Abstract: Systems and methods to control particle generation in a reticle inspection system are presented. The number of particles added to a reticle during an entire load-inspect-unload sequence of a reticle inspection system is reduced by performing all reticle contact events in a controlled, flowing air environment. In one embodiment, the reticle is fixed to a carrier by clamping outside of the vacuum environment, and the carrier, rather than the reticle, is coupled to the reticle stage of the inspection system. In this manner, the high levels of back-side particulation associated with electrostatic chucking are avoided. In addition, the carrier is configured to be coupled to the reticle stage in any of four different orientations separated by ninety degrees.

Abstract: A reconfigurable automated system is provided. The system comprises a backbone including a plurality of docking ports, at least one module including a connector for releasably coupling the module to the backbone, and a motion unit, connected to the backbone, for providing an object to the module when the module is coupled to the backbone. The module connector and one of the docking ports form a connection interface, including a mechanical alignment device and an electrical connection, when the module is operationally coupled to the backbone.

Abstract: Thermoplastic laminates are fabricated in a continuous compression molding production line. A lay-up of laminate plies is placed in a recess on a carrying tool, and the tool is moved through successive forming operations on the line, including preforming and consolidation operations. The tool is separated from the fully formed part at the end of the line and may be reused. Use of the carrying tool reduces material scrap.

Abstract: A sound film adsorption device includes a bracket, which has a platform on which a sound film collect, which forms a chamber for receiving a sound film, is installed. A rotary mechanism includes a supporting post retained on the platform, a rotary plate in the form of a cantilever-shape having an end moveably coupled to the supporting post and an opposite end serving as an open end, and a spring member coupled with the supporting post to support between the platform and the rotary plate. A first absorbing mechanism includes a first vacuum generator and an absorbing head. The absorbing head has an end communicated with the first vacuum generator, and the other end extended through the open end of the rotary plate to align with the chamber of the sound film collect so as to absorb the sound film placed within the sound film collect.

Abstract: A gap set device for an electronic component handler is provided. The electronic component handler includes a test accessory mounted to it. The test accessory is movable between a first position away from a tool and a second position closer to the tool. A gap set device is mounted to the test accessory and the tool and has a portion movable with respect to the test accessory. When the test accessory is in the second position, the portion of the gap set device contacts the component support structure to define a gap between the test accessory and the component support structure.

Abstract: A gap set device for an electronic component handler is provided. The electronic component handler includes a linear bearing having a test accessory mounted to it. The test accessory is movable between a first position away from a tool and a second position closer to the tool. A setting post is extendable from the test accessory such that when the test accessory moves from the first position to the second position the setting post can fix a gap between the test accessory and the tool.

Abstract: Embodiments generally provide an apparatus and method for processing substrates using a multi-chamber processing system (e.g., a cluster tool) that has an increased system throughput, increased system reliability, substrates processed in the cluster tool have a more repeatable wafer history, and also the cluster tool has a smaller system footprint. Embodiments also provide for a method and apparatus that are used to improve the coater chamber, the developer chamber, the post exposure bake chamber, the chill chamber, and the bake chamber process results. Embodiments also provide for a method and apparatus that are used to increase the reliability of the substrate transfer process to reduce system down time.

Abstract: The present disclosure relates to methods and apparatuses for manufacturing absorbent articles, and more particularly, apparatuses and methods utilizing multiple processing stations for processing absorbent articles and being configurable to move along various predetermined travel paths defined by radii that may be constant or variable. Particular embodiments of apparatuses and methods of manufacture include a processing wheel having a plurality of processing stations which orbit around a rotation axis. The processing stations may be configured to perform various types of operations associated with the manufacture of absorbent articles while the processing stations orbit around the rotation axis. The processing wheel can be configured to adjust the path along which the processing stations orbit as the processing wheel rotates around the rotation axis.

Abstract: The invention provides a downsized processing machine, equipped with a machine tool and a multijoint robot. The processing machine 100 comprises a machine tool 10, a workpiece pallet 70 and a gantry rail 120 disposed above the machine tool 10. A multijoint robot 130 traveling on the gantry rail 120 is equipped with a dual-partitioning electron system speed monitoring function. Through use of this function, the range of movement D2 of the multijoint robot 130 is controlled to fit within the inner side of a front cover 11 of the machine tool 10, according to which the safety barrier 180 can be downsized. This arrangement enables the operator to open or close a door 12 of the machine tool 10 and to manipulate a control panel 16 even when the multijoint robot is in operation, and the footprint of the machine can be minimized.

Abstract: In stacking tray supplying for receiving in a stacked state a plurality of trays that are received in a state in which components to be mounted onto a board are aligned, two tray stages are provided rotationally transferably on a concentric circle. In a state in which one is positioned in a feeding tray placement position and the other is positioned in a standby tray placement position, components are fed from the tray stage positioned in the feeding tray placement position. When a component depletion state occurs, the tray stages are rotationally transferred to switchover the mutual placement positions, by which waste of time required to component feeding is reduced.

Abstract: A machine tool has pass-through pallet loading allowing pallets to be loaded or discharged from either side of the machine. The pallet receiver is mounted on the X-axis of the machine, and the pallet is loaded onto the pallet receiver with the pallet in a vertical orientation. Cross axis rollers on the pallet receiver support the pallet and spacing rollers maintain the pallet spaced from Z-axis locating pads as it moves to a centered position on the pallet receiver. The Z-axis pads present a relatively large surface area to the rear face of the pallet, and are configured to provide vacuum clamping to lock the pallet in all three axes once it is centered on the pallet receiver. A rotating key is provided to center and lock the pallet relative to the pallet receiver before the vacuum clamping is applied.

Abstract: A substrate processing system including a processing section arranged to hold a processing atmosphere therein, a carrier having a shell forming an internal volume for holding at least one substrate for transport to the processing section, the shell being configured to allow the internal volume to be pumped down to a predetermined vacuum pressure that is different than an exterior atmosphere outside the substrate processing system, and a load port communicably connected to the processing section to isolate the processing atmosphere from the exterior atmosphere, the load port being configured to couple with the carrier to pump down the internal volume of the carrier and to communicably connect the carrier to the processing section, for loading the substrate into the processing section through the load port.

Abstract: A workflow cell for a fabrication facility is provided. The workflow cell includes a semiconductor processing tool and a buffering station holding Front Opening Unified Pods (FOUPs) proximate to the semiconductor processing tool. The buffering station receives the FOUPs from a main stocker of the fabrication facility. The buffering station is configured to store a portion of the FOUPs in the main stocker. The workflow cell also includes a conveying mechanism connecting the semiconductor processing tool and the buffering station. In one embodiment, the conveying mechanism is the Direct Tool Load mechanism. A fabrication facility having the workflow and a method for moving a transport container are also provided.

Abstract: A handling device for positioning a test head, in particular at a test station, is provided with positioning means enabling the test head to be positioned with respect to three dimensions. The handling device also has a mounting on which the test head can be attached and which is connected to the positioning means. The handling device is also provided with a fastening plate which is movably mounted and a compliance module by means of which the fastening plate can be moved between a starting position (I) and an end position (II, III) against the effect of a return force. The compliance module comprises a housing, a spindle, a first sliding bushing and a second sliding bushing which are arranged in a movable manner on the spindle between a first stop and a second stop, and a spring element arranged between the sliding bushings and which impinges on the sliding bushings. The sliding bushings are movable relative to the housing. The compliance module permits bi-directional compliance of the test head.

Abstract: A substrate processing apparatus for processing a substrate while transferring the substrate among a plurality of units with which the substrate is to be processed or on which the substrate is to be placed. This apparatus is provided with: a first unit group disposed along a linear first line; a second unit group disposed along a linear second line crossing the first line at a predetermined angle; and a transfer robot capable of transferring and receiving a substrate to and from the first unit group and the second unit group.

Abstract: An apparatus for supporting an object is disclosed. The apparatus includes an air bearing coupled to an air bellows. When used in a vacuum environment, the apparatus preferably includes an air bearing housing with vacuum to remove the pressurized fluid used in the air bearing.

Abstract: A cleaning substrate for use in the cleaning operation for a substrate stage in an exposure unit compatible with immersion exposure and a dummy substrate for use during the adjustment of an exposure position of a pattern image in the exposure unit are held in a cleaning substrate housing part and a dummy substrate housing part, respectively, which are provided in a substrate processing apparatus. For the cleaning operation for the substrate stage or an alignment operation in the exposure unit, the cleaning substrate or the dummy substrate is transferred from the substrate processing apparatus to the exposure unit. A back surface cleaning process on the cleaning substrate or the dummy substrate is performed in a back surface cleaning unit of the substrate processing apparatus immediately before or immediately after the cleaning operation for the substrate stage or the alignment operation.

Abstract: An apparatus for automatically resetting a printed-wiring-board supporting device including a supporting table and a plurality of supporting members which are set on a surface of the supporting table to support a back surface of a printed wiring board, the apparatus including a supporting-member storing device in which the supporting members are stored, a holding head which can hold each of the supporting members, a moving device which moves the holding head relative to each of the supporting table and the storing device, in a direction parallel to the surface of the supporting table, so that the holding head takes a prescribed one of the supporting members from the storing device and sets the supporting member at a prescribed setting position on the surface of the supporting table, and takes the supporting member from the setting position and stores the supporting member in the storing device, and a control device which controls the moving device.

Abstract: In a loading and unloading station for semiconductor processing installations, the object of the present invention is to ensure charging proceeding from transporting containers under clean room conditions. These transporting containers themselves serve as magazines for disk-shaped objects and are open laterally. It should also be possible, optionally, to load and unload a greater quantity of such transporting containers, wherein the exchange of transporting containers must be effected under favorable ergonomic conditions. According to the invention, the transporting container for loading, unloading and reloading of disk-shaped objects is coupled in a stationary manner by the container cover with the closure by means of an adhering engagement. The charging opening and the transporting container are opened simultaneously in that the container cover and the closure are moved down jointly into the semiconductor processing installation.

Abstract: In a loading and unloading station for semiconductor processing installations, the object of the present invention is to ensure charging proceeding from transporting containers under clean room conditions. These transporting containers themselves serve as magazines for disk-shaped objects and are open laterally. It should also be possible, optionally, to load and unload a greater quantity of such transporting containers, wherein the exchange of transporting containers must be effected under favorable ergonomic conditions. According to the invention, the transporting container for loading, unloading and reloading of disk-shaped objects is coupled in a stationary manner by the container cover with the closure by means of an adhering engagement. The charging opening and the transporting container are opened simultaneously in that the container cover and the closure are moved down jointly into the semiconductor processing installation.

Abstract: In a loading and unloading station for semiconductor processing installations, the object of the present invention is to ensure charging proceeding from transporting containers under clean room conditions. These transporting containers themselves serve as magazines for disk-shaped objects and are open laterally. It should also be possible, optionally, to load and unload a greater quantity of such transporting containers, wherein the exchange of transporting containers must be effected under favorable ergonomic conditions. According to the invention, the transporting container for loading, unloading and reloading of disk-shaped objects is coupled in a stationary manner by the container cover with the closure by means of an adhering engagement. The charging opening and the transporting container are opened simultaneously in that the container cover and the closure are moved down jointly into the semiconductor processing installation.

Abstract: A system for performing an operation relating to a printed wiring board, including a first supporting table having a planar first supporting surface, a portion of the first supporting table that defines the first supporting surface being formed of a ferromagnetic material; a plurality of supporting members each of which has a seat portion having a bottom surface which is seated on the first supporting surface, and a support surface opposite to the bottom surface, a portion of the seat portion being formed of a permanent magnet, each supporting member being attached, owing to a magnetic force of the permanent magnet, to the first supporting surface to support a back surface of the wiring board; an operation performing device which performs an operation for a front surface of the wiring board whose back surface is supported by the respective support surfaces of the supporting members; a second supporting table which is provided in a vicinity of the first supporting table and has a second supporting surface whic

Abstract: Disclosed in an original chuck effective to prevent deformation of an original as the same is attracted and held by the chuck, thereby to reduce distortion of a pattern of the original or distortion of a pattern transferred to a substrate, such as a wafer, due to the deformation of the original. The original chuck includes four attracting and holding portions disposed to attract four corners of the original, and each attracting and holding portion has a steel ball to be engaged with the original and an attracting pad surrounding the steel ball and being made of an elastic material. A negative pressure is produced inside the attraction pad, in response to an operation of a vacuum source and through an attracting bore, such that the attracting pads attract the original while the steel balls support the original through point contact. In one preferred from, at least one of the attracting and holding portions is made adjustable upwardly/downwardly.