By Thermal Radiation Emitting Device (e.g., Blackbody Cavity) Patents (Class 374/2)
  • Patent number: 10712758
    Abstract: Provided are a refrigerator, and a method for correcting temperature measurement errors of an infrared sensor including: verifying that the infrared sensor is running in an operating state; obtaining a measured operating-state value acquired by the infrared sensor sensing the temperature of a preset zone; obtaining a correction constant corresponding to the infrared sensor, the correction constant being obtained by means of a comparison between the value measured by the infrared sensor in a correction state and a standard temperature value; using the correction constant to correct the measured value and thus obtain a corrected temperature value. Using the method, the impact of an absolute error of the infrared sensor on temperature measurement is reduced; thus the accuracy of temperature measurement is improved, such that measured values directly reflect the actual temperature of the items inside a preset zone, and an accurate basis for control is provided for subsequent associated control.
    Type: Grant
    Filed: June 17, 2016
    Date of Patent: July 14, 2020
    Assignee: QINGDAO HAIER JOINT STOCK CO., LTD.
    Inventors: Chunyang Li, Sizhi Guo, Ming Wang
  • Patent number: 10677904
    Abstract: An object detection apparatus includes: a transmitter transmitting a radio wave with a predetermined intensity at the radio wave transmission end; a receiver receiving the radio wave, which is to be transmitted when the radio wave is transmitted from the transmitter, at the radio wave reception end; a setter setting a transmission scheme of the transmitter to a plurality of different transmission characteristics; a transmission controller controlling the transmitter to transmit the radio wave with the transmission scheme, which is to be set when the setter sets the transmission scheme; and a detector detecting a presence of the object at a position inside the vehicle, based on a detected reception intensity indicating a respective radio wave reception intensity received by the receiver, the object blocking the radio wave transmitted from the transmitter to the receiver at the position inside the vehicle.
    Type: Grant
    Filed: March 15, 2016
    Date of Patent: June 9, 2020
    Assignee: DENSO CORPORATION
    Inventors: Takashi Saitou, Yuuji Kakuya, Takahisa Matsumoto
  • Patent number: 9696209
    Abstract: A method for measuring a temperature of a film in a reaction chamber is provided. The method includes: obtaining reflectivity sampling data R of a sampling point set in a detection area of the film for light with a wavelength ?, and thermal radiation value sampling data E of the sampling point set; obtaining a first correction factor ? and a second correction factor ? according to values of at least two sampling data groups, wherein 0<??1, 0???1; obtaining a blackbody radiation value Lb of the detection area of the film for the light with the wavelength ? according to the first correction factor ?, the second correction factor ? and the values of the at least two sampling data groups; obtaining a temperature T of the detection area by looking up a table according to the blackbody radiation value Lb and the wavelength ?.
    Type: Grant
    Filed: July 16, 2014
    Date of Patent: July 4, 2017
    Assignee: ADVANCED MICRO-FABRICATION EQUIPMENT INC, SHANGHAI
    Inventors: Lu Chen, Chaoqian Zhang, Yanzhong Ma, Yousen Li, Zhehao Chen, Steven Tianxiao Lee
  • Publication number: 20150131696
    Abstract: A test apparatus for testing an IR sensor of train undercarriage temperatures is disclosed. The IR sensor may be used to obtain infrared IR emission data by sensing a wheel or a wheel bearing of a rail vehicle. The test apparatus may comprise a heat emitter for supplying IR emissions at a reference temperature to the IR sensor. A support may support the heat emitter at a position spaced from the passage of the rail vehicle and in an orientation for directing the IR emissions at the IR sensor.
    Type: Application
    Filed: December 19, 2014
    Publication date: May 14, 2015
    Applicant: Progress Rail Services Corporation
    Inventors: Alessandro Agostini, Andrea Ricci
  • Patent number: 8967860
    Abstract: Embodiments of the present invention generally relate to methods and apparatus for measuring, calibrating, and controlling substrate temperature during low temperature and high temperature processing.
    Type: Grant
    Filed: July 25, 2011
    Date of Patent: March 3, 2015
    Assignee: Applied Materials, Inc.
    Inventor: Kailash Kiran Patalay
  • Patent number: 8944677
    Abstract: A test apparatus for testing an IR sensor of train undercarriage temperatures is disclosed. The IR sensor may be used to obtain infrared IR emission data by sensing a wheel or a wheel bearing of a rail vehicle. The test apparatus may comprise a heat emitter for supplying IR emissions at a reference temperature to the IR sensor. A support may support the heat emitter at a position spaced from the passage of the rail vehicle and in an orientation for directing the IR emissions at the IR sensor.
    Type: Grant
    Filed: September 6, 2012
    Date of Patent: February 3, 2015
    Assignee: Progress Rail Services Corp
    Inventors: Alessandro Agostini, Andrea Ricci
  • Patent number: 8892478
    Abstract: An adaptive model training system and method for filtering asset operating data values acquired from a monitored asset for selectively choosing asset operating data values that meet at least one predefined criterion of good data quality while rejecting asset operating data values that fail to meet at least the one predefined criterion of good data quality; and recalibrating a previously trained or calibrated model having a learned scope of normal operation of the asset by utilizing the asset operating data values that meet at least the one predefined criterion of good data quality for adjusting the learned scope of normal operation of the asset for defining a recalibrated model having the adjusted learned scope of normal operation of the asset.
    Type: Grant
    Filed: March 14, 2013
    Date of Patent: November 18, 2014
    Assignee: Intellectual Assets LLC
    Inventors: Randall L. Bickford, Rahul M. Palnitkar
  • Patent number: 8888360
    Abstract: A method of in-situ pyrometer calibration for a wafer treatment reactor such as a chemical vapor deposition reactor desirably includes the steps of positioning a calibrating pyrometer at a first calibrating position and heating the reactor until the reactor reaches a pyrometer calibration temperature. The method desirably further includes rotating the support element about the rotational axis, and while the support element is rotating about the rotational axis, obtaining first operating temperature measurements from a first operating pyrometer installed at a first operating position, and obtaining first calibrating temperature measurements from the calibration pyrometer. Both the calibrating pyrometer and the first operating pyrometer desirably are adapted to receive radiation from a first portion of a wafer support element at a first radial distance from a rotational axis of the wafer support element.
    Type: Grant
    Filed: December 20, 2011
    Date of Patent: November 18, 2014
    Assignee: Veeco Instruments Inc.
    Inventors: Alexander I. Gurary, Vadim Boguslavskiy, Sandeep Krishnan, Matthew King
  • Publication number: 20140314118
    Abstract: A blackbody radiometric reference comprising a source plate or a target plate, metallic nanoparticles or other high emissivity coating disposed on the plate, and an intermediate coating such as paint. The plate may comprise copper, aluminum or composites thereof. Apparatus capable of functioning as a radiometric or thermometric reference. A pre-heater or weakly-coupled area may be disposed around or adjacent a highly thermally uniform area. A groove or perforations extending into a front surface of the source plate defining a weakly-coupled edge portion surrounding a thermally-controlled, optically-active area, and connected by bridges or structures thereto. An external probe may be located near the source plate for measuring ambient temperature, for compensating for ambient temperature or for radiative load on the blackbody.
    Type: Application
    Filed: April 10, 2014
    Publication date: October 23, 2014
    Inventors: Joseph D. LaVeigne, Stephen W McHugh
  • Publication number: 20140269814
    Abstract: An apparatus for integrity verification of an IR detector that is configured to detect a temperature of an IR emission from an undercarriage component is described. The apparatus includes an IR emitter which emits an IR signal at a reference temperature and the IR signal is directed at the IR detector. A controller is connected to the IR detector and the IR emitter. The controller is configured to compare the reference temperature of the IR signal and the detected temperature of the IR signal to determine the integrity of the IR detector.
    Type: Application
    Filed: February 25, 2014
    Publication date: September 18, 2014
    Applicant: Progress Rail Inspection & Information Systems S.r.I.
    Inventors: Alessandro Agostini, Marco Tili, Mario Viggiani, Andrea Ricci
  • Patent number: 8815012
    Abstract: A substrate for processing in a heating system is disclosed. The substrate includes a bottom portion for absorbing heat from a radiating heat source, the bottom portion having a first region having a first emissivity and a second region having a second emissivity less than the first emissivity. The first region and the second region promote thermal uniformity of the substrate by compensating for thermal non-uniformity of the radiating heat source.
    Type: Grant
    Filed: January 10, 2013
    Date of Patent: August 26, 2014
    Assignee: Intermolecular, Inc.
    Inventor: Rajesh Kelekar
  • Publication number: 20140219310
    Abstract: Disclosed is a calibrating apparatus which is adapted to remove a measurement deviation of a pyrometer, and more particularly, to an apparatus for calibrating a pyrometer, which calibrates a reference value so as to remove a deviation in a temperature measured in a pyrometer. The apparatus for calibrating a pyrometer includes a blackbody including a radiant space from which radiant energy is radiated, a body housing configured to receive the blackbody therein and including a light output wall having a light output port connected with the radiant space, a light output wall protecting cover comprising a transparent blocking plate disposed at a position opposite to the light output port so as to transmit a long wavelength of approximately 5 ?m to approximately 20 ?m may and configured to be coupled with the light output wall of the body housing, and a fixing member configured to fix the light output wall protecting cover to the light output wall of the body housing.
    Type: Application
    Filed: February 5, 2014
    Publication date: August 7, 2014
    Applicant: AP SYSTEMS INC.
    Inventor: Sang Hyun Ji
  • Publication number: 20140219309
    Abstract: Disclosed is a calibrating apparatus which is adapted to remove a measurement deviation of a pyrometer, and more particularly, to an apparatus for calibrating a pyrometer, which calibrates a reference value so as to remove a deviation in a temperature measured in a pyrometer. The apparatus for calibrating a pyrometer includes a blackbody including a radiant space from which radiant energy is radiated, a body housing configured to receive the blackbody therein and including a light output wall having a light output port connected with the radiant space, a light output wall protecting cover configured to be coupled with the light output wall of the body housing so as to define a passage connecting the light output wall of the body housing and an outside environment, and a fixing member configured to fix the light output wall protecting cover to the light output wall of the body housing.
    Type: Application
    Filed: February 5, 2014
    Publication date: August 7, 2014
    Applicant: AP SYSTEMS INC.
    Inventor: Sang Hyun JI
  • Publication number: 20140219308
    Abstract: A device is disclosed including a substrate; an infrared detector coupled to and thermally isolated from the substrate; and a heat shield coupled to the substrate by a plurality of contacts, the heat shield disposed above the infrared detector to block external thermal radiation from being received by the infrared detector. The heat shield is configured to receive a current through the contacts to heat the heat shield to a first temperature, and the infrared detector is configured to detect the first temperature and provide an output signal that is related to a vacuum pressure within the device. Methods for using and forming the device are also disclosed.
    Type: Application
    Filed: December 26, 2013
    Publication date: August 7, 2014
    Applicant: FLIR Systems, Inc.
    Inventor: Eric A. Kurth
  • Patent number: 8757870
    Abstract: A method for calibrating distributed temperature sensing (DTS) systems is disclosed. The method includes: receiving temperature data associated with one or more locations along a length of an optical fiber; calculating a set of unique calibration coefficients specific to each of the one or more locations along the fiber length; and applying the set of calibration coefficients specific to each of the one or more locations along the fiber length to the temperature data for calibrated correction thereof. Also disclosed is a system for calibrating DTS data and a wellbore for providing calibrated DTS data.
    Type: Grant
    Filed: March 20, 2008
    Date of Patent: June 24, 2014
    Assignee: Baker Hughes Incorporated
    Inventors: Travis S. Hall, Brooks A. Childers
  • Patent number: 8727613
    Abstract: A dual parameter sensor for sensing temperature and mechanical or chemical or related information is disclosed. The sensor is formed of an optical waveguide suitable for use in-situ in a high temperature environment having a Bragg grating written into a core region thereof with short-pulsed electromagnetic radiation. By noting the thermal Black Body radiation level above 650° C., wavelength shifts due to temperature can be decoupled from wavelength shifts due to the other parameter being sensed. Advantageously the thermal radiation can be used as an optical source to probe the Bragg grating, considerably simplifying the interrogating apparatus, removing the need for an extrinsic optical source to probe the sensor.
    Type: Grant
    Filed: May 30, 2011
    Date of Patent: May 20, 2014
    Assignee: National Research Council of Canada
    Inventor: Stephen J. Mihailov
  • Patent number: 8657487
    Abstract: A method for on-orbit calibration of the temperature sensors of a simulated blackbody is disclosed. The method may include selecting a simulated blackbody traveling in a micro-gravity environment and comprising a sensor, a container positioned proximate the senor and containing a material, and a heat transfer device positioned proximate the at least one container. The heat transfer device may transition the material through a phase change. The temperature sensor may monitor the temperature of the material during the phase change. A correction may be calculated to correct any disparity between the temperature reported by the temperature sensor during the phase change and the known plateau temperature corresponding to that phase change. The correction may be applied to subsequent temperature readings obtained using the temperature sensor.
    Type: Grant
    Filed: June 11, 2009
    Date of Patent: February 25, 2014
    Assignee: Utah State University Research Foundation
    Inventors: Gail Bingham, Troy Shane Topham, Alan Thurgood
  • Patent number: 8650883
    Abstract: A system for operating a gas turbine includes a compressor, a combustor, and a turbine. The combustor and turbine define a hot gas path. A sensor disposed outside the hot gas path measures internal thermal emissions from the combustor or turbine and generates a first signal reflective of the internal thermal emissions. The internal thermal emissions are infrared or ultraviolet emissions. A controller connected to the sensor receives the first signal and adjusts the compressor, combustor, or turbine in response to the first signal from the sensor. A method for operating a gas turbine includes measuring internal thermal emissions from inside a combustor or turbine using a sensor disposed outside the hot gas path. The method further includes generating a first signal reflective of the internal thermal emissions and adjusting the operation of the compressor, combustor, or turbine in response to the first signal from the sensor.
    Type: Grant
    Filed: August 11, 2010
    Date of Patent: February 18, 2014
    Assignee: General Electric Company
    Inventors: Shahryar Rabiei, Gilbert Otto Kraemer, Geoffrey David Myers
  • Publication number: 20130294476
    Abstract: A flat light emitting plate, a method for calibrating a pyrometer and a method for determining the temperature of a semiconducting wafer inside a processing chamber by said pyrometer. The invention provides a method for calibrating a pyrometer by means of a cold source which is also applicable to processing chambers with a narrow slit. According to the invention, a flat light emitting plate for simulating thermal radiation is provided, comprising a main body made of a transparent material, a light emission area located on an upper surface of the light emitting plate for emitting light, at least one light source located on a lateral surface of the light emitting plate, at least one detector located on a lateral surface of the light emitting plate, and a regulating circuit for adjusting the intensity of light emitted by the light sources.
    Type: Application
    Filed: May 2, 2013
    Publication date: November 7, 2013
    Applicant: LayTec AG
    Inventors: Joerg-Thomas ZETTLER, Christian KASPARI
  • Patent number: 8556501
    Abstract: A method for on-orbit calibration of the temperature sensors of a blackbody is disclosed. The method may include selecting a blackbody traveling in a micro-gravity environment and comprising a sensor, a container positioned proximate the sensor and containing a material, and a heat transfer device positioned proximate the at least one container. The heat transfer device may transition the material through a phase change. The temperature sensor may monitor the temperature of the material during the phase change. Additionally, the state of the material may be measured by displacement of the container to improve the accuracy of the plateau temperature measurement. A correction may be calculated to correct any disparity between the temperature reported by the temperature sensor during the phase change and the known plateau temperature, measured at a threshold state of the material, corresponding to that phase change.
    Type: Grant
    Filed: January 26, 2011
    Date of Patent: October 15, 2013
    Assignee: Utah State University Research Foundation
    Inventors: Troy Shane Topham, Gail Bingham, Harri Latvakoski, Michael Sean Watson, Vern Alan Thurgood
  • Publication number: 20130223472
    Abstract: Systems and methods that facilitate calibrated temperature measurements are discussed. Such a system can include a target object that changes temperature, a test infrared (IR) temperature sensor that can make a first set of measurements of the temperature of the target object over a period of time, and a standard IR temperature sensor that can make a second set of measurements of the temperature of the target object over the period of time. Additionally, the system can include a calibration unit that compares the first set of measurements with the second set of measurements and determines an accuracy of the test IR temperature sensor based on the comparison.
    Type: Application
    Filed: July 23, 2012
    Publication date: August 29, 2013
    Applicant: CVG MANAGEMENT CORPORATION
    Inventor: Robert A. Maston
  • Patent number: 8465590
    Abstract: A substrate for processing in a heating system is disclosed. The substrate includes a bottom portion for absorbing heat from a radiating heat source, the bottom portion having a first region having a first emissivity and a second region having a second emissivity less than the first emissivity. The first region and the second region promote thermal uniformity of the substrate by compensating for thermal non-uniformity of the radiating heat source.
    Type: Grant
    Filed: February 1, 2011
    Date of Patent: June 18, 2013
    Assignee: Intermolecular, Inc.
    Inventor: Rajesh Kelekar
  • Publication number: 20130148688
    Abstract: The present invention provides a quantum theory correction method for improving the accuracy of temperature measurement of radiation thermometer and a radiation thermometer system. The invention is related to the radiation thermometer in the field of instrumentation. The present invention acquires parameters reflecting energy level structure by adopting effective physical model to process data and using keyboard input or data transmission. The temperature of the object to be measured is finally acquired and displayed on the displayer. The quantum theory correction method and radiation thermometer system effectively overcome the difficulty that the value of radiance ?(?·T) cannot be accurately measured in the event that radiance correction method is used to improve the accuracy of radiation thermometer. Thus, the accuracy of thermometer is improved significantly.
    Type: Application
    Filed: March 18, 2011
    Publication date: June 13, 2013
    Inventors: Bolin Cao, Chengzhang Tan, Rui Cao, Chenggang Liu
  • Publication number: 20130094535
    Abstract: A test apparatus for testing an IR sensor of train undercarriage temperatures is disclosed. The IR sensor may be used to obtain infrared IR emission data by sensing a wheel or a wheel bearing of a rail vehicle. The test apparatus may comprise a heat emitter for supplying IR emissions at a reference temperature to the IR sensor. A support may support the heat emitter at a position spaced from the passage of the rail vehicle and in an orientation for directing the IR emissions at the IR sensor.
    Type: Application
    Filed: September 6, 2012
    Publication date: April 18, 2013
    Applicant: Progress Rail Services Corporation
    Inventors: Alessandro Agostini, Andrea Ricci
  • Patent number: 8388219
    Abstract: A method for calibrating a pyrometer a temperature of a calibration sample is determined from the ratio of a first reflectance and a second reflectance and the pyrometer is calibrated by assigning the determined temperature of the calibration sample with a thermal radiation signal measured by the pyrometer.
    Type: Grant
    Filed: May 11, 2010
    Date of Patent: March 5, 2013
    Assignee: Laytec Aktiengesellschaft
    Inventors: Joerg-Thomas Zettler, Tobias Schenk, Steffen Uredat, Jens Zilian, Bernd Henninger, Marcello Binetti, Kolja Haberland
  • Patent number: 8376610
    Abstract: A method and apparatus for automated field calibration of temperature sensors uses a series of readings including a reading of a known source, such as an LED, for use in calculating a factor that is compared to a reference for adjusting the sensor output signal. Calibration readings are taken more frequently after start up to compensate for sensor drift during storage, as opposed to less frequent readings during operation to compensate for slower sensor drift while operational.
    Type: Grant
    Filed: September 9, 2008
    Date of Patent: February 19, 2013
    Assignee: Fluke Corporation
    Inventors: Sam Paris, Charles Steven Pint
  • Patent number: 8330600
    Abstract: In one embodiment, a system includes a first cold noise source, a first radiometer receiver, and a first detector. The first cold noise source generates a first thermal radiation signal having a first carrier frequency band. The first thermal radiation signal carries a first information signal. The first cold noise source also transmits the first thermal radiation signal through a first antenna. The first radiometer receiver receives the first thermal radiation signal through a second antenna, and the first detector extracts the first information signal from the first thermal radiation signal.
    Type: Grant
    Filed: November 29, 2007
    Date of Patent: December 11, 2012
    Assignee: Raytheon Company
    Inventors: Robert S. Roeder, Kenneth A. O'Connor, Matthew C. Smith, Shawn K. O'Brien
  • Patent number: 8282273
    Abstract: A temperature monitoring technique for collecting radiation intensity (blackbody emission) across a broad wavelength range. A solid state spectrometer (26) acquires spectra from a sample (10) in real time and resolves the spectra to a radiation intensity (I) versus wavelength (?) curve. This curve is fitted to Planck's equation using a non-linear least squares fitting analysis. The system can be configured to self-calibrate and then lock in an amplitude value (A) which is used in subsequent temperature measurements by fitting to the blackbody emission curve. Preferably, the spectrometer (26) is flat field corrected (36) in an initial step to counteract variations in the spectrometer response with wavelength.
    Type: Grant
    Filed: March 24, 2010
    Date of Patent: October 9, 2012
    Assignee: k-Space Associates, Inc.
    Inventors: Darryl Barlett, Barry D. Wissman, Charles A. Taylor, II
  • Patent number: 8282272
    Abstract: A system and method is disclosed that reliably determines the transmissivity of a substrate. By determining the transmissivity of a calibration substrate, for instance, a temperature measuring device can be calibrated. The method and system are particularly well suited for use in thermal processing chambers that process semiconductor wafers used for forming integrated circuit chips.
    Type: Grant
    Filed: September 5, 2008
    Date of Patent: October 9, 2012
    Inventors: Roland Schanz, Christoph Merkl, Steffen Müller
  • Patent number: 8267575
    Abstract: A temperature measuring device incorporates a fixed point cell to provide an integrated structure. The fixed point cell houses a pure substance within a substantially cylindrical graphite crucible. The pure substance is to be melted to give an absolute temperature. The crucible is enclosed within a sealed metal container. An annular metal tube surrounds the container and the inner wall of the tube is formed by the outer peripheral wall of the container. This provides excellent heat conduction from the interior of the tube to the interior of the crucible. The tube is arranged to define either a heat pipe or a thermal siphon and includes an appropriate vaporizable fluid.
    Type: Grant
    Filed: September 11, 2008
    Date of Patent: September 18, 2012
    Assignee: Isothermal Technology Limited
    Inventor: John P. Tavener
  • Publication number: 20120170609
    Abstract: A method of in-situ pyrometer calibration for a wafer treatment reactor such as a chemical vapor deposition reactor desirably includes the steps of positioning a calibrating pyrometer at a first calibrating position and heating the reactor until the reactor reaches a pyrometer calibration temperature. The method desirably further includes rotating the support element about the rotational axis, and while the support element is rotating about the rotational axis, obtaining first operating temperature measurements from a first operating pyrometer installed at a first operating position, and obtaining first calibrating temperature measurements from the calibration pyrometer. Both the calibrating pyrometer and the first operating pyrometer desirably are adapted to receive radiation from a first portion of a wafer support element at a first radial distance from a rotational axis of the wafer support element.
    Type: Application
    Filed: December 20, 2011
    Publication date: July 5, 2012
    Applicant: VEECO INSTRUMENTS INC.
    Inventors: Alexander I. Gurary, Vadim Boguslavskiy, Sandeep Krishnan, Matthew King
  • Patent number: 8192074
    Abstract: A method for correcting the output signal of a radiation sensor 20 includes obtaining two or more temperature signals from a corresponding number of measurements of quantities at different times and/or different locations relating to the temperature of the sensor, and correcting the output signal with reference to said temperature signals.
    Type: Grant
    Filed: August 28, 2006
    Date of Patent: June 5, 2012
    Assignee: Excelitas Technologies GmbH & Co KG
    Inventors: Martin Liess, Juergen Schilz
  • Patent number: 8186876
    Abstract: A tip assembly for an IR thermometer apparatus includes a heat sink having a heat sink cavity and a tip section and a fluid path and at least one hydraulic port. The tip assembly also includes an IR sensor mechanically seated in the tip section and thermally coupled to the heat sink. The tip assembly also includes an electrical connector configured to provide an electrical connection to the tip assembly. A fluid having a fluid temperature is introduced into the fluid path via the hydraulic port. The fluid causes the heat sink and the IR sensor to substantially reach one or more pre-determined temperatures by thermal conduction during calibration of the tip assembly. Another tip assembly having an internal heat source is described. Another tip assembly having an internal heat pump is described. A method to calibrate a tip assembly is also described.
    Type: Grant
    Filed: April 20, 2009
    Date of Patent: May 29, 2012
    Assignee: Welch Allyn, Inc.
    Inventors: Matthew D. Mullin, Michael J. Anson, John A. Lane, David E. Quinn, Henry J. Smith, III, Ray D. Stone
  • Patent number: 8177421
    Abstract: Infrared IR thermometer calibration systems and methods are disclosed in which the temperature of an IR thermometer calibration system is controlled such that radiation emitted by a target at a given input temperature is equal to the radiation emitted by a graybody heated to the input temperature and having an emissivity equal to an emissivity setting of an IR thermometer to be calibrated using the IR thermometer calibration system.
    Type: Grant
    Filed: January 4, 2010
    Date of Patent: May 15, 2012
    Assignee: Fluke Corporation
    Inventor: Frank E. Liebmann
  • Patent number: 8157438
    Abstract: A thermopile, utilizing the Seebeck effect, is placed into a blackbody cavity or other ambient heat source, where the hot junctions are inside the heat source, and the cold junctions are outside the heat source, and thereby produces a voltage.
    Type: Grant
    Filed: August 10, 2010
    Date of Patent: April 17, 2012
    Inventor: John Lee Warren
  • Patent number: 8157439
    Abstract: Methods and apparatus for wafer temperature measurement and calibration of temperature measurement devices may be based on determining the absorption of a layer in a semiconductor wafer. The absorption may be determined by directing light towards the wafer and measuring light reflected from the wafer from below the surface upon which the incident light impinges. Calibration wafers and measurement systems may be arranged and configured so that light reflected at predetermined angles to the wafer surface is measured and other light is not. Measurements may also be based on evaluating the degree of contrast in an image of a pattern in or on the wafer. Other measurements may utilize a determination of an optical path length within the wafer alongside a temperature determination based on reflected or transmitted light.
    Type: Grant
    Filed: June 8, 2009
    Date of Patent: April 17, 2012
    Assignee: Mattson Technology, Inc.
    Inventor: Paul Janis Timans
  • Patent number: 8123401
    Abstract: A probe cover for an infrared electronic thermometer including a generally tubular body having open first and second ends. The body is sized and shaped to receive a probe of the infrared electronic thermometer into the body through the first end. The probe cover further includes a film closing the second end of the body. The film has a metallic region defining a blackbody portion for rapidly equilibrating to a temperature corresponding to the temperature of an object for viewing by a sensor of the electronic thermometer to measure the temperature of the object.
    Type: Grant
    Filed: April 3, 2009
    Date of Patent: February 28, 2012
    Assignee: Covidien AG
    Inventor: Jeffrey E. Price
  • Patent number: 7976216
    Abstract: The temperature of an object such as a semiconductor wafer that includes silicon can be determined based on the variation of the optical absorption coefficient of silicon with temperature. Temperatures above about 850° C., can be found by measuring phenomena that are affected by the magnitude of the optical absorption coefficient, especially at wavelengths >˜1 ?m. Phenomena could include measuring light reflected, transmitted, emitted, absorbed, or scattered by the wafer and deriving the absorption coefficient from the measurements and then deriving temperature from the absorption coefficient. Temperature could be determined from a model relating phenomena directly to temperature, the model constructed based on absorption behavior and techniques discussed herein. The resulting temperature could be used to calibrate or control a rapid thermal processing chamber or other apparatus.
    Type: Grant
    Filed: December 20, 2007
    Date of Patent: July 12, 2011
    Assignee: Mattson Technology, Inc.
    Inventor: Paul Janis Timans
  • Publication number: 20110125444
    Abstract: A method for on-orbit calibration of the temperature sensors of a blackbody is disclosed. The method may include selecting a blackbody traveling in a micro-gravity environment and comprising a sensor, a container positioned proximate the sensor and containing a material, and a heat transfer device positioned proximate the at least one container. The heat transfer device may transition the material through a phase change. The temperature sensor may monitor the temperature of the material during the phase change. Additionally, the state of the material may be measured by displacement of the container to improve the accuracy of the plateau temperature measurement. A correction may be calculated to correct any disparity between the temperature reported by the temperature sensor during the phase change and the known plateau temperature, measured at a threshold state of the material, corresponding to that phase change.
    Type: Application
    Filed: January 26, 2011
    Publication date: May 26, 2011
    Applicant: Utah State University Research Foundation
    Inventors: Troy Shane Topham, Gail Bingham
  • Patent number: 7925459
    Abstract: A method and apparatus for determining an operating voltage lower bound for preventing photovoltaic (PV) cell reverse breakdown during power conversion. The method comprises determining a PV cell operating temperature; computing, at a controller, an operating voltage corresponding to a maximum power point (MPP) based on the PV cell operating temperature; and determining, at the controller, an operating voltage lower bound based on the operating voltage.
    Type: Grant
    Filed: October 16, 2009
    Date of Patent: April 12, 2011
    Assignee: Enphase Energy, Inc.
    Inventor: Martin Fornage
  • Patent number: 7866882
    Abstract: The present standard radiation source comprises a black body having a cavity, a shielding plate positioned at an open end of the cavity, at least one first heater positioned in the shielding plate, at least one second heater positioned on the outer wall of the black body, a first insulation device covering the second heater and a temperature-controlling device positioned on the first insulation device.
    Type: Grant
    Filed: November 16, 2007
    Date of Patent: January 11, 2011
    Assignee: Industrial Technology Research Institute
    Inventors: Hsin Yi Ko, Chun Jen Lin
  • Patent number: 7837382
    Abstract: A fixed-point cell is provided which can provide a fixed-point in a wide temperature range by changing the fixed-point material. During the use of the fixed-point cell, the fixed-point material can be prevented from being contaminated, and the crucible of the cell can be prevented from being cracked. The fixed-point cell includes: the crucible composed of carbon; the fixed-point material enclosed in the crucible and composed of one of a metal, a eutectic of a metal and carbon, and a eutectic of a metal carbide and carbon; and a woven fabric of graphite fibers containing 10 ppm or lower of impurities and interposed between the crucible and the fixed-point material.
    Type: Grant
    Filed: August 23, 2006
    Date of Patent: November 23, 2010
    Assignee: National Institute of Advanced Industrial Science and Technology
    Inventor: Yoshiro Yamada
  • Publication number: 20100290500
    Abstract: The present invention relates to a method for calibrating a pyrometer, a method for determining the temperature of a semiconducting wafer and a system for determining the temperature of a semiconducting wafer. It is an object of the present invention to provide a method for calibrating a pyrometer which overcomes the disadvantages of the prior art.
    Type: Application
    Filed: May 11, 2010
    Publication date: November 18, 2010
    Applicant: LayTec GmbH
    Inventors: Joerg-Thomas ZETTLER, Tobias SCHENK, Steffen UREDAT, Jens ZILIAN, Bernd HENNINGER, Marcello BINETTI, Kolja HABERLAND
  • Publication number: 20100260229
    Abstract: An apparatus for use with automatic testing equipment for testing infrared sensors on integrated circuits is provided. The apparatus includes an infrared source, a heat mass, and an electronic frequency modulator. The infrared source is modulated according to a predetermined test frequency such that the infrared source emits an infrared test signal representative of a test temperature and corresponding to the temperature of the heat mass and the predetermined test frequency. A signal processor, electrically coupled to an integrated circuit having an infrared sensor, receives a sensed signal from the infrared sensor in response to the infrared test signal and uses the sensed signal according to the predetermined test frequency to determine a measured temperature.
    Type: Application
    Filed: April 8, 2009
    Publication date: October 14, 2010
    Applicant: Analog Devices, Inc.
    Inventors: John Grubb, Gerard Blaney, Eamon Culhane
  • Publication number: 20100246631
    Abstract: A temperature monitoring technique for collecting radiation intensity (blackbody emission) across a broad wavelength range. A solid state spectrometer (26) acquires spectra from a sample (10) in real time and resolves the spectra to a radiation intensity (I) versus wavelength (?) curve. This curve is fitted to Planck's equation using a non-linear least squares fitting analysis. The system can be configured to self-calibrate and then lock in an amplitude value (A) which is used in subsequent temperature measurements by fitting to the blackbody emission curve. Preferably, the spectrometer (26) is flat field corrected (36) in an initial step to counteract variations in the spectrometer response with wavelength.
    Type: Application
    Filed: March 24, 2010
    Publication date: September 30, 2010
    Applicant: K-SPACE ASSOCIATES, INC.
    Inventors: Darryl Barlett, Barry D. Wissman, Charles A. Taylor, II
  • Publication number: 20100232470
    Abstract: A method and system for calibrating temperature measurement devices, such as pyrometers, in thermal processing chambers are disclosed. According to the present invention, the system includes a calibrating light source that emits light energy onto a substrate contained in the thermal processing chamber. A light detector then detects the amount of light that is being transmitted through the substrate. The amount of detected light energy is then used to calibrate a temperature measurement device that is used in the system.
    Type: Application
    Filed: May 25, 2010
    Publication date: September 16, 2010
    Applicant: MATTSON TECHNOLOGY, INC.
    Inventor: Paul Janis Timans
  • Publication number: 20100103976
    Abstract: Infrared IR thermometer calibration systems and methods are disclosed in which the temperature of an IR thermometer calibration system is controlled such that radiation emitted by a target at a given input temperature is equal to the radiation emitted by a graybody heated to the input temperature and having an emissivity equal to an emissivity setting of an IR thermometer to be calibrated using the IR thermometer calibration system.
    Type: Application
    Filed: January 4, 2010
    Publication date: April 29, 2010
    Applicant: FLUKE Corporation
    Inventor: FRANK E. LIEBMANN
  • Publication number: 20100061419
    Abstract: A method and apparatus for automated field calibration of temperature sensors uses a series of readings including a reading of a known source, such as an LED, for use in calculating a factor that is compared to a reference for adjusting the sensor output signal. Calibration readings are taken more frequently after start up to compensate for sensor drift during storage, as opposed to less frequent readings during operation to compensate for slower sensor drift while operational.
    Type: Application
    Filed: September 9, 2008
    Publication date: March 11, 2010
    Applicant: FLUKE CORPORATION
    Inventors: Sam Paris, Charles S. Pint
  • Patent number: 7661876
    Abstract: Infrared Ir Thermometer Calibration Systems and Methods are Disclosed in which the temperature of an IR thermometer calibration system is controlled such that radiation emitted by a target at a given input temperature is equal to the radiation emitted by a graybody heated to the input temperature and having an emissivity equal to an emissivity setting of an IR thermometer to be calibrated using the IR thermometer calibration system.
    Type: Grant
    Filed: November 14, 2007
    Date of Patent: February 16, 2010
    Assignee: Fluke Corporation
    Inventor: Frank E. Liebmann
  • Publication number: 20090312976
    Abstract: A method for on-orbit calibration of the temperature sensors of a simulated blackbody is disclosed. The method may include selecting a simulated blackbody traveling in a micro-gravity environment and comprising a sensor, a container positioned proximate the senor and containing a material, and a heat transfer device positioned proximate the at least one container. The heat transfer device may transition the material through a phase change. The temperature sensor may monitor the temperature of the material during the phase change. A correction may be calculated to correct any disparity between the temperature reported by the temperature sensor during the phase change and the known plateau temperature corresponding to that phase change. The correction may be applied to subsequent temperature readings obtained using the temperature sensor.
    Type: Application
    Filed: June 11, 2009
    Publication date: December 17, 2009
    Applicant: Utah State University Research Foundation
    Inventors: Gail Bingham, Troy Shane Topham, Alan Thurgood