With Lower Thrust And Upper Radial Bearing Patents (Class 384/194)
  • Patent number: 6526870
    Abstract: A circular piston and a noncircular rod are separately formed as separate parts and the piston and the rod are integrally connected to each other through an adhesive in a state in which the piston is aligned to be concentric with a circular bearing hole of a first air bearing and the rod is aligned to be concentric with a noncircular bearing hole of a second air bearing.
    Type: Grant
    Filed: January 25, 2001
    Date of Patent: March 4, 2003
    Assignee: SMC Corporation
    Inventors: Seiji Takanashi, Koichiro Kanda, Satoshi Suzuki