Abstract: Apparatus for vaporizing liquid in a vaporization pathway having an actively controlled temperature are disclosed according to some aspects. The apparatus can comprise a first body having a cross sectional shape and dimensions substantially equal to the cross sectional shape and dimensions of a cavity in a second body, which allows the first body to be non-permanently inserted into the second body. The outer surface of the first body, the inner surface forming the cavity in the second body, or both can be modified to create a vaporization pathway between the first and second bodies when the surfaces mate and/or align. The liquid vaporizer can further comprise a vaporization pathway inlet for fluid comprising liquid, a vaporization pathway outlet for fluid comprising primarily vapor, and a heater in thermal communication with the first body, the second body, or both. The heater provides active control of the temperature of the vaporization pathway.

Abstract: A heating device for a smoke generator includes at least one heating rod and a vaporization tube. The vaporization tube includes a longitudinal passageway. The vaporization tube coils around the heating rod and includes an end connected to an outlet of a pump of a smoke generator. Preferably, the vaporization tube helically coils around the heating rod to form a coiling structure having at least one layer. Preferably, the vaporization tube includes a non-circular cross-section having at least one side in surface contact with a circumference of the heating rod.

Abstract: A steam generator for use with a steam bath has a storage tank for holding a quantity of water from which steam is to be made, means for permitting the ingress of water and the egress of steam from the tank, first heating means for controllably maintaining the water at a temperature that is elevated from the ambient temperature but below its boiling point, and second heating means for selectively heating the water from its elevated temperature to produce steam upon demand.

Abstract: A smoke producing system for efficiently producing reduced toxin smoke includes a heating chamber heated by a heat source. A coil passes into and through the heating chamber to deliver a smoke producing substance, typically a liquid, to the hottest portion of the heating chamber. The substance is heated above a flash point of the substance before it is released from the coil into the hottest part of the heating chamber where it is immediately converted to smoke. The smoke then passes from the hottest portion of the chamber through a convoluted path to an outlet port. In a particular embodiment, the smoke producing system incorporates a fan assembly used as the heat source and for directing the smoke produced in a desired direction.

Abstract: A superheated vapor generation system includes at least one vapor generator with a vapor generation space in its interior for generation of superheated vapor upon entry thereinto of liquid. At least one thermal element is disposed within the interior vapor generation space. A method for fabrication of a superheated vapor generation system includes providing at least two sections for fastening together, providing at least one thermal element, and fastening the sections together to form an interior vapor generation space, with the thermal element disposed therein.

Abstract: This invention relates to an equipment for producing high-pressure saturated steam. The equipment includes a water tank, a pump, a check valve, an atomizing nozzle, a heat chamber and a steam outlet. The pump is connected between water tank and the check valve. The check valve is connected with the heat chamber via the atomizing nozzle. The heat chamber having a steam outlet is hollow into which the atomizing nozzle extends. The hollow chamber is divided into many small chambers which are connected with each other successively. The equipment can produce high temperature steam rapidly and save energy.

Abstract: A vapor flow controller apparatus for delivery of chemical reagent vapors from a liquid phase source material is provided which includes a source container containing the liquid phase source material, a pump to transport the liquid phase source material to a vaporizor module, the pump having a flow rate controller, and the vaporizer module having a source material inlet, a carrier gas inlet, and a vaporized gas outlet. The vaporizer module converts the liquid phase source material to a vapor. The vapor flow controller apparatus further includes a source material conduit for passage of the liquid phase source material from the source container to the source material inlet of the vaporizer module. The vapor flow controller apparatus further includes a carrier gas container containing a carrier gas and having a carrier gas outlet conduit controlled by a mass flow controller.

Abstract: A boilerless steamer apparatus is provided having a steamer cavity formed of a steam generating space and a cooking space, wherein the steam generating space is separated from the cooking space by a removable steam lid. The present boilerless steamer apparatus can provide between 7 to 10 lbs./hour (per pan) of steam. Additionally, various means are disclosed to reduce the amount of condensate reaching the drainage system. Various methods to easily clean the boilerless steamer apparatus are provided.

Abstract: A method and heating device for heating a liquid, particularly useful for removing liquid condensate from cooling devices, by wetting a heating plate with the liquid and controlling the electrical power supply to maintain the heating plate at a the predetermined temperature above the boiling point of the liquid, such that when the heating plate is not wetted by the liquid, the electrical power supply to the heating plate is automatically maintained at a relatively low value, but as soon as the heating plate is wetted by the liquid, the electrical power supplied to the heating plate is automatically increased until the liquid is completely evaporated. The heating plate is heated by one or more PTC thermistors in which the electrical resistance increases with temperature to automatically maintain the predetermined temperature. Besides evaporating liquid condensate, the heating device is described for use in many other applications including steam generation, space heating and plastic molding.

Abstract: A liquid heating device includes a pump for pumping liquid, and a helical heating tube receiving liquid sent by the pump. The two ends of the helical heating tube are connected with two terminals of electric power, and when a control system is started, the helical heating tube is heated up to produce high heat to heat up the liquid therein to a proper temperature, to boil it up or change it into vapor for practical use.

Abstract: A smoke producing system for efficiently producing reduced toxin smoke includes a heating chamber heated by a heat source. A coil passes into and through the heating chamber to deliver a smoke producing substance, typically a liquid, to the hottest portion of the heating chamber. The substance is heated above a flash point of the substance before it is released from the coil into the hottest part of the heating chamber where it is immediately converted to smoke. The smoke then passes from the hottest portion of the chamber through a convoluted path to an outlet port. In a particular embodiment, the smoke producing system incorporates a fan assembly used as the heat source and for directing the smoke produced in a desired direction.

Abstract: A toy gun produces a series of traveling smoke rings. It has a smoke chamber fed with smoke from a battery-powered electrical resistance generator. An elastic, edge-mounted diaphragm extends across at least a portion of the rear of the smoke chamber. A reciprocating actuator movable in response to a trigger strikes the diaphragm to eject a smoke ring through an orifice in the opposite wall of the smoke chamber. The smoke generator includes a supply tank of a suitable liquid and a source of variable pressure to drive the liquid through a narrow annular clearance to the heater where it is rapidly vaporized. The generator includes a pair of concentric tubes that define the annular clearance and an electrical resistance heating element mounted on one of them at a point spaced from the supply tank. The generator also includes a spacer and a member that increases the length of the flow path of the fluid driven through the narrow annular gap.

Abstract: The aim of the invention is to improve a mobile flue gas generator and to simplify a method for testing a flue gas indicator. The invention is characterised in that a mobile flue gas generator for simulating a real flue gas is proposed, whereby the mobile flue gas generator comprises an electric heating device for generating the flue gas.

Abstract: A vaporizer comprises disks each including an aperture at a central portion thereof. A hollow pipe having apertures for permitting radial outflow of a liquid extends through the aperture of each of the discs so as to form a stack of the discs. A resilient member applies a biasing force to the discs, and structure applies a force, via fluid control, against the biasing force to thereby remove the biasing force from the discs. Liquid in the hollow pipe is adapted to be delivered from the apertures to spaces between the discs and vaporized in the spaces between the discs.

Abstract: A vaporizer includes a pump for pumping liquid stored in a liquid store tank, a helical vaporizing tube, and a control system connected to two ends of the vaporizing tube for functioning to make the vaporizing tube produce high temperature so as to heat up swiftly liquid flowing through the helical vaporizing tube and finally vaporize liquid at the outlet end of the vaporizing tube, with the liquid in the helical vaporizing tube never reversely flowing back to the pump owing to low temperature of liquid at the inlet end of the helical vaporizing tube.

Abstract: The invention concerns a cordless iron, having a body (1) comprising a handle (11), a soleplate (2), a water storage (3), and comprising an electrically operating water sprayer (4) and an electric power storage cell (7) powering said sprayer (4).

Abstract: Disclosed is a vaporizer constituted of a dispersing section 8 and a vaporizing section 22. The dispersing section 8 comprises a gas introduction port 4 for introducing a carrier gas 3 under pressure into a gas passage, means for feeding raw material solutions 5a and 5b to the gas passage, and a gas outlet 7 for delivering the carrier gas containing the raw material solutions to the vaporizing section 22. The vaporizing section 22 comprises a vaporizing tube 20 having one end connected to a reaction tube of the MOCVD system and having the other end connected to the gas outlet 7 of the dispersing section 8, and heating means for heating the vaporizing tube 20. The vaporizing section 22 serves to heat and vaporize the raw material solution containing carrier gas 3 delivered from the dispersing section 8. The dispersing section 8 includes a dispersing section body 1 having a cylindrical hollow portion, and a rod 10 having an outer diameter smaller than the inner diameter of the cylindrical hollow portion.

Abstract: A method and heating device for heating a liquid, particularly useful for removing liquid condensate from cooling devices, by wetting a heating plate with the liquid and controlling the electrical power supply to maintain the heating plate at a the predetermined temperature above the boiling point of the liquid, such that when the heating plate is not wetted by the liquid, the electrical power supply to the heating plate is automatically maintained at a relatively low value, but as soon as the heating plate is wetted by the liquid, the electrical power supplied to the heating plate is automatically increased until the liquid is completely evaporated. The heating plate is heated by one or more PTC thermistors in which the electrical resistance increases with temperature to automatically maintain the predetermined temperature. Besides evaporating liquid condensate, the heating device is described for use in many other applications including steam generation, space heating and plastic molding.

Abstract: A fog machine has a heating chamber configured to generate fog substantially instantaneously upon powering a heating element coupled to the heating chamber.

Abstract: A liquid vaporizing and feeding apparatus, having high heat transfer efficiency and capable of producing a large flow of vaporized gas from a small amount of liquid, utilizes an inclined vaporization plate which is held at a set temperature by a heater. Liquid, discharged by a nozzle in the vicinity of the upper end of the vaporization plate, is vaporized as it flows down an inclined upper face of the vaporization plate. When the volume of the liquid collected on the vaporization plate 20 reaches a designated amount, a level sensor 40 stops the inflow of liquid through the nozzle. Then, as vaporization continues, and the liquid level falls, the sensor causes inflow of liquid to resume. The cycle of stopping and resuming flow of liquid is repeated to maintain a constant liquid level.

Abstract: A vapor flow controller apparatus for delivery of chemical reagent vapors from a liquid phase source material is provided which includes a source container containing the liquid phase source material, a pump to transport the liquid phase source material to a vaporizor module, the pump having a flow rate controller, and the vaporizer module having a source material inlet, a carrier gas inlet, and a vaporized gas outlet. The vaporizer module converts the liquid phase source material to a vapor. The vapor flow controller apparatus further includes a source material conduit for passage of the liquid phase source material from the source container to the source material inlet of the vaporizer module. The vapor flow controller apparatus further includes a carrier gas container containing a carrier gas and having a carrier gas outlet conduit controlled by a mass flow controller.

Abstract: A vaporizer is provided for vaporizing sensitive liquid precursors in semiconductor processing applications. The vaporizer uses high flow conductance with large flow area to avoid precursor decomposition. The vaporizer also uses efficient heat conduction to avoid local cold spots due to the heat loss because of the transformation from the liquid to gas phase. The vaporizer convex surface configuration also allow a more uniform distribution of the vaporized liquid precursor. In some aspects of the invention, the vaporizer distributes the precursor to a larger area, thus eliminating the need for a showerhead.

Abstract: Disclosed is a vaporizer constituted of a dispersing section 8 and a vaporizing section 22. The dispersing section 8 comprises a gas introduction port 4 for introducing a carrier gas 3 under pressure into a gas passage, means for feeding raw material solutions 5a and 5b to the gas passage, and a gas outlet 7 for delivering the carrier gas containing the raw material solutions to the vaporizing section 22. The vaporizing section 22 comprises a vaporizing tube 20 having one end connected to a reaction tube of the MOCVD system and having the other end connected to the gas outlet 7 of the dispersing section 8, and heating means for heating the vaporizing tube 20. The vaporizing section 22 serves to heat and vaporize the raw material solution containing carrier gas 3 delivered from the dispersing section 8. The dispersing section 8 includes a dispersing section body 1 having a cylindrical hollow portion, and a rod 10 having an outer diameter smaller than the inner diameter of the cylindrical hollow portion.

Abstract: An apparatus for liquid delivery of a chemical vapour deposition CVD installation comprises an inlet head equipped with at least one injector having an inlet for delivery of liquid precursors or precursors in solution. A vector gas injection circuit is rendered active simultaneously with injection of the liquid, the vector gas being directed to the vicinity of the injector after being heated. Each injector is cooled individually by water or coolant flow. The evaporation chamber comprises heating resistances for the change of liquid/vapor state of the precursors, and deviation means arranged so that the distance covered by the droplets and vapours of the precursors is greater than the distance in a straight line between the nozzle of the injector and the outlet tube.

Abstract: The present invention generally relates to a system and method for a table top food warming system for applying steam to various sized portions of food for cooking of the food, as well as injecting steam into the food itself to increase its internal temperature. A preselected amount of water is transported via a pump to a preheated steam chamber. Upon contact with the preheated steam chamber, the water is vaporized and exits as steam through holes in a portion plate holding the food serving.

Abstract: There are provided a vaporizer for use with a CVD apparatus and a CVD apparatus, capable of long-term, reliable and efficient production of CVD film with good properties, and a semiconductor device manufactured employing the same. The vaporizer for use with a CVD apparatus is comprised of a material introducing tube, a vaporization chamber and a cooling member. The material introducing tube transports a mixture containing a solution of a material for the CVD film and a gas carrying the solution. The vaporization chamber is connected to the material introducing tube to vaporize the material introduced through the material introducing tube. The cooling member cools that portion of the material introducing tube adjacent to the vaporization chamber.

Abstract: A toy gun produces a series of traveling smoke rings. It has a smoke chamber fed with smoke from a battery-powered electrical resistance generator. An elastic, edge-mounted diaphragm extends across at least a portion of the rear of the smoke chamber. A reciprocating actuator movable in response to a trigger strikes the diaphragm to eject a smoke ring through an orifice in the opposite wall of the smoke chamber. The smoke generator includes a supply tank of a suitable liquid and a source of variable pressure to drive the liquid through a narrow annular clearance to the heater where it is rapidly vaporized. The generator includes a pair of concentric tubes that define the annular clearance and an electrical resistance heating element mounted on one of them at a point spaced from the supply tank. The generator also includes a spacer and a member that increases the length of the flow path of the fluid driven through the narrow annular gap.

Abstract: A toy gun (10) produces a series of traveling smoke rings (12). It has a smoke chamber (14) fed with smoke from a battery (24)-powered electrical resistance generator (30). An elastic, edge-mounted diaphragm (74) extends across at least a portion of the rear of the smoke chamber (14). A reciprocating actuator (68) movable in response to a trigger (22) strikes the diaphragm (74) to eject a smoke ring (12) through an orifice (14d) in the opposite wall (14a) of the smoke chamber (14). The smoke generator (30) includes a supply tank (32) of a suitable liquid (34) and a source (36) of variable pressure to drive the liquid (34) through a narrow annular clearance (43) to the heater (38) where it is rapidly vaporized. The generator (30) includes a pair of concentric tubes (40,42) that define the annular clearance (43) and an electrical resistance heating element (38) mounted on one of them at a point spaced from the supply tank.

Abstract: A toy gun (10) produces a series of traveling smoke rings (12). It has a smoke chamber (14) fed with smoke from a battery (24)-powered electrical resistance generator (30). An elastic, edge-mounted diaphragm (74) extends across at least a portion of the rear of the smoke chamber (14). A reciprocating actuator (68) movable in response to a trigger (22) strikes the diaphragm (74) to eject a smoke ring (12) through an orifice (14d) in the opposite wall (14a) of the smoke chamber (14). The smoke generator (30) includes a supply tank (32) of a suitable liquid (34) and a source (36) of variable pressure to drive the liquid (34) through a narrow annular clearance (43) to the heater (38) where it is rapidly vaporized. The generator (30) includes a pair of concentric tubes (40,42) that define the annular clearance (43) and an electrical resistance heating element (38) mounted on one of them at a point spaced from the supply tank.

Abstract: A vaporizing apparatus and method for providing a vaporized liquid precursor to a process chamber in a vapor deposition process includes a microdroplet forming device for generating microdroplets from a liquid precursor and a heated housing defining a vaporization zone having a vapor flow path from the microdroplet forming device to the process chamber. The vaporization zone receives the microdroplets and a heated carrier gas. The heated carrier gas has a temperature so as to provide the primary source of heat for vaporizing the microdroplets. The vaporized liquid precursor is then directed to the process chamber from the heated vaporization zone.

Abstract: A method and apparatus for forming a low dielectric constant polymeric film on a substrate, by liquid delivery of a parylene precursor reagent, in the form of an organic solution or a neat liquid, subsequent flash vaporization of the neat liquid or organic solution, pyrolytic “cracking” of the precursor to form the reactive monomer and/or reactive radical species, and condensation and polymerization of the monomer and/or reactive radical species to form a low dielectric constant polymeric film on the substrate. The low dielectric constant polymeric film may comprise a parylene film, formed from a precursor such as [2.2]paracyclophane, an alkyl- and/or halo-substituted derivative thereof, or an analogous compound of a p-xylene derivative.

Abstract: Device for instantaneously producing steam comprising a chamber (12) connected to a tank (11) by a duct (13), provided with a pipe (15) containing, as heating member, a halogen lamp (16) and with a nozzle (17) for expelling steam from the chamber (12).

Abstract: A steam cleaning system for ridding a workpiece of contaminants by directing a jet of steam onto the workpiece. The system includes a steam generator characterized by a central cavity having walls for containing water fed into it from a water inlet conduit. The steam generator includes a heating element for heating the cavity walls to vaporize water located in proximity to the walls. At least a portion of the cavity walls are provided with a thin porous layer of non-corrodible material to form a surface substantially free of major surface irregularities. The porous layer promotes water vaporization, flashing it into steam. Steam formed in the cavity may be superheated for discharge onto the workpiece through an external nozzle. The system components, including the water pump, are made of non-corrodible, preferably non-lubricated materials to prevent contamination of the workpiece and increase the service life of the pump.

Abstract: An apparatus for chemical vapor deposition includes a dispenser for dispensing a precursor to a vaporizer positioned within a vaporization chamber. A delivery conduit joins the vaporization with a process chamber. A flow meter is positioned within the delivery conduit for measuring the flow of precursor through the delivery conduit. A flow controller is likewise positioned within the delivery conduit for controlling the flow of precursor in response to the measured flow rate.

Abstract: A vaporizing apparatus for providing a vaporized precursor for a vapor deposition process includes a dispensing device for providing precursor spray having a first electrical charge into a vaporization zone. The apparatus further includes a heated element in the vaporization zone having a second electrical charge opposite of the first charge. The heated element vaporizes the precursor spray attracted thereto. The dispensing device may be an electrostatic spray device for spraying a powdered precursor, a mixture of powdered precursors, one or more powdered precursors cut with an inert filler material, one or more liquid precursors adsorbed on solid particles, one or more gas precursors adsorbed on solid particles, a liquid precursor, a mixture of liquid precursors, or one or more solid precursors dissolved in one or more solvents. A method of vaporizing precursors for vapor deposition processes includes providing a precursor spray having a first electrical charge.

Abstract: A vaporizing device for chemical vapor deposition (CVD) source materials includes a vaporizer for vaporizing introduced CVD source materials by heating, a spray nozzle of which an end portion is fixedly attached to the vaporizer for spraying the CVD source materials into the vaporizer, a cooling mechanism for cooling the spray nozzle, and a heat conduction restrictor attached to the end portion, proximate of the end portion, or to the vaporizer. Generation of non-vaporized residues and particles is decreased, improving productivity owing to prolongation of continuous operation time of the apparatus and a decrease in film defects.

Abstract: A compact vaporizer system is presented to produce a high quality vapor feed from a liquid feed to be delivered to a chemical vapor deposition processing chamber to produce thin film devices based on highly dielectric or ferroelectric materials such as BaTiO3, SrTiO3 and other such materials. The vaporization apparatus comprises a feed tank for storing the liquid feed; feed delivery means for transporting the liquid feed by way of a feed delivery path; a vaporizer section disposed in the delivery path comprising a high temperature heat exchanger having a capillary tube for transporting the liquid feed and a heat source for externally heating the capillary tube; and a vaporization prevention section disposed upstream of the vaporizer section for preventing effects of the vaporizer section to the liquid feed within the vaporization prevention section.

Abstract: The invention relates to an apparatus and process for the vaporization of liquid precursors and deposition of a film on a suitable substrate. Particularly contemplated is an apparatus and process for the deposition of a metal-oxide film, such as a barium, strontium, titanium oxide (BST) film, on a silicon wafer to make integrated circuit capacitors useful in high capacity dynamic memory modules.

Abstract: A vaporizing apparatus for providing a vaporized liquid precursor to a process chamber in a vapor deposition process includes a microdroplet forming device for generating microdroplets from a liquid precursor and a heated housing defining a vaporization zone having a vapor flow path from the microdroplet forming device to the process chamber. The vaporization zone receives the microdroplets and a heated carrier gas. The heated carrier gas has a temperature so as to provide the primary source of heat for vaporizing the microdroplets. A method of vaporizing liquids for vapor deposition processes includes generating microdroplets and utilizing a heated carrier gas as the primary source of heat for vaporizing the microdroplets. A vapor deposition system carrying out the method includes a heated carrier gas and a heated housing defining a heated vaporization zone. The heated housing receives the heated carrier gas.

Abstract: A liquid delivery system (10) for vaporization of a liquid pecursor to form precursor vapor for transport to a deposition zone (36).

Abstract: An improved superheated vapor generator for generating superheated vapor comprises a vapor generating volume for receiving liquid and including a vaporization member having a portion defining a plurality of holes for vaporizing contact with the liquid. The widths and/or depths of the holes may vary substantially randomly. The vaporization member may define grooves and ridges of substantially randomly varying height and depth and may further include intersecting grooves and ridges, intersecting the first-mentioned ridges and grooves, these ridges and grooves varying substantially randomly in height and depth. Two or more vapor generators may be arranged such that the vapor generated thereby and vapor pressure are additive.

Abstract: Steam generator of the type incorporating a heating body (13) provided with means (19) for supply of heat to the body and with at least one internal cavity (15) provided with a connection (3) for supply of water, which shall be evaporized and with an outlet (2) for water that has been transferred to steam, whereby the connection (3) of the steam generator for supply of water is provided in the bottom of the cavity (15), and that the steam generator is equipped with a control system (4-12), which permits supply and also discharge of water via the connection (3), and which is adapted to maintain a constant feeding pressure on the water independent of the direction of water flow.

Abstract: A flash steam generator to be used as an integral component of a steam sterilizer. The generator is constructed of a metal block having a first bore drilled lengthwise through the metal block. Surrounding the first bore are a plurality of additional heater bores in which heating elements are inserted. The generator is integral to the sterilizer piping and control systems. Water is supplied to the first bore by the sterilizer piping system, and electricity is supplied to the heating elements by the sterilizer power supply. The heating elements convert the electricity to heat, which transfers via the metal block to the first bore where the heat rapidly boils the water contained therein in what is essentially a flash vaporization process.

Abstract: An unplumbed sterilizer includes a heater having an electrical heating element disposed within a thermally conductive heater body. A conformable thermally conductive heat transfer plate is mounted between a mounting surface on the heater body and a heating surface on the sterilizing chamber. The heat transfer plate is effective to maintain a continuous mechanical contact between the heating and mounting surfaces. Further, a temperature sensor is attached to the heater body. By regulating the electrical power to the heating element as a function of the temperature of the heater body, the power applied to the heating element is maintained within specifications. Further, the heater body is mechanically attached to the sterilizing chamber by a single fastener resiliently applying a clamping force through the center of the heater body. In addition, the heater body is accessed simply by removing a cover plate from the outer body of the sterilizer.

Abstract: The present invention is a flash steam generator (10) to be used as an integral component of a steam sterilizer (30). The generator comprises a metal block (11) having a first bore (12) drilled lengthwise through the metal block (11). Surrounding the first bore (12) are a plurality of additional heater bores (14) in which heating elements (15) are inserted. The generator is integral to the sterilizer piping (31, 34) and control systems. In a preferred form, the first bore (12) provides a non-linear flow path. For example, a packing material such as monel wool (41) or a spiral dowel (45) can provide such a tortuous flow path. Alternatively, the block (11) may be provided with a plurality of fluid containing bores (51, 57, 67, 73, 81) interconnected by manifolds (59, 69, 75, 83).

Abstract: A steam sterilizer device having a steam generation system is disclosed. The steam generation system has a fluid connection to a water source (1) to provide water to a venturi apparatus (27) for the selective creation of a vacuum in a sterilization chamber (71). A fluid connection to a particle filter (33) and a reverse osmosis filter (37) is also provided and water passed through the filters is delivered by a metering pump (53) to a steam generating apparatus (59) which in turn supplies steam to a the chamber (71). The chamber (71) is provided with a discharge conduit including a mixing chamber (31) and a split tubing air break (131).

Abstract: A device and method for flash evaporating a reagent includes an evaporation chamber that houses a dome on which evaporation occurs. The dome is solid and of high thermal conductivity and mass, and may be heated to a temperature sufficient to vaporize a specific reagent. The reagent is supplied from an external source to the dome through a nozzle, and may be supplied as a continuous stream, as a shower, and as discrete drops. A carrier gas may be introduced into the evaporation chamber and create a vortex flow therewithin. After evaporation, the gas vapor may be removed from the evaporation chamber through a regulating valve to a reaction chamber. Another embodiment of the invention includes a plurality of evaporating domes that separately receive reagent, and may receive reagents of differing composition.

Abstract: A liquid vaporizer apparatus and method for chemical vapor deposition of liquid solutions into a controlled atmosphere of a CVD reaction chamber. The apparatus comprises an atomizer, gas curtain, heated porous media disks and a carrier gas mixer. The invention provides for the independent control of temperature, pressure and precursor stoichiometry during the atomizing and vaporization process thereby rendering the precise precursor vapor quality and quantity required for a given application. The invention employs the use of removable porous media disks which may be varied according to the desired operating pressure and precursors. In operation, the apparatus provides for a liquid precursor to first be atomized into a mist using an ultrasonic nozzle, then vaporized by heated media disks, and mixed with a carrier gas, then forced into CVD reaction chamber.

Abstract: A liquid vaporizer apparatus and method for chemical vapor deposition of liquid solutions into a controlled atmosphere of a CVD reaction chamber. The apparatus comprises an atomizer, gas curtain, heated porous media disks and a carrier gas mixer. The invention provides for the independent control of temperature, pressure and precursor stoichiometry during the atomizing and vaporization process thereby rendering the precise precursor vapor quality and quantity required for a given application. The invention employs the use of removable porous media disks which may be varied according to the desired operating pressure and precursors. In operation, the apparatus provides for a liquid precursor to first be atomized into a mist using an ultrasonic nozzle, then vaporized by heated media disks, and mixed with a carrier gas, then forced into CVD reaction chamber.

Abstract: A process and apparatus for delivering an involatile reagent in gaseous form, wherein an involatile reagent source liquid is flash vaporized on a vaporization matrix structure at elevated temperature. A carrier gas may be flowed past the flash vaporization matrix structure to yield a carrier gas mixture containing the flash vaporized source reagent. The matrix structure preferably has a high surface-to-volume ratio, and may suitably comprise a foraminous matrix element such as screen mesh onto which the reagent source liquid is distributed for flash vaporization. The invention is particularly useful for delivery of Group II reagents and compounds and complexes of early transition metals such as zirconium and hafnium, and may be usefully employed with Group II beta-diketonate source layers, e.g.