Abstract: An inspection device is provided which comprises a receiving member defining an open cell for receiving a target therein. An optical excitation input is in optical communication with the cell for exciting the target. At least one acoustic pickup is in acoustic communication with the cell for picking up acoustic energy resultant from excitation of the target. A recorder is provided for recording the acoustic energy picked up from the at least one acoustic pickup for facilitating structural analysis of the target.

Abstract: A novel measurement technique is employed using surface acoustic wave (SAW) devices, passive RF, and radiation-sensitive films to provide a wireless passive radiation sensor that requires no batteries, outside wiring, or regular maintenance. The sensor is small (<1 cm2), physically robust, and will operate unattended for decades. In addition, the sensor can be insensitive to measurement position and read distance due to a novel self-referencing technique eliminating the need to measure absolute responses that are dependent on RF transmitter location and power.

Abstract: A temperature sensing apparatus and method are described to detect a change in a frequency due to a change in a temperature. An infrared light sensing apparatus and method are also provided. The temperature sensing apparatus may include an electrode to generate an electrical signal, a piezoelectric layer to convert the electrical signal into an acoustic wave, and a temperature sensitive layer formed by doping impurities in one or more structures formed on a substrate. Additionally, the infrared light sensing apparatus may convert into heat infrared light incident to an infrared light absorption layer, using an infrared light reflection layer and the infrared light absorption layer. A temperature sensitive layer may detect a change in a resonant frequency based on a change in a temperature of the heat, and may detect a change in infrared light based on the change in the resonant frequency.

Abstract: There is provided a wireless measuring apparatus that efficiently measures the frequency characteristics of a sensor unit mounted on an object to be measured. The wireless measuring apparatus is a wireless measuring apparatus that measures the frequency characteristics of a sensor unit (10) mounted on an object (40) to be measured, including the sensor unit (10) having a piezo-resonator (11), an antenna (20) that forms a circuitry with the sensor unit (10), and a measuring element (30) that supplies high frequency electricity changed in different frequency to the circuitry and measures the frequency characteristics of the reflected electricity strength received from the circuitry.

Abstract: Disclosed is an oscillator that relies on redundancy of similar resonators integrated on chip in order to fulfill the requirement of one single quartz resonator. The immediate benefit of that approach compared to quartz technology is the monolithic integration of the reference signal function, implying smaller devices as well as cost and power savings.

Abstract: A wireless passive temperature sensor comprising a surface acoustic wave (SAW) delay line is constructed on a piezoelectric substrate having a thermal coefficient of frequency. An array of addressable, wireless passive temperature sensors can be used to monitor an array of temperature points on a structure using a wireless reader. Each sensor can be monitored by measuring the frequency of maximum reflection in their respective bands. A wireless passive heat flux gauge uses two temperature sensors with different frequency and/or time delay responses to measure that temperature differential across a thermal conductor that has a well characterized thermal conductivity and thickness.

Abstract: Methods and apparatuses for Micro-Electro-Mechanical Systems (MEMS) resonator to monitor temperature in an integrated circuit. Fabricating the resonator in an interconnect layer provides a way to implement thermal detection means which is tolerant of manufacturing process variations. Sensor readout and control circuits can be on silicon if desired, for example, a positive feedback amplifier to form an oscillator in conjunction with the resonator and a counter to count oscillator frequency.

Abstract: Methods and apparatuses for Micro-Electro-Mechanical Systems (MEMS) resonator to monitor the platform temperature. Fabricating the resonator on a relatively low cost flexible polymer substrate rather than silicon provides mechanical flexibility as well as design flexibility with respect to sensor placement. Sensor readout and control circuits can be on silicon if desired, for example, a positive feedback amplifier to form an oscillator in conjunction with the resonator and a counter to count oscillator frequency.

Abstract: Mechanical transducers such as pressure sensors, resonators or other frequency-reference devices are implemented under conditions characterized by different temperatures. According to an example embodiment of the present invention, a combination of materials is implemented for mechanical transducer applications to mitigate temperature-related changes at or near a selected turnover temperature. In one application, a material property mismatch is used to facilitate single-anchor transducer applications, such as for resonators. Another application is directed to a Silicon-Silicon dioxide combination of materials.

Abstract: Mechanical transducers such as pressure sensors, resonators or other frequency-reference devices are implemented under conditions characterized by different temperatures. According to an example embodiment of the present invention, a combination of materials is implemented for mechanical transducer applications to mitigate temperature-related changes. In one application, a material property mismatch is used to facilitate single-anchor transducer applications, such as for resonators. Another application is directed to a Silicon-Silicon dioxide combination of materials.

Abstract: A temperature sensor is described that includes a base, a first set of posts attached to the base having a first coefficient of thermal expansion, a second set of posts attached to the base and having a second coefficient of thermal expansion, and two substantially parallel conductive plates forming a capacitor. The first of the conductive plates is fixed to the first set of posts and the second of the conductive plates is fixed to the second set of posts. Temperature changes cause the first set of posts and the second set of posts to elongate at different rates, thereby changing a distance between the conductive plates and therefore the resulting capacitance. A system and method are also described for determining resonant frequency associated with the sensor which correlates to the temperature at the sensor when multiple sensors are networked across a system.

Abstract: An object of the present invention is to provide a piezoelectric resonator provided with a electrode on the surface of a plate piezoelectric blank, which excites the piezoelectric blank, the piezoelectric resonator being capable of suppressing deterioration of an electrode under high temperature circumstances. Another object is to provide a temperature sensor suitable for temperature measurement at high temperatures. As a concrete means for solving the problems is that the electrode includes a first metal layer, formed on the surface of the piezoelectric blank, and made of at least one kind selected from the group consisting of chromium (Cr), titanium (Ti), nickel (Ni), aluminum (Al) and copper (Cu), or having the same adhesion to the above-described piezoelectric blank as that of these metals; a second metal layer made of gold (Au) or silver (Ag) deposited on the surface of the first metal layer; and a third metal layer made of chromium (Cr) deposited on the surface of the second metal layer.

Abstract: The invention relates to a device (31) which comprises at least one piezoacoustic resonator element (2) having a piezoelectric layer (32) and two electrodes that are electrically contacted to the piezoelectric layer (32). The piezoacoustic resonator element (2) is configured in such a manner that, when a voltage is applied to the piezoelectric layer (32), a thickness oscillation of the piezoelectric layer (32) is excited via the electrodes with a resonant frequency. The inventive device is characterized by comprising, integrated into the piezoacoustic resonator element (2), a temperature measurement device (3) having a measuring element (37) that is configured as a thin layer.

Abstract: A first thermometry system for measuring a temperature of an object under test includes a first detecting sheet having crystal oscillators arranged on a first sheet-like object formed of resin, and a first measuring device for measuring the temperature based on frequencies acquired from the crystal oscillators and corresponding to natural frequencies of the crystal oscillators. In this system, the first detecting sheet is placed in contact with the object under test, whereupon the crystal oscillators provide the natural frequencies corresponding to the temperature of the object under test. The first measuring device measures the temperature of the object under test accurately based on the frequencies corresponding to the natural frequencies.