Abstract: A bridge loadport is described comprising a tool interface, an advance plate assembly, a port plate, and a port door. The tool interface extends vertically and is configured to substantially cover one end of a process tool. The advance plate assembly is supported on the front side of the tool interface and is configured to support a front-opening unified pod (pod). The port plate extends vertically, covering an upper portion of the tool interface. An aperture having a size and shape that substantially matches a size and shape of a door of a pod is formed in the port plate. The port door has a port door actuator and a port door face attached to the port door actuator. In one embodiment, the port door face is movable with respect to the port door actuator along a ling perpendicular to the aperture.
Abstract: A material handling system in which a skip is filled with material from a loading flask. The skip moves downwardly during filling and the flask, which is supported by at least one ram, is caused to move downwardly in unison with the skip, to minimize material spillage.
August 6, 1984
Date of Patent:
January 14, 1986
Ronald M. K. McKechnie, Renier P. Swart