Pivot Swinging About Second Pivot Patents (Class 414/744.5)
  • Patent number: 10543596
    Abstract: An apparatus including a robot drive, a first arm having a first upper arm, a first forearm and a first end effector, where the first end effector comprises a first and second substrate support sections and a leg located between the first and second support sections which connects the substrate support sections to a wrist joint with the first forearm, and where a connection of the leg to the wrist joint is offset unequal distances relative to respective centerlines of the first and second substrate support sections, and a second arm having a second upper arm connected to the robot drive, where the first and second upper arms are connected to a first shaft of the robot drive to be rotated in unison, and where the wrist joint does not intersect the drive axis while the first arm is being extended and retracted.
    Type: Grant
    Filed: November 6, 2017
    Date of Patent: January 28, 2020
    Assignee: Persimmon Technologies Corporation
    Inventors: Martin Hosek, Christopher Hofmeister
  • Patent number: 10500719
    Abstract: Robots including spaced upper arms are described. The robot includes first and second upper arms rotatable about a shoulder axis wherein the second upper arm is spaced from the first upper arm. The other robot components (first and second forearms, first and second wrist members, and first and second end effectors) are interleaved in the space between the first and second upper arms. Each of the first and second upper arms and first and second forearms may be individually and independently controlled. Methods of operating the robot and electronic device processing systems including the robot are provided, as are numerous other aspects.
    Type: Grant
    Filed: June 9, 2017
    Date of Patent: December 10, 2019
    Assignee: Applied Materials, Inc.
    Inventors: Karuppasamy Muthukamatchi, Damon K. Cox, Jeffrey C. Hudgens
  • Patent number: 10483138
    Abstract: A wafer clamp includes a platform with a top surface, a stopper disposed at a front end of the platform, a push rod disposed at a rear end of the platform, at least one actuator pivotally connected to the push rod, and a sensor disposed at the front end of the platform, the sensor measuring a distance between the sensor and a wafer over the sensor.
    Type: Grant
    Filed: March 9, 2017
    Date of Patent: November 19, 2019
    Assignee: Himax Technologies Limited
    Inventors: Fang Wan Lu, Jui Tang Chang
  • Patent number: 10483142
    Abstract: A system for mounting vacuum robot arms in horizontally elongate vacuum transfer modules is provided. The system provides mechanical isolation to the vacuum robot arm against deflections in the housing of the vacuum transfer module due to depressurization of the interior of the vacuum transfer module while the exterior of the vacuum transfer module is subjected to atmospheric pressure. Such systems may prevent undesirable, larger displacements of the end effector of such vacuum robot arms due to the deflection.
    Type: Grant
    Filed: September 14, 2018
    Date of Patent: November 19, 2019
    Assignee: Lam Research Corporation
    Inventors: Mark K. Tan, Christopher William Burkhart, Richard M. Blank, Richard H. Gould
  • Patent number: 10451443
    Abstract: An inductive detector for measuring the position of a first body relative to a second body along a measurement path comprises: a first body which comprises a substantially planar surface and a passive electromagnetic target; a second body which comprises a substantially planar surface facing the planar surface of the first body and an arrangement of laminar windings; said first and second body being configured such that the electromagnetic influence of the first body on the second body varies according to the position of the first body relative to the second body along the measurement path; wherein said passive electro-magnetic target comprises a first portion incorporating said planar surface and a second portion with a lower thickness than said first portion; whereby the second portion incorporates an insulating aperture.
    Type: Grant
    Filed: October 2, 2013
    Date of Patent: October 22, 2019
    Assignee: ZETTLEX (UK) LIMITED
    Inventors: Mark Anthony Howard, Darran Kreit
  • Patent number: 10453725
    Abstract: A dual-blade robot having overlapping frog-leg linkages is disclosed. The robot includes first and second arms, coplanar with each other and each rotatably coupled to a first blade, in a frog-leg configuration, and third and fourth arms, coplanar with each other and each rotatably coupled to a second blade, in a frog-leg configuration, where the third and fourth arms are vertically offset from the first and second arms. The third and fourth arms are configured to overlap at least a portion of the first and second arms when the first and second blades are in a retracted position. Methods of operating the robot and electronic device processing systems including the robot are provided, as are numerous other aspects.
    Type: Grant
    Filed: September 19, 2017
    Date of Patent: October 22, 2019
    Assignee: Applied Materials, Inc.
    Inventor: Paul Z. Wirth
  • Patent number: 10406693
    Abstract: A substrate transfer robot includes a base, a column provided on the base, a number of robotic arm groups protruding from the column in different directions. Each of the number of robotic arm groups includes at least one robotic arm and elevating mechanisms. The elevating mechanisms correspond to the robotic arm groups one by one and are fixedly connected to the robotic arm groups. The number of robotic arm groups can be driven by the respective elevating mechanisms, to move in a longitudinal direction of the column respectively. The substrate transfer robot can improve the handling efficiency.
    Type: Grant
    Filed: December 11, 2017
    Date of Patent: September 10, 2019
    Assignees: BOE TECHNOLOGY GROUP CO., LTD., HEFEI XINSHENG OPTOELECTRONICS TECHNOLOGY CO., LTD.
    Inventors: Erfeng Shen, Jie Wang, Qingshuang Ren
  • Patent number: 10409174
    Abstract: A lithographic apparatus includes a substrate table, a post-exposure handling module, a substrate handling robot and a drying station. The substrate table is configured to support a substrate for an exposure process. The post-exposure handling module is configured to handle the substrate post-exposure. The substrate handling robot is configured to transfer the substrate from the substrate table along a substrate unloading path into the post-exposure handling module. The drying station is configured to actively remove liquid from a surface of the substrate. The drying station is located in the substrate unloading path. The drying station is located in the post-exposure handling module. The post-exposure handling module may be a substrate handler.
    Type: Grant
    Filed: May 12, 2015
    Date of Patent: September 10, 2019
    Assignee: ASML NETHERLANDS B.V.
    Inventors: Aart Adrianus Van Beuzekom, Jozef Augustinus Maria Alberti, Hubert Marie Segers, Ronald Van Der Ham, Francis Fahrni, Ruud Olieslagers, Gerben Pieterse, Cornelius Maria Rops, Pepijn Van Den Eijnden, Paul Van Dongen, Bas Willems
  • Patent number: 10363665
    Abstract: A substrate transport apparatus including a lower linearly driven effector structure with spaced paddles, and an upper linearly driven end effector structure with spaced paddles and no rotating joints above a paddle of the lower end effector structure. A drive subsystem is configured to linearly drive the lower end effector structure and to linearly drive the upper end effector structure independent of the lower end effector structure.
    Type: Grant
    Filed: March 12, 2013
    Date of Patent: July 30, 2019
    Assignee: Persimmon Technologies Corporation
    Inventors: Martin Hosek, Dennis Poole, Christopher Hofmeister
  • Patent number: 10325795
    Abstract: A substrate processing apparatus including a frame, a first SCARA arm connected to the frame, including an end effector, configured to extend and retract along a first radial axis; a second SCARA arm connected to the frame, including an end effector, configured to extend and retract along a second radial axis, the SCARA arms having a common shoulder axis of rotation; and a drive section coupled to the SCARA arms is configured to independently extend each SCARA arm along a respective radial axis and rotate each SCARA arm about the common shoulder axis of rotation where the first radial axis is angled relative to the second radial axis and the end effector of a respective arm is aligned with a respective radial axis, wherein each end effector is configured to hold at least one substrate and the end effectors are located on a common transfer plane.
    Type: Grant
    Filed: December 20, 2017
    Date of Patent: June 18, 2019
    Assignee: Brooks Automation, Inc.
    Inventors: Robert T. Caveney, Jayaraman Krishnasamy, Ulysses Gilchrist, Mitchell Drew, Jairo T. Moura
  • Patent number: 10307799
    Abstract: An apparatus for dismantling and cleaning includes a housing; a heating device for heating an object for dismantling and cleaning is provided in the housing; a movable mechanical arm device is provided in the housing, a pick-up device is provided on the mechanical arm device, and the pick-up device is configured to pick up the object for dismantling and cleaning; and a spray device configured to spray cleaning liquid and a drying device configured to dry an interior of the housing are provided within the housing.
    Type: Grant
    Filed: April 13, 2016
    Date of Patent: June 4, 2019
    Assignees: BOE Technology Group Co., Ltd., Hefei BOE Optoelectronics Technology Co., Ltd.
    Inventor: Wei Tian
  • Patent number: 10269613
    Abstract: A substrate conveying robot has left and right arms having a common pivot axis line, an arm drive unit for driving the left and right arms, and a control unit for controlling the arm drive unit. A pulley ratio between a turning pulley, a first pulley, a second pulley, and a third pulley is set so that a moving locus of the substrate holding members when the first link member is rotated about the pivot axis line by the first drive portion so as to extend and contract the arm in a state that the turning pulley is fixed is substantially linear. Thereby, the moving locus of the substrate holding member when extending and contracting the arm can be substantially linear.
    Type: Grant
    Filed: October 10, 2014
    Date of Patent: April 23, 2019
    Assignee: KAWASAKI JUKOGYO KABUSHIKI KAISHA
    Inventors: Isao Kato, Iori Kurata, Masayuki Saito, Hirohiko Goto
  • Patent number: 10253854
    Abstract: An assembly for converting motion comprises a first arm rotatable about a first fixed pivot; a second arm rotatable about a second fixed pivot spaced apart from the first fixed pivot. A third arm pivotably connects to the second arm. A fourth arm pivotably connects to the first arm. A first connecting arm extends between the first arm and the third arm, the first connecting arm pivotably connected to the first arm and pivotably connected to the third arm. A second connecting arm extends between the first arm and the second arm, the second connecting arm pivotably connected to the first arm disposed and pivotably connected to the second arm. The third arm connects to a first position on a component to be moved relative to the first and second fixed pivots and the fourth arm connects at a second position thereon to a second position on the component.
    Type: Grant
    Filed: August 28, 2014
    Date of Patent: April 9, 2019
    Assignee: Ten Fold Engineering Limited
    Inventor: David Martyn
  • Patent number: 10213924
    Abstract: An industrial robot may include a robot main body; and an elevating mechanism to raise and lower the robot main body. The robot main body may include a hand, an arm to which the hand is joined, a main body portion to which the arm is joined, and an arm-elevating mechanism. The elevating mechanism may include a drive unit, guide rails, a guide block, and a joining member joining the robot main body and the guide block. The housing may include a flat cover between the guide block and the main body unit. Slit through-holes may be formed in the cover to enable the joining member to move in the up-down direction.
    Type: Grant
    Filed: September 8, 2016
    Date of Patent: February 26, 2019
    Assignee: NIDEC SANKYO CORPORATION
    Inventors: Yasuyuki Kitahara, Toshimichi Kazama, Tamotsu Kuribayashi, Masayoshi Saichi
  • Patent number: 10173331
    Abstract: A robot system includes a robot cell that includes a robot and a cell in which the robot is provided and enables coexistence with a human, and an installation area of the robot cell is less than 637,500 mm2 and the robot cell is movable. Further, the robot includes an n-th (n is an integer number equal to or more than one) arm rotatable about an n-th rotation shaft and an (n+1)th arm provided on the n-th arm rotatably about an (n+1)th rotation shaft in a shaft direction different from a shaft direction of the n-th rotation shaft, and a length of the n-th arm is longer than a length of the (n+1)th arm and the n-th arm and the (n+1)th arm can overlap as seen from the (n+1)th rotation shaft.
    Type: Grant
    Filed: March 23, 2016
    Date of Patent: January 8, 2019
    Assignee: Seiko Epson Corporation
    Inventor: Kazushige Akaha
  • Patent number: 10155309
    Abstract: Wafer handling robots are provided that are configured to provide high wafer placement accuracy. Such robots utilize rotational drive transfer mechanisms as well as rotational encoders that are located at each rotational joint, as opposed to solely at the motor outputs.
    Type: Grant
    Filed: November 16, 2017
    Date of Patent: December 18, 2018
    Assignee: Lam Research Corporation
    Inventor: Richard M. Blank
  • Patent number: 10144127
    Abstract: A transfer apparatus includes a base, a first holder, a second holder offset from the first holder in a first direction, and a movement mechanism for moving the first holder and the second holder relative to the base in a plane parallel to the first direction. The movement mechanism includes a swing member, a first link arm and a second link arm. The swing member is pivotally supported on the base. The first link arm is pivotally connected to the first holder. The first link arm is also connected to the swing member for pivoting about a first intermediate axis extending in a second direction perpendicular to the first direction. The second link arm is pivotally connected to the second holder. The second link arm is also connected to the swing member for pivoting about a second intermediate axis extending in the second direction. The first intermediate axis is offset from the second intermediate axis in the first direction.
    Type: Grant
    Filed: August 16, 2017
    Date of Patent: December 4, 2018
    Assignee: DAIHEN Corporation
    Inventor: Jun Iura
  • Patent number: 10141214
    Abstract: A substrate transport apparatus having a drive section and a scara arm operably connected to the drive section to move the scara arm. The scara arm has an upper arm and at least one forearm. The forearm is movably mounted to the upper arm and capable of holding a substrate thereon. The upper arm is substantially rigid and is adjustable for changing a predetermined dimension of the upper arm.
    Type: Grant
    Filed: September 29, 2015
    Date of Patent: November 27, 2018
    Assignee: Brooks Automation, Inc.
    Inventors: Antonio F. Pietrantonio, Anthony Chesna, Hakan Elmali, Ulysses Gilchrist
  • Patent number: 10134621
    Abstract: A transfer apparatus including a frame, multiple arms connected to the frame, each arm having an end effector and an independent drive axis for extension and retraction of the respective arm with respect to other ones of the multiple arms, a linear rail defining a degree of freedom for the independent drive axis for extension and retraction of at least one arm, and a common drive axis shared by each arm and configured to pivot the multiple arms about a common pivot axis, wherein at least one of the multiple arms having another drive axis defining an independent degree of freedom with respect to other ones of the multiple arms.
    Type: Grant
    Filed: December 12, 2014
    Date of Patent: November 20, 2018
    Assignee: Brooks Automation, Inc.
    Inventors: Robert T. Caveney, Ulysses Gilchrist, Alexander Krupyshev
  • Patent number: 10086511
    Abstract: Linear semiconductor handling systems provide more balanced processing capacity using various techniques to provide increased processing capacity to relatively slow processes. This may include use of hexagonal vacuum chambers to provide additional facets for slow process modules, use of circulating process modules to provide more processing capacity at a single facet of a vacuum chamber, or the use of wide process modules having multiple processing sites. This approach may be used, for example, to balance processing capacity in a typical process that includes plasma enhanced chemical vapor deposition steps and bevel etch steps.
    Type: Grant
    Filed: August 30, 2013
    Date of Patent: October 2, 2018
    Assignee: Brooks Automation, Inc.
    Inventor: Peter van der Meulen
  • Patent number: 10087019
    Abstract: The present invention relates to an apparatus and a method for transferring substrates into and from a vacuum chamber in a lithography apparatus. The load lock system comprises: a load lock chamber provided with an opening for allowing passage of a substrate in and out of the load lock chamber, and a transfer apparatus comprising a sub-frame at least partially arranged in the load lock chamber, an arm which is, with a proximal end thereof, connected to the sub-frame, and a substrate receiving unit which is connected to a distal end of the arm. The arm comprises at least three hinging arm parts, wherein a first and a second arm part are hingedly connected to the sub-frame with a proximal end thereof. A third arm part is hingedly connected to the distal ends of the first and second arm parts. The arm parts are arranged to form a four-bar linkage.
    Type: Grant
    Filed: November 12, 2015
    Date of Patent: October 2, 2018
    Assignee: MAPPER LITHOGRAPHY IP B.V.
    Inventors: Michel Pieter Dansberg, Sjoerd Hesdahl, Jan Pieter Roelof Jongeneel
  • Patent number: 10077179
    Abstract: The present invention relates to a rotor of an apparatus for forming and/or filling containers made from preforms. The object of the invention is to propose a rotor of such an apparatus, that allows the preforms or the filled containers to be transferred with reduced forces to a processing station downstream. This object is achieved by a rotor 100 of such an apparatus having a rotational axis A and having processing stations that rotate about the rotational axis for receiving preforms or containers, wherein the processing stations move along a closed path 1 about the rotational axis A, which is characterized in that the distance of path 1 from the rotational axis A varies depending upon the position on path 1, and the radius of curvature of path 1 in at least one section 12 is greater than the greatest distance of path 1 from the rotational axis A.
    Type: Grant
    Filed: May 2, 2016
    Date of Patent: September 18, 2018
    Assignee: KHS Corpoplast GmbH
    Inventors: Michael Linke, Michael Litzenberg, Niels Meyer
  • Patent number: 10058996
    Abstract: A method including, based at least partially upon a command transmission to at least one motor of a robot, estimating deflection for at least one member of the robot during movement of the robot; based at least partially upon the estimated deflection, determining calculated end effector coordinates for an end effector of the robot; and based at least partially upon the calculated end effector coordinates, adjusting movement of the robot for placing a substrate, located on the robot, at a desired location.
    Type: Grant
    Filed: November 18, 2015
    Date of Patent: August 28, 2018
    Assignee: Persimmon Technologies Corporation
    Inventors: Martin Hosek, Jacob Lipcon
  • Patent number: 10042356
    Abstract: A substrate processing apparatus includes: first and second places in which a substrate can be placed; a substrate transfer device having a substrate holder that holds the substrate to transfer the substrate between the first and second places; and a substrate position measuring unit that detects a position of the substrate held by the substrate holder. The substrate position measuring unit, disposed independently of the substrate transfer device, is arranged at a position where the substrate held by the substrate holder of the substrate transfer device can be placed.
    Type: Grant
    Filed: February 18, 2015
    Date of Patent: August 7, 2018
    Assignee: Tokyo Electron Limited
    Inventors: Naruaki Iida, Katsuhiro Morikawa
  • Patent number: 10040206
    Abstract: The present invention relates to a variable rigidity robot joint system including a first driving module and a second driving module generating torque which is rotated on a first direction, a first rotating module changing rotations of the first driving module and the second driving module into rotations on a second direction intersecting the first direction when the first and second driving modules rotate in directions in which a joint is rotated in a same direction, thereby rotating the joint, a rigidity-providing member providing rigidity by elastically supporting a rotational movement of the first rotating module on the second direction, and a second rotating module changing rotations of the first driving module and the second driving module into a linear motion in the first direction when the first and second driving modules rotate in directions in which the joint is rotated in different directions.
    Type: Grant
    Filed: August 28, 2015
    Date of Patent: August 7, 2018
    Assignee: Korea University Research and Business Foundation
    Inventors: Hyun-Hwan Jeong, Joo-No Cheong, Bong-Ki Kang
  • Patent number: 10022878
    Abstract: A robot includes a supporting unit that rotatably supports a first passive shaft part, and a first arm fixed to the first passive shaft part, wherein the first arm has an internal space overlapping with the first passive shaft part in a direction orthogonal to a center shaft of the first passive shaft part.
    Type: Grant
    Filed: September 25, 2015
    Date of Patent: July 17, 2018
    Assignee: Seiko Epson Corporation
    Inventors: Daisuke Komatsu, Kazushige Akaha
  • Patent number: 9960068
    Abstract: An assembly used in a process chamber for depositing a film on a wafer including a pedestal assembly having a pedestal movably mounted to a main frame. A lift pad rests upon the pedestal and moves with the pedestal. A raising mechanism separates the pad from the pedestal, and includes a hard stop fixed to the main frame, a roller attached to the pedestal assembly, a slide moveably attached to the pedestal assembly, a lift pad bracket interconnected to the slide and a pad shaft extending from the lift pad, a lever rotatably attached to lift pad bracket, a ferroseal assembly surrounding the pad shaft, and a yoke assembly offsetting a moment to the ferroseal assembly when the lever rotates. When the pedestal assembly moves upwards, the lever rotates when engaging with the upper hard stop and roller, and separates the pad from the pedestal by a process rotation displacement.
    Type: Grant
    Filed: December 2, 2016
    Date of Patent: May 1, 2018
    Assignee: Lam Research Corporation
    Inventors: Paul Konkola, Karl F. Leeser, Easwar Srinivasan
  • Patent number: 9889556
    Abstract: A link structure includes a first link, a second link having an end that is connected to an end of the first link, a third link having an end that is connected to the end of the first link, and provided on a portion of the second link, a first rotary shaft partially provided in the first link, a first actuator configured to rotate the first link about the first rotary shaft; a second rotary shaft partially provided in the second link, the second rotary shaft being different from the first rotary shaft, and a second actuator configured to rotate the second link about the second rotary shaft, the first and second actuators being provided in the first link.
    Type: Grant
    Filed: March 18, 2015
    Date of Patent: February 13, 2018
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Sun-Ho Kim, Ki-Hoon Nam, Tae-Min Earmme, Seok Heo, Jae-Chul Hwang
  • Patent number: 9884726
    Abstract: Modular wafer transport and handling facilities are combined in a variety of ways deliver greater levels of flexibility, utility, efficiency, and functionality in a vacuum semiconductor processing system. Various processing and other modules may be interconnected with tunnel-and-cart transportation systems to extend the distance and versatility of the vacuum environment. Other improvements such as bypass thermal adjusters, buffering aligners, batch processing, multifunction modules, low particle vents, cluster processing cells, and the like are incorporated to expand functionality and improve processing efficiency.
    Type: Grant
    Filed: March 17, 2014
    Date of Patent: February 6, 2018
    Assignee: Brooks Automation, Inc.
    Inventors: Peter van der Meulen, Christopher C. Kiley, Patrick D. Pannese, Raymond S. Ritter, Thomas A. Schaefer
  • Patent number: 9868206
    Abstract: There is provided a carrier device that has a linkage arm mechanism, in particular, a carrier device that cools the linkage arm mechanism and can reduce the impact of radiation heat from a work that is in a high temperature state. A carrier device is a carrier device that includes a linkage arm mechanism and a pivot shaft, and the linkage arm mechanism includes lower arms and upper arms, and one ends of which are respectively connected to the lower arms, and horizontal movement members that support a work that is connected to the other ends of the upper arms, and cooling plates are respectively arranged between the upper arms, and the horizontal movement members.
    Type: Grant
    Filed: January 4, 2017
    Date of Patent: January 16, 2018
    Assignee: DAIHEN CORPORATION
    Inventors: Masaru Shimada, Sayako Takarabe, Hideki Matsuo
  • Patent number: 9827673
    Abstract: A robot controller able to suppress shaking of a tool tip of a robot due to operation of a travel axis. The robot controller includes a movement calculating part calculating an amount of movement of the travel axis and an amount of movement of the tool tip each time the travel axis operates in accordance with a command and a correcting part correcting a command value so that at least one command value of a speed and acceleration to the travel axis becomes smaller when the amount of movement of the travel axis is larger than a predetermined first threshold value and the amount of movement of the tool tip is smaller than a predetermined second threshold value.
    Type: Grant
    Filed: August 3, 2016
    Date of Patent: November 28, 2017
    Assignee: FANUC CORPORATION
    Inventor: Tsuyoshi Hannya
  • Patent number: 9764465
    Abstract: A transfer apparatus includes a base, a first holder, a second holder offset from the first holder in a first direction, and a movement mechanism for moving the first holder and the second holder relative to the base in a plane parallel to the first direction. The movement mechanism includes a swing member, a first link arm and a second link arm. The swing member is pivotally supported on the base. The first link arm is pivotally connected to the first holder. The first link arm is also connected to the swing member for pivoting about a first intermediate axis extending in a second direction perpendicular to the first direction. The second link arm is pivotally connected to the second holder. The second link arm is also connected to the swing member for pivoting about a second intermediate axis extending in the second direction. The first intermediate axis is offset from the second intermediate axis in the first direction.
    Type: Grant
    Filed: June 18, 2014
    Date of Patent: September 19, 2017
    Assignee: DAIHEN Corporation
    Inventor: Jun Iura
  • Patent number: 9751208
    Abstract: A robotic device is presented. The robotic device comprises a stationary base, a first arm rotationally mounted on the base for rotation about a first axis (I), a second arm rotationally mounted on the first arm for rotation about a second axis (II), in which second axis (II) is parallel to the first axis (I), a first driving device for driving the first arm to rotate about the first axis (I), and a second arm drive unit with a second driving device for driving the second arm to rotate about the second axis (I). The first driving device and the second driving devices are mounted stationary at the base. A linear drive unit moves the first arm and the second arm in a direction parallel to the first axis (I) and the second axis (II). The linear drive unit comprises a third driving device mounted stationary at the base.
    Type: Grant
    Filed: February 10, 2016
    Date of Patent: September 5, 2017
    Assignee: Roche Diagnostics Operations, Inc.
    Inventor: Matthias Edelmann
  • Patent number: 9742250
    Abstract: Motor modules for multi-arm robot apparatus are described. The motor modules can be used individually or stacked and assembled to make up one-axis, 2-axis, 3-axis, 4-axis, 5-axis, 6-axis motor assemblies, or more. One or more of the motor modules have a stator assembly including a stator received in the stator housing, and a rotor assembly abutting the stator assembly, the rotor assembly including a rotor housing, a drive shaft, a bearing assembly supporting the drive shaft, and a rotor coupled to the drive shaft. A vacuum barrier member is positioned between the rotor and the stator. Multi-axis motor drive assemblies, multi-axis robot apparatus, electronic device manufacturing systems, and methods of assembling drive assemblies are described, as are numerous other aspects.
    Type: Grant
    Filed: November 26, 2013
    Date of Patent: August 22, 2017
    Assignee: Applied Materials, Inc.
    Inventor: Izya Kremerman
  • Patent number: 9656386
    Abstract: A robotic transport apparatus including a drive system including at least one harmonic motor assembly, at least one drive shaft coupled to the at least one harmonic motor assembly, at least one robotic arm mounted to the at least one drive shaft, where the robotic arm is located inside a sealed environment, and at least one atmospheric isolation seal seated on an output surface of the drive system and forming an atmospheric barrier disposed so that the at least one drive shaft extends through the atmospheric barrier into the sealed environment and the at least one harmonic motor assembly is located outside the sealed environment, wherein the robotic transport apparatus is a high capacity payload transport apparatus.
    Type: Grant
    Filed: October 11, 2011
    Date of Patent: May 23, 2017
    Assignee: Brooks Automation, Inc.
    Inventors: Robert T. Caveney, Ulysses Gilchrist
  • Patent number: 9623555
    Abstract: A substrate processing apparatus including a frame, a first arm coupled to the frame at a shoulder axis having a first upper arm, a first forearm and at least one substrate holder serially and rotatably coupled to each other, a second arm coupled to the frame at the shoulder axis where shoulder axes of rotation of the arms are substantially coincident, the second arm having a second upper arm, a second forearm and at least one substrate holder serially and rotatably coupled to each other, and a drive section connected to the frame and coupled to the arms, the drive section being configured to independently extend and rotate each arm where an axis of extension of the first arm is angled relative to an axis of extension of the second arm substantially at each angular position of at least one of the first arm or the second arm.
    Type: Grant
    Filed: November 10, 2011
    Date of Patent: April 18, 2017
    Assignee: Brooks Automation, Inc.
    Inventors: Alexander G. Krupyshev, Robert T. Caveney, Martin R. Elliott, Christopher Hofmeister
  • Patent number: 9586326
    Abstract: A robot includes a plurality of lines respectively having connecting portions, which are connected to an outer apparatus, at end portions, and at least one line distribution board to which the connecting portions of the plurality of lines are attached. The line distribution board includes a plurality of line distribution board elements, which can be separated from each other, and to which the connecting portion of at least one of the plurality of lines is attached.
    Type: Grant
    Filed: March 27, 2014
    Date of Patent: March 7, 2017
    Assignee: Fanuc Corporation
    Inventor: Takeshi Hasuo
  • Patent number: 9561586
    Abstract: An articulated robot and a conveying device capable of increasing conveying speed are provided. An articulated robot conveys a workpiece from a first processing part to a second processing part linearly disposed with respect to the first processing part. The articulated robot includes: an extensible arm; and a grip part (3) provided on a lower side of a distal end of the arm and for gripping the workpiece, in which the grip part is advanced from its one end into the first processing part, and also the grip part is advanced from its another end opposite to the one end into the second processing part.
    Type: Grant
    Filed: March 26, 2013
    Date of Patent: February 7, 2017
    Assignee: Ulvac, Inc.
    Inventor: Yukihito Tashiro
  • Patent number: 9505139
    Abstract: A robot for handling loads, comprising an end effector, three actuators, each with a single degree of freedom, three arms, each of them pivotably connected to an actuator and on the other side pivotably connected to the end effector, a frame carrying the actuators; and a control unit connected to the actuators. Also, an assembly of plural of these robots.
    Type: Grant
    Filed: February 13, 2014
    Date of Patent: November 29, 2016
    Assignee: Oldin Beheer B.V.
    Inventor: Peter Paul De Bie
  • Patent number: 9508581
    Abstract: An object is to transmit an operation of a first parallel link to a second parallel link through a plurality of rotatably supported arms, to prevent the second parallel link from meandering or rolling so that a wafer can be transported smoothly. Arms (61 to 63) of a transmission arm unit (6) are provided for transmitting an operation of a first parallel link (4) to a second parallel link (5). An operation of the first parallel link (4) is transmitted to the second parallel link (5) so that an angle between an arm (53) and an arm (52) in the second parallel link(5) always coincides with an angle between an arm (41) and an arm (42) in the first parallel arm unit (4).
    Type: Grant
    Filed: December 15, 2011
    Date of Patent: November 29, 2016
    Assignee: TAZMO CO., LTD.
    Inventors: Katsuhiro Yamazoe, Shinichi Imai, Kosuke Sakata, Yoshiki Nishijima, Hiroaki Tsukimoto, Kohsaku Saino
  • Patent number: 9455175
    Abstract: A conveying apparatus includes a holding plate having a holding surface destined to face a surface of a wafer to be held; a restriction member on one end side of the holding surface adapted to contact the periphery of the wafer so as to restrict movement of the wafer; and a moving unit adapted to move the holding plate. At the holding surface, a non-contact type suction holding part is adapted to jet a fluid obliquely to the surface of the wafer to be held so as to move the wafer toward the restriction member and generate a negative pressure between the holding surface and the surface to be held, thereby holding the wafer by suction. The fluid is jetted from the suction holding part so as to abut the wafer against the restriction member, thereby positioning the wafer at a predetermined position on the holding plate.
    Type: Grant
    Filed: January 12, 2016
    Date of Patent: September 27, 2016
    Assignee: Disco Corporation
    Inventors: Wu Bin, Kodai Mikami, Shojiro Yamada
  • Patent number: 9403274
    Abstract: A robotic device having an arm including an actuator and inertial sensor, a first calculator adapted to calculate an angular velocity and an angular acceleration of the actuator based on a rotational angle data from an angle sensor, a second calculator adapted to calculate one of an angular velocity and an angular acceleration of the arm based on an output detected by the inertial sensor, and a comparator adapted to compare one of the angular velocity and the angular acceleration calculated by the first calculator and one of the angular velocity and the angular acceleration calculated by the second calculator with each other, and it is determined that the inertial sensor is at fault if an absolute value of the difference between the actuator and the arm in one of the angular velocity and the angular acceleration in the comparison section is larger than a threshold value.
    Type: Grant
    Filed: January 3, 2014
    Date of Patent: August 2, 2016
    Assignee: Seiko Epson Corporation
    Inventor: Shigenori Sasai
  • Patent number: 9399287
    Abstract: A spatial-link-type manipulator, comprising a drive device (10), links and rotating shafts connected between the links; the drive device comprises a connecting shaft (13); the connecting shaft comprises an outer wall (131) and an inner wall (133); each link comprises a large boom (20), a small boom (30), an oblique large boom (60), an oblique small boom (50) and a terminal component (40); the large boom and the oblique large boom are respectively a straight link; the small boom and the oblique small boom are respectively a bent link; the large boom, the small boom and one end of the terminal component form a primary motion chain; the oblique large boom, the oblique small boom and the other end of the terminal component form a secondary motion chain; the drive device drives the large boom to move around a rotating shaft A so as to drive the primary motion chain, and drives the secondary motion chain via the terminal component so as to realize rectilinear motion of the terminal component.
    Type: Grant
    Filed: July 19, 2012
    Date of Patent: July 26, 2016
    Assignee: SHENYANG SIASUN ROBOT & AUTOMATION CO., LTD.
    Inventors: Daokui Qu, Yucong Zhu, Fengli Wang, Weijin Zhu, Yitian Sun, Jishun Dong, Junshan Bao, Xinrong Shang
  • Patent number: 9346171
    Abstract: A substrate transport apparatus including a first substrate holder and a second substrate holder capable of respectively holding substrates includes a first drive arm which has first and second end portions, and is rotatable with rotation of a first drive shaft, a second drive arm which has a third end portion spaced apart from the first end portion by a first distance, and a fourth end portion spaced apart from the second end portion by a second distance, and is rotatable with rotation of a second drive shaft coaxial with the first drive shaft, two first driven arms coupled to the first substrate holder, and two second driven arms coupled to the second substrate holder.
    Type: Grant
    Filed: January 29, 2013
    Date of Patent: May 24, 2016
    Assignee: CANON ANELVA CORPORATION
    Inventors: Kazuhito Watanabe, Yukihito Tashiro, Satoshi Nakamura, Daisuke Kobinata, Toshiaki Sasaki, Naoyuki Nozawa
  • Patent number: 9325228
    Abstract: Embodiments include multi-arm robots for substrate transport systems that include a boom, first and second forearms rotationally coupled to the boom, the second forearm being shorter than the first forearm, a first wrist member rotationally coupled to the first forearm, and a second wrist member rotationally coupled to the second forearm. Each of the boom, first and second forearms, and the first and second wrist members are configured to be independently rotated to carry out substrate motion profiles. Electronic device processing systems and methods of transporting substrates are described, as are numerous other aspects.
    Type: Grant
    Filed: November 26, 2013
    Date of Patent: April 26, 2016
    Assignee: Applied Materials, Inc.
    Inventors: Jeffrey C. Hudgens, Izya Kremerman, Jeffrey A. Brodine, Damon Keith Cox
  • Patent number: 9302395
    Abstract: A robot system according to an aspect of the embodiments includes a plurality of work holding units and a heat insulating member. The work holding units each hold a work to be conveyed on one surface and are arranged vertically one over another in some cases during conveying of the work. The heat insulating member is provided on another surface side of at least one of the work holding units.
    Type: Grant
    Filed: September 11, 2012
    Date of Patent: April 5, 2016
    Assignee: KABUSHIKI KAISHA YASKAWA DENKI
    Inventors: Ryuji Ando, Kazunori Hino, Akihiro Furutani
  • Patent number: 9299598
    Abstract: A robot with an integrated aligner is provided that allows for the alignment of a semiconductor wafer while the semiconductor wafer transits between multiple stations. The robot with an integrated aligner may contain a rotational wafer support configured to rotate and/or translate, one or multiple robotic arms, and a sensor. The robot may pick and place the semiconductor wafer with the robotic arm from or into a station and from or onto the rotational wafer support. The robot may be configured to rotate the semiconductor wafer into a desired orientation when the semiconductor wafer is on the rotational wafer support. The rotation of the semiconductor wafer into a desired orientation may be aided the sensor. The robot may have a positioning mechanism which moves it between different positions in a semiconductor tool.
    Type: Grant
    Filed: December 23, 2013
    Date of Patent: March 29, 2016
    Assignee: Lam Research Corp.
    Inventor: Richard M. Blank
  • Patent number: 9289898
    Abstract: A horizontal multi-joint robot includes: a first joint capable of swiveling around a first axis; a second joint capable of swiveling around a second axis that is parallel to and spaced apart from the first axis; and a duct connected between the first joint and the second joint. The first joint has a first connecting portion forming a predetermined angle relative to the first axis. The second joint has a second connecting portion forming a predetermined angle relative to the second axis. The duct has a first end and a second end. The first end is connected to the first connecting portion. The second end is connected to the second connecting portion.
    Type: Grant
    Filed: October 22, 2013
    Date of Patent: March 22, 2016
    Assignee: Seiko Epson Corporation
    Inventor: Masatoshi Ono
  • Patent number: 9281222
    Abstract: A wafer handling system may include upper and lower linked robot arms that may move a wafer along a nonlinear trajectory between chambers of a semiconductor processing system. These features may result in a smaller footprint in which the semiconductor processing system may operate, smaller transfer chambers, smaller openings in process chambers, and smaller slit valves, while maintaining high wafer throughput. In some embodiments, simultaneous fast wafer swaps between two separate chambers, such as load locks and ALD (atomic layer deposition) carousels, may be provided. Methods of wafer handling are also provided, as are other aspects.
    Type: Grant
    Filed: March 10, 2014
    Date of Patent: March 8, 2016
    Assignee: Applied Materials, Inc.
    Inventors: William Tyler Weaver, Malcolm N. Daniel, Jr., Robert B. Vopat, Jason M. Schaller, Jacob Newman, Dinesh Kanawade, Andrew J. Constant, Stephen C. Hickerson, Jeffrey C. Hudgens, Marvin L. Freeman
  • Patent number: 9267585
    Abstract: Implementations and techniques are generally disclosed for an actuator comprising: a first element, a second element, a third element, a first joint provided between the first element and the second element, a second joint provided between the second element and the third element, and a motor operably coupled to the first joint and configured such that the second element rotates with respect to the first element about a first rotational axis when the motor rotates, wherein the first joint is operably coupled to the second joint and configured such that the third element can rotate with respect to the second element about a second rotational axis when the motor rotates.
    Type: Grant
    Filed: June 2, 2011
    Date of Patent: February 23, 2016
    Assignee: EMPIRE TECHNOLOGY DEVELOPMENT LLC
    Inventor: Masaaki Mihara