Abstract: Provided is an image display apparatus including: a vacuum container having an electron source enclosed therein for displaying an image; an ion pump communicating with the vacuum container for discharging air therefrom and decreasing pressure therein; and a resistor connected in series with the ion pump with respect to a power supply for driving the ion pump. Even if internal resistance of the ion pump undergoes order-of-magnitude changes according to its operating state, current consumption can be suppressed and the ion pump can be driven efficiently.

Abstract: Apparatus and methods according to the present invention preferably utilize electroosmotic pumps in fluid handling and field sampling applications. The electroosmotic pumps used in these applications are capable of generating high pressure and flow without moving mechanical parts and the associated generation of unacceptable electrical and acoustic noise, as well as the associated reduction in reliability. Having multiple small flow channels in parallel provides both a high flow rate and high pressure in liquid handling. These electroosmotic pumps are fabricated with materials and structures that improve performance, efficiency, and reduce weight and manufacturing cost relative to presently available micropumps. These electroosmotic pumps also allow for recapture of evolved gases and deposited materials, which may provide for long-term closed-loop operation.

Abstract: An apparatus that includes an electroosmotic pump and an aqueous or nonaqueous electrolyte liquid and generates relatively low amount of hydrogen gas is described herein. The apparatus may further include a hydrogen absorber.

Abstract: A closed-drift Hall effect plasma vacuum pump includes one or more pumping conduits which are linked with a radial magnetic field. The magnetic field separates a plasma from a plasma at a higher pressure which is formed by cross-field plasma transport from a plasma processing region.

Abstract: The invention concerns a device comprising at least one field effect electron source within a sealed structure, which encompasses an internal space that contains a reducing gas whose purpose is to prevent oxidation of the emissive material of the electron source, whereby the reducing gas is a gas with the formula NxHy where x=1 or 2 and y=3 or 4, and which is advantageously under a pressure of between 10?8 and 10?1 mbar. It also concerns manufacturing processes for such a device and apparatuses for implementing these processes.

Abstract: In a method for manufacturing an electron tube including a front substrate and a back substrate, a wiring and an electrode are formed on the front substrate and/or the back substrate. A component is mounted on the front substrate and/or the back substrate. A ring-less getter is mounted on at least one of the front substrate, the back substrate and the component. A vessel is assembled and sealed so that the front substrate faces the back substrate. A light is irradiated on the ring-less getter from outside of the sealed vessel, thereby activating the ring-less getter.

Abstract: An ion pump includes one or more anode pump cells, a cathode positioned in proximity to the one or more anode pump cells and a magnet assembly for producing a magnetic field in the one or more anode pump cells. An electric field is applied between the cathode and the one or more anode pump cells. The magnet assembly includes primary magnets of opposite polarities disposed on opposite ends of the anode pump cells and secondary magnets disposed on opposite sides of the anode pump cells. The magnet assembly may further include a magnet yoke which provides a magnetic flux return path. The magnet assembly produces a substantially uniform axial magnetic field in the one or more anode pump cells.

Abstract: The present invention provides a pump for generating an Electroosmotic Flow (EOF) in a solution in a canal, guide, pipe or equivalent. Electroosmotic flow is generated by application of an electric field through a solution in a canal defined by insulating walls. The phenomenon depends on ionisation of sites on the surface so that for electroneutrality there is an excess mobile charge in the solution. The electric field acts on the excess charge in the solution causing the fluid to flow. The quantity and distribution of excess charge in the solution depends on the solution and the surface materials and is related to a parameter, the zeta (z) potential characterising material/solution combinations.

Abstract: The present invention provides a pump for generating an Electroosmotic Flow (EOF) in a solution in a canal, guide, pipe or equivalent. Electroosmotic flow is generated by application of an electric field through a solution in a canal defined by insulating walls. The phenomenon depends on ionisation of sites on the surface so that for electroneutrality there is an excess mobile charge in the solution. The electric field acts on the excess charge in the solution causing the fluid to flow. The quantity and distribution of excess charge in the solution depends on the solution and the surface materials and is related to a parameter, the zeta (z) potential characterising material/solution combinations.

Abstract: The invention relates to a fan blower (18) for a heating/air conditioning system, in particular for a motor vehicle, with an impeller (22) and a motor (24) that drives this impeller (22).

Abstract: An ion thrusting system is disclosed comprising an ionization membrane having at least one area through which a gas is passed, and which ionizes the gas molecules passing therethrough to form ions and electrons, and an accelerator element which accelerates the ions to form thrust. In some variations, a potential is applied to the ionization membrane may be reversed to thrust ions in an opposite direction. The ionization membrane may also include an opening with electrodes that are located closer than a mean free path of the gas being ionized. Methods of manufacture and use are also provided.

Abstract: A CRT including an evacuated envelope with a color selection electrode assembly disposed within the envelope, and an internal magnetic shield (IMS) secured to the color selection electrode assembly, and having a replaceable getter attachment assembly comprising a mounting rail and replaceable getter portion. The mounting rail having a first portion with a coupling clip attached to the IMS and a second portion extending therefrom. The replaceable getter portion includes a first end extending from the mounting rail with a getter cup attached thereto and a second end detachably attached to the second portion of the mounting rail. The replaceable getter portion extends from the mounting rail to deposit a film of evaporated getter material therefrom within the envelope.

Abstract: A closed-drift Hall effect plasma vacuum pump includes one or more pumping conduits which are linked with a radial magnetic field. The magnetic field separates a plasma from a plasma at a higher pressure which is formed by cross-field plasma transport from a plasma processing region.

Abstract: Variable potential electrokinetic devices and electrokinetic multipliers used for pumping and flow control are disclosed that offer improvements in safety and design flexibility. The devices of the present invention take advantage of combinations of pumping conduits and conducting conduits to permit the use of lower operating voltages in pumps, pressure multipliers, and flow controllers. Devices having N pumping stages and 2N+1 electrodes permit the use of arbitrary voltages at the fluid connection points between the devices and other system components, further improving device safety and flexibility.

Abstract: A getter system for purifying the gaseous atmosphere within a confinement volume of a process chamber is disclosed. In a process chamber provided with at least one screen that defines a confinement volume, the getter system includes at least one substantially planar getter device disposed within the confinement volume such that the at least one getter device is substantially parallel to and spaced apart from the at least one screen. The at least one getter device has an inner surface facing the at least one screen and an outer surface facing the confinement volume, with at least the inner surface being formed of getter material. The at least one getter device is spaced apart from the at least one screen such that the inner surface and the at least one screen define an inner space that is in gas flow communication with the confinement volume.

Abstract: A mass spectrometer (MS) which uses the Fourier transform ion cyclotron resonance (FTICR) technique to determine the mass of ions. The MS is prepared with a surface that guarantees that a particle striking the surface will have at least one contact with the cathode and will most likely be re-pumped before escaping into the vacuum chamber volume.

Abstract: Apparatus for altering translational velocity of molecules in a gas. A source of gas is in fluid communication with a supersonic nozzle. The nozzle is disposed on an arm at a selected distance from an axis for rotation about the axis. The nozzle has an exit portion substantially perpendicular to the arm. Motive apparatus rotates the arm so that the translational velocity of molecules with respect to a laboratory frame of reference is altered. In a preferred embodiment, gas flows from the source through the axis and the arm to exit from the nozzle.

Abstract: An ion pump anode eliminates the intercellular spaces while maintaining an efficient cell shape in which the plasma sheath follows the contour of the cell wall. The cell are preferably quasi-cylindrical and can be manufactured by folding one or more metal strip into a corrugation and welding the strip to create separate cells. By eliminating the intercellular region, which support a high plasma density, the formation of dendrites under such a region is prevented and instabilities caused by those dendrites are eliminated.

Abstract: A sputter ion pump incorporating a corrugated style anode comprising a plurality of cylindrical adjacent hollow cells provided with cross sections having substantially the same area and an arcuated perimeter.

Abstract: An apparatus for removing an undesirable gas in a processing chamber includes one or more getter materials disposed between a process gas inlet and a substrate support member in the processing chamber, and one or more temperature control elements disposed in thermal communication with the one or more getter materials. Preferably, a controller is connected to the one or more temperature control elements to regulate the temperature of the one or more getter materials, and a gas analyzer is disposed within the processing chamber to provide signals to the controller and indicate the presence of undesirable gases. Another aspect of the invention provides a method for removing a gas from a processing chamber comprising pumping the gas using a getter material disposed between a process gas inlet and a substrate support member in the processing chamber, wherein the getter material is activated by a temperature control element disposed in thermal communication with the getter material.

Abstract: A fan assembly includes a tubular housing and electrodes which ionize air and cause the air to be filtered and to move through the tubular housing without use of moving parts, such as an impeller, thereby providing air filtration and ventilation without generation of vibrations and acoustic disturbances. An electric potential is applied between a longitudinally-oriented needle electrode and a planar or curved transversely-oriented net electrode disposed within the housing downstream of the needle electrode, thereby forming a longitudinally asymmetric electric field that ionizes and accelerates air molecules toward the net electrode, carrying the air molecules past the net electrode and through the air outlet. The assembly further includes a tubular duct electrode disposed within the housing on the outlet side ofthe net electrode, which collects ionized particles precipitated from the air.

Abstract: A getter pump includes a one-piece, substantially U-shaped frame having a bottom, a first sidewall, and a second sidewall opposing the first sidewall. The first and second sidewalls each have a plurality of slots formed therein. A plurality of getter elements are housed in the frame. Each of the getter elements is disposed in one of the slots in the first sidewall and a corresponding slot in the second sidewall. A heating member for heating the getter elements to their operating temperature is disposed in the frame. A preformed sheet of metal for use in forming a component of a getter pump has a top surface, a bottom surface, and discontinuous perforations formed therein to define a generally rectangular frame section. This frame section is connected to the remainder of the sheet by breakaway tabs and has a pair of folding lines formed therein to define a middle section and opposing outer sections. Each of the opposing outer sections has a plurality of slots formed therein.

Abstract: A sputter ion pump including an anode assembly comprising a plurality of hollow anode cells and cathode surfaces having open spirals disposed at each end of said anode cells.

Abstract: A sputter ion pump in which the ratio of the length L to the diameter D of each anode cell forming a multi-cell anode inserted between two cathodes is defined within a certain range, thereby increasing a critical vacuum level to be evacuated and achieving a higher exhaust speed.

Abstract: A getter pump module includes a number of getter disks provided with axial holes, and a heating element which extends through the holes to support and heat the getter disks. The getter disks are preferably solid, porous, sintered getter disks that are provided with a titanium hub that engages the heating element. A thermally isolating shield is provided to shield the getter disks from heat sources and heat sinks within the chamber, and to aid in the rapid regeneration of the getter disks. In certain embodiments of the present invention the heat shields are fixed, and in other embodiments the heat shield is movable. In one embodiment, a focus shield is provided to reflect thermal energy to the getter material from an external heater element and provide high pumping speeds. An embodiment of the present invention also provides for a rotating getter element to enhance getter material utilization.

Abstract: Flat, insulated, metallic strips ("applicators"), are fixed to the wider sides of each permanent magnet assembly in the channel array of a Magnetohydrodynamic (MHD) Vacuum Pump. Electromagnetic power from an external rf/microwave generator is delivered by an appropriate transmission line to each pair of applicators, providing an rf/microwave electric field, generally parallel to the magnetic field of the magnets, across each channel in the array. As the plasma ions and electrons formed by the rf/microwave field lose energy by collisions with the channel surfaces and by collisions with neutral molecules in the channel, the microwave electric field reheats the plasma throughout its passage through the length of the channel array, increasing plasma density and enabling the use of much longer channels, thus increasing the throughput and compression ratio in the MHD Vacuum Pump.

Abstract: A getter pump module includes a number of getter disks provided with axial holes, and a heating element which extends through the holes to support and heat the getter disks. The getter disks are preferably solid, porous, sintered getter disks that are provided with a titanium hub that engages the heating element. A thermally isolating shield is provided to shield the getter disks from heat sources and heat sinks within the chamber, and to aid in the rapid regeneration of the getter disks. In certain embodiments of the present invention the heat shields are fixed, and in other embodiments the heat shield is movable. An embodiment of the present invention also provides for a rotating getter element to enhance getter material utilization.

Abstract: An ion drag vacuum pump is installed in a body, one side of which is connected to and in communication with a sealed chamber. An ion generating device and a positive ion dragging device for dragging positive ions generated by the ion generating device to exhaust gases located near the ions by speeding up the ions is disposed in the body. The positive ions are neutralized by a positive ion neutralizing device. The ion generating device includes a corona electrode as a corona discharger to which a positive voltage is applied, a metal plate as a DC glow discharger to which a positive DC voltage is applied, or a first RF electrode and a second RF electrode to which RF power is applied. The ion dragging device includes a target electrode or a first and a second grids to which a positive and a negative voltage are respectively applied. The ion neutralizing device includes a grounded baffle plate.

Abstract: An exhaust apparatus and a high vacuum pumping unit including such high vacuum device and an auxiliary vacuum pump are disclosed, wherein a high vacuum is achieved in a vacuum vessel such that the gas molecules within the vacuum vessel are ionized and accelerated to be exhausted and, further, in the high vacuum pumping unit, those gas molecules diffused back or desorbed from the vacuum pump are ionized and accelerated to be returned to the vacuum pump.

Abstract: Apparatus for capillary electrophoresis having an auxiliary electroosmotic pump. Following a conventional capillary electrophoresis system having a single power supply, a separation capillary, and an optical detector, a conductive membrane connects a second capillary to a second power supply. The second capillary and second power supply act together as an auxiliary electroosmotic pump capable of augmenting or inhibiting the bulk electroosmotic flow in the separation capillary. The apparatus can be used to optimize the stacking profile of the sample and, thus, improve the separation efficiencies for charged solutes.

Abstract: An ion pump permits the continuous evacuation of a small-envelope vacuum chamber while drawing a relatively small amount of power (micro watts). In a preferred embodiment, the present ion pump, due to its small size and integration within the vacuum chamber, enables the device in which the vacuum chamber is incorporated to be portable and to retain its original dimensions.

Abstract: By combining electro-osmotic and electrohydrodynamic pumps in a microchannel, both polar and non-polar fluids can be moved along said channel. The pumps can be made from pairs of wire electrodes inserted into openings in the channel and connected to a source of a pulsed DC power. By reversing the voltages on alternate pairs of pumps, fluid flow can be reversed, thereby acting as a gate or valve. By using digital drivers, for example shift registers that can apply a signal to a switching device connected to an electrode by means of enabling and latch signals to an AND gate, control of flow in individual channels in an array of channels can be had with a high degree of integration, and provide for ready manufacturability.

Abstract: Method and apparatus for flow injection analysis (FIA) using an electroosmotic pump. The apparatus includes: an electroosmotic pump having a grounding joint; a sample injection valve for introducing a sample into a carrier stream which valve is in fluid communication with the grounding joint by way of a conduit; a dispersion coil in fluid communication with the sample injection valve; and a detector which is in fluid communication with the dispersion coil. The grounding joint couples the electroosmotic pumping system and the FIA system but electrically isolates them.Generally, the method utilizes one fluid which is electroosmotically pumped to propel a carrier for flow injection analysis at a controllable flow rate. More specifically, the method includes the steps of: adding a sample to a liquid carrier stream to form a sample zone in the carrier stream; flowing a liquid pumping stream by electroosmosis; and connecting the pumping stream with the carrier stream to propel the carrier stream.

Abstract: An exhaust apparatus and a high vacuum pumping unit including such high vacuum device and an auxiliary vacuum pump are disclosed, wherein a high vacuum is achieved in a vacuum vessel such that the gas molecules within the vacuum vessel are ionized and accelerated to be exhausted and, further, in the high vacuum pumping unit, those gas molecules diffused back or desorbed from the vacuum pump are ionized and accelerated to be returned to the vacuum pump.

Abstract: A method for producing a substantially silica-free composition of matter comprising a matrix of MoSi.sub.2 having SiC dispersed therein, the matrix being reinforced with a particulate ductile refractory metal, the method comprising providing a composite of the particulate ductile refractory metal and a substantially silica-free composite mechanical alloy powder comprising MoSi.sub.2 and SiC having a composition in that segment of the ternary diagram of FIG. 1 designated A, and consolidating the composite of particulate ductile refractory metal and mechanical alloy powder; the coefficient of thermal expansion of the MoSi.sub.2 matrix having SiC dispersed therein being substantially equivalent to that of the particulate ductile refractory metal. The composition of matter formed by the method and an article of manufacture comprising the same are also disclosed.

Abstract: An exhaust apparatus and a high vacuum pumping unit including a high vacuum device and an auxiliary vacuum pump are disclosed, wherein a high vacuum is achieved in a vacuum vessel such that the gas molecules within the vacuum vessel are ionized and accelerated to be exhausted. In the high vacuum pumping unit, those gas molecules are diffused back or released from the vacuum pump are ionized and accelerated to be returned to the vacuum pump.

Abstract: An exhaust apparatus and a high vacuum pumping unit including such high vacuum device and an auxiliary vacuum pump are disclosed, wherein a high vacuum is achieved in a vacuum vessel such that the gas molecules within the vacuum vessel are ionized and accelerated to be exhausted and, further, in the high vacuum pumping unit, those gas molecules diffused back or desorbed from the vacuum pump are ionized and accelerated to be returned to the vacuum pump.

Abstract: A method and apparatus for discharging hydrogen from a vacuum vessel using a roughing vacuum pump and a turbo-molecular pump. During discharge of hydrogen from the vacuum vessel, a material which has excellent reactivity with hydrogen, such as a material which has been excited or ionized by microwave or laser radiation, is introduced into the exhaust system. The material reacts with hydrogen to convert hydrogen into another substance of large molecular weight, whereby the evacuating performance of the vacuum exhaust system is improved with respect to discharging of hydrogen.

Abstract: An evaporable getter device, for mounting in an electron tube, comprises a holder whose bottom wall is provided with means for preventing detachment of getter metal vapor releasing material which has been pressed into the holder and which has a multiplicity of means which retard the transmission of heat in a circumferential direction through the getter metal vapor releasing material. When the getter device is heated by currents induced from a radio-frequency field generated by a coil positioned outside the electron tube large amounts of getter metal are released in a short time without detachment of material from the holder. The heat retarding means are preferably four equally spaced radial grooved formed in the upper surface of the getter metal vapor releasing material.

Abstract: An improved electronic device allows for the feeding of an ion pump with a plurality of voltages that are changed as a function of the current drawn by the pump and therefore of the pressure value within the pump.

Abstract: A gettering device for hydrogen isotopes and gaseous hydrocarbons based on the interaction of a plasma and graphite used as cathodic material. The plasma is maintained at a current density within the range of about 1 to about 1000 mA/cm.sup.2. The graphite may be heated to a temperature greater than 1000.degree. C. The new device offers high capacity, low noise, and gas species selectivity.

Abstract: An electronic device for feeding an ion pump with two different tensions and for improved measuring of the pressure in the pump, the two different tensions being a normal operating tension and a lower tension at which a correct measurement of the pressure can be made in a pressure range up to beyond 10.sup.-10 torr. through a transformer whose primary or secondary winding is divided into two sections that can be connected and separated by switches controlled by oscillator circuits. Alternatively feeding at two different tensions can be obtained by feeding to the primary winding of the transformer a pulsed tension having a rectangular wave form and a high frequency controlled by a field effect transistor having an isolated gate. A sampling and holding circuit permits the pressure to be measured only in the conditions of feeding at the lower tension.

Abstract: Ion pump (10) has feedthrough (33) for electrical connection to anode post (32) within the pumping chamber. Opening (36) in the pumping chamber wall receives a portion of insulator (42). The insulator (42) has a flange (48) which is of larger diameter than the opening (36) so that sputtered cathode material cannot directly disposit on the outer and upper surfaces of the flange (48).

Abstract: A sputter ion pump with a cathode having blades arranged radially adjacent the cylindrical hollow cells of the anode.This arrangement increases the probability of grazing collisions useful for the formation of fast inert gas molecules, particularly argon. This improves the pumping speed and the speed stability in time.

Abstract: An ion pump comprises a pump casing inserted in a magnetic field, with an anode supported by insulators in the pump casing. Both the pump casing and anode are made of alminum-based metals, and the pump casing serves also as a cathode, thereby the ion pump has a simpler structure and functions more efficiently than the conventional ones.

Abstract: A noble gas leak detector is provided using a non-evaporable getter pump to remove active gases but not noble gases during leak detection. The vacuum system is constructed of all-metal valves, metal connection devices and metal passageways to reduce out gassing and minimize the permeation of helium into the system. Valves are appropriately located to seal off unnecessary devices during the actual leak detection. In addition, a process of calibrating a noble gas leak detector is provided using americium 241 alpha as the calibrating source.

Abstract: An ion pump is described which includes a vacuum housing, a unique, readily removable and replaceable magnet system which makes it possible to measure leakage current alone and a unique, readily removable and replaceable reactive metal cathode for reacting with gaseous ions impinging thereon for their collection. It also includes a novel tandem sputter shielding arrangement for preventing deposition of sputter products on the anode insulator. Both power supply and current metering means which may be mounted on and directly connected to the ion pump are also described.

Abstract: Gas-contaminated particulate material is passed through a vacuum chamber wherein it is subjected to an electric field to charge the gaseous contaminants to cause the gaseous contaminants to separate from the particulate material and enter a gas flow path through a vacuum-outlet conduit inflow communication with a vacuum source. A series of electrical potentials are established in the vacuum outlet conduit by a series of electrodes spaced from one another. Adjacent potentials or electrodes are of opposite polarity and the distance between adjacent potentials or electrodes decreases in the direction of the gas flow path out the vacuum outlet conduit whereby the vacuum and the electrodes move the gases from the vacuum chamber.

Abstract: In particle beam optical instrumentation, an array of conventional sputter ion pump cells distributed in a ring shaped array about the circumference of the volume (optical column) to be pumped. An axially symmetrical, hollow, toroid magnetic circuit, formed by axially symmetrical magnets, either of the permanent type or of the electromagnetic type (or a combination of both), is used and the pumping action is outward from the central throughbore in the column so that the bore space could be occupied by other instrumentation. The magnetic circit may be used for particle beam focusing (optical lens) as well as for the pumping action by introducing magnetic gaps in either a series or parallel configuration.

Abstract: A method of trapping lubricant in a vacuum system and an assembly for performing same wherein a vacuum chamber has an outlet duct to a vacuum source to establish a gas flow path from the vacuum chamber to the vacuum source. Lubricant vapors from the vacuum source such as a vacuum pump are prevented from entering the vacuum chamber in accordance with the instant invention by establishing an electric field and subjecting the lubricant entering the vacuum outlet duct from the vacuum source to the electric field to electrically charge the lubricant and electrically attract the lubricant back toward the vacuum source. A magnetic field is also established between the electrodes to further urge the charged lubricant back toward the vacuum source. In this manner the lubricant is prevented or substantially prevented from entering and contaminating the vacuum chamber.