Abstract: An end effector for use with a moving device has a frame and a plurality of operational members mounted for movement on the frame. The effector also has an actuation mechanism directly connected to a first operational member and is operable to move the first operational member from a first position to a second position, and from the second position to the first position. A linking apparatus is provided for linking the first operational member to a second operational member. The actuation mechanism moves the first operational member from the first position to the second position, and results in the second operational member being moved by the linking apparatus from a third position to a fourth position. The operational members can be pick up members for picking up items at one pitch and releasing them at a second pitch.

Abstract: A vacuum lifting and handling apparatus (1) for product containers, comprises a lift tube (2) adapted to be suspended at its upper end (3) from an elevated location, and provided with a suction foot (14), the tube (2) being extendible and retractable under the influence of an internal vacuum, with a control unit (13) carried by a lower end (16) of the vacuum tube (2) to vary the internal vacuum as required during a container lifting and handling sequence by introduction of ambient air into the lift tube, and a replaceable air filter (17) is housed within the lower end (16) of the lift tube (2).

Abstract: A conveyor apparatus for conveying, for instance, dies, comprising: an X-axis moving block movable in an X-axis direction that is a lead frame conveying direction, a Y-axis moving block installed on the X-axis moving block and moved in a Y-axis direction that is perpendicular to the X-axis direction, a nozzle holder installed on the Y-axis moving block so as to be movable upward and downward, a Z-axis guide rail installed on the X-axis moving block and has an inclined part that rises from a die pick-up position side toward a die bonding position side, a Z-axis moving plate moved upward and downward along the Z-axis guide rail and is connected to the nozzle holder, and a suction chucking nozzle that holds the dies by vacuum suction and is installed so as to be moved upward and downward on the nozzle holder and together with the nozzle holder.

Abstract: A workpiece sucking device comprises a buffering mechanism for absorbing shock generated when a workpiece is engaged/disengaged. The buffering mechanism includes a linear rail member which is fixed to a body and a slider which makes sliding movement along the rail member. A workpiece is prevented from rotating by an engagement of the slider with the rail member.

Abstract: A plate parts carrying system that is capable of sucking the plate parts to be processed automatically without having trouble with the supply of the carrying program, which makes a specified value of the sucking position easily.

Abstract: A suction control unit in a plate suction and lifting device that can suck and lift even the plate with process holes or the corrugated plate by finding the suckable flat part of the plate. A suction control unit 1 controls a plate suction and lifting device 2 for lifting a plate W by sucking the flat part of the plate W by a suction pad 4. The suction control unit 1 is equipped with a suction pressure detecting means 19 and a retry control unit 29. The retry control unit 29 detects the suction pressure of the suction pad 4. The retry control unit 29 sucks the plate again if the suction pressure of the suction pressure detecting means 19 does not reach the set pressure when the suction pad 4 sucks the plate W. This suction is implemented again by changing the flat part of the plate W sucked by the suction pad 4.

Abstract: An automated tool that can handle a sheet. The tool may include a flexible membrane that is attached to a frame. The flexible membrane may include a vacuum opening that is adapted to pull the sheet into the membrane. The vacuum opening may pull the outer edges of the sheet out of a tray when the membrane is deflected to a flat position. The tool may then move away from the tray wherein the outer edges of the membrane and sheet are pulled from an adjacent sheet. This effectively “peels” the sheet out of the tray.

Abstract: A device for automatically attaching cover slips to microscope slides carrying a specimen for microscopic examination and a mounting medium, comprising a lifting mechanism (1) having a holder (2) in which there are mounted a pair of mutually spaced suction cups (3) extending in a vertical plane, and an abutment body (5) arranged between and outside of the suction cups (3) and having a downwards convexly curved abutment surface (6) for abutment against a cover slip (7) retained by the suction cups. The abutment body (5), at and end portion thereof situated laterally outside of the suction cups (3), is rotatably mounted in the holder (2) about an axis (9) extending transversely relative to the vertical plane, and the abutment body (5) is limitedly rotatable in the holder (2) to each side of an essentially horizontal intermediate position.

Abstract: The present invention provides a substrate transfer apparatus which can hold the substrate without contacting the surface of the substrate while the substrate is transferred and which does not require the additional prealignment mechanism. The substrate is transferred by a handler. The handler comprises a substrate holding apparatus and a substrate contact apparatus. The substrate holding apparatus includes a noncontact chuck for holding the substrate without contacting the surface of the substrate, and an elevating mechanism for lowering and lifting the noncontact chuck. The substrate contact apparatus includes a contact member to be in contact with the end face of the substrate, a moving mechanism for moving the contact member away from the end face of the substrate when the noncontact chuck is lowered and moving the contact member towards the end face of the substrate when the noncontact chuck is lifted.

Abstract: Vacuum manipulation apparatus includes a lifting hose coupled to a vacuum-generating unit. The lifting hose incorporates a suction gripping device having a suction end adapted for placement against an object to be grasped and lifted. The device includes a flow opening plate adapted to be opened for preventing an abrupt rise of the gripping device upon unintentional release of the grasped object against gravitational forces. In a non-grasping mode, a retractable, spring-loaded push rod extends from the suction end of the device. The push rod retracts whenever the suction gripping device engages a grasped object. A blocking arm attached to the push rod engages the flow opening plate to hold the plate normally closed during the grasping mode. When suction is broken between the grasped object and the suction end of the gripping device, the push rod extends from the device, however, opening the flow opening plate to admit airflow.

Abstract: A vacuum lifter is disclosed. The vacuum lifter includes an overhead hose, a housing, and a roller rotatably fixed to the housing. The housing is adapted to roll on the roller. In one embodiment the vacuum lifter also includes a sealing plate with a pliable sealing ring. The vacuum lifter can be used to lift, move, and deposit various objects from one place to another.

Abstract: A conveyor apparatus for conveying, for instance, dies, comprising: an X-axis moving block movable in an X-axis direction that is a lead frame conveying direction, a Y-axis moving block installed on the X-axis moving block and moved in a Y-axis direction that is perpendicular to the X-axis direction, a nozzle holder installed on the Y-axis moving block so as to be movable upward and downward, a Z-axis guide rail installed on the X-axis moving block and has an inclined part that rises from a die pick-up position side toward a die bonding position side, a Z-axis moving plate moved upward and downward along the Z-axis guide rail and is connected to the nozzle holder, and a suction chucking nozzle that holds the dies by vacuum suction and is installed so as to be moved upward and downward on the nozzle holder and together with the nozzle holder.

Abstract: In an overhead gripping and conveying system for sheets of glass, a gripping device with movable suction cups is operated by an overhead actuating device wherein respective powered carriages run along two straight, parallel, transversely spaced guides, and are connected to each other by a rigid structure defined by a single straight, cylindrical tubular member with a constant cross section.

Abstract: An apparatus is adapted for picking-up an integrated circuit component and is adapted to be connected to an air pump. The apparatus includes a retaining block formed with a first pipe hole and a washer receiving recess for receiving a washer. An air pipe is formed with a radially and outwardly extending rim flange at a junction of upper and lower pipe sections thereof. The lower pipe section extends sealingly through a second pipe hole in the washer and further through the first pipe hole such that the rim flange rests on top of the washer in the washer receiving recess, such that a distal lower end of the lower pipe section projects downwardly relative to the retaining block, and such that a distal upper end of the upper pipe section extends outwardly of the washer receiving recess and projects upwardly relative to the retaining block.

Abstract: In a method for aligning products, the products, being substantially aligned in crossways rows on a first conveyor, are carried by the first conveyor in hollows made in trays through a pickup position at which the products in each row are picked up by a suction head which, while remaining parallel to itself, moves in a circular path extending partly over the first conveyor. The suction head transfers the products along a portion of its path between the pickup position and an unloading position at which the products are dropped onto a second conveyor equipped with hollows so that the products are arranged in a single line, with one product in each hollow.

Abstract: In a workpiece pick up and transport mechanism, a shaft of a vacuum cup pick up bar is slideably interconnected with a shaft guide mounted on the pick up mechanism frame. The shaft also slideably engages a shaft collar of a pneumatic cylinder body. Operation of the air cylinder causes the shaft collar to lower the respective shafts of the vacuum cup bar until the vacuum cups come in contact with the target workpiece. Further movement of the air cylinder body causes the shaft collar to slide down the shaft thereby eliminating any overrun of the pneumatic cylinder and eliminates any pressure of the cylinder being applied to the shaft, thereby preventing such pressure from being transmitted to the vacuum cup tray and to the workpiece. The only force applied to the vacuum cup tray and to the workpiece is through the action of gravity. Vacuum is applied and the workpiece is attached to the vacuum cups and the pick up mechanism then moves the body of the pneumatic cylinder upward to lift the workpiece.

Abstract: An apparatus for transporting pipette tips is provided which comprises a vacuum manifold and one or more air conduits. The vacuum manifold internally defines a vacuum chamber, and has a wall which defines one or more apertures. The vacuum manifold is adapted for use in conjunction with a vacuum source. An air conduit is fixed to each of the one or more apertures defined by the wall of the vacuum manifold. Each air conduit defines an air channel, and is sized such that it can be inserted through a proximal opening defined by the head of one of the pipette tips without contacting the inner surface of the head of the pipette tip. The air channel of each air conduit is larger than a distal opening defined by the body of the pipette tip, such that when each air conduit is inserted through the proximal opening of one of the pipette tips and a vacuum source is used in conjunction with the vacuum manifold to create a vacuum in the vacuum chamber, the pipette tips are held in engagement with the vacuum manifold.

Abstract: A wafer sorting system is provided. The wafer sorter system is used to simultaneously sort multiple semiconductor wafers of a cassette. The wafer sorter system includes multiple arms which extend from a tower. These arms are at different vertical locations along the tower. The wafer sorter system also comprises a robotic arm which may move the tower to a position where the arms contact wafers. These wafers are in different vertical slots of a cassette. Further included in the wafer sorter system is a belt which may rotate to move arms vertically through slots of the tower. Wafers may become attached to arms by applying a vacuum suction to each arm. The arms having wafers may be rotated to the belt in a clockwise or counterclockwise direction about a portion of the tower via a slot in the tower. The arms may then be attached to the belt. After the belt moves the arms to new levels of the tower, the arms may then be rotated back to their original positions.

Abstract: The present invention relates to a vacuum manipulation device having a lifter hose, which can be connected to a vacuum-generating device, and a suction gripper device, which can be placed on an object to be manipulated and with which the object can be drawn up by suction and lifted by contracting the lifter hose, the suction gripper device has a prestressed regulating member on its suction side, which is actuated by placing the suction gripper device on the object and which thereby unblocks a flow cross-section, so that the object can be drawn up by suction. To prevent the abrupt upward acceleration of the suction gripper device, the regulating member can be arrested in its actuated position, so that in case of the release of a drawn-up object from the suction side of the suction gripper device the flow cross-section is not again blocked, and in this way the abrupt upward acceleration of the suction gripper device is prevented.

Abstract: An egg removal apparatus includes a frame and a manifold removably secured to the frame. The frame is movable from a first location overlying an egg flat to a second location overlying an area adjacent the egg flat. When the frame is in the first location, eggs from an egg flat are picked up under vacuum via a plurality of flexible cups. When the frame is in the second position, the eggs are released from the plurality of flexible cups. The removable manifold can be quickly and easily removed from a supporting frame and cleaned as a unit.

Abstract: The present invention is a vacuum valve assembly that creates vacuum on demand. The assembly has a body with a fluid inlet port, a fluid outlet port, a fluid flow channel extending between the fluid inlet port and the fluid outlet port, a vacuum port, a low pressure channel extending between the vacuum port and the fluid flow channel, a sensing member receiving channel, the sensing member receiving channel extending between the fluid flow channel and the low pressure channel, and a flow occlusion chamber that intersects the fluid flow channel. There is a sensing member with a fluid flow regulation portion and a sensing portion. The sensing portion is adapted to be movably received by the sensing member receiving channel. The sensing member is movable from a closed position to an open position.

Abstract: A design for a picker nest which protects any fragile component, such as a bare IC die, mounted on an IC package when the picker nest is holding the IC package for testing. The picker nest of the present invention includes a picker nest head having a picker nest opening with a vacuum suction. The fragile component fits within the picker nest opening as the picker nest is holding the IC package such that no contact force is exerted on the fragile component. The picker nest of the present invention also includes a conductive seal surrounding the perimeter of the picker nest opening for sealing in the vacuum suction within the picker nest opening. The conductive seal is a silicon-based sponge for effectively sealing in the vacuum suction at various temperatures. At least one supporting bar disposed on the picker nest head exerts a force against the IC package substrate toward test contacts of the testing system during testing of the IC package to ensure proper contact of the IC package pins to the test contacts.

Abstract: The present invention relates to a vacuum manipulating device with a suction device, which can be connected via a lifting hose with a device generating a vacuum and which, for creating a suction on an object to be lifted or transported, can be placed on the latter. The suction device includes a control valve device with an opening which can be unblocked and blocked for controlling the vacuum prevailing in the interior of the suction device. The control valve device has a control element, which unblocks or blocks the opening and can be pivoted or rotated in the one or the other direction which, in the non-actuated state, takes up a settable neutral position with a degree of opening corresponding to the setting. In order to be able to set a defined poise, the device in accordance with the present invention is embodied such, that the control element is prestressed against a force-guided movable component in such a way that in the non-actuated state it rests against the latter with a detent area.

Abstract: An apparatus for applying a decoration to at least one article provides that the article is immersed through a liquid which is contained in a tank and on which the decoration floats. The apparatus has a pallet whose inclination .alpha. with respect to the horizontal plane can be adjusted using at least two height adjustable arms.

Abstract: A lid handling system employs a lid alignment assembly for aligning lids randomly placed on a rotating input disc, a lid separation assembly for separating lids spinning on a pair of horizontal spin bars into a counted stack, a vacuum pickup assembly for picking up a counted stack of lids, a pick and place assembly for transporting and placing stacks of lids into trays having upwardly bent side members, and a conveyor for conveying filled trays toward a carton.

Abstract: The invention relates to a vacuum hoisting device of the kind having a vertically suspended lifting tube (4), which is extensible and contractible depending upon the air pressure in the lifting tube, and which at its lowest part is provided with a suction device (6) in the shape of one or more suction cups. Up to now, a valve at the suction device has been used for maneuvering the suction device, which valve when closed brings a vacuum source (7,20) to work with a constant suction capacity to decrease the pressure in the lifting tube such that an object (32) to be lifted is attached by the suction after which the lifting tube is contracted such that the object is lifted. To limit the lifting height and to lower and release the object, it has been necessary to partially open the valve and permit a restricted inlet of air and at last completely open the valve resulting in a large consumption of air.

Abstract: A wafer handling apparatus and method includes a wafer carrier station for supporting a wafer carrier, such as an enclosed pod, that holds one or more wafers. A grounded interface panel is provided between the carrier station and a clean testing or processing environment. A z-movement mechanism moves the carrier station and the wafer carrier in a z-direction. A door opening mechanism removes a door from said carrier through a door opening in the interface panel. A handler mechanism includes a wafer holding device, such as a flat end effector, that moves into the wafer carrier at a separate access opening to load or unload a wafer to or from the wafer carrier. Wafer carriers holding different amounts of wafers can be used with no major structural changes to the apparatus.

Abstract: A vacuum manipulation device with a lifter hose, which can be connected to a vacuum-generating device, and with a suction gripper device, which can be placed on an object to be manipulated, by means of which the object can be drawn-up and, by contracting the lifter hose, can be lifted. In order to prevent the suction gripper device from snapping upward in case of an unintentional release of a drawn-up object, the manipulation device features a weight-actuable regulating element which, under the effect of the weight of an object drawn by suction against the suction side of the suction gripper device, blocks a flow cross section into the interior of the lifter hose, and unblocks it in the unoccupied state of the suction gripper device.

Abstract: An apparatus for lifting and moving articles, comprising at least one arrangement with a vacuum chamber, which is connected to an arrangement which is capable of producing negative pressure in the vacuum chamber, the underside of a lower plate being provided with an elastic airtight bottom and also being provided with a number of first through-passages to the vacuum chamber.

Abstract: A vacuum based lifter device is provided for displacement of an article. At least one suction plate or suction cup is designed for connection to and disconnection from a vacuum source. The suction plate or suction cup is secured to equipment in order to be able to move it together with or relative to the article which is to be displaced. The device has a pallet-like structure into which fork members mounted on a fork-lift truck can be inserted. Parts of the structure define a vacuum chamber, a vacuum source having an electrically driven vacuum pump provided on the pallet-like structure and pneumatically connected to the vacuum chamber, and a mechanically or electrically controllable stop and release valve. The release valve is pneumatically coupled between the vacuum chamber and the suction plate or suction cup.

Abstract: The present invention, in one embodiment, is a method for moving a vacuum lifter off an object. The method includes releasing a vacuum holding a surface of the object against a sealing plate of the vacuum lifter and rolling the vacuum lifter along the surface on a roller. The roller is connected to the vacuum lifter.

Abstract: A load retainer assembly includes a pair of lower and upper plates pivotably mounted on a main shaft, and an inverting mechanism provided between the lower and upper plates that, as the lower plate is driven to pivot, causes the upper plate to pivot in the opposite direction to the pivoting direction of the lower plate. The load retainer assembly further includes a first retaining member for interconnecting distal end portions of a pair of links pivotably connected to one end of the lower plate and one end of the upper plate, respectively, and a second retaining member for interconnecting distal end portions of another pair of links pivotably connected to the other end of the lower plate and the other end of the upper plate, respectively. A suction pad is attached to each of the retaining members to retain a load by suction.

Abstract: The present invention relates to a vacuum handling apparatus, having a suction gripper device which can be connected by means of a lifting hose to a vacuum-creating device and can be placed upon an object, in order to suck up the object for lifting or conveyance. The apparatus has a control valve for controlling the vacuum prevailing in the interior of the suction gripper device and in the lifting hose, in order to lift or lower the suction gripper device with a sucked-up object or the empty suction gripper device, or to deposit a sucked-up object.

Abstract: A lid handling system employs a lid alignment assembly for aligning lids randomly placed on a rotating input disc, a lid separation assembly for separating lids spinning on a pair of horizontal spin bars into a counted stack, a vacuum pickup assembly for picking up a counted stack of lids, a pick and place assembly for transporting and placing stacks of lids into trays having upwardly bent side members, and a conveyor for conveying filled trays toward a carton.

Abstract: A method for installing light-weight panel units according to which the light-weight panel units are installed on a wall or roof in such a way that at least two panel units at a time are moved to the vicinity of the installation site. After that, the panel units that have been moved are installed in place one by one. The installation device incorporates an intermediate storage unit, in which can be stored at least two light-weight panel units. The intermediate storage unit can be moved during installation to the installation site in the vicinity of a wall or roof and it incorporates equipment which transfers one light-weight panel unit at a time to the installation site.

Abstract: A shock valve for vacuum lifting devices of the type incorporating a suspended flexible hose with suction head and connected to a vacuum source, wherein the lifting motion is effected in that a negative pressure in the hose causes the suction head to retain a load and to raise this due to the contraction of the hose caused by the internal negative pressure, and where the shock valve (6) is intended to prevent uncontrolled throwing movements when a load is dropped during prevailing negative pressure, whereby the shock valve (6) is connected to the interior of the hose adjacent the lower end thereof, and is provided with a body of inertia (16), which forms part of the shock valve, which body of inertia is connected to or constitutes members adapted for exposing large valve openings (11, 12), at momentary immobile condition of the body of inertia caused by the relative motion of the body of inertia in relation to the other parts of the shock valve, which occurs initially at a rapid acceleration of the hose, wher

Abstract: A suspendable apparatus for the lifting, rotating and transferring of essentially smooth-walled cylindrical objects, where such apparatus is preferably an air cylinder. The apparatus comprises a vertically oriented lifting mechanism consisting of a lifting chamber fixed at its upper end and movable at its lower end, with power to the air cylinder in the chamber. Additionally, there is a rotating mechanism for gripping and rotating the cylindrical object, such as a drum or paper roll. The rotating mechanism is mounted on a fixed arm secured to the lower end for movement therewith. The rotating mechanism further includes a housing having a fixed end secured to the fixed arm and a second end remote therefrom. The second end includes a pair of movable gripping arms mounted for rotational movement about the second end, where the arms include at least two arcuate shaped cups positioned to apply a vacuum against the wall of the cylindrical object.

Abstract: A vacuum lifting device that is particularly suitable for lifting refractory slabs used to line aluminum smelting cells incudes suction cups which engage the object to be lifted. A plurality of mechanical supports can be moved so that they extend at least partly underneath the object being lifted when the object is raised from the ground. The mechanical supports can hold the object in case of vacuum failure and improve the safety of the device. An optional automatic override can ensure that the mechanical supports are in the down position in the case of vacuum failure.

Abstract: A battery lift apparatus, for use with an overhead air hoist, adapted to lift and load heavy vehicle batteries into a tray of an electric powered vehicle including a rectangular-shaped carrier beam of electrically insulative plastic material, formed with a plurality of manifold passageways which, in combination with a plurality of flexible lines, provide a distribution network for supplying pressurized system air to a plurality of suction assemblies mounted on the beam. First and second handles, secured adjacent opposite end faces of the beam, enable a pair of operators to readily position each battery on the tray. The first actuator handle is mounted by a bracket assembly supporting a valve block pair of valve unit actuators controlling up and down movement of the air hoist cable, and a pilot valve actuator is adapted for supplying vacuum releasing system air to each vacuum cup.

Abstract: An IC package transfer mechanism for transferring molded IC packages to and from a flat tray with a large number of IC holder nests in an array and an IC magazine adapted to accommodate a large number of IC packages in a row within a tubular housing to be turned into a tilted position in loading and unloading operations to let IC packages slide into or out of the cylindrical housing automatically by gravity.

Abstract: An apparatus for and method of holding a semiconductor wafer (11) during a manufacturing process supports the semiconductor wafer (11) in a substantially planar form (15) with a two-platform wafer chuck (19). The two-platform wafer chuck (19) is compatible with handling warped and unwarped wafers, wafer transferring and handling techniques which maintain wafer flatness, and semiconductor manufacturing processes such as photolithography and auto-probing which require semiconductor wafers to be held in a flat configuration.

Abstract: There is disclosed a method for picking up a ream of packaged sheets of a desired kind from a plurality of reams of one or more kinds stacked up on a respective one of cells in an automated warehouse and loading the picked-up ream of packaged sheets on a pallet. In the invention, a pick-up device, having a picking, gripping and pulling mechanism and a discharging and stacking mechanism, is located at a position adjacent to a respective cell by traveling the pick-up device horizontally and/or vertically. The pallet is located at a prescribed position. The pick-up device is operated to pick-up the ream of packaged sheet of the desired kind from the plurality of reams of one or more kinds stacked up on a respective cell. Specifically, the picking, griping and pulling mechanism is operated to pick upwards and grip the ream of packaged sheets to pull the same, and the pulling and piling mechanism is operated to withdraw the pulled ream of packaged sheets and stack the same on the pallet.

Abstract: A method of removing a required number of articles from a packing box which is accommodating a plurality of articles and having one open side. The method includes a step of setting the orientation of the packing box with the open side directed side-wise, a step of sucking surfaces of the required number of articles in the packing box with sucking pads through the open side of the packing box directed side-wise, and a step of removing from the packing box the necessary number of articles sucked by the sucking pads.

Abstract: An apparatus for the manufacture of curved insulating glass, for use on automobiles, is made providing separate paths for the two sheets of glass making up the insulating double-glazed glass, until an assembly station (M) is reached. Two separate centering stations (D and D1) are also provided. The apparatus has, in the single assembly station (M), a pressing device to press the insulating glass (V) until the desired thickness is obtained.

Abstract: A linear drive apparatus for moving a canon in a packaging machine from a first position to a second position is set forth. The apparatus includes first and second spaced apart guide rods and an engagement assembly that is disposed between and slidably engages the first and second guide rods. The engagement assembly is adapted to engage one or more cartons for movement between the first and second positions. The apparatus further includes a drive shall onto which a drive roller is disposed for co-rotation. A first drive belt is connected to the drive roller and disposed about the drive roller in a clockwise direction at a first end thereof while a second end of the first drive belt is connected to a first portion of the engagement assembly.

Abstract: The present invention refers to a supplementary unit for a travelling fork lift truck used for picking up platelike mounting elements. The platelike mounting elements are picked up by a pick-up means of the supplementary unit, said pick-up means being secured to a frame via a carrier arm and a guide rod. The frame is adapted to be lifted by the forks of the fork lift truck. When the carrier arm is pivoted through an angle of 90.degree., the pick-up means, which is guided by the guide rod, will be turned through an angle of 180.degree.. The pivoting movement of the carrier arm is carried out by a hydraulic lifting cylinder.

Abstract: An apparatus for coating and developing a resist on a wafer comprises a carrier station provided with a plurality of carriers for receiving wafers and transfer tables, a processing section having a plurality of processing units, and a transfer robot provided between the carrier station and the processing section. The robot comprises a plate-shaped arm for transferring wafers between the carriers and the transfer tables, and two horseshoe-shaped forks for transferring wafers between the processing units and transfer tables. The robot is movable along a transfer path so as to make the arm and forks face the carriers, processing units and transfer tables.

Abstract: A vacuum lift device comprising a lift tube which is able to contract and expand in an upward and downward direction, and a lift tube expansion control valve controlling the opening areas of the atmospheric openings of the lift tube. A hovering control valve controlling the flow area between the second atmospheric opening and the interior of the lift tube is provided. The lift tube expansion control valve is normally positioned at a position such that is completely covers the first atmospheric opening, and the second atmospheric opening is open to the outside space. At this time, the level of vacuum in the lift tube is adjusted by the hovering control valve so that an object to be lifted is maintained at a desired height.

Abstract: An apparatus and a method therefor for automated and/or robotic assembly, the apparatus including a vacuum nozzle (201) capable of aspirating and securing a component (202, 204). A spring (312) mechanically coupled to the vacuum nozzle (201) provides a compression force thereto in a direction of a placing operation (214, 216). A controllable actuator (108, 314) is mechanically coupled to the spring (312) for adjusting the compression force that the spring (312) can apply to the vacuum nozzle (201) for adjusting a placing force that is applied to the component (202, 204) in the direction of the placing operation (214, 216).

Abstract: A process handling resin preimpregnated fabric plies that assures release of the plies from surfaces. The process includes applying pressure to a substantially dry side of a resin impregnated fabric ply with a surface, thereby facilitating release of the ply from the surface.