Abstract: An actuator has a flexible electrode having flexibility, and a base electrode having an opposed face that is opposed to the flexible electrode and is covered with an insulating layer. The flexible electrode deforms to get closer to the opposed face when a voltage is applied to the flexible electrode and the base electrode. The flexible electrode is a rotating body placed on the opposed face. The base electrode is divided into a plurality of electrode portions insulated from each other. The electrode portions are arranged along a predetermined direction. The flexible electrode moves in the predetermined direction relative to the base electrode, while rotating on the opposed face, when the voltage is sequentially applied to the electrode portions in the predetermined direction.

Abstract: The present invention discloses a path-type liquid medicine delivery electro-osmosis pump that can be applied to a wearable medicine device. An electro osmosis pump according to the present invention includes: a connector provided with a liquid medicine inlet and a liquid medicine outlet; a check valve assembly combined to one side of the connector; and a driver that is connected to the other side of the connector and moves the liquid medicine toward the liquid medicine outlet by applying pressure to the liquid medicine while being separated from the liquid medicine, which passes through the check valve assembly.

Abstract: A fluidic device is disclosed, comprising an enclosed passage that is adapted to convey a circulating fluid. The enclosed passage comprises a flow unit having a first electrode and a second electrode offset from the first electrode in a downstream direction of a flow of the circulating fluid. The first electrode is formed as a grid structure and arranged to allow the circulating fluid to flow through the first electrode. The fluidic device may be used for controlling or regulating the flow of the fluid circulating in the enclosed passage, and thereby act as a valve opening, reducing or even closing the passage.

Abstract: A pump includes a pump flow path and electrodes and dielectric members in the pump flow path to allow a fluid to pass through the electrodes and the dielectric members in a flowing direction. The electrodes and the dielectric members are alternately stacked in the flowing direction so that a dielectric member is located between adjacent electrodes. Among the electrodes, an inter-electrode polarity of each pair of electrodes is different from that of an adjacent pair of electrodes. The dielectric members include a first dielectric member at a position of an odd-numbered dielectric member counted from the most upstream side of the flowing direction and a second dielectric member at a position of an even-numbered dielectric member counted from the most upstream side of the flowing direction. Material of the first and second dielectric members provide signs of a zeta potential opposite to each other.

Abstract: A mist removing device, a controlling method thereof a mist removing system and a control element are provided, which relate to the field of mist removing technology. The mist removing device includes power supply module, electrode array and insulating layer. Electrode array and insulating layer are arranged on substrate in stacked manner in direction away from substrate. Orthographic projection of insulating layer onto substrate covers orthographic projection of electrode array onto substrate. Power supply module is connected with electrode array. Power supply module is configured to supply power to electrode array such that electrode array forms electric field to cause droplets in mist to converge under action of electric field, where mist is formed on side of insulating layer away from substrate. Mist on surface of substrate can be effectively removed.

Abstract: Systems and methods that maintain a vacuum for a long period of time in a portable vacuum chamber are disclosed. Systems and methods for the maintenance of a vacuum in cryogenic Dewars for imaging systems with high gas loads using an integral pump and getter are also disclosed.

Abstract: The method for manufacturing the gas adsorption unit includes a preparation step, an activation step, and a sealing step. The preparation step is a step of wrapping a getter with a package material. The activation step is a step of heating the getter wrapped with the package material to activate the getter. The sealing step is a step of melting the package material by heating the package material so as to seal, with the package material, the getter activated in the activation step.

Abstract: A watering tank circulating assembly includes a frame submerged in a livestock watering tank. A fluid pump is coupled to the frame to circulate the water when the fluid pump is turned on. In this way the fluid pump inhibits the water from freezing. A heating coil is coupled to the frame to heat the water when the heating coil is turned on, thusly inhibiting the water from freezing. A thermostatic switch is coupled to the frame and each of the fluid pump and the heating coil is electrically coupled to the thermostatic switch. The thermostatic switch turns on each of the fluid pump and the heating coil when the temperature of the water drops below a trigger temperature. Additionally, the thermostatic switch turns off each of the fluid pump and the heating coil when the temperature of the water rises about the trigger temperature.

Abstract: A nanochannel delivery device and method of manufacturing and use. The nanochannel delivery device comprises an inlet, an outlet, electrodes and a nanochannel. The nanochannel may be oriented parallel to the primary plane of the nanochannel delivery device. The inlet and outlet may be in direct fluid communication with the nanochannel.

Abstract: A cold-atom cell is formed by machining a block of silicon to define sites for an atom source chamber, an atom manipulation chamber, and an ion-pump chamber. A polished silicon panel is frit-bonded to an unpolished (due to machining) chamber wall (which would be difficult and costly to polish). The polished panel can then serve as a reflector or a sight for anodic bonding. A solid-phase atom source provides for vapor phase atoms in the source chamber. The source chamber also includes carbon and gold to regulate the atom pressure by sorbing and desorbing thermal atoms. The atom manipulation chamber includes components for magneto-optical trap and an atom chip, e.g., for forming a Bose-Einstein condensate. The ion-pump chamber serves as the site for an ion pump. By integrating the ion pump into the body of the cold-atom cell, a more compact, reliable, and robust cold-atom cell is achieved.

Abstract: A method for producing a micromechanical component having a substrate and cap, which is connected to the substrate and encloses a first cavity therewith. A first pressure prevails in the first cavity, and a first gas mixture having a first chemical composition is enclosed, and an access opening is provided in the substrate or cap, which connects the first cavity to an environment of the micromechanical component, and then the first pressure and/or the first chemical composition is adjusted in the first cavity, and finally, the access opening is sealed with a laser by introducing energy/heat into an absorbing part of the substrate or cap, and a getter, introduced into the first cavity prior to the third task, is sealed with the laser radiation, and a getter, introduced into the first cavity prior to the third task, is activated at least partially with the laser radiation, during the third task.

Abstract: A layered structure for pumping fluid by electroosmotic transport includes a first layer, wherein the first layer is made from an ion perm selective material having openings therein that permit the fluid to flow therethrough, and wherein the openings in the first layer that permit the fluid to flow therethrough create a porosity of less than 10%; and a second layer, wherein the second layer is an electroosmotic layer. The layered structure has a net fluid flow direction that extends through the first layer and the second layer, wherein the layered structure has a region that permits fluid to flow in a direction that is non-parallel to a net fluid flow direction, and wherein the region is located between the first layer and the surface of the second layer that is furthest from the first layer. An electroosmodialysis apparatus may also be provided that includes two layered structures.

Abstract: Examples are disclosed herein that relate to a heat removal system utilizing a dispersion that includes particles of an electrical conductor. One example provides a heat removal system including a conduit loop, a dispersion of particles of an electrical conductor in a heat transfer fluid, a pair of electrodes configured to introduce a flow of electric current through the particles in the dispersion, and one or more magnets configured to introduce a magnetic field within the conduit loop in a region of the pair of electrodes, such that the electrodes are operable to apply an electromagnetic pumping force on the particles in the dispersion.

Abstract: The invention relates to an apparatus for transporting a fluid in a channel leg of a microfluidic element, especially of a flow cell. According to the invention, a pressure source for pressurizing a front end face (42) in transport direction of the liquid which completely fills the channel leg in cross section is provided. The pressure source preferably comprises a closed space (17; 22; 34; 36, 38, 40), in which a compressed gas, for example air, is compressible by moving the front end face (42) of the fluid transported in the channel leg.

Abstract: An electrochemical system having an electrochemical compressor with an operating voltage that is controlled by a controller is described. The operating voltage between a first and second electrodes separated by an ion conducting material, such as a proton conducting polymer, may be oscillated in a waveform. The controller may reduce the voltage to low pressure side of the electrochemical compressor to initiate electrolysis for a set time interval and then may change the operating voltage to operate the electrochemical cell in a compressor mode. When the electrochemical cell is operating in an electrolysis mode, in situ hydrogen is produced on the low pressure side that may be used as a electrochemically active component of the working fluid when the electrochemical cell is switched to a compressor mode. The controller may have a control program that automatically controls the operating waveform as a function of sensor input.

Abstract: The invention relates to an ionizing pump stage, in particular for a vacuum pump, comprising an inlet for gas entering into the pump stage; an ionizing section communicating with the inlet in a gas-conductive manner and an ionizing device for ionizing the gas entered into the ionizing section; an acceleration device for accelerating the ionized gas present in the ionizing section in the conveying direction; and a neutralizing section following the ionizing section in the conveying direction and communicating with the ionizing section in a gas-conductive manner and a neutralizing device for the electrical neutralizing of the ionized gas entering into the neutralizing section.

Abstract: An electrochemical compressor system, such as an electrochemical refrigeration system includes a sealed vessel that reduces leak issues related to the electrochemical cell. The sealed vessel may be molded or formed from a polymer or a composite polymer having reinforcing materials, such as fibers therein. The sealed vessel may be plated with metal to reduce gas permeation through the wall of the vessel and to accommodate and improve the attachment of conduits, including metal conduits thereto. A metal conduit may be brazed onto a vessel and the brazing material may be selected for polymer to metal joining and for reduced contamination potential of the system. The electrochemical compressor system incorporates a leak sensor configured at least partially within the sealed rigid vessel that measures the pressure within the vessel.

Abstract: A heat pump apparatus includes an evaporator evaporating a refrigerant, an electrochemical compressor compressing the refrigerant evaporated in the evaporator, and a condenser condensing the refrigerant compressed by the electrochemical compressor. The heat pump apparatus is structured such that the refrigerant in a wet steam state is supplied from the evaporator to the electrochemical compressor.

Abstract: The present invention provides a vacuum processing apparatus capable of reducing attachment of particles generated in a processing space to an inner wall of a chamber, and of easily adjusting pressure in the processing space while introducing a gas into the processing space at a desired flow rate. A vacuum processing apparatus according to one embodiment includes: a container; a gas exhaust portion; a substrate holder configured to retain a substrate; a shield provided to surround the substrate holder and dividing an inside of the container into a processing space and an outside space; a gas introducing portion; a plasma generating portion; and an exhaust portion provided to the shield having a communication path through which the processing space and the outside space communicate, wherein at least part of the communication path is hidden from a region where the plasma generating portion generates the plasma.

Abstract: Refrigeration systems and appliances are provided. A refrigeration system includes a refrigerant, the refrigerant including a working fluid and an electrochemically active fluid. The refrigeration system further includes a condenser, an evaporator, and an electrochemical compressor in fluid communication with the condenser and the evaporator. The refrigeration system can further include various components which advantageously reduce the energy consumption and increase the predicatability and efficiency of the refrigeration system.

Abstract: An electrokinetic actuator for a propulsion system is described. The actuator includes an array of channels, with each channel having an inlet and an outlet. A reservoir is included that contains an ionic solution of particles. A first electrode proximate to (or deposited at) the inlet and a second electrode proximate to (or deposited at) the outlet are connected to a voltage source. The voltage source and electrodes apply a voltage across the length of the channels to generate an electric field parallel to each channel. The electric field causes an electro-osmotic flow of ions from the reservoir to the outlet producing electrokinetic thrust at the outlet. By varying the concentration of the ionic solution and the magnitude of the electric field, the electro-osmotic flow of ions is controlled.

Abstract: The invention relates to a fluid pump or rotary cutter having at least one first element which can be brought from a transport state into an operating state by changing at least one mechanical property. Such a pump can, for example, be a blood pump for the medical, microinvasive area. The object of achieving a transition between the transport state and the operating state which is as comfortable as possible and in so doing leaving a freedom in the design of the corresponding apparatus, in particular of a pump, which is as large as possible, is achieved using the means of the invention in that the first element at least partly comprises a material or can be filled with a material or material mixture which passes through a chemical reaction, in particular cross-linking, or a crystallization for transition into the operating state.

Abstract: A microfluidic pump comprises a plurality of metal electrodes (10) which oxidise in air, a liquid droplet (14) to be moved by the pump, which is in contact with a least one metal electrode, and a controller for controlling the oxidation state of the metal electrodes in order to vary the electrode wettability. This arrangement enables full integration with a semiconductor device, and with low drive voltages.

Abstract: An electroosmotic pump comprises a plurality of membranes comprising one or more positive electroosmotic membranes and one or more negative electroosmotic membranes, a plurality of electrodes comprising cathodes and anodes, and a power source. Each of the positive electroosmotic membranes and negative electroosmotic membranes are disposed alternatively and wherein at least one of the cathodes is disposed on one side of one of the membranes and at least one of the anodes is disposed on other side of the membrane. At least one of the cathodes or anodes is disposed between a positive electroosmotic membrane and negative electroosmotic membrane.

Abstract: A switchable adhesion device combines two concepts: the surface tension force from a large number of small liquid bridges can be significant (capillarity-based adhesion) and these contacts can be quickly made or broken with electronic control (switchable). The device grabs or releases a substrate in a fraction of a second via a low voltage pulse that drives electroosmotic flow. Energy consumption is minimal since both the grabbed and released states are stable equilibria that persist with no energy added to the system. The device maintains the integrity of an array of hundreds to thousands of distinct interfaces during active reconfiguration from droplets to bridges and back, despite the natural tendency of the liquid towards coalescence. Strengths approaching those of permanent bonding adhesives are possible as feature size is scaled down. The device features compact size, no solid moving parts, and is made of common materials.

Abstract: Provided is a device capable of functionalizing a micro-motion of a polarizable microstructure. A structure includes a plurality of polarizable structures, each having an electrically polarizable conductive part on a surface thereof, and a connector body having one of mobility and deformability, for connecting the plurality of polarizable structures to each other.

Abstract: Systems and methods for trapping and moving individual particles of a target material of a suspension are disclosed. In one aspect, a system includes a tube and an electronically addressable float. The float includes one or more arrays of electrodes in which each electrode can be independently addressed to create non-uniform electric fields that trap and isolate target particles near the float. The electrodes can be dynamically operated to move the target particles to particular locations on the float for analysis and collection.

Abstract: The downhole electromagnetic pump includes a pumping chamber that is provided with a throughbore through which fluid may be pumped. An electrode arrangement is provided in order to produce an electro-hydro-dynamic force on fluids within the pump such that fluid may be pumped through the pump in a desired direction. A method of utilising the downhole electromagnetic pump in order to pump fluids in a downhole environment is also provided.

Abstract: One or more electroactive polymer (EAP) strips are circumferentially or lengthwise embedded or mounted around the fluid passage member. The EAP strips are configured to function as a pump when a prescribed electrical charge is applied and removed from the EAP strips, which causes the EAP strips to expand and constrict accordingly. A series of these strips may be mounted along a portion of the fluid passage member and electrically actuated in a prescribed manner to exert a squeezing force around the fluid passage member, which functions to pump fluid through the fluid passage member. The EAP strips also change electrical characteristics (e.g., capacitance, resistance) independent of the applied actuation as they are stretched, so they may be used to measure fluid pressure and/or fluid flow rate.

Abstract: A getter pump is described. The getter pump has a casing, whose shape is a solid of revolution with a revolution axis, and a plurality of getter cartridges mounted within the getter pump casing, each cartridge having a linear central support and spaced getter elements mounted on the linear central support. A getter cartridge orientation plane containing the linear central support and parallel to the revolution axis and a getter cartridge positioning plane orthogonal to the revolution axis and intersecting the midpoint of a linear central support are defined. For each cartridge, the angle formed by the getter cartridge positioning plane with the linear control supports is equal to or less than 30°.

Abstract: A cooling system has an inlet plenum and at least one cooling channel which communicates with the inlet plenum. The cooling channel passes adjacent to a component to be cooled from an upstream inlet to a downstream outlet. A pair of electrodes are positioned adjacent the inlet to create an electric field tending to resist a bubble formed in an included dielectric liquid from moving in an upstream direction due to a dielectrophoretic force. Instead, a dielectrophoretic force urges the bubble in a downstream direction.

Abstract: The present invention relates to pump systems having graphene or other atomically thin electrically conductive materials supported by trough-shaped cavities.

Abstract: A micropump configured to control flow of an insulation fluid includes: a rectangular channel 370 configured to have a rectangular shape in which a movement passage of the insulation fluid; a planar electrode forming section 310 configured to be formed inside the rectangular channel and have a planar shape for applying an electric field; an inflow section 320 configured such that the insulation fluid flows in; and an outflow section 330 configured such that the insulation fluid flows out. Since an insulation fluid with low conductivity in a range of 10?10 to 10?12 S/m is transported with a simple technical structure without using a complicated component, it is possible to obtain the advantage of cost saving and application to various minute dynamics devices.

Abstract: A flow controller which uses a combination of hydrostatic pressure and electroosmotic flow to control the flow of a fluid. A driving fluid (1204) whose flow rate is dependent on both hydrostatic pressures and electroosmotic flow can be used (a) directly as a working fluid in an operable device, for example a chromatograph, or (b) to displace a working fluid (1203) from a storage container (625) into an operable device (1301), or both (a) and (b). The driving fluid (1204) can be composed of one or more fluids. Part or all the driving fluid (1204) is passed through an electroosmotic device (100) so as to increase or decrease the flow rate induced by hydrostatic pressure.

Abstract: The present invention provides a fluid delivery system having a first chamber, a second chamber and a third chamber; a flow-through pump element separating the first chamber from the second chamber; a moveable pump element separating the second chamber from the third chamber; a first outlet in communication with the third chamber; and second outlet in communication with the second chamber. Additionally, the present invention provides methods of operating a fluid delivery system having a first chamber, a second chamber and a delivery chamber by reducing the volume of the second chamber while increasing the volume of the delivery chamber without operation of a flow-through pump element that separates the second chamber from the first chamber.

Abstract: Disclosed embodiments include electromagnetic flow regulators for regulating flow of an electrically conductive fluid, systems for regulating flow of an electrically conductive fluid, methods of regulating flow of an electrically conductive fluid, nuclear fission reactors, systems for regulating flow of an electrically conductive reactor coolant, and methods of regulating flow of an electrically conductive reactor coolant in a nuclear fission reactor.

Abstract: A refrigeration system defines a closed loop that contains a working fluid, at least part of the working fluid being circulated through the closed loop. The refrigeration system includes a first heat transfer device that transfers heat from the first heat reservoir to the working fluid, a second heat transfer device that transfers heat from the working fluid to the second heat reservoir, and an electrochemical compressor between the first and second heat transfer devices. The electrochemical compressor includes one or more electrochemical cells electrically connected to each other through a power supply, each electrochemical cell including a gas pervious anode, a gas pervious cathode, and an electrolytic membrane disposed between and in intimate electrical contact with the cathode and the anode.

Abstract: The invention relates to an ionizing pump stage, in particular for a vacuum pump, comprising an inlet for gas entering into the pump stage; an ionizing section communicating with the inlet in a gas-conductive manner and an ionizing device for ionizing the gas entered into the ionizing section; an acceleration device for accelerating the ionized gas present in the ionizing section in the conveying direction; and a neutralizing section following the ionizing section in the conveying direction and communicating with the ionizing section in a gas-conductive manner and a neutralizing device for the electrical neutralizing of the ionized gas entering into the neutralizing section.

Abstract: A plasma actuator system includes a first electrode having a first slit formed in a first peripheral section of the first electrode. The first slit directs flow of a gaseous medium along a radial direction of the first electrode. Further, the plasma actuator system includes a second electrode coupled to the first electrode and is disposed concentrically around the first electrode. The second electrode includes a second slit formed in a second peripheral section for directing flow of the gaseous medium along the radial direction. Further, the system includes a power source coupled to the first and second electrode for supplying electric power to the electrodes for ionizing gaseous medium to generate plasma.

Abstract: A method is provided for regulating fluid pump pressures by detecting an elevation differential between a fluid flow control device and the distal end of a fluid line in communication with the fluid flow control device. A fluid flow control device, for instance a peritoneal dialysis device, is at a first height, a distal end of a fluid line is at a second height, and a valved outlet, when open, affords communication between the fluid flow control device and the distal end of the fluid line. The elevation differential is correlatable with a pressure measurable during a calibration procedure provided as a part of the methodology.

Abstract: An electrokinetic pump achieves high and low flow rates without producing significant gaseous byproducts and without significant evolution of the pump fluid. A first feature of the pump is that the electrodes in the pump are capacitive with a capacitance of at least 10?4 Farads/cm2. A second feature of the pump is that it is configured to maximize the potential across the porous dielectric material. The pump can have either or both features.

Abstract: An apparatus includes a device including a pair of electrodes and a channel producing an electro-osmotic flow or electrophoretic flow of a liquid by applying a voltage between the pair of electrodes, and an impedance connected to the pair of electrodes, wherein a voltage resulting from thermal noise is applied to the pair of electrodes by giving a temperature difference between the channel and the impedance, and thermal energy corresponding to the temperature difference is converted into a flow of the liquid, the flow of the liquid being mechanical energy.

Abstract: An apparatus for shielding a controlled pressure environment, including a shield assembly with: a gate disc arranged for location in a chamber and including a first continuous surface facing an opening in the chamber and including an outer circumference extending past the opening in a radial direction orthogonal to a longitudinal axis passing through the chamber and the opening; and an at least one actuator arranged to displace the gate disc in an axial direction parallel to the longitudinal axis. The opening is arranged for connection to an inlet of a vacuum pump. In an example embodiment, the thermal system attains and maintains thermal equilibrium in the chamber and/or to shields the chamber from unwanted thermal affects by heating or cooling the gate disc to offset cooling or heat generated by the vacuum pump. For example, the gate disc is cooled to offset heat generated by a turbo-molecular pump.

Abstract: A microfluidic driving system includes a first planar electrode, a second planar electrode, a third planar electrode, a fourth planar electrode, a power supply unit and a detection module. The second, third and fourth planar electrodes are disposed parallel to the first planar electrode and face-to-face with the first planar electrode to form an accommodation space for accommodating a fluid. An AC power is provided by the power supply unit and an AC electrical field is applied by alternately connecting the third planar electrode and the fourth planar electrode with the first planar electrode for driving the first fluid and the second fluid to flow; and then AC electrical field is also applied by connecting the second planar electrode to the first planar electrode to mix the first fluid and the second fluid. Finally, a detection is performed upon a mixture of the fluids through the detection module.

Abstract: This relates to vacuum insulated glass (VIG) window units and methods for making VIG window units. Hybrid getter(s) are utilized. In certain example embodiments, a hybrid getter for use in a VIG window unit and/or a method making same includes both evaporable getter (EG) material and non-evaporable getter (NEG) material. In certain example embodiments, the NEG material may be covered (directly or indirectly) with EG material in the hybrid getter at least prior to getter activating/flashing.

Abstract: A heat transfer system defines a closed loop that contains a working fluid that is circulated through the closed loop. The heat transfer system includes an electrochemical compressor including one or more electrochemical cells electrically connected to each other through a power supply. Each electrochemical cell includes a gas pervious anode, a gas pervious cathode, and an electrolytic membrane disposed between and in intimate electrical contact with the cathode and the anode. The heat transfer system also includes a tubular system that receives at least one electrochemically-active component of the working fluid from an output of the electrochemical compressor and, if present, other components of the working fluid that bypass the electrochemical compressor. The tubular system has a geometry that enables at least a portion of the received working fluid to be imparted with a gain in kinetic energy as it moves through the tubular system.

Abstract: An electrohydrodynamic conduction liquid pumping system having a vessel configured to contain a liquid therein, a single pair or multi-pairs of electrodes disposed in a circularly spaced apart relationship to each other inside the vessel and configured to be oriented in the liquid. A power supply is coupled to the electrodes and configured to generate electric fields in-between each electrode pair to induce a net radial pumping of the liquid. A heat source is provided to produce heat sufficient to boil and vaporize the liquid while non-vaporized liquid moving toward the heat source prevents over-heating of the heat source. A heat sink is configured to have a operating temperature below the vaporization temperature of the liquid so that contact of the vapor with the heat sink will condense the vapor into a liquid to replenish the liquid supply moving toward the heat source.

Abstract: Provided are magnetohydrodynamic stirrers comprising a conduit or cavity having at least two electrodes disposed in such an orientation that, upon the application of a potential or current across the electrode pair within a magnetic field, secondary flows such as chaotic advection is generated.

Abstract: It is an object of the present invention to provide an ion pump system etc. having a high air-exhausting capacity and vacuum-maintaining capacity and capable of adjusting drive modes suitable for the uses thereof. The subject problem is solved by an ion pump system (7) comprising a casing (1), a first electrode group (2a,2b) provided in the casing (1), a second electrode group (3a,3b) provided on the outer periphery of the first electrode group (2a,2b), and outer magnets (4) for providing a magnetic field in the casing, wherein the first electrode group (2a,2b) and the second electrode group (3a,3b) are constituted as a plurality of layers alternately disposed around the center axis (11) of the casing (1).

Abstract: Disclosed is an ion pump system capable of efficaciously utilizing electrical fields and magnetic fields in all portions of a getter face, and thus of substantially improving exhaust efficiency. In particular, the present disclosure is based on the discovery that disposing a plurality of disc-shaped electrodes upon an internal casing (12) and further disposing a plurality of disc-shaped electrodes also upon an external casing (11) eliminates saddle points, allowing efficacious utilization of electrical fields and magnetic fields in all portions of the getter face, and thus substantially improving exhaust efficiency.