Abstract: A fastening automation apparatus for an upper electrode of an etching facility includes a ring, and a plurality of fastening modules movably secured to the ring and configured to be movable in a radial direction on the ring. Each fastening module includes a first frame that is movable in a radial direction on the ring, a driving source installed below the first frame, a driving shaft that transmits a driving force from the driving source, a power transmission unit connected to the driving shaft, and a fastening bit connected to the power transmission unit and configured to be rotated. The plurality of fastening modules are configured to operate simultaneously to install the upper electrode in the etching facility.

Abstract: The present invention relates to an electronic device pick-and-place system and an electronic device testing apparatus having the same, comprising a plurality of pick-and-place heads, a plurality of negative pressure generators and an air pressure regulating valve. Each pick-and-place head has a pick-and-place port; the plurality of negative pressure generators are communicated with the plurality of pick-and-place ports of the plurality of pick-and-place heads respectively; an inlet end of the air pressure regulating valve is communicated with an air pressure source, and an outlet end of the air pressure regulating valve is communicated with the plurality of negative pressure generators; the air pressure regulating valve can be used to adjust the suction forces of the pick-and-place ports of the pick-and-place heads in a batch. Accordingly, the suction forces and blowing forces of the pick-and-place ports of the pick-and-place heads can be adjusted in a batch.

Abstract: Examples described herein are directed to methods, computer-readable media, and systems for controlling an end of arm tool with one or more suction zones to pick up an item. Sensor data regarding the item is obtained. The sensor data is used to determine which of the one or more suction zones should be used to pick up the item. A rotational orientation is also determined that orients the determined suction zone(s) with the item. The end of arm tool is then instructed to create a suction force at the one or more suction zones and to pick up the item using the suction force.

Abstract: A component mounting machine includes a mark imaging camera that images a board mark of a circuit board and has a function of identifying an identification target, such as a character attached to an upper surface of a component supplied by a component supply device. An illumination light source illuminates the identification target on the upper surface of the component imaged by the mark imaging camera and is attached to a lower portion of an electric component holding frame provided to protrude to the side of the mounting head. As the identification target on the upper surface of the component, which is illuminated by the illumination light source from obliquely above, is imaged by the mark imaging camera from above and the image is processed, the identification target on the upper surface of the component is identified.

Abstract: A storage system configured to house a plurality of containers housing inventory items includes support members, a first set of parallel rails to support a mobile, manipulator robot, and a fluid supply line having a plurality of valves disposed within the fluid supply line. Each of the valves having a closed condition in which the supply line is in fluid isolation from an outside environment and an open condition in which the supply line is in fluid communication with the environment such that the supply line is configured to supply fluid to a mobile, manipulator robot. Mobile, manipulator robots for retrieving inventory items stored within the containers and retrieval methods are also disclosed herein.

Abstract: Replaceable contact pads of end effectors are provided. The contact pads support substrates in electronic device manufacturing. The contact pad includes a contact pad head having a contact surface configured to contact a substrate, a shaft coupled to the contact pad head, the shaft including a shaft indent formed between an underside of the contact pad head and a shaft end, and a circular securing member received around the shaft and seated in the shaft indent and configured to secure the contact pad to the end effector body. End effectors including replaceable contact pads and maintenance methods are described, as are additional aspects.

Abstract: A vacuum lifter apparatus for lifting sheet material articles, comprises an upper chassis joined to a substantially planar lower suction plate and an airflow suction system for conveying vacuum air pressure to the suction plate. The suction plate comprises a lower side and an upper side, the upper side of the suction plate being affixed to the chassis, and the suction plate lower side providing a downwardly oriented and substantially planar suction lifting surface for making contact with the upper surface of said articles, said suction lifting surface comprising a plurality of laterally adjacent portions, each of said portions comprising a plurality of orifices through which, in use, air is drawn along airflow paths by the airflow suction system to provide a suction lifting pressure.

Abstract: To manufacture a device by picking and placing semiconductor devices from a carrier substrate to a target substrate using touch down sensors, a pick-up head including touch down sensors and the semiconductor devices on the carrier substrate are moved relative to each other to contact the carrier substrate with the touch down sensors. Signals from each touch down sensor indicating a degree of deformation of each touch down sensor caused by the contact with the carrier substrate are used to determine an orientation of the pick-up head by processing the signals, and adjust the orientation of the pick-up head based on the determined orientation to attach the semiconductor devices onto the pick-up head. In some embodiments, the touch down sensors are piezoelectric benders.

Abstract: A system is disclosed for providing dynamic vacuum control to an end effector of an articulated arm. The system includes a first vacuum source for providing a first vacuum pressure with a first maximum air flow rate, and a second vacuum source for providing a second vacuum pressure with a second maximum air flow rate, wherein the second vacuum pressure is higher than the first vacuum pressure and wherein the second maximum air flow rate is greater than the first maximum air flow rate.

Abstract: The automatic analysis system comprise a storage device configured to store a plurality of reaction cuvettes intended to contain biological liquids samples to analyze; at least one samples processing station, comprising at least one receiving cavity which is downwardly open and configured to receive and house at least partially one reaction cuvette; and a displacement device configured to displace a reaction cuvette, the displacement device being further configured to unload a reaction cuvette out of the storage device and to load and unload a reaction cuvette into and out of the at least one receiving cavity of the at least one samples processing station via the respective introduction opening.

Abstract: Method for holding substrates on a flatbed printing system. After positioning the substrates on the substrate support surface, a leak air area not covered by the substrates is covered by positioning a flexible cover device at least over the leak air area, and preferably over the substrates as well. Thereby, air flow through the through-holes is prevented. An under-pressure is then applied to the through-holes, sucking the substrates against the substrate support surface. The flexible cover device is then withdrawn to expose the substrate for printing while the under-pressure is maintained. It was found that despite the additional amount of air passing through the through-holes uncovered by the withdrawal of the flexible cover device, the under-pressure surprisingly remained sufficient to properly hold the substrates for printing. An additional advantage is that the cover device may be applied easily and rapidly over the leak air area and substrates at once.

Abstract: A workpiece referencing system and method, the system having a workpiece support assembly for supporting a plurality of workpieces, wherein the support assembly includes a support platform and a plurality of support members which are disposed to the support platform, each support member being configured to support an individual workpiece; and a workpiece referencing assembly for referencing the workpieces, as supported by the support assembly, to predetermined positions; wherein the support members each includes a body which includes a support surface which supports a workpiece and a resilient coupling which resiliently couples at least an upper part of the body relative to the support platform, such that the at least part of the body is displaceable relative to the support platform from a first, unbiased position to a second, biased reference position by operation of the referencing assembly, and, when released, the at least part of the body returns to the first, unbiased position.

Abstract: A workpiece conveyance device is used for a press device. The workpiece conveyance device includes a support component, first and second moving members, a driver, and a transmission mechanism. The support component supports a holder that detachably holds a workpiece. The first moving member pivotably supports the support component. The first and second moving members are movable in the up and down direction. The driver moves the second moving member in the up and down direction. The transmission mechanism transmits an up and down movement of the second moving member to the first moving member so as to move the first moving member in the up and down direction in conjunction with the up and down movement of the second moving member. The transmission mechanism causes an amount of movement of the first moving member to be greater than an amount of movement of the second moving member.

Abstract: A leak preventing appliance and method for preventing liquid from leaking out of a damaged tank (2). The appliance comprises a suction head (4) to be pressed against an outer wall (5) of the tank under the effect of an underpressure generated by a vacuum pump (3). The suction head comprises a first chamber (6) and a second chamber (9) arranged around the first chamber. Each chamber has an opening (7, 10) intended to face said tank wall. The suction head is attachable to the tank wall under the effect of a reduced pressure produced in the second chamber by the vacuum pump. The first chamber is connectable to the vacuum pump via a valve device (8), which is configured to keep the first chamber connected to the vacuum pump when a reduced pressure produced in the second chamber by the vacuum pump is below a threshold value and to otherwise keep the first chamber disconnected from the vacuum pump.

Abstract: A pickup apparatus includes a plurality of pickers sliding along a first direction and a space adjuster including a plurality of space adjusting plates. Each picker includes a protruding portion combined with a picker body, and each of the space adjusting plates is between a respective pair of adjacent pickers. The protruding portion of each picker contacts sidewalls of adjacent space adjusting plates. At least one of the space adjusting plates moves along a second direction crossing the first direction. A width in the first direction of each space adjusting plate varies along the second direction.

Abstract: A conveying device provided with a pair of shift frames arranged so as to be orthogonal to an advancing direction of a work piece, a pair of feed frames arranged so as to be orthogonal to the shift frames, double-speed mechanisms attached to the feed frames, and grasping mechanisms attached to the double-speed mechanisms. Additionally, the device has feed frames that are slidable relative to the shift frames, and double-speed mechanisms that are slidable to the feed mechanisms. The transportation apparatus also has a fast operating speed and reduces the interference region with a press apparatus as small as possible is provided.

Abstract: An apparatus for handling or transferring a semiconductor component. The apparatus comprises a first structure and a second structure coupled thereto. The first structure and the second structure define a vacuum chamber therebetween. The second structure comprises at least one module coupled thereto. Each module comprises a passageway defined therethrough. Vacuum is applied through the passageway for facilitating pick up of the semiconductor component at a first position and for securing the semiconductor component to the module during displacement of the module from the first position to a second position. The apparatus comprises a plunger. Displacement of the plunger from a retracted position to an extended position impedes fluid communication between the passageway of the module and the chamber. Displacement of the plunger to the extended position further causes purging of air through the passageway of the module to thereby detach the semiconductor component from the module.

Abstract: A glass substrate transfer system and a robot arm thereof are provided. The robot arm includes: a substrate fork, a moving assembly and a vacuum chuck. The substrate fork is for taking a glass substrate. The moving assembly is connected with the substrate fork and for making the substrate fork to be moved in a working space. The vacuum chuck is disposed on the substrate fork and for sucking the glass substrate. The vacuum chuck is formed with a fluid path, and the fluid path is contained with a cooling fluid to dissipate heat of the vacuum chuck. The glass substrate transfer system and its robot arm provided by the present invention cool the vacuum chuck in time and thus can avoid affecting the product quality caused by the vacuum chuck being overheated, and the product yield is improved.

Abstract: An adsorption head for a surface mounting device, including: a main body; a shaft which moves in a direction of a longitudinal axis of the shaft and rotates around the longitudinal axis mounted on the main body, and the shaft includes a lower shaft and an upper shaft. The lower shaft is detachably attached to the upper shaft; and an adsorption nozzle which adsorbs electronic parts mounted on a lower end of the shaft, wherein an air passage connected to the adsorption nozzle is provided in the lower shaft.

Abstract: A transfer device can control a posture of a holding table accurately and prevent the holding table from wobbling even when the holding table is moved at a high speed. A first posture holding link 56 and a second posture holding link 57 are provided at the transfer device. One end of the first posture holding link 56 and one end of the second posture holding link 57 are rotatably connected to a connecting shaft 53. Rails 51 and 52 are fastened to a base plate 27 of the holding table 21. Rollers 54 and 55 are connected to the connecting shaft 53 to be rotated about an axis line. The rollers 54 and 55 are in contact with roller driving portions 51a and 52a. When the holding table 21 is moved, the rollers 54 and 55 are rotated on the roller driving portions 51a and 52a.

Abstract: A substrate processing apparatus including a chamber capable of holding an isolated atmosphere and having a front and rear disposed along a longitudinal axis and a transport apparatus located in the chamber, and having twin scara arms and a drive section with a coaxial drive shaft assembly, each shaft of which being operably connected to at least one rotatable link of both scara arms to move the twin scara arms, wherein movement of one of the twin scara arms mirrors movement of another of the twin scara arms across the longitudinal axis.

Abstract: A pick-and-place head for picking a plurality of work-pieces from at least one first location and for placing the plurality of work-pieces at least one second location is disclosed. The pick-and-place head exhibits a plurality of nozzles, wherein each nozzle is configured to engage one of the work-pieces by action of a vacuum. At least one nozzle has an individual vacuum supply and at least two further nozzles have a shared vacuum supply. A corresponding method is also disclosed, the method including the steps of approaching at least one of the plurality of work-pieces with a respective nozzle and then starting generation of a vacuum at each respective nozzle. The generation of vacuum in at least one nozzle is achieved by an individual vacuum supply, and generation of vacuum in at least two further nozzles is achieved by a shared vacuum supply of the at least two further nozzles.

Abstract: A gripper assembly for use with a moving device is disclosed. The moving device can be a mechanical device such as a robot. The gripper assembly includes a platform and an elongate arm extending from the platform. The elongate arm is in the form of least one elongate member. Each elongate member has a body which has a proximal end and an opposed distal end. A gripping mechanism is rotatably supported relative to the arm, and includes a holder having a pivoting arm pivotably joined to the body in the region of the distal end of the body. An actuator is in operable communication with the pivoting arm to impart pivotable movement to the pivoting arm and rotational movement to said gripping mechanism about a horizontal axis upon actuation of the actuator. The gripper assembly may have a center of mass substantially aligned with a vertical rotation axis of the gripper assembly.

Abstract: A PNP apparatus may include a robotic arm, and a PNP tool head carried by the robotic arm. The PNP tool head may include a body configured to apply bonding pressure to a first area of an electronic device, and a pick-up tip movable between an extended position and a retracted position relative to the body as the pick-up tip rests against a second area of the electronic device. The pick-up tip may define a vacuum passageway therethrough to couple a vacuum source to the second area of the electronic device.

Abstract: Provided is a component loading apparatus which includes: a work table comprising a working plane; a component recognizer configured to recognize components placed on the working plane of the work table; a head configured to suck the components; and a tray support for supporting a tray on which the components sucked by the head are loaded.

Abstract: A method of peeling an electronic component. The method includes a step of, when the electronic component is adhered onto a first main surface of a tape member, bringing a bellowphragm into contact with a second main surface, which is the other main surface of the tape member; and a step of, after the bellowphragm is brought into contact with the second main face, deforming the bellowphragm and the tape member by supplying a fluid to the bellowphragm to thereby peel the electronic component from the tape member.

Abstract: Systems, apparatus and methods including pneumatic end effectors for transporting substrates between system components of electronic device manufacturing systems are provided. In one aspect, an end effector has a base adapted to be connected to a robotic component, and one or more pneumatic suction elements positioned on the base. Applying a pneumatic source to the pneumatic suction element draws a substrate into contact with contact pads of the end effector. Methods and systems, as well as numerous other aspects are disclosed.

Abstract: In a device for unstacking plate-shaped parts (12), in particular sheet metal blanks, comprising at least one supply station (13) in which at least one stack (14) of plate-shaped parts (12) is located and at least one conveyor station (15) on which the plate-shaped parts (12) are transported further in an unstacked manner, an unstacking unit (17) being provided for transferring the plate-shaped parts (12) between the supply station (13) and the conveyor station (15), said unstacking unit engaging the stack of parts (14) and removing individual plate-shaped parts (12) while unstacking the stack of parts (14) and depositing them in the conveyor station (15), the unstacking unit (17) comprises two robots (18a, 18b) working independently of each other, which alternately engage a common stack of parts (14) of the supply station (13) and are controlled by a control unit (19) in such a way that a first or a second robot (18a, 18b) removes a plate-shaped part (12) from the stack of parts (14) while the first robot (1

Abstract: A rotary end effector for use for the high speed handling of workpieces, such as solar cells, is disclosed. The rotary end effector is capable of infinite rotation. The rotary end effector has a gripper bracket, capable of supporting a plurality of grippers, arranged in any configuration, such as a 4×1 linear array. Each gripper is in communication with a suction system, wherein, in some embodiments, each gripper can be selectively enabled and disabled. Provisions are also made to allow electrical components, such as proximity sensors, to be mounted on the rotating gripper bracket. In another embodiment, an end effector with multiple surfaces, each with a plurality of grippers, is used.

Abstract: A method for positioning electronic devices into compartments of an input medium is disclosed. At least one electronic device is packable in a single compartment of the input medium. Known positions on an upper side of the input medium are imaged by an inspection device. Actual position data of the compartments of the input medium are calculated on the basis of images of the known positions, given target position data of the known positions, and given target position data of the compartments of the input medium. A pick and place device for the electronic devices is controlled on the basis of the calculated actual position data of the compartments of the input medium. A method for determining the actual positions of compartments of an output medium is disclosed with analogous steps, whereby the electronic devices are picked-up from compartments of the input medium, transferred to compartments of the output medium, and placed into the compartments of the output medium.

Abstract: An adsorbent in a board conveying hand includes: a pad for adsorbing a board in contact with the board; and an elastic member interposed between the fork and the pad and provided with an adsorption passage for allowing an adsorbing fluid to pass between the fork and the pad, wherein a part of the elastic member is deformed, thus arbitrarily varying a projection amount of the pad from the fork.

Abstract: Disclosed is a transfer device for holding an object. The transfer device comprises: i) a housing having a housing surface; ii) at least one inlet conduit having an inlet for introducing a gas into the at least one inlet conduit; iii) a plurality of sets of outlet conduits, each set of outlet conduits being in fluid communication with the at least one inlet conduit and having a plurality of outlets for directing the gas out of the outlet conduits. In particular, the respective outlets of the sets of outlet conduits are arranged in a direction along the housing surface and away from a centre region relative to the respective sets of outlet conduits, so that a laminar gas flow that is flows along the housing surface generates a pressure differential which creates a force towards the centre region to hold the object against the housing surface. A gang picker is also disclosed.

Abstract: There is provided a component mounting apparatus, which includes: a nozzle which sucks a component; a nozzle supporting member, on which the nozzle is installed, which moves in a vertical direction with respect to an upper surface of a substrate on which the component sucked at the nozzle is mounted; an optical system which captures an image of a leading edge portion of the nozzle where the component is sucked in a component mounting operation, from a side direction, such that an optical axis of the optical system is inclined at a predetermined angle with respect to a sucking surface of the nozzle; and an analyzer which analyzes the image of the leading edge portion to determine whether a sucking state of the component sucked by the nozzle is normal or abnormal.

Abstract: A system for loading/unloading sheets is disclosed, some of which also being of metal, and handling method thereof, serving a laser cutting center. The system includes a pair of rails (1, 2), supported at a preset height above a feeding tray (T) of the cutting center, whereon at least one Cartesian robotized hand is movably mounted, capable of moving along horizontal axes X and Y as well as along a vertical axis Z, mutually orthogonal, and including at least two bridge cranes (3, 4) sliding along the rails (1, 2) each of which supports at least one pair of robotized hands (5-8), and the robotized hands (5-8) have an electromagnetic pick-up head which may be coupled with a suction-cup device (103). Feeding tray (T) consists of bars whereon small tesserae (204) of ceramic material are fitted.

Abstract: A robot system includes a robot hand and a controller. The robot hand includes a plurality of holders configured to hold a workpiece placed on a workpiece placement stand using at least one of electromagnetic force and suction force. The controller is configured to control the plurality of holders to hold the workpiece while controlling the plurality of holders to switch between operation mode and nonoperation mode in accordance with at least one of a shape and a size of the workpiece.

Abstract: A media feeder system for use with a media cutting system having a cutting table includes an upper out-feed tray and a lower in-feed tray bins are disposed laterally adjacent one side of the cutting system table. A bi-directional media transport system transports media in an in-feed direction from the in-feed tray to the cutting table surface and removes media from the cutting table surface in an out-feed direction from the cutting table surface to the out-feed tray. The media transport system includes a sheet acquisition system having gripping apparatus that adjust for a height of the media held in the bins.

Abstract: A pick up tip assembly that includes a plurality of overlapping petals defining a petal enclosure having a distal end opening A displaceable member is engagable with the plurality of petals and the size of the distal end opening is adjustable by displacement of the displaceable member.

Abstract: A picking system for the automated picking of articles, comprising a detection station for detecting the position of an article to be picked on a supplying conveyor, and an articulated arm gripper for picking up the article from the storage loading implement from the supplying conveyor and for depositing the article in the order loading implement on a discharge conveyor. The articulated arm gripper comprises an essentially upright longitudinal arm and an articulated arm which can be bent about an angle of articulation and on which a gripping device for gripping the article is provided. The articulated arm gripper is designed for picking up the at least one article to be picked from a storage loading implement which is transported on the supplying conveyor. The longitudinal arm of the articulated arm gripper is at least twice as long as the articulated arm.

Abstract: An order picking system having a system for transferring an article from a source container to a reception container. A article holder is configured for taking the article from the source container and placing the article into the reception container. A protection case is movable between a source position above the source container and a reception position above the reception container. A gate is configured to provide an opening in a bottom portion of the protection case when the gate is in an open state, and to close the opening when the gate is in a closed state. The protection case is configured for moving from the source position to the reception position when the article holder transfers the article from the source container to the reception container. The article holder is configured to hold the article above the bottom portion of the protection case when the article holder is moved from the source container to the reception container.

Abstract: The present invention provides an unpacking device for glass substrate and which includes a bracket and a plurality of sucking heads mounted thereon. A plurality of altitude sensors is incorporated to trigger an alarm if the altitude sensors are not synchronized during the pickup operation.

Abstract: A microscope slide holding cassette includes a main body for surrounding and protecting microscopes, and shelves capable of holding the microscope slides. The shelves have support members that extend outwardly in order to support label ends of slides. Catches carried at the end of the support members are capable of limiting movement of the slides during transport of the cassette. To transport slides to different workstations, a pickup device can use a vacuum to pick up a slide without contacting areas of the slide that may have glue. The pickup device can load and unload the cassette. The pickup device can have a low-profile configuration in order to access relatively small spaces for processing flexibility.

Abstract: Systems and methods for transferring a micro device from a carrier substrate are disclosed. In an embodiment, a micro pick up array mount includes a pivot platform to allow a micro pick up array to automatically align with a carrier substrate. Deflection of the pivot platform may be detected to control further movement of the micro pick up array.

Abstract: The present invention discloses a transportation system for moving a flat panel and a mechanical apparatus thereof and a method for moving the same. The mechanical apparatus comprising a mechanical arm and the mechanical arm comprise a first vacuum suction nozzle for sucking a first flat panel, a second vacuum suction nozzle for sucking a second flat panel, and a loop system connects to the first vacuum suction nozzle and the second vacuum suction nozzle. The first vacuum suction nozzle is disposed at a first position of the mechanical arm, and the second vacuum suction nozzle is disposed at a second position of the mechanical arm. The present invention can use one mechanical arm to carry and move two flat panels at the same time in order to increase the moving efficiency.

Abstract: A system creates streams of articles on a laning conveyor having differentiated lanes from groups of articles on a feed, the groups each including articles arranged in a grid including at least two rows. The system includes an end effector on a robot arm. The robot arm is configured to simultaneously lift all of the articles in all of the rows of one of the groups from the feed. The end effector has individually actuatable row portions corresponding to the locations of the articles in the groups. The end effector is configured to sequentially place the lifted articles of each of the rows on the laning conveyor in a given lane of the laning conveyor. Related end effectors and methods are disclosed.

Abstract: A PNP apparatus may include a robotic arm, and a PNP tool head carried by the robotic arm. The PNP tool head may include a body configured to apply bonding pressure to a first area of an electronic device, and a pick-up tip movable between an extended position and a retracted position relative to the body as the pick-up tip rests against a second area of the electronic device. The pick-up tip may define a vacuum passageway therethrough to couple a vacuum source to the second area of the electronic device.

Abstract: The invention relates to an automated method for positioning eggs on a tray that comprises the automated detection of the presence/absence of eggs in the cells of a tray, and the picking-up of eggs from a supply and the placement thereof in the empty cells of a tray. The invention also relates to a system or positioning eggs on a stabilizing tray, the tray including evenly distributed cells in which the eggs are placed, one or more cells being likely not to contain eggs, this information being stored in an information processing unit, wherein said system includes a means in the form of a robot having an egg pick-up head that are driven by the information processing unit in order to pick up eggs from a supply tray and to place them in the empty cells of the stabilizing tray.

Abstract: A tool mounting system having at least one support tool structure with at least one tool connected to each of the at least one tool support. A first and second mounting portion is connected to each of the at least one tool support structure and is connectable to a first and second mount on a base, respectively. The first and second mounting portions have particular mounting characteristics for each of the at least one support tool structure such that the first and second mounting portions are only correspondable to the first and second mounts of the base to ensure the proper position of the at least one tool support structure relative to the base.

Abstract: A suction gripper arrangement includes several suction gripper arms arranged in a row, which, at their lower ends, each have a suction gripper head with an abutment surface for abutting an article to be sucked onto the suction gripper head. The abutment surfaces of the suction gripper heads of the suction gripper arms neighboring each other are arranged in different planes. Moreover, the invention relates to a suction gripper arrangement in which at least one of the suction gripper arms is connected to an actuator via a lever, wherein both between the lever and the suction gripper arm, and also between the lever and the actuator, respectively, a pivot joint is formed, and wherein the lever is composed of at least to lever parts.

Abstract: A robotic placement machine including a base operably connected to the Y axis actuator and the X axis actuator, a first Z axis actuator coupled to the first end of the base, the first Z axis actuator capable of moving up and down a first Z axis, a second Z axis actuator coupled to the second end of the base, the second Z axis actuator capable of moving up and down a second Z axis, and a pick and place plate operably connected to the first Z axis actuator and the second Z axis actuator, wherein the first Z axis actuator and the second Z axis actuator are each capable of moving independently of each other to tilt the pick and place plate is provided. Furthermore, a system comprising a first machine, second machine, and third machine to eliminate air bubbles when bonding two substrates is also provided. A method of optical bonding is further provided.

Abstract: A pick and place system including: moving a vacuum probe in a linear direction using a linear actuator system, moving the vacuum probe in a rotary direction using a rotary actuator system, and applying a vacuum to the vacuum probe to pick up a micro-device after moving the vacuum probe in the linear direction or rotary direction for pickup and movement of the micro-device.