Abstract: Disclosed are a lithium ion battery negative electrode material and a preparation method therefor. The negative electrode material comprises SiOy (0.2<y<0.9) and an M compound, wherein M is a metal. The method of the present application comprises: subjecting a raw material comprising a SiOx material and the metal M to a redox reaction, wherein the O/Si ratio, i.e. x, of the SiOx (0.5<x<1.5) material is adjusted to y (0.2<y<0.9), and at the same time, the metal M is oxidized to obtain the M compound.

Abstract: The present embodiments may relate to secondary systems that verify potential fraud or the absence thereof. Artificial intelligence and/or chatbots may be employed to verify veracity of statements used in connection with insurance or loan applications, and/or insurance claims. For instance, a veracity analyzer (VA) computing device includes a processor in communication with a memory device, and may be configured to: (1) generate at least one model by analyzing a plurality of historical statements to identify a plurality of reference indicators correlating to inaccuracy of a historical statement; (2) receive a data stream corresponding to a current statement; (3) parse the data stream using the at least one model to identify at least one candidate indicator included in the current statement matching at least one of the plurality of reference indicators; and/or (4) flag, in response to identifying the at least one candidate indicator, the current statement as potentially false.

Abstract: In one aspect, computer-implemented method may include receiving, from a cloud-based computing system, one or more machine learning model parameters that are configured to enable predicting a remaining useful life of each cell of a battery pack of a vehicle. The method may include loading, into memory of a processing device at the vehicle, the one or more machine learning model parameters, receiving data comprising one or more measurements and one or more user battery usage profiles, and based on the data, executing a trained machine learning model with the one or more parameters to input the data and to output the remaining useful life of each cell of the battery pack.

Abstract: The invention provides a flexible panel and a method of fabricating the same. The flexible panel includes a flexible substrate, an overcoat layer and a device layer. The overcoat layer is disposed over and directly contacting the flexible substrate. The device layer is disposed over the overcoat layer. In the invention, the flexible substrate can be directly formed on the carrier, such that an additional layer that helps release between the carrier and the flexible substrate may not be needed, and the flexible substrate can be separated from the carrier by the overcoat layer thereon, thereby reducing the production costs and ensure the quality of the flexible panel.

Abstract: Provided are methods of producing a negative electrode including comminuting Li-Group IVA alloy particles in a solvent to a desired particle size distribution range, exposing surfaces of the Li-Group IVA alloy particles to a monomer or polymer surface modifier present during the comminution process, the surface modifier forming a continuous coating on an exposed surface of the Li-Group IVA alloy particles, removing the solvent, and adding the surface-modified Li-Group IVA alloy particles to a negative electrode material by a coating process.

Abstract: A method of preparing an electrode material includes heating a substrate with a bonding agent to form a self-assembled monolayer-containing material; and depositing a polymer coating onto the self-assembled monolayer-containing material under an elevated temperature to form a layered material. An electrode material and an electrode incorporating the electrode material is also provided.

Abstract: A composite material of polyurethane foam having a layer of reduced graphene oxide and polystyrene is described. This composite material may be made by contacting a polyurethane foam with a suspension of reduced graphene oxide, drying, and then irradiating in the presence of styrene vapor. The composite material has a hydrophobic surface that may be exploited for separating a nonpolar phase, such as oil, from an aqueous solution.

Abstract: In manufacturing a storage battery electrode, a method for manufacturing a storage battery electrode with high capacity and stability is provided. As a method for preventing a mixture for forming an active material layer from becoming strongly basic, a first aqueous solution is formed by mixing an active material exhibiting basicity with an aqueous solution exhibiting acidity and including an oxidized derivative of a first conductive additive; a first mixture is formed by reducing the oxidized derivative of the first conductive additive by drying the first aqueous solution; a second mixture is formed by mixing a second conductive additive and a binder; a third mixture is formed by mixing the first mixture and the second mixture; and a current collector is coated with the third mixture. The strong basicity of the mixture for forming an active material layer is lowered; thus, the binder can be prevented from becoming gelled.

Abstract: A polyvinyl halide compound has thermal conductivity and includes polyvinyl halide resin, natural or synthetic graphite of flake or spheroid form, and at least 0.5 weight percent of epoxidized vegetable oil. Selection of types and amounts of graphite and epoxidized vegetable oil provide thermal conductivity while other desirable properties of the compound are suitably maintained. The compound can be used for making any end use article that needs flame retardance and good thermal management and is especially useful as a thermally conductive material to replace die cast or extruded aluminum heat sinks in industrial applications, such as LED lighting fixtures.

Abstract: A method of infiltrating a fiber preform comprises positioning an assembly in a process chamber, where the assembly includes a tool comprising through-holes, a fiber preform constrained within the tool, and a sacrificial preform disposed between the fiber preform and the tool. The sacrificial preform is gas permeable. The process chamber is heated, and gaseous reactants are delivered into the process chamber during the heating. The gaseous reactants penetrate the through-holes of the tool and infiltrate the sacrificial preform and the fiber preform. Deposition of reaction products occurs on exposed surfaces of the fiber preform and the sacrificial preform, and a coating is formed thereon. In addition, the sacrificial preform accumulates excess coating material formed from increased reactions at short diffusion depths. Accordingly, the coating formed on the fiber preform exhibits a thickness variation of about 10% or less throughout a volume of the fiber preform.

Abstract: An electrode for a secondary battery comprises a current collector; and an active material-containing layer has active materials which comprise titanium-containing composite oxide having an orthorhombic crystal structure and represented by a general formula Li2+aM12?bTi6?cM2dO14+?; wherein the active material-containing layer has intensity ratio Ia/Ib in an X-ray diffraction pattern of the active material-containing layer, the Ia and the Ib are obtained by powder X-ray diffraction method using Cu-K? ray, the intensity ratio is within a range of 0.5?Ia/Ib?2, the Ia is the strongest intensity of a diffraction peak among diffraction peaks appearing within a range of 42°?2??44°, and the Ib is the strongest intensity of a diffraction peak among diffraction peaks appearing within a range of 44°<2??48°.

Abstract: A microwave plasma reactor for manufacturing synthetic diamond material via chemical vapour deposition, the microwave plasma reactor includes a plasma chamber, a substrate holder, a microwave coupling configuration for feeding microwaves into the plasma chamber, and a gas flow system for feeding process gases into the plasma chamber and removing them therefrom. The gas flow system includes a gas inlet array having a plurality of gas inlets for directing the process gases towards the substrate holder. The gas inlet array includes at least six gas inlets disposed in a substantially parallel or divergent orientation relative to a central axis of the plasma chamber.

Abstract: A method for making a carbon fiber film includes suspending a carbon nanotube film in a chamber. A negative voltage is applied to the carbon nanotube film. A carbon source gas is supplied into the chamber, wherein the carbon source gas is cracked to form carbon free radicals, and the carbon free radicals are graphitized to form a graphite layer on the carbon nanotube film.

Abstract: A method for coating temperature-sensitive substrates with polycrystalline diamond by a hot-wire CVD method, in which hydrogen and at least one carbon carrier gas are fed into a coating chamber. The fed gases are split at an electrically heated wire in such a way that carbon is formed and deposits on the temperature-sensitive substrate in the form of the diamond modification thereof. The substrate is arranged in the coating chamber, which is at a reduced pressure, and electrical power to electrically heat the wire is adjustable. The method is performed cyclically in respect of the electrical power that is fed to electrically heat the wire. A basic power is fed as lower threshold value for a predetermined time (basic load phase) and is increased for a further predetermined time to a maximum power as an upper threshold value (pulse phase) and is then reduced again to the basic power.

Abstract: The present application relates to a porous material and preparation methods thereof, and anodes and devices including the same. The porous material provided by the present application includes a material of the formula SiaMbOx, wherein the ratio of x to a is about 0.6 to about 1.5, and the ratio of a to b is about 8 to about 10,000, wherein M includes at least one selected from the group consisting of Al, Si, P, Mg, Ti and Zr. The anode and an electrochemical device including the porous material exhibit higher rate performance, higher first coulombic efficiency, higher cycle stability and lower cycle expansion ratio.

Abstract: Methods of forming a plurality of axial geometry carbon structures (e.g., carbon nanotubes or carbon fibers) in situ in an electrode of an electrochemical cell that cycles lithium ions are provided. Electroactive particles that undergo volumetric expansion are mixed with a polymer precursor and a plurality of catalytic nanoparticles comprising a metal selected from the group consisting of: iron, nickel, cobalt, alloys, and combinations thereof to form a substantially homogeneous slurry. The slurry is applied to a substrate and then heated in an environment having a temperature of ?about 1000° C. and in certain aspects, ?about 895° C. to pyrolyze the polymer precursor. The plurality of catalytic nanoparticles facilitates in situ precipitation of carbon to grow a plurality of axial geometry carbon structures. After the heating, the electrode includes an electrically conductive carbonaceous porous network comprising the plurality of electroactive particles and the plurality of axial geometry carbon structures.

Abstract: The present disclosure relates to a device that includes a first electrode, where the first electrode includes magnesium metal having a first surface, and a first coating in physical contact with the first surface and covering substantially all of the first surface, where the first coating has a first thickness, and the first coating is configured to transport a plurality of magnesium ions through the first thickness, such that a first portion of the plurality of magnesium ions are reversibly depositable as elemental magnesium onto the first surface.

Abstract: Gas sensor, comprising: a substrate of semiconductor material; a first working electrode on the substrate; a second working electrode on the substrate, at a distance from the first working electrode; an interconnection layer extending in electrical contact with the first and the second working electrode, configured to change its conductivity when reacting with gas species to be detected. The interconnection layer is of titanium oxide, has a porosity between 40% and 60% in volume and is formed by a plurality of meso-pores having at least one dimension in the range 6-30 nm connected to nano-pores having at least one respective dimension in the range 1-5 nm.

Abstract: A silicon anode comprising a hybrid binder at a blending ratio of 10-90 wt. % for use in a Li-ion battery is provided. The combination of a hybrid binder in the Si anode for use in a rechargeable Li-ion cell shows the unexpected result of extending the cycle life and a balancing effect between adhesion strength and first cycle efficiency.

Abstract: A positive active material for a positive electrode of a battery cell which includes a first component containing a compound of general formula: Li2-zNazM11-yM2yO3, where M1 and M2 are different from one another and stand for transition metal ions, 0<y<1, and 0?z<2, with the condition that the compound is essentially free of manganese ions. Moreover, a positive electrode of a battery cell which includes the positive material, and a battery cell which includes at least one positive electrode, are also described.

Abstract: Silicon particles for use in an electrode in an electrochemical cell are provided. The silicon particles can have surfaces providing an average contact angle less than about 87.2°. The silicon particles can also have outer regions extending about 20 nm deep from the surfaces. The outer regions can include an amount of aluminum such that a bulk measurement of the aluminum comprises at least about 0.01% by weight of the silicon particles.

Abstract: A Lithium-transition-metal-phosphate compound of formula Li0.9+xFe1-yMyPO4) in the form of secondary particles made of agglomerates of spherical primary particles wherein the primary particles have a size in the range of 0.02-2 pm and the secondary particles a mean size in the range of 10-40 pm and a BET surface of 16-40 m2/g, a process for its manufacture and the use thereof.

Abstract: The present invention relates to a method for manufacturing a device for heat transmission, dissipation and highly efficient capillary siphoning action. The method comprises preparing a metal substrate; processing a surface of the metal substrate to form a rugged surface layer thereon; neutralizing, cleaning and drying the metal substrate to remove oil and rust thereon; placing the metal substrate into a first vacuum chamber for heating, deoxygenizing by hydrogen gas and ion bombarding to the rugged surface layer. Further, the metal substrate can be selectively subject to deposition, decomposition, degradation and reaction treatments for obtainment of a device for heat transmission, dissipation and highly efficient capillary siphoning action.

Abstract: A template-assisted method for the synthesis of 2D nanosheets comprises growing a 2D material on the surface of a nanoparticle substrate that acts as a template for nanosheet growth. The 2D nanosheets may then be released from the template surface, e.g. via chemical intercalation and exfoliation, purified, and the templates may be reused.

Abstract: The present invention provides the following thin film-laminated film that has high chemical stability even at low costs and that can preferably be used as an electrode film of a strip for a blood sugar level sensor. The thin film-laminated film including a film substrate, and a titanium thin film and a carbon thin film laminated in this order on at least one surface of the film substrate. Preferably, the above-described thin film-laminated film, in which the titanium thin film has a film thickness of from 10 to 400 nm, and the carbon thin film has a film thickness of from 0.2 to 50 nm. In addition, a strip for a blood sugar level sensor, including the above-described thin film-laminated film. Further, a blood sugar level sensor device including the above-described strip for a blood sugar level sensor.

Abstract: A lithium electrode includes a first lithium layer made of lithium or a lithium alloy, a current collector situated on a first side of the lithium layer, and a lithium-ion-conducting protective layer situated on a second side of the lithium layer opposite the first side. An intermediate layer completely covers the second side of the lithium layer and is situated between the lithium layer and the protective layer. The protective and intermediate layers have an electrical conductivity of less than 10?10 S/cm. The lithium electrode may be used as the anode of a rechargeable lithium-ion battery. A lithium layer is applied to a current collector, an intermediate layer is applied to the lithium layer so that the intermediate layer completely covers the lithium layer, and a lithium-ion-conducting protective layer is applied to the intermediate layer.

Abstract: Provided herein is a battery module for starting the engines of outdoor power equipment such as automobiles, boats, trucks and tractors. The battery module disclosed herein has high performance at low temperature and has a maximum pulse discharging current measured at ?30° C. of not less than 15% of the maximum pulse discharging current measured at 25° C. over a pulse discharge period of about 5 seconds. In addition, the battery module disclosed herein has a low self-discharging rate at both room temperature and high temperature. The capacity retention of the battery module is not less than 85% of its initial capacity after 7 months of room temperature storage.

Abstract: The method of protecting a component of a turbomachine from liquid droplets erosion provides covering at least one region of a component surface exposed to a flow of a fluid containing a liquid phase to be processed by the turbomachine with a protective layer. The protective layer consists of a plurality of adjacent sub-layers of different materials having high hardness in the range of 1000-3000 HV and low fracture toughness below 20 MPam1/2. The materials are typically nitrides or carbides of titanium or aluminum or chromium or tungsten. In an embodiment, the covering is carried out by a PVD technique, in particular by Cathodic Arc PVD, or a CVD technique. The method may be applied to any component of turbomachines, but it may be particularly beneficial for parts of centrifugal compressors.

Abstract: Provided is a flexible and self-supporting insulating film including a base support layer and a partially cured poly(amide)imide layer applied to the base support layer. The composite insulating film may be used as slot liner to provide insulation to the components of the electric motor. The partially cured poly(amide)imide layer of the composite insulation film maybe further cured by the heat generated by the operation of the electric motor.

Abstract: A manufacturing method of a fuel cell separator is provided, whereby the adhesion of a carbon film against a titanium base substrate can be improved and favorable corrosion resistance can be obtained at the same time. A fuel cell separator having such improved adhesion and favorable corrosion resistance is also provided. The method for manufacturing a fuel cell separator according to an embodiment of the invention includes the steps of: forming a TiOx (1<x<2) layer 42 on a titanium base substrate 40; and forming a carbon film 44 on the TiOx layer 42 by plasma CVD so that a binder layer 43 including Ti, O and C is formed between the TiOx layer 42 and the carbon film 44.

Abstract: Methods for obtaining composites of polyaniline and reduced graphene oxide are disclosed. The methods include dispersing graphene oxide in an acid aqueous solution containing an anionic emulsifying agent to obtain a dispersion of the graphene oxide, dissolving an aniline oligomer in an organic solvent to obtain a solution of the oligomer, and mixing the solution of the oligomer with the dispersion of graphene oxide to obtain a composite of polyaniline and reduced graphene oxide. The methods may also include recovering a precipitate of the polyaniline/reduced graphene oxide composite, and dissolving the precipitate in an organic solvent to form a conductive ink or an ink for electronic devices.

Abstract: An apparatus for manufacturing a lithium-ion secondary cell negative-electrode carbon material by heat-treating carbon particles while causing the carbon particles to flow within a heat-treatment furnace, the apparatus having a heat-treatment furnace provided with a carbon-particle supply opening for supplying the carbon particles into the interior, and a negative-electrode carbon material recovery opening for taking out the negative-electrode carbon material from the interior and a cooling tank connected in an airtight manner to the negative-electrode carbon material recovery opening of the heat-treatment furnace, and provided with a cooling means.

Abstract: Embodiments described herein provide methods and apparatus for forming graphitic carbon such as graphene on a substrate. The method includes providing a precursor comprising a linear conjugated hydrocarbon, depositing a hydrocarbon layer from the precursor on the substrate, and forming graphene from the hydrocarbon layer by applying energy to the substrate. The precursor may include template molecules such as polynuclear aromatics, and may be deposited on the substrate by spinning on, by spraying, by flowing, by dipping, or by condensing. The energy may be applied as radiant energy, thermal energy, or plasma energy.

Abstract: An organic-inorganic silicon structure-containing block copolymer including a first domain including an ion conductive polymer block; and a second domain including a polymer block including a non-conducting polymer and an organic-inorganic silicon structure, wherein the organic-inorganic silicon structure is connected to a side chain connected to a backbone of the non-conducting polymer.

Abstract: A positive electrode for a nonaqueous secondary battery including an active material layer which has sufficient electron conductivity with a low ratio of a conductive additive is provided. A positive electrode for a nonaqueous secondary battery including an active material layer which is highly filled with an active material, id est, including the active material and a low ratio of a conductive additive. The active material layer includes a plurality of particles of an active material with a layered rock salt structure, graphene that is in surface contact with the plurality of particles of the active material, and a binder.

Abstract: A method and system are provided for elementally detecting variations in density. The method includes providing a computed tomography device, comprising a radiation source, a detector, and at least one grating between the radiation source and the detector, positioning the component between the radiation source and the detector, directing radiation from the radiation source to the detector to acquire information from the component, generating at least one phase contrast image and at least one dark field contrast image of the component corresponding to variations in density with the information from the component, correlating the variations in density to a foreign mass, and displaying foreign mass distribution within the component.

Abstract: A method of making a laser water transfer printing film contains steps of: providing a substrate material; coating a release layer on one side surface of the PET film by ways of a first coating apparatus; semi-solidifying a gold reservoir by using a heat solidifying apparatus; printing an ink layer on the gold reservoir by ways of a printing device; implanting a message layer on the ink layer by ways of an implanting device; embossing geometric patterns on the message layer by using a rolling device; plating the metal layer on the embossed patterns; coating a PVA solution on the metal layer by ways of a second coating device and drying the PVA solution by means of a drying device; separating the PET film from the PVA film by using a releasing device; and then rolling the PET film which has separated from the PVA film.

Abstract: A personal electromagnetic hygiene sleep system for calibrating a human to a baseline bio-electric homeostasis with the human and the environment via stimulus-responsive and performance textiles. These textiles possessing tested and theoretical benefits to the human organism such as: Harnessing the Earth's electrically negative potential via the Earth's mobile and free electrons to be an agent that assist in canceling, reducing, or pushing away electric fields from the body as well as serving to help attenuate oxidative stress and damage to the body from positively charged Reactive Oxygen Species (Free Radicals). Conference of these benefits are effected via a person being in direct or field contact with certain stimulus-responsive performance textiles and a plurality of adjacent conductive fibers for the transport of free electrons to the body from a greater electrically negative potential, an electrical ground, via the ground potential in a standard wall outlet. All superimposed upon a mattress.

Abstract: A negative active material including: a composite particle including a non-carbonaceous nanoparticle that allows lithiation and delithiation of lithium ions, and a (meth)acryl polymer disposed on a surface of the non-carbonaceous nanoparticle; and a crystalline carbonaceous nanosheet.

Abstract: Embodiments described herein provide methods and apparatus for forming graphitic carbon such as graphene on a substrate. The method includes providing a precursor comprising a linear conjugated hydrocarbon, depositing a hydrocarbon layer from the precursor on the substrate, and forming graphene from the hydrocarbon layer by applying energy to the substrate. The precursor may include template molecules such as polynuclear aromatics, and may be deposited on the substrate by spinning on, by spraying, by flowing, by dipping, or by condensing. The energy may be applied as radiant energy, thermal energy, or plasma energy.

Abstract: A method for producing colloidal graphene dispersions comprises the steps of: (i) stirring graphite oxide in an aqueous dispersion medium to form a dispersion; (ii) determining if the dispersion is optically clear in a light microscope at 1000 fold magnification after 1 to 5 hours of stirring, and, if not clear, removing any undissolved impurities in the dispersion, in order to form a colloidal graphene oxide dispersion, or a multi-graphene oxide dispersion, that is optically clear in a light microscope at 1000 fold magnification; and (iii) thermally reducing the graphene oxide, or multi-graphene oxide, in dispersion in the aqueous dispersion medium at a temperature between 120° C. and 170° C. under pressure in order to ensure that the dispersion medium is not evaporated to form a stable colloidal graphene dispersion or a stable multi-graphene dispersion.

Abstract: Structures and methods for cloaking an object to electromagnetic radiation at the microwave and terahertz frequencies include disposing a plurality of graphene sheets about the object. Intermediate layers of a transparent dielectric material can be disposed between graphene sheets to optimize the performance. In other embodiments, the graphene can be formulated into a paint formulation or a fabric and applied to the object. The structures and methods absorb at least a portion of the electromagnetic radiation at the microwave and terabyte frequencies.

Abstract: Methods, materials and apparatus are described for synthesizing a monolayer or few-layers of graphene. Depositing the graphene can include, in some implementations, flowing hydrogen and carbon feedstock over a catalytic layer formed on a substrate.

Abstract: A negative electrode including: a metal layer including lithium; and a platy carbonaceous material layer including a carbonaceous material having a plate structure and disposed on the metal layer.

Abstract: A method is provided for developing a hybrid supercapacitor. The method includes the use of a lithium salt of the electrolyte to carry out the intercalation/insertion of the lithium at the negative electrode but by greatly increasing the concentration of lithium ions of the electrolyte order to subsequently accept a depletion. As the depletion in ions has an impact on the conductivity, the amount and the concentration of the electrolyte are chosen in order to make it possible to accept this depletion white retaining a conductivity of the electrolyte compatible with a powerful system for storage of energy. A portion of the Li+ ions present in the electrolyte is used to form the passivation layer and the compound for intercalation/insertion Li˜0.5C6 at the negative electrode.

Abstract: Synthesis process for new particles of Li4Ti5O12, Li(4-?)Z?Ti5O12 or Li4Z?Ti(5-?)O12, wherein ? is >0 and ?0.5, ? is a number >0 and ?0.33, Z is a source of at least one metal, preferably chosen from the group made up of Mg, Nb, Al, Zr, Ni, Co. These particles coated with a layer of carbon notably exhibit electrochemical properties that are particularly interesting as components of anodes and/or cathodes in electrochemical generators. The process may involve the steps of a) preparing a dispersion of a mixture of TiOx—LizY-carbon, wherein x is a number between 1 and 2, z is 1 or 2, and Y is a radical chosen among CO3, OH, O and TiO3 or a mixture thereof; and 2) heating of the dispersion, preferably to a temperature of between about 400° C. and about 1000° C.

Abstract: A coated probe is provided. The probe includes a probe body and a cladding layer. The probe body has a terminal. The cladding layer covers the surface of the terminal of the probe body, wherein the cladding layer includes a carbon nano-material layer, and the carbon nano-material layer includes a carbon nano-material.

Abstract: A conductive coating composition for use in electrical energy storage devices, which contain a non-aqueous electrolyte, is provided comprising an organic polymeric binder comprising one or more water-soluble polymers; water; solid conductive particles dispersed in the binder; and phosphorus based acid bound to at least one of the water-soluble polymers and present in a range of 0.025-10.0% by weight of the water-soluble polymers, as well as methods of making and using said conductive coating composition, coated current collectors and electrical energy storage devices made therefrom.

Abstract: [Object] To provide a titanium or titanium alloy material for a separator of a polymer electrolyte fuel cell having high contact conductivity with carbon and high durability. [Solution] The titanium or titanium alloy material includes an oxide film formed on a titanium or titanium alloy substrate by stabilization treatment performed after passivation treatment, and one or more kinds of conductive materials selected from carbide, nitride, carbonitride, and boride of tantalum, titanium, vanadium, zirconium, and chromium, the conductive materials being dispersed in the oxide film and having a major axis diameter from 1 nm to 100 nm. A contact resistance value with a carbon paper is 20 m?·cm2 or less at a surface pressure of 10 kgf/cm2 before and after an accelerated deterioration test in which the titanium or titanium alloy material is immersed in a sulfuric acid aqueous solution having an adjusted pH of 4 at 80° C. for four days.

Abstract: A method for forming a film on a patterned surface of a substrate by atomic layer deposition (ALD) processing includes: adsorbing onto a patterned surface a first precursor containing silicon or metal in its molecule; adsorbing onto the first-precursor-adsorbed surface a second precursor containing no silicon or metal in its molecule; exposing the second-precursor-adsorbed surface to an excited reactant to oxidize, nitride, or carbonize the precursors adsorbed on the surface of the substrate; and repeating the above cycle to form a film on the patterned surface of the substrate.