Abstract: A plasma pump, a plasma processing system and method to pump particles from a first region containing a plasma to a second region at a higher pressure is provided. The plasma pump and the plasma processing system each include a magnetic field producing member disposed within a passageway defined by an inner wall and an outer wall. The magnetic field producing member produces an alternating magnetic field that extends generally transverse to the passageway. An electric field producing member is disposed outside of the passageway and produces an electric field in a direction generally transverse to the passageway and generally transverse to the magnetic field. In one preferred embodiment, the passageway extends vertically and in another preferred embodiment, the passageway extends horizontally.

Abstract: An electroosmotic pump used in a closed loop cooling system. The pump includes a fluid chamber, a pumping element, an inlet electrode, an outlet electrode, and means for providing electrical voltage to the inlet electrode and the outlet electrode to produce an electrical field therebetween. The pumping element is configured to pump fluid therethrough, and the pumping element is positioned to segment the fluid chamber into an inlet chamber including a fluid inlet port and an outlet chamber including a fluid outlet port. The size of the inlet chamber is proportional to a predetermined residence time of the inlet chamber. The inlet electrode is positioned within the inlet chamber and a predetermined distance from a first surface of the pumping element. The outlet electrode is positioned within the outlet chamber and a predetermined distance from a second surface of the pumping element.

Abstract: The present invention relates to microfluidic systems, including valves and pumps for microfluidic systems. The valves of the invention include check valves such as diaphragm valves and flap valves. Other valves of the invention include one-use valves. The pumps of the present invention include a reservoir and at least two check valves. The reservoir may be of variable volume. The present invention also relates to a flexible microfluidic system. The present invention additionally relates to a method of making microfluidic systems including those of the present invention. The method includes forming a microfluidic system on a master, connecting a support to the microfluidic system and removing the microfluidic system from the master. The support may remain connected to the microfluidic system or the microfluidic system may be transferred to another substrate. The present invention further relates to a method of manipulating a flow of a fluid in a microfluidic system.

Abstract: An ion thrusting system is disclosed comprising an ionization membrane having at least one area through which a gas is passed, and which ionizes the gas molecules passing therethrough to form ions and electrons, and an accelerator element which accelerates the ions to form thrust. In some variations, a potential is applied to the ionization membrane may be reversed to thrust ions in an opposite direction. The ionization membrane may also include an opening with electrodes that are located closer than a mean free path of the gas being ionized. Methods of manufacture and use are also provided.

Abstract: A microchip integrated microfabricated, microfluidic, multichannel, preferably electroosmotic pump and pumping system is disclosed. The electroosmotic pump of the invention comprises a plurality of microchannels, which begin and end in common compartments, complexed into an array. The microchannels within the pump have substantially identical, optimal dimensions of cross-section and length such that sufficient pressure for optimal flow of fluid (e.g., liquid or gas) and pressure is generated by the pump and flow rates are stable and reproducible. To effectuate efficient flow of fluid without the hindrance of backpressure, an electroosmotic pump of the invention is coupled to a single channel of a larger cross-section. A similar structure is also used in an electroosmotic valve of the invention, where samples are introduced into an analytical device.

Abstract: An environmental sensor is used to determine a voltage output for a high voltage generator used along with first and second electrodes in an air transporter-conditioner system. In one embodiment, the environmental sensor is a particulate detector. If a low level of particulate is detected, a low output level can be used. If a high level of particulate is detected, a high output of the generator can be used. The environmental sensor can be also used as an ozone detector or a passive IR detector.

Abstract: An improved getter device and method for forming a calcium-rich getter thin film in an electronic vacuum device is disclosed. The getter device includes a powder of a Ca—Ba—Al ternary alloy composed of between 53% and 56.8% by weight of aluminum, from 36% to 41.7% by weight of calcium and from 1.5% to 11% by weight of barium. The method allows the formation of a calcium-rich getter thin film with a substantially reduced amount of released hydrogen in the vacuum device.

Abstract: The invention relates to a device for diffusing drops of at least one liquid, the device being of the type comprising at least one liquid displacement path defined by a series of pairs of close-together surfaces (4a, 6a, . . . , 14a) enabling liquid to be retained and to be displaced from one pair of surfaces to another. The device comprises: both a series of pairs of close-together surfaces (4a, 6a, . . . , 14a) defining at least one displacement path, and co-operating to store the liquid, to form drops of liquid, and to move liquid drops to an outlet from said path leading towards a drop destination site; and electric field application means applying a determined sequence of electric fields between the pairs of close-together surfaces so as to form drops of liquid from the liquid storage, and to move and mix the drops of liquid to the drop outlet of said path.

Abstract: A magnetohydrodynamic fluidic system includes a reagent source containing a reagent fluid and a sample source containing a sample fluid that includes a constituent. A reactor is operatively connected to the supply reagent source and the sample source. MHD pumps utilize a magnetohydrodynamic drive to move the reagent fluid and the sample fluid in a flow such that the reagent fluid and the sample fluid form an interface causing the constituent to be separated from the sample fluid.

Abstract: The present invention relates to controlled, magnetohydrodynamically-driven, fluidic networks containing a plurality of individually controlled branches. The branches consist of conduits equipped with pairs of electrodes that are controlled by electrode controllers. In operation, the network is placed within a magnetic field and potentials or currents are applied across electrode pairs within the various branches of the network in specifically determined magnitudes and polarities for specifically determined time intervals in accordance with an activation sequence that may be determined by an algorithm. Placed within a temperature gradient, at least a part of the network can act as a thermal cycler for use in biological interactions that employ temperature variations.

Abstract: A CRT including an evacuated envelope with a color selection electrode assembly disposed within the envelope, and an internal magnetic shield (IMS) secured to the color selection electrode assembly, and having a replaceable getter attachment assembly comprising a mounting rail and replaceable getter portion. The mounting rail having a first portion with a coupling clip attached to the IMS and a second portion extending therefrom. The replaceable getter portion includes a first end extending from the mounting rail with a getter cup attached thereto and a second end detachably attached to the second portion of the mounting rail. The replaceable getter portion extends from the mounting rail to deposit a film of evaporated getter material therefrom within the envelope.

Abstract: An electrokinetic pump in which the porous dielectric medium of conventional electrokinetic pumps is replaced by a patterned microstructure. The patterned microstructure is fabricated by lithographic patterning and etching of a substrate and is formed by features arranged so as to create an array of microchannels. The microchannels have dimensions on the order of the pore spacing in a conventional porous dielectric medium. Embedded unitary electrodes are vapor deposited on either end of the channel structure to provide the electric field necessary for electroosmotic flow.

Abstract: To prevent partial saturation of a getter by contact with absorbable atmospheric gases when the getter is introduced into a vacuum vessel, a method for introducing and activating the getter and a getter unit includes introducing the getter into the vacuum vessel packaged in a protective sleeve, closing off the vacuum vessel, evacuating the vessel, and opening the protective sleeve only after the evacuation has commenced. The protective sleeve can be opened by the sleeve being made to burst under the action of a protective gas atmosphere that is present.

Abstract: The present disclosure relates generally to microelectronic technology, and more specifically, to an apparatus used for the cooling of active electronic devices utilizing electro-osmotic pumps and micro-channels.

Abstract: An ion pump includes one or more anode pump cells, a cathode positioned in proximity to the one or more anode pump cells and a magnet assembly for producing a magnetic field in the one or more anode pump cells. An electric field is applied between the cathode and the one or more anode pump cells. The magnet assembly includes primary magnets of opposite polarities disposed on opposite ends of the anode pump cells and secondary magnets disposed on opposite sides of the anode pump cells. The magnet assembly may further include a magnet yoke which provides a magnetic flux return path. The magnet assembly produces a substantially uniform axial magnetic field in the one or more anode pump cells.

Abstract: A magnetohydrodynamic fluidic system mixes a first substance and a second substance. A first substrate section includes a first flow channel and a first plurality of pairs of spaced electrodes operatively connected to the first flow channel. A second substrate section includes a second flow channel and a second plurality of pairs of spaced electrodes operatively connected to the second flow channel. A third substrate section includes a third flow channel and a third plurality of pairs of spaced electrodes operatively connected to the third flow channel. A magnetic section and a control section are operatively connected to the spaced electrodes.

Abstract: Microfluidic channels utilizing magnetohydrodynamics are used to pump very small volumes of solution. The channels have electrodes along the walls of the channel and a current carrying species within the solution carries the current through the solution. The electric field generated by the use of the current carrying species is perpendicular to a magnetic field applied to the channel. The combination of the electric and magnetic fields causes the solution to flow through the channel.

Abstract: Apparatus for inducing, impeding, selectively filtering or otherwise effecting fluid flow in microfluidics applications. Opposing mesh layers are placed into relative motion by a variety of motive forces. Fluid between the opposing mesh layers is compressed so as to be pumped through the mesh layers when the relative motion of the layers is toward each other. Mesh layers may also be offset from each other though an actuating force so that one mesh layer blocks the openings in the other mesh layer, thereby creating an impediment to fluid flow. The degree of offset may be varied so as to create a partial impediment to fluid flow, thereby presenting a filter effect.

Abstract: A plasma vacuum pump including an array of permanent magnets, one or more plasma conduits or ducts, components for accelerating plasma ions through these conduits, and supporting structures that together comprise at least one applied plasma duct system (APDS) cell. The APDS cell permits large volumes of particles and plasma to flow rapidly in a preferred direction while constricting the flow of neutral particles in the reverse direction. A plasma pump utilizing APDS technology is intended to permit a large throughput of ionized gas at the intermediate pressures of interest in the plasma-enhanced processing industry, compressing this gas to a pressure at which blower-type pumps can be used efficiently to exhaust the spent processing gas at atmospheric pressure.

Abstract: Variable potential electrokinetic devices and electrokinetic multipliers used for pumping and flow control are disclosed that offer improvements in safety and design flexibility. The devices of the present invention take advantage of combinations of pumping conduits and conducting conduits to permit the use of lower operating voltages in pumps, pressure multipliers, and flow controllers. Devices having N pumping stages and 2N+1 electrodes permit the use of arbitrary voltages at the fluid connection points between the devices and other system components, further improving device safety and flexibility.

Abstract: A method for improving the pumping performance of an electrokinetic pump. The addition of zwitterions to the pump fluid or electrolyte of an electrokinetic pump (EKP) has been found to improve the pumping performance by increasing the maximum pressure and flow rate generated and increasing the efficiency for a given applied voltage. Zwitterions comprise a class of molecules that contain separated positive and negative charge centers within the molecule, are substantially electrically neutral, and generally exhibit a large inherent dipole moment (≈20-25 D) as a consequence of charge separation within the structure of the molecule. The addition of the zwitterion trimethyl ammonium propane sulfonate to an EKP electrolyte has resulted in a 3-fold increase in pump efficiency and a 2.5-fold increase in generated pressure for a given applied voltage.

Abstract: On an inner wall of a side wall portion of a funnel, a pair of protrusions are integrally formed as glass buildups at positions separated by a predetermined distance from an anode button toward a side of a neck tube. The pair of the protrusions are formed symmetrically on both sides of a virtual baseline extending to an seal edge surface and the neck tube through the center of the anode button. The virtual baseline is an intersection between a virtual plane including a tube axis and the inner wall, and passes through approximately the center of the seal edge surface in the lengthwise side.

Abstract: In accordance with the present invention, stable electroosmotic flow systems and methods for designing the same are disclosed. The invention provides electroosmotic flow systems comprising electroosmotic flow elements, including bridge elements, that have matching flux ratios, i.e., when two or more elements of an electroosmotic flow system are in fluidic and electrical communication at a junction, the flux ratio for each of the elements is selected so that the difference in flux ratios of any two elements is less than a target value. The invention also provides methods for designing such systems. Also disclosed is a novel design for the terminal portions of electroosmotic flow (EOF) and bridge elements and for junctions in electroosmotic flow systems, whereby the elements are designed so that the terminal current flux is much smaller than the element current flux.

Abstract: An electro-osmotic pump, for transporting aqueous solutions in micro-fluidics, has a tubular-shaped pumping section which includes a pump tube that is connected in fluid communication with an extension tube. A thread of silica fibers is positioned in the lumen of the pump tube, and an aqueous solution that will interact with the thread is introduced into the pump tube lumen to charge the aqueous solution. In operation, a voltage potential is selectively applied between the pump tube and the extension tube to establish a ground-potential-ground electric field along the pumping section. This creates a force on the charged aqueous solution that moves it through the pump tube and, consequently, also moves fluid through the extension tube. Various embodiments of the electro-osmotic pump are envisioned, including the serial connection of several pumping sections, for use as valves, switches or pumps.

Abstract: The sputter ion pump includes a vacuum chamber that includes an inner wall having a cylindrical section which is rugged in cross section. The rugged cylindrical section has outer recesses each of which is provided with a permanent magnets, each magnet having a same shape and a same characteristic so that a magnetic pole is directed to a same direction. The rugged cylindrical section has also inner recesses each of which is provided with a cylindrical anode electrode member spaced from the vacuum chamber wall. The rugged cylindrical section of the vacuum chamber wall is formed as a cathode electrode. A cylindrical shield member having a peripheral portion provided with evacuating bores is provided coaxially to the permanent magnets and anode electrodes. The permanent magnets and anode electrode members are arranged with equal spacing in an axis symmetrical configuration.

Abstract: Variable potential electrokinetic devices and electrokinetic multipliers used for pumping and flow control are disclosed that offer improvements in safety and design flexibility. The devices of the present invention take advantage of combinations of pumping conduits and conducting conduits to permit the use of lower operating voltages in pumps, pressure multipliers, and flow controllers. Devices having N pumping stages and 2N+1 electrodes permit the use of arbitrary voltages at the fluid connection points between the devices and other system components, further improving device safety and flexibility.

Abstract: An improved getter device and method for forming a calcium-rich getter thin film in an electronic vacuum device is disclosed. The getter device includes a powder of a Ca—Ba—Al ternary alloy composed of between 53% and 56.8% by weight of aluminum, from 36% to 41.7% by weight of calcium and from 1.5% to 11% by weight of barium. The method allows the formation of a calcium-rich getter thin film with a substantially reduced amount of released hydrogen in the vacuum device.

Abstract: A getter device is shaped like a substrate used in a deposition process. Embodiments of the device include a powdered getter material coated onto one or both sides of a support with a narrow rim portion left uncoated so that the device can be manipulated by automatic handling equipment. A method for using the getter device includes providing a vacuum chamber and automatic handling equipment, loading the device into the chamber, reducing the chamber pressure to a desired value by using the getter device in conjunction with an external pump, removing the getter device and replacing it with a substrate, and depositing a thin film on the substrate. The getter device can be in an activated state when loaded into the chamber, or it can be activated after being loaded by employing heating equipment ordinarily used to heat substrates placed in the chamber. The getter material of the device may also be activated in a separate activation chamber before the getter device is loaded into the vacuum chamber.

Abstract: A plasma pump, a plasma processing system and method to pump particles from a first region containing a plasma to a second region at a higher pressure is provided. The plasma pump and the plasma processing system each include a magnetic field producing member disposed within a passageway defined by an inner wall and an outer wall. The magnetic field producing member produces an alternating magnetic field that extends generally transverse to the passageway. An electric field producing member is disposed outside of the passageway and produces an electric field in a direction generally transverse to the passageway and generally transverse to the magnetic field. In one preferred embodiment, the passageway extends vertically and in another preferred embodiment, the passageway extends horizontally.

Abstract: Microfluidic channels utilizing magnetohydrodynamics are used to pump very small volumes of solution. The channels have electrodes along the walls of the channel and a current carrying species within the solution carries the current through the solution. The electric field generated by the use of the current carrying species is perpendicular to a magnetic field applied to the channel. The combination of the electric and magnetic fields causes the solution to flow through the channel.

Abstract: A plasma pump and method for pumping ions from a first to second region, the pump including a partition member having a through opening defining a plurality of conduits (30); a group of magnets (24) to provide magnetic forces that extend to the conduits; and a plurality of electric potential sources (14) for creating electrostatic fields which accelerate ions from the conduits to the second region.

Abstract: An electro-osmotic pump, for transporting aqueous solutions in micro-fluidics, has a tubular-shaped pumping section which includes a pump tube that is connected in fluid communication with an extension tube. A thread of silica fibers is positioned in the lumen of the pump tube, and an aqueous solution that will interact with the thread is introduced into the pump tube lumen to charge the aqueous solution. In operation, a voltage potential is selectively applied between the pump tube and the extension tube to establish a ground-potential-ground electric field along the pumping section. This creates a force on the charged aqueous solution that moves it through the pump tube and, consequently, also moves fluid through the extension tube. Various embodiments of the electro-osmotic pump are envisioned, including the serial connection of several pumping sections, for use as valves, switches or pumps.

Abstract: An apparatus for removing contaminants from a display device is disclosed. In one embodiment, an auxiliary chamber is adapted to be coupled to a surface of a display device such that contaminants within the display device can travel from the display device into the auxiliary chamber. A getter is disposed in the auxiliary chamber. The getter is adapted to capture the contaminants once the contaminants travel from the display device into the auxiliary chamber. In other embodiments, the getter is disposed in the border region surrounding the active area of the display.

Abstract: A pump comprises a first thermal guard having holes therethrough for passing a gas, a second thermal guard having holes therethrough for passing the gas, a porous thermal transpiration material disposed between the first thermal guard and the second thermal guard, and a heating mechanism to maintain a temperature difference between the thermal guards across the thermal transpiration material.

Abstract: An object of the present invention is to provide a non-evaporating getter which can maintain the adsorbability for the residual gases, and in addition, can secure sufficient characteristics particularly even when it experiences a high-temperature and low-vacuum condition in the fabrication process of a display unit.

Abstract: A getter system for purifying the gaseous atmosphere within a confinement volume of a process chamber is disclosed. In a process chamber provided with at least one screen that defines a confinement volume, the getter system includes at least one substantially planar getter device disposed within the confinement volume such that the at least one getter device is substantially parallel to and spaced apart from the at least one screen. The at least one getter device has an inner surface facing the at least one screen and an outer surface facing the confinement volume, with at least the inner surface being formed of getter material. The at least one getter device is spaced apart from the at least one screen such that the inner surface and the at least one screen define an inner space that is in gas flow communication with the confinement volume.

Abstract: The present invention relates to the use colloidal particles to realize photonic and microfluidic devices. In particular embodiments, colloidal particles are used to realize microfluidic a two-way valve, three-way valve, check valve, three-dimensional valve, peristalsis pump, rotary pump, vane pump, and two-lobe gear pump. In certain embodiments, actuation of an active element in the microfluidic structure is accomplished by electrophoresis, the use of an optical trap or “tweezer”, or the application of an electric field or magnetic field. In other embodiments, the application of an electrical field to colloidal particles that are substantially constrained to two dimensional movement is used to realize wave guides, filters and switches for optical signals.

Abstract: Provided is a method for creating fluid motion of an electro-sensitive movable fluid upon application of direct-current-voltage between two electrodes adjacent the fluid, the fluid having a conductivity &sgr;, and a viscosity &eegr; located inside a triangle in a graph showing a relation between a conductivity &sgr; plotted as abscissa, and a viscosity &eegr;, plotted as ordinate, of a fluid at the working temperature, said triangle having, as vertices, a point P indicated by the conductivity &sgr;=4×10−10 S/m and the viscosity &eegr;=1×100 Pa·s, a point Q indicated by the conductivity &sgr;=4×10−10 S/m and the viscosity &eegr;=1×10−4 Pa·s, and a point R indicated by the conductivity &sgr;=5×10−6 S/m and the viscosity &eegr;=1×10−4 Pa·s.

Abstract: A microfluidic system has an electroosmotic flow (EOF) pumping means for propelling fluids through a series of microchannels and selection valves. Pump channels are configured in groups which may be fabricated singly or in multiple groups onto a substrate. A bubble-free electric connection joint provides for the application of voltages across pump channels while simultaneously blocking the passage of fluids through the joint. Bubble-free electrodes are also provided to prevent electrolysis and bubble formation in or close to the microfluidic channels. The selection valves provide for routing functions within the microfluidic system and can also be configured to route fluids outside the system. A rate monitoring system is provided for determining and compensating for system flow rates. In one application the microfluidic system may be configured to operate as a small volume pipettor or other fluid transport or analysis device.

Abstract: The invention discloses a pumping device by non-vaporizable getter to create a very high vacuum in a chamber defined by a metal wall capable of releasing gas at its surface, characterized in that it comprises a thin layer of non-vaporizable getter coated on at least almost the whole metal wall surface defining the chamber.

Abstract: A trap apparatus is provided for improving the efficiency of trapping a product or the efficiency of regenerating the trap unit, i.e., the efficiency of removing the product deposited on the trap unit. The trap apparatus is disposed in a discharge path for evacuating a hermetically sealed chamber through a vacuum pump. The trap apparatus comprises a trap unit for depositing thereon a product contained in a discharged gas and removing the product, and the trap unit has a surface which has been subjected to hydrophilization treatment.

Abstract: A getter supporter of a cathode-ray tube according to the present invention comprises a mounting portion to be fixed to an inside of the cathode-ray tube at one end thereof, a getter holder for holding a getter at the other end thereof, and a spring portion for connecting the mounting portion and the getter holder, in which a contact support portion contacting with the inner surface of the funnel is provided on the spring portion at a position spaced apart in the longitudinal direction from the position of the getter holder. Accordingly, fine cracks of the funnel glass due to heat generation of the getter at getter flashing and heat generation of the contact support portion due to high frequency for heating can be prevented, and also the deformation of the getter supporter by the heat conducted to the contact support portion and the spring pressure can be prevented.

Abstract: A cooling system employing Micro Electro Mechanical System (MEMS) technology and polarization principles to move a cooling fluid over a surface requiring cooling and further employing electrohydrodynamic principles for the purpose of enhancing the heat transfer coefficient between the cooling fluid and the surface to be cooled.

Abstract: A cooling system employing Micro Electro Mechanical System (MEMS) technology and polarization principles to move a cooling fluid over a surface requiring cooling and further employing electrohydrodynamic principles for the purpose of enhancing the heat transfer coefficient between the cooling fluid and the surface to be cooled.

Abstract: A plasma pumping cell and method for pumping ions from a first region containing a plasma to a second region when the plasma pumping cell is interposed between the first and second regions, the plasma pumping cell including: a partition member (4) positioned between the first and second regions, the partition member (4) having a through opening defining a conduit (22); a plurality of magnets (24) positioned relative to the conduit in a manner to provide lines of magnetic force that extend through the conduit; a source of free electrons in communication with the conduit; and an electric potential source (34) disposed relative to the conduit to create an electrostatic field which accelerates ions from the conduit (22) to the second region.

Abstract: A getter assembly for use in a vacuum display panel is described. The novel getter assembly can be provided including both a non-evaporative getter and an evaporative getter which are uniquely positioned juxtaposed to each other such that ions emitted by the evaporative getter upon activation substantially shield the non-evaporative getter so that gases emitted by the non-evaporative getter when activated does not affect the state of vacuum in the vacuum display panel. A preferred embodiment of the present invention novel getter assembly is shown for vacuum display panels that have sufficient thickness in the cavity so that the getter assembly can be installed inside the cavity.

Abstract: Method for transporting at least one vaporous substance through the wall (4) of a vacuum chamber and into the vacuum chamber and device for executing and utilizing the method. In the method, a vaporous substance is introduced from the outside through an interior pipe (1) of a double-walled pipe into the vacuum chamber, with electric current from a power supply (3) applied to the interior pipe (1) and exterior pipe (2) of the double-walled pipe.

Abstract: An electrodiffusion pump includes a housing having an inlet, drug reservoir, and outlet. A diffusion membrane is disposed between the reservoir and outlet for diffusing the drug outwardly therethrough. Internal and external electrodes are disposed on opposite sides of the membrane. The electrodes are porous, and the external electrode is additionally perforate to expose a portion of the membrane at the outlet. The electrodes are electrically powered for driving drug ions through the membrane under electrophoresis to complement diffusion thereof.

Abstract: The present invention generally provides a micropump that utilizes electroosmotic pumping of fluid in one channel or region to generate a pressure based flow of material in a connected channel, where the connected channel has substantially no electroosmotic flow generated. Such pumps have a variety of applications, and are particularly useful in those situations where the application for which the pump is to be used prohibits the application of electric fields to the channel in which fluid flow is desired, or where pressure based flow is particularly desirable.

Abstract: An ion pump anode eliminates the intercellular spaces while maintaining an efficient cell shape in which the plasma sheath follows the contour of the cell wall. The cell are preferably quasi-cylindrical and can be manufactured by folding one or more metal strip into a corrugation and welding the strip to create separate cells. By eliminating the intercellular region, which support a high plasma density, the formation of dendrites under such a region is prevented and instabilities caused by those dendrites are eliminated.