Moving Pivot Patents (Class 414/744.4)
  • Patent number: 11555823
    Abstract: A medical analysis method uses a medical analysis machine provided with a poly-articulated robot (70) comprising joints defining at least six axes of rotation (A1, A2, A3, A4, A5, A6) and adapted for spacing and/or orienting a terminal member (66) according to six degrees of freedom, the terminal member bearing a grasping member (78) adapted for grasping a container (16). The medical analysis method comprises at least the succession of steps consisting of providing a container (16) containing a sample to be treated stemming from a human being or an animal, transferring said container (16) towards at least one treatment station of the medical analysis machine (100) by means of the poly-articulated robot, treating the sample in a treatment station, transferring the container towards a station for capturing images, and displaying the treatment results through a user interface.
    Type: Grant
    Filed: November 14, 2018
    Date of Patent: January 17, 2023
    Assignees: BIO-RAD INNOVATIONS, DiaMed GmbH
    Inventors: Jean-Michel Brisebrat, Sébastien Bernay, Cédric Gagnepain, Daniel Seydoux
  • Patent number: 11235935
    Abstract: A substrate transport apparatus comprising a frame, a drive section connected to the frame, and an articulated arm having at least one articulated arm link operably connected to the drive section so that the articulated arm rotates about a pivot axis relative to the frame and extends and retracts relative to the pivot axis. The articulated arm has an end effector pivotally mounted to at least one articulated arm link forming a joint between the end effector and the articulated arm link, with an arm joint pivot axis disposed so that the end effector rotates relative to at least one articulated arm link about the arm joint pivot axis. The articulated arm has a drive band transmission with drive and driven pulleys where the driven pulley is connected to the articulated wrist.
    Type: Grant
    Filed: January 22, 2021
    Date of Patent: February 1, 2022
    Assignee: Brooks Automation, Inc.
    Inventors: Daniel Babbs, Vincent W. Tsang, Robert C. May
  • Patent number: 11209447
    Abstract: Methods of operating a gripper are provided. The methods include providing a robot including the gripper, the gripper moveable by the robot and including gripper fingers, providing a sample rack including receptacles accessible by the gripper, at least some of the receptacles adapted to contain specimen containers, providing data, obtained by imaging, regarding the sample rack and the specimen containers therein, and determining, based on the data, an accessible target receptacle for one of a pick operation or a place operation. Apparatus and systems configured to carry out the methods are provided, as are other aspects.
    Type: Grant
    Filed: June 27, 2017
    Date of Patent: December 28, 2021
    Assignee: Siemens Healthcare Diagnostics Inc.
    Inventors: Benjamin S. Pollack, Steven Pollack
  • Patent number: 10509047
    Abstract: A method and a device for handling sample tubes are presented. A position of the sample tube is identified and the sample tube is handled depending thereon.
    Type: Grant
    Filed: January 8, 2016
    Date of Patent: December 17, 2019
    Assignee: Roche Diagnostics Operations, Inc.
    Inventor: Christoph Pedain
  • Patent number: 10458884
    Abstract: A vehicle closure cycling device is provided. The device includes a fixture, a first actuator mounted to the fixture and displaceable to open the vehicle closure and a second actuator mounted to the fixture and displaceable to close the vehicle closure at a predetermined closing speed. The device also includes a controller configured to cycle the first actuator and the second actuator in sequence to repeatedly open and close the vehicle closure.
    Type: Grant
    Filed: March 12, 2015
    Date of Patent: October 29, 2019
    Assignee: Ford Global Technologies, LLC
    Inventors: Juan Torres Salvador, Fernando Fragoso H, Antonio Espiritu Santo Rincon
  • Patent number: 9481418
    Abstract: A mounting jig for a vehicle door, the jig includes a first support having means for adjustably fastening it to a vehicle body in the vicinity of the door opening; a second support having fastening means for fastening to the vehicle door; connection arms for interconnecting the first and second supports, which arms are hinged to each of said supports, and their trace, in a plane perpendicular to the plane of the door opening, co-operates with the trace, in the same plane, of said supports, to form a deformable quadrilateral; a weight arm, mounted to move at least in translation along a vertical axis in guide means carried by the stationary support, between a low first position and at least one second position that is higher than said low position; at least one operating member for operating an indexing member for indexing the position of the second support relative to the first support, the operating member being connected to the weight shaft; and a raising lever, for acting against the effect of gravity, to
    Type: Grant
    Filed: January 11, 2013
    Date of Patent: November 1, 2016
    Assignee: COUTIER INDUSTRIE
    Inventor: Charles Coutier
  • Patent number: 9446418
    Abstract: An analytical laboratory system and method for processing samples is disclosed. A sample container is transported from an input area to a distribution area by a gripper comprising a means for inspecting a tube. An image is captured of the sample container. The image is analyzed to determine a sample container identification. A liquid level of the sample in the sample container is determined. A scheduling system determines a priority for processing the sample container based on the sample container identification. The sample container is transported from the distribution area to a subsequent processing module by the gripper.
    Type: Grant
    Filed: November 7, 2012
    Date of Patent: September 20, 2016
    Assignee: Beckman Coulter, Inc.
    Inventors: Charles W. Johns, Joseph F. Quint, Chi S. Chen
  • Patent number: 9064919
    Abstract: An industrial robot including a first arm which has a first arm portion, and a second arm portion supported by the first arm portion. The industrial robot also includes a second arm which has a third arm portion and a fourth arm portion supported by the third arm portion. The first arm and the second arm can be expanded/retracted independently. A turning center of the first arm portion and a turning center of the third arm portion are placed coaxially. The first arm and the second arm are constructed so as to be almost line-symmetric with respect to an imaginary line under the condition that the first arm and the second arm are retracted. The first arm portion, the third arm portion, the second arm portion, and the fourth arm portion are placed in this order in a vertical direction.
    Type: Grant
    Filed: August 25, 2010
    Date of Patent: June 23, 2015
    Assignee: NIDEC SANKYO CORPORATION
    Inventors: Takayuki Yazawa, Hiroto Nakajima
  • Publication number: 20140099180
    Abstract: A loading/unloading robot includes an arm unit attached to a support unit that is capable of being raised and lowered and a hand unit for conveying a loaded/unloaded object, attached to the arm unit. The support unit includes a base portion capable of revolving around a raising/lowering axis and a head portion rotatably attached to the base portion. The arm unit includes arms that are rotatably attached to the head portion. Front ends of the arms move forward and backward along a forward/backward direction that passes the head portion. The hand unit includes a loading/unloading hand rotatably attached to the arm. A center distance from the rotational axis of the head portion to the rotational axes of rear arms is shorter than a center distance from an axis of revolution of the base portion to the rotational axis of the head portion.
    Type: Application
    Filed: October 4, 2013
    Publication date: April 10, 2014
    Applicant: HIRATA CORPORATION
    Inventor: Hiroaki ANDO
  • Patent number: 8442669
    Abstract: A self-feeding device for a user and method operating is provided. The self-feeding device includes a base assembly having a housing with an upper wall, a lower wall and a sidewall extending therebetween the upper wall and the lower wall. A plate is disposed on the upper housing wall of the base assembly, and the plate includes a food compartment having a food item located therein. A feed arm assembly located on the base assembly includes an arm moveable with a predetermined degree of freedom, and a feeding utensil is coupled to the feed arm. A controller actuates the feed arm assembly to obtain the food/drink item from the food compartment via the feed utensil, and to transfer the food item to the user. The methodology includes software to control operation of the self-feeding device within a STORAGE mode, a SELECT mode, and a RETRIEVE food and drink mode.
    Type: Grant
    Filed: June 21, 2012
    Date of Patent: May 14, 2013
    Inventor: Jonathan P. Dekar
  • Publication number: 20130039732
    Abstract: According to one exemplary embodiment, a manipulator device includes a base, first and second linear slides, a drive link, a drive member, a driven member and an end effector. The elements of the manipulator device cooperate to constrain the end effector to rotate about a remote center of motion that is displaced from a proximal center of motion as the drive link moves a carriage of the second linear slide along an arcuate path.
    Type: Application
    Filed: August 10, 2012
    Publication date: February 14, 2013
    Inventors: Reuben D. Brewer, J. Kenneth Salisbury, JR.
  • Publication number: 20120031954
    Abstract: A device for mounting an array of solder balls to a plurality of substrates of integrated circuits, comprising: a first plate for receiving a first substrate in a loading position; said first plate adapted to translate laterally from a substrate loading position to a flux receiving position; said first plate further adapted to rotate 180° from the substrate loading position to a such that the first plate is in a solder ball receiving position, and; mounting solder halls to the first plate.
    Type: Application
    Filed: October 14, 2011
    Publication date: February 9, 2012
    Applicant: ROKKO VENTURES PTE LTD
    Inventors: Nee Seng Ling, Soo Loo Ang, Ter Siang Pai
  • Patent number: 7766596
    Abstract: An attachment for a telescopic material handler supplies five degrees of freedom (DOF) for the task of picking, manipulating and aiding in the installation of vertical and horizontal wall cladding and other construction materials. The cladding can be of a size up to 1.3×8.0 m and a mass of 350 kg. The control and positioning of the load is accomplished through standard operation of the telehandler in conjunction with wireless control of the five DOF of the device. Hydraulic power for the device functions may be supplied through the telehandler auxiliary circuit. The auxiliary flow also powers a hydraulic generator, which supplies the device with electrical power for both system logic and control and vacuum generation. The cladding panels are handled by the vacuum system.
    Type: Grant
    Filed: March 30, 2005
    Date of Patent: August 3, 2010
    Assignee: JLG Industries, Inc.
    Inventors: Daniel Allen Smith, Korry D. Kobel, Ignacy Puszkiewicz, Christopher A. Haught, Todd Bradley Wyant
  • Publication number: 20090180855
    Abstract: A method for making a robot pivot arm assembly includes forming from a rigid, machinable material a circular disk, and forming a circular aperture through the center of the disk. An outer bearing track is formed integrally in the inside surface which defines the aperture, and the apertured disk is positioned in a machining device with a fixturing portion that engages the outer bearing track. An integral outer race, an arm and a gear segment with teeth are then machined into the disk to form the outer portion of the pivot arm assembly. An inner race with an inner bearing track is positioned inside the integral outer race, and rolling bearing elements are inserted into the first and second bearing tracks.
    Type: Application
    Filed: January 11, 2008
    Publication date: July 16, 2009
    Inventors: William Daniel Schmidt, Scott A. Hansen, Gregory A. Clary, David S. Dailey
  • Publication number: 20080273957
    Abstract: A transfer apparatus includes a stationary base, a swivel rotatable around a vertical rotation axis, a linear movement mechanism supported by the swivel, a hand supported by the linear movement mechanism for transferring a work along a horizontal path, a driving power source in the stationary base, and a transmission shaft arranged along the rotation axis for transmitting driving force from the driving power source to the linear movement mechanism. The linear movement mechanism includes a driving mechanism and a guide rail for movably supporting the hand. The driving mechanism has a plurality of pulleys, including a driving pulley supported rotatably around a horizontal axis, and an output belt wound around the plurality of pulleys for reciprocal movement within a predetermined section extending parallel to the movement path. The hand is connected to the output belt via a connection member.
    Type: Application
    Filed: April 25, 2008
    Publication date: November 6, 2008
    Applicant: DAIHEN Corporation
    Inventors: Takafumi Uratani, Daisuke Sado, Hideki Matsuo
  • Patent number: 7077619
    Abstract: A continuous motion robotic device including a first robotic arm, a second robotic arm, a third robotic arm, and a drive system. The robotic arms are coaxially arranged, each including an end effector for performing useful work on an object and can continuously rotate a full 360. The drive system commonly controls the three robotic arms and defines a central axis about which the device rotates. The device is capable of high-speed operation in that the robotic arms are sequentially presented to various work environment stations via rotation about the central axis. In one preferred embodiment, each of the robotic arms provides three degrees of freedom. In another preferred embodiment, each robotic arm includes at least a first primary joint and a second primary joint, with the first primary joints being coupled and the second primary joints being coupled. Alternatively, the primary joints are decoupled.
    Type: Grant
    Filed: July 13, 2001
    Date of Patent: July 18, 2006
    Assignee: 3M Innovative Properties Company
    Inventor: Thomas R. Corrigan
  • Patent number: 6884019
    Abstract: A conveying arm of the invention includes a first pivotable shaft connected to a first arm which is also pivotably connected to a third arm having an intermediate pivotable portion. The third arm is also pivotably connected to a fifth arm which is also pivotably connected to a seventh arm which has a holding portion for an object to be conveyed. The conveying arm also includes a second pivotable shaft connected to a second arm which is also pivotably connected to a fourth arm having an intermediate pivotable portion. The fourth arm is also pivotably connected to a sixth arm which is also pivotably connected to the seventh arm. With respect to both the third and fourth arms, a line linking one-side end portion to an intermediate pivotable portion is substantially perpendicular to a line linking the other-side end portion to the intermediate pivotable portion.
    Type: Grant
    Filed: April 18, 2003
    Date of Patent: April 26, 2005
    Assignee: Tokyo Electron Limited
    Inventor: Hiroaki Saeki
  • Patent number: 6811370
    Abstract: An apparatus for handling and positioning wafers or other flat objects. The apparatus has an XY stage with an X-drive and a Y-drive, and a bed attached to the XY stage. A chuck (e.g. a vacuum chuck) is disposed on the bed and an effector is attached to the bed. The effector can rotate about an axis of rotation extending in the Z-direction. The effector can pick up objects and place the objects onto the chuck. The effector can also pick up objects from the chuck. Preferably, the chuck has a recessed region for accommodating the effector so that the effector can be inserted under a flat object on the chuck. The X-drive or Y-drive of the XY stage provides linear motion for the effector so that the effector can pull wafers from a cassette such as used in the semiconductor industry. Alternatively, the effector is attached to a linear actuator disposed on the bed.
    Type: Grant
    Filed: December 21, 2000
    Date of Patent: November 2, 2004
    Assignee: N&K Technology, Inc.
    Inventor: Dale Buermann
  • Patent number: 6761518
    Abstract: A machine tool for at least triaxial machining of work pieces comprises a column of the type of a casing with side walls. In an interior space, provision is made for a work spindle which projects into a working area and which is connected via couplers and hinges to a driving skid that is displaceably guided on each side wall straight in a y direction. The driving skids are displaceably guided on two guides which are spaced from each other in the z direction. Provided between the guides are linear motors, a first part of which is mounted on the driving skid and a second part on the side wall.
    Type: Grant
    Filed: August 28, 2002
    Date of Patent: July 13, 2004
    Assignee: Hüller Hille GmbH
    Inventors: Gerald Stengele, Thomas Hoffman, Waldemar Haus
  • Patent number: 6725532
    Abstract: A plurality of self-propelled system heads (5) are made to independently travel along a closed-loop travel track (6) in a manner that the heads do not interfere with each other by controlling respective drive devices (4). Components (2) from a component supply device (8) are held by component holding members (3) of the heads, and thereafter, the components held by the component holding members are mounted on boards (1) positioned by board positioning devices (7).
    Type: Grant
    Filed: March 23, 2001
    Date of Patent: April 27, 2004
    Assignee: Matsushita Electric Industrial Co., Ltd.
    Inventors: Takeshi Okada, Seiichi Mogi, Hiroshi Ota, Hirokazu Honkawa, Makito Seno, Kunio Sakurai, Ken Takano
  • Patent number: 6575691
    Abstract: A conveying arm of the invention includes a first pivotable shaft connected to a first arm which is also pivotably connected to a third arm having an intermediate pivotable portion. The third arm is also pivotably connected to a fifth arm which is also pivotably connected to a seventh arm which has a holding portion for an object to be conveyed. The conveying arm also includes a second pivotable shaft connected to a second arm which is also pivotably connected to a fourth arm having an intermediate pivotable portion. The fourth arm is also pivotably connected to a sixth arm which is also pivotably connected to the seventh arm. With respect to both the third and fourth arms, a line linking one-side end portion to an intermediate pivotable portion is substantially perpendicular to a line linking the other-side end portion to the intermediate pivotable portion.
    Type: Grant
    Filed: January 19, 2001
    Date of Patent: June 10, 2003
    Assignee: Tokyo Electron Limited
    Inventor: Hiroaki Saeki
  • Patent number: 6514032
    Abstract: A substrate transfer system employs a robot hand which is composed such that a sum length of a first arm and a third arm equal a length of a second arm, and a length of the first arm becomes longer than a length of the third arm. A ratio between arm lengths is determined such that a distal end portion of the first arm, a distal end portion of the second arm, a distal end portion of the third arm, and a distal end portion of the workpiece held by the end effector are inscribed in a track circle around a rotational axis of the first arm as a center. The ratio of the first, second and third arm lengths is approximately 1:({square root over ( )}5+1)/2:({square root over ( )}5−1)/2. This optimized ratio of the arm lengths allows the arm rotational radius to be smaller than the conventional value, and makes it possible to achieve a longer transfer distance in an equal installation area.
    Type: Grant
    Filed: October 12, 2000
    Date of Patent: February 4, 2003
    Assignee: Tazmo Co., Ltd.
    Inventors: Kousaku Saino, Takahiro Kobiki
  • Patent number: 6513640
    Abstract: The present invention provides an apparatus provided with a turn driving device rotatable about an axis perpendicular to the plane of a pallet and also movable in the direction of the axis, a sliding device disposed on only the lower side of the pallet, and a push-up device having a first guide portion for causing the pallet normally separate from the sliding device to abut against the sliding device and further, guiding the direction of movement of the pallet, wherein during pallet exchange, the turn driving device turns the pallet on the sliding device and exchanges the pallet.
    Type: Grant
    Filed: December 14, 2000
    Date of Patent: February 4, 2003
    Assignee: Asuka Trading Co., Ltd.
    Inventor: Koji Nishii
  • Publication number: 20030012633
    Abstract: A disk (6) is horizontally rotated a half-turn by a motor (7) in a rotational direction and, then, is rotated a half-turn in an opposite rotational direction. Two servomotors (8, 9) are symmetrically disposed, on an upper surface of the disk (6), with respect to a rotating shaft of the disk (6). Driving shafts (22, 23), driven by the two servomotors (8, 9), downwardly extend through the disk (6), and move hanging members (K, M), respectively, in upward-and-downward directions. Two hanging members (K, M) are provided, at their lower ends, with clampers (32), respectively. The clampers (32) are each provided, at their bottom surfaces, with a suction pad (35), and are provided, at their upper surfaces, with pneumatic cylinders (28, 29). The pressure of the compressed air supplied to the pneumatic cylinder is adjusted by a pressure regulating device (38).
    Type: Application
    Filed: August 19, 2002
    Publication date: January 16, 2003
    Inventors: Keitaro Harada, Masayoshi Yokoo, Shigeo Onuma, Satoshi Ueno
  • Patent number: 6485250
    Abstract: A substrate transport apparatus having a drive section, two independently movable arm assemblies connected to the drive section on a common axis of rotation, and substrate holders connected to the arm assemblies. The drive section includes three coaxial drive shafts with a pulley connected to one of the shafts. The arm assemblies are connected to respective ones of the two other shafts.
    Type: Grant
    Filed: December 30, 1998
    Date of Patent: November 26, 2002
    Assignee: Brooks Automation Inc.
    Inventor: Christopher A. Hofmeister
  • Patent number: 6428266
    Abstract: A robot with a base, a first link connected to the base by a shoulder joint, and a second link connected to the first link by an elbow joint. A shoulder motor drives the shoulder joint, and an elbow motor drives the elbow joint. An upper elbow pulley is coupled to the first link. An end effector pulley coupled to the upper elbow pulley, and a dual-bladed end effector driven by the end effector pulley. The diameter of the upper elbow pulley and the diameter of the end effector pulley are related by a 1:2 ratio. Ferro-fluid seals are used to seal each joint. A static seal joins the seams of the links. Each arm link has a particle filter. The robot can communicate electrical signals through the revolute joints with a conductive slip-ring assembly. Alternately, the joint may have an inner cylinder and an outer cylinder, and a cable may be coiled between the cylinders.
    Type: Grant
    Filed: July 9, 1996
    Date of Patent: August 6, 2002
    Assignee: Brooks Automation, Inc.
    Inventors: Todd R. Solomon, Donald J. Thomas, Gerard J. Labonville
  • Patent number: 6349571
    Abstract: A pushout mechanism is disclosed for transferring bottles from a deadplate of an I.S. machine section to a conveyor. The pushout mechanism has a finger assembly including inner and outer pockets and is pivotally displaced, when the finger assembly is at an advanced position, from the deadplate and to a conveyor. Each of the inner and outer pockets includes an air directing structure such as a jet for directing air to hold a bottle located within the pocket against the pocket. A first pressurized air supply which includes a first control valve supplies pressurized air to the air directing structure of the inner pocket and a second pressurized air supply means including a second control valve for supplies pressurized air to the air directing structure of the outer pocket.
    Type: Grant
    Filed: February 10, 2000
    Date of Patent: February 26, 2002
    Assignee: Emhart Glass S.A.
    Inventors: Richard A. Gorski, Gary R. Voisine
  • Patent number: 6345213
    Abstract: A method provides an exact measurement of the tool center point (TCP) being carried out, preferably in the whole working area of the robot. In this measurement, the robot moves very slowly so that little heat is generated by the driving assemblies and the temperature gradients are as low as possible. The measurement can be made, for example, using a high-precision laser distance and angle measurement system. The measurement is carried out such that a measuring point is moved to working area points and then the deviations of the positions and/or orientations of the measuring point are determined using the laser distance and angle measurement system, i.e. a nominal/actual comparison is made. The TCP can preferably serve as the measuring point. The point must always be selected so that the positioning and orientation deviations of the kinematic chain with respect to the PCT can be determined with sufficient accuracy.
    Type: Grant
    Filed: February 14, 2001
    Date of Patent: February 5, 2002
    Assignee: Institut fuer Werkzeugmaschinen und Betriebswissenschaften TU Muenchen
    Inventors: Ralf-Gunter Graeser, Robert Klingel
  • Publication number: 20010036398
    Abstract: A substrate transport apparatus having a drive section, two independently movable arm assemblies connected to the drive section on a common axis of rotation, and substrate holders connected to the arm assemblies. The drive section includes three coaxial drive shafts with a pulley connected to one of the shafts. The arm assemblies are connected to respective ones of the two other shafts.
    Type: Application
    Filed: December 30, 1998
    Publication date: November 1, 2001
    Inventor: CHRISTOPHER A. HOFMEISTER
  • Patent number: 6293750
    Abstract: A robotic arm has a pair of gripper fingers designed to grip a variety of containers, including capped and uncapped test tubes as well as containers having unique gripping means. The fingers each have upper and lower projections separated by a groove, the respective projections facing each other when mounted to grippers on the robotic arm. The projections and groove serve to firmly hold the containers as well as self-align the unique gripping means on initially unaligned containers within the fingers as the fingers close around the containers. The fingers have clearance to avoid contact with caps on capped test tubes. Stops are provided at the top of each finger to engage one another and prevent fully closed fingers from deforming. The robotic arm may be transported along a rail mounted above the instrument and a gripper assembly, having a gripper arm, mounted to the robotic arm may be rotated above the instrument to move the container to various locations within the instrument.
    Type: Grant
    Filed: March 24, 2000
    Date of Patent: September 25, 2001
    Assignee: Bayer Corporation
    Inventors: Beri Cohen, Thomas W. DeYoung, Krunoslav Esteban Draganovic, Lev Vant, Richard S. Antoszewski, Joseph J. Zelezniak, Edward R. Sieger, Jr.
  • Patent number: 6293746
    Abstract: A transfer robot is provided which includes a stationary base, two coaxially rotatable shafts, two motors for driving these shafts, and an arm mechanism provided with at least one handling member for holding a workpiece. The arm mechanism includes a base link rotatable about a first axis, and a pantograph assembly carried by the base link. The pantograph assembly is made up of an outer link supported by the base link for rotation about a second axis, intermediate links supported by the outer link for rotation about third axes, an inner link supported by the intermediate links for rotation about fourth axes. The third axes are offset from the second axis toward the first axis. The distance between the first and the second axes is equal to the distance between the third and the fourth axes.
    Type: Grant
    Filed: July 6, 1999
    Date of Patent: September 25, 2001
    Assignee: Daihen Corporation
    Inventors: Hironori Ogawa, Masashi Kamitani
  • Publication number: 20010000721
    Abstract: An apparatus for handling and positioning wafers or other flat objects. The apparatus has an XY stage with an X-drive and a Y-drive, and a bed attached to the XY stage. A chuck (e.g. a vacuum chuck) is disposed on the bed and an effector is attached to the bed. The effector can rotate about an axis of rotation extending in the Z-direction. The effector can pick up objects and place the objects onto the chuck. The effector can also pick up objects from the chuck. Preferably, the chuck has a recessed region for accommodating the effector so that the effector can be inserted under a flat object on the chuck. The X-drive or Y-drive of the XY stage provides linear motion for the effector so that the effector can pull wafers from a cassette such as used in the semiconductor industry. Alternatively, the effector is attached to a linear actuator disposed on the bed.
    Type: Application
    Filed: December 21, 2000
    Publication date: May 3, 2001
    Inventor: Dale Buermann