Blocking By Cage Patents (Class 384/509)
  • Substrate support bushing
    Patent number: 8216422
    Abstract: An apparatus for supporting a substrate within a processing chamber is provided. In one aspect, a substrate support member is provided comprising a housing having a bore formed therethrough, a support pin at least partially disposed within the bore, and a plurality of bearing elements disposed about the housing. In one aspect, the bearing elements comprise a roller having a central bore formed therethrough, a contoured outer surface, and a shaft at least partially disposed through the central bore. In another aspect, the bearing elements comprise a ball assembly comprising a larger spherical member and four smaller spherical members arranged about the larger spherical member.
    Type: Grant
    Filed: January 27, 2005
    Date of Patent: July 10, 2012
    Assignee: Applied Materials, Inc.
    Inventors: Shinichi Kurita, Suhail Anwar, Toshio Kiyotake
  • Substrate support bushing
    Patent number: 8033245
    Abstract: An apparatus for supporting a substrate within a processing chamber is provided. In one aspect, a substrate support member is provided comprising a housing having a bore formed therethrough, a support pin at least partially disposed within the bore, and a plurality of bearing elements disposed about the housing. In one aspect, the bearing elements comprise a roller having a central bore formed therethrough, a contoured outer surface, and a shaft at least partially disposed through the central bore. In another aspect, the bearing elements comprise a ball assembly comprising a larger spherical member and four smaller spherical members arranged about the larger spherical member.
    Type: Grant
    Filed: February 12, 2004
    Date of Patent: October 11, 2011
    Assignee: Applied Materials, Inc.
    Inventors: Shinichi Kurita, Suhail Anwar, Toshio Kiyotake