Abstract: The disclosure describes devices, systems, and methods for causing a factory interface of an electronic device manufacturing system to be moveable between a first position and a second position. An electronic device manufacturing system can include a transfer chamber, processing chambers connected to the transfer chamber, a load lock connected to the transfer chamber, and a factory interface connected to the load lock. The factory interface can be moveable between a first position and a second position. The factory interface, while oriented in the first position, is positioned for transfer of one or more substrates between the factory interface and the load lock, where at least one of the transfer chamber or the load lock are inaccessible for maintenance while the factory interface is oriented at the first position. The factory interface, while oriented in the second position, is positioned to provide maintenance access to at least one of the transfer chamber or the load lock.

Abstract: A semiconductor electronic device structure includes an active area array disposed in a substrate, an isolation structure, a plurality of recessed gate structures, a plurality of word lines, and a plurality of bit lines. The active area array a plurality of active area columns and a plurality of active area rows, defining an array of active areas. The substrate has two recesses formed at the central region thereof. Each recessed gate structure is respectively disposed in the recess. A protruding structure is formed on the substrate in each recess. A STI structure of the isolation structure is arranged between each pair of adjacent active area rows. Word lines are disposed in the substrate, each electrically connecting the gate structures there-under. Bit lines are disposed above the active areas, forming a crossing pattern with the word lines.

Abstract: A handler includes a device holding portion, which holds an uninspected device and loads the device in a measuring socket on a device tester, having a suction means for sucking the device by a very weak pushing force at the time of sucking the device from an uninspection tray and for loading the device in a measuring socket and also having a clamper capable of outputting a pushing force which can be changed at the time of the measurement contact. The device holding portion includes a position correcting mechanism for making a device position correction executed by an image recognizing and position correcting means.

Abstract: A processing station for a processing line, having a module platform (12) and a plurality of withdrawable modules (14) that can be introduced into it has a transporting device (40, 42) for transporting workpieces (59) to be processed at the processing station (10). According to the invention, the transporting device (40, 42) includes a plurality of part-transporting devices (43), and one part-transporting device (43) is associated with each withdrawable module (14) and is solidly connected to the withdrawable module (14). Moreover, at least some of the part-transporting devices 43 include a first transportation path (40), which is embodied for transporting a workpiece (56) essentially over the width of the withdrawable module (14) in a first transporting direction (T1).

Abstract: A transfer system including at least one base structure having at least one fixture retaining member disposed along a length thereof. Each of the at least one fixture retaining members is configured to detachably secure a fixture thereon. A transfer carriage is configured to transport at least one fixture from a first position wherein each fixture is detachably secured to one of the at least one fixture retaining members of the at least one base structure to a second position wherein each fixture is detachably secured to another fixture retaining member of the same base structure.

Abstract: A substrate processing apparatus for processing a substrate while transferring the substrate among a plurality of units with which the substrate is to be processed or on which the substrate is to be placed. This apparatus is provided with: a first unit group disposed along a linear first line; a second unit group disposed along a linear second line crossing the first line at a predetermined angle; and a transfer robot capable of transferring and receiving a substrate to and from the first unit group and the second unit group.

Abstract: A device (1) for manufacturing a three-dimensional object by a layer wise solidification of a building material at positions in the respective layers that correspond to the object is provided. The device comprises a machine frame (2, 3, 4, 5); a door (73) that is mounted at the machine frame and is swiveling between an open position and a closed position; a container (25) that can be removed from the device; and a support device (26) that is vertically movable in the container and has an upper side, which forms a building platform (78) on which the three-dimensional object is generated layer wise. A mounting (74) for the container (25) is provided at the door (73) and an attachment (75) is provided at the container (25), which attachment can be brought into an engagement with the mounting (74), so that the container (25) can be moved into the device (1) by closing the door (73) and/or can be moved out of the device by opening the door (73).

Abstract: A sequential stepped movement staging device comprises six legs 70 of equal length extending radially from a central sphere 46 in an X-Y-Z orthogonal relationship. The sphere 46 and legs 70 are held in a horizontally fixed position relative to a support surface 14 by a holder including a primary retaining member 40, a secondary retaining member 74 fixed in superposition to the primary retaining member 40, and an alignment cylinder 84. The secondary retaining member 74 is slidably disposed in the alignment cylinder 84 to allow for vertical movement of the sphere 46, legs 70, and retaining members 40, 74. One of six actuating rods 94 pushes down on one of three upwardly extending legs 70H thereby rotating the sphere 46 and causing two of three downwardly descending legs 70L to move a work surface 16 capable of horizontal sliding movement over the support surface 14 from a first position to a second position. In one embodiment of the invention shown in FIG.

Abstract: Device for moving products from a loading station to an unloading station. Carriers on which containers for the products are arranged move along a guide in the direction of transport. The drive is implemented with the aid of a toothed belt and each carrier is provided with a locking pawl that is hingeably fixed thereto and that can come into engagement with the toothed belt. The locking pawl is furthermore provided with a tab on which an operating element, such as a cylinder, firmly fixed to the transport device is able to engage. A second set of teeth constructed as a toothed belt is present and this is arranged in a stationary position. The carrier is provided with a wheel running in this toothed belt. This wheel is provided with a non-return clutch.

Abstract: A conveyor system is disclosed for sequentially moving a plurality of flat battery components. The conveyor has a plurality of separators for receiving a flat battery component between each of the adjacent separators. The conveyor supports an end of each flat battery component with each of the flat battery components being maintained on end by the plurality of separators. A motor drive is provided for moving the conveyor for moving the plurality of flat battery components.

Abstract: A two-axis robot includes a vertical tubular post mounted for rotation about its vertical axis, with a vertically slidable shaft extending through the post. An arm on the upper end of the post projects radially outward and has a gripper assembly thereon with operable jaws for gripping a specimen tube. The robot is positioned between two reference locations, for retrieving a specimen tube from one reference location and transferring it to the other. The reference locations are located along a circle circumscribed by a central vertical axis of the gripper jaws as they swing about the rotational axis of the post.

Abstract: A table for a transfer container is provided with an opening portion formed therein. A clamp is swingably supported on the lower side of the table. The clamp has a second engaging portion hook to project upward from the table through the opening portion, and to engage with the first engaging portion of the transfer container. A first actuator is disposed to apply a swing-driving force to the clamp. The first actuator has a reciprocation rod pivotally connected to the clamp, and is swingably supported on the lower side of the table.

Abstract: A transport system for manipulating a semiconductor wafer in a processing tool is set forth. The system includes a transport unit guide disposed within the processing tool for supporting a wafer transfer unit as the unit moves between a first position and a second position. The transport unit guide comprises a frame, a lateral guide rail mounted on the frame, and a series of magnetic segments arranged upon the transport unit guide proximate the lateral guide rail. The wafer transfer unit includes a tram translatably attached to the lateral guide rail and a wafer transfer arm assembly for manipulating the semiconductor wafer. An electromagnet is mounted on the tram in cooperative relation with the magnetic segments for moving the transfer unit along the guide rail. Actuators are used for controlling the position of the transfer unit and transfer arm assembly, and sensors are used for determining the position of the transfer unit and the transfer arm assembly.

Abstract: An in-circuit test fixture loader includes a carrier that is able to receive and support an in-circuit test fixture. The carrier includes a pair of opposing side rails and an end rail between the side rails. The side rails and the end rail are spaced to receive the in-circuit test fixture between the side rails and against the end rail. The loader also includes a fixture lock connected to the carrier to prevent movement of the in-circuit test fixture away from the end rail. A horizontal slider attached between the carrier and a mechanism base includes guide shafts that guide the carrier and the in-circuit test fixture in a first substantially horizontal direction. A vertical slider of the loader is attached between the carrier and the mechanism base. The vertical slider includes an actuator that is operable to slide the carrier and the in-circuit test fixture in a second substantially vertical direction between an upper position and a lower position.

Abstract: An assembly device, in particular a fully automatic assembly device for producing microsystem technical products and for assembling components in the semiconductor industries, comprising an assembly table, at least one material transport system that transports the products to be placed with components, at least one transport system arranged on the assembly table, and at least one component transport unit that is arranged and displaceable perpendicularly to the transport system and that comprises at least one assembly head, said component transport unit(s) is/are arranged on one or more portals displaceable by means of the transport system in parallel to the direction of transport of the products to be placed with components, which products are in turn displaced by the material transport system.

Abstract: A system for performing an operation relating to a printed wiring board, including a first supporting table having a planar first supporting surface, a portion of the first supporting table that defines the first supporting surface being formed of a ferromagnetic material; a plurality of supporting members each of which has a seat portion having a bottom surface which is seated on the first supporting surface, and a support surface opposite to the bottom surface, a portion of the seat portion being formed of a permanent magnet, each supporting member being attached, owing to a magnetic force of the permanent magnet, to the first supporting surface to support a back surface of the wiring board; an operation performing device which performs an operation for a front surface of the wiring board whose back surface is supported by the respective support surfaces of the supporting members; a second supporting table which is provided in a vicinity of the first supporting table and has a second supporting surface whic