Abstract: A high energy x-ray tube includes an evacuated chamber (12) containing a rotor (34) which rotates an anode (10) through a stream of electrons (A) in order to generate an x-ray beam (B). The rotor includes an outer cylindrical armature (38) made from a thermally and electrically conductive material. An intermediate cylindrical member (40) circumferentially engages the inside diameter of the armature. The rotor also includes a bearing assembly (C) having a bearing shaft (52) centrally aligned with a longitudinal axis (Z) of the rotor. An inner bearing member (42) is concentrically spaced from the bearing shaft and defines forward and rearward bearing grooves (46F, 46R). Forward and rearward bearing races (70F, 70R) are positioned between the inner bearing member and the bearing shaft. A plurality of forward and rearward bearings (48F, 48R) are dimensioned to be received between the forward and rearward bearing races and bearing grooves, respectively.

Abstract: A miniature x-ray source capable of producing broad spectrum x-ray emission over a wide range of x-ray energies. The miniature x-ray source comprises a compact vacuum tube assembly containing a cathode, an anode, a high voltage feedthru for delivering high voltage to the anode, a getter for maintaining high vacuum, a connection for an initial vacuum pump down and crimp-off, and a high voltage connection for attaching a compact high voltage cable to the high voltage feedthru. At least a portion of the vacuum tube wall is highly x-ray transparent and made, for example, from boron nitride. The compact size and potential for remote operation allows the x-ray source, for example, to be placed adjacent to a material sample undergoing analysis or in proximity to the region to be treated for medical applications.

Abstract: A method is described for generating EUV radiation, comprising the steps of: generating a flow (35) of liquid droplets (39); injecting the flow into a source space (33) connected to a vacuum pump (34), and successively irradiating individual droplets (39) with an intense, pulsed, laser beam (41) focused on a droplet, thus creating a plasma (47) which emits EUV radiation. In order to prevent that liquid vapor destroys the vacuum in the source space (33) and to guarantee a continuous flux of EUV radiation, the flow (35) is guided through additional vacuum spaces (53, 56, 63) in series with the source space. Also described are an EUV radiation source unit for realizing the method and the application of the method in the manufacture of devices, like IC devices, and in a lithographic projection apparatus.

Abstract: An evacuated tube (24) includes an envelope (50) and an electrode (78) in the tube envelope (50). The electrode (78) is electrically connected to conductors (74a, 74b) that extend through the tube envelope (50). A getter (72) is included in the tube envelope (50) and is electrically connected to the conductors (74a, 74b) extending through the tube envelope (50). Diodes (82a, 82b) are connected to the electrode (78) and the getter (72) for selectively providing electrical energy through the conductors (74a, 74b) extending through the tube envelope (50) to one of the electrode (78) and the getter (72).

Abstract: A miniature x-ray source utilizing a hot filament cathode. The source has a millimeter scale size and is capable of producing broad spectrum x-ray emission over a wide range of x-ray energies. The miniature source consists of a compact vacuum tube assembly containing the hot filament cathode, an anode, a high voltage feedthru for delivering high voltage to the cathode, a getter for maintaining high vacuum, a connector for initial vacuum pump down and crimp-off, and a high voltage connection for attaching a compact high voltage cable to the high voltage feedthru. At least a portion of the vacuum tube wall is fabricated from highly x-ray transparent materials, such as sapphire, diamond, or boron nitride.

Abstract: A field emission X-ray tube is provided for use in a mobile X-ray machine. n evacuated ceramic housing having a convoluted interior shape for dissipating sparks surrounds the components of the field emission tube. A cathode and, an anode which emits x-rays, are located within the ceramic housing. A hollow anode tube is connected to the anode at one end and a vacuum pinch off element at the other end. Stray radiation is attenuated by a lead ring positioned inside of the ceramic housing.

Abstract: An end mounting (2) for pivotally mounting a housing (5) of a ram (1) to a structure (3) is formed from a single solid piece of material. The end mounting (2) comprises a mounting block (9) which is secured to the structure (3), an end cap (10) which is sealably secured to the housing (5), and a connecting portion (14) which extends between the mounting block (9) and the end cap (10). The connecting portion (14) is of hour-glass shape, cross-section and extends the width of the mounting block (9) to form a plastic hinge. The connection portion (14) defines a pivot axis (18) at the waist (19) of the hour-glass shape about which the end cap (10) and the mounting block (9) are pivotal relative to each other.

Abstract: X-ray tube with an anode and a cathode arranged in a vacuum housing has two getters in the inside of the vacuum housing for bonding free gases. One getter is disposed at a location in the vacuum housing neighboring the anode at which a relatively high temperature prevails during operation, and the other getter is disposed at a location at which a comparatively low temperature prevails during operation.

Abstract: An x-ray tube (14) has an evacuated envelope (30) in which an anode (32), a cathode (34), and a getter shield (60) are disposed. The shield includes a sleeve (62) and a cap (64). The cap defines an annular groove (70). A getter material (72) is deposited in the groove and sintered to define a porous volume. The getter material is activated during normal exhaustion of the x-ray tube during manufacture. During operation of the tube to generate x-rays, the waste heat is absorbed by the cap passively raising the getter material to its pumping temperature.

Abstract: A toroidal x-ray tube housing (A) is composed of multiple sections which are clamped together and sealed by elastomeric gaskets (128). An annular anode (B) is mounted to the housing with coolant passages (12, 14) extending thereadjacent. A rotor (30) is rotated within the toroidal housing by a motor (60). At least one cathode assembly (C) is mounted to the rotor adjacent the anode. The rotor is supported by magnetic bearings (40) whose active coils are separated from the vacuum region by a magnetic window (48). Alternately, a series of vanes (136, 138) are provided to divide the vacuum chamber into a high vacuum region (132) adjacent the cathode and anode and a low vacuum region (134) adjacent the motor (60) and bearings (40, 150, 152) for rotatably supporting the rotor within the housing. An active vacuum pump, preferably a ion pump (112) and a getter (114) are hermetically sealed into the vacuum region for maintaining the vacuum.

Abstract: A ferrofluidic seal arrangement for sealing a high-speed rotary shaft which passes between an environment at atmospheric or high pressure and an environment at high-vacuum is provided, which is especially useful in a high-speed rotating anode apparatus for generating x-rays in a CAT Scan apparatus or the like. A differentially-pumped region between a multi-stage ferrofluidic seal and a single-stage seal insures that no seal bursting into the high-vacuum region occurs. Bearings supporting the shaft are arranged in a mechanically-stable arrangement but are isolated from the high-vacuum environment. Thus, neither the high-vacuum environment nor the differentially-pumped region need be continually mechanically pumped, and a relatively light-weight apparatus results.

Abstract: X-ray tube noise is reduced by coupling the stator mass to the neck section of the glass vacuum tube so that vibrations are dissipated by the stator and not transmitted to the bulk of the vacuum tube. The coupling is accomplished with a non-magnetic sealing material such as an epoxy sealant. The sealant will generally fill the gap between the stator and the neck section of the vacuum tube. Alternatively, the coupling can be done with a mechanical clamping device.

Abstract: The invention is an improvement in a device for generating X-radiation with a plasma source. In the device, two concentric cylindrical electrodes (11, 12) are separated by an evacuated discharge space (13) filled with low-pressure gas. When the inner electrode is momentarily raised to an extremely high voltage, the gas is ionized and a plasma shock wave (17, 17') is created and compressed into a plasma focus (21) emitting X-radiation (20). The improvement introduces a first ("discharge") gas into the discharge space for initiation of the plasma, while introducing a second ("emitting") gas into the inner electrode for generating the X-radiation in the plasma focus. Special features of the improved device include a plurality of gas extraction ports, which can be used independently or together, and which can be combined with variations in the introduction and flow of the two gases to control the movement and intermixture of the gases and, thereby, the operation of the device.

Abstract: An X-ray generator includes a vacuum vessel; a cathode disposed in the vacuum vessel for emitting an electron beam; a plurality of stators constituting an electric motor and disposed within the vacuum vessel for generating rotating magnetic fields; a drum-shaped anode adapted to rotate upon reception of the rotating magnetic fields generated from the stators and radiate an X-ray upon reception of the electron beam emitted from the cathode, the drum-shaped anode having a circumferentially extending narrow groove formed at the position where the electron beam from the cathode is focused; a plurality of rotary fins mounted on the drum-shaped anode for dissipating the heat generated in the groove upon radiation of an X-ray; and a plurality of fixed fins mounted within the vacuum vessel in opposed relation to the rotary fins and adapted to receive the heat transferred from the rotary fins and dissipate the heat to the outside of the vacuum vessel.

Abstract: An electron beam production and control assembly especially suitable for use in producing X-rays in a computed tomography X-ray scanning system is disclosed herein. In this system, an electron beam is ultimately directed onto an X-ray producing target in a converging manner using electromagnetic components to accomplish this. The system also includes an arrangement for neutralizing the converging beam in a controlled manner sufficient to cause it to converge to a greater extent than it otherwise would in the absence of controlled neutralization, whereby to provide ion aided focusing.

Abstract: A microfocus type X-ray system in which the electron beam power is generally operated in a milliampere range at a constant power, and the beam is subjected to electromagnetic focusing for selected beam width.

Abstract: X-rays are created from a pulsed laser using a gaseous medium by focusing a aser pulse to a focal point in a gaseous medium causing a laser induced plasma in the gas which plasma emits x-rays.