Patent: March 29, 1994Assignee: Sigri Great Lakes Carbon Corp.Inventors: Berch Y. Karagoz, Joseph M. Rua, Lyman T. Moore, Larry E. Ledford, Donald P. Allen, Gregory Agnello, Thomas E. Fleckenstein
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Patent number: 5267257Abstract: A high temperature vacuum furnace has a circulating path external to the heating chamber for facilitating inert gas circulation during initial convection heating of a high temperature vacuum furnace. The heating chamber of the furnace and a surrounding cooling gas introduction chamber are within a metallic convection shroud in such a way that the space in between defines a heating gas circulation chamber for circulating heated inert gas during low temperature heating for accelerating the heating-up of the hot zone to its normal operating temperatures. Once the hot zone has reached a selected temperature, the inert gas is pumped out and the furnace then operates in a vacuum. Quenching is achieved by introducing cooling gas into the heating chamber via nozzles through the heating chamber walls.Type: GrantFiled: August 14, 1991Date of Patent: November 30, 1993Assignee: Grier-Jhawar-Mercer, Inc.Inventors: Suresh C. Jhawar, John K. Grier, Michael T. Mercer
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Patent number: 5228052Abstract: A plasma ashing apparatus has a vacuum treatment chamber for receiving therein a substrate coated with a resist film, a reactive gas introduction pipe equipped with a plasma applicator, a vacuum exhaust pipe, a heating means for heating the substrate, and two pieces of electrodes disposed in parallel to each other. One of the electrodes is a substrate electrode and the other thereof is a circular counter electrode. These two electrodes are commonly connected to an RF power source to thereby constitute a cathode electrode. Multiple concentric perforations are formed in the counter electrode except for a rib portion. A central perforation is formed in the center of the counter electrode. The concentric perforations are formed at every distance, from the center, equivalent to a diameter of the central perforation, while leaving circular electrode surfaces corresponding in width to a radius of of the perforation.Type: GrantFiled: September 11, 1991Date of Patent: July 13, 1993Assignee: Nihon Shinku Gijutsu Kabushiki KaishaInventors: Masashi Kikuchi, Richard L. Bersin, Masaki Uematsu
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Patent number: 5190901Abstract: A method and an apparatus for producing an active carbon using a carbon-containing material inclusive of an used active carbon as a raw material wherein the carbon-containing raw material is carbonized in a carbonizing unit to produce a carbonized material having electric conductivity and the carbonized material is then activated in an activating treatment unit installed downstream of the carbonizing unit in an atmosphere of steam with a power of electricity induced by electric discharge as well as a function of self-heating of the carbonized material with its own electric resistance are disclosed. The carbonizing unit is constructed in the form of a thermal radiation type batch furnace including an outer wall and a vessel mounted on a firing lattice in the outer wall while a heating chamber is formed therebetween.Type: GrantFiled: August 15, 1991Date of Patent: March 2, 1993Assignee: Heiyo Shoji Kabushiki KaishaInventor: Yoji Hirai
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Patent number: 5187771Abstract: A heat processing apparatus comprises a reactor tube in which matters to be processed are housed, a wire-shaped heating unit enclosing the reactor tube, a support device for supporting the heating unit at plural positions, and reinforcing members for reinforcing the support device. The support device includes plurality of holders stacked one upon the others, each of the holders has recesses on those two faces thereof which are contacted with faces of its adjacent ones, and when the holders are stacked one upon the others in a pole, the recesses of the two adjacent holders stacked form a hole through which the heating unit is passed. The support device has support members each supporting a pole of the holders stacked and each of the holders is engaged with its corresponding support member.Type: GrantFiled: November 13, 1991Date of Patent: February 16, 1993Assignee: Tokyo Electron Sagami LimitedInventor: Yoshinobu Uchida
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Patent number: 5173921Abstract: In an apparatus and process for the activation of carbon from carbon feedstocks by electrical resistance heating in the presence of steam, which comprises preheating particles of the carbon feedstock in a preheater, having the particles descend by gravity into and through a vertical reactor connected to the preheater, introducing steam at the bottom of the reactor so that it moves upward against the downward flow of the particles, passing an electric current through the particles in the reactor, and discharging the activated carbon from the bottom of the reactor, the improvements that comprise feeding the carbon feedstock through the side of the preheater, controlling the electric input, having the reactor project into the preheater, using a knife-gate valve and a discharge-limiting device to control the discharge of the activated carbon, using a carbon feedstock that contains up to about 25% of organic volatiles, maintaining the preheating temperature within a range from about 550.degree. C. to about 750.Type: GrantFiled: October 31, 1991Date of Patent: December 22, 1992Inventors: E. Mervyn J. Gaylord, Cornelius J. du Plessis
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Patent number: 5173919Abstract: In a melting furnace (1), toxic, volatile chemical compounds from introduced filter dust from industrial incineration units are vaporized at about 1300.degree. C. and forced to leave the reaction space. The non-vaporizing residue forms a glassy melt which is discharged continuously or intermittently from the reaction space. Heating of the melt and of the filter dust is affected by resistance heaters in protective ceramic sheaths (4) above the melt (2). In order to prevent corrosion of the resistance heater protection sheaths (4) by exit gases (7) especially in the flow lee thereof, the exit gases are forced, by partitions (10) and an exit gas extraction pipe (9) with an inlet orifice (16) at a low level, to flow below the resistance heater protection sheaths (4) to an exit gas outlet (5).Type: GrantFiled: January 22, 1991Date of Patent: December 22, 1992Assignee: Asea Brown Boveri Ltd.Inventors: Erwin Schmidl, Markus Hubig, Michael Hirth, Christian Wieckert
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Patent number: 5097114Abstract: A low-voltage electric heating device for application in a carburizing furnace is provided with an outer housing or sleeve for replaceable disposition within the furance, the outer housing radiating heat directly into said furnace; at least one current path conductor is positioned within the outer housing, the current path conductor being electrically connectable to a source of power and electrically insulated from a substantialy part of the outer housing. The heat radiated from the heating device is concentrated in the lower part because a current path has in series at least the current path conductor and at least a corresponding part of the outer housing, the resistance of the lower part of the outer housing being relatively large with respect to the remainder of the current path.Type: GrantFiled: August 23, 1990Date of Patent: March 17, 1992Assignee: General Signal CorporationInventors: Stephen C. Mann, David L. Doubet, Gary D. Etter
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Patent number: 4907245Abstract: In the high pressure furnace disclosed herein, convection currents in the furnace hot zone are minimized by bringing electrical feedthroughs for the heating element through a horizontal spacer ring which separates a pressure body and cover. A heat zone defining chamber base has an annular flange which extends to the pressure vessel body and a hot zone cover has a corresponding flange which extends to the pressure vessel cover. The feedthroughs pass in spaced relation between these flanges. As the feedthroughs enter the hot zone through the space between the flanges, a relatively small volume of unheated atmosphere is available to support convection currents stemming from necessary clearances around the feedthroughs where they enter the hot zone.Type: GrantFiled: April 10, 1989Date of Patent: March 6, 1990Assignee: Vacuum Industries, Inc.Inventor: Michael J. Manack
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Patent number: 4668287Abstract: This is a process for producing high quality zirconium or hafnium sponge. It is especially useful for producing the very high purity zirconium which may be used to line the inner surface zirconium of Zircaloy tubing for nuclear fuel rods. The process uses a combination reduction-distillation vessel which is directly fed with zirconium or hafnium tetrachloride from a molten salt sublimer. A precharge of magnesium chloride is used to prevent reduction of metal outside the inner liner, and thereby facilitate removal of the inner liner after reduction and distillation. The agitator for the molten salt sublimer preferably utilizes a molten metal seal around the agitator shaft.Type: GrantFiled: September 26, 1985Date of Patent: May 26, 1987Assignee: Westinghouse Electric Corp.Inventor: Young J. Kwon
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Patent number: 4612651Abstract: The electric resistance heating elements of a heat treating furnace are suspended within a work chamber by hanger rods threaded into nuts which are welded to the inside of the outer wall of the chamber to avoid the need for forming holes through the outer wall. Spacers are supported by adjacent hanger rods and hold thin radiation shields in spaced relation over the entire span extending from rod-to-rod.Type: GrantFiled: May 24, 1984Date of Patent: September 16, 1986Assignee: Abar Ipsen IndustriesInventors: Craig A. Moller, Eric H. Wolter
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Patent number: 4523321Abstract: A vertical carbonizing furnace for use in the production of carbon fibers is provided with a vertically extending conduit of hollow rectangular parallelepiped. The lower end of the conduit is immersed in water thereby making a water seal from environmental air. The conduit is also provided with a gas withdrawal outlet which communicates with the upper portion of the conduit through a gas feeding duct for reuse. The mixture of a vapor evaporated from the water seal and an inert gas is withdrawn from the gas withdrawal outlet and fed to the upper portion of the conduit as gas for sealing thereby preventing fibers and the conduit made of carbon or graphite from being deteriorated by said vapor evaporated from the water seal and providing a gas for sealing the upper end of the conduit.Type: GrantFiled: May 26, 1983Date of Patent: June 11, 1985Assignee: Toray Industries, Inc.Inventors: Yukihiro Murakami, Shigeomi Murakami, Katsunosuke Maeda
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Patent number: 4518846Abstract: In a molecular beam epitaxy furnace, a heater is described for heating the interior of an effusion cell. The heater includes an outer cylindrical sleeve having one end connected to receive a vacuum, and an opposite end extending into the furnace. An inner sleeve is provided coaxial with the outer cylindrical sleeve, one end of the inner sleeve being sealed with the opposite end of the cylindrical sleeve. The inner sleeve extends along a portion of the outer cylindrical sleeve providing an interior vacuum chamber. A heating element is disposed between the cylindrical sleeve and inner sleeve which heats the interior crucible receiving chamber and a crucible therein bearing semiconductor constituent material such that the semiconductor constituent material effuses without contamination from the heating element.Type: GrantFiled: June 11, 1984Date of Patent: May 21, 1985Assignee: International Business Machines CorporationInventors: John L. Freeouf, Thomas N. Jackson
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Patent number: 4510609Abstract: A furnace for growing large single crystals from materials having high meng temperatures using the vertical solidification of melt method. The crucible containing the melt being encased in a muffle with vertically oriented heating rods arranged in a circular pattern around the outside of the muffle. The tops of the heating rods being electrically connected to a continuous graphite ring, and the bottoms of equal numbers of rods being electrically connected to two semi-circular sections of graphite. The power feeds for the heating rods being vertically brought into the furnace from the bottom for electrical connection to the semi-circular sections of graphite.Type: GrantFiled: January 31, 1984Date of Patent: April 9, 1985Assignee: The United States of America as represented by the Secretary of the ArmyInventors: Jaroslav L. Caslavsky, Gerald H. Lavoie, William H. Earle, Dennis J. Viechnicki
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Patent number: 4509179Abstract: An apparatus for heating a workpiece at elevated temperatures both under vacuum and under superatmospheric pressures comprises a vacuum pressure vessel comprising a cylindrical pressure shell having an inner cylindrical sealing face near the upper edge thereof and a cover at one axial end and a bottom plug at the other axial end. Both are arranged to be placed within a reaction frame bearing thereupon. A furnace within the shell has an insulating hood for protecting the shell from the heated workspace. A vacuum manifold is mounted to the top edge of the cylindrical shell and is sealed thereto. The manifold has a cylindrical interior through which the cover passes and an inner cylindrical sealing face at the upper end thereof. Mechanically powered means are provided for raising and lowering the cover and placing it in a first or a second position.Type: GrantFiled: September 27, 1983Date of Patent: April 2, 1985Assignee: Autoclave Engineers, Inc.Inventor: Franz X. Zimmerman
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Patent number: 4503087Abstract: A process for high temperature, rapid drive-in diffusion employs a planar blackbody source placed in parallel alignment with a semiconductor wafer in a vacuum processing chamber. The wafer is rapidly heated, preferably to a temperature in the range of 1100.degree. C. to 1300.degree. C. and primarily by radiation which promotes uniformity. Typical diffusions are completed in less than one minute. In order to control diffusion distance at elevated temperatures, the process time and source temperature are carefully controlled, and the peak wafer temperature is monitored.Type: GrantFiled: August 29, 1983Date of Patent: March 5, 1985Assignee: Varian Associates, Inc.Inventor: Carl J. Russo
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Patent number: 4403769Abstract: In a vacuum separator for refractory metal from magnesium metal and magnesium chloride mixed therewith, comprising: a vertically elongated substantially cylindrical retort having, inside, a closed space, a lower section of which is capable of accommodating such mixture to be treated as held in a container and is provided with a heating means to evaporate the magnesium metal and magnesium chloride to a substantial part, and an upper section of which has a cooling means to provide, inside, a cylindrical face for condensing thereon magnesium metal and magnesium chloride which ascend as vapor, and a means for degassing the retort to an elevated level of vacuum, an improvement such that a heat shield unit is provided at an intermediate level between said upper and lower sections of the retort, said heat shield unit comprising, as a whole, opening so arranged as to block any direct sight of the surface of the retort lower section when holding the container from a substantial part of the condensation face in the uppType: GrantFiled: April 23, 1982Date of Patent: September 13, 1983Inventor: Hiroshi Ishizuka
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Patent number: 4357210Abstract: The invention relates to an electric furnace for heating by passing a current through the charge, and more particularly, a continuous furnace in which the charge is a carbonaceous material.The furnace according to the invention is provided with a device for allowing non-reactive gas to be circulated in the opposite direction to the charge.The furnace according to the invention is used, in particular, for calcining anthracite.Type: GrantFiled: February 8, 1981Date of Patent: November 2, 1982Assignee: Societe des Electrodes et Refractaires Savoie/SERSInventors: Michel Aubry, Jean-Claude Bernard, Paul Philipon
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Patent number: 4336412Abstract: Electrical heating furnaces for the treatment, e.g., of steel are provided with MoSi.sub.2 -based resistance elements without an outer protective layer, even in the presence of a non-oxidating protective gas, for operation at about 800.degree. to 1400.degree. C.Type: GrantFiled: July 3, 1980Date of Patent: June 22, 1982Assignee: Bulten-Kanthal ABInventor: Ture Thomander