Abstract: An optical detector includes a sensor device chip including a substrate and a sensor device that is provided at a front face side of the substrate and detects light entering from a back face side of the substrate. The sensor device chip has, at the back face side of the substrate, a region in which a refractive index varies so as to increase from a light incident face toward a thicknesswise direction.

Abstract: An electrode member has a plurality of spherical electrode sections wherein the radiuses of the spherical sections are different from each other. The spherical electrode sections are disposed in a state wherein the center points of the respective spheres match each other and the spherical electrode sections are insulated from each other such that voltages can be independently applied thereto. Electron-passing openings for electrons, which move from the center point to the outside of the electrode member, are formed at positions where the spherical electrode sections and a plurality of straight lines radially extending from the center point intersect each other.

Abstract: A tunable metamaterial comprising a membrane on which is arranged a two-dimensional array of elements to form a metamaterial, wherein the array is subdivided into blocks of multiple elements, each block being separated from adjacent blocks by a gap to allow each block to be moveable relative to its adjacent blocks. The lattice of the metamaterial and hence its properties are tuned by inducing adjacent blocks to move away from each other or towards each other either in-plane or out-of-plane in a controllable manner in response to an electrical, thermal or optical control signal.

Abstract: A luminescent particle includes a luminescent compound that is configured to perform a photon down conversion on a portion of received light. The luminescent compound includes a host compound material and an activator material that is combined with the host compound material. The activator material is provided in a quantity that limits a conversion efficiency of the luminescent compound to limit a decrease in the decrease in luminous intensity of light emitted from the luminescent compound and thus provide a given color shift of the a combined emission wavelength from a non-excited state to a steady-state excited condition.

Abstract: A component in a processing chamber of a substrate processing apparatus, where a temperature may be accurately measured by using a temperature measuring apparatus using an interference of a low-coherence light, even when a front surface and a rear surface are not parallel due to abrasion, or the like. A focus ring used in a vacuum atmosphere and of which a temperature is measured includes an abrasive surface exposed to an abrasive atmosphere according to plasma, a nonabrasive surface not exposed to the abrasive atmosphere, a thin-walled portion including a top surface and a bottom surface that are parallel to each other, and a coating member coating the top surface of the thin-walled portion, wherein a mirror-like finishing is performed on each of the top and bottom surfaces of the thin-walled portion.

Abstract: Methods and systems for determining when an electrical contact reaches the maximum allowable temperature. The methods and systems include defining a plurality of temperature indicators installed in at least one surface of the electrical contact to indicate at least one specific temperature; providing a trace material within the at least one temperature indicator; allowing the electrical contact to reach the at least one specific temperature at which the at least one temperature indicator is designed to activate in or on the at least one surface of the electrical contact; causing the trace material to disperse from the at least one temperature indicator into a surrounding environment; and monitoring the surrounding environment to determine when a predetermined quantity of the trace material has dispersed into the surrounding environment, thereby indicating that the electrical contact has reached the at least one specific temperature at which the at least one temperature indicator is designed to activate.

Abstract: A temperature measurement apparatus includes a light source; a first splitter that splits a light beam into a measurement beam and a reference beam; a reference beam reflector that reflects the reference beam; an optical path length adjustor; a second splitter that splits the reflected reference beam into a first reflected reference beam and a second reflected reference beam; a first photodetector that measures an interference between the first reflected reference beam and a reflected measurement beam obtained by the measurement beam reflected from a target object; a second photodetector that measures an intensity of the second reflected reference beam; and a temperature calculation unit. The temperature calculation unit calculates a location of the interference by subtracting an output signal of the second photodetector from an output signal of the first photodetector, and calculates a temperature of the target object from the calculated location of the interference.

Abstract: Methods and apparatus for wafer temperature measurement and calibration of temperature measurement devices may be based on determining the absorption of a layer in a semiconductor wafer. The absorption may be determined by directing light towards the wafer and measuring light reflected from the wafer from below the surface upon which the incident light impinges. Calibration wafers and measurement systems may be arranged and configured so that light reflected at predetermined angles to the wafer surface is measured and other light is not. Measurements may also be based on evaluating the degree of contrast in an image of a pattern in or on the wafer. Other measurements may utilize a determination of an optical path length within the wafer alongside a temperature determination based on reflected or transmitted light.

Abstract: Disclosed is an electrode member which has spherical sections, each of which configures a part of a sphere, and a plurality of spherical electrode sections wherein the radiuses of the spherical sections are different from each other. The spherical electrode sections are disposed in a state wherein the center points of the respective spheres match each other and the spherical electrode sections are insulated from each other such that voltages can be independently applied thereto. Electron-passing openings for straightly taking out electrons, which are moving from the center point, to the outside of the electrode are formed at positions where the spherical electrode sections and a plurality of straight lines radially extending from the center point intersect each other.

Abstract: A method of determining the temperature of a sample carrier in a charged particle-optical apparatus, characterized in that the method comprises the observation of the sample carrier with a beam of charged particles, the observation giving information about the temperature of the sample carrier. The invention is based on the insight that a charged particle optical apparatus, such as a TEM, STEM, SEM or FIB, can be used to observe temperature related changes of a sample carrier. The changes may be mechanical changes (e.g. of a bimetal), crystallographic changes (e.g. of a perovskite), and luminescent changes (in intensity or decay time). In a preferred embodiment the sample carrier shows two bimetals, showing metals with different thermal expansion coefficients, bending in opposite directions. The distance between the two bimetals is used as a thermometer.

Abstract: A temperature-responsive photonic crystal device comprising having a temperature-responsive photonic crystal material, whereby exposure of the device to a temperature above a predetermined threshold temperature is indicated by a detectable change in the device.

Abstract: The present invention is directed to passive thermal monitoring devices, and methods of making and using the passive thermal monitoring devices.

Abstract: There is provided a substrate mounting table capable of accurately measuring a temperature of a wafer supported on the substrate mounting table without incurring contamination within a chamber and without forming a hole for measuring a temperature in the substrate mounting table. The substrate mounting table includes a mounting surface 90a configured to mount a wafer W thereon; a substrate lifting unit 80 configured to lift the wafer W by a lift pin 84 from the mounting surface 90a; and a light irradiating/receiving unit 87 configured to irradiate a measurement light beam 88 as a low-coherence light beam to the wafer W through an inside of the lift pin 84 serving as an optical path and receive reflected light beams from a front surface and a rear surface of the wafer W. The light irradiating/receiving unit 87 is fixed to a base plate 86 of the substrate lifting unit 80.

Abstract: A probe for temperature measurement uses interference of a low-coherence light beam. The probe includes a temperature acquiring member configured to be brought into contact with a surface of a temperature measurement target and thermally assimilate with the temperature measurement target; a light irradiating/receiving unit configured to irradiate a measurement light beam as a low-coherence light beam to the temperature acquiring member and receive reflected light beams from a front surface and a rear surface of the temperature acquiring member; and a housing configured to define a distance between the temperature acquiring member and the light irradiating/receiving unit to a preset length and isolate optical paths of the measurement light beam and the two reflected light beams from an atmosphere in which the temperature measurement target is placed.

Abstract: The disclosure relates to methods and devices for monitoring e.g., fatigue levels by measuring a subject's body core temperature. In one embodiment, microwave radiometry is used to measure such core temperature.

Abstract: In a temperature estimation apparatus for an aeroplane gas turbine engine mounted on an aircraft and having a combustion chamber, a high-pressure turbine rotated by combustion gas exhausted from the combustion chamber, a low-pressure turbine located downstream of the high-pressure turbine to be rotated by low-pressure gas which has passed through the high-pressure turbine, a high-pressure turbine rotational speed sensor, a low-pressure turbine rotational speed sensor, and a temperature sensor, inlet temperature at an inlet of the high-pressure turbine is estimated based on the detected outlet temperature of the low-pressure turbine and the rotational speed of the low-pressure turbine and is corrected with the detected rotational speed of the high-pressure turbine.

Abstract: The invention is an optical method and apparatus for measuring the temperature of semiconductor substrates in real-time, during thin film growth and wafer processing. Utilizing the nearly linear dependence of the interband optical absorption edge on temperature, the present method and apparatus result in highly accurate measurement of the absorption edge in diffuse reflectance and transmission geometry, in real time, with sufficient accuracy and sensitivity to enable closed loop temperature control of wafers during film growth and processing. The apparatus operates across a wide range of temperatures covering all of the required range for common semiconductor substrates.

Abstract: An apparatus that allows for the testing of multiple wraps of cable in environments of varying temperature, pressure, and in different fluids in a single apparatus, and can be tested against the varying loads the cable may encounter is disclosed. In the illustrative embodiment of the present invention, the multiple wraps of cable are simulated by layering electrically-insulated portions of the cable on top of one another inside an environmentally controlled container. This container has two parts: a thermally-insulated container and a pressure container.

Abstract: The invention relates to a method for controlling flat glass forming by flowing a molten glass over a liquid tin layer contained in a forming vat wherein a forming characteristic quantity is measured above the glass surface during forming by means of beams generated by at least one absorption spectroscopy-based analyser, wherein the light beams generated by said analyser form a net above the glass surface. A device for carrying out the inventive method comprising an arm for supporting a vessel which comprises a retroreflecting means for receiving a light beam and transmitting it in an opposite direction parallel to an incident optical path is also disclosed.

Abstract: A laser beam with a wavelength capable of exciting atoms of helium in the metastable state is directed to a generated plasma, and atoms in the metastable state are excited. Absorption amount information representing the amount of laser beam absorbed is acquired, and the density of atoms of helium in the metastable state in the plasma is computed from the absorption amount. The emissions of light from helium gas in the plasma caused by transition from two different excited states to the lower level are measured, and the ratio between the intensities of the emissions is determined. The electron temperature of the produced plasma is computed from the computed density of the atoms of helium gas in the metastable state and the computed emission intensity ratio. With this, the plasma electron temperature can be computed with a relatively high accuracy irrespective of the condition of the plasma atmosphere.

Abstract: A method for measuring temperature of a rotating body such as a steam turbine is provided. The method includes striking a light beam onto the rotating body onto the rotating body and measuring a reflectance of the light beam from the rotating body. The method further includes obtaining a temperature of the rotating body based upon the measured reflectance.

Abstract: Cloud point monitoring systems for determining a cloud point temperature value for diesel fuel are provided. In one exemplary embodiment, a cloud point monitoring system receives diesel fuel in the tubular conduit and propagates a sound wave through the diesel fuel. The cloud point monitoring system further determines a cloud point temperature value indicative of a cloud point of the diesel fuel based on a phase shift of the sound wave propagating through the diesel fuel.

Abstract: Cloud point monitoring systems for determining a cloud point of diesel fuel are provided. In one exemplary embodiment, a cloud point monitoring system determines a cloud point temperature value utilizing signals indicating a viscosity level of diesel fuel and a temperature of the diesel fuel.

Abstract: A high-speed absorption spectrographic system employs a slit-less spectroscope to obtain high-resolution, high-speed spectrographic data of combustion gases in an internal combustion engine allowing precise measurement of gas parameters including temperature and species concentration.

Abstract: To use a simple structure to provide a fluorescent temperature sensor with increased accuracy through increasing the fluorescent light intensity of the fluorescent materials. A fluorescent temperature sensor for producing a temperature signal from a fluorescent light of a fluorescent material that is optically stimulated is provided with an LED for projecting light onto the fluorescent material, a photodiode for receiving the fluorescent light that is emitted by the fluorescent material, and a signal processing circuit for generating the temperature signal from the output of the photodiode.

Abstract: To provide a fluorescent temperature sensor capable of identifying easily the location of a failure. A fluorescent temperature sensor for producing a temperature signal from fluorescent light from a fluorescent material and that has been optically stimulated comprises a light projecting module having an LED for projecting light at the fluorescent material and a second photodiode for receiving light emitted from the LED and a light receiving module having a first photodiode for receiving the light emitted from the fluorescent material, where the location of a failure in the sensor can be identified based on, at least, the output signal from the second photodiode.

Abstract: A thermal measurement system for an object is provided. The system includes an array of detectors in two dimensions configured to receive radiation within multiple wavelength ranges, the array of detectors having a first axis representing a spatial dimension and a second axis representing a wavelength dimension. The system also includes an optical system configured to focus the radiation emitted by the object on to the array of detectors.

Abstract: To provide a fluorescent temperature sensor wherein light is propagated reliably with an easy adjustment. A fluorescent temperature sensor for producing a temperature signal from fluorescent light of an optically excited fluorescent material includes: a light emitting device for projecting light to the fluorescent material; a photoreceiving element for receiving fluorescent light emitted from the fluorescent material 1; a case for housing both the light emitting device and the photoreceiving element; and an optical fiber, between the case and the fluorescent material, for propagating the light of both the light emitting device and the fluorescent material.

Abstract: Methods and apparatus for wafer temperature measurement and calibration of temperature measurement devices may be based on determining the absorption of a layer in a semiconductor wafer. The absorption may be determined by directing light towards the wafer and measuring light reflected from the wafer from below the surface upon which the incident light impinges. Calibration wafers and measurement systems may be arranged and configured so that light reflected at predetermined angles to the wafer surface is measured and other light is not. Measurements may also be based on evaluating the degree of contrast in an image of a pattern in or on the wafer. Other measurements may utilize a determination of an optical path length within the wafer alongside a temperature determination based on reflected or transmitted light.

Abstract: The object of the invention is to provide a method of calibrating an optical FMCW backscattering measurement system that improves the precision of the measurement. The problem is solved by a method comprising the steps of A. Converting said received sensor signal to a complex received electrical signal as a function of said modulation frequency fm, said complex received electrical signal being represented by a magnitude part and a phase angle part as a function of said modulation frequency fm; B. Performing a transformation of said received electrical signal to provide a backscattering signal as a function of location between said first and second ends of said sensor and beyond said second end; C. From said backscattering signal as a function of location determining characteristics of a curve representative of said backscattering signal beyond said second end; D.

Abstract: A method and system for monitoring the quality of a given gas mixture being transmitted under pressure by throttling a sample of the gas mixture to a representative pressure and measuring the hydrocarbon dew point of the sample at the representative pressure. The measured hydrocarbon dew point is indicative of the cricondentherm of the gas mixture. The representative pressure is pre-selected to provide a pre-selected margin of error between measured hydrocarbon dew points of a set of representative gas mixtures at the representative pressure and respective cricondentherms of the set of representative gas mixtures.

Abstract: Aspects of a method and system for an energy efficient temperature sensing crystal integrated circuit (TSCIC) are provided. In this regard, one or more circuits in a temperature sensing crystal integrated circuit (TSCIC) may be configured to control power consumption of the TSCIC. The one or more circuits in the TSCIC may comprise a memory and a crystal. The one or more circuits in the TSCIC may be operable to generate an indication of temperature of the crystal. The one or more circuits in the TSCIC may be configured to control a current supplied to the crystal within the TSCIC, wherein the configuring is based on phase noise requirements of a signal generated by the crystal. Generation of the temperature indication may be enabled or disabled. The enabling or disabling may occur based on a rate of change of a temperature in the TSCIC.

Abstract: Aspects of a method and system for a temperature sensing crystal Integrated circuit with digital temperature output are provided. In this regard, an indication of temperature may be generated in an integrated circuit (IC) comprising a memory, a crystal or crystal oscillator, and at least a portion of an analog-to-digital converter. The temperature indication may be digitized via the analog-to-digital converter. Operation of one or more circuits may be controlled based on the digital temperature indication. The digital temperature indication may be communicated over a communication bus. An analog portion of the analog-to-digital converter may be integrated in the IC and may comprise, for example, a delta-sigma modulator. A digital portion of the analog-to-digital converter may be external to the IC and may comprise, for example, a digital filter.

Abstract: The temperature of an object such as a semiconductor wafer that includes silicon can be determined based on the variation of the optical absorption coefficient of silicon with temperature. Temperatures above about 850° C., can be found by measuring phenomena that are affected by the magnitude of the optical absorption coefficient, especially at wavelengths >˜1 ?m. Phenomena could include measuring light reflected, transmitted, emitted, absorbed, or scattered by the wafer and deriving the absorption coefficient from the measurements and then deriving temperature from the absorption coefficient. Temperature could be determined from a model relating phenomena directly to temperature, the model constructed based on absorption behaviour and techniques discussed herein. The resulting temperature could be used to calibrate or control a rapid thermal processing chamber or other apparatus.

Abstract: To provide a temperature sensor probe that can conduct stable measurements, and the manufacturing method of the same. The temperature sensor probe related to the present invention provides: a fluorescent material that is a mixture of a fluorescent substance and a transparent material; a thermosensitive part having a concave part in which the fluorescent material is arranged; a waveguide route rod that propagates excitation light, which is irradiated on the fluorescent material, and fluorescent light, which is produced by the fluorescent substance; and a protective tube that covers the side surfaces of the waveguide route rod. Then, the fluorescent material is affixed to the tip of the waveguide route rod using the transparent material, and the waveguide route rod bites into the fluorescent material.

Abstract: A measurement system for and method of measuring thicknesses of coatings as applied to objects and a coating system and method for coating objects, in particular three-dimensional objects, with coatings, in particular thermal barrier coatings (TBCs), and a monitoring system for and method of monitoring a state of a thermal barrier coating (TBC) as applied to an object which is exposed to a high-temperature environment, and a TBC for use with the same.

Abstract: The invention relates to a method for temperature measurement in a microfluid channel of a microfluid device. According to the invention, a method for temperature measurement in a microfluid channel of a microfluid device, by means of which the temperature maybe simply measured with reliable accuracy, maybe achieved, whereby a volume element of the microfluid channel in which the temperature is to be measured is irradiated with a light source, elastically-scattered and other undesired light is separated off from the light with Raman scattering in the volume chamber, the Raman scattered light is recorded by a recording means, the recorded Raman scattered light is converted into Raman signals and the temperature in the volume element determined from the Raman signals.

Abstract: The surface density of projections formed on a thin metal film of a temperature-measuring member having the metal film having been subjected to a temperature profile is calculated with a number-calculating section according to image data fed into an arithmetic processing unit through an optical microscope, CCD camera, and I/O board. The maximum temperature of the object is determined with the temperature-calculating unit according to the surface density and data on the maximum temperature and surface density previously stored in memory. Furthermore, a temperature-measuring member constituted by a thin aluminum film arranged on a substrate is used. A reduction in the reflectivity of the film due to projections formed on the film surface according to a temperature profile to which the member has been subjected is measured. The maximum temperature in the temperature profile is estimated according to the reduction in reflectivity.

Abstract: A temperature indicator (1) for indicating a high temperature at a surface (13) comprises a light-emitting electro-chemical cell (4) having a first electrode (8), a second electrode (9) and a light-emitting layer (10) being sandwiched between the two electrodes (8, 9). The light-emitting layer (10) comprises a matrix and ions being movable in the matrix, the mobility of said ions in said matrix being temperature dependent. A power source (5) is adapted for driving the light-emitting cell (4) with an AC voltage. The frequency of the AC voltage is tuned in such a way that, above a certain temperature level, the ions move fast enough in the matrix to provide a sufficient charge gradient in the light-emitting electrochemical cell (4) for the light-emitting electrochemical cell (4) to emit light before the AC power source (5) shifts the polarity of the voltage.

Abstract: A temperature sensitive paint comprises a binder for forming a polymer matrix, a transition metal complex embedded in the binder and displaying a temperature dependent fluorescence, the fluorescence of the transition metal complex showing a maximum relative temperature sensitivity per Kelvin at a first temperature, and a rare earth complex also embedded in the binder and displaying a temperature dependent fluorescence, the fluorescence of the rare earth complex showing a maximum relative temperature sensitivity per Kelvin at a second temperature. The second temperature is higher than the first temperature by 50 to 150 Kelvin so that the overall temperature range covered by both complexes as temperature probes is extended.

Abstract: A thermometer is provided. A housing has at least one opening. A dielectric element is disposed in the housing. At least one microwave guide is coupled to the at least one opening for providing a signal into the dielectric element for propagation at a resonant frequency and for receiving the signal from the dielectric element. A temperature determination unit receives the signal from the at least one microwave guide, measures the resonant frequency of the dielectric element, and determines the temperature of the dielectric element based on a relationship between resonant frequency and temperature of the dielectric element.

Abstract: A system for testing objects such as electronic devices and mechanical components to see how they can withstand thermally hard circumstances created by a thermal agent supplied from a supplying system communicating with a testing section by and through an inlet flow path and an outlet flow path, wherein heat exchange is effected between the incoming agent and the outgoing agent, so that the remaining heat content, worm or cold, is taken and utilized for later uses.

Abstract: A temperature indicator (101) is adapted to be provided on a surface (116) for providing a first type of light emission and a second type of light emission (L2). The temperature indicator (101) comprises a light-emitting diode (108) for providing said first type of light emission and a light-emitting electrochemical cell (109) for providing said second type of light emission (L2). The light-emitting electrochemical cell (109) has a first electrode (120), a second electrode (121) and a second light-emitting layer (113) being sandwiched between them and comprising a matrix and ions being movable in the matrix, the mobility of said ions in said matrix being temperature dependent. A power source (105) is adapted for driving the cell (109) with an AC voltage, the frequency of which is tuned in such a way that the cell (109) provides said second type of light emission (L2) when the surface temperature exceeds a certain level.

Abstract: The invention relates to a method for determining the temperature of a surface coating of rotating blades mounted in a non-positive-displacement machine with a rotor shaft rotationally mounted in a housing, during which electromagnetic waves are emitted in a duct in an area of the rotating blades by at least one means for generating electromagnetic waves. The electromagnetic waves are reflected, at least in part, by at least one rotating blade. The reflected portions of the electromagnetic waves are received by at least one receiving means and the temperature of the surface coating of the rotating blades is determined from a distribution of intensity of the received electromagnetic waves. The invention also relates to a method for determining the temperature of a surface coating of guide vanes mounted in a rotationally fixed manner in a non-positive-displacement machine with a housing, and to a device for carrying out the method.

Abstract: A substrate for temperature measurement has seventeen temperature measuring elements mounted thereto and each having a built-in quartz resonator. Each of the temperature measuring elements is connected to one coaxial cable covered with fluorocarbon resin having excellent heat resistance. The seventeen cables are bonded to the substrate for temperature measurement using an adhesive so that all the paths of the cables from their contacts with the temperature measuring elements to their boundary points to the outside of the substrate run on the upper surface of the substrate for temperature measurement, and that they are made to have a substantially equal length from their contacts to their boundary points. This minimizes and makes uniform thermal disturbances given to each of the temperature measuring elements from the cables, thus enabling high-precision substrate temperature measurement.

Abstract: The invention provides a method for the determination of the phase change characteristics of a hazardous material, the method comprising optically recording images of a sample of the material and objectively evaluating the images. The phase change characteristics generally relate to a solid/liquid or liquid/solid phase change, and the method finds particular application in the determination of the crystallisation points of hazardous materials, most particularly radioactive materials. The images are typically recorded by means of a camera, and evaluated using a computer, which is able to objectively determine the point at which a phase change is first seen to occur, and thereby provide accurate, reliable and objective data.

Abstract: The present invention provides a dual-probe thermally compensated fluorescence decay rate temperature sensor capable of measuring the true temperature of a sample surface and its associated method of use.

Abstract: A system and method for a multi-temperature indicator stick. The multi-temperature indicator stick includes an elongated stick configured to indicate two or more predetermined temperatures. The elongated stick includes a first temperature indication material configured to indicate a first predetermined temperature upon being subjected to the first predetermined temperature. The elongated stick also includes a second temperature indication material configured to indicate a second predetermined temperature upon being subjected to the second predetermined temperature. The first temperature indication material and the second temperature indication material share a common interface extending longitudinally along the elongated stick.

Abstract: A ground-contacting component of a vehicle, consisting partly of polymeric compounds, in which at least one wireless temperature measurement system 7 based on surface acoustic wave or bulk acoustic wave technology is embedded in a region of a polymeric compound liable to reach temperatures above 100° C. and/or to be influenced by a surrounding region of a polymeric compound liable to reach temperatures above 100° C. during use of the vehicle. Also disclosed are a tire 1 and the use of a wireless temperature measurement system based on acoustic surface wave or bulk acoustic wave technology.

Abstract: An excess temperature indicator can provide a visual indication of past exposure of perishable, maturing and other host products to an elevated temperature exceeding a threshold temperature. The indicator can have an upper layer provided with a viewing window and a wick attached to the upper layer. A reservoir of heat-fusible indicator material can be disposed in contact with the wick, to fuse and move along the wick changing the visual appearance of a first portion of the wick viewable through the window, in response to an excess temperature event. Also, the indicator can have a region of fused upper layer material attaching the wick to the upper layer. Optionally, a window seal can extend around the viewing window to prevent migration of the indicator material. The indicator can be employed to monitor vaccines, foods and other products providing an enduring visual signal of exposure to potentially damaging temperature conditions.