Abstract: A system for monitoring the temperature prevailing in the stator unit of an electric drive includes a temperature sensor that is integrated into the windings of the stator unit and that transmits a temperature-dependent sensor signal. The sensor signal may be injected via an electrical transmitter unit into the signal processing unit of a position measuring device connected to the drive.

Abstract: A system is disclosed for adjusting a gas turbine firing temperature control algorithm and combustion reference temperature algorithms based on exhaust gas temperature, turbine pressure ratio and compressor discharge temperature for water content in the air entering the compressor differing from the design water content of ambient air. The water content in the ambient air is calculated by the control system from measured data from a dry bulb temperature sensor and a wet bulb temperature or humidity sensor.

Abstract: A plurality of system checks on a turbine component inspection system are monitored, and an end user interface element to cause an inspection of a turbine component to commence is enabled only upon determining based on the monitored system checks that the inspection system is in a predetermined state of readiness, thereby ensuring each turbine component inspected is stimulated with thermal stimulus having the same characteristics. Further, a binary passed or failed indicator is displayed to unequivocally inform the operator whether a turbine component being inspected passed or failed the inspection. In a preferred embodiment, thermal images of a turbine component's response to applied thermal stimulus, as well as status of automatically launched quantitatively analyses on the turbine component's response to the applied thermal stimulus are also displayed.

Abstract: A method that utilizes a dispersion-shifted fiber having compound compositions with different temperature coefficients in core to simultaneously measure the distributed strain and temperature based on Brillouin frequency shift is disclosed. The present method includes the steps of obtaining mean two peak frequencies in a multi-peak Brillouin spectrum of the dispersion-shifted fiber, determining a temperature change according to the formula of a Brillouin frequency shift of the peak relating to strain and temperature conditions of the fiber, and determining a strain change through the formula. In a 3682-m sensing length of Large-Effective-Area NZ-DS fiber, a temperature resolution of 5° C., a strain resolution of 60 &mgr;&egr; and a spatial resolution of 2 m are achieve simultaneously.

Abstract: A device for monitoring a milk tank. The device is provided with a monitoring unit comprising a computer and a memory for at least temporarily storing data, a thermometer for measuring the temperature of a fluid present in the milk tank, and for supplying to the monitoring unit a temperature signal that is indicative of the measured temperature, and with a meter for measuring an electrical parameter, such as the conductivity, of the fluid present in the milk tank and for supplying to the monitoring unit a parameter signal that is indicative of the measured electrical parameter.

Abstract: Pollution caused by chemical pollutants can be estimated automatically. A chemical pollutants detecting unit 60 installed in a duct 33 includes a supporting shaft 61, which is inserted into a sidewall 11a of a housing, for supporting the chemical pollutants detecting unit 60, a quartz crystal microbalance 62 for detecting organic matters in a clean air 53 passing through the duct 33, an oscillating circuit 63 for oscillating the quartz crystal microbalance 62, an oscillation frequency detecting block 64, a chemical pollutants calculating block 65, a controller 66, an output unit 67, a heater 68 for heating the quartz crystal microbalance 62, and a thermo-hygrometer 70. A chemical filter is examined automatically whether an ability of removing the chemical pollutants thereby is degraded or not. If the ability is found to have been degraded, efficiency in an IC manufacturing method can be prevented from being degraded by issuing an alarming signal beforehand.

Abstract: A sensor unit comprises a mounting base (1) on which an air moisture sensor (3) and an air temperature sensor (4) are disposed. The air moisture sensor (3) is disposed over a bore (5) of the mounting base and covers the bore (5) at least partially. An intensive thermal coupling between the air moisture sensor (3), air temperature sensor (4) and air mixture to be analysed is produced.

Abstract: An RTD assembly includes a resistance temperature detector having two outputs, and a pair of electrical conductors including a first end and a second end. The electrical conductors are electrically connected at the second end thereof to the outputs of the resistance temperature detector. An electrically insulating polytetrafluoroethylene body, such as Teflon®, includes a closed end, a cavity and an open end. The resistance temperature detector is disposed within the cavity of the electrically insulating body and proximate the closed end thereof. The electrical conductors extend from the cavity of the electrically insulating body with the first end of the electrical conductors being external to the electrically insulating body. A cured potting compound is disposed within the cavity of the electrically insulating body and about the resistance temperature detector and the second end of the electrical conductors.

Abstract: The invention relates to a device for measuring the temperature of an oil in a housing (4) of a transmission (2) with a temperature sensor (20) which can come into contact with the oil. The temperature sensor (20) is arranged outside the oil sump (16) in the transmission housing (4) and is preferably integrated directly in the transmission controller (18).

Abstract: A method of measuring the effective temperature inside a sealed container having a headspace is provided. A liquid solvent is added to the container, and a solid compound is added to the liquid solvent to create a saturated solution. Vapor of the saturated solution is allowed to equilibrate in the headspace of the sealed container, and a volume thereof is transferred to a chromatographic column, where chromatographic readings of the equilibrated vapor are taken. A temperature within the sealed container is then calculated based upon the chromatographic readings of the equilibrated vapor, wherein the temperature calculation is based upon the concentrations of the liquid solvent and the solid compound in the equilibrated vapor.

Abstract: There is provided a temperature control system for a humidity sensor, which is capable of eliminating impurities attached to a sensor element of the sensor efficiently and sufficiently while preventing the sensor element from being cracked due to heat generated by a heater in a state of condensation formed thereon, and suppressing attachment of impurities to the sensor element, thereby making it possible to preserve an excellent detection accuracy of the humidity sensor. The temperature control system controls the temperature of the sensor element of the humidity sensor arranged in an exhaust pipe for detecting humidity within the exhaust pipe. A heater heats the sensor element. The temperature of the sensor element is detected. When the detected temperature of the sensor element is higher than a predetermined temperature, said heater is operated.

Abstract: An apparatus for measuring outdoor temperature and humidity includes a box type body which has a flat LCD screen located on one side, and a temperature sensor and a humidity sensor located on the surface thereof. The body includes a control circuit. The temperature sensor and humidity sensor, a temperature and humidity measuring circuit and LCD screen are integrated in one set. The body may be mounted on the exterior of a glass window by means of a fastening section located on the body without assistance of skilled professionals. Thus installation time and costs and wiring expenses may be saved. Outdoor temperature and humidity may be directly known indoors.

Abstract: A cooking pot comprises a container area. A plurality of markings are located on the container area to indicate different measurement levels of the container area. A handle section is coupled to the container area.

Abstract: An estimated brake rotor temperature is provided including a cooling effect during active braking as well as when braking is inactive. The cooling effect is based on a difference between the rotor temperature and sensed ambient temperature and is also preferably based on wheel speed. In an active braking mode, a heating effect is provided based at least on sensed wheel speed. If no brake pressure signal is available, the heating effect is further based on vehicle deceleration. The heating effects for front and rear brake units are relatively compensated for differences in heat generation due to load shifts during braking, the compensation being preferably based on vehicle deceleration. The brake rotor temperature estimation is realized in a programmed digital computer but does not use computer resource hungry exponential functions.

Abstract: A method that utilizes a dispersion-shifted fiber having compound compositions with different temperature coefficients in core to simultaneously measure the distributed strain and temperature based on Brillouin frequency shift is disclosed. The present method includes the steps of obtaining mean two peak frequencies in a multi-peak Brillouin spectrum of the dispersion-shifted fiber, determining a temperature change according to the formula of a Brillouin frequency shift of the peak relating to strain and temperature conditions of the fiber, and determining a strain change through the formula. In a 3682-m sensing length of Large-Effective-Area NZ-DS fiber, a temperature resolution of 5° C., a strain resolution of 60 &mgr;&egr; and a spatial resolution of 2 m are achieve simultaneously.

Abstract: This invention provides a method and apparatus for utilizing an inductive coil fluid level sensor to measure the temperature of the fuel, or fuel vapors, in a fuel tank depending upon the location of the sensor within the tank. The inductive coil sensor is connected to a Fuel Control Unit containing the sensor electronics to drive the inductive coil sensor and read the corresponding fuel or fuel vapor temperature.

Abstract: An oven analyzer for profiling a conveyor oven is disclosed that accurately and precisely determines the physical characteristics of an oven and stores such information so that it can be outputted to a computer for analysis. In one embodiment, the oven analyzer includes a pallet that moves through the conveyor oven. The pallet houses an electronic data logger that is coupled to multiple sensors. The electronic data logger has memory for storing information obtained from the sensors. A first sensor is a temperature sensor that detects the ambient temperature within the oven. A second sensor is mounted within a metal mass of known thermal characteristics and detects the ovens ability to heat an object. A third sensor detects the position of the pallet within the oven. The electronic data logger stores the data received from the sensors in the memory for selective output to a computer for analysis or printing.

Abstract: A vehicle tire is provided that contains at least one temperature sensor embedded in the tire in a critical location, and a transmission unit for transferring the output signal of the temperature sensor to a location externally of the vehicle tire. A method is also provided for precisely measuring the temperature of a vehicle tire with such a temperature sensor. A method is also provided for monitoring the operation of the vehicle tire.

Abstract: A sensor link is disclosed that simplifies connections between multiple temperature sensors positioned on a test board and a data logger that stores temperature information received from the temperature sensors while passing through the conveyor oven. In one embodiment, the sensor link includes multiple input ports for connecting to the temperature sensors. Conductors within the sensor link connect the multiple temperature sensors to an output port. In one aspect, a single cable extends between the sensor link and a data logger. The data logger stores temperature information received from the temperature sensors while the test board is passed through a conveyor oven. The sensor link can also have additional temperature sensors for providing additional temperature information about the conveyor oven. For example, an ambient temperature sensor may be positioned on the sensor link to provide the ambient temperature of the conveyor oven.

Abstract: Device and a process for generating a signal dependent upon a liquid film on a surface. The device includes one of a heating arrangement and a cooling arrangement for subjecting a portion of the liquid film to a temperature change, a temperature measuring arrangement for determining the temperature of the liquid film, the temperature measurement arrangement being capable of producing a signal, and a control and evaluation device for controlling one of the heating arrangement and the cooling arrangement and the temperature measuring arrangement. The process includes subjecting a portion of the liquid film to a temperature change using one of a heating and a cooling arrangement, measuring a temperature of the portion using a temperature measuring arrangement, assigning a value which corresponds to a thickness of the liquid film to the temperature change using an evaluation device, and producing a signal.

Abstract: A clock for the attachment of a dog's collar or the like that indicates the passage of time according to the dog's or pet's frame of reference. For example, the rate of passage of time may be such that for each human day of time passage, seven dog or pet days are reflected by the clock's display. Additional data, displays, and information may be carried, manipulated, entered and chosen by the use of user control buttons or the like. A battery may supply power to internal circuitry that drives a display of liquid crystals (LCD). The data carried by the pet chronometer and identification tag may be held in EEPROM such that a power failure does not erase the data. This is particularly useful for any health data or contact information that is incorporated or recorded into the pet chronometer and identification tag.

Abstract: A status detection apparatus for electrical equipment includes a plurality of distributed multiparameter sensors in a containment vessel or other fluid filled region of the electrical equipment. The sensors are capable of providing data relating to plural parameters of the fluid simultaneously at different positions in the fluid. The data provided by the sensors can be processed to permit localization of incipient faults or can indicate other operating states when combined with known flow data of the fluid through the electrical equipment. A method for detecting status of electrical equipment includes sensing parameters simultaneously at multiple locations in the fluid and determining operating status based on the sensed parameters.

Abstract: A sensor array includes a plurality of sensors connected to two or more groups of wires such that individual sensors can be addressed. No two sensors are connected to the same two wires. The groups of wires are connected to multiplexers or the like to address particular wires connecting a unique sensor. Dramatically improved accuracy is obtained by connecting rectifiers in series with the sensors to significantly reduce reverse current through a sensor that can lead to significant errors.

Abstract: A thermowell assembly (20) shown in FIG. 2 is positioned in a pipeline (10) for sensing the temperature of the fluid medium in the pipeline (10) for transmitting the sensed temperature to a meter (12). A temperature sensing probe is received within a temperature conducting tube (36) forming a thermowell and having a plurality of annular fins (40) extending thereabout. In the embodiments of FIGS. 1-7, a liquid (50) is provided in an annular space between the thermocouple (28) and the temperature conducting tube (36). Non-metallic members (70, 74, 80) are positioned between the pipeline (10) and the temperature transmitting tube (36) to isolate thermocouple (28) from ambient changes in the temperature of metal pipeline (10) which may result in an error in the temperature of the flow medium sensed by the thermowell assembly (20). High temperature embodiments shown in FIGS.

Abstract: A heat transfer monitoring and/or measuring device, especially a flow indicator for media flowing through a pipe (1), tank or fitting, with a sensor housing (2) and with two sensor elements (3, 4), the sensor elements (3, 4) each having a metallic sensor surface (5) which comes into contact with the flowing medium. In the flow indicator, the problem “deposition or formation” of disruptive layers on the sensor surfaces (5) of the sensor elements (3, 4) is solved by the element (3) which is made as a heating element having an electrically conductive protective lead (6) and by the protective lead (6) forming a closed protective circuit which includes the pipe (1), tank, or the fitting, the flowing medium and the sensor element (3).

Abstract: The resistance of an air-fuel-ratio sensor element is determined from current detected before changing an applied voltage to the sensor and current detected when a predetermined period elapses after changing the applied voltage to the sensor. A resistence detector includes operational amplifiers, resistors and transistors. The applied voltage is changed by switching the transistors to more accurately detect a resistance value.

Abstract: A measuring device for calculating the depth of a liquid in a container comprises a dipstick, a plurality of indicia on the dipstick and a thermometer on the elongate member which measures the temperature of the liquid in the container such that the temperature and depth of the liquid is measured. A method of measuring liquid providing an elongate member inserted within a container of liquid such that the elongate member engages a bottom surface of the container. Providing a temperature sensor on the elongate member such that the temperature sensor is submerged in the liquid and reading the temperature of the liquid on a display which displays the temperature sensed by the temperature sensor. Removing the elongate member from the container, locating an imprint from the liquid and reading the level of liquid in the container on a plurality of indicia on the elongate member.

Abstract: Provided are mass and heat flow measurement sensors comprising a microresonator, such as a quartz crystal microbalance; a heat flow sensor; and a heat sink coupled thermally to the heat flow sensor. The sensors may be used to measure changes in mass due to a sample on a surface of the microresonator and also to measure heat flow from the sample on the surface of the microresonator by utilizing the heat flow sensor, which is coupled thermally to the microresonator. Also provided are methods for measuring the mass of a sample, such as a gas, and the flow of heat from the sample to the heat sink by utilizing such mass and heat flow measurement sensors.

Abstract: A lightweight elongate flexible temperature probe includes several temperature sensors embedded inside multiple layers of a thin film polyimide or polyester in which two of the layers are thin film copper etched to form conductors to the sensors. The conductors are in abutting electrical contact with the sensors.

Abstract: A device provided in an exhaust system of an internal combustion engine in order to detect exhaust gas temperature. The device includes an oxygen sensor which has a sense element outboard of a heater element. The oxygen sensor is further designed to incorporate a temperature sensing element on the outboard of the sense element. The temperature sensing element optimizes the detection of the exhaust gas temperature, thereby providing efficient operation of the engine.

Abstract: A system is disclosed for adjusting a gas turbine firing temperature control algorithm and combustion reference temperature algorithms based on exhaust gas temperature, turbine pressure ratio and compressor discharge temperature for water content in the air entering the compressor differing from the design water content of ambient air. The water content in the ambient air is calculated by the control system from measured data from a dry bulb temperature sensor and a wet bulb temperature or humidity sensor.

Abstract: The present invention relates to a method and device for a self orienting floating apparatus which utilizes an external magnetic field to maintain a constant orientation, and specifically relates to a plain form hydrometer, a floating thermometer, and a thermohydrometer that continuously display a graduated scale in an operator pre-determined direction.

Abstract: The present invention is directed to a constituent sensing system including a container for holding a flowable product. A moveable member is positioned within the container for moving the flowable product within the container in a manner which simulates a flow of the flowable product. A probe is positioned proximate to the moving flowable product for analyzing the moving flowable product.

Abstract: A test wafer for use in temperature prediction is prepared. The test wafer includes: first semiconductor layer formed in a crystalline state; second semiconductor layer formed in an amorphous state on the first semiconductor layer; and passivation film formed over the second semiconductor layer. Next, the test wafer is loaded into a device fabrication system and then heated therein at a predetermined period of time. Thereafter, a recovery rate, at which part of the second semiconductor layer recovers from the amorphous state to the crystalline state at the interface with the first semiconductor layer, is calculated. Then, a temperature of the test wafer that has been heated is measured according to a relationship between the recovery rate and a temperature corresponding to the recovery rate.

Abstract: Sub-micron chemical analysis of the surface and sub-surface of a sample material is performed at, above or under atmospheric pressure, or on for a sample material submerged in a substance. A thermal and/or topographic image of the surface of the sample material is obtained. A location for study is selected using the image. The activation device is positioned over the selected location and surface and/or sub-surface products are ablated, desorbed or decomposed from the sample material to a chemical analyzer for analysis.

Abstract: The invention provides for a method and device for determining a gas pressure and temperature in a hollow space, including a fuel/air mix in an internal combustion engine combustion chamber. According to the invention, pressure and temperature are detected by means of a measuring element (5) of an ultrasound transducer/pressure sensor combined unit, said measuring element acting both as a pressure measuring element and an ultrasound transducer element to determine temperature. Therefor, said measuring element can be operated at given moments, on one hand as a pressure measuring element and on the other hand as an ultrasound transducer element or continuously, as a pressure measuring element, and furthermore as an ultra-sound transducer element superimposed with the latter. In that case, it is provided that signals should be conveniently separated for the measuring element output signal. The invention can be used, for instance, to determine air volumes for car internal combustion engines.

Abstract: A thermowell assembly (20) shown in FIG. 2 is positioned in a pipeline (10) for sensing the temperature of the fluid medium in the pipeline (10) for transmitting the sensed temperature to a meter (12). A temperature sensing probe is received within a temperature conducting tube (36) forming a thermowell and having a plurality of annular fins (40) extending thereabout. In the embodiments of FIGS. 1-7, a liquid (50) is provided in an annular space between the thermocouple (28) and the temperature conducting tube (36). Non-metallic members (70, 74, 80) are positioned between the pipeline (10) and the temperature transmitting tube (36) to isolate thermocouple (28) from ambient changes in the temperature of metal pipeline (10) which may result in an error in the temperature of the flow medium sensed by the thermowell assembly (20). High temperature embodiments shown in FIGS.

Abstract: A test wafer for use in wafer temperature prediction is prepared. The test wafer includes: first semiconductor layer formed in a crystalline state; second semiconductor layer formed in an amorphous state on the first semiconductor layer; and light absorption film formed over the second semiconductor layer. Next, the test wafer is loaded into a lamp heating system and then irradiating the test wafer with a light emitted from the lamp, thereby heating the second semiconductor layer through the light absorption film. Thereafter, a recovery rate, at which a part of the second semiconductor layer recovers from the amorphous state to the crystalline state at the interface with the first semiconductor layer, is calculated. Then, a temperature of the test wafer that has been irradiated with the light is measured according to a relationship between the recovery rate and a temperature corresponding to the recovery rate.

Abstract: An oven analyzer for profiling a conveyor oven is disclosed that accurately and precisely determines the physical characteristics of an oven and stores such information so that it can be outputted to a computer for analysis. In one embodiment, the oven analyzer includes a pallet that moves through the conveyor oven. The pallet houses an electronic data logger that is coupled to multiple sensors. The electronic data logger has memory for storing information obtained from the sensors. A first sensor is a temperature sensor that detects the ambient temperature within the oven. A second sensor is mounted within a metal mass of known thermal characteristics and detects the ovens ability to heat an object. A third sensor detects the position of the pallet within the oven. The electronic data logger stores the data received from the sensors in the memory for selective output to a computer for analysis or printing.

Abstract: Provided are a measurement apparatus and a measurement system comprising sample and reference microresonators, such as sample and reference quartz crystal microbalances; sample and reference heat flow sensors; and a heat sink coupled thermally to the heat flow sensors. These may be used to measure changes in one or more properties, such as mass, due to a liquid sample on a surface of a sample microresonator and also to measure heat flows from the sample on the surface of the sample microresonator by utilizing the heat flow sensors, which are coupled thermally to the corresponding sample or reference microresonators. Also provided is a method for measuring one or more properties, such as mass, of a liquid sample and the flow of heat from the sample to the heat sink by utilizing such apparatus.

Abstract: A thermowell assembly (20) shown in FIG. 2 is positioned in a pipeline (10) for sensing the temperature of the fluid medium in the pipeline (10) for transmitting the sensed temperature to a meter (12). A temperature sensing probe is received within a temperature conducting tube (36) forming a thermowell and having a plurality of annular fins (40) extending thereabout. In the embodiments of FIGS. 1-7, a liquid (50) is provided in an annular space between the thermocouple (28) and the temperature conducting tube (36). Non-metallic members (70, 28, 80) are positioned between the pipeline (10) and the temperature transmitting tube (36) to isolate thermocouple (28) from ambient changes in the temperature of metal pipeline (10) which may result in an error in the temperature of the flow medium sensed by the thermowell assembly (20). High temperature embodiments shown in FIGS.

Abstract: A sensor used to measure temperature or concentration of a combustible gas. The sensor includes an optical head that picks up infrared information emitted by the combustible gas. The infrared information is conveyed from the optical sensor through a diffracting device onto a strip of photodetectors. A processor receives the information garnered by the photodetectors and determines the concentration and temperature profile of the combustible gas based on a stored thermodynamic model, radiation behavior, varying the thermodynamic parameters, and comparing a calculated spectrum with the measured spectrum. The sensor additionally has elements, such as cooling devices and casing to make it suitable for use with aviation where altitude creates problems with known methods of gas temperature analysis.

Abstract: A portable stress monitor is provided for monitoring conditions under which physiological activity is occurring. The conditions monitored may be environmental, such as ambient temperature and humidity, or physiological, such as heart rate or body temperature. The monitor includes a main body portion and a hinged cover. The hinged cover includes a removable sensor module. One or more sensors are attached to the sensor module, each sensor may be pivotally mounted on a mast, such that the sensors extend outwardly from the hinged cover when the sensor module is in the deployed position and may be pivoted to sit substantially flush with the hinged cover when the sensor module is in the storage position. A central processing unit is contained within the main body, and is operable to process data acquired by the sensors according to a heat strain algorithm. A display is attached to the outer surface of the main body for providing read out information, and an input device is provided for user input.

Abstract: A probe for measuring the viscosity and/or temperature of high temperature liquids, such as molten metals, glass and similar materials comprises a rod which is an acoustical waveguide through which a transducer emits an ultrasonic signal through one end of the probe, and which is reflected from (a) a notch or slit or an interface between two materials of the probe and (b) from the other end of the probe which is in contact with the hot liquid or hot melt, and is detected by the same transducer at the signal emission end. To avoid the harmful effects of introducing a thermally conductive heat sink into the melt, the probe is made of relatively thermally insulative (non-heat-conductive) refractory material. The time between signal emission and reflection, and the amplitude of reflections, are compared against calibration curves to obtain temperature and viscosity values.

Abstract: A method for forming a signal in a device having an internal combustion engine and an associated catalytic converter, the signal representing the instantaneous temperature of the catalytic converter. The internal combustion engine is controllable by an electronic engine control unit as a function of the load, the engine speed and other operating parameters. Air may be supplied to the internal combustion engine via an intake port, whereas the exhaust gases from the internal combustion engine may be carried away via an exhaust duct in which a catalytic converter is arranged. The internal combustion engine may be cooled by a radiator having a coolant circulation. The coolant temperature, the outside air temperature, the load and the engine speed are detected by sensors and corresponding signals are supplied to an electronic control unit. The electronic control unit ascertains the exhaust-gas flow and the exhaust-gas temperature over time by calculation from the load and the engine speed.

Abstract: Provided are mass and heat flow measurement sensors comprising a microresonator, such as a quartz crystal microbalance; a heat flow sensor; and a heat sink coupled thermally to the heat flow sensor. The sensors may be used to measure changes in mass due to a sample on a surface of the microresonator and also to measure heat flow from the sample on the surface of the microresonator by utilizing the heat flow sensor, which is coupled thermally to the microresonator. Also provided are methods for measuring the mass of a sample, such as a gas, and the flow of heat from the sample to the heat sink by utilizing such mass and heat flow measurement sensors.

Abstract: A measuring technique and method are provided to simultaneously determine the molecular density of several molecular species and the temperature within a closed process room in a melting or combustion process. In such processes in the industry, e.g. in metallurgic process industry, it is important to determine the temperature and the contents within the gas or flame without physically connect to or disturb the process. This has shown to raise large problems especially at high temperatures. The radio signal over a frequency band is measured on the outside of the process room through a window in the mantel covering as a function of frequency and registered on a computer as a radio spectrum. The system is calibrated by using a known signal transmitted through the process room. The spectral lines are identified by their frequency from a database. The temperature is determined from several lines of the same molecular specie and the molecular densities are determined from the intensities of the lines.

Abstract: In the method, pairs of pressure and temperature values are recorded using a pressure sensor and a temperature sensor fixed to a case from the outside and communicating with a dielectric gas, thereby enabling a density value to be calculated for the dielectric gas corresponding to each recorded pair of values. Simultaneously with making the pressure and temperature records, an electric current flowing through an electrical apparatus located inside the case and a climate parameter relating to the medium in which the case is located are also recorded for the purpose of giving each density value an index, thereby enabling a leakage rate to be determined with improved accuracy on the basis of indexed leakage rates, each of which is obtained from density values all having the same index.

Abstract: A system and method for determining the temperature of substrates in a thermal processing chamber in the presence of either an oxidizing atmosphere or a reducing atmosphere is disclosed. Specifically, temperature determinations made in accordance with the present invention are generally for calibrating other temperature sensing devices that may be used in conjunction with the thermal processing chamber. The method of the present invention is generally directed to heating a substrate containing a reactive coating within a thermal processing chamber in an oxidizing atmosphere or reducing atmosphere. As the wafer is heated, the reactive coating reacts with gases contained within the chamber based upon the temperature to which the substrate is exposed. After heated, the thickness of any coating that is formed on the substrate is then measured for determining the temperature to which the substrate was heated.

Abstract: Provided are mass and heat flow measurement sensors comprising a microresonator, such as a quartz crystal microbalance; a heat flow sensor; and a heat sink coupled thermally to the heat flow sensor. The sensors may be used to measure changes in mass due to a sample, such as a gas sorbing or reacting, on a surface of the microresonator and also to measure heat flow from the sample on the surface of the microresonator by utilizing the heat flow sensor, which is coupled thermally to the microresonator. The combined microresonator and heat flow sensor may provide simultaneous and continuous measurement of the changes in mass and heat flow at a gas-solid interface. Also provided are methods for measuring the mass of a sample, such as a gas, and the flow of heat from the sample to the heat sink by utilizing such mass and heat flow measurement sensors.