Abstract: A temperature determining device is composed of a temperature detecting unit that detects a temperature of a determination object member based on an intensity of infrared rays from the object member, a unit for determining a temperature for correction that determines a temperature of an opposing member opposed to the object member or a temperature of a member whose temperature changes in correlation to a change in the temperature of the opposing member, and a calculating unit that corrects the detected temperature obtained by the temperature detecting unit using the temperature as the temperature for correction obtained by the unit for determining a temperature for correction. Thus, stable temperature determination can be performed accurately without being influenced by infrared rays from around a determination object member.

Abstract: A radiant energy sensor is adapted to detect radiant heat energy incident on a surface. The energy sensor has a body portion with a pair of sides. A temperature sensor is located on each side of the body portion. In use the body portion is mounted on the surface such that one of the sensors is located between the body portion and the surface, thereby being masked by the body portion from heat energy otherwise incident on the surface.

Abstract: A thermal monitoring system, including multiple infrared sensors, performs real-time monitoring and alarming for any out of tolerance thermal conditions occurring during a manufacturing process.

Abstract: This invention is a fiber-based multi-color pyrometry set-up for real-time non-contact temperature and emissivity measurement. The system includes a single optical fiber to collect radiation emitted by a target, a reflective rotating chopper to split the collected radiation into two or more paths while modulating the radiation for lock-in amplification (i.e., phase-sensitive detection), at least two detectors possibly of different spectral bandwidths with or without filters to limit the wavelength regions detected and optics to direct and focus the radiation onto the sensitive areas of the detectors. A computer algorithm is used to calculate the true temperature and emissivity of a target based on blackbody calibrations. The system components are enclosed in a light-tight housing, with provision for the fiber to extend outside to collect the radiation.

Abstract: The invention relates to a method and an arrangement for measuring the ambient temperature in barely accessible or hazardous locations, in particular in the proximity of textile, paper or similar webs or other work pieces or materials being conveyed, of which at least one property is determined by means of a methodical system, which requires at least the direct ambient temperature as a comparative or reference value. According to the invention, a pyrometric radiation meter known per se is used. A thermal radiator in thermal balance with the environment is positioned directly proximate to the material web. Detection of the heat radiation spectrum and hence an indirect determination of the ambient temperature is carried out by means of the pyrometer via said thermal radiator.

Abstract: A radiation thermometer capable of precise measurement without depending upon an absolute precision of an infrared ray sensor for detecting infrared ray or a temperature sensor for measuring a temperature of the infrared ray sensor is provided wherein, controlling means retains a reference temperature for the measurement object, a sensor reference temperature for the sensor, and a sensor reference output for the sensor output when infrared ray radiated from the object of measurement having the object of measurement reference temperature is detected by the infrared ray sensor having the sensor reference temperature, and calculates the temperature of measurement object based on a first difference as a difference between a sensor temperature to be measured by the sensor temperature measuring portion and a sensor reference temperature, a second difference as a difference between a sensor output to be detected by the infrared ray sensor and a sensor reference output and the object of measurement reference temperat

Abstract: To provide a radiation thermometer capable of measuring a body temperature more accurately than it has been conventionally possible, by taking into account an infrared ray that is emitted from a front end of the probe portion and reflected from an eardrum or an external acoustic opening. The radiation thermometer has body temperature calculating means for calculating a body temperature according to a predetermined arithmetic expression based on an emissivity when the emissivity of the eardrum or the external acoustic opening is less than 1, an output of infrared-ray detecting means and an output of temperature-measuring means.

Abstract: An infrared sensing element of the present invention includes a base including a thin film portion and a thick wall portion arranged around the thin film portion, and a thermopile including a plurality of thermocouples connected in series so that cold junctions are located on the thick wall portion and hot junctions are located on the thin film portion, wherein a thermosensitive portion is provided in contact with the thick wall portion so that a reference temperature with high accuracy can be used for determining temperature based on output from the thermopile. A PN junction formed on a semiconductor substrate serves as the thermosensitive portion, and it is used to provide for a compact infrared sensing element with high performance at low cost.

Abstract: In a data carrier (1) having an electrical circuit (2), indication means (3) are implemented by means of the electrical circuit (2), which means are arranged so as to determine the occurrence of a change in a parameter influencing the data carrier (1) in relation to at least one threshold value, the at least one threshold value dividing a first parameter range from a second parameter range, and which means are arranged so as to give a permanent indication of the change during the time following the first occurrence of said change.

Abstract: A body temperature detector is particularly suited to axillary temperature measurements of adults. The radiation sensor views a target surface area of the body and electronics compute an internal temperature of the body as a function of ambient temperature and sensed surface temperature. The function includes a weighted difference of surface temperature and ambient temperature, the weighting being varied with target temperature to account for varying perfusion rate. Preferably, the coefficient varies from a normal of about 0.13 through a range to include 0.09. The ambient temperature used in the function is assumed at about 80° F. but modified with detector temperature weighted by 20%.

Abstract: An infrared radiation ear thermometer has an optical system, an infrared detector, an ambient temperature sensor, and display unit, a signal processing section. Wherein, the infrared detector further includes an infrared sensor and a temperature reference sensor; the infrared sensor is deposition on the substrate and the temperature reference sensor is mount near the substrate of the infrared detector to convert the infrared signal into an electrical signal and sense the reference temperature separately. The ambient temperature sensor is set in the space near the optical system to detect the fast change of the ambient temperature. The signal processing section receives the signals from these temperature sensors to produce an offset by a mathematical algorithm. The offset is used to correct the temperature reading and maintain a high precision even though the ear thermometer suffers from an extreme temperature change.

Abstract: A system and method for determining the stray radiation within a heating chamber of a thermal processing apparatus. The stray radiation is determined by moving a generally unheated wafer vertically through the heating chamber, and measuring with a detector the amount of radiation reflected from the wafer at each vertical wafer position. The total measured radiation is then correlated with the stray radiation component of the total radiation.

Abstract: A body temperature detector is particularly suited to axillary temperature measurements of adults. The radiation sensor views a target surface area of the body and electronics compute an internal temperature of the body as a function of ambient temperature and sensed surface temperature. The function includes a weighted difference of surface temperature and ambient temperature, the weighting being varied with target temperature to account for varying perfusion rate. Preferably, the coefficient varies from a normal of about 0.13 through a range to include 0.09. The ambient temperature used in the function is assumed at about 80° F. but modified with detector temperature weighted by 20%.

Abstract: An infrared temperature wave guide device that is adapted for use in all kinds of precision detecting and temperature sensing apparatus directed to apply in a contact or non-contact manner measuring, control, recording, monitoring, and inspecting on a temperature source to be measured, the structure including a wave guide tube, a housing accommodating a thermopile, a thermistor, and a circuit board, and a rear cap for securing purposes. A front end of the wave guide tube is provided with a cover to prevent entry of dusts. The housing and rear cap are formed from plastic material. The connection of the housing and the rear cap is suitably adjustable to allow mounting of different thermopiles. The structure as a whole is durable, light and compact, and has longer service life, preferred anti-oxidization capability. Besides, it ensures stable quality during mass production and is easy to process.

Abstract: The invention relates to a method of thermal compensation of a thermopile arranged in a sensor housing, characterised in that it implements:

Abstract: A radiation detector for axillary temperature measurement comprises a wand having an axially directed radiation sensor at one end and an offset handle at the opposite end. The radiation sensor is mounted within a heat sink and retained by an elastomer in compression. The radiation sensor views a target surface through an emissivity compensating cup and a plastic film. A variable reference is applied to a radiation sensor and amplifier circuit in order to maintain full analog-to-digital converter resolution over design ranges of target and sensor temperature with the sensor temperature either above or below target temperature.

Abstract: The present invention relates to a combustion temperature sensor, and, more particularly, to a combustion temperature sensor that measures infrared energy emitted at several preselected wavelengths from a flame and/or a flame's hot gas at a turbine inlet location and applies the energy signals to a calculation model to yield temperature.

Abstract: A system and method for determining the reflectivity of a workpiece during processing in a heating chamber of a thermal processing apparatus. The system first determines directly the reflectivity of the workpiece outside of the heating chamber of the thermal processing apparatus, and then determines the reflectivity of the workpiece during processing within the heating chamber of the thermal processing apparatus by correlating the ex situ wafer reflectivity with the intensity of the radiation reflected from the wafer within the heating chamber.

Abstract: The present invention relates to a combustion temperature sensor, and, more particularly, to a combustion temperature sensor that measures infrared energy emitted at several preselected wavelengths from a flame and/or a flame's hot gas at a turbine inlet location and applies the energy signals to a calculation model to yield temperature.

Abstract: A non-contact temperature sensor includes a holder serving as a light conducting portion for guiding infrared rays incident from a first opening at its one end; a plastic film arranged at a second opening of the other end of tile light conducting portion; a cover for sealing the second opening at the other end of the holder so as to provide a space between itself and the plastic film, an infrared ray detection heat-sensitive element arranged on the side of the space of the plastic film, for detecting the infrared rays incident from the first opening; and a temperature compensating heat-sensitive means arranged in the vicinity of the holder, for detecting the temperature of the holder. In this configuration, the surface temperature of the body-to-be-detected can be precisely detected in a short time.

Abstract: An infrared sensing element of the present invention includes a base including a thin film portion and a thick wall portion arranged around the thin film portion, and a thermopile including a plurality of thermocouples connected in series so that cold junctions are located on the thick wall portion and hot junctions are located on the thin film portion, wherein a thermosensitive portion is provided in contact with the thick wall portion so that a reference temperature with high accuracy can be used for determining temperature based on output from the thermopile. A PN junction formed on a semiconductor substrate serves as the thermosensitive portion, and it is used to provide for a compact infrared sensing element with high performance at low cost.

Abstract: A radiation thermometer that avoids deterioration of measurement accuracy or loss of hygiene due to a dirty front end of a probe portion of the radiation thermometer, lowers running costs which are created if a probe cover is used, and reduces the labor of procuring the probe cover. To this end, the front end of the probe portion of the radiation thermometer has a waterproof structure so that the front end of the probe portion can be wiped with alcohol or the like.

Abstract: Thermopile detector and method for fabricating the same, the method including the steps of (1) forming a diaphragm film on a substrate, (2) forming thermocouples in a given region on the diaphragm film, (3) forming a protection film on the thermocouples, (4) forming a photoresist on the protection film and removing the photoresist from a given region, (5) forming a black body on an entire surface including the photoresist and removing the remaining photoresist and the black body on the photoresist, and (6) removing a portion of the substrate from a given region of a back-side of the substrate, to expose the diaphragm film, thereby facilitating a compatibility of fabrication process with an existing semiconductor fabrication process#(a CMOS fabrication process), whereby improving a mass production capability, preventing a damage to the diaphragm film occurred in formation of the black body, and controlling a property of the black body uniform.

Abstract: A body temperature detector is particularly suited to axillary temperature measurements of adults. The radiation sensor views a target surface area of the body and electronics compute an internal temperature of the body as a function of ambient temperature and sensed surface temperature. The function includes a weighted difference of surface temperature and ambient temperature, the weighting being varied with target temperature to account for varying perfusion rate. Preferably, the coefficient varies from a normal of about 0.13 through a range to include 0.09. The ambient temperature used in the function is assumed at about 80° F. but modified with detector temperature weighted by 20%.

Abstract: Body temperature measurements are obtained by scanning a thermal radiation sensor across the side of the forehead over the temporal artery. A peak temperature measurement is processed to compute an internal temperature of the body as a function of ambient temperature and the sensed surface temperature. The function includes a weighted difference of surface temperature and ambient temperature, the weighting being varied with target temperature through a minimum in the range of 96° F. and 100° F. The radiation sensor views the target surface through an emissivity compensating cup which is spaced from the skin by a circular lip of low thermal conductivity.

Abstract: A method of calibrating a radiation thermometer including a radiation sensor that is characterized by a sensitivity (S) and a temperature-responsive resistor that serves as an ambient temperature sensor, the temperature-responsive resistor having at a specified reference temperature a reference resistance (R0).

Abstract: A method for measuring the temperature of a scene using a detector having at least one reference pixel, with an integratable sampling circuit associated with each pixel. Initially, an ambient reference temperature is observed with the reference pixel(s) to provide a parameter, generally voltage, indicative of that temperature to provide a constant voltage output indicating that temperature by varying the sampling circuit integration time. Each non-reference pixel is exposed to different scene and ambient temperatures and the integration time for each set of data for each pixel is recorded. For each pixel, an equation is provided relating integration time to pixel voltage when the ambient temperature and the scene temperature are the same to correct for offsets and an equation is provided relating integration time and offset corrected pixel value to the difference between the ambient temperature and the scene temperature when the ambient temperature and scene temperature differ for correction of responsivity.

Abstract: A radiation detector for axillary temperature measurement comprises a wand having an axially directed radiation sensor at one end and an offset handle at the opposite end. The radiation sensor is mounted within a heat sink and retained by an elastomer in compression. The radiation sensor views a target surface through an emissivity compensating cup and a plastic film. A variable reference is applied to a radiation sensor and amplifier circuit in order to maintain full analog-to-digital converter resolution over design ranges of target and sensor temperature with the sensor temperature either above or below target temperature.

Abstract: A method and device for detecting an incorrect position of a semiconductor wafer during a high-temperature treatment of the semiconductor water in a quartz chamber which is heated by IR radiators, has the semiconductor wafer lying on a rotating support and being held at a specific temperature with the aid of a control system. Thermal radiation which is emitted by the semiconductor wafer and the IR radiators is recorded using a pyrometer. The radiation temperature of the recorded thermal radiation is determined. The semiconductor wafer is assumed to be in an incorrect position if the temperature of the recorded thermal radiation fluctuates to such an extent over the course of time that the fluctuation width lies outside a fluctuation range &Dgr;T which is regarded as permissible.

Abstract: The invention is directed to a thermopile sensor and in particular to a radiation thermometer or a motion detector with a thermopile sensor. The thermopile sensor includes a thermopile supported in a housing. The thermal capacity of the cold and hot junctions of the thermopile including its supporting structure and the thermal conductivity of the supporting structure are mutually coordinated such that a change in the housing's temperature produces a change of equal magnitude in the cold and hot junctions' temperature, that is, no temperature gradients occur within the thermopile.

Abstract: A radiation thermometer is rationally adjusted during manufacturing processes instead of requiring a user to manually adjust the radiation thermometer each time a temperature is measured, and hence, the radiation thermometer better improves temperature measurement accuracy.

Abstract: The shutter construction of a tympanic thermometer comprises a base formed with a horizontal groove and a vertical slot that communicate with each other, wherein said horizontal groove is for mounting a wave guiding duct; a supporting frame formed at the rear end of said base and formed with at least a first engaging portion and at least a second engaging portion; a shutter plate mounted in said vertical slot for closing said wave guiding duct; a linking element, the fore end of the linking element being coupled to the lower portion of said shutter plate and the rear end of the linking element being engaged with said first engaging portion of said supporting frame so that the fore end of the linking element can be swayed up and down relative to the rear end thereof; a spring element, the fore end of the spring element being coupled to said linking element; and an actuating element, the fore end of the actuating element being engaged with said second engaging portion of said supporting frame and the rear end o

Abstract: A cable and interconnect design including a substrate containing discrete sensors in a plurality of cavities or a plurality of thin film sensors deposited throughout the substrate surface. The discrete sensors are bonded within each cavity and potted with a potting compound. Each sensor has leads joined to filaments by an interconnect system. Thin film sensor leads on the substrate connect to a signal transmitting cable by the interconnect system. The filaments are coated and converge at a strain relief coupled to the substrate. The cable, having flat and round portions, includes an array of flat signal transmitting cables arranged side by side in the flat portion and stacked one on top of the other in the round portion. Each signal cable contains a plurality of the filaments bonded together. A pair of ribbons extend along the length of the array of cables. The ribbons and array of cables are bonded together with film to form the flat portion.

Abstract: A radiation clinical thermometer that measures body temperature within a short period of time. The radiation clinical thermometer includes an infrared sensor for outputting an infrared detection signal upon reception of thermal radiations from an object to be measured, optical wave-guide structure for guiding the thermal radiations from the object to be measured to the infrared sensor, a temperature sensor for measuring a reference temperature and outputting a reference temperature signal, temperature difference structure for detecting a temperature difference between the infrared sensor and the optical wave-guide structure and outputting a temperature difference signal, and temperature calculation structure for receiving the infrared detection signal, the reference temperature signal, and the temperature difference signal in calculating a temperature data signal by correcting an error based on the temperature difference.

Abstract: The invention is directed to a probe tip (10) for a radiation thermometer in which the infrared radiation to be measured is directed through a waveguide device (12) to a radiation sensor (14) that converts the incident radiation into an electrical output signal from which the target temperature is determined by means of a downstream electronic measurement circuitry. To reduce temperature gradients in the sensor (14), the invention provides for the sensor housing (16) to be thermally coupled to the waveguide device (12) via a thermal coupling arrangement (24, 28, 30), such that the waveguide device is in direct thermal contact with the side of the sensor housing (16) close to the radiation and the opposite side thereof via the thermal coupling arrangement (24, 28, 30). Preferably, the thermal coupling arrangement (24, 28, 30) which is made of a material conducting heat well has substantially its entire surface area in abutting engagement with the corresponding sides of the sensor housing (16).

Abstract: The invention is directed to a method of computing the radiation temperature of a body from the signals of a radiation and an ambient temperature sensor, and further to a radiation thermometer, in particular a clinical radiation thermometer. In the method of the present invention, computation of the temperature is not using the Stefan Boltzmann law, but rather, a polynomial is used, preferably a third-degree polynomial, which is adjusted to the radiation-optical properties of the thermometer in the relevant wavelength range. The reciprocal value of the sensitivity of the radiation sensor is preferably represented as a polynomial as well. In this manner, the computation of a fourth root or divisions which are otherwise customary are avoided, enabling the necessary computations to be also performed, for example, by a 4-bit microprocessor with great speed.

Abstract: The radiation clinical thermometer of the present invention is provided with a light guide tube 15 to guide the infrared radiation from the temperature-measured object, a first infrared sensor 10 for detecting the infrared radiation from the light guide tube 15, a temperature sensitive sensor 12 which generates a reference temperature signal, a reference cavity 17 which has approximately the same temperature condition as the light guide tube 15 and is sealed so as to shut out infrared radiation from outside, a second infrared sensor 11 for detecting the infrared radiation from the reference cavity 17, a temperature computing means 13 for calculating temperature in accordance with the signals from the first infrared sensor 10 and the second infrared sensor 11, a temperature sensitive sensor 12, and a display unit 14 for displaying temperature in accordance with the signal from the temperature computing means 13; and at least either the light guide tube 15 or the reference cavity 17 is tapered off toward the em

Abstract: The combination in an instrument of a multimeter and an instrument having apparatus for determining a non-contact measurement of radiation perceived at a distance from a surface. The instrument may further have an apparatus for determining temperature of that surface by direct contact therewith. The non-contact apparatus may have optical sighting means and laser sighting means, and means for determining emissivity of the surface. Provision may be made for recording data, e.g. a data logger. Audio output may be provided in accordance with temperature determinations, and may include speech synthesizing. Conveniently, the instrument is adapted for holding in the hand, for example by a pistol-grip handle, and/or for mounting on a tripod as well as a threaded connection with a wrist strap or a tripod. Temperatures derived respectively from infrared radiation, and from direct contact, have separate displays. The multimeter and the temperature instrument may have means for their control by vocal command.

Abstract: A plasma resistant lightpipe is used in a pyrometric temperature measurement system to measure the temperature of a substrate in a reaction chamber. The plasma resistant lightpipe includes two lightpipe elements. The first lightpipe element, which may be a sapphire rod or aluminum nitride rod, is positioned within a backside gas delivery path to the chamber. The first lightpipe element is resistant to etching caused by reactive plasmas or gases used within the chamber, such as fluorine. The second lightpipe, which is a quartz rod, is positioned beneath the first lightpipe element such that the two lightpipe elements are optically coupled. The first lightpipe element may be directly mounted in the base plate or electrostatic chuck of the pedestal assembly or directly mounted in a plug, which is then positioned within the base plate or electrostatic chuck.

Abstract: An ambient temperature learning algorithm provides a series of ambient temperature estimates which are calculated as a function of the induction air temperature as measured by an induction temperature sensor and this series of estimates is then filtered to provide an accurate reading of the actual ambient temperature. To increase the accuracy of the ambient temperature following an engine-off soak period, the initial estimate of the ambient can be made based upon several criteria. If the engine has not run for several hours, the induction system measurement from which the estimates are made is a good starting value. How long the engine has been off can be determined by a soak timer in the vehicle or by comparing the engine coolant temperature with the induction system temperature. If the coolant and induction system temperatures are very close, the soak period can be assumed long enough for the induction temperature to be a good starting point for the learned ambient temperature.

Abstract: This invention relates to an infrared probe of a thermometer. The infrared probe does not need a waveguide to contact with a sensor for transmitting heat. The infrared probe consists of a sensor unit disposed on a sensor base and surrounded by an isolation unit. Standing at this forefront, the sensor unit can detect the infrared rays directly to lead a precise measurement. Moreover, the cost will be reduced without disposing a waveguide tube on the sensor.

Abstract: A tube 12 made of stainless steel is arranged in a thermal bath 13 and an AC current is supplied to the tube to apply an AC heat directly to the tube and a liquid sample contained therein. An AC temperature of the tube 12 is detected by a thermocouple 19. An amplitude of the AC heat, and a phase difference between the AC heat and the AC temperature are detected. The above measurement is performed for the vacant tube, the standard liquid sample containing tube and the liquid sample containing tube to derive amplitudes .DELTA.T.sub.c, .DELTA.T.sub.r and .DELTA.T.sub.s and phase differences .phi..sub.c, .phi..sub.r and .phi..sub.s. Then, a heat capacity .rho..sub.s .multidot.C.sub.s per a unit volume of the liquid sample is calculated from a following equation.rho..sub.s .multidot.C.sub.s =[{sin (.phi..sub.s)/.DELTA.T.sub.s -sin (.phi..sub.c)/.DELTA.T.sub.c }/{sin (.phi..sub.r)/.DELTA.T.sub.r -sin (.phi..sub.c)/.DELTA.T.sub.c }].rho..sub.rwherein C.sub.r and .rho..sub.

Abstract: A body temperature detector is particularly suited to axillary temperature measurements of adults. The radiation sensor views a target surface area of the body and electronics compute an internal temperature of the body as a function of ambient temperature and sensed surface temperature. The function includes a weighted difference of surface temperature and ambient temperature, the weighting being varied with target temperature to account for varying perfusion rate. Preferably, the coefficient varies from a normal of about 0.13 through a range to include 0.09. The ambient temperature used in the function is assumed at about 80.degree. F. but modified with detector temperature weighted by 20%.

Abstract: This invention concerns a noncontacting type thermometer which is improved in sensitivity of detection and accuracy of measurement and meanwhile adapted to prevent a thermistor element itself from self-generation of heat. A pulse voltage generating circuit 15 generates a pulse voltage of a rectangular waveform having a pulse wave height, a pulse width, and a pulse cycle enough to render negligible the effects of the self-generation of heat of a thermistor bolometer element in accordance with the thermal capacity of the thermistor bolometer. A detecting circuit 20 admits the pulse voltage, generates a differential voltage arising from a change in the magnitude of resistance corresponding to the amount of an incident infrared radiation of an infrared radiation detecting thermistor bolometer element RA, and amplifies this differential voltage by means of a differential amplifier 24.

Abstract: An infrared detector is positioned in a probe having leads which connect to a standard hand-held voltmeter. The detected voltage may indicate the difference between a target temperature surface and ambient temperature. For more accurate sensing of ambient temperature, a thermocouple may be connected in series with the thermopile with one junction at the thermopile cold junction temperature and another junction sensing ambient temperature. The ambient temperature may be that temperature surrounding the infrared detector or the temperature of the environment surrounding the meter. The infrared detector may be calibrated to provide a direct reading of temperature degrees by a factor of ten on the voltage scale of the meter. To that end, multiple thermocouples may be connected in series, each with a junction responding to ambient temperature and a junction responding to thermopile cold junction temperature.

Abstract: A radiation detector for axillary temperature measurement comprises a wand having an axially directed radiation sensor at one end and an offset handle at the opposite end. The radiation sensor is mounted within a heat sink and retained by an elastomer in compression. The radiation sensor views a target surface through an emissivity compensating cup and a plastic film. A variable reference is applied to a radiation sensor and amplifier circuit in order to maintain full analog-to-digital converter resolution over design ranges of target and sensor temperature with the sensor temperature either above or below target temperature.

Abstract: This invention is a fiber-based multi-color pyrometry set-up for real-time non-contact temperature and emissivity measurement. The system includes a single optical fiber to collect radiation emitted by a target, a reflective rotating chopper to split the collected radiation into two or more paths while modulating the radiation for lock-in amplification (i.e., phase-sensitive detection), at least two detectors possibly of different spectral bandwidths with or without filters to limit the wavelength regions detected and optics to direct and focus the radiation onto the sensitive areas of the detectors. A computer algorithm is used to calculate the true temperature and emissivity of a target based on blackbody calibrations. The system components are enclosed in a light-tight housing, with provision for the fiber to extend outside to collect the radiation.

Abstract: An apparatus for processing a substrate wafer wherein the apparatus includes a reaction chamber, a wafer holder intended to hold the substrate wafer, and a susceptor. A temperature sensor, preferably a thermocouple with two junctions, is provided for measuring the difference between the temperatures at the site of the susceptor and at a site between the susceptor and the substrate wafer.

Abstract: An apparatus and method for measuring a food temperature in a microwave oven makes it possible to precisely measure a temperature of food placed in a microwave oven by providing thereto a simple circuit composition in order to carry out the measurement without regard to kinds of food, cooking, heating device or temperature variation therearound. The apparatus and method realizes a simplified temperature measuring apparatus, thereby facilitating miniaturization thereof and reinforcing price competitiveness, wherein the compensation voltage variation with regard to an ambient temperature variation is adjusted to disclose a linear characteristic, and a new output voltage is generated using a final output voltage and a compensation voltage in a temperature range in which the compensation voltage is non-linearly disclosed in accordance with the variation of the ambient temperature, thereby precisely compensating the ambient temperature which is variable in a wide range thereof.

Abstract: An absolute radiation thermometer capable of evaluating the absolute value of infrared radiation power emitted from a target and received by a radiation sensor by means of electrical calibration, and calculating the temperature of the target basing on the responsive signal generated in the radiation sensor. To solve "Microphonic" problem, two identical sensors connected in parallel with the polarized orientations of their pyroelectric layers being in opposite directions so as to cancel the piezoelectric signals generated in the two sensors are used. Further, by using a floating power supply, which is isolated from the system power supply of the thermometer, for performing electrical heating, power supply noise can be greatly reduced.