Source Patents (Class 378/119)
  • Patent number: 11006908
    Abstract: The present disclosure relates to systems and methods for positioning an X-ray scanner. The systems may perform the methods to obtain an origin related to an X-ray scanner; determine a coordinate system based on the origin; determine coordinates of a second location of the X-ray scanner based on the origin and the coordinate system; obtain coordinates of a first location based on the origin and the coordinate system; and determine, based on the origin and the coordinates of the second location, positioning information of the X-ray scanner configured to cause the X-ray scanner to be positioned at the first location from the second location of the X-ray scanner.
    Type: Grant
    Filed: May 4, 2020
    Date of Patent: May 18, 2021
    Assignee: SHANGHAI UNITED IMAGING HEALTHCARE CO., LTD.
    Inventors: Qianqian Yu, Wenqiang Liu, Bing Tang, Shouyuan Jin
  • Patent number: 11004646
    Abstract: An X-ray tube includes: a vacuum housing configured to include an internal space which is vacuum; a target unit configured to be disposed in the internal space, and include a target that generates an X-ray by using an electron beam incident therein, and a target support unit that supports the target, the X-ray generated by the target being transmitted through the target support unit; and an X-ray emission window configured to be so provided as to face the target support unit, and seal an opening of the vacuum housing, the X-rays transmitted through the target support unit being transmitted through the X-ray emission window. At least a part of the X-ray emission window is in contact with the target support unit.
    Type: Grant
    Filed: February 26, 2018
    Date of Patent: May 11, 2021
    Assignee: HAMAMATSU PHOTONICS K.K.
    Inventor: Kazutaka Suzuki
  • Patent number: 11000245
    Abstract: Systems and methods for generating tunable x-ray emissions including a tunable x-ray source that includes a driver, such as a laser, configured to generate one or more driver pulses, such as one or more laser pulses, and a target source configured to emit a target material. The target source is arranged so that the emitted target material intersects a propagation axis of the driver pulse(s) and the target source may be configured so that the emitted target material has a tailored density profile along the propagation axis of the driver pulse(s), the tailored density profile along the propagation axis having a first density peak region followed by a lower density region followed by a second density peak region, e.g., in an “M” shape.
    Type: Grant
    Filed: September 9, 2019
    Date of Patent: May 11, 2021
    Assignee: NUtech Ventures
    Inventors: Matthias Fuchs, Ping Zhang
  • Patent number: 10955359
    Abstract: Embodiments of the present invention provide an improved method and system for assessing non-uniformity of features in the measurement area (within the beam spot) on a semiconductor structure, (e.g. wafer), such as a non-uniform film thickness. The scattering from non-uniform features is modeled. Post-processing the residual of theoretical and collected spectra is performed to assess a measure of non-uniformity from within an incident spot beam of a spectrum acquisition tool.
    Type: Grant
    Filed: November 12, 2013
    Date of Patent: March 23, 2021
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Robin Hsin-Kuo Chao, Yunlin Zhang
  • Patent number: 10925567
    Abstract: A system and method for adaptive imaging include a shape sensing system (115, 117) coupled to an interventional device (102) to measure spatial characteristics of the interventional device in a subject. An image module (130) is configured to receive the spatial characteristics and generate one or more control signals in accordance with the spatial characteristics. An imaging device (110) is configured to image the subject in accordance with the control signals.
    Type: Grant
    Filed: October 24, 2011
    Date of Patent: February 23, 2021
    Assignee: KONINKLIJKE PHILIPS N.V.
    Inventors: Raymond Chan, Jinnan Wang, Adrien Emmanuel Desjardins, Luis Felipe Gutierrez, Maya Ella Barley, Gert Wim 'T Hooft
  • Patent number: 10925556
    Abstract: The present invention relates to a modulation of X-ray radiation for the purposes of imaging an object of interest. For the modulation, the X-ray radiation provided by an X-ray source (12) is in part totally reflected by a mirror (20). Thus, an X-ray radiation at an object receiving space (16) is formed by an unreflected X-ray radiation (24) and a reflected X-ray radiation (26). The mirror (20) is displaceable by an actuator (28), such that the intensity of the reflected X-ray radiation (26) can be adjusted, in particular to a density of the object to be imaged.
    Type: Grant
    Filed: July 13, 2016
    Date of Patent: February 23, 2021
    Assignee: KONINKLIJKE PHILIPS N.V.
    Inventors: Ewald Roessl, Stewart Young
  • Patent number: 10910191
    Abstract: An X-ray tube includes: a vacuum housing configured to include an internal space which is vacuum; a target unit configured to be disposed in the internal space, and include a target that generates an X-ray by using an electron beam incident therein, and a target support unit that supports the target, the X-ray generated by the target being transmitted through the target support unit; an X-ray emission window configured to be so provided as to face the target support unit, and seal an opening of the vacuum housing, the X-rays transmitted through the target support unit being transmitted through the X-ray emission window; an elastic member configured to press the target unit in such a direction as to approach the X-ray emission window; and a target shift unit configured to shift the target unit pressed by the elastic member in a direction crossing an incidence direction of the electron beam.
    Type: Grant
    Filed: February 26, 2018
    Date of Patent: February 2, 2021
    Assignee: HAMAMATSU PHOTONICS K.K.
    Inventor: Kazutaka Suzuki
  • Patent number: 10900777
    Abstract: A method for determining the geometry of a structure on an object at least by using a computer tomography sensor system comprising at least a radiation source, a mechanical axis of rotation, and a detector, preferably a planar detector, wherein surface measurement points are generated by the computer tomography sensor system, for example in the region of material transitions. In order to select the surface measurement points to be used for the determination of a geometry feature by using any target geometry, in particular without the availability of a CAD model being necessary, according to the invention, in order to determine the geometry features, surface measurement points are used which are associated with the geometry features to be determined on the basis of specifiable rules and the geometry features are determined from the associated surface measurement points.
    Type: Grant
    Filed: January 24, 2014
    Date of Patent: January 26, 2021
    Assignee: WERTH MESSTECHNIK GMBH
    Inventors: Ralf Christoph, Ingomar Schmidt
  • Patent number: 10880979
    Abstract: The present disclosure is directed to a device having a nozzle for dispensing a liquid target material; one or more intermediary chamber(s), each intermediary chamber positioned to receive target material and formed with an exit aperture to output target material for downstream irradiation in a laser produced plasma (LPP) chamber. In some disclosed embodiments, control systems are included for controlling one or more of gas temperature, gas pressure and gas composition in one, some or all of a device's intermediary chamber(s). In one embodiment, an intermediary chamber having an adjustable length is disclosed.
    Type: Grant
    Filed: September 9, 2016
    Date of Patent: December 29, 2020
    Assignee: KLA Corporation
    Inventors: Brian Ahr, Alexander Bykanov, Rudy F. Garcia, Layton Hale, Oleg Khodykin
  • Patent number: 10825640
    Abstract: An X-ray tube includes an electron gun, a target that generates X-rays, and a vacuum housing that accommodates the electron gun and the target. The vacuum housing has a metal portion having an X-ray emission window, and an insulation valve connected to the metal portion. The metal portion has a cylinder portion in which the X-ray emission window is provided and which surrounds a tube axis of the vacuum housing, and a tapered portion which is connected to an end portion of the cylinder portion, surrounds the tube axis, and protrudes such that a connection part between the metal portion and an insulation valve is covered. The tapered portion has a shape increased in diameter such that a separation distance between a distal end portion and the tube axis is longer than a separation distance between a base end portion and the tube axis.
    Type: Grant
    Filed: April 10, 2019
    Date of Patent: November 3, 2020
    Assignee: HAMAMATSU PHOTONICS K.K.
    Inventors: Atsushi Ishii, Tutomu Inazuru
  • Patent number: 10791999
    Abstract: A support structure and an imaging component are provided in an imaging system. The imaging component comprises a port extension that frames an opening for x-ray emission. The support structure comprises a recess for receiving the port extension, the recess also framing an opening for x-ray transmission. The imaging system may be a computed tomography (CT) imaging system, x-ray diagnostic system, or other imaging system.
    Type: Grant
    Filed: May 13, 2016
    Date of Patent: October 6, 2020
    Assignee: GENERAL ELECTRIC COMPANY
    Inventors: Brandon Smith, Edward Emaci
  • Patent number: 10728996
    Abstract: The circular X-ray tube for the irradiation of the object (1) by X-radiation comprising the circular body (2) and at least two friction elements that rub together whereby forming a triboluminescent source of X-radiation. The one friction element comprises at least one circumferential element (3) arranged on the external circumferential side of the circular body (2) of the X-ray tube and the other friction element comprises at least one pressure element (4) that is pressed against the circumferential element (3), where the pressure element (4) is adapted for dragging upon the circumferential element (3), and/or at least one circumferential element (3) is adapted for pulling through under the pressure element (4). The X-ray instrument utilizes the circular X-ray tube and the imaging detectors (7) of ionizing radiation.
    Type: Grant
    Filed: August 2, 2018
    Date of Patent: July 28, 2020
    Assignee: Radalytica s.r.o.
    Inventors: Richard Kaderabek, Josef Uher
  • Patent number: 10681794
    Abstract: In one embodiment, an x-ray tube 15 can be used closer to a sample. An angle A1 between an anode axis 02 and an electron-beam axis 01 can be ?10° and ?80° and an angle A2 between the anode axis 02 and an x-ray axis 03 can be ?10° and ?80°. In another embodiment, a cap 20 on an anode 12 can block x-rays emitted in undesired directions. The cap 20 can include an internal cavity 24, an electron-beam hole 21, an anode hole 22, and an x-ray hole 23. In another embodiment, an electrical connection between an x-ray tube 15 and a power supply 18 can be reliable and easy to manufacture. The anode 12 can include a hole 31 at an end of the anode 12 sized and shaped for insertion of an electrical connector 32.
    Type: Grant
    Filed: January 22, 2020
    Date of Patent: June 9, 2020
    Assignee: Moxtek, Inc.
    Inventors: Ricky B. Steck, Brad Harris
  • Patent number: 10672584
    Abstract: A X-ray generating device includes a chamber, a rotating body in the chamber, a starting material storage vessel for storing a target starting material in liquid form, and a starting material supply mechanism for applying the target starting material onto a surface of the rotating body. The X-ray generating device also includes an energy beam inlet window disposed at an opening of the chamber and configured to transmit an energy beam, which will be directed onto the target starting material on the surface of the rotating body and introduce the energy beam from the exterior of the chamber to the interior of the chamber, and an X-ray outlet window disposed at the opening of the chamber and configured to transmit the X-rays, which are generated upon irradiating the target starting material with the energy beam, and allow the X-rays to proceed to the exterior of the chamber.
    Type: Grant
    Filed: May 30, 2017
    Date of Patent: June 2, 2020
    Assignee: USHIO DENKI KABUSHIKI KAISHA
    Inventors: Yusuke Teramoto, Takahiro Shirai
  • Patent number: 10661102
    Abstract: A medical device includes: a base; a positioner coupled to the base; an accelerator coupled to the positioner, wherein the positioner is operable to rotate the accelerator relative to the base about at least two axes; and a power source coupled to the accelerator, the power source configured to provide microwave power for the accelerator, wherein a position of the power source relative to the base remains fixed during movement of the accelerator. A medical device includes: a base; a positioner coupled to the base; an accelerator coupled to the positioner; a power source configured to provide microwave power for the accelerator, wherein a position of the source relative to the base remains fixed during movement of the accelerator; and a waveguide for coupling the power source and the accelerator; wherein the waveguide has a first segment with a first cross section, the first cross section being a circular cross-section.
    Type: Grant
    Filed: March 31, 2017
    Date of Patent: May 26, 2020
    Assignee: Varian Medical Systems, Inc.
    Inventors: James E. Clayton, Mark E. Trail
  • Patent number: 10667376
    Abstract: A target supply device according to an aspect of the present disclosure includes a vibration element configured to generate a droplet by vibrating a target substance to be output from a nozzle 80, a droplet detection unit configured to detect the droplet, and a control unit 70. A first detection threshold and a second detection threshold to be compared with a detection signal from the droplet detection unit are set to the control unit 70. The first detection threshold is used to generate a light emission trigger for a laser beam. The second detection threshold has a smaller absolute value from a base line of the detection signal than the first detection threshold. The control unit 70 calculates an evaluation parameter for a satellite based on the detection signal and the second detection threshold, and determines a duty value of an electric signal suitable for operation of the vibration element based on the evaluation parameter.
    Type: Grant
    Filed: October 4, 2019
    Date of Patent: May 26, 2020
    Assignee: Gigaphoton Inc.
    Inventors: Yuta Takashima, Yoshifumi Ueno
  • Patent number: 10643816
    Abstract: The present invention provides an X-Ray emitting device that comprises a focusing electrode composed of a ceramic-based material, which can be manufactured by a simple process and is excellent in durability.
    Type: Grant
    Filed: October 29, 2019
    Date of Patent: May 5, 2020
    Assignee: aweXomeRay Co., Ltd.
    Inventors: Hong Soo Choi, Se Hoon Gihm, Keun Soo Jeong
  • Patent number: 10636610
    Abstract: An embodiment of an X-ray tube is described that comprises an outer cylinder; a window positioned on an end of the outer cylinder; an electron gun comprising an emission orifice, wherein the electron gun is coupled to a side of the outer cylinder at an angle that orients the emission orifice toward the window; and a rod centrally positioned within the outer cylinder, wherein the rod comprises a concave geometry at a distal end proximal to the electron gun and a target surface configured at an angle that orients the target surface towards the emission orifice, wherein the concave geometry is configured to position the target surface to have a focal spot size of an electron beam from the emission orifice in range of about 2-6 ?m.
    Type: Grant
    Filed: April 26, 2018
    Date of Patent: April 28, 2020
    Assignee: THERMO SCIENTIFIC PORTABLE ANALYTICAL INSTRUMENTS INC.
    Inventor: William Ferneau English, II
  • Patent number: 10631392
    Abstract: An extreme ultra-violet (EUV) lithography system includes an EUV source and EUV scanner. A droplet generator provides a droplet stream in the EUV source. A gas shield is configured to surround the droplet stream. When a laser reacts a droplet in the stream, EUV radiation and ionized particles are produced. The gas shield can reduce contamination resulting from the ionized particles by conveying the ionized particles to a droplet catcher. Components of the EUV source may be biased with a voltage to repel or attract ionized particles to reduce contamination from the ionized particles.
    Type: Grant
    Filed: April 30, 2018
    Date of Patent: April 21, 2020
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Ming-Fa Wu, Tzung-Chi Fu, Chun-Che Lin, Po-Chung Cheng, Huai-Tei Yang
  • Patent number: 10593068
    Abstract: Methods of investigating a specimen using tomographic imaging include directing a beam of radiation through a specimen and onto a detector, thereby generating an image of the specimen. The directing is repeated for different specimen orientations relative to the beam, thereby generating a corresponding set of images. An iterative mathematical reconstruction technique is used to convert the images into a tomogram. The reconstruction is mathematically constrained to curtail a solution space using three-dimensional SEM imagery of at least a part of the specimen that overlaps the tomogram by requiring iterative results of the reconstruction to be consistent with pixel values derived from the SEM imagery.
    Type: Grant
    Filed: August 28, 2017
    Date of Patent: March 17, 2020
    Assignee: FEI Company
    Inventors: Remco Schoenmakers, Pavel Poto{hacek over (c)}ek
  • Patent number: 10578655
    Abstract: A device for measuring low currents is proposed to include: a transimpedance amplifier to convert an analog current signal into an analog voltage signal; an analog-to-digital converter to acquire a graph that plots a curve representing variation of the analog voltage signal using digital codes; a statistic module to acquire a set of crossing numbers by: for each of the digital codes, making a straight line that has a constant value equaling the digital code across time in the graph, and counting a number of crossings of the curve with the straight line; and an analysis module to analyze distribution of the crossing numbers, and to output an output code based on the distribution of the crossing numbers.
    Type: Grant
    Filed: February 14, 2017
    Date of Patent: March 3, 2020
    Assignee: INSTITUTE OF NUCLEAR ENERGY RESEARCH ATOMIC ENERGY COUNCIL, EXECUTIVE YUAN
    Inventors: Chi-Wen Hsieh, Yi-Chun Lin, Tseng-Te Huang, Ming-Chen Yuan, Chien-Hau Chu, Yu-Chin Chi
  • Patent number: 10524344
    Abstract: A laser-plasma-based acceleration system includes a focusing element and a laser pulse emission directing a laser beam to the focusing element to such that laser pulses transform into a focused beam and a chamber defining a nozzle having a throat and an exit orifice, emitting a critical density range gas jet from the exit orifice for laser wavelengths ranging from ultraviolet to the mid-infrared. the critical density range gas jet intersects the focused beam at an angle and in proximity to the exit orifice of the nozzle to define a point of intersection between the focused beam and the critical density range gas jet. In intersection with the critical density range gas jet, the pulsed focused beam drives a laser plasma wakefield relativistic electron beam. A corresponding method of laser-plasma-based acceleration is also described. The critical density range may include 2×1020 cm?3 to 5×1021 cm?3.
    Type: Grant
    Filed: May 15, 2017
    Date of Patent: December 31, 2019
    Assignee: University of Maryland, College Park
    Inventors: Howard M. Milchberg, Andrew Goers, George Hine, Fatholah Salehi, Linus Feder, Bo Miao
  • Patent number: 10522316
    Abstract: Disclosed is an X-ray source, including: a cathode; an anode positioned on the cathode so as to face the cathode; emitters formed on the cathode; a gate electrode positioned between the cathode and the anode and including openings at positions corresponding to those of the emitters; an insulating spacer formed between the gate and the anode; and a coating layer formed on an internal wall of the insulating spacer, and including a material having a lower secondary electron emission coefficient than that of the insulating spacer.
    Type: Grant
    Filed: March 19, 2019
    Date of Patent: December 31, 2019
    Assignee: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
    Inventors: Jin-Woo Jeong, Yoon-Ho Song
  • Patent number: 10433412
    Abstract: This disclosure provides systems, methods, and apparatus related to laser plasma accelerators. In one aspect a block of material defines a gas inlet, a chamber in fluid communication with the gas inlet, a throat in fluid communication with the chamber, a channel in fluid communication with the throat, and a gas outlet in fluid communication with the channel. The throat is configured to generate a supersonic flow of a gas when the gas flows through the throat. The channel includes a ramp that is positioned proximate the gas outlet, with the ramp being inclined at an angle with respect to a direction of a flow of the gas proximate a surface of the channel prior to the ramp at the gas outlet.
    Type: Grant
    Filed: February 12, 2018
    Date of Patent: October 1, 2019
    Assignee: The Regents of the University of California
    Inventors: Hann-Shin Mao, Wim Leemans, Stepan Bulanov
  • Patent number: 10420197
    Abstract: A radiation source apparatus comprising: a container for being pressurized with a gaseous medium in which plasma which emits plasma emitted radiation is generated following excitation of the gaseous medium by a driving radiation, wherein said container is operable substantially to remove radiation with a wavelength of 10-400 nm from said plasma emitted radiation before said plasma emitted radiation exits said container as output radiation. In an embodiment the container comprises: an inlet radiation transmitting element operable to transmit said driving radiation from outside said container to inside said container, and an outlet radiation transmitting element operable to transmit at least some of said plasma emitted radiation from inside said container to outside said container as output radiation; wherein at least one of said inlet and outlet radiation transmitting elements comprises a plane parallel plate.
    Type: Grant
    Filed: February 5, 2018
    Date of Patent: September 17, 2019
    Assignee: ASML Netherlands B.V.
    Inventor: Martijn Petrus Christianus Van Heumen
  • Patent number: 10365230
    Abstract: Metrology methods and modules are provided, which comprise measuring intensity spatial distributions and peaks of spots at the pupil plane of a metrology system that correspond to various diffraction orders scattered from target cells and calculating overlay(s) of the target cell(s) from the measured intensity spatial distributions and peaks. For example, intensity peak or distribution of zeroth diffraction orders from four cells, first diffraction orders from two cells as well as diffraction orders from a single cell may be used to derive an overlay estimation, which may also be compared to standard overlay measurements for different purposes. Intensity spatial distributions may also be used to derive weight function for adjusting measurements or the metrology system.
    Type: Grant
    Filed: March 18, 2015
    Date of Patent: July 30, 2019
    Assignee: KLA-Tencor Corporation
    Inventors: Eran Amit, Tzahi Grunzweig
  • Patent number: 10297359
    Abstract: An x-ray illumination beam system includes an electron emitter and a target having one or more target microstructures. The one or more microstructures may be the same or different material, and may be embedded or placed atop a substrate formed of a heat-conducting material. The x-ray source may emit x-rays towards an optic system, which can include one or more optics that are matched to one or more target microstructures. The matching can be achieved by selecting optics with the geometric shape, size, and surface coating that collects as many x-rays as possible from the source and at an angle that satisfies the critical reflection angle of the x-ray energies of interest from the target. The x-ray illumination beam system allows for an x-ray source that generates x-rays having different spectra and can be used in a variety of applications.
    Type: Grant
    Filed: October 13, 2017
    Date of Patent: May 21, 2019
    Assignee: Sigray, Inc.
    Inventors: Wenbing Yun, Sylvia Jia Yun Lewis, Janos Kirz, David Charles Reynolds, Alan Francis Lyon
  • Patent number: 10289006
    Abstract: A beam delivery apparatus is used with a laser produced plasma source. The beam delivery apparatus comprises variable zoom optics (550) operable to condition a beam of radiation so as to output a conditioned beam having a configurable beam diameter (b) and a plurality of mirrors (530a, 530b) operable to direct the conditioned beam of radiation to a plasma generation site. The beam delivery apparatus enables control of the axial position of the beam where the beam has a particular diameter, with respect to the beam's focus position (570). Also, a method is used to control the axial position of the location at a plasma generation site where a beam has a particular diameter, with respect to the beam's focus position.
    Type: Grant
    Filed: November 26, 2013
    Date of Patent: May 14, 2019
    Assignee: ASML Netherlands B.V.
    Inventors: Jan Bernard Plechelmus Van Schoot, Markus Franciscus Antonius Eurlings, Hermanus Johannes Maria Kreuwel
  • Patent number: 10247865
    Abstract: A bandpass filter may include a set of layers. The set of layers may include a first subset of layers. The first subset of layers may include hydrogenated germanium (Ge:H) with a first refractive index. The set of layers may include a second subset of layers. The second subset of layers may include a material with a second refractive index. The second refractive index may be less than the first refractive index.
    Type: Grant
    Filed: July 24, 2017
    Date of Patent: April 2, 2019
    Assignee: VIAVI Solutions Inc.
    Inventors: James Switzer, III, Georg J. Ockenfuss
  • Patent number: 10242837
    Abstract: Provided is an anode for an X-ray generating tube, which reduces a drop in the quality of an emitted X-ray due to the history of X-ray emitting operation. A target layer is formed on the inside of the edge of a support substrate. An end portion of an extended portion of a joining member, which protrudes over a support surface of the support substrate, is covered with a conductive member higher in melting point than the joining member. The conductive member is electrically connected to the target layer, thereby electrically connecting the joining member to the target layer.
    Type: Grant
    Filed: October 29, 2015
    Date of Patent: March 26, 2019
    Assignee: CANON KABUSHIKI KAISHA
    Inventors: Shuji Yamada, Nobuhiro Ito, Takao Ogura
  • Patent number: 10236090
    Abstract: An apparatus and method for the production of radioisotopes utilizing an energy recovery linac. The ERL system is composed of an electron beam source, multiple superconducting radio frequency cavities operating at 4.5 K, a thin radiator, a target material, and a beam dump. The accompanying method discloses the use of the ERL system to generate desired radioisotopes via target interaction with bremsstrahlung photons while allowing recovery of a substantial portion of the electron beam energy before the beam is extracted to the beam dump.
    Type: Grant
    Filed: July 4, 2013
    Date of Patent: March 19, 2019
    Assignee: JEFFERSON SCIENCE ASSOCIATES, LLC
    Inventors: Hari Areti, Andrew Kimber, Andrew Hutton, David Douglas, Rui Li, Geoff Krafft
  • Patent number: 10217596
    Abstract: The present disclosure relates to multi-layer X-ray sources having decreased hydrogen within the layer stack and/or tungsten carbide inter-layers between the primary layers of X-ray generating and thermally-conductive materials. The resulting multi-layer target structures allow increased X-ray production, which may facilitate faster scan times for inspection or examination procedures.
    Type: Grant
    Filed: September 29, 2016
    Date of Patent: February 26, 2019
    Assignee: General Electric Company
    Inventors: Yong Liang, Vance Scott Robinson
  • Patent number: 10074503
    Abstract: The invention relates to an electron gun for generating a flat electron beam, comprising a cathode with an emission surface which is curved about a central axis and which is designed to emit electrons. The electron gun further comprises an accelerating device for accelerating the electrons in a radial direction towards a target region on the central axis. Furthermore, the emission surface has a width in the azimuth direction and a height oriented perpendicularly to the width, said width being at least ten times greater than the height.
    Type: Grant
    Filed: September 16, 2014
    Date of Patent: September 11, 2018
    Assignee: Siemens Aktiengesellschaft
    Inventor: Oliver Heid
  • Patent number: 10068742
    Abstract: The present invention relates to a radiation generating tube. The radiation generating tube includes an envelope including an insulating tubular member having at least two openings, a cathode connected to one of the openings of the insulating tubular member, and an anode connected to the other of the openings of the insulating tubular member. At least one of the cathode and the anode and the insulating tubular member are bonded at a bonded portion with an electrically conductive bonding member; and the bonded portion bonded with the electrically conductive bonding member is coated with a dielectric layer.
    Type: Grant
    Filed: December 28, 2017
    Date of Patent: September 4, 2018
    Assignee: Canon Kabushiki Kaisha
    Inventors: Koji Yamazaki, Yasue Sato, Kazuyuki Ueda
  • Patent number: 10051720
    Abstract: Disclosed below are representative embodiments of methods, apparatus, and systems for generating electrons. For example, certain embodiments comprise a charge gating diamond QED based electron source, which can be suspended within the RF cavity of an electron injection system in a superconducting radiofrequency (SRF) electron accelerator. Embodiments of the disclosed technology are capable of producing low temperature (cold) electron beams, where “temperature” refers to the transverse energy in the extracted electron beam (or beam emittance). Embodiments of the disclosed technology can also exhibit enhanced charge replenishment capabilities by virtue of the material selected to suspend the electron source within the RF cavity of the electron injection system.
    Type: Grant
    Filed: July 8, 2016
    Date of Patent: August 14, 2018
    Assignee: Los Alamos National Security, LLC
    Inventors: Roger Shurter, Jose Taccetti
  • Patent number: 10039441
    Abstract: An extra-oral dental imaging apparatus for obtaining an image from a patient has a radiation source and a digital imaging sensor that provides, for each of a number of image pixels, at least a first digital value according to a count of received photons that exceed at least a first energy threshold. A mount supports the radiation source and the digital imaging sensor on opposite sides of the patient's head. There can be a computer in signal communication with the digital imaging sensor for acquiring one or more two-dimensional images.
    Type: Grant
    Filed: December 21, 2011
    Date of Patent: August 7, 2018
    Assignee: Trophy
    Inventors: Jean Marc Inglese, Sylvie M. Bothorel, Donna K. Rankin-Parobek
  • Patent number: 10032597
    Abstract: An anode member includes a first metal tube and a second metal tube having a coefficient of thermal expansion that is larger than that of the first metal tube. A peripheral portion of a target is bonded to the anode member via a bonding material that is arranged so as to extend over the first metal tube and the second metal tube.
    Type: Grant
    Filed: July 6, 2015
    Date of Patent: July 24, 2018
    Assignee: CANON KABUSHIKI KAISHA
    Inventors: Yasuo Ohashi, Kazuyuki Ueda
  • Patent number: 10028367
    Abstract: The invention relates to a device (100) for generating UV or X-ray radiation (R) by means of a plasma (10), comprising a first compartment (110), a dispensing device (5), which is adapted to provide a target material (80) in the first compartment (10), an excitation light source (13) for providing an excitation light beam (90), and a buffer gas inlet (130) and/or a buffer gas outlet (140) for providing a buffer gas flow (B) along the direction (D) of the excitation light beam (90) in the first compartment (110), wherein the first compartment (110) is adapted to be at least partially heated by a heating device (150). The invention further relates to a method for generating UV or X-ray radiation (R) by means of the device (100).
    Type: Grant
    Filed: August 31, 2017
    Date of Patent: July 17, 2018
    Assignee: ETH ZÜRICH
    Inventors: Markus Brandstätter, Reza Abhari, Bob Rollinger
  • Patent number: 10008358
    Abstract: Disclosed is an X-ray source, including: a cathode including a shielding channel through which an X-ray passes; emitters formed on an upper surface of the cathode, and arranged around the shielding channel; an anode positioned so as to face the cathode, and including an anode target in which an E-beam is focused; and a gate electrode positioned between the cathode and the anode, and including gate holes at positions corresponding to those of the emitters.
    Type: Grant
    Filed: August 4, 2016
    Date of Patent: June 26, 2018
    Assignee: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
    Inventors: Jin-Woo Jeong, Yoon-Ho Song
  • Patent number: 9993217
    Abstract: The disclosure is related an apparatus and method for producing a panoramic radiograph of a target object using a three dimensional (3D) radiograph of the same object. The apparatus may include a communication circuit and a processor. The communication circuit may be configured to receive 3D radiograph digital data of the 3D radiograph. The processor may be configured to generate a plurality of x-ray projection images of the target object by performing forward-projection on voxels associated with the target object, and to combine the generated x-ray projection images to produce the panoramic radiograph of the target object.
    Type: Grant
    Filed: April 27, 2016
    Date of Patent: June 12, 2018
    Assignees: VATECH Co., Ltd., VATECH EWOO Holdings Co., Ltd.
    Inventors: Woong Bae, Sang Og Na
  • Patent number: 9989863
    Abstract: A lithographic system including a lithographic apparatus with an anamorphic projection system, and a radiation source configured to generate an EUV radiation emitting plasma at a plasma formation location, the EUV radiation emitting plasma having an elongate form in a plane substantially perpendicular to an optical axis of the radiation source.
    Type: Grant
    Filed: January 23, 2015
    Date of Patent: June 5, 2018
    Assignee: ASML NETHERLANDS B.V.
    Inventors: Jan Bernard Plechelmus Van Schoot, Andrei Mikhailovich Yakunin
  • Patent number: 9986628
    Abstract: A method of generating radiation for a lithography apparatus. The method comprises providing a continuously renewing fuel target (50) at a plasma formation location (12) and directing a continuous-wave excitation beam (6) at the plasma formation location such that fuel within the continuously renewing fuel target is excited by the continuous-wave excitation beam to a radiation generating plasma.
    Type: Grant
    Filed: October 10, 2013
    Date of Patent: May 29, 2018
    Assignee: ASML Netherlands B.V.
    Inventors: Erik Roelof Loopstra, Andrei Mikhailovich Yakunin, Vadim Yevgenyevich Banine, Andrey Nikipelov, Edgar Alberto Osorio Oliveros, Alexander Matthijs Struycken, Bert Pieter Van Drieënhuizen, Jan Bernard Plechelmus Van Schoot
  • Patent number: 9986627
    Abstract: A method of x-ray and gamma-ray generation via laser Compton scattering uses the interaction of a specially-formatted, highly modulated, long duration, laser pulse with a high-frequency train of high-brightness electron bunches to both create narrow bandwidth x-ray and gamma-ray sources and significantly increase the laser to Compton photon conversion efficiency.
    Type: Grant
    Filed: June 27, 2017
    Date of Patent: May 29, 2018
    Assignee: Lawrence Livermore National Security, LLC
    Inventor: Christopher P. J. Barty
  • Patent number: 9972473
    Abstract: In an envelope rotation type X-ray tube apparatus, a cathode releases electrons, and the electrons released from the cathode are deflected by deflection coils. A target generates X-rays by being bombarded with the electrons deflected by the deflection coils. Here, a shield ring, while allowing passage through a ring interior of those of the electrons deflected by the deflection coils that head for an area of the target set beforehand, blocks electrons heading outward of the area. Consequently, the electrons are inhibited from bombarding on areas of the target outward of the area and an envelope. This can prevent damage to the envelope.
    Type: Grant
    Filed: December 3, 2013
    Date of Patent: May 15, 2018
    Assignee: SHIMADZU CORPORATION
    Inventor: Tatsuya Yoshizawa
  • Patent number: 9947501
    Abstract: Disclosed herein are a high-voltage generator for an x-ray source, an x-ray gun, an electron beam apparatus, a rotary vacuum seal, a target assembly for an x-ray source, a rotary x-ray emission target, and an x-ray source. These various aspects may separately and/or together enable the construction of an x-ray source which can operate at energies of up to 500 kV and beyond, which is suitable for use in commercial and research x-ray applications such as computerised tomography. In particular, the high-voltage generator includes a shield electrode electrically connected intermediate of a first voltage multiplier and a second voltage multiplier. The electron beam apparatus includes control photodetectors and photo emitters having a transparent conductive shield arranged therebetween. The rotary vacuum seal includes a pumpable chamber at a position intermediate between high-pressure and low-pressure ends of a bore for a rotating shaft.
    Type: Grant
    Filed: September 27, 2017
    Date of Patent: April 17, 2018
    Assignee: NIKON METROLOGY NV
    Inventor: Roger Hadland
  • Patent number: 9931522
    Abstract: Methods and system for facilitating rapid radiation treatments are provided herein and relate in particular to radiation generation and delivery, electron source design, beam control and shaping/intensity-modulation.
    Type: Grant
    Filed: March 11, 2016
    Date of Patent: April 3, 2018
    Assignee: The Board of Trustees of the Leland Stanford Junior University
    Inventors: Vinod Bharadwaj, Valery A. Dolgashev, Rebecca Fahrig, Billy Wiseman Loo, Peter G. Maxim, Sami Tantawi, Cecile Limborg, Ludovic Nicolas
  • Patent number: 9879967
    Abstract: A method for compensating measurement errors caused by the deformation of a component defining a slide axis in a measurement machine, comprising the steps of calculating the curvature of the component as a function of the difference between the current temperature Tc and a reference temperature Tr at which the geometric compensation map of the machine has been obtained, calculating correction values for the compensation parameters stored in the compensation map as a function of the curvature, and updating the compensation map with these correction values.
    Type: Grant
    Filed: January 26, 2015
    Date of Patent: January 30, 2018
    Assignee: HEXAGON METROLOGY S.P.A.
    Inventors: Lorenzo Merlo, Emanuele Ricci
  • Patent number: 9865423
    Abstract: An emitter for a cathode of an X-ray tube is provided that includes a shaped emitting surface. The emitting surface is shaped in a suitable process in order to enable the emitting surface to focus electron beams emitted from the emitting surface on a focal spot on a target of less than 1.0 mm without the need for any additional focusing elements in the X-ray tube.
    Type: Grant
    Filed: July 30, 2014
    Date of Patent: January 9, 2018
    Assignee: General Electric Company
    Inventors: Sergio Lemaitre, Ben David Poquette, Ryan James Lemminger, Donald Robert Allen, Judson Sloan Marte, Gregory Alan Steinlage, Richard Michael Roffers
  • Patent number: 9854657
    Abstract: An x-ray generator device includes a housing at least partially holding a specific fluid pressure, with an arm positioned to be able to strike a strike plate within the housing. The housing contains an x-ray window. The arm is magnetically actuated in at least one direction by a magnetic field generator outside of the housing. A striking portion of the lever arm and/or the strike plate may be a polymeric material with embedded metal or metal alloys.
    Type: Grant
    Filed: February 4, 2016
    Date of Patent: December 26, 2017
    Assignee: Tribogenics, Inc.
    Inventor: Carlos Camara
  • Patent number: 9824787
    Abstract: In one embodiment, the invention includes an x-ray source having a cathode with an elongated blade oriented substantially transverse with respect to a longitudinal axis of the cathode. The blade can be pointed towards an anode. In another embodiment, the invention includes an x-ray source having a window with an annular-shape, forming a hollow-ring. A convex portion of a half-ball-shape of an anode can extend into a hollow of the annular-shape of the window. In another embodiment, the invention includes an x-ray source having an anode with a dome shape having a concave side facing the electron emitter.
    Type: Grant
    Filed: June 9, 2017
    Date of Patent: November 21, 2017
    Inventors: Eric Miller, Bill Hansen