Vacuum Patents (Class 373/112)
  • Patent number: 11428469
    Abstract: A fuming enclosure including a heating element and a moveable support or barrier. The heating element may heat a receptacle containing a volatile component. The moveable support or barrier is moveable between a first position, in which the volatile component is not heated by the heating element, and a second position, in which the volatile component is heated by the heating element. The moveable support or barrier may be moveable while maintaining the enclosure sealed. The moveable support or barrier may be automatically moveable. A fuming enclosure with a one-way seal configured to prevent fumes from escaping the enclosure and allow volatile component to flow through the seal into the enclosure while the enclosure is sealed.
    Type: Grant
    Filed: February 28, 2017
    Date of Patent: August 30, 2022
    Assignee: LABCONCO CORPORATION
    Inventor: Brandon Gray
  • Patent number: 10654596
    Abstract: A system for manufacturing a space-based component while on orbit around the Earth. The system includes a spacecraft body and a solar collection device mounted thereto for collecting solar energy from the sun that is converted into heat. The system includes a manipulator device that moves a solar refinery to a position to collect space debris, where the manipulator then moves the solar refinery to location that uses the heat to melt constituent elements in the debris. The solar refinery also includes a collection element capable of separately collecting the heated elements. The system also includes a fabrication module that is operable to obtain solid, molten or vaporized elements from the collection element and fabricate the space-based component therefrom.
    Type: Grant
    Filed: September 29, 2016
    Date of Patent: May 19, 2020
    Assignee: Northrop Grumman Systems Corporation
    Inventor: Howard S. Eller
  • Patent number: 9702627
    Abstract: An electrical insulating and heating element support assembly for a high temperature vacuum furnace having a threaded support rod for connecting a heating element to the insulated hot-zone support ring in an electrically non-connected position includes insulator sleeves and washers surrounding the rod in contact with a series of refractory metal washers which may include graphite and/or molybdenum as shielding liners used to protect electrical insulators from having electrical short path means due to deposition of conductive materials onto the non-conducting insulators, and the use of threaded nuts and bushings to anchor the rod and shielding arrangement within the furnace hot zone. The non-conducting insulators and washers are made from materials with high thermal and electrical resistance, such as preferably alumina or mullite, and radially surround the support rod and the heating element.
    Type: Grant
    Filed: May 16, 2014
    Date of Patent: July 11, 2017
    Inventors: Robert J. Wilson, Mark J. Hughes
  • Publication number: 20150049781
    Abstract: A vacuum heat treating furnace for the heat treatment of metal parts includes a pressure vessel and a hot zone enclosure that defines a hot zone therein. A heating element array inside the hot zone enclosure includes a first heating element, a second heating element, and a center heating element. The first and second heating elements are suspended on opposing sides of the hot zone enclosure. The center heating element is suspended vertically from the hot zone enclosure between the first and second heating elements. The center heating element is adapted to be connected to the first and second heating elements to form a continuous circuit therewith. The center heating element may be connected to the first and second heating elements with removable/reusable fasteners to provide for reconfiguration of the hot zone to accommodate different size workloads.
    Type: Application
    Filed: August 11, 2014
    Publication date: February 19, 2015
    Inventor: Craig A. Moller
  • Patent number: 8890036
    Abstract: A vacuum oven or vacuum furnace is disclosed having a heat distribution sleeve that conforms to the shape of an interior heating chamber. The heat distribution sleeve may be of generally annular shape, like a ring, and located in a substantially regularly spaced and offset relationship from a heating element located within walls adjacent the interior heating chamber. The heat distribution sleeve includes a thermal conductive material which absorbs and re-radiates heat emitted from the heating element, thereby providing more consistent and regular radiation fields for heating treating a work piece that is loaded on a work holding tray and, upon the vacuum oven being in an operational position, the work piece is located within the furnace chamber.
    Type: Grant
    Filed: March 12, 2013
    Date of Patent: November 18, 2014
    Inventors: Daniel F. Serrago, James D. Emmons
  • Patent number: 8487220
    Abstract: A vacuum oven or vacuum furnace is disclosed having a heat distribution sleeve that conforms to the shape of an interior heating chamber. The heat distribution sleeve may be of generally annular shape, like a ring, and located in a substantially regularly spaced and offset relationship from a heating element located within walls adjacent the interior heating chamber. The heat distribution sleeve includes a thermal conductive material which absorbs and re-radiates heat emitted from the heating element, thereby providing more consistent and regular radiation fields for heating treating a work piece that is loaded on a work holding tray and, upon the vacuum oven being in an operational position, the work piece is located within the furnace chamber.
    Type: Grant
    Filed: November 18, 2010
    Date of Patent: July 16, 2013
    Inventors: Daniel F. Serrago, James D. Emmons
  • Publication number: 20130143173
    Abstract: A furnace comprises a cage holding and supporting an insulation pack comprising one or more base boards, one or more top boards and a plurality of side boards each of rigid carbon fiber based insulation material, the one or more base boards, one or more top boards, and plurality of side boards defining a cavity between them. A flexible carbon felt is disposed between the side boards and the cage.
    Type: Application
    Filed: October 25, 2012
    Publication date: June 6, 2013
    Applicant: MORGAN ADVANCED MATERIALS AND TECHNOLOGY INC.
    Inventor: MORGAN ADVANCED MATERIALS AND TECHNOLOGY INC.
  • Patent number: 8134100
    Abstract: A heat processing furnace comprises: a processing vessel for receiving an object to be processed by a heat process; a cylindrical heat insulation member surrounding the processing vessel; a helical heating resistor arranged along an inner peripheral surface of the heat insulation member; a support member for supporting the heating resistor. The support member includes a base part positioned on an inside of the heating resistor, and a plurality of support pieces extending radially outward from the base part through spaces between adjacent portions of the heating resistor so as to support the heating resistor, the support member being formed to have a comb-like shape. An upper surface part of each of the support pieces is formed to have a curved shape in order to reduce a frictional resistance generated when the heating resistor is moved upon a thermal expansion and a thermal shrinkage thereof.
    Type: Grant
    Filed: May 29, 2008
    Date of Patent: March 13, 2012
    Assignee: Tokyo Electron Limited
    Inventors: Makoto Kobayashi, Ken Nakao
  • Patent number: 7888622
    Abstract: A heat-processing furnace comprises: a processing vessel for housing an object to be processed to thermally heat the object to be processed; a cylindrical heat insulating member surrounding the processing vessel; a helical heating resistor disposed along an inner circumferential surface of the heat insulating member; and support members axially disposed on the inner circumferential surface of the heat insulating member, for supporting the heating resistor at predetermined pitches. A plurality of terminal plates are disposed outside the heating resistor at suitable intervals therebetween and attached to the heating resistor, the terminal plates radially passing through the heat insulating member to be extended outside. A plurality of fixing plates are disposed outside the heating resistor at suitable intervals therebetween and attached to the heating resistor, the fixing plates being fixed in the heat insulating member.
    Type: Grant
    Filed: September 20, 2007
    Date of Patent: February 15, 2011
    Assignee: Tokyo Electron Limited
    Inventors: Ken Nakao, Kenichi Yamaga, Makoto Kobayashi
  • Patent number: 7531769
    Abstract: A vacuum furnace adapted to cool a load. The vacuum furnace has one or more means for cooling a fluid and a muffle substantially comprised of carbon fiber composite and substantially containing the load. The fluid flows in a substantially unidirectional flow substantially within the muffle.
    Type: Grant
    Filed: June 13, 2006
    Date of Patent: May 12, 2009
    Inventor: Guy Smith
  • Patent number: 6936792
    Abstract: Furnace cart assembly for loading high temperature vacuum furnaces for treating target material, for example, metal parts, under extreme temperature and vacuum environments. The furnace cart includes electrical heating elements as an integral part of the cart, which elements are adapted for releasable connection to the furnace electrical supply. When so connected the furnace cart heating elements can form a part of the heating system of the furnace. The lower part of the furnace cart assembly, including a frame above and supported on wheels, the frame having heat reflection means on at least Its upper surfaces providing some protection from heat is preferably also protected from heat during furnace operation by insulating material above the frame (the material desirably supported by the frame but separated therefrom).
    Type: Grant
    Filed: May 22, 2002
    Date of Patent: August 30, 2005
    Inventor: William R. Jones
  • Patent number: 6914218
    Abstract: A vacuum oven for decontaminating items, a system incorporating multiple such vacuum ovens and a method of operating such system are provided. The ovens are portable. They can have a vacuum drawn in them and can be heated by being coupled to a vacuum and a power source, respectively at a first location and then be decoupled from the vacuum and power sources and moved to a second location such as a glove box or clean room while still maintaining a vacuum.
    Type: Grant
    Filed: October 10, 2002
    Date of Patent: July 5, 2005
    Assignee: Wems, Inc.
    Inventors: Dmitry Vernik, Christopher B. Dreike, Terry D. Wolfson
  • Patent number: 6283749
    Abstract: A hot walled, industrial, batch-type vacuum furnace constructed with a cylindrical furnace casing having a closed spherical end and an open end adapted to be closed by a sealable door. Furnace insulation is applied to the outside of the door and furnace casing so that the inside of the furnace is impervious to the furnace gases. Special mounting arrangements are used to seal furnace components extending into the casing as well as the door by elastomer seals which are air cooled.
    Type: Grant
    Filed: June 2, 2000
    Date of Patent: September 4, 2001
    Assignee: Surface Combustion, Inc.
    Inventors: William J. Bernard, Jr., Thomas J. Schultz
  • Patent number: 6268590
    Abstract: A mercury retorting apparatus, a retorting system, and a method for continuous removal of mercury from dry, semi-granular, and sludge materials contaminated with mercury without shutting down the system for removal of accumulated liquid mercury, water, and dust particles. The retorting apparatus comprises a powered screw feed assembly having a feed tube with a closely fitting feed screw therein. The screw feed assembly feeds the material from the lower portion of a hopper configured to contain a quantity thereof into a rotatably powered retorting tube in which a vacuum is drawn. The material forms a seal within the powered screw feed assembly against vacuum loss in the retorting tube during operation thereof. A first rotatable seal between the feed tube and retorting tube prevents vacuum loss therebetween. An elongate electric kiln encloses the mid-portion of the retorting tube.
    Type: Grant
    Filed: March 6, 2000
    Date of Patent: July 31, 2001
    Assignee: Summit Valley Equipment and Engineering, Corp.
    Inventors: Charles O. Gale, Eldan L. Hill
  • Patent number: 6252202
    Abstract: A furnace is provided generally including an upper heating chamber and a lower work base or firing platform. The upper chamber provides the main source of heat to the materials to be heat-treated. The upper chamber contains a muffle within which is located a heater ring assembly. The heater ring assembly is located in the middle to upper half of the muffle and includes an annular heating element that is located between an outer insulation ring and an inner quartz sleeve. A cavity or channel extends through the muffle into which insulation materials and the heater ring assembly is located. The channel area in the muffle below the heater ring assembly allows for the placement of the firing platform therein. The firing platform includes insulation material and a heating element located in the upper portion thereof.
    Type: Grant
    Filed: February 4, 1999
    Date of Patent: June 26, 2001
    Assignee: Jeneric/Pentron, Inc.
    Inventor: George N. Zychek
  • Patent number: 6093911
    Abstract: A vacuum heating furnace comprises a translucent container for retaining a heated object and a heating light source for heating a heated object retained in the translucent container. The translucent container has on its surface a tapered portion to receive transmitted light totally reflected on the inner surface of the translucent container at an angle smaller than a critical angle.
    Type: Grant
    Filed: May 22, 1998
    Date of Patent: July 25, 2000
    Assignee: Hitachi, Ltd.
    Inventors: Hiroki Kawada, Tomoji Watanabe, Nobuo Tsumaki, Toshimitsu Miyata
  • Patent number: 6031207
    Abstract: A kiln, useful for sintering basemetal capacitors comprises an inner zone having vertically oriented gas dispersion conduits for the inlet and radial dispersion of gas and vertically oriented electrical heating elements. Each gas dispersion conduit comprises a porous or perforated inner tube for a porous or perforated outer tube concentrically positioned around the inner tube. The annular space between is filled with a porous refractory medium, such as a bulk ceramic fiber. The temperature of the inner zone is controlled by the electrical heating elements. The gas is evenly heated as it passes radially from the inner tube through the porous refractory medium and then through the outer tube. Surrounding the inner zone is a multiplicity of stacks of substantially horizontally-oriented trays on which the material or articles to be sintered or otherwise treated are placed. The circle of stacks of trays is surrounded by an outer heating zone comprising an outer ring of electrical heating elements.
    Type: Grant
    Filed: January 26, 1999
    Date of Patent: February 29, 2000
    Assignee: Harper International Corp.
    Inventors: Bruce J. Dover, Edward V. McCormick
  • Patent number: 5970213
    Abstract: A heating disk is located inside a vacuum chamber between a substrate holder inside the chamber and a lamp outside the chamber. The lamp emits radiation in a wavelength range which passes through a glass plate in the chamber wall but is absorbed by the heating disk, which may consist of graphite. When the disk is heated to 1000.degree. K. it emits radiation in a wavelength range which can be absorbed by a transparent substrate in the holder.
    Type: Grant
    Filed: March 1, 1994
    Date of Patent: October 19, 1999
    Assignee: Balzers und Leybold Deutschland Holding Aktiengesellscaft
    Inventors: Bernhard Cord, Karl-Heinz Schuller, Jaroslav Zejda
  • Patent number: 5883919
    Abstract: A furnace system for preventing gas leakage is disclosed. The furnace system includes a bottom board for holding a furnace tube. A gas injection device is connected to the furnace tube at a first port for injecting reaction gas into the furnace tube. An exhaust subsystem is connected to the furnace tube at a second port. The exhaust subsystem has a first node, a second node, a third node and a fourth node. A vacuum seal is connected to the furnace tube at a third port for preventing the exhaust gas from leaking. The vacuum seal is connected to the exhaust subsystem at the first node and the second node. Finally, an N.sub.2 sealing tube is connected to furnace tube and surrounding the seam between the furnace tube and the bottom board.
    Type: Grant
    Filed: May 20, 1997
    Date of Patent: March 16, 1999
    Assignee: Vanguard International Semiconductor Corporation
    Inventors: Cheng-Chang Hung, Lien-Fang Lin
  • Patent number: 5698158
    Abstract: Ultra high purity materials, particularly metallic materials such magnesium and similarly high volatility materials, are produced by a vacuum distillation method and apparatus to increase purity by approximately five hundred times in a single step. For example, magnesium purity, exclusive of zinc content, is increased from 99.95% to greater than 99.9999%. A distillation column is formed of a high purity (less than 10 ppm ash) graphite, and includes a crucible, a vertical condenser in which horizontal high purity graphite baffles are selectively located at a plurality of levels, for example at nine levels. The column is contained in a three-zone resistance furnace that is controlled to heat the crucible to evaporate the material, maintain the condenser immediately above the crucible to above the boiling point of the material, and maintain the portion of the column thereabove at below the boiling point of the material, preferably with the temperature gradually decreasing with the height of the column.
    Type: Grant
    Filed: November 4, 1996
    Date of Patent: December 16, 1997
    Assignees: Sony Corporation, Materials Research Corporation
    Inventors: Raymond K. F. Lam, Daniel R. Marx
  • Patent number: 5416967
    Abstract: A method and apparatus for providing an economical vacuum furnace for heat treating of heat treatable articles including: A vacuum furnace heat treating chamber having reduced thickness at its ends in order to arrest heat transfer at seals at the ends of the chamber; and Heating apparatus exterior of the heat treating chamber for heating the interior of the chamber.
    Type: Grant
    Filed: September 14, 1993
    Date of Patent: May 23, 1995
    Inventor: Steven B. Cress
  • Patent number: 5389550
    Abstract: An organic substance analyzing method is disclosed. A sample container 21 charged with a granulated rock sample is installed in a thermal cracking furnace 1. The thermal cracking furnace 1 is connected to a vacuum suction line 27 to be evacuated until a substantial vacuum is created therein, whereupon the furnace is closed. The closed thermal cracking furnace is rapidly heated to a first temperature at which hydrocarbons are more or less cracked but inorganic carbonates are not decomposed. The thermal cracking furnace is maintained at this temperature for a fixed time and then is cooled to a temperature at which the hydrocarbons in the thermal cracking furnace do not react with air. Then the furnace is connected to an air supply line 29 and an exhaust line 35 to pass the produced gases in the furnace to a hydrocarbon detector 34 and a CO.sub.2 detector 33. From the output signals therefrom, HC peak P1 and CO.sub.2 peak P3 are found and recorded.
    Type: Grant
    Filed: November 10, 1993
    Date of Patent: February 14, 1995
    Assignee: Japan National Oil Corporation
    Inventors: Shigeaki Ishida, Hidetoshi Fujimori, Hideki Matsubayashi, Tsutomu Machihara
  • Patent number: 5287383
    Abstract: An apparatus for producing an active carbon using a carbon-containing material inclusive of an used active carbon as a raw material wherein the carbon-containing raw material is carbonized in a carbonizing unit to produce a carbonized material having electric conductivity and the carbonized material is then activated in an activating treatment unit installed downstream of the carbonizing unit in an atmosphere of steam with a power of electricity induced by electric discharge as well as a function of self-heating of the carbonized material with its own electric resistance are disclosed. The carbonizing unit is constructed in the form of a thermal radiation type batch furnace including an outer wall and a vessel mounted on a firing lattice in the outer wall while a heating chamber is formed therebetween.
    Type: Grant
    Filed: October 6, 1992
    Date of Patent: February 15, 1994
    Assignee: Heiyo Shoji Kabushiki Kaisha
    Inventor: Yoji Hirai
  • Patent number: 5193100
    Abstract: An electrically heated vacuum furnace is provided with special lead-through devices for transmitting current to the heating elements. In order to recognize gas discharges which can occur between a lead-through and a tank wall, the insulation of the lead-through is surrounded by an auxiliary electrode. A thermocouple can also be used instead of an auxiliary electrode. A signal derived from the auxiliary electrode can be used to shut off the furnace power to avoid damage thereto.
    Type: Grant
    Filed: June 21, 1991
    Date of Patent: March 9, 1993
    Assignee: Arthur Pfeiffer Vakuumtechnik Wetzlar GmbH
    Inventors: Robert Hack, Wilhelm Polhede
  • Patent number: 5119395
    Abstract: An industrial electrical, vacuum furnace for ion processing of work is provided with an improved feed-through interlock and insulator arrangement. A sealed interlock chamber on the furnace door is in fluid communication with the furnace's heat treat chamber. A bellows outside of the interlock chamber is in fluid communication therewith. When a vacuum is drawn in the heat treat chamber, the bellows distends into a collapsed position to provide a firmly clamped electrical connection with the feed-through which extends through the door into the interlock chamber. The feed-through is thus pinned by the bellows at one end and a V-shaped pulley guide arrangement within the furnace controls thermal distortion of the feed-through.
    Type: Grant
    Filed: November 9, 1990
    Date of Patent: June 2, 1992
    Assignee: Gas Research Institute
    Inventors: Klaus H. Hemsath, James E. Lyon
  • Patent number: 4860306
    Abstract: The present arrangement includes a plurality of graphite support assemblies which serve to hold graphite heating elements of a graphite hot zone to be used with a vacuum furnace. Each of the support assemblies is designed to employ graphite bolts. Laminated graphite washers are located between the bolts and the graphite heating elements and between the graphite heating elements and the support assemblies so that the bolts do not loosen in response to cycles of hot and cold temperatures.
    Type: Grant
    Filed: October 5, 1988
    Date of Patent: August 22, 1989
    Assignee: Vacuum Furnace Systems Corporation
    Inventor: Thomson B. Gibb
  • Patent number: 4856022
    Abstract: The present arrangement includes a plurality of graphite support assemblies which serve to hold graphite heating elements of a graphite hot zone to be used with a vacuum furnace. The support assembly used with the power terminal end of the heating element chain is designed to be clamped onto a standard molybdenum electrically energizable rod, while each of the support assemblies is designed to employ graphite bolts with carefully selected laminated graphite washers so that the bolts do not loosen in response to cycles of hot and cold temperatures.
    Type: Grant
    Filed: October 5, 1988
    Date of Patent: August 8, 1989
    Inventor: William R. Jones
  • Patent number: 4850575
    Abstract: An apparatus for manufacturing a sintered body with high density comprises: a table having an object to be processed laid thereon; a pressure vessel accommodating a heat element heating the object around and a heat-insulating mantle surrounding the heat element; supply device for supplying to the pressure vessel an extractant which extracts a binder or a dispersion medium contained in the object, exhaust device for exhausting the extractant and an extracted substance from the pressure vessel; pressure device for raising a pressure in the pressure vessel, and vacuum means for evacuating the pressure vessel. The apparatus enables carrying out the three steps of drying or degreasing, sintering and hot isostatic pressing of the object once put in the pressure vessel without handling the object outside the vessel. The object is formed as a compact in the preprocess in advance of being put in the apparatus.
    Type: Grant
    Filed: June 3, 1988
    Date of Patent: July 25, 1989
    Assignee: Nippon Kokan Kabushiki Kaisha
    Inventors: Hiroaki Nishio, Takeshi Kawashima
  • Patent number: 4760584
    Abstract: The present arrangement includes a plurality of hearth support members. In the preferred embodiment each hearth support member is located to pass through the wall of a vacuum furnace housing and on into the hot zone thereof. Each hearth support member includes a hollow stainless steel tube which is secured at its bottom end to a brass base member. At the top end of each hollow support member there is located an electrically conducting adapter which is formed to supportively engage with the hearth. Within each hollow support member a ceramic encapsulated thermocouple is located with the ceramic encapsulating member running the length of the metallic hollow support member and the lead wires to the thermocouple protruding therefrom.
    Type: Grant
    Filed: June 12, 1987
    Date of Patent: July 26, 1988
    Inventor: William R. Jones
  • Patent number: 4668287
    Abstract: This is a process for producing high quality zirconium or hafnium sponge. It is especially useful for producing the very high purity zirconium which may be used to line the inner surface zirconium of Zircaloy tubing for nuclear fuel rods. The process uses a combination reduction-distillation vessel which is directly fed with zirconium or hafnium tetrachloride from a molten salt sublimer. A precharge of magnesium chloride is used to prevent reduction of metal outside the inner liner, and thereby facilitate removal of the inner liner after reduction and distillation. The agitator for the molten salt sublimer preferably utilizes a molten metal seal around the agitator shaft.
    Type: Grant
    Filed: September 26, 1985
    Date of Patent: May 26, 1987
    Assignee: Westinghouse Electric Corp.
    Inventor: Young J. Kwon
  • Patent number: 4542513
    Abstract: A stacked type heater construction particularly suitable for large HIP apparatus, having a number of heating unit assemblies stacked one on another to provide a vertical series of independently controllable heating zones, the heater including a generally cylindrical heater retaining cage constituted by a number of annular graphitic members serving as girdle frames and a number of graphitic support columns serving as vertical frames, the annular members and support columns being connected with each other through electric insulators and defining a series of divided sections around the heater retaining cage in each one of the heating zones; and a plurality of segmental graphitic heating elements supported in the respective divided sections of the heater retaining cage through electric insulators to form an independent heating circuit in each heating zone.
    Type: Grant
    Filed: August 5, 1983
    Date of Patent: September 17, 1985
    Assignee: Kabushiki Kaisha Kobe Seiko Sho
    Inventor: Yoichi Inoue
  • Patent number: 4430055
    Abstract: A semi-continuous vacuum heat-treating furnace of two-chambers and one-door type is composed of a vacuum heating chamber which includes a heating element and a heat insulation material, both being stable in chemical property and strength in vacuum condition and atmospheric pressure at high temperature, a cooling chamber which is associated with the vacuum heating chamber, and an intermediate vacuum door which separates the vacuum heating chamber and the cooling chamber from each other.
    Type: Grant
    Filed: February 17, 1982
    Date of Patent: February 7, 1984
    Inventor: Michio Sugiyama
  • Patent number: 4425660
    Abstract: The present invention is directed to graphite shields (or shields of other materials which may react chemically or be oxidized in a vacuum furnace but which when condensed do not readily conduct electricity) or graphite shield liners used to protect electrical insulating devices from having electrical shorting path means develop thereon.
    Type: Grant
    Filed: June 22, 1981
    Date of Patent: January 10, 1984
    Inventor: William R. Jones