Abstract: A linking system adapted to link a plurality of products comprises a supply device having a tray with a slide slot adapted to load a first row of products therein, a gripping device having a gripper adapted to grip the first row of products and a moving mechanism adapted to move the gripper, and a holder adapted to hold the first row of products. The gripping device is adapted to move the first row of products from the supply device to a holding position on the holder and the holder is adapted to hold the first row of products at the holding position. The gripping device is further adapted to grip a second row of products from the supply device and link the second row of products to the first row of products held by the holder.

Abstract: A transfer robot is equipped with a first hand and a second hand. The first and the second hands, each have two blades, for holding respective substrates. In addition, the transfer robot includes a rotation unit, a first extension and retraction unit, a second extension and retraction unit and an up-down unit, and by these four units, the first and the second hands can be moved to a substrate transfer relay device where substrates are placed, and to four process chambers.

Abstract: A mandrel for transporting a set of substrates includes a rod having a free end and a fixed end, the fixed end configured to be coupled to a transport mechanism. A series of spacer elements are arranged on the rod to keep the set of substrates seated on the rod in respective fixed positions with a last spacer element nearest to the fixed end. A notch is arranged on the rod between the fixed end and the last spacer element configured to catch a substrate that becomes unseated from the last spacer element.

Abstract: A handling unit for relocating parts, comprises a base part and a handling arm, wherein the handling arm is guided in a linear direction along a first axis of movement and along a second axis of movement which extends transversely with respect to the first axis of movement such that it can be adjusted with respect to the base part, and wherein for guiding the handling arm, a guiding cam is provided on the base part and at least one cam follower is provided on the handling arm, wherein a first drive is provided for adjusting the handling arm along the first axis of movement and a second drive is provided for adjusting the handling arm along the second axis of movement.

Abstract: A substrate processing apparatus including a transport chamber having an end and defining more than one substantially linear substrate transport zone where each transport zone extends longitudinally along the transport chamber between opposing walls of the transport chamber and at least one of the more than one substantially linear substrate transport zones is configured as a supply zone for enabling transport of substrates from the end and at least one of the more than one substantially linear substrate transport zones is configured as a return zone for enabling transport of substrates to the end, and at least one substrate transport located in and movably mounted to the transport chamber for transporting substrates along the more than one substantially linear substrate transport zone, where each substrate transport zone is configured to allow the at least one substrate transport to move from one transport zone to another transport zone.

Abstract: A handler for electronic components, in particular IC's, comprising a feed unit for plungers with a pneumatic cylinder unit that can be displaced and that is coupled to a pneumatic cylinder displacement unit, which moves said cylinder unit back and forth in the axial direction of the plungers.

Abstract: A crucible handling shuttle includes a pair of opposed dual crucible-gripping arms mounted on a rotatable head. The shuttle is removably plugged into a sliding block of a carriage to move between a furnace and a crucible loading station. The carriage includes mechanical, electrical, and pneumatic plugs or sockets which couple to mating sockets or plugs of the shuttle. A linear actuator extends between the carriage and the furnace base to raise and lower the carriage and shuttle coupled thereto.

Abstract: A method for loading and unloading a machining machine for machining boards that includes for loading the machining machine, the changing table is loaded with a board to be machined, whereby the board is separated from the first storage place and is deposited on a changing table. The changing table is conveyed together with the board to the machining machine. For unloading the machining machine, the changing table is conveyed together with a machined board to the second storage place and is then unloaded, wherein the machined board is separated from the changing table and deposited on the second storage place, wherein the unloading of the changing table includes conveying the changing table and the machined board to an unloading place in an area above the second storage place and the machined board is separated from the changing table at the unloading place.

Abstract: A substrate laminating apparatus which sticks substrates together in vacuum with high accuracy. The apparatus includes a first chamber into which two substrates are carried; a second chamber in which substrates are stuck together; and a third chamber which delivers a substrate laminate. The pressure level in the first chamber and the third chamber is varied from atmospheric to medium vacuum under control and that in the second chamber is varied from medium vacuum to high vacuum under control. In the second chamber, electrostatic adsorption means which can move up and down picks up an upper substrate and holds it on an upper table.

Abstract: A substrate processing apparatus including a transport chamber having an end and defining more than one substantially linear substrate transport zone where each transport zone extends longitudinally along the transport chamber between opposing walls of the transport chamber and at least one of the more than one substantially linear substrate transport zones is configured as a supply zone for enabling transport of substrates from the end and at least one of the more than one substantially linear substrate transport zones is configured as a return zone for enabling transport of substrates to the end, and at least one substrate transport located in and movably mounted to the transport chamber for transporting substrates along the more than one substantially linear substrate transport zone, where each substrate transport zone is configured to allow the at least one substrate transport to move from one transport zone to another transport zone.

Abstract: A feed and removal system for a machine tool has a supply device and a removal device for workpieces. Arranged at the front side of the machine tool are loading arms and unloading arms, which are pivotable about vertical pivot axes and, at their free ends, carry workpiece carrying devices.

Abstract: An apparatus for moving containers into or from a chamber provided with at least a supporting surface for the containers, comprises a pushing element for engaging the containers and a driving arrangement for moving the pushing element through the chamber along a sliding direction, the driving arrangement comprising, a modular rod assembly for supporting the pushing element and including a set of rod elements which can be mutually and removably associated, an assembling arrangement for connecting or disconnecting the rod elements to or from the modular rod assembly so as to change a length thereof and to move the pushing element.

Abstract: According to one embodiment, a head stack assembly incorporating device connects a head stack assembly to the base of a magnetic disk device by screwing a connector on the bottom surface of the rotational shaft of the head stack assembly and a connector on the base of the magnetic device together. The head stack assembly incorporating device includes a chuck and a driving-force transmitter. The chuck pinches the rotational shaft of the head stack assembly from the upper surface of the head stack assembly to be fixed to the rotational shaft. The chuck is rotatable around the central axis of the rotational shaft. The driving-force transmitter transmits a rotational force to the chuck.

Abstract: Singulation handler is provided which comprises a loading zone where a carrier mechanism receives and holds an electronic component and a singulation zone where the electronic component held by the carrier mechanism is singulated. A loader that is movable along an axis is operative to place the electronic component onto the carrier mechanism when it is situated in the loading zone and a vision system that is movable along substantially the same axis as the loader is operative to obtain at least one image of the electronic component showing alignment information so that the electronic component can be properly aligned during singulation.

Abstract: Two load lock chambers having a load lock pedestal are provided adjacent to a vacuum process chamber through a vacuum intermediate chamber. A passage opening is provided between the vacuum process chamber and the vacuum intermediate chamber. Two wafer retaining arms are installed between a platen device in the vacuum process chamber and the vacuum intermediate chamber. The two wafer retaining arms are reciprocatingly movable between the corresponding load lock pedestals and the platen device while passing through the passage opening and crossing with an overpass each other at different levels. By retaining an unprocessed wafer by one of the wafer retaining arms and retaining a processed wafer by the other wafer retaining arm, transfer of the unprocessed wafer from one of the load lock pedestals to the platen device and transfer of the processed wafer from the platen device to the other load lock pedestal are performed simultaneously.

Abstract: A mini clean room for preventing wafer pollution includes a robot arm, a clean room body slidably disposed on the robot arm and at least one lock unit which is rotatably connected with the clean room body. During operation, the robot arm extends out of the clean room body to carry a wafer waiting to be processed, and then moves back into the clean room body which can provide an isolated and protected space for the wafer to avoid that the wafer is polluted. The present invention also discloses a method of using a mini clean room for preventing wafer pollution.

Abstract: The invention relates to an analysis apparatus with an analysis device for analyzing body fluids, and a magazine for test elements with a fresh supply container and a transfer unit that comprises a transfer element. At least one aperture for receiving a test element is formed in the circumferential surface of the transfer element. A waste container is provided in which used test elements are stored again after use.

Abstract: In the present invention, through a provision of a relay stand including a first relaying point, a second relaying point and a plurality of work mounting bases, a discharge/feed process of works between the relay stand and the work feed container and the work accommodation container is performed at the first relaying point and a load/unload process of works between the relay stand and the plurality of work inspection machines is performed at the second relaying point.

Abstract: Substrate processing apparatus having a chamber, a generally linear array of process modules, a substrate transport, and a drive system. The chamber is capable of being isolated from the outside atmosphere. Each process module of the array is communicably connected to the chamber to allow a substrate to be transferred between the chamber and process module. The substrate transport is located in and is movably supported from the chamber. The transport is capable of moving along a linear path defined by the chamber for transporting the substrate between process modules. The drive system is connected to the chamber for driving and moving the transport along the linear path. The chamber comprises a selectable number of chamber modules serially abutted to defined the chamber. Each module has an integral portion of the drive system.

Abstract: A substrate processing apparatus includes a plurality of process chambers (20) for applying a process to substrate accommodated therein and a conveyance case (24) that conveys the accommodated substrates to the process chambers (20) and a transfer mechanism that moves the conveyance case (24) along a moving path. The conveyance case accommodates the substrates in an isolated state from an external atmosphere. The plurality of process chambers (20) are arranged in an aligned state on both sides of a moving path of the conveyance case (24). The conveyance case (24) has two conveyance ports (24a) in response to conveyance ports (20a) of the process chambers (20) arranged in alignment in two rows.

Abstract: Disclosed herein is an inspection apparatus for liquid crystal display panels, which can perform inspection for orientation abnormality of the liquid crystal display panels while maintaining a uniform temperature. The inspection apparatus comprises a heating chamber to heat a plurality of LCD panels received in a cassette, an inspection unit positioned near the heating chamber to receive the LCD panels heated by the heating chamber, and to inspect abnormality of each LCD panel, and a panel transferring part to withdraw each of the LCD panels from the cassette and supply each of the LCD panels to the inspection unit, and to withdraw each of the LCD panels from the inspection unit and supply each of the LCD panels to the cassette while moving between the cassette and the inspection unit.

Abstract: An electrode transporter is provided comprising a transporter frame, a plurality of transitional support elements, and a plurality of flipside support elements. The flipside support elements are configured to immobilize an electrode along a gravitational force vector normal to a major face of an electrode positioned in an electrode accommodating space defined by the transitional support elements and the flipside support elements. The transitional support elements are configured to transition back and forth from a secured state, where the electrode is further immobilized along an opposing force vector opposite the gravitational force vector, to an unsecured state where the electrode is relatively mobile along the opposing force vector. Additional embodiments relate to the use of a transporter tripod and an electrode removal puck and lifting fork to remove an electrode from the transporter frame.

Abstract: A tray holding device includes a frame (20) that defines a tray elevation area (A) in which a tray containing workpieces can be lifted and lowered and that allows the loading and unloading of workpieces from above, a lower supporting member (40) that is fixed to the frame to horizontally receive and support the tray in the tray elevation area (A), an elevation mechanism (60) that is provided at the frame to lift and lower the tray supported by the lower supporting member, and an upper supporting mechanism (50) that is mounted to the frame to receive and support the tray lifted by the elevation mechanism from below and to horizontally carry it out. Thus, the size, installation space, etc., of the tray holding device can be reduced, and the productivity can be heightened by shortening a waiting time.

Abstract: A substrate processing apparatus 1 has: sensors 21 and 22 provided in an etching chamber 14 and configured to detect a relative position between the etching chamber 14 and a wafer transfer mechanism 23; a control section 38 configured to correct positional displacement; a motor controller 39; a motor 28; and a motor 30. Since the positional displacement of a wafer W can be corrected, the wafer transfer mechanism 23 is capable of carrying the wafer W into the etching chamber 14 without causing any positional displacement, so that the wafer W can be placed on a susceptor 19 at a proper position.

Abstract: A plate and method for positioning functional elements in a system for working with fluid-containing samples includes a horizontal work field having a lengthwise dimension and a perpendicularly extending transverse dimension, as well as a robot arm with a functional element, aligned essentially perpendicularly to the work field in a Z direction. The robot arm can move the functional element in at least a partial region of the work field in the X and/or Y direction. The plate includes two light barriers which intersect inside the partial region, each having a transmitter and receiver whose scanning or detection beams each extend in a direction deviating from the X direction and/or from the Y direction.

Abstract: A chilled arm that transports a substrate to and from a heating plate for performing a heating process on the substrate is formed with a flow passage pipe therein, and cools the entire holding area thereof opposed to the substrate held by the chilled arm to a predetermined reference temperature by supplying circulating cooling water through the flow passage pipe. Six polyimide heaters are affixed to the holding area to control the temperature of at least a portion of the holding area at a temperature different from the reference temperature. These two temperature control mechanisms intentionally provide a temperature distribution to the holding area to thereby provide an intentional temperature distribution to the substrate before and after the heat treatment by the heating plate. This reduces the nonuniformity of a temperature distribution which typically occurs in the heating plate to accomplish a uniform heat treatment throughout the heat treatment process step.

Abstract: A redundantable robotic mechanism is disclosed for improving reliability of tranport equipment. The redundantable robot assembly typically comprises independent robots with separate controls, motors, linkage arms, or power, thus providing the capability of operation even if parts of the assembly are not operational or when parts of the assembly are removed for repair. The redundantable robot assembly can be also designed to allow in-situ servicing, e.g. servicing one robot when the other is running. The disclosed redundantable robot assembly provides virtual uninterrupted process flow, and thus greatly increases the yield for the manufacturing facility.

Abstract: The present invention is an object to provide an apparatus or a method making it possible to easily effect connection between additional electrodes, etc. and lead electrodes when performing a processing for achieving a predetermined throat height value or crown processing or the like and making it possible to measure the requisite lapping amount. For achieving the object, a flexible electrode extension sheet is used which consists of a portion for retaining a ceramic bar in which element portions are formed and a portion where there are formed wirings respectively in correspondence with the elements and adapted to be connected to these elements, in which these wirings, which can be easily connected to an external measurement system, are electrically connected to the elements, whereby the lapping amount is easily obtained from the characteristic amount of the elements in the lapping process.

Abstract: An apparatus for mounting semiconductors contains a bonding station, whereby the bonding station comprises a wafer table for presenting the semiconductor chips, a substrate table and a pick and place system with a bondhead with a chip gripper. Part of the wafer table is located underneath the substrate table. The pick and place system has a first linear motor that comprises a rigidly arranged stator and a shuttle that can be moved in a first direction guided by first guide elements, and a second linear motor that comprises a rigidly arranged stator and a shuttle that can be moved in a second direction. The shuttle of the first linear motor has second guide elements that guide the shuttle of the second linear motor. The bondhead with the chip gripper is arranged on the shuttle of the second linear motor.

Abstract: The present invention is an object to provide an apparatus or a method making it possible to easily effect connection between additional electrodes, etc. and lead electrodes when performing a processing for achieving a predetermined throat height value or crown processing or the like and making it possible to measure the requisite lapping amount. For achieving the object, a flexible electrode extension sheet is used which consists of a portion for retaining a ceramic bar in which element portions are formed and a portion where there are formed wirings respectively in correspondence with the elements and adapted to be connected to these elements, in which these wirings, which can be easily connected to an external measurement system, are electrically connected to the elements, whereby the lapping amount is easily obtained from the characteristic amount of the elements in the lapping process.

Abstract: A storage and retrieval apparatus including a robotic device capable of gripping items stored in the apparatus and delivering the item to a separate, proximate instrument. The items to be stored are loaded from the outside of the apparatus at each face of the hexagonal or octagonal shaped storage carousel. The storage carousel, which can be manually rotated, is mounted on a stationary base, both structures including a hollow core. The robotic device includes slider bars within the core of the apparatus and is rotatable about the central axis of the apparatus. The robotic device is capable of translating vertically, telescoping horizontally, rotating and gripping an item stored at a desired location within the storage carousel. Upon retrieval of a desired item, the robotic device will proceed to retract and translate downward to an aperture within the base. The item is transferred to an adjacent instrument through the aperture using the telescopic arm of the robotic device.

Abstract: A multi-chamber system of an etching facility for manufacturing semiconductor devices occupies a minimum amount of floor space in a cleanroom by installing a plurality of processing chambers in multi-layers and in parallel along a transfer path situated between the processing chambers. The multi-layers number 2 to 5, and the transfer path can be rectangular in shape and need only be slightly wider than the diameter of a wafer. The total width of the multi-chamber system is the sum of the width of one processing chamber plus the width of the transfer path.

Abstract: An overhead conveyor system transports a selectable workpiece from vertically extending storage racks having a plurality of horizontally extending shelves with stationary stacks of workpieces to be processed on each shelf. Each shelf includes horizontally spaced shelf support members defining openings complementary to horizontally extending support members of a carriage. The horizontally extending members of the carriage are insertable between adjacent horizontally spaced shelf members to engage the upper most workpiece supported by the shelf located below the horizontally extending support members of the carriage. Workpiece engaging members operably associate or engage the upper-most workpiece with the carriage for movement vertically and horizontally along the path of travel to a workstation for processing.

Abstract: A vacuum chamber for transporting at least one workpiece has two or more openings defining respective opening areas for treating or handling the at least one workpiece. A transport device is arranged relative to the openings and includes a drive shaft rotatable around a drive shaft rotational axis. Two or more conveyors transport at least one workpiece. A linear driver is operationally independent to linearly move respective ones of the two or more conveyors relative to the drive shaft, with a drive component in a radial direction relative to the axis. An obstructing member is provided for closing the openings when one of the conveyors is positioned adjacent to the openings by rotating the transport device and is moved by the linear drive towards the opening.

Abstract: A machine tool having a C-shaped frame has a workpiece processing station adjacent the open end of the throat, and an elongated guide rail extends in a first axis perpendicularly to the throat. A carrier extends along the guide rail, and a multiplicity of guide units are spaced along and movable on the carrier in the first axis. Workpiece clamping units are carried by the guide units, and drive means moves the guide units on the carrier. The guide rail is movable in the throat along a second axis perpendicular to the first axis, and a second carrier supported on the frame extends in a second axis parallel to the throat. A multiplicity of guide elements is spaced along and movable on the second carrier and supports the guide rail for movement in the second axis of the second guide rail.

Abstract: In a loading and unloading station for semiconductor processing installations, the object of the present invention is to ensure charging proceeding from transporting containers under clean room conditions. These transporting containers themselves serve as magazines for disk-shaped objects and are open laterally. It should also be possible, optionally, to load and unload a greater quantity of such transporting containers, wherein the exchange of transporting containers must be effected under favorable ergonomic conditions. According to the invention, the transporting container for loading, unloading and reloading of disk-shaped objects is coupled in a stationary manner by the container cover with the closure by means of an adhering engagement. The charging opening and the transporting container are opened simultaneously in that the container cover and the closure are moved down jointly into the semiconductor processing installation.

Abstract: A media rework tool for discs and/or a spindle motor carrying a disc pack is disclosed that has a slider plate mounted on a base for lateral movement between a retracted position and an extended position. The slider plate holds a spindle motor with a disc pack mounted on it, and moves between the two positions. The tool includes a gripper assembly having a plurality of opposing arms for grasping predetermined discs within a disc pack on the spindle motor when the slider plate is in the retracted position. The gripper assembly raises the predetermined discs and any intermediate spacer rings upward for temporary storage on a media guide to allow the remainder of the disc pack to be reworked, such as for replacement of a defective disc or spindle motor when the slider plate is laterally moved to the extended position. Following reworking of the remainder of the disc pack, the spindle motor is returned to its centered position relative to the media guide and the gripper assembly.

Abstract: An assembly device, in particular a fully automatic assembly device for producing microsystem technical products and for assembling components in the semiconductor industries, comprising an assembly table, at least one material transport system that transports the products to be placed with components, at least one transport system arranged on the assembly table, and at least one component transport unit that is arranged and displaceable perpendicularly to the transport system and that comprises at least one assembly head, said component transport unit(s) is/are arranged on one or more portals displaceable by means of the transport system in parallel to the direction of transport of the products to be placed with components, which products are in turn displaced by the material transport system.

Abstract: A substrate processing system includes a primary processing assembly and secondary processing assembly. The secondary processing assembly has one or more interconnected modules and includes one or more process stations. The primary and secondary processing assemblies are connected by a vacuum conveyor, so that the substrates remain in vacuum during transport. The secondary processing assembly may include one or more modules which are interconnected to provide a desired system configuration. A dual processing module, including first and second process stations, is selectably operable in a serial mode or a parallel mode.

Abstract: A multi-chamber system of an etching facility for manufacturing semiconductor devices occupies a minimum amount of floor space in a cleanroom by installing a plurality of processing chambers in multi-layers and in parallel along a transfer path situated between the processing chambers. The multi-layers number 2 to 5, and the transfer path can be rectangular in shape and need only be slightly wider than the diameter of a wafer. The total width of the multi-chamber system is the sum of the width of one processing chamber plus the width of the transfer path.

Abstract: An apparatus and method for controlling wafer temperature and environment is provided. The apparatus includes a batch processing fixture for batch processing wafers at a first elevated temperature. The batch of wafers is not substantially ramped in temperature within the batch processing fixture. The apparatus also includes a single wafer processing apparatus for rapidly ramping temperature of a wafer of the batch from the first elevated temperature wherein a uniform temperature across the wafer is maintained during the ramping. Another embodiment of the apparatus (10) includes an RTP chamber (20) having an inert or reducing environment and that includes a pedestal (24) for holding a single wafer (16) and a heater unit (22) arranged so as to uniformly and rapidly heat the single wafer.

Abstract: A method and apparatus are provided for substrate handling. In a first aspect, a temperature adjustment plate is located below a substrate carriage and is configured such that a substrate may be transferred between the temperature adjustment plate and the substrate carriage by lifting and lowering the substrate carriage above and below the top surface of the temperature adjustment plate. The temperature adjustment plate may be configured to heat and/or cool a substrate positioned thereon. In a second aspect, the substrate carriage is magnetically coupled so as to rotate and/or lift and lower magnetically, thereby reducing particle generation via contact between moving parts (and potential chamber contamination therefrom). In a third aspect, a substrate handler positioned below the substrate carriage is both magnetically coupled and magnetically levitated, providing further particle reduction.

Abstract: In a loading and unloading station for semiconductor processing installations, the object of the present invention is to ensure charging proceeding from transporting containers under clean room conditions. These transporting containers themselves serve as magazines for disk-shaped objects and are open laterally. It should also be possible, optionally, to load and unload a greater quantity of such transporting containers, wherein the exchange of transporting containers must be effected under favorable ergonomic conditions. According to the invention, the transporting container for loading, unloading and reloading of disk-shaped objects is coupled in a stationary manner by the container cover with the closure by means of an adhering engagement. The charging opening and the transporting container are opened simultaneously in that the container cover and the closure are moved down jointly into the semiconductor processing installation.

Abstract: In a loading and unloading station for semiconductor processing installations, the object of the present invention is to ensure charging proceeding from transporting containers under clean room conditions. These transporting containers themselves serve as magazines for disk-shaped objects and are open laterally. It should also be possible, optionally, to load and unload a greater quantity of such transporting containers, wherein the exchange of transporting containers must be effected under favorable ergonomic conditions. According to the invention, the transporting container for loading, unloading and reloading of disk-shaped objects is coupled in a stationary manner by the container cover with the closure by means of an adhering engagement. The charging opening and the transporting container are opened simultaneously in that the container cover and the closure are moved down jointly into the semiconductor processing installation.

Abstract: A system for producing disc-like optical data carriers comprises an injection-molding machine for manufacturing a disc-like substrate, and a finishing device for applying a reflective layer to the substrate and for applying a protective layer to the reflective layer. The injection-molding machine and the finishing device are integrated in a single production unit. An optical inspection unit is also integrated in the production unit.

Abstract: A substrate transfer system is used in an in-line film deposition system. The substrate transfer system is provided with an auxiliary vacuum chamber and a main vacuum chamber. The auxiliary vacuum chamber has a plurality of first substrate cassettes. The main vacuum chamber is communicated with another vacuum chamber through which carriers are transferred along a transport path. The main vacuum chamber has two robots and a plurality of second substrate cassettes arranged in parallel on which the substrates is placed. The second substrate cassettes are arranged between the two robots. The substrates are disk-shaped substrates having center holes. The center holes are utilized as hook parts during a pickup operation. Thereby the method of mounting substrates in the holders of carriers etc. is improved without changing the operating speed of the robots. Therefore the amount of substrates transported per unit time is increased and the processing capacity of the substrate processing system is enhanced.

Abstract: A transferring device which operates on an apparatus for producing optical discs comprising several different work stations, each arranged to perform a predetermined operation on the discs being processed. The transferring device performs a sequential transfer of each disc between the different work stations following a path comprising two parallel advance lines, one forward line and one return line, respectively, which are disposed laterally on opposite sides relative to the longitudinal extension axis of a support arm. The support arm supports a first and a second series of pick-up heads arranged to execute the optical disc transfer on the forward and return lines during the forward and return strokes of the support arm, respectively.

Abstract: In a device processing system, an apparatus and method for retaining a device that is to be transferred to or from the apparatus at a transfer location and processed at a processing location that is spaced from the transfer location is shown and described. A first device is placed on a first chuck at the transfer location with the chuck facing a first direction. The apparatus then rotates from a first position to a second position in which the device is at the processing location and facing in a second direction which is different from the first direction. While the apparatus is in the second position, a second device may be placed on a second chuck that is now oriented in the first direction at the transfer location. When the apparatus is rotated from the second position to the first position, the first device is returned to the transfer location and the second device is moved into the processing location.