Abstract: There is provided a technique that includes: a reaction container into which a substrate support including a substrate support region configured to support a substrate and a heat insulator provided below the substrate support region are inserted; a gas supplier configured to supply a gas into the reaction container; and a protruding portion protruding inward from an inner wall of the reaction container on an upper surface side of the heat insulator in a region of the inner wall of the reaction container where the gas supplier and the substrate support do not face each other.

Abstract: An apparatus for moving ropeway vehicles in a ropeway system includes at least one conveying wheel being adjustable in height relative to the vehicles by a lifting device to be brought into abutment against the vehicles for displacing the vehicles along a track using the conveying wheel. An electric lifting device has an electric drive motor with a threaded sleeve or the like to be retained in its height position and rotated by the drive motor and a lifting spindle to be adjusted in height by the threaded sleeve for adjusting the conveying wheel in height. Upper and lower end surfaces of the threaded sleeve and the lifting spindle have stops located approximately in planes normal to the direction of rotation of the threaded sleeve or the like which, in upper and lower end positions of the lifting spindle, abut one another preventing further rotation of the threaded sleeve.

Abstract: A supply system for providing a suspension smelting furnace with constant and continuous feed is disclosed. The installation of the invention comprises intermediate storage bins for fine-grained feed, a feed rate controller for accurately controlling the feed rate of the fine-grained material, and a pneumatic conveyor for lifting the feed up to the top level of the suspension smelting furnace where the burner of the furnace is adapted. In the installation, the heavy constructions of the storage bins are located close to the ground level and the constructions around and on top of the furnace have been designed essentially lighter than in conventional solutions.

Abstract: A substrate processing apparatus suppresses vibration of a cover when unloading a boat from a process pipe. The apparatus comprises a boat for placing a substrate, a process pipe configured to accommodate the boat, a cover having the boat placed thereon, the cover configured to open and close a furnace port installed on a lower end of the process pipe, a motor to drive an elevation mechanism which moves the cover upward and downward, a sealing member to seal a space between the cover and the process pipe, and a controller to control motor speed and limit motor torque while the cover moves from the furnace port to a predetermined position. The substrate is maintained at a rest position in the boat during a recovery from a deformation of the cover occurring when separating the sealing member from the cover surface or the process pipe surface.

Abstract: A substrate processing apparatus includes a control unit performing loading substrates into a second unit block when a trouble occurs in a module of a first unit block; determining whether it is before a leading substrate of a next lot of the lot where a standby substrate positioned in upper stream side than the troubled module belongs is loaded into the module in the uppermost stage of the second unit block; loading the standby substrate into the module in the uppermost stage of the second unit block when determined it is before the loading of the leading substrate and loading the standby substrate into the module in the uppermost stage of the second unit block after a rearmost substrate of the next lot is loaded into the module in the uppermost stage of the second unit block when determined otherwise; and performing a series of processing on the standby substrate.

Abstract: Provided is a substrate processing apparatus suppressing the vibration of a cover in an initial stage of unloading a boat from a process pipe. The substrate processing apparatus comprises: a boat for placing a substrate; a process pipe receiving the boat; a cover on which the boat is placed, the cover opening and closing a furnace port installed on a lower end of the process pipe; an elevation mechanism moving the cover upward and downward; a motor driving the elevation mechanism; a sealing member sealing a space between the cover and a lower end surface of the process pipe; and a controller controlling torque of the motor such that the substrate is maintained a rest position within the boat in a deformation recovery period of the cover occurring when the sealing member is removed from a surface of the cover or the lower end surface of the process pipe.

Abstract: The present invention is referred to a method and an apparatus for feeding a pulverized material. The apparatus comprises fuel feeding means to supply pulverized fuel. Flexible means are coupled between the fuel feeding means and dosing means for the filling of the dosing means. The dosing means are closed and pressurized once that the dosing means have been filled. The pulverized material is discharged from the dosing means while controlling the pressurization during the discharge, in order to provide a continuous and constant discharge of the pulverized fuel. The apparatus includes means for detecting a minimum level or weight of pulverized fuel in the dosing means, and means for depressurizing the dosing means once that the minimum level of the pulverized fuel has been reached.

Abstract: A setup method of a substrate processing apparatus comprises: connecting a test terminal, which includes a pseudo comprehensive control unit and a second operation unit, to a plurality of process furnace control units, with the process furnace control units being separated from the comprehensive control unit and a first operation unit; transmitting a process furnace test operation command from the second operation unit to the plurality of process furnace control units through the pseudo comprehensive control unit; testing operations of a plurality of process furnaces in parallel by the plurality of process furnace control units receiving the process furnace test operation command; and transmitting a process furnace test operation report from the plurality of process furnace control units to the second operation unit through the pseudo comprehensive control unit.

Abstract: A supply system for providing a suspension smelting furnace with constant and continuous feed is disclosed. The installation of the invention comprises intermediate storage bins for fine-grained feed, a feed rate controller for accurately controlling the feed rate of the fine-grained material, and a pneumatic conveyor for lifting the feed up to the top level of the suspension smelting furnace where the burner of the furnace is adapted. In the installation, the heavy constructions of the storage bins are located close to the ground level and the constructions around and on top of the furnace have been designed essentially lighter than in conventional solutions.

Abstract: A heat-treating apparatus capable of realizing a highly precise processing maintaining a high degree of safety, and a method of producing substrates are provided. The heat-treating apparatus comprises a reaction tube for treating substrates; a manifold for supporting the reaction tube; and a heater provided surrounding the reaction tube to heat the interior of reaction tube; wherein the reaction tube and the manifold are in contact with each other as their continuous flat surfaces come in contact with each other; a cover member is provided to cover the contact portion between the reaction tube and the manifold from the outer side; and the cover member is provided with at least either a gas feed port or an exhaust port communicated with a space formed among the cover member, the reaction tube and the manifold.

Abstract: A system and method for determining the degree of filling of a container with filled envelopes is described including dynamically determining the real thickness of each of the filled envelopes of a plurality of filled envelopes before it is loaded into the container and evaluating the degree of filling of the container on the basis of the real thicknesses of envelopes thus determined.

Abstract: Method and device for the heat treatment of substrates, wherein the substrates are positioned in the vicinity of a heated, essentially flat furnace body extending over the surface of the substrate. In order to provide a reproducible treatment when treating a number of substrates successively, the temperature of the furnace body is measured so close to the surface adjacent to the substrate that the withdrawal of heat from the furnace body by the substrate can be detected. The introduction of each substrate takes place at a point in time when the temperature measured in this way is, within certain limits, equal to a desired initial treatment temperature Ttrig.

Abstract: When carrying workpieces from a loading area in which the workpieces are handled into a heat treatment furnace to make the workpieces subjected to a heat treatment process using a predetermined process gas, the loading area is evacuated and controlled at a predetermined low negative pressure. An exhaust for evacuating the loading area is connected to the loading area, and a controller controls the exhaust so that the loading area is maintained at the predetermined low negative pressure. A specific gas and particles contained in a gas discharged from the loading area are removed by filters.

Abstract: A conveyor/cooler of hot loose materials produced by fluid bed boilers and various industrial processes includes one or more feeding channels, which are substantially vertical or at any inclination. Because of gravity, the material leaves the combustion chamber of the boiler. A metallic container is connected to the downstream end of the discharging channels. A metallic conveyor belt driven by a motor is placed within the container, and the material from the downstream end of the channels is laid on the conveyor belt, thus forming a travelling continuous bed. The belt therefore constitutes a regenerative heat exchanger which absorbs heat from the material during the forward run and gives it back to the air during the backward run.

Abstract: A feeder system for measuring and controlling the massed feed rate of particulate fuel material, such as coal particles, made up of a group of volumetric feeders and a gravimetric feeder coupled to the group of volumetric feeders. The system controls the fuel feed rate of the volumetric feeders based upon data communicated from the gravimetric feeder.

Abstract: A thermal processing apparatus for processing a wafer is disclosed. The thermal processing apparatus includes a thermal processing plate, a plurality of spacers, a plurality of locators, and a plurality of sensors. The temperature of the thermal processing plate is controlled within a predetermined range. The spacers are arranged over the thermal processing plate for supporting the wafer, thereby forming a gap between the wafer and the thermal processing plate. The locators, each of which is disposed over one of the spacers, are provided for locating the wafer. The sensors, each of which is disposed over one of the locators, are provided for detecting the position of the wafer.

Abstract: An adjustable vibrating plate cullet feeder for feeding recycle glass to melting furnaces. Independent control of the rate of cullet feed is obtained by adjustment of at least one of: the angle of the feeder plate, the intensity of the vibration, and the frequency of the vibration. The vibrating plate cullet feeder may be positioned to feed over a batch charger or may feed directly into the melting furnace and may be controlled by the batch charger or independently by a furnace level or composition controller.

Abstract: A cement kiln having a tire injection system. The tire injection system comprises an entrance chute having an outer end portion protruding outwardly of a wall of the kiln and an inner end portion which protrudes into the kiln. The entrance chute further is disposed such that it is positioned tangentially to the kiln wall. The entrance chute includes a gate assembly having a cam follower assembly and a pivotally mounted gate member. The cam follower assembly causes the gate member to be urged pivotally between open and closed positions in response to movement of the cam follower assembly over a cylindrical camming wall positioned at a predetermined location relative to the kiln. When the cam follower assembly has caused the gate member to open, a plurality of tires or other items forming a source of supplemental fuel are injected into the entrance chute by one or more external tire injecting apparatuses synchronized in operation to rotation of the kiln.

Abstract: A firing system is provided for charging a plurality of incoming combustible fuel modules containing a known amount of a parameter of interest into a heated zone of a rotating kiln. The firing system separates incoming fuel modules into a plurality of stages based on the parameter amount in each fuel module. The system then removes fuel modules from the plurality of stages in a selected order to maintain an average parameter amount for fuel modules charged into the kiln at substantially a preselected level. The system charges fuel modules into the kiln in the selected order. The system determines an optimum time to charge each fuel module into the rotating kiln to maintain an average amount of the parameter of interest supplied to the kiln substantially at the preselected level.

Abstract: A fuel metering bin level control for a wood chip bin feeding a boiler wherein the wood chips have a high propensity to bridge the bin when packed, the level control includes a short chute through which the chips are fed into the upper portion of the bin and a pair of doors in the chute are opened and closed by pneumatic cylinders operating through four bar linkages in response to signals from a level transmitter to maintain the level of wood chips in the fuel metering bin within a range that prevents the chips from bridging the bin and allows the feed to the bin to be continuous with excess chips being diverted to a silo for storage and future use.

Abstract: A vibratory feeder in combination with a fuel fired furnace such as a coal fired steam generating boiler is disclosed. The vibratory feeder has a tray with a flat bottom in one embodiment and a step bottom in another and a hopper having vertical sides supported above the bottom so that the fuel in the hopper rests on the tray bottom and the vibration of the tray is transmitted into the stack of fuel thereby agitating it. The discharge end of the tray bottom directs the fuel from the feeder tray to the bladed distributor and water is directed onto the tray bottom to prevent caking of fuel on the discharge end.

Abstract: A method for operating a shaft furnace is performed by charging different ore/coke ratio mixture in radially different positions in the furnace. The ore/coke mixture ratio may be determined according to desired heat distribution in radial direction. For this, at least two mutually independently determined ore/coke mixture ratio mixtures are provided in each charge cycle of the burden. The mixture to be charged in the central portion of the furnace may have a higher coke content or a lower ore content for better permeability to the heating gas.

Abstract: A method of carrying a boat, on which a number of wafers are mounted, into and from a furnace using a soft-landing loader having a fork. In this method, before loading the boat into the furnace, the reaction applied on the fork at a specific point is measure while the fork is supporting the boat, and the reaction thus measured is stored in a memory. The fork is inserted into, then pulled out of the furance, thus loading the boat and leaving it within the furnace. The wafers are heat-treated within the furnace, then, the fork is inserted again, and raises the wafer boat within the furnace. The reaction applied on the fork at this time is measured, and compared with the value stored in the memory. When it is not equal to the value stored in the memory, the fork is lowered and moved slightly back or forth, and then raised again to support the boat, repeating this motion until the reaction applied on the fork becomes equal to the value stored in the memory.

Abstract: The process is intended to compensate for the random movements and inclinations of a loading installation of a shaft furnace having a storage lock chamber which is carried by a framework independent of the shaft furnace and which is connected to the shaft furnace by use of a compensator. In accordance with this process, the lateral shifts of the head of the furnace in relation to the lock chamber are detected, and the storage lock chamber is inclined until the axis of the falling path of the charge material corresponds to the shifted central axis (0') of the furnace.

Abstract: The apparatus comprises a distribution spout and a hopper which has two containers mounted thereabove provided with sealing valves and a metering member. In order to simplify the weighing system, the hopper is independent of the mouth of the furnace and is located inside a sealed chamber. The hopper is suspended by a device which enables it to be coupled to the container which is being emptied and to be uncoupled from the container which is being filled.

Abstract: A process for controlling the charging of a shaft furnace of the type utilizing a distribution spout and one or more storage hoppers with each hopper being provided with a dosing device for regulating the flow of charging material from the hopper to the spout. The shaft furnace also includes a weighing system to determine the contents (weight) of the hopper and to adjust the position of the dosing device wherein the dosing valve is opened whenever the real flow Q.sub.r is below the reference flow Q.sub.c and is held in position when the real flow Q.sub.r is above the reference flow Q.sub.c.

Abstract: A manipulator for a workpiece, useful in conjuction with a robot, is especially designed for handling forging preforms in a hot furnace. A fluidic type sensor is used to position the structure above a furnace surface on which the preform rests. Air continuously flows through the sensor to cool the sensor and parts of the manipulator, discharging toward the furnace floor near the workpiece. Thus, even though the absolute position and texture of the furnace surface may vary, the manipulator will always grip the workpiece at the same location relative to the surface.

Abstract: This invention proposes a method of controlling the melting rate of a glass furnace to obtain substantially constant molten glass throughput. The furnace contains a pool of molten glass and a relatively thin layer of unmelted glass batch on the surface of the pool. The furnace contents are weighed, and the batch feed is controlled by the measured weight. In essence, the melting rate is determined by the thickness of the lighter, thermally insulated batch layer, since a thinner batch layer results in more heat loss through the batch and less batch melted by the cooler molten glass. Thus, a decrease in weight indicates more molten glass withdrawal and a lower melting rate, and batch is added to increase the molten glass temperature and to melt more glass batch. In the preferred embodiment, the furnace is electrically heated at a constant rate, and only the rate of batch feed is controlled to maintain substantially constant glass throughput.

Abstract: The profile of the upper surface of the material being processed in a blast furnace is determined by pulsing a laser beam at the surface while incrementally changing the angle of the emitter to the surface, along a predetermined path, and sensing reflections of the beam using a detector having a relatively small angle of view compared with the area of the surface, the detector being located a fixed distance from the emitter. Points along the profile are calculated by triangulation, from the emitting and detection angles, and the known distance between the emitter and detector. In making the calculations, the amount that the emitting angle has changed may be determined by finding the amount that the reflection of the beam has deviated from a datum location on the detector. Ways of simplifying this calculation by making first approximation assumptions are disclosed.

Abstract: The present invention relates to a method for efficiently incinerating waste material, particularly dewatered sludge, in a multiple hearth furnace by controlling the temperature of the individual hearths of the furnace within certain prescribed limits by modulating the amount of combustion air, and controlling the temperature of the after-burner or combustion hearths to within certain prescribed limits by splitting the feed sludge between the first two upper waste material handling hearths.

Abstract: A modulated control system is provided for improving regulation of the bed level in a fixed-bed coal gasifier into which coal is fed from a rotary coal feeder. A nuclear bed level gauge using a cobalt source and an ion chamber detector is used to detect the coal bed level in the gasifier. The detector signal is compared to a bed level set point signal in a primary controller which operates in proportional/integral modes to produce an error signal. The error signal is modulated by the injection of a triangular wave signal of a frequency of about 0.0004 Hz and an amplitude of about 80% of the primary deadband. The modulated error signal is fed to a triple-deadband secondary controller which jogs the coal feeder speed up or down by on/off control of a feeder speed change driver such that the gasifier bed level is driven toward the set point while preventing excessive cycling (oscillation) common in on/off mode automatic controllers of this type.

Abstract: A gravity operated conical hopper having a sliding closure plate which is pneumatically activated as soon as the hopper has been emptied. An apparatus and method is also disclosed for pneumatically detecting and automatically closing the hopper to stop the flow of contained material after material has been discharged to a particular level.

Abstract: Apparatus and method are disclosed for charging particulate material of varying sizes into a shaft furnace, such as an oil shale retort or blast furnace, in which a highly uniform distribution of particle sizes of charge material and a desired height and level of stockline are obtained. The apparatus comprises a non-rotatable distribution hopper having a dividing means beneath choked feed means to substantially equally divide the material into a plurality of port means. The apparatus also includes partially movable distributor means and spreader means having surfaces of different inclinations to thoroughly mix the variously sized particles. Also disclosed is apparatus for providing gas lock means to prevent loss of gas pressure from the furnace, sensing the stockline level in the furnace, weighing the material in a hopper, temporarily storing certain amounts of charge material, and controlling the operation of the apparatus.

Abstract: A method and an apparatus are described for preventing the unintentional introduction of coal from a supply into a coke oven which already contains a charge of coal or coke. An obstruction sensor is lowered through a charging hole in the ceiling of the oven; if it encounters an obstruction, such as a charge of coal or coke in the oven, it triggers a signal which blocks any discharge of coal through the charging hole into the oven.

Abstract: Material to be deposited on the hearth of a shaft furnace serially passes through a pair of temporary storage containers positioned above the furnace. The uppermost storage container is in the form of a bin open to the ambient atmosphere while the lower storage container is provided with valves at either end whereby it may be hermetically sealed and subsequently brought to furnace pressure. The lower storage container is loaded while at ambient pressure, by releasing furnace charge material previously delivered to the upper storage container into the lower container and subsequently by delivering material directly to the lower container from a conveyor system through the lower container. The upper container is refilled with material while the lower container is at furnace pressure and is discharging its contents into the furnace.

Abstract: A method for preventing the overcharging of coal into a coke oven system in which preheated coal is transported from a storage container to the coke ovens by means of a substantially enclosed continuous conveyor system filled with inert gas. A portion of inert gas within the enclosed conveyor system is carried along with the coal into the coke oven itself. During filling of the oven, this inert gas is carried up and out of the oven standpipes. When the oven becomes filled, however, the standpipe escape route becomes blocked resulting in a rapid pressure build-up within the system. This rapid pressure build-up is utilized to generate a signal to stop further filling of the oven. The instant method may be employed as a primary regulating system, but is more preferably employed as a back-up to conventional sensor probes used for regulating the level of coal.

Abstract: An apparatus and process for introducing and distributing a charge within a shaft furnace, the shaft furnace charging apparatus comprising an elongated charge distribution chute, the angle of which being adjustable in relation to the vertical axis of the furnace to allow for distribution of charge to desired areas within the furnace. The charge distribution chute includes a first end for accepting the charge and a second end for distributing the charge within the furnace. The first end of the chute is suspended from a supporting fork which is rotatable about its axis to provide for pivoting of the chute about a first axis when the support fork is rotated. The chute is suspended from the support fork to provide for pivoting of the chute about a second axis which is preferably perpendicular to the first axis. The direction of the chute within the furnace may be adjusted to provide for distribution of the charge to the desired area of the furnace.

Abstract: Coal is preheated prior to passing it into a coking installation by feeding measured amounts of the relatively wet coal into and through one or more circulation dryers heated to an elevated temperature and collecting the hot coal in a collecting bin and automatically measuring the level of the hot coal in said bin and automatically adjusting the amount of coal fed into said dryer depending on the level of coal measured in said collecting bin. Means are provided for preventing further adjustment of the coal feed rate should the exhaust gas temperature of a dryer fall outside the limits of a preselected preset temperature range and to bring the process back under level-actuated feed rate control once the exhaust gas temperature moves back within the preset range.

Abstract: Coke is charged into a coke oven chamber by positioning a filling hopper over an opening in the roof of the chamber and evacuating the chamber. A filling tube is lowered from the hopper to the bottom of the chamber and coal is fed from the hopper through the filling tube into the chamber while gas is evacuated from the latter during the filling. The filling tube is raised as the chamber is filled with coal through the tube and the velocity with which the tube is raised is controlled as a function of the subatmospheric pressure generated in the chamber by the evacuation of gas therefrom. Alternatively, the subatmospheric pressure generated in the chamber is controlled as a function of the velocity with which the tube is raised.

Abstract: In the handling and charging of pre-heated coal, the coal is transported from a coal storage container to the oven chambers by an enclosed continuous conveyor system. The coke oven chambers are charged individually in a continual manner by transporting a measured amount of coal from the container, sufficient to fill a respective chamber. If coal, due to a malfunction, passes beyond the intended charging hole, it can jam the drive area causing extensive damage. To prevent this, a safety device is provided which includes a sensing device, e.g. a pivotally mounted switch for determining the presence of coal on the conveyor and associated therewith, a time delay system for determining if a particular amount of coal, to which the sensor is responding, is of sufficient volume to cause jamming of the conveyor drive system.

Abstract: Apparatus for feeding bituminous schist to a series of retorts each equipped with a rotary distribution spout and a central feed channel, the retorts radiating from a central schist distributing tower. At least one hopper communicates with a central feed channel communicating with the retort, and is laterally offset relative to the longitudinal axis of the retort. Conveyor belts are provided for conveying schists from the central distributing tower to the hopper or the hoppers of each retort.