Abstract: An improved apparatus for debonding temporary bonded wafers includes a debonder, a cleaning module and a taping module. A vacuum chuck is used in the debonder for holding the debonded thinned wafer and remains with the thinned debonded wafer during the follow up processes steps of cleaning and mounting onto a dicing tape. In one embodiment the debonded thinned wafer remains onto the vacuum chuck and is moved with the vacuum chuck into the cleaning module and then the taping module. In another embodiment the debonded thinned wafer remains onto the vacuum chuck and first the cleaning module moves over the thinned wafer to clean the wafer and then the taping module moves over the thinned wafer to mount a dicing tape onto the wafer.

Abstract: A storage/buffering system for the stocking and/or buffering of substrate and/or substrate carriers in a process environment includes a 6-axis robot. An end-effector is connected with the robot providing an additional one degree of freedom and a mechanism for grabbing and moving of substrate and/or substrate carriers. The robot is mounted in an inverted orientation to a removable service cart for easy removal of the robot to a service area in the event of breakdown. The robot receives commands from a programmable controller connected to control the robot and configured to direct the arm of the robot through a set of movements. Product is loaded in and out of the system through I/O load ports. Product is stored inside the storage/buffering system on a plurality of storage locations, each with product presence/absence detect sensor. The robot can alternatively be mounted directly to the storage system enclosure structure.

Abstract: A storage/buffering system for the stocking and/or buffering of substrate and/or substrate carriers in a process environment includes a 6-axis robot. An end-effector is connected with the robot providing an additional one degree of freedom and a mechanism for grabbing and moving of substrate and/or substrate carriers. The robot is mounted in an inverted orientation to a removable service cart for easy removal of the robot to a service area in the event of breakdown. The robot receives commands from a programmable controller connected to control the robot and configured to direct the arm of the robot through a set of movements. Product is loaded in and out of the system through I/O load ports. Product is stored inside the storage/buffering system on a plurality of storage locations, each with product presence/absence detect sensor.

Abstract: The invention relates to a wafer transfer system that achieves high efficiency, as measured by throughput rate. This is accomplished in one instance by the combination of reliable transfer of single wafers between ports while being simultaneously rotated to accomplish notch alignment. Another instance allows for simultaneous tilting of a multitude of wafers, such as changing the entire load of a transfer cassette between horizontal and vertical orientations, rather than operating on individual wafers serially. Furthermore, the design of this system renders it usable in both left-handed and right-handed workflow arrangements, not requiring construction of mirror-image systems and thereby achieving an economy of scale in production and inventory of the wafer transfer system itself.

Abstract: The device for closing the charging opening of an autoclave (1) has a cover (2) which can be lowered into the interior of the autoclave by means of a drive means supported at the outer side of the autoclave (1). The charging opening overlaps with its annular rim (7) the sealing surface (17) of the cover (2).

Abstract: A feeding mechanism for a shaft furnace is presented wherein the feeding mechanism is mounted axially on the furnace and employs a vertically adjustable frustoconical dosing element for vertical flow of charging material to a distributing spout.

Abstract: A method and an apparatus is provided for charging particulate coal through ceiling holes into a coke oven. A conveyor above the coke oven ceiling is connected with each ceiling hole by a conduit. Mounted in the conduit is a first closure member which is movable to and from a position in which it permits gravity flow of coal from the conveyor to the ceiling hole. Also mounted in the conduit is a second closure member movable to and from a position in which it blocks the escape of gas from the ceiling hole. To charge, the second member is first moved to open position and thereupon the first member; when charging is completed the members are moved in reversed sequence to their closing positions.

Abstract: Apparatus and method are disclosed for charging particulate material of varying sizes into a shaft furnace, such as an oil shale retort or blast furnace, in which a highly uniform distribution of particle sizes of charge material and a desired height and level of stockline are obtained. The apparatus comprises a non-rotatable distribution hopper having a dividing means beneath choked feed means to substantially equally divide the material into a plurality of port means. The apparatus also includes partially movable distributor means and spreader means having surfaces of different inclinations to thoroughly mix the variously sized particles. Also disclosed is apparatus for providing gas lock means to prevent loss of gas pressure from the furnace, sensing the stockline level in the furnace, weighing the material in a hopper, temporarily storing certain amounts of charge material, and controlling the operation of the apparatus.

Abstract: A drivable member has an opening therethrough and is positioned within a charging port of a chamber. The drivable member has suspended therefrom an inner cover. The drivable member is axially movable with respect to the charging port between a raised position, whereat the inner cover is moved into a sealing position against an inner surface of the charging port, and a lowered position, whereat the inner cover is moved away from the inner surface. An intermediate seal is formed between the exterior of the charging port and an exterior portion of the drivable member, and the intermediate seal is maintained during all positions of movement of the drivable member. An outer cover is selectively movable into sealing engagement with an upper portion of the drivable member to form an outer seal. The outer cover may be removed and replaced by a material supply container which also forms an outer seal with the upper portion of the drivable member.

Abstract: A charging device comprising a receiving hopper with an outlet through which passes a rod carrying a bell adapted to close the outlet of a hopper located above a furnace. Mounted on the receiving hopper from below is an appliance for adjusting the cross-sectional area and shape of the hopper outlet, the appliance including sector shields fixed in guideways, forming a hopper-shaped surface and associated with their longitudinal transfer drive. A rod is provided along the axis of said hopper with guard rings, one of which rings is tapered and disposed at the bottom edge of the sector shields.