Abstract: In a component supply device, an opener is configured to move in a second direction with movement of a tape in the second direction when the tape is fed in the second direction opposite to a first direction in which the tape is fed from a tape feeder to the opener.

Abstract: A vacuum apparatus equipped with an automatic transport mechanism for transporting a specimen and a sensor for detecting a state of the vacuum apparatus includes: a determining unit which determines whether a recoverable error has occurred based on a signal from the sensor; and a display control unit which causes, when it is determined that a recoverable error has occurred, a display unit to display a procedure of a recovery operation in a wizard format. The display control unit determines whether the recovery operation has been performed according to the procedure displayed on the display unit based on a signal from the sensor, and causes the display unit to display a next procedure of the recovery operation when it is determined that the recovery operation has been performed according to the procedure.

Abstract: A multi-level hand apparatus includes a plurality of hands arranged to overlap with each other as viewed in a vertical direction, and each hand includes a hand body and a support body that supports the hand body at a base portion of the hand body. The multi-level hand apparatus further includes a guide for allowing and guiding movement of the hands in the vertical direction while maintaining the orientations of the hands, and a hand pitch limiter for defining a maximum pitch of the hands. The hands are divided into two groups, i.e., the first-group hands located at every other position and the second-group hands other than the first-group hands. The hand pitch limiter defines the maximum pitch between pairs of a first-group hand and a second-group hand that are vertically adjacent to each other.

Abstract: A substrate transfer method includes loading a transfer container on a loading part, transferring the substrate between the transfer container and the housing by a transfer mechanism including a substrate support part supporting the substrate, acquiring a reference height of each substrate in the transfer container before performing the loading the transfer container, detecting a height of each substrate in the transfer container after the acquiring the reference height and before the transferring the substrate, obtaining a first difference value between the detected height and the reference height, with respect to one substrate in the transfer container, determining an entry height of the substrate support part at which the substrate support part enters the transfer container by selecting one of a first entry height corresponding to the reference height of the one substrate and a second entry height corrected based on the first difference value.

Abstract: A component supply device is a device for supplying components housed in a component storage tape to a component extraction position. The component storage tape traveling toward a component exposure part is guided by a tape guide. This tape guide includes a guide body, and first and second positioning guide members. In the tape guide, the guide body includes a pair of side wall parts that defines a fourth tape traveling path wider than a maximum allowable width of the component storage tape. In the tape guide, the first and second positioning guide members and include first and second bent parts respectively that function as a pair of tape side surface guide parts that guides side surfaces of the component storage tape. The first and second bent parts are apart from each other at a distance shorter than a width of the fourth tape traveling path.

Abstract: A laser processing machine includes a machine main body that has a laser processing head, a processing table on which a workpiece to be processed is laid; and a light-shielding cover that is provided above the processing table, and covers an upper surface of the processing table. The cover is transformable between a deployed state and retracted state, and can adjust an area covering the upper surface of the processing table. According to the laser processing machine, it is possible to cover only a necessary area for laser processing by its compact cover without inhibiting workability for carrying in/out the workpiece.

Abstract: A substrate transfer method is provided. The substrate transfer method comprises: loading the transfer container to a load port, and separating the cover body from the container main body; detecting an accommodation status of the substrate in the container main body by a detection unit; correcting, by a correction device, the accommodation status of the substrate in the container main body in which the accommodation status of the substrate detected by the detection unit is abnormal; and allowing a substrate transfer device to enter the container main body in which the accommodation status of the substrate is corrected, and unloading the substrate from the container main body.

Abstract: An end effector includes first, second, third, fourth, fifth, sixth, and seventh substrate support pads. A method of handling a substrate with the end effector in a substrate processing system includes engaging a peripheral edge of the substrate with the second, fifth, and sixth substrate support pads. The method also includes moving the end effector a first distance into a processing chamber of the substrate processing system. The method further includes disengaging the peripheral edge of the substrate from the second, fifth, and sixth substrate support pads. The method additionally includes moving the end effector a second distance into the processing chamber of the substrate processing system, and engaging the peripheral edge of the substrate with the first, third, fourth, and seventh substrate support pads.

Abstract: A stationery punching device for creating a decorative craft that includes a die support frame, a punch guiding frame aligned with the die support frame, a punch, a pivot seat connected to at least one of ends of the die support frame and the punch guiding frame, an operating lever pivoted to the pivot seat, and an urging member for urging the punch. The pivot seat is spaced apart from the punch guiding frame by first and second slits, so that when an upward pulling force acts on the pivot seat, the upward pulling force cannot be transmitted from the pivot seat directly to the two sides and one end of the punch guiding frame.

Abstract: The end effector device includes a hand having a storing space, and a plurality of holding portions provided to the hand and configured to respectively peripheral portions of each plate member. Each holding portion includes a plurality of receiving portions which respectively receive a plurality of plate members keeping vertical pitches among them, and a pitch changing mechanism configured to change intervals by vertically moving the plurality of receiving portions respectively. A plurality of linearly moving portions configured to respectively move linearly integrally with the plurality of receiving portions are provided to the hand being exposed outside of the hand, and a plurality of drive portions configured to drive the plurality of linearly moving portions of the pitch changing mechanism are stored in the storing space of the hand.

Abstract: An article storage facility includes a transport device for transporting containers to a plurality of storage sections, an inactive gas feed section which supplies inactive gas to the interior of the container stored in the storage section, and a controller for controlling operation of the device and operation of the flow rate adjusting device of the inactive gas feed section. The controller is configured to cause a state of the inactive gas feed section associated with the storage section to be both a storage feed state and an unfeeding state depending on if the carrier is stored or not stored be. The controller is also configured to store the transporting container in the storage section after changing the state of the inactive gas feed section associated with the storage section in which the container is to be stored to a pre-storage feed state from the unfeeding state.

Abstract: Provided is a test contactor for testing a semiconductor device which includes a cylinder, a piston which is configured to reciprocate between a first position and a second position according to a change in pressure in the cylinder, and a pressing part which is configured to change its location according to the reciprocating motion of the piston. The pressing part is configured to be in contact with the semiconductor device when the piston is located at the first position, and the pressing part is configured not to be in contact with the semiconductor device when the piston is located at the second position.

Abstract: Provided is a transfer unit. The transfer unit includes a robot transferring a substrate and a controller controlling a speed of the robot according to the number of substrates to be transferred by the robot for a preset period. When the number of substrates to be transferred for the preset period increases, the robot increases in moving speed by the controller.

Abstract: A rotatable locating apparatus including a fixing base, a rotatable rack, a first driving module, a carrier, and a second driving module is provided. The rotatable rack is pivoted on the fixing base through a first rotation axis. The first driving module is coupled to the rotatable rack to drive the rotatable rack rotating with respect to the fixing base along the first rotation axis. The carrier is provided with accommodating slots on an arc surface of the carrier, and the carrier is pivoted on the rotatable rack through a second rotation axis. The second rotation axis passes through a curvature center of the arc surface and is perpendicular to the first rotation axis. The curvature center is located on the first rotation axis. The second driving module is coupled to the carrier to drive the carrier rotating with respect to the rotatable rack along the second rotation axis.

Abstract: A substrate processing apparatus includes a substrate processing section that processes a plurality of substrates assuming a vertical posture in a batch manner; a first traversing mechanism that laterally moves a first traverse holding portion along a first traversing path between a substrate transfer position and a substrate delivery position; a second traversing mechanism that laterally moves a second traverse holding portion along a second traversing path disposed below the first traversing path between the substrate transfer position and the substrate delivery position; an elevation mechanism that raises and lowers an elevation holding portion in the substrate transfer position; and a main transfer mechanism that conveys a plurality of substrates assuming a vertical posture in a batch manner between the substrate delivery position and the substrate processing section, the first and second traverse holding portions, and the elevation holding portion each holds a plurality of substrates assuming a vertical

Abstract: An automatic pallet exchange device includes: a pallet magazine 1 that accommodates a plurality of pallets 3 respectively having a plurality of horizontally extending protrusions 16 so as to be taken in and out in horizontal directions; a pallet fixing part 23 that allows the plurality of protrusions 16 to be engaged with a plurality of depression parts 17 to horizontally fix the pallet 3 and a pallet fixing table 20 on which the pallet fixing part 23 is arranged. The pallet 3 horizontally fixed by the pallet fixing part 23 is horizontally turned and horizontally moved to exchange the pallets 3 between the pallet fixing table 20 and the pallet magazine 1.

Abstract: A robot hand includes a mounting surface to which a work unit is mounted with some freedom of horizontal movement. A pair of anti-fall hooks is formed at a tip portion of the mounting surface to support a front edge portion of the work unit so as to prevent the work unit from falling off the mounting surface. A pair of support section is provided at a rear edge portion of the mounting surface to support a rear edge portion of the work unit. If, during placement of the work unit into a cassette, the work unit collides with the cassette, the work unit comes into contact with one of the support sections, and the work unit is rotated on the mounting surface about the contact point as a fulcrum so as to correct the misalignment of the work unit.

Abstract: A substrate transfer apparatus unloads a substrate from a transfer container in which a cover body airtightly closes a substrate unloading opening formed at a front surface of a container main body and multiple substrates are accommodated in the form of shelves. The substrate transfer apparatus includes a load port to which the transfer container is loaded; a detection unit configured to detect an accommodation status of the substrate in the container main body that is loaded to the load port and separated from the cover body; a substrate transfer device configured to enter the container main body and unload the substrate; and a correction device configured to correct the accommodation status of the substrate in the container main body before the substrate is unloaded from the container main body by the substrate transfer device when the detection unit detects abnormality in the accommodation status.

Abstract: The present invention discloses apparatuses and method for configuring a compartmentable equipment to accommodate emergency responses. An exemplary equipment comprises a plurality of removable compartments for storing workpieces so that in emergency events, such as power failure or equipment failure, the workpieces can be removed from the equipment for continuing processing without disrupting the flow of the fabrication facility. The compartmentable equipment can comprise emergency access ports, including mating interface to a portable workpiece removal equipment to allow accessing the individual compartments without compromising the quality, defects and yield of the workpieces stored in the stocker.

Abstract: A substrate processing system comprising a first detecting part configured to detect unprocessed wafers, and a second detecting part configured to detect processed wafers. The first detecting part is configured to detect whether the unprocessed wafers are respectively accommodated in respective accommodating portions of a container or not, and to detect accommodated conditions of the respective unprocessed wafers accommodated in the respective accommodating portions. The second detecting part is configured to collectively detect whether the processed wafers are respectively accommodated in the respective accommodating portions of the container.

Abstract: An apparatus for arranging disks in a processing cassette includes a first conveyor configured to transfer a shipping cassette containing a plurality of disks to a first position and a comb assembly configured to displace one or more of the plurality of disks from the shipping cassette in the first position. A mandrel assembly is configured to remove the one or more displaced disks from the comb assembly and a turntable assembly is configured to rotate the comb assembly and the shipping cassette from the first position to a second position. The mandrel assembly is further configured to return the one or more displaced disks to the comb assembly and the comb assembly is further configured to replace the one or more displaced disks in the shipping cassette in the second position.

Abstract: Methods correcting wafer position error are provided. The methods involve measuring wafer position error on a robot during transfer to an intermediate station. This measurement data is then used by a second robot to perform wafer pick moves from the intermediate station with corrections to center the wafer. Wafer position correction may be performed at only one location during the transfer process. Also provided are systems and apparatuses for transferring wafers using an intermediate station.

Abstract: An apparatus for semiconductor wafer transfer comprises a first region for placement of a pod, a second region for placement of a cassette, an unloading mechanism, and a transferring mechanism for transferring wafers in the unloaded pod to the cassette horizontally. In an embodiment, the pod is unloaded by lifting the housing of the pod, and preferably the apparatus for movement of semiconductor wafers further comprises a carrying mechanism for moving the cassette toward the pod, so that the cassette can be closer to the pod for smoothing wafer transfer.

Abstract: A cartridge of tubulars may be removably positioned with a carriage, and the carriage may move the cartridge transversely, vertically, and/or rotationally to roll tubulars on an adjacent tubular receiving member using only gravity from a selected tier of tubulars without human contact. A single trolley disposed with the tubular receiving member both pushes and pulls tubulars toward or away from the drilling deck.

Abstract: A substrate processing system 1 comprises a first detecting part 40 configured to detect unprocessed wafers W, and a second detecting part 50 configured to detect processed wafers W. The first detecting part 40 is configured to detect whether the unprocessed wafers W are respectively accommodated in respective accommodating portions 82 of a container 80 or not, and to detect accommodated conditions of the respective unprocessed wafers W accommodated in the respective accommodating portions 82. The second detecting part 50 is configured to collectively detect whether the processed wafers W are respectively accommodated in the respective accommodating portions 82 of the container 80.

Abstract: Methods correcting wafer position error are provided. The methods involve measuring wafer position error on a robot, e.g. a dual side-by-side end effector robot, during transfer to an intermediate station. This measurement data is then used by a second robot to perform wafer pick moves from the intermediate station with corrections to center the wafer. Wafer position correction may be performed at only one location during the transfer process. Also provided are systems and apparatuses for transferring wafers using an intermediate station.

Abstract: A batch forming apparatus forms a batch of substrates by combining a plurality of substrates that have been taken out from a plurality of carriers each containing therein the substrates in a stacked manner. The batch forming apparatus includes: a substrate transfer mechanism that takes out the substrates from each carrier and transfer the substrates; a substrate relative positional relationship changing mechanism that rearranges one or more substrates out of the substrates transferred by the substrate transfer mechanism one by one relative to other substrates to change positional relationships of the substrates relative to each other; and a batch forming mechanism that forms a batch of substrates out of the substrates that have been transferred thereto by the substrate transfer mechanism, with positional relationships of the substrates having been changed relative to each other by the substrate relative positional relationship changing mechanism.

Abstract: In an apparatus for transferring a substrate, a partition wall is disposed in a vertical direction in a housing to divide an interior space of the housing into a first space and a second space. A pressure generating member divides the first space into an upper space and a lower space and moves in a vertical direction in the first space such that a positive pressure and a negative pressure are alternately generated in the upper space and the lower space. A substrate supporting member is movably disposed in the second space to support and to transfer the substrate. A plurality of gates is disposed on a side wall of the housing and the partition wall, and is opened and closed by the positive pressure and the negative pressure such that the particles are eliminated from the second space to an exterior space via the first space.

Abstract: An improved stocker configuration for storing workpieces in a fabrication facility is disclosed, employing workpiece compartments arranged stationarily around a robot handling assembly. The robot handler can be designed with three degrees of freedom, to improve speed, throughput and minimum minimum particle generation. In addition, the stocker storage area is stationary with the movable components are the robot assembly, thus further contributing to the cleanliness of the storage stocker. The stocker configuration can be open storage area for fast access, space saving and ease of clean air purging. The stocker configuration can provide highly dense workpiece storage, utilizing a circumferential edge gripper robot handling assembly.

Abstract: A combination of a FOUP (front opening unified pod) system and a reticle system utilized for the transport of wafers and a reticle system, the latter of which are used for transporting reticles from a first fabrication site to a further site at another location, and which provides for a unified system enabling the automated and trackable delivery of the reticles between these sites. Provided is a modified FOUP base structure, which is adapted to retain a reticle and to be able to employ existing equipment in a fabrication site which only necessitates a minimal modification of the equipment in order to render the latter universally adaptable to the combination of the systems.

Abstract: An feeder for an auto mounting device includes a main frame, a blocking mean, an intake assembly, a transmission assembly, an input assembly and a sensor. By the sensor detecting the movement of the auto mounting device and transmitting a signal to activate the transmission assembly, the feeder could be in a normal operation without having an intimate contacting with the auto mounting device. Therefore, the feeder can favorably prevent from tremor and attrition while operating in response to the auto mounting device, conducing to a prompt and regular action of the auto mounting device.

Abstract: A reticle rotatable rack is provided at an upper position, and a pod rotatable rack is provided at a lower position in a clean stocker. A clean gas is supplied downwardly. In the stocker, a pod transportation device and a reticle transportation device are elevated and lowered. Load ports, a pod opener, and the pod rotatable rack are connected by the pod transportation device. The pod opener and the reticle rotatable rack are connected by the reticle transportation device.

Abstract: A workpiece transfer system or method is provided for transferring workpieces one set of pallets to another set of pallets using a workpiece transfer device that is movably attached to a robot. The workpiece transfer device uses mechanical devices to align the workpiece relative to the robot so that different types of workpieces can be placed into a pallet without the need of troublesome, expensive and complex image processing in which the workpiece holding positions are processed as images by using an imaging device such as a visual sensor. Preferably, the workpiece transfer device cooperates with a positional adjustment part such that the workpiece that is held by the transfer device contacts the the positional adjustment part to position the workpiece in a depthwise direction of the workpiece, a widthwise direction of the workpiece and a longitudinal direction of the workpiece.

Abstract: A substrate processing apparatus is provided, which can place a substrate in a correct position, even though a positional error occurs between the substrate carried in a processing vessel and a placing table. This substrate processing apparatus can take a necessary action immediately against a positional error of the substrate generated when the substrate is separated from the placing table after completion of a process. The plasma apparatus 1 includes a processing vessel 11, lifting pins 34 provided in the processing vessel 11, and a detecting head 22. A wafer W is carried into the processing vessel 11 from the exterior of the processing vessel 11 by using a carrying apparatus 6, and is stopped in a transferring position above the lifting pins 34.

Abstract: A semiconductor substrate transfer apparatus for transferring semiconductor substrates from a first container to a second container, includes: multiple end effectors; at least one robot arm with which the multiple end effectors are independently rotatably joined; and a controller storing software including instructions to judge which end effector or end effectors in the multiple end effectors are to be selected based on a distribution status of substrates stored in the first and second containers and to rotate the selected end effector(s) for unloading a substrate or substrates from the first container and loading the substrate or substrates to the second container.

Abstract: A disk cassette is provided with opposed side walls having ribs configured to facilitate merging pairs of disks. In most instances, the disks will be single-sided hard memory disks. The final position of the disks in the disk cassette will be in spaced pairs, with the disks forming each pair being in surface-to-surface contact and, preferably, with the perimeter edge of each disk concentrically aligned.

Abstract: A combination of a FOUP (front opening unified pod) system and a reticle system utilized for the transport of wafers and a reticle system, the latter of which are used for transporting reticles from a first fabrication site to a further site at another location, and which provides for a unified system enabling the automated and trackable delivery of the reticles between these sites. Provided is a modified FOUP base structure, which is adapted to retain a reticle and to be able to employ existing equipment in a fabrication site which only necessitates a minimal modification of the equipment in order to render the latter universally adaptable to the combination of the systems.

Abstract: Plural wok pairs composed of a plurality of works are stored in work storing means. A movable sensor 45 fitted to a conveyance robot 5 detects the position of one of the work pairs in the work storing means, and the work gripping means 25 takes out a plurality of works at one time from the work storing means. One of the plurality of works is held temporally by temporal work holding means 6 or 7 while the other work is conveyed to a jig Y. In the course of conveyance, a fixed sensor 63 detects the relative positional relationship between the work and the work gripping means 25. If the relative positional relationship deviates from the regular positional relationship, the movement of a robot arm 31 is corrected.

Abstract: A transfer device for a substrate is capable of preventing deformation or breakage of the substrate due to bending stress by reducing the amount of dead weight deflection of the substrate, e.g. a large mother glass board. Supporting members extend in opposite directions from two sides of a storage device such that the substrate can be introduced or removed by raising and lowering the hand of a transfer machine inserted into the storage device between the supporting members. The supporting members are comprised of a plurality of supporting members in parallel, formed with a gap between the supporting members facing each other.

Abstract: In a substrate transfer apparatus, an adaptor unit 25 includes a box-shaped main body 40 having three open sides; and a plurality of stage arms 41 disposed in the main body 40, serving as substrate mounting members. Each of the stage arms 41 has a disc-shaped wafer supporting portion 411 disposed at an approximately central portion of the main body 40 and a flat body 412 disposed in the main body 40 so as not to interfere with the moving paths of transfer arms 241 and 341. Formed at a connecting portion of the wafer supporting portion 411 and the body 412 are cutout portions 413 for preventing interference between the stage arms 41 and two prongs of leading end portions of the transfer arms 241 and 341 introduced into the main body 40.

Abstract: A storage lift has two shelving columns that support storage goods carriers (5). A vertical conveyor is located between the two shelving columns and at least one of the shelving columns has a loading and removal opening. A light grille (9, 10) and faceplates (11) are provided to determine or verify the position of the storage goods carriers (5) in the vicinity of the loading and removal opening (8). At least one faceplate is allocated to each storage goods carrier (5).

Abstract: A carrier tape for a tape and reel machine includes at least one edge having a plurality of sprocket openings therein. The carrier tape also includes a first row of aperture cavities and a second row of aperture cavities. Electrical components are contained in the first and second row of aperture cavities. In some embodiments, the electrical components carried are the same, and in other embodiments, the electrical components carried in the first row differ from the electrical components carried in the second row.

Abstract: An apparatus for treating wafer-shaped articles includes at least one linear arranged array of a plurality of at least two process units wherein in each such process unit one single wafer-shaped article can be treated, a cassette-holding unit for holding at least one cassette storing at least one wafer-shaped article therein and a transport system for picking a wafer-shaped article from a cassette and placing it into one of a process unit. The apparatus has a transport unit movably mounted on a linear track. The transport unit includes at least one holding member for holding a single wafer-shaped article in a substantially vertical plane parallel to the linear track.

Abstract: A device (12) picks up at least one semi-conductor wafer (11) from a container (14) of wafers fitted on one side (15) of an aperture (13) in the transfer station (10) of a semi-conductor wafer processing plant. The device is on the opposite side (17) of the aperture and the pick-up is effected through it. The device incorporates a shutter (1) movable between open and closed positions. A wafer picking up means (2) is attached to the shutter and is designed to enter partially within the container below a wafer and seize the wafer by its edge. A pick up moving means (3) moves the picking up means (2) back and forth through the aperture (13).

Abstract: The semiconductor material handling system is an EFEM that may either mount to the front end of a processing tool or be integrated into the processing tool. The EFEM is built from a unified frame that the EFEM components, such as a wafer engine and a SMIF pod advance plate, may mount to. The frame serves as a common mounting structure that the EFEM components may use as a reference for alignment purposes. Since the EFEM components do not have to align with respect to the position of each other, the calibration, if any is required, is greatly simplified. The EFEM also has a reduced footprint, allowing the EFEM to mount to the front end of a processing tool and not extend to the fab floor. Thus, space is freed up between the EFEM and the fab floor. By way of example only, this space may be used as a maintenance access area to the processing tool without having to first remove the EFEM.

Abstract: A semiconductor device producing apparatus is disclosed. The apparatus includes a carrier-holding stage for placing a carrier; first, second and third stages each for holding first and second boats one at a time, each boat holding one or more substrates; a boat transfer mechanism for transferring the boats among the first, second and third stages; and a substrate transfer mechanism for transferring the substrate(s) from the carrier to the boat held by the first stage. A controller controls the first stage, the boat transfer mechanism and the substrate transfer mechanism so that the boat transfer mechanism transfers one of the boats from the second stage to the first stage, the substrate transfer mechanism then transfers the substrate(s) from the carrier to the boat held by the first stage, and the first stage then moves the boat into the processing chamber for processing.

Abstract: A substrate handling robot includes an arm drive mechanism. A first arm is connected to the arm drive mechanism. A multiple substrate batch loader is connected to the first arm. A second arm is also connected to the arm drive mechanism. A single plane end effector is connected to the second arm. The multiple substrate batch loader produces a vacuum signal indicative of how many substrates are held by the multiple substrate batch loader. A vacuum signal interpreter alters the movement of the first arm in response to the substrate load number. An object sensor is connected to the second arm. The object sensor assesses the number of substrates in a cassette adjacent to the multiple substrate batch loader. A substrate loading sequence controller controls the first arm and the second arm in response to the number of substrates in the cassette, such that the second arm removes substrates from the cassette in such a manner as to facilitate complete loading of the multiple substrate batch loader.

Abstract: A wafer mapping device that recognizes the existence of wafers along with the descending and opening of a front door (2a) of a closed type clean container (2) in a state where the front door of the closed type clean container for mounting and housing wafers (4) on any one of or a plurality of shelves among a plurality of internal shelves is made tightly contact to a port door (13) of a load port (12), comprising a swinging member (22) coupled to the port door so as to swing around predetermined horizontal axes parallel to the port door, a pair of sensor portions (20) fixed to the swinging member and mutually separated as well as protruding towards the clean container from the swinging member above the port door, a light emitting device (20a) and light receiving device (20b) fixed one each to the pair of sensor portions and facing each other, and swinging drive means (25) for rotating the swinging member around the horizontal axis to an angle where the wafers enter between the light emitting device and the lig

Abstract: An apparatus for stacking semiconductor wafers comprises a housing configured to releasably maintain a plurality of semiconductor wafers in fixed positions relative to the housing. The apparatus also includes a transfer guide proximate to the housing, the transfer guide configured to facilitate the transfer of the plurality of semiconductor wafers into the housing. Also included is a member configured to detach the semiconductor wafers from the housing so as to collect the semiconductor wafers into a stack.

Abstract: For a device for the detection of substrates stacked at an opening of a wall element, there existed the problem of constructing the detection device in such a way that the detection of the position of the substrates can be performed more flexibly with respect to the course of measurement and the measuring method employed and a defined approach of a sensor system to the semiconductor substrate to be detected is ensured in a definite position of measurement with a lowered risk of particle generation. A transmitting and receiving device (11) consists of a vertical drive mechanism (10) mounted on the wall element (1) and a sensor head (13) that can be adjusted between a lower and an upper position by means of the vertical drive mechanism (10), said sensor head being arranged so as to pivot on the vertical drive mechanism (10) in order to pivot into the opening (4).