With Resistor Element Compression Patents (Class 373/131)
  • Patent number: 8565283
    Abstract: An insert intended for electrical furnaces and of the type that includes an insulating shell having an outside and an inside having a rotationally symmetrical, e.g., cylindrical shape, and a heater element that is arranged inside the insulating shell and extends several turns in a continuous loop having an overall shape corresponding to the rotationally symmetrical shape of the insulating shell. The continuous loop includes spaced-apart bends, which divide the same into individual sections of limited length to which occurring thermal expansion is isolated locally. In an exemplary embodiment, the bends are U-shaped to impart to the continuous loop a meander shape. Another exemplary embodiment relates to a heater element.
    Type: Grant
    Filed: January 2, 2008
    Date of Patent: October 22, 2013
    Assignee: Sandvik Intellectual Property AB
    Inventor: Thomas Lewin
  • Patent number: 8476560
    Abstract: A thermal processing furnace comprises: a tubular heat insulation member 4 surrounding a processing vessel 3 for receiving and thermally processing an object to be processed w; a heating resistor 5 helically arranged on an inner circumferential surface of the heat insulation member 4; and a support member 13 disposed on the inner circumferential surface of the heat insulation member 4, the support member 13 supporting the heating resistor 5 such that the heating resistor 5 can be thermally expanded and thermally shrunk. The thermal processing furnace further comprises: a movement prevention member 15 disposed on the heating resistor 5 to be in contact with one side surface of the support member 13 so as to prevent a downward movement of the heating resistor 5.
    Type: Grant
    Filed: January 26, 2009
    Date of Patent: July 2, 2013
    Assignee: Tokyo Electron Limited
    Inventors: Makoto Kobayashi, Kenichi Yamaga, Ken Nakao
  • Patent number: 8134100
    Abstract: A heat processing furnace comprises: a processing vessel for receiving an object to be processed by a heat process; a cylindrical heat insulation member surrounding the processing vessel; a helical heating resistor arranged along an inner peripheral surface of the heat insulation member; a support member for supporting the heating resistor. The support member includes a base part positioned on an inside of the heating resistor, and a plurality of support pieces extending radially outward from the base part through spaces between adjacent portions of the heating resistor so as to support the heating resistor, the support member being formed to have a comb-like shape. An upper surface part of each of the support pieces is formed to have a curved shape in order to reduce a frictional resistance generated when the heating resistor is moved upon a thermal expansion and a thermal shrinkage thereof.
    Type: Grant
    Filed: May 29, 2008
    Date of Patent: March 13, 2012
    Assignee: Tokyo Electron Limited
    Inventors: Makoto Kobayashi, Ken Nakao
  • Patent number: 7888622
    Abstract: A heat-processing furnace comprises: a processing vessel for housing an object to be processed to thermally heat the object to be processed; a cylindrical heat insulating member surrounding the processing vessel; a helical heating resistor disposed along an inner circumferential surface of the heat insulating member; and support members axially disposed on the inner circumferential surface of the heat insulating member, for supporting the heating resistor at predetermined pitches. A plurality of terminal plates are disposed outside the heating resistor at suitable intervals therebetween and attached to the heating resistor, the terminal plates radially passing through the heat insulating member to be extended outside. A plurality of fixing plates are disposed outside the heating resistor at suitable intervals therebetween and attached to the heating resistor, the fixing plates being fixed in the heat insulating member.
    Type: Grant
    Filed: September 20, 2007
    Date of Patent: February 15, 2011
    Assignee: Tokyo Electron Limited
    Inventors: Ken Nakao, Kenichi Yamaga, Makoto Kobayashi
  • Patent number: 7838802
    Abstract: The present invention provides a radiation apparatus with capability of preventing heat convection, which comprises a blackbody furnace having a cavity therein and an air pressure adjusting unit. The air pressure adjusting unit coupled to the blackbody furnace for adjusting the air pressure of the open end of the cavity according to the temperature difference between the cavity and the outside environment. By means of the design of the present invention, it is capable of preventing heat convection between the cavity and the outside environment by utilizing the air pressure adjusting unit for controlling the air pressure status around the open end of cavity such that the blackbody furnace is stable for services of calibrations and tests.
    Type: Grant
    Filed: December 30, 2007
    Date of Patent: November 23, 2010
    Assignee: Industrial Technology Research Institute
    Inventors: Bor-Jiunn Wen, Hsin-Yi Ko
  • Patent number: 7759618
    Abstract: A strip-form silicon carbide furnace heating element is provided having a higher radiating surface area to volume ratio than a conventional tubular element.
    Type: Grant
    Filed: July 16, 2004
    Date of Patent: July 20, 2010
    Assignee: Sandvik Materials Technology UK Limited
    Inventor: John George Beatson
  • Patent number: 6111908
    Abstract: An electrical insulating and heating element support mechanism for a high temperature vacuum furnace having a support rod with an electrical insulating and support mechanism for connecting a heating element to the rod in an electrically non-connected position includes insulators and cup shaped shields each with a wall radially surrounding an insulator. The electrically non-connected shield wall is spaced from the heating element and the insulator radial surface but covers at least a portion of the insulator radial surface to protect the mechanism from deposition of conductive materials that could cause shorts that could damage the furnace and materials being treated in the furnace. The walls of the cup shaped shields can be shaped in a number of different ways, for example, cylindrical or flared, but desirably have a circular radial dimension. The shields are desirably made with graphite.
    Type: Grant
    Filed: August 16, 1999
    Date of Patent: August 29, 2000
    Inventor: William R. Jones
  • Patent number: 5271032
    Abstract: A glass melter having a lid electrode for heating the glass melt radiantly. The electrode comprises a series of INCONEL 690 tubes running above the melt across the melter interior and through the melter walls and having nickel cores inside the tubes beginning where the tubes leave the melter interior and nickel connectors to connect the tubes electrically in series. An applied voltage causes the tubes to generate heat of electrical resistance for melting frit injected onto the melt. The cores limit heat generated as the current passes through the walls of the melter. Nickel bus connection to the electrical power supply minimizes heat transfer away from the melter that would occur if standard copper or water-cooled copper connections were used between the supply and the INCONEL 690 heating tubes.
    Type: Grant
    Filed: January 14, 1992
    Date of Patent: December 14, 1993
    Inventor: Terrance D. Phillips