Abstract: A microfocus type X-ray system in which the electron beam current is generally operated in a milliampere range at a constant power, and the beam is subjected to electronic focusing for selected beam width and steering for directional control.

Abstract: An X-ray tube having a capability to produce multiple anode spots. The X-ray tube can produce three or more different size anode focal spots without modification of the connectors, cabling, or high voltage supply for routing high voltage signals to the X-ray tube. An isolating fiber optic control input connects an external light emitting diode to a controller inside the tube housing. The controller responds to light signals from the light emitting diode to control the size of focus spots on the tube anode. In a preferred embodiment each of three filaments are individually energized to produce three different size focal spots and a cathode cup to which the filaments are mounted is also biased to add a four spot capability. In an alternate embodiment a split or segmented cathode cup has its segments biased to different electrical potentials by tapping power from a conventional high voltage filament supply used in energizing a cathode filament.

Abstract: A scanning beam computed tomography scanner is disclosed herein and includes means defining a vacuum chamber, means for producing an electron beam at one location in the chamber and for directing it to a second location therein, a target of the type which produces X-rays as a result of the impingement thereon by the electron beam, and means for focusing the beam onto the target in the form of a beam spot and for scanning the beam spot across the target along a particular scan path in order to produce X-rays. The specific scanner disclosed also includes an arrangement for monitoring the profile, position and orientation of the beam spot at a plurality of different points along the scan path.

Abstract: An x-ray tube has a cathode head for focusing an electron beam directed at an anode. The cathode head is made of ferromagnetic material having a Curie point above 700.degree. C. and is mounted on a supporting element to the tube envelope via a direct metallic connection in the form of soldering or welding. The combination of the high Curie point and the direct metallic connection provide good heat transfer such that the Curie point is not exceeded so that the cathode head always remains ferromagnetic. The cathode head thus always operates in a predictable manner and no movement of the focus by magnetic fields occurs.

Abstract: An X-ray generating apparatus provided with at least one deflecting means disposed between a freely selected pair of adjacent deflecting electromagnets and adapted to undulate electrons around a design orbit. When the deflecting means if formed of variable horizontally or vertically deflecting electromagnets capable of forming a variable magnetic field for electron on the orbit, the electrons are undulated around the design orbit and synchrotron radiation or powerful wiggler radiation from a wiggler is generated to irradiate a large area of a given substrate. Thus, in the transfer of patterns for the production of LSI devices for example, the X-ray generating apparatus enables highly intensive X-rays abundantly containing soft X-rays to be emitted uniformly to irradiate a wide area.

Abstract: A scanning electron beam computed tomography scanner is disclosed herein and includes means defining a vacuum chamber, means for producing an electron beam at a first location in the chamber and for directing the beam to a second location therein along a particular desired path. A target of a type which produces X-rays as a result of the impingement thereon by the electron beam is positioned at a third location and means at the second location are provided to cause the beam to impinge on the target in a scanning fashion for producing X-rays. The scanner also includes a system for maintaining the electron beam on the desired path between the first and second locations. To this end, the system includes first means acting on the beam between these locations so as to detect for deviations, if any, between the actual path taken by the beam and the desired path and means responsive to these deviations, again if any, for adjusting the position of the electron beam in order to eliminate the deviations.

Abstract: A high intensity microfocus x-ray source for the inspection of superalloy objects and the like operates at a voltage of the order of 400-500 kV with an electron beam focal spot size of the order of 2-10 mils and at power levels of tens to hundreds of kilowatts and affords a brightness improvement of at least three thousand over conventional x-ray sources.

Abstract: In an X-ray tube having a glow cathode for emitting an electron beam, an anode, focusing and deflecting coils and a target in an evacuated envelope, the cathode is a U-bent filament the dimensions of which are large in relation to the electron emitting area. The cathode is heated by passing electric current through it and is differentially cooled so that a small surface area at the site of electron emission is at a substantially higher temperature than remaining surface areas of the cathode. Cooling is effected by a thick-walled cylindrical grid which surrounds the cathode and has at its outer end an annular inward projection which absorbs heat rays from the cathode. The grid has a funnel-shaped outer end surface having an included angle of about 100.degree. to 140.degree.. The electron emitting surface of the cathode lies approximately in a plane defined by the inner peripheral edge of the funnel-shaped end surface of the grid.

Abstract: A soft X-ray generator comprises an electron gun and an anode which are disposed in individual vacuum containers, respectively but are interconnected by a conduit provided with an electron lens so that an electron beam generated from the electron gun is guided through the conduit on the anode in a focused form, thereby emitting soft X-rays from the surface of the anode.

Abstract: The invention relates to the polarization of a cathode of an X-ray tube by a high voltage cable comprising less conductors than the tube has polarization terminals. The missing voltages are processed by a device according to the invention, which comprises a voltage divider positioned between two of the voltages applied to the input terminals. It permits the use of standard long high voltage cables with limited stray capacitance without inducing dimensional control losses with respect to the tube foci.Application to multifocus X-ray sources.

Abstract: An electron beam production and control assembly especially suitable for use in producing X-rays in a computed tomography X-ray scanning system is disclosed herein. In this system, an electron beam is ultimately directed onto an X-ray producing target in a converging manner using electromagnetic components to accomplish this. The system also includes an arrangement for neutralizing the converging beam in a controlled manner sufficient to cause it to converge to a greater extent than it otherwise would in the absence of controlled neutralization, whereby to provide ion aided focusing.

Abstract: A microfocus type X-ray system in which the electron beam power is generally operated in a milliampere range at a constant power, and the beam is subjected to electromagnetic focusing for selected beam width.

Abstract: A method and apparatus for the radiometric calibration of an X-ray detector, such as a spectrometer, for wavelengths in the range of 2 to 200 angstroms. A hot filament X-ray diode for generating a point source of X-rays is disposed within a vacuum manifold and is surrounded by a housing having two ports equally spaced from the point source. A center line of each port passing through the point source forms substantially the same angle with respect to the line defined by the stream of electrons passing from the cathode to the anode of the X-ray diode so that the apparent intensity of the point source through each port is substantially identical. A reference detector is placed opposite one port to intercept a known portion of an X-ray beam emitted therefrom, while the detector to be calibrated is placed opposite the other port for interception of a known portion of an X-ray beam passing through that port.

Abstract: An arrangement for generating x-ray microbeams includes an electron source for generating an electron beam. The electron beam is directed toward a target comprising discrete x-ray emissive spots. X-rays from the spots are formed into microbeams and directed through an examination field.

Abstract: In x-ray apparatus where the central ray of an x-ray beam must be made perpendicular to the planes of one or more image receptors, a central ray locator is coupled to the beam output port of an x-ray tube casing and the central ray is indicated when a luminescent spot occurs at the intersection point of cross hairs on a phosphor screen. A laser device then replaces the locator. Its beam simulates the central ray and coincides with it and provides a visual indication of it. The laser beam enables determining if the tube casing is moving in a straight vertical line by observing the movements of the laser beam light spot while it is projected on a plane surface. Procedures are disclosed for establishing the simulated central ray in perpendicularity with receptor planes.