Abstract: The present invention provides devices and structures and methods of use thereof in electrochemical actuation. This invention provides electrochemical actuators, which are based, inter-alia, on an electric field-driven intercalation or alloying of high-modulus inorganic compounds, which can produce large and reversible volume changes, providing high actuation energy density, high actuation authority and large free strain.

Abstract: The present invention discloses a method of confining a liquid metal alloy within a closed-loop system; distributing a first portion of the liquid metal alloy in a cavity within the closed-loop system; turning on an electromagnet to generate a magnetic field to permeate flexible sidewalls of the cavity; attracting the liquid metal alloy in the cavity towards the electromagnet to expand the flexible sidewalls; inducing a second portion of the liquid metal alloy to enter the cavity from an inlet end of a pipe within the closed-loop system; turning off the electromagnet; repelling the liquid metal alloy in the cavity away from the electromagnet to contract the flexible sidewalls; and inducing a third portion of the liquid metal alloy to exit the cavity to an outlet end of the pipe.

Abstract: An electrically powered hydraulic actuating system is disclosed. The system includes a pump that has a plurality of electro-magnetically actuated pumping chambers. The plurality of electro-magnetically actuated pumping chambers have a common inlet situated to supply the plurality of electro-magnetically actuated pumping chambers with low-pressure fluid. The plurality of electro-magnetically actuated pumping chambers also have a common outlet situated to receive fluid pressurized by the plurality of electro-magnetically actuated pumping chambers.

Abstract: The present invention in various embodiments relates to a variety of different types of fluidic adaptive lens systems, pumping systems for implementation in such lens systems, other systems employing such lens systems, and related methods of fabrication. In at least some embodiments, the present invention relates to a lens system that includes a reservoir having at least one flexible wall, a first actuator coupled in relation to the reservoir, and a terminal at which is located at least one of an integrated fluidic lens and a port configured to be coupled to an external fluidic lens. The terminal is coupled to at least one of the reservoir and the actuator, and at least one of the actuator and a first pumping system including the actuator is capable of causing fluid to be moved at least one of from the reservoir toward the terminal, and from the terminal toward the reservoir.

Abstract: A microfluidic device is described. The microfluidic device comprises at least one transport channel and at least one working chamber, wherein the at least one transport channel and the at least one working chamber are separated from each other by a common deformable wall. The at least one transport channel is for containing a transport fluid and the at least one working chamber is for containing a working fluid. The microfluidic device comprises at least one pair of electrodes for changing the pressure on the working fluid such that when the pressure on the working fluid is changed, the deformable wall deforms, resulting in a change of the cross-section of the at least one transport channel. The working chamber comprises a flexible wall different from the common deformable wall and at least one electrode of the at least one pair of electrodes is provided on the flexible wall.

Abstract: A valve structure includes a valve opening diaphragm and a valve diaphragm. The valve opening diaphragm provides a central valve opening with a plurality of wave shaped projections at the circumference of the valve opening. The valve diaphragm stacks on the valve opening diaphragm and providing at least a pair of elongated circular grooves. The pair of circular grooves is symmetrically disposed with respect to the center of the valve diaphragm and an area enclosed by the pair of circular grooves covers the valve opening.

Abstract: A positive displacement pump includes a magnetostrictive actuator. A single actuator drives multiple pumping chambers. The pump may include two pumping chambers driven in phase by the linear expansion of the actuator at both its ends. The pump may include a third pumping cavity, driven by the transverse expansion and contraction of the actuator, out of phase with either cavity driven by the lengthwise extension of the actuator. A pump assembly having multiple pumps each including a magnetostrictive element is also disclosed.

Abstract: A diaphragm pump includes: a volume changing member which changes the volume of a fluid chamber; a diaphragm member fixed in a stretched state and arranged separate from the fluid chamber, the diaphragm member having a pair of electrodes and a stretch film formed of dielectric elastomer, and the diaphragm member driving the volume changing member in a forward movement direction; a return bias member which drives the volume changing member in a backward movement direction; and a connection member which connects the diaphragm member and the volume changing member. In a low voltage state, the diaphragm member and the return bias member have driving force with respect to the volume changing member.

Abstract: The liquid discharging device includes a driving mechanism that drives a needle, a measurement plunger member and an inlet valve members that are concentrically-arranged inside a container. The driving mechanism includes: a piezoelectric-element support plate to which piezoelectric elements are attached; a spring for biasing the piezoelectric-element support plate toward a discharge outlet; and a control device adapted to control the piezoelectric elements separately. The piezoelectric-element support plate includes: a base end to which first end sides of the piezoelectric elements are fixed; a drive unit to which second end sides of the piezoelectric elements are fixed; and a displacement expanding portion expanding and outputting a displacement of the drive unit, the drive unit being displaced in conjunction with a expansion and contraction driving of the piezoelectric elements.

Abstract: An electrically-powered fluid sprayer employs a piezoelectric fluid pump that includes an inlet port, an outlet port, a pump chamber, and a piezoelectric element that is deformed and displaced by electrical signals supplied thereto to vary the volume of the pump chamber. Such displacement pumps fluid into the inlet port and into the pump chamber and discharges fluid from the pump chamber out the outlet port. The inlet port is in fluid communication with a fluid reservoir. Spin mechanics may be disposed downstream from the outlet port of the fluid pump and upstream from the discharge nozzle. The piezoelectric fluid sprayer may be extended to include a dual chamber piezoelectric pump that pumps different fluids (e.g., a liquid and air). The output of the dual chamber pump is mixed in a manifold and supplied downstream to the discharge nozzle. Spin mechanics may be employed in the fluid stream upstream from the discharge nozzle after the mixing.

Abstract: A diaphragm pump for pumping a fluid, includes a flexible diaphragm which contains magnetically hard or soft particles and is actuated by an electromagnetic actuator. The diaphragm pump having a housing having an interior space containing two pump chambers which are separated by the diaphragm, and in that the diaphragm is actuated by two opposite electromagnetic actuators.

Abstract: An apparatus having a disposable cytometer cartridge containing pumps, pressure chambers, reservoirs, flow sensors, flow channels, and microfluidic circuits with fluid operations on the cartridge. The circuits may include mesopumps and mesovalves embedded in the chip, card or cartridge. The apparatus may have multiple detecting, analyzing and identification capabilities of blood or other fluids of interest. The sample to be tested may be entered in the disposable microfluidic cartridge which in turn is insertable in a hand-holdable or portable cytometer instrument. This apparatus may have significant application in biological warfare agent detection, water analyses, environmental checks, hematology, and other clinical and research fields.

Abstract: A peristaltic pump for conveying a fluid comprises a flexible tube having an outer surface and a lumen for carrying the fluid such as a therapeutic agent. The tube has a length defined by opposed ends of the tube, the outer surface of the body carrying a plurality of longitudinally spaced-apart electroactive polymer actuators. The plurality of actuators are adapted to be responsive to electrical signals for energizing the actuators sequentially along the length of the tube to move a lumen pinch-off along the length of the tube to thereby convey the fluid from one end of the tube to the other end by means of a peristaltic pumping action. The peristaltic pump may be incorporated into a medical lead, such as an endocardial pacing lead, carrying at least one electrode.

Abstract: A method for manufacturing a micro pump member, in which a plurality of cells formed in a base part are used as pressurizing chambers, and side walls forming the pressurizing chambers are constructed by piezoelectric/electrostrictive elements. The micro pump member is formed by using a punch and die to form slits through green sheets that are laminated to one another.

Abstract: A magnetostriction based pump for cooling a power supply is provided. One exemplary embodiment of the invention utilizes one of the components that is already present in the power supply. The expense of the cooling system is minimized, as it is limited to a diaphragm and any channel routing. The airflow can be targeted at multiple devices by adding additional cooling channels or channeling the flow of air over multiple components.

Abstract: A drive circuit (18) produces a drive signal having a waveform of a predetermined waveform shape for a device (10) having a piezoelectric actuator (14). The drive circuit (14) includes a memory (140) which stores waveform shape data which is utilized by the drive circuit in producing the drive signal. The drive circuit utilizes the waveform shape data so that, for each of plural points comprising a period of the waveform, the drive signal has an appropriate amplitude for the predetermined waveform shape. The waveform shape data has preferably been prepared to optimize one or more operational parameter(s) of the device. Preferably the waveform shape data has been prepared by solving a waveform equation, the waveform equation having coefficients determined to optimize at least one operational parameter of the device.

Abstract: A drive circuit (18) produces a drive signal for a pump (10) having a piezoelectric actuator (14), with the piezoelectric actuator (14) forming a part of the drive circuit (18) and serving to shape a waveform of the drive signal. The drive circuit (18) comprises a pulse generator (100) which generates pulses; a converter circuit (102) which receives the pulses and produces charge packets at a rate which equals a desired drive frequency; and, the piezoelectric actuator (14). The piezoelectric actuator (14) receives the charge packets and, by its capacitive nature, integrates the charge packets to shape the waveform of the drive signal. Preferably, the piezoelectric actuator (14) integrates the charge packets to yield a drive field that approximates a sine wave. In one non-limiting example embodiment, the pulse generator (100) comprises a microcontroller-based pulsed width modulator (PWM) circuit (116) and the converter circuit (102) comprises a flyback circuit.

Abstract: A rotation support has improved thrust-bearing for rotors of electric motors of synchronous pumps. The rotation sup: a stator of the electric motor, in which a hollow body is housed for supporting and containing a permanent magnet rotor, an impeller being kinematically coupled with a shaft of the electric motor, as well as opposite supports of the shaft, one of which is provided with axial thrust-bearing. Advantageously, the support provided with thrust-bearing comprises a bush of antifriction material facing a side of the rotor and which has an axial abutment placed directly in contact with this side of the rotor.

Abstract: An acoustic fluid machine such as an air compressor comprises an acoustic resonator, a valve device and a piston. Air is sucked into the resonator through the valve device at one end of the resonator. The piston at the other end of the resonator is reciprocated by an actuator to compress the air in the resonator to cause resonance to increase pressure of the air significantly. The inner surface of the resonator is suitably curved to comply with the formula of a half-period cosine function.

Abstract: Thin chamber diaphragm-operated fluid handling devices, including thin chamber pumps and thin chamber valves, facilitate device compactness and, in some configurations, self-priming. Diaphragm actuators of the thin chamber devices either comprise or are driven by piezoelectric materials. The thinness of the chamber, in a direction parallel to diaphragm movement, is in some embodiments determined by the size of a perimeter seal member which sits on a floor of a device cavity, and upon which a perimeter (e.g. circumferential or peripheral portion) of the diaphragm actuator sits. The diaphragm actuator is typically retained in a device body between the floor seal member and another seal member between which the perimeter of the actuator is sandwiched. The devices have an input port and an output port.

Abstract: A method for fabricating a transducer suitable for a fluidic drive for a miniature acoustic-fluidic pump or mixer that includes an acoustic transducer attached to an exterior or interior of a fluidic circuit or reservoir. The transducer converts radio frequency electrical energy into an ultrasonic acoustic wave in a fluid that in turn generates directed fluid motion through the effect of acoustic streaming. The method includes depositing a piezo-electric thin-film onto a platinum coated silicon wafer or substrate with capping electrodes, defining each separate transducer; and dicing said piezoelectric tin-film to provide individual transducers.

Abstract: A positive displacement pump includes a magnetostrictive actuator. A single actuator drives multiple pumping chambers. The pump may include two pumping chambers driven in phase by the linear expansion of the actuator at both its ends. The pump may include a third pumping cavity, driven by the transverse expansion and contraction of the actuator, out of phase with either cavity driven by the lengthwise extension of the actuator. A pump assembly having multiple pumps each including a magnetostrictive element is also disclosed.

Abstract: A magnetohydraulic motor with a positive displacement pump that pumps hydraulic fluid to and from the two sides of a bi-directional piston that provides the motor's output force and motion. Motion control is provided by properly controlling valves that selectively open and close fluid passageways between the actuator member and each side of the piston.

Abstract: The invention relates to a hydraulic actuator for actuating a gas exchange valve (1) of an internal combustion engine, which valve is especially closed by the effect of a spring. The actuator is configured by a feed pump (6) with intermittent and thus variable delivery. The feed pump (6) has a high frequency and can be equipped for this purpose with piezoelectric, magnetorestrictive and/or electrochemical actuators as the feed elements. Optionally, the feed pump (6) can be operated with a stop valve (7) that is disposed downstream of the gas exchange valve (1) and that is controlled or regulated depending on the feed pump.

Abstract: A piezoelectrically driven fluid pump includes a chamber having two opposite sidewalls formed by flexible membranes, and an inlet and an outlet each regulated by a valve. Separate piezo elements are fixed to each of the membranes, to flex the membranes and increase or reduce the chamber volume and thereby draw fluid into the chamber or expel fluid from the chamber. The valves are each formed by two adjacent piezo elements that are supported or flexibly joined together at two opposite ends. When actuated, the valve piezo elements flex outward between the two opposite ends, opening the valve to form an aperture between the two piezo elements. In another embodiment, a fluid pump includes a chamber having one flexible membrane sidewall. A valve-regulated inlet or outlet aperture through the membrane communicates with the pump chamber. A ring-shaped piezo centered around the aperture, on the membrane, flexes the membrane.

Abstract: A micro pump having at least one pump member for conveying a fluid by action of pressure includes a pump unit formed by at least one actuator member for generating a pressure fluctuation and a fluid channel in which the fluid flows. The actuator member is provided with a cell formed by disposing two side walls made of piezoelectric/electrostrictive elements or antiferrodielectric elements on a connecting plate, and covering a surface facing the connecting plate between the side walls with a cover plate. The actuator member selectively forms the fluid channel and generates pressure fluctuation in the fluid channel member due to displacement of the cell caused by expansion/contraction of the side walls. The micro pump is small and thin in size, while attaining increasing fluid ejection amounts, and a high speed in response.

Abstract: An exemplary system and method for manufacturing micropump systems having integrated piezoresistive sensors is disclosed as including inter alia: a substrate, an inlet channel, an outlet channel, a pumping cavity, a first valve for permitting fluid flow from the inlet channel to the pumping cavity and restricting backflow of purged fluid from the pumping cavity to the inlet channel; a second valve for permitting fluid flow from the pumping cavity to an outlet channel and restricting backflow of purged fluid from the outlet channel to the pumping cavity; a pump actuator element; a pressure sensing cavity surface capable of at least partial mechanical deformation; a plurality of piezoresistors disposed within the sensing cavity; a plurality of contact pads; a plurality of conductive pathways connecting the piezoresistors and the contact pads; and a substantially monolithic device package, wherein the sensing cavity is substantially contained within the micropump device package.

Abstract: Methods and apparatus for electrostatically pumping fluids without passing the fluids through the electric field of the pump are contemplated. Electrostatic forces are preferably used to move the diaphragms in one direction, while elastic and/or other restorative forces are used to move the diaphragms back to their original un-activated positions. In some embodiments, this may allow fluid to be pumped without passing the fluid between actuating electrodes. This may be particularly useful when the fluids have dielectric, conductive, polar or other qualities that may affect traditional electrostatic pump performance. Pumps having various elementary cells are contemplated, including two-celled pumps disposed within a single chamber and pumps having greater numbers of cells wherein each cell is disposed within a different chamber.

Abstract: A method for manufacturing a micro pump member, in which a plurality of cells formed in a base part are used as pressurizing chambers, and side walls forming the pressurizing chambers are constructed by piezoelectric/electrostrictive elements. The micro pump member is formed by using a punch and die to form slits through green sheets that are laminated to one another.

Abstract: A micropump includes a body (10) of semiconductor material, accommodating fluid-tight chambers (32), having an internal preset pressure, lower than atmospheric pressure. The fluid-tight chambers (32), sealed by a diaphragm (35) that can be electrically opened, are selectively openable using a first electrode (37) and second electrodes (38), accommodating between them portions of the diaphragm (35).

Abstract: An integrated mesopump-sensor suitable for disposition in two- and three-dimensional arrays having small dimensions is disclosed. One mesopump is formed of an electrostatically attractable flexible diaphragm disposed through cavities or pumping chambers formed between two opposing electrostatically chargeable material layers. Fluid is pumped through the chambers by sequentially moving the diaphragm toward the first chargeable layer, then towards the second chargeable layer, which can pull and push the fluid through a series of chambers, and past the sensor. One group of sensors utilizes multiple and varied chemoresistive sensors which can vary in resistance differently in response to the presence of various analytes. Another group of sensors utilizes chemo-fluorescent sensors that fluoresce in the presence of particular analytes.

Abstract: A micro pump having at least one pump member for conveying a fluid by action of pressure includes a pump unit formed by at least one actuator member for generating a pressure fluctuation and a fluid channel in which the fluid flows. The actuator member provided with a cell formed by disposing two side walls made of piezoelectric/electrostrictive elements or antiferrodielectric elements on a connecting plate, and covering a surface facing the connecting plate between the side walls with a cover plate. The actuator member selectively forms the fluid channel and generates pressure fluctuation in the fluid channel member due to displacement of the cell caused by expansion/contraction of the side walls. The micro pump is small and thin in size, while attaining increasing fluid ejection amounts, and a thigh speed in response.

Abstract: A system for the metering and delivery of small discrete volumes of liquid is comprised of a small or minimal number of inexpensive components. One such component is a movable member, such as a miniature precision reciprocating displacement pump head, which is driven by an actuator that comprises a shape memory alloy material. The operating mechanism of the system is of little or minimal complexity. The system facilitates the precise metering and delivery of the small discrete volumes of liquid. Potential applications for the system include subcutaneous, long-term, automated drug delivery, for example, the delivery of insulin to a person with diabetes. In such an application, the small, simple and inexpensive nature of the invention would allow for its use as both a portable and a disposable system.

Abstract: An ultrasonic pump in which a medium is pumped by the interaction between longitudinal acoustic waves and the medium in a flow-chamber. The pump comprises a non-planar, transducer and an associated chamber for providing a controllable, focused, acoustic traveling wave therein. The chamber includes a tapered passage corresponding to the focused beam pattern of the focused acoustic traveling wave through which the liquid medium flows and/or cavitation is induced and/or controlled. The pump therefore utilizes a focused, non-planar, acoustical transducer responsive to frequency input for directing longitudinal acoustic waves into the flow-chamber which induces a pressure gradient. The medium in the flow-chamber flows in the direction of travel of the acoustic wave in the chamber as a result of acoustic streaming. The exit orifice of the nozzle in communication with the chamber is strategically located at about the focal zone of the focused, traveling wave.

Abstract: A micro-electro-mechanical vibrating pumping stage comprises a silicon substrate (15) on which there are formed a single-layer or multilayer oscillating assembly (27; 127; 227; 327) with a vibrating membrane and a device controlling the membrane in order to provide its oscillation with respect to the substrate. A molecular vacuum pump incorporates this vibrating pumping stage.

Abstract: An apparatus for electrostatically pumping fluids without passing the fluids through the electric field of the pump is contemplated. Electrostatic forces are preferably used to move the diaphragms in one direction, while elastic and/or other restorative forces are used to move the diaphragms back to their original un-activated positions. In some embodiments, this may allow fluid to be pumped without passing the fluid between actuating electrodes. This may be particularly useful when the fluids have dielectric, conductive, polar or other qualities that may affect traditional electrostatic pump performance. Pumps having various elementary cells are contemplated, including two-celled pumps disposed within a single chamber and pumps having greater numbers of cells wherein each cell is disposed within a different chamber.

Abstract: A circuit changeover switch 60, which includes a drive device 10, includes ceramic pumps 18a and 18b, which alternately pressurize and depressurize operation fluid 100 within a fluid chamber 13a on opposite sides of an electrically conductive movable body 110, to thereby move the movable body 110 within the flow chamber 13a, whereby one of changeover electrodes 62a and 62b is electrically connected to a common electrode 61. When the pressure of the operation fluid is increased and decreased at high speed by the ceramic pumps, micro channels 16a and 16b exhibit a high passage resistance, so that the pressure within the channel does not escape to an internal-pressure buffering chamber 15a, and the movable body moves without fail.

Abstract: The fluid-flow device (100) of the invention comprises a stack (30) covered by a closure wafer (20), said stack (30) comprising a support wafer (36), a layer of insulating material (34), and a silicon layer (32). The closure wafer (20) and/or said silicon layer (32) are machined so as to define a cavity (38) between said closure wafer (20) and said silicon layer (32), said support wafer (36) has at least one duct (102) passing right through it, said layer of insulating material (34) presenting at least one zone (35) that is entirely free of material placed at least in line with said duct (102) so as to co-operate with said cavity (38) to define a moving member (40) in said silicon layer (32), the moving member being suitable under the pressure of liquid in said cavity (38) for reversibly moving towards said support wafer (36) until contact is made between said moving member (40) and said support wafer (36).

Abstract: The fluidic drive for miniature acoustic-fluidic pump and mixer is comprised of an acoustic transducer attached to an exterior or interior of a fluidic circuit or reservoir. The transducer converts radio frequency electrical energy into an ultrasonic acoustic wave in a fluid that in turn generates directed fluid motion through the effect of acoustic streaming. Acoustic streaming results due to the absorption of the acoustic energy in the fluid itself. This absorption results in a radiation pressure and acoustic streaming in the direction of propagation of the acoustic propagation or what is termed “quartz wind”.

Abstract: A micro pump member is provided, in which a plurality of cells formed in a base part are used as pressurizing chambers, and side walls forming the pressurizing chambers are constructed by piezoelectric/electrostrictive elements. The volume of the pressurizing chambers is changed by the displacement of the piezoelectric/electrostrictive elements to produce a pressure in the pressurizing chambers. The pressurizing chambers are formed independent of adjacent pressurizing chambers. Activation can be carried out by applying a driving electric field having a high field strength to the pressurizing chambers, so that a greater displacement and a higher response can be obtained with a smaller field strength.

Abstract: A valve actuator based on a conductive polymer gel is disclosed. A nonconductive housing is provided having two separate chambers separated by a porous frit. The conductive polymer is held in one chamber and an electrolyte solution, used as a source of charged ions, is held in the second chamber. The ends of the housing a sealed with a flexible elastomer. The polymer gel is further provide with electrodes with which to apply an electrical potential across the gel in order to initiate an oxidation reaction which in turn drives anions across the porous frit and into the polymer gel, swelling the volume of the gel and simultaneously contracting the volume of the electrolyte solution. Because the two end chambers are sealed the flexible elastomer expands or contracts with the chamber volume change. By manipulating the potential across the gel the motion of the elastomer can be controlled to act as a “gate” to open or close a fluid channel and thereby control flow through that channel.

Abstract: The invention provides a pump with high driving efficiency in which the number of mechanical switching valves is decreased to reduce pressure loss and increase reliability, and which is ready for high load pressure and high-frequency driving, and which increases the discharged fluid volume for one cycle of pumping. A circular diaphragm arranged on the bottom of a casing has the outer edge fixed to the casing. The diaphragm includes a piezoelectric element to move the diaphragm on the bottom surface thereof. The space between the diaphragm and the top wall of the casing serves as a pump chamber, wherein a suction channel and a discharge channel are opened to the pump chamber, the suction channel having a check valve serving as a fluid resistive element and the discharge channel being always communicated with the pump chamber, even during the operation of the pump.

Abstract: A pump having a main pump body including a casing to which a fluid is supplied, and a pump section, an input valve section, and an output valve section which are provided opposingly to one surface in the casing. Each of the pump section, the input valve section, and the output valve section has an actuator section. The input valve section, the pump section, and the output valve section are provided opposingly to the back surface of the casing for selectively forming a flow passage on the back surface of the casing in accordance with selective displacement action of the input valve section, the pump section, and the output valve section in a direction approaching or separating from the back surface of the casing. The fluid is controlled for its flow in accordance with the selective formation of the flow passage.

Abstract: The invention provides a pump which has reduced pressure loss by using fewer mechanical on-off valves, which has increased reliability, which can be used under a high load pressure, which can be driven at a high frequency, and which has good drive efficiency by increasing discharge fluid volume per pumping period. A circular diaphragm, disposed at the bottom portion of a case, has its outer peripheral edge secured to and supported by the case. A piezoelectric device to move the diaphragm is disposed at the bottom surface of the diaphragm. A space between the diaphragm and the top wall of the case is a pump chamber. An inlet flow path, having a check valve serving as a fluid resistor disposed thereat, and an outlet flow path, which opens to the pump chamber during operation of the pump, open towards the pump chamber.

Abstract: A pump having a main pump body including a casing to which a fluid is supplied, and a pump section, an input valve section, and an output valve section which are provided opposingly to one surface in the casing. Each of the pump section, the input valve section, and the output valve section has an actuator section. The input valve section, the pump section, and the output valve section are provided opposingly to the back surface of the casing for selectively forming a flow passage on the back surface of the casing in accordance with selective displacement action of the input valve section, the pump section, and the output valve section in a direction approaching or separating from the back surface of the casing. The fluid is controlled for its flow in accordance with the selective formation of the flow passage.

Abstract: A MEMS-fabricated microvacuum pump assembly is provided. The pump assembly is designed to operate in air and can be easily integrated into MEMS-fabricated microfluidic systems. The pump assembly includes a series of pumping cavities with electrostatically-actuated membranes interconnected by electrostatically-actuated microvalves. A large deflection electrostatic actuator has a curved fixed drive electrode and a flat movable polymer electrode. The curved electrodes are fabricated by buckling the electrode out-of-plane using compressive stress, and the large deflection parallel-plane electrostatic actuators are formed by using the curved electrode. The curved electrode allows the movable electrode to travel over larger distances than is possible using a flat electrode, with lower voltage. The movable electrode is a flat parylene membrane that is placed on top of the curved electrode using a wafer-level transfer and parylene bonding process.

Abstract: Disclosed herein is a micro fluid transferring system that comprises a micropump having a chamber, a first fluid transferring portion connected to the chamber, and a second fluid transferring portion connected to the chamber. This system is characterized in that at least one of the first and second fluid transferring portions comprises a pressure absorbing section for absorbing or alleviating a liquid vibrational pressure therein.

Abstract: An optical switch disposed in intermediate positions of optical paths to define a channel of a light signal constitutes a cell member in whose interior cells are formed and a waveguide member having fine slits; and a gas is filled in cells of which side walls are formed by piezoelectric/electrostrictive elements or antiferroelectric elements, a liquid is filled in the fine slits, and the cells and the fine slits are communicated to each other via a communicating hole; optical waveguides intersect at the fine slits, and the-cells are disposed at the crossing locations, and said side walls are expanded/constricted by applying an electric field to the piezoelectric/electrostrictive elements or antiferroelectric elements which form the side walls of the cells, and a part of the gas stored in each cell is ejected at a corresponding intersection area from said communicating hole into the corresponding fine slit.

Abstract: Vacuum pump with a chamber (1) having, on one side, an intake (2) for pumping gas and, on the opposite side, an outlet (3) for the gas, displacement elements (4) being provided to drive the gas from the intake (2) towards the outlet (3), the displacement elements (4) including at least a vibrating element (4) for generating sound waves moving in the chamber (1), elements for closing (6) the outlet (3) being provided synchronously co-operating with the displacement elements (4) so as to clear the outlet opening (3) when the gas pressure in the proximity of the outlet (3) is higher than that in the proximity of the intake (2).

Abstract: A rod body (30) is formed of magnetostrictive material and includes one end portion (30a) fixed, and a piston (35) is fixed to the other end portion (35b) of the rod body (30). The piston (35) is slidably disposed within a cylinder (36) in which there is formed a pump chamber (37). A suction port (39) for sucking lubricating oil into the pump chamber (37) is formed in the cylinder (36), while a suction valve (40) for preventing the lubricating oil from flowing out from the suction port (39) is disposed in the suction port (39). In the cylinder (36), there is disposed a nozzle (20) which communicates with the pump chamber (37) and has a sectional area smaller than the lubricating oil passage sectional area of the suction valve (40). There is disposed a coil (43) outside the rod body (30) and, to the coil (43), there is connected a control device (6) for controlling the supply of a current to be supplied to the coil (43).