Abstract: A substrate processing apparatus including a frame, a first SCARA arm connected to the frame, including an end effector, configured to extend and retract along a first radial axis; a second SCARA arm connected to the frame, including an end effector, configured to extend and retract along a second radial axis, the SCARA arms having a common shoulder axis of rotation; and a drive section coupled to the SCARA arms is configured to independently extend each SCARA arm along a respective radial axis and rotate each SCARA arm about the common shoulder axis of rotation where the first radial axis is angled relative to the second radial axis and the end effector of a respective arm is aligned with a respective radial axis, wherein each end effector is configured to hold at least one substrate and the end effectors are located on a common transfer plane.

Abstract: There is provided a stacking system capable of manufacturing an electrode structure, where negative electrode sheets and positive electrode sheets are stacked with separators in between, precisely and at high speed. The present invention includes a first turntable that rotationally moves a plurality of stacking regions to a plurality of work positions in order and a plurality of conveying apparatuses that stack, at stacking positions included in the plurality of work positions, target objects at the stacking regions of the first turntable that have arrived at the stacking positions.

Abstract: A transport apparatus including a robot drive; an arm having a first end connected to the robot drive; and at least one end effector connected to a second end of the arm. The arm includes at least three links connected in series to form the arm. The arm is configured to be moved by the robot drive to move the at least one end effector among load locks and two or more sets of opposing process modules.

Abstract: A substrate processing system with independent substrate placement capability to two or more substrate support assemblies is provided. Two different sets of fixed-length lift pins are disposed on two or more substrate support lift pin assemblies of two or more process chambers, where the length of each lift pin in one process chamber is different from the length of each lift pin in another process chamber. The substrate processing system includes simplified mechanical substrate support lift pin mechanisms and minimum accessory parts cooperating with a substrate transfer mechanism (e.g., a transfer robot) for efficient and independent loading, unloading, and transfer of one or more substrates between two or more processing regions in a twin chamber or between two or more process chambers. A method for positioning one or more substrates to be loaded, unloaded, or processed independently or simultaneously in two or more processing regions or process chambers is provided.

Abstract: A transfer device 17 in a semiconductor processing system includes first and second actuation mechanisms 9A, 9B having first and second support sections movable on first and second vertical planes, respectively, the latter being parallel with each other. First and second movable blocks 18A, 18B are supported on the first and second support sections so that they may be horizontally moved by the first and second actuation mechanisms. Disposed on the first and second movable blocks are first and second handling mechanism 19A, 19B capable of extension and contraction for handling a processing subject substrate W. A control section 20 controls the operation of the first and second actuation mechanisms so that the first and second movable blocks may not interfere with each other.

Abstract: An industrial robot is provided with the first hand, the second hand, the arm and the main unit section. The base end portion of the first hand and the base end portion of the second hand are joined to the front end portion of the arm such that they overlap with each other in the top-bottom direction. The first hand and the second hand are independently rotatable with respect to the arm and also rotatable about the common center of rotation with respect to the arm in the view from the top-bottom direction. Also, the first hand and the second hand are formed being bent in the view from the top-bottom direction, and also formed to have line symmetry about a predetermined imaginary line passing through the center of rotation in the view from the top-bottom direction.

Abstract: A storage device test system includes a test slot configured to receive at least two storage devices for testing, the at least two storage devices being in a same plane.

Abstract: A loading mechanism includes a fastening board, a cam, a rotary pivot, and a load module. The fastening board defines a pivot hole at the center portion of the fastening board and a sliding guide adjacent to the pivot hole. The cam defines a locating hole and an annular guide. The load module includes two guiding poles, a follower fastened to one end of the two guiding poles, and a clamping member fastened to the other end of the two guiding poles. The distance between a part of the annular guide and the locating hole is gradually decreased, and the cam can be driven to rotate. The cam drives the follower to slide along the annular guide to drive the load module to slide along the sliding guide.

Abstract: A substrate laminating apparatus which sticks substrates together in vacuum with high accuracy. The apparatus includes a first chamber into which two substrates are carried; a second chamber in which substrates are stuck together; and a third chamber which delivers a substrate laminate. The pressure level in the first chamber and the third chamber is varied from atmospheric to medium vacuum under control and that in the second chamber is varied from medium vacuum to high vacuum under control. In the second chamber, electrostatic adsorption means which can move up and down picks up an upper substrate and holds it on an upper table.

Abstract: A handler includes a base having an opening portion, a first hand which transports a transport target, a first transport section which transports the first hand to above the opening portion and moves the first hand down, a second hand which transports the transport target, a second transport section which transports the second hand to above the opening portion and moves the second hand down, and a control section which controls an operation of the first transport section and an operation of the second transport section. The handler has a state where the first hand and the second hand are disposed in parallel to the opening portion while being close to each other toward above the opening portion.

Abstract: A substrate unload and load apparatus adapted to unload and load a plurality of processed substrates from a plurality of arrayed substrate holders, the apparatus having a frame and a plurality of processed substrate supports coupled to the frame configured to support the processed substrates. A plurality of unprocessed substrate supports is coupled to the frame configured to support the unprocessed substrates, each of the unprocessed substrate supports alternating and interleaved with each of the processed substrate supports. A holder release is coupled to the frame and configured to engage the arrayed substrate holders having a first state where the arrayed substrate holders releases the processed substrates from the arrayed substrate holders, the holder release having a second state where the arrayed substrate holders captures the unprocessed substrates with arrayed substrate holders.

Abstract: A transfer system transfers a workpiece between stations of a production line spaced along a transfer axis. The transfer system comprises a frame having a main beam extending along the transfer axis. A plurality of transfer heads are spaced along the main beam with each of the transfer heads configured to independently move along the main beam along the transfer axis and relative to the main beam along a lift axis orthogonal to the transfer axis and a clamp axis orthogonal to the transfer and lift axes to accommodate for variation in spacing between each of the stations. Each of the transfer heads are suspended from the main beam and extend downwardly from the main beam beneath the main beam so that the transfer head is selectively moved outwardly, upwardly, and sideways away from the stations to provide access to the stations from the substrate.

Abstract: The present invention generally provides a cluster tool for processing a substrate. In one embodiment, the cluster tool comprises at least one processing rack, which comprises a first plurality of substrate processing chambers that are positioned adjacent to each other and aligned in a first direction, a second plurality of substrate processing chambers that are positioned adjacent to each other and adjacent to at least one of the first plurality of substrate processing chambers, the second plurality of substrate processing chambers being positioned in a second direction relative to the first direction, a first shuttle robot movable in the first direction for moving substrates between each of the first plurality of substrate processing chambers, and a second shuttle robot movable in the second direction for moving substrates between each of the second plurality of substrate processing chambers.

Abstract: Embodiments of the present invention provide an apparatus and method for processing substrates using a multiple screen printing chamber processing system that has an increased system throughput, improved system uptime, and improved device yield performance, while maintaining a repeatable and accurate screen printing process on the processed substrates. In one embodiment, the multiple screen printing chamber processing system is adapted to perform a screen printing process within a portion of a crystalline silicon solar cell production line in which a substrate is patterned with a desired material, and then processed in one or more subsequent processing chambers.

Abstract: A component mounting apparatus includes: a load area to load a substrate; an unload area to unload the substrate; a main area interposed between the load and unload areas, including a first area including a first mounting area, a second area including a second mounting area, and a third area interposed therebetween; two mounting units to mount, on the substrate, first and second components in the first and second mounting areas, respectively; a conveyor group to convey the substrate, including first to fourth conveyors, the second and fourth conveyors being capable of receiving the substrate from the first and third conveyors in the first and second areas, respectively; and a driving mechanism capable of moving at least one of the first and second conveyors between the first and third areas and moving at least one of the third and fourth conveyors between the second and third areas.

Abstract: An apparatus to feed elongated metallic workpieces to a manufacturing process including a storage hopper configured to hold a plurality of workpieces that are randomly oriented and a movement device having a workpiece support that is automatically engageable with a workpiece.

Abstract: By providing an under-specified specification for designating a destination carrier in a respective control job or control message, a high degree of flexibility in determining the destination of processed substrates may be obtained, thereby also allowing the removal of a source carrier for enhancing load port availability in complex semiconductor facilities.

Abstract: An oven includes: an inlet elevator having multiple receiving bays for receiving a piece to be heated in the oven where the receiving bays are stacked vertically and the elevator is configured to move up or down to align a receiving bay; a mandrel having multiple shelves to correspond a shelf to a bay of the inlet elevator, each shelf configured to support a piece received from the inlet elevator, the mandrel configured to rotate each piece on a shelf between a loading position, a baking position, and an unloading position; an outlet elevator having multiple receiving bays for unloading a piece heated in the oven, the unloading bays are stacked vertically and the elevator is configured to move up or down to align an unloading bay with a material handling system moving the heated pieces; and a microwave generator configured to heat at least one of the pieces when the pieces are in the baking position. A method of heating a material is also provided.

Abstract: An autoloader system with modularization architecture and self-adaptive motion control ability for mass optical disks duplication includes four physical modules: a robot arm module with sensors and joints dedicates for delivering and picking up optical disks; an optical disk duplication tower has a number of optical drives in a stack, or a matrix for optical disk duplication; a motion control module has an embedded motion controller and a power source to synchronize the motion of robot arm and duplication; a platform module has a base frame to fix other modules and a user interface. Some disk stacks are situated on top of platform module. The use of a self-adaptive control algorithm, consisting of a Motion Strategy Database, Initial Process, Motion Planning Process, Motion Generation Process and Motion Monitor Process, to ascertain system configurations and components furthest satisfy the required flexibility for modifying/upgrading hardware or ever-changing user needs.

Abstract: Positions of predetermined spots in a frame of a motorcycle are determined by sensing all the predetermined spots in one direction from a front side or a rear side of the frame of the motorcycle by a sensing device.

Abstract: A quantity of wire is associated with a number of interruptions that occurred during the production and/or subsequent processing of the wire. The number of interruptions is used to classify the wire as being of a particular quality and/or suitable for a particular task.

Abstract: A coating apparatus has a stage module, a temperature regulating module which adjusts a temperature of a substrate to a set temperature, a coating module which applies a coating liquid to the temperature-regulated substrate, and a heating module which heats the coating-liquid applied substrate, arranged in a process section in order from an upstream end of transfer along a transfer path of the substrate, and has a dummy stage placed between the coating module and the heating module so that when by means of a substrate transfer mechanism which has an upper arm and a lower arm, provided one on the other and advanceable and retreatable independently of each other, substrates are transferred one by one from an upstream module to a downstream module in order by alternately operating the upper arm and the lower arm, that arm which performs transfer from the temperature regulating module to the coating module differ from that arm which receives a substrate from the heating module, that numbers are sequentially assig

Abstract: A storage device processing system that includes at least one automated transporter, at least one rack accessible by the at least one automated transporter, and multiple test slots housed by the at least one rack. Each test slot is configured to receive a storage device for testing. The storage device processing system includes a conveyor arranged in a loop around and being accessible by the at least one automated transporter. The conveyor receives and transports the storage device thereon. The at least one automated transporter is configured to transfer the storage device between the conveyor and one of the test slots of the at least one rack.

Abstract: A cluster apparatus for processing a substrate includes a load-lock chamber to receive a substrate, a transfer chamber adjacent to the load-lock chamber, one or more processing chambers each having a side facing the transfer chamber, and a robot in the transfer chamber to unload the substrate from or load the substrate into at least one of the one or more processing chambers or the load-lock chamber. A rotating stage is included in the load-lock chamber to support and rotate the substrate to a desired orientation.

Abstract: A component test apparatus performing a test on an electronic component is disclosed. The component test apparatus includes a component loading device, a transport hand, and a component unloading device. A plurality of functional stations have mutually different functions and are spaced apart at equal intervals along a movement direction of the transport hand. The transport hand has a plurality of index units that are capable of holding the electronic component independently from one another and operating independently from one another. The index units are spaced apart at intervals equal to the intervals at which the functional stations are spaced apart along a transport direction of the electronic component from a loading position toward a test position.

Abstract: A tray holding device includes a frame (20) that defines a tray elevation area (A) in which a tray containing workpieces can be lifted and lowered and that allows the loading and unloading of workpieces from above, a lower supporting member (40) that is fixed to the frame to horizontally receive and support the tray in the tray elevation area (A), an elevation mechanism (60) that is provided at the frame to lift and lower the tray supported by the lower supporting member, and an upper supporting mechanism (50) that is mounted to the frame to receive and support the tray lifted by the elevation mechanism from below and to horizontally carry it out. Thus, the size, installation space, etc., of the tray holding device can be reduced, and the productivity can be heightened by shortening a waiting time.

Abstract: A substrate transport apparatus including a frame, a drive section connected to the frame and including at least one independently controllable motor, at least two substrate transport arms connected to the frame and comprising arm links arranged for supporting and transporting substrates, and a mechanical motion switch coupled to the at least one independently controllable motor and the at least two substrate transport arms for effecting the extension and retraction of one of the at least two substrate transport arms while the other one of the at least two substrate transport arms remains in a substantially retracted configuration.

Abstract: According to an aspect of an embodiment, there is provided a part-delivery apparatus which transports a part to a designated part-delivery position by drawing the part onto a head by suction pressure at a designated part-suction position, and which releases the part at the part-delivery position by stopping application of the suction pressure. The apparatus includes: a compliance mechanism for allowing movement of the head in a horizontal plane; an upper-side positioning unit for positioning the head in the part-suction position by responding to an upward movement of the head; and a lower-side positioning unit for positioning the head in the part-delivery position by responding to the downward movement of the head.

Abstract: An automated material handling system that includes an extractor/buffer apparatus capable of simultaneously accessing multiple Work-In-Process (WIP) parts, thereby providing a highly efficient interface between WIP storage locations and transport equipment. The extractor/buffer apparatus includes multiple extractor/buffer modules, each module being configured to interface with a location for holding WIP parts that is a number of WIP parts deep. Each module includes a platform for holding multiple WIP parts. Further, multiple modules may be disposed side-by-side to form an extractor/buffer apparatus capable of handling multiple rows of WIP parts.

Abstract: An exposure apparatus has a mask stage (9), a prealignment device (7) which prealigns a mask (1) to be transferred to the stage (9), and a manipulating mechanism (10) which transports a master or exchanges two masters between the stage (9) and prealignment device (7). A master transport apparatus (30) includes a mask transport mechanism (8) which holds the mask (1) with holding portions (8a, 8b) that can hold at least two masks (1) and transports the master (1), and a controller (11) which controls the transport mechanism (8). The controller (11) controls the transport mechanism (8) such that, when a mask (1) that should be used in a first turn for exposure is to be mounted on the stage (9), a mask (1) to be used in a second turn is provided to the prealignment device (7), and a mask (1) to be used in a third turn is held by the holding portion (8a, 8b).

Abstract: In a loading and unloading station for semiconductor processing installations, the object of the present invention is to ensure charging proceeding from transporting containers under clean room conditions. These transporting containers themselves serve as magazines for disk-shaped objects and are open laterally. It should also be possible, optionally, to load and unload a greater quantity of such transporting containers, wherein the exchange of transporting containers must be effected under favorable ergonomic conditions. According to the invention, the transporting container for loading, unloading and reloading of disk-shaped objects is coupled in a stationary manner by the container cover with the closure by means of an adhering engagement. The charging opening and the transporting container are opened simultaneously in that the container cover and the closure are moved down jointly into the semiconductor processing installation.

Abstract: An apparatus and method for the efficient simultaneous loading and unloading a plurality of compact disc media into and out of a plurality of recording bays. The present invention provides a plurality of two position platters that allow the simultaneous rotation of a plurality of compact discs along horizontal planes defined by the platters above compact disc drive input trays for the transfer of the compact discs to a plurality of compact disc drives using a plurality of associated compact disc lifting devices that lift the compact discs off the platters allowing the platters to rotate along a central axis and then distributes the plurality of compact discs into the compact disc trays. One platter is used for each compact disc recording or writing drive.

Abstract: Novel methods and apparatus are disclosed for handling carriers for soft contact lenses in a lens manufacturing system. In accordance with a first aspect of the invention, article handling devices are located beneath a pre-cure station and a curing station of the system to move lens carriers within those stations. As a result of locating these devices beneath these stations, the desired movement of the carriers can be achieved without increasing the footprint of the station. Pursuant to a second aspect of the invention, a complete set of assemblies is provided for moving a multitude of lens carriers into, through, and out from the pre-cure station and the curing station. This set of assemblies accomplishes this movement in a completely automated, high speed, mass production basis. In accordance with a third aspect of the invention, the curing station is provided with an intelligent buffer.

Abstract: A substrate processing system includes a primary processing assembly and secondary processing assembly. The secondary processing assembly has one or more interconnected modules and includes one or more process stations. The primary and secondary processing assemblies are connected by a vacuum conveyor, so that the substrates remain in vacuum during transport. The secondary processing assembly may include one or more modules which are interconnected to provide a desired system configuration. A dual processing module, including first and second process stations, is selectably operable in a serial mode or a parallel mode.

Abstract: An apparatus and method for controlling wafer temperature and environment is provided. The apparatus includes a batch processing fixture for batch processing wafers at a first elevated temperature. The batch of wafers is not substantially ramped in temperature within the batch processing fixture. The apparatus also includes a single wafer processing apparatus for rapidly ramping temperature of a wafer of the batch from the first elevated temperature wherein a uniform temperature across the wafer is maintained during the ramping. Another embodiment of the apparatus (10) includes an RTP chamber (20) having an inert or reducing environment and that includes a pedestal (24) for holding a single wafer (16) and a heater unit (22) arranged so as to uniformly and rapidly heat the single wafer.

Abstract: An apparatus is set forth for providing access to individual workpiece positions in a microelectronic workpiece cassette. The assembly comprises a workpiece cassette inventory assembly having a plurality of cassette inventory cassette supports, which are selectively aligned with the staging cassette supports of a workpiece staging assembly. This allows a plurality of cassettes to be separately indexed, thereby enabling the workpiece staging assembly to access multiple cassettes and process a larger number of microelectronic workpieces between loading/unloading cycles that require user activity.

Abstract: A substrate handling robot includes an arm drive mechanism. A first arm is connected to the arm drive mechanism. A multiple substrate batch loader is connected to the first arm. A second arm is also connected to the arm drive mechanism. A single plane end effector is connected to the second arm. The multiple substrate batch loader produces a vacuum signal indicative of how many substrates are held by the multiple substrate batch loader. A vacuum signal interpreter alters the movement of the first arm in response to the substrate load number. An object sensor is connected to the second arm. The object sensor assesses the number of substrates in a cassette adjacent to the multiple substrate batch loader. A substrate loading sequence controller controls the first arm and the second arm in response to the number of substrates in the cassette, such that the second arm removes substrates from the cassette in such a manner as to facilitate complete loading of the multiple substrate batch loader.

Abstract: In a loading and unloading station for semiconductor processing installations, the object of the present invention is to ensure charging proceeding from transporting containers under clean room conditions. These transporting containers themselves serve as magazines for disk-shaped objects and are open laterally. It should also be possible, optionally, to load and unload a greater quantity of such transporting containers, wherein the exchange of transporting containers must be effected under favorable ergonomic conditions. According to the invention, the transporting container for loading, unloading and reloading of disk-shaped objects is coupled in a stationary manner by the container cover with the closure by means of an adhering engagement. The charging opening and the transporting container are opened simultaneously in that the container cover and the closure are moved down jointly into the semiconductor processing installation.

Abstract: In a loading and unloading station for semiconductor processing installations, the object of the present invention is to ensure charging proceeding from transporting containers under clean room conditions. These transporting containers themselves serve as magazines for disk-shaped objects and are open laterally. It should also be possible, optionally, to load and unload a greater quantity of such transporting containers, wherein the exchange of transporting containers must be effected under favorable ergonomic conditions. According to the invention, the transporting container for loading, unloading and reloading of disk-shaped objects is coupled in a stationary manner by the container cover with the closure by means of an adhering engagement. The charging opening and the transporting container are opened simultaneously in that the container cover and the closure are moved down jointly into the semiconductor processing installation.

Abstract: A substrate transfer system is used in an in-line film deposition system. The substrate transfer system is provided with an auxiliary vacuum chamber and a main vacuum chamber. The auxiliary vacuum chamber has a plurality of first substrate cassettes. The main vacuum chamber is communicated with another vacuum chamber through which carriers are transferred along a transport path. The main vacuum chamber has two robots and a plurality of second substrate cassettes arranged in parallel on which the substrates is placed. The second substrate cassettes are arranged between the two robots. The substrates are disk-shaped substrates having center holes. The center holes are utilized as hook parts during a pickup operation. Thereby the method of mounting substrates in the holders of carriers etc. is improved without changing the operating speed of the robots. Therefore the amount of substrates transported per unit time is increased and the processing capacity of the substrate processing system is enhanced.

Abstract: A tray transfer arm 205 for transferring one or more customer trays KST which hold semiconductor devices IC, comprises a pair of tray holders 205a, 205b which are provided substantially in the upper and lower direction.

Abstract: In an electronic component placing apparatus, four magazines are mounted on a head, and yet electronic components are housed in each magazine. In this apparatus, by an operation of selectively inserting a suction nozzle into four insertion openings in the magazines, it is possible to load a desired electronic component on a substrate, and this component loading can be repeatedly performed until the housed components are exhausted.