Metal Oxide Containing Coating Patents (Class 427/453)
  • Publication number: 20100307687
    Abstract: An internal member of a plasma processing vessel includes a base material and a film formed by thermal spraying of ceramic on a surface of the base material. The film is formed of ceramic which includes at least one kind of element selected from the group consisting of B, Mg, Al, Si, Ca, Cr, Y, Zr, Ta, Ce and Nd. In addition, at least a portion of the film is sealed by a resin.
    Type: Application
    Filed: July 16, 2010
    Publication date: December 9, 2010
    Applicant: TOKYO ELECTRON LIMITED
    Inventors: Kouji MITSUHASHI, Hiroyuki Nakayama, Nobuyuki Nagayama, Tsuyoshi Moriya, Hiroshi Nagaike
  • Patent number: 7837967
    Abstract: A thermal spray powder contains particles composed of an oxide of any of the rare earth elements having an atomic number of 39 or from 59 to 70. The crushing strength of the particles is 80 MPa or greater. The ratio of bulk specific gravity to true specific gravity of the thermal spray powder is 0.15 or greater. The particles are preferably granulated and sintered particles. The average particle size of primary particles constituting the granulated and sintered particles is preferably 6 ?m or less.
    Type: Grant
    Filed: October 31, 2007
    Date of Patent: November 23, 2010
    Assignee: Fujimi Incorporated
    Inventors: Isao Aoki, Hiroyuki Ibe, Junya Kitamura
  • Patent number: 7833586
    Abstract: A thermally sprayed alumina-based coating is deposited onto a thermal barrier coating to provide an article such as a turbine engine component with both CMAS mitigation and antifouling. The alumina-based coating increases a melting point of the CMAS to a temperature greater than an operating temperature of the turbine engine component. The surface roughness of the thermally sprayed alumina based coating in less than 4.0 micrometers to 0.75 micrometers. The alumina based coatings include at least 60 weight percent alumina based on a total weight of the alumina-based coating.
    Type: Grant
    Filed: October 24, 2007
    Date of Patent: November 16, 2010
    Assignee: General Electric Company
    Inventor: Joshua L. Margolies
  • Publication number: 20100266781
    Abstract: A method to improve corrosion, abrasion, and fire resistant properties of structural components for use in oil, gas, exploration, refining and petrochemical applications is provided. The structural component is suitable for as refinery and/or petrochemical process equipment and piping, include but are not limited to process vessels, transfer lines and process pipes, heat exchangers, cyclones, and distillation columns. The method comprises providing the structural component with a plurality of layers, a corrosion resistant layer in contact with the corrosive petroleum products comprising a material selected from amorphous metals, ceramic materials, or combinations thereof; a structural layer; and an outer layer comprising a fire resistive material. In one embodiment, the structural component is further provided with at least another layer selected from a metal sheeting layer, an adhesive layer, and a containment layer.
    Type: Application
    Filed: April 16, 2010
    Publication date: October 21, 2010
    Inventors: Grzegorz Jan Kusinski, Edwin H. Niccolls
  • Patent number: 7799716
    Abstract: The present invention provides a low density and porous zirconia (ZrO2) powder partially alloyed with one or more of yttria, scandia, dysprosia, ytterbia, or any of the oxides of lanthanide or actinide. The total amount of alloying oxides should be less than about 30 weight percent. The powder is manufactured by controlled sintering or light plasma densification of physically agglomerated, or chemically derived zirconia composite powder that contains proper amounts of yttria, scandia, dysprosia, ytterbia, or any of the oxides of lanthanide or actinide, or any combination of the aforementioned oxides. The resulting coating from use of the inventive powder has a monoclinic phase content of less than 5 percent.
    Type: Grant
    Filed: March 3, 2006
    Date of Patent: September 21, 2010
    Assignee: Sulzer Metco (US), Inc.
    Inventors: Michael Mueller, Mitchell R. Dorfman, Liangde Xie
  • Publication number: 20100203254
    Abstract: A method of forming a thermal barrier coating on a turbine component is disclosed. The method comprises first depositing a bond coat on the turbine component. A dispersion strengthened ceramic layer containing boride particles as dispersoids is formed on the bond coat layer by plasma deposition. Ceramic coated boride particles comprise the plasma deposition feedstock in order to disperse the boride particles in the ceramic layer. The dispersion strengthened ceramic layer includes at least one of yttria-stabilized zirconia, rare earth stabilized zirconia, rare earth stabilized hafnia, and rare earth stabilized titanate.
    Type: Application
    Filed: April 20, 2010
    Publication date: August 12, 2010
    Applicant: UNITED TECHNOLOGIES CORPORATION
    Inventors: Kevin W. Schlichting, Paul H. Zajchowski
  • Patent number: 7767268
    Abstract: A spray coated member having an excellent resistance to plasma erosion is produced by irradiating an electron beam to an outermost surface layer portion of a ceramic spray coated portion covering a surface of a substrate to form an electron beam irradiated layer.
    Type: Grant
    Filed: August 31, 2006
    Date of Patent: August 3, 2010
    Assignee: Tocalo Co., Ltd.
    Inventors: Yoshio Harada, Kenichiro Togoe, Fujio Kushiki
  • Patent number: 7767272
    Abstract: A method of producing compound nanorods and thin films under a controlled growth mode is described. The method involves ablating compound targets using an ultrafast pulsed laser and depositing the ablated materials onto a substrate. When producing compound nanorods, external catalysts such as pre-deposited metal nanoparticles are not involved. Instead, at the beginning of deposition, simply by varying the fluence at the focal spot on the target, a self-formed seed layer can be introduced for nanorods growth. This provides a simple method of producing high purity nanorods and controlling the growth mode. Three growth modes are covered by the present invention, including nanorod growth, thin film growth, and nano-porous film growth.
    Type: Grant
    Filed: May 25, 2007
    Date of Patent: August 3, 2010
    Assignee: IMRA America, Inc.
    Inventors: Bing Liu, Zhendong Hu, Yong Che
  • Publication number: 20100183816
    Abstract: A method for making ferrite powder may include providing ferrite feed materials in a form of particles, such as having different sizes and irregular shapes. The method may further include exposing the ferrite feed materials to a low velocity oxygen-fueled (LVOF) flame spray. This may provide a more spherical shape to irregularly shaped particles to thereby make the ferrite powder. An apparatus for making ferrite powder may include a feeder for ferrite feed materials and a LVOF flame spray system for exposing the ferrite feed materials to the flame spray.
    Type: Application
    Filed: February 16, 2007
    Publication date: July 22, 2010
    Applicant: Steward Advanced Materials, Inc.
    Inventors: Danny R. Smith, Henry G. Paris, Jeffrey A. Merker
  • Publication number: 20100178588
    Abstract: A method for making a solid oxide fuel cell component includes depositing a cathode material directly onto a metallic interconnect. The interconnect may comprise stainless steel or another suitable metal. The cathode material may comprise a ceramic. Examples of cathode materials are yttria-stabilized zirconia (YSZ) and mixtures of YSZ with other ceramics such as lanthanum strontium manganate. The cathode material may be deposited by plasma spraying. A pore former may be plasma sprayed together with the cathode material to provide a porous cathode. Electrolyte and anode materials may be deposited on the cathode material also by plasma spraying. Plasma conditions may be selected to provide a dense electrolyte layer.
    Type: Application
    Filed: May 30, 2008
    Publication date: July 15, 2010
    Applicant: THE UNIVERSITY OF BRITISH COLUMBIA
    Inventors: Bradley White, Olivera Kesler
  • Publication number: 20100159262
    Abstract: A composition useful as a thermal barrier coating on a superalloy substrate intended for use in hostile thermal environments. The coating comprises zirconia stabilized in a predominately tetragonal phase. The composition includes a ceramic component consisting essentially of zirconia (ZrO2) or a combination of zirconia and hafnia (HfO2) and a stabilizer component comprising, in combination, a first co-stabilizer selected from YbO1.5, HoO1.5, ErO1.5, TmO1.5, LuO1.5, and combinations thereof, and optionally YO1.5, a second co-stabilizer selected from TiO2, PdO2, VO2, GeO2, and combinations thereof, and a third co-stabilizer comprising TaO2.5. The stabilizer component is present in an amount effective to achieve the predominantly tetragonal phase in the coating.
    Type: Application
    Filed: December 18, 2008
    Publication date: June 24, 2010
    Inventors: Ming Fu, Brian Thomas Hazel, Brett Boutwell, Tobias A. Schaedler, Curtis Alan Johnson, Don M. Lipkin, Douglas G. Konitzer, Venkat S. Venkataramani
  • Publication number: 20100139607
    Abstract: A wet cylinder liner, which exhibits a cast basic body comprised of a cast iron alloy, has at least one outer surface area of which exhibits a thermal injection layer consisting of a basic iron alloy as a coating, with a layer thickness of 1 ?m to 1000 ?m.
    Type: Application
    Filed: June 18, 2007
    Publication date: June 10, 2010
    Inventors: Christian Herbst-Dederichs, Michael Buchmann
  • Publication number: 20100143602
    Abstract: A method for coating a substrate is provided in that a plasma jet is produced from a working gas, at least one precursor material is fed to the working gas and/or the plasma jet and is reacted in the plasma jet and at least one reaction product of at least one of the precursors is deposited on at least one surface of the substrate and/or on at least one layer arranged on the surface. At least one of the deposited layers improve the optical transmission properties of the substrate.
    Type: Application
    Filed: November 30, 2009
    Publication date: June 10, 2010
    Inventors: Andreas HEFT, Andreas Pfuch, Arnd Schimanski, Bernd Gruenler, Martin Polster
  • Publication number: 20100143655
    Abstract: Articles coated via a plasma spray process, and methods for making such articles, are presented. For example, one embodiment is an article comprising a substrate comprising a top surface and a channel disposed in the substrate. The channel is defined by an internal channel surface disposed beneath the top surface and having a terminal end at an orifice at the top surface. A coating is disposed on the top surface and on at least a portion of the internal channel surface. A coating thickness at any point on the internal channel surface is less than a nominal coating thickness on the top surface, and the coating comprises a plurality of at least partially melted and solidified particles.
    Type: Application
    Filed: December 10, 2008
    Publication date: June 10, 2010
    Applicant: GENERAL ELECTRIC COMPANY
    Inventors: Larry Steven Rosenzweig, James Anthony Ruud, Mohan Manoharan, Brian Harvey Pilsner
  • Publication number: 20100136249
    Abstract: Plasma-sprayed layers of aluminium oxide on a substrate are produced by using a pyrogenically produced aluminium oxide, for example selected from the group consisting of borosilicate and steel, as starting powder.
    Type: Application
    Filed: December 2, 2009
    Publication date: June 3, 2010
    Applicant: Evonik Degussa GmbH
    Inventors: Yi DENG, Monika Oswald, Klaus Deller, Rolf Clasen, Georg Fehringer
  • Patent number: 7723493
    Abstract: Metal-containing complexes of a tridentate beta-ketoiminate, one embodiment of which is represented by the structure: wherein M is a metal such as calcium, strontium, barium, scandium, yttrium, lanthanum, titanium, zirconium, vanadium, tungsten, manganese, cobalt, iron, nickel, ruthenium, zinc, copper, palladium, platinum, iridium, rhenium, osmium; R1 is selected from the group consisting of alkyl, alkoxyalkyl, fluoroalkyl, cycloaliphatic, and aryl, having 1 to 10 carbon atoms; R2 is selected from the group consisting of hydrogen, alkyl, alkoxy, cycloaliphatic, and aryl; R3 is linear or branched selected from the group consisting of alkyl, alkoxyalkyl, fluoroalkyl, cycloaliphatic, and aryl; R4 is a branched alkylene bridge with at least one chiral center; R5-6 are individually linear or branched selected from the group consisting of alkyl, fluoroalkyl, cycloaliphatic, aryl, and can be connected to form a ring containing carbon, oxygen, or nitrogen atoms; n is an integer equal to the valence of the metal
    Type: Grant
    Filed: October 3, 2008
    Date of Patent: May 25, 2010
    Assignee: Air Products and Chemicals, Inc.
    Inventors: Xinjian Lei, Daniel P. Spence, Hansong Cheng
  • Publication number: 20100119726
    Abstract: This invention is related to Group 2 metal-containing polydentate ?-ketoiminate precursors and compositions comprising Group 2 metal-containing polydentate ?-ketoiminate precursors, wherein the polydentate ?-ketoiminate precursors incorporate an alkoxy group in the imino portion of the molecule. The compounds and compositions are useful for fabricating metal containing films on substrates such as silicon, metal nitride, metal oxide and other metal layers via chemical vapor deposition (CVD) processes.
    Type: Application
    Filed: November 7, 2008
    Publication date: May 13, 2010
    Applicant: Air Products and Chemicals, Inc.
    Inventors: Xinjian Lei, Daniel P. Spence, John Anthony Thomas Norman, Michael Ulman
  • Patent number: 7713635
    Abstract: A copper oxide thin film mainly containing CuO is formed by a plasma film-forming process on a substrate for film formation. The friction coefficient of the copper oxide thin film can be controlled remarkably low.
    Type: Grant
    Filed: April 23, 2004
    Date of Patent: May 11, 2010
    Assignee: National Institute for Materials Science
    Inventors: Masahiro Goto, Akira Kasahara, Masahiro Tosa, Kazuhiro Yoshihara
  • Patent number: 7691984
    Abstract: Metal-containing complexes of a tridentate beta-ketoiminate, one embodiment of which is represented by the structure: wherein M is a metal such as calcium, strontium, barium, scandium, yttrium, lanthanum, titanium, zirconium, vanadium, tungsten, manganese, cobalt, iron, nickel, ruthenium, zinc, copper, palladium, platinum, iridium, rhenium, osmium; R1 is selected from the group consisting of alkyl, fluoroalkyl, cycloaliphatic, and aryl, having 1 to 10 carbon atoms; R2 is selected from the group consisting of hydrogen, alkyl, alkoxy, cycloaliphatic, and aryl; R3 is linear or branched selected from the group consisting of alkylene, fluoroalkyl, cycloaliphatic, and aryl; R4 is a branched alkylene bridge with at least one chiral center; R5-6 are individually linear or branched selected from the group consisting of alkyl, fluoroalkyl, cycloaliphatic, aryl, and can be connected to form a ring containing carbon, oxygen, or nitrogen atoms; n is an integer equal to the valence of the metal M.
    Type: Grant
    Filed: November 27, 2007
    Date of Patent: April 6, 2010
    Assignee: Air Products and Chemicals, Inc.
    Inventors: Xinjian Lei, Daniel P. Spence, Hansong Cheng
  • Publication number: 20100080921
    Abstract: A target material for thermal spraying may include chromium and at least one of about 0.5-12% by weight of aluminum and about 2-15% by weight of manganese.
    Type: Application
    Filed: September 30, 2008
    Publication date: April 1, 2010
    Inventor: M. Brad Beardsley
  • Patent number: 7678428
    Abstract: A method of forming a thermally insulating layer system on a metallic substrate surface is disclosed.
    Type: Grant
    Filed: March 18, 2003
    Date of Patent: March 16, 2010
    Assignee: Sulzer Metco AG
    Inventors: Gerard Barbezat, Arno Refke, Michael Loch
  • Patent number: 7674401
    Abstract: The present invention relates to a metal oxide dispersion, which can form a metal thin film onto a substrate by heat treatment at a low temperature, wherein a metal oxide having a particle diameter of less than 200 nm is dispersed in the dispersion medium. By heat treating the dispersion after applying it onto a substrate, a metal thin film is formed.
    Type: Grant
    Filed: December 16, 2002
    Date of Patent: March 9, 2010
    Assignee: Asahi Kasei Kabushiki Kaisha
    Inventor: Mutsuhiro Maruyama
  • Publication number: 20100055340
    Abstract: A method for coating the core ceramic particles by emulsion flame spray is provided. In particular, the method forms a core ceramic particle simultaneously with coating the surface of the formed core ceramic particles by emulsion flame spray pyrolysis. The core ceramic particle may be coated in a single stage by emulsion flame spray pyrolysis conventionally used in the art, through putting coating material precursor into the oil phase of emulsion solution at a stage of preparing emulsion solution in emulsion flame spray pyrolysis process.
    Type: Application
    Filed: August 28, 2009
    Publication date: March 4, 2010
    Applicant: KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY
    Inventors: Seung Bin Park, Shin Ae Song
  • Publication number: 20100047075
    Abstract: A process of coating an article includes the steps of (1) applying a ceramic compound to at least one surface of an article to form a layer of ceramic compound; (2) applying at least one inert compound upon the ceramic compound layer to form a protective layer, wherein the at least one inert compound is composed of a first inert compound having a cubic crystalline structure of formula (I) A3B2X3O12, or a second inert compound comprising a hexagonal crystalline structure of formula (II) A4B6X6O26, or a mixture of the first inert compound and the second inert compound; (3) optionally drying the coated article; (4) optionally repeating steps (2) and (3); and (5) heat treating the coated article.
    Type: Application
    Filed: November 2, 2009
    Publication date: February 25, 2010
    Applicant: UNITED TECHNOLOGIES CORPORATION
    Inventors: Kevin W. Schlichting, David A. Litton, Michael J. Maloney, Melvin Freling, John G. Smeggil, David B. Snow
  • Publication number: 20100040796
    Abstract: A manufacturing method for a heat-dissipating structure is disclosed. The manufacturing method comprises the following steps. Step 1 is preparing powders of materials with far infrared conversion. Step 2 is modifying surfaces of the powders and step 3 is thermal spraying the modified powders on a substrate for forming a heat-dissipating layer on the substrate. The heat-dissipating structure can contact with a heat source and the heat is dissipated by the radiation of far infrared. Moreover, the equivalent heat resistance between the substrate and air is reduced so that the heat dissipation efficiency is improved.
    Type: Application
    Filed: August 13, 2008
    Publication date: February 18, 2010
    Inventor: San-Teng Chueh
  • Publication number: 20100028698
    Abstract: A ceramic thermal barrier coating having improved erosion resistance includes a metallic layer and a ceramic layer positioned on the metallic layer. The ceramic layer includes a first powder, a second powder, and a third powder. The first powder and the second powder are alloyed together prior to being mixed with the third powder.
    Type: Application
    Filed: November 29, 2006
    Publication date: February 4, 2010
    Applicant: United Technologies Corporation
    Inventors: Kevin W. Schlichting, Paul H. Zajchowski
  • Publication number: 20100028549
    Abstract: In a process for forming a coating on a substrate, a rare earth oxide stabilized zirconia composition is provided. At least one additional constituent is provided comprising titania stabilized with zirconia. The rare earth oxide stabilized zirconia composition and additional constituent are blended to form a blended material. The blended material is deposited onto the substrate.
    Type: Application
    Filed: July 31, 2008
    Publication date: February 4, 2010
    Applicant: UNITED TECHNOLOGIES CORPORATION
    Inventors: Kevin W. Schlichting, Paul H. Zajchowski
  • Patent number: 7648782
    Abstract: Improving the resistance of members and parts disposed inside of vessels such as semiconductor processing devices for conducting plasma etching treatment in a strong corrosive environment. A ceramic coating member for a semiconductor processing apparatus comprises a porous layer made of an oxide of an element in Group IIIb of the Periodic Table coated directed or through an undercoat on the surface of the substrate of a metal or non-metal and a secondary recrystallized layer of the oxide formed on the porous layer through an irradiation treatment of a high energy such as electron beam and laser beam.
    Type: Grant
    Filed: March 20, 2007
    Date of Patent: January 19, 2010
    Assignees: Tokyo Electron Limited, Tocalo Co., Ltd.
    Inventors: Yoshiyuki Kobayashi, Takahiro Murakami, Yoshio Harada, Junichi Takeuchi, Ryo Yamasaki, Keigo Kobayashi
  • Publication number: 20090324989
    Abstract: Components (1) have a thermal barrier coating (2-6) on the surface thereof, wherein the thermal barrier coating includes at least one layer (3) having chemically stabilized zirconia, and wherein at least indirectly adjacent to the layer (3) with chemically stabilized zirconia and on its surface facing side, there is provided a protective layer (4) and/or a infiltration zone (5) which does not react with environmental contaminant compositions that contain oxides of calcium and which does not react with the material of the layer (3) having chemically stabilized zirconia. Methods for making such components as well as to uses of specific systems for coating thermal barrier coatings, can prevent CMAS.
    Type: Application
    Filed: May 26, 2009
    Publication date: December 31, 2009
    Inventors: Gregoire Etienne Witz, Hans-Peter Bossmann, Valery Shklover, Sharath Bachegowda
  • Publication number: 20090324916
    Abstract: A rare earth oxide-containing sprayed plate is prepared by thermally spraying a rare earth oxide on a support to a thickness of up to 5 mm and peeling the sprayed coating from the support. Thin plates of rare earth oxide ceramics can be prepared without molding, firing and sintering steps.
    Type: Application
    Filed: May 19, 2008
    Publication date: December 31, 2009
    Applicant: SHIN-ETSU CHEMICAL CO., LTD.
    Inventors: Noriaki Hamaya, Koji Nakamura, Ryoji Iida
  • Publication number: 20090311416
    Abstract: A method of machining a profile pattern in a ceramic coating of a turbine shroud is provided and includes applying the ceramic coating substantially uniformly onto the turbine shroud, positioning a machining tool proximate the ceramic coating, and removing material from the ceramic coating by activating the machining tool to machine the ceramic coating and by moving the machining tool across the ceramic coating in a movement pattern that generally corresponds to the profile pattern.
    Type: Application
    Filed: June 17, 2008
    Publication date: December 17, 2009
    Applicant: GENERAL ELECTRIC COMPANY
    Inventors: Warren Arthur Nelson, Lyle B. Spiegel
  • Publication number: 20090291024
    Abstract: The invention relates to a method of producing a gas sensor comprising the steps of a. Positioning a sensor substrate (7) in a flame spray pyrolysis apparatus (1); b. Generating an aerosol phase comprising sensing material nanoparticles by flame spray pyrolysis (FSP) of a precursor substance; c. Depositing the sensing material particles contained in the aerosol, in particular nanoparticles of the sensing material, onto the sensor substrate (7) directly from the aerosol phase to form a porous sensing layer (15).
    Type: Application
    Filed: November 25, 2005
    Publication date: November 26, 2009
    Inventors: Lutz Maedler, Sotiris Pratsinis, Albert Roessler, Udo Weimar, Nicolae Barsan, Aleksander Gurlo
  • Publication number: 20090269567
    Abstract: A thermal barrier comprises a coating of titanium dioxide or a blend of titanium dioxide with at least one other ceramic material.
    Type: Application
    Filed: April 24, 2009
    Publication date: October 29, 2009
    Applicant: ZIRCOTEC LTD.
    Inventor: Andrew Robert McCabe
  • Patent number: 7604845
    Abstract: A method of forming a coating film of ceramic material on a surface of an internal member disposed in a vacuum processing apparatus, the surface of the internal member having holes formed therein. The method involves: (A) filling the holes of the internal member with padding plugs, each of which has a core member made from a metal material and a metal-resin composite layer covering the circumferential surface of the core member, the metal-resin composite layer being a complex composed of a metal material and a resinous material exhibiting nonconjugative property to a coating film; (B) forming a ceramic coating film on the surface of the internal member by plasma spraying after step (A); and (C) extracting the padding plugs out of the holes after step (B).
    Type: Grant
    Filed: September 17, 2003
    Date of Patent: October 20, 2009
    Assignee: Tokyo Electron Limited
    Inventors: Jun Takeuchi, Masaaki Kishida, Tadakazu Matsunaga, Shosuke Endoh
  • Patent number: 7597938
    Abstract: A method of making an oven door, or other coated article, is provided so as to have a color suppression coating on a substrate such as a glass substrate. Flame pyrolysis (or combustion CVD) is used in depositing at least part of a color suppression coating. For example, in an example embodiment of this invention, flame pyrolysis can be used to deposit a single SnO2 layer from suitable Sn inclusive precursor(s), or alternatively a multi-layer coating may be formed at least partially using flame pyrolysis. In another example embodiment, the coating may include a base layer of silicon oxide formed using flame pyrolysis, and another layer of tin oxide formed in any suitable manner over the base layer of silicon oxide.
    Type: Grant
    Filed: November 29, 2004
    Date of Patent: October 6, 2009
    Assignee: Guardian Industries Corp.
    Inventor: Scott V. Thomsen
  • Publication number: 20090246008
    Abstract: Thermal barrier coating layer systems, in addition to good thermal barrier properties, also have to have a long service life of the thermal barrier coating. The layer system according to the invention comprises a specially adapted layer sequence of metallic bonding layer, inner ceramic layer and outer ceramic layer.
    Type: Application
    Filed: June 9, 2009
    Publication date: October 1, 2009
    Inventors: Axel Kaiser, Eckart Schumann, Axel Kaiser, Eckart Schumann, Ramesh Subramanian
  • Publication number: 20090243236
    Abstract: An electrostatic chuck of a stack structure includes a metal layer interposed between insulating layers and a groove formed at a peripheral portion of the electrostatic chuck to have a width gradually increasing toward an outside, the groove being covered with a thermally sprayed insulating film. The thermally sprayed film covers at least a portion of the metal layer exposed at an inside of the groove such that the thermally sprayed film does not protrude from the groove.
    Type: Application
    Filed: March 25, 2009
    Publication date: October 1, 2009
    Applicant: TOKYO ELECTRON LIMITED
    Inventors: Tsuyoshi HIDA, Takashi Yamamoto
  • Publication number: 20090241496
    Abstract: Process for producing at least one nanoporous layer of nanoparticles chosen from nanoparticles of a metal oxide, nanoparticles of metal oxides, and mixtures of said nanoparticles, on a surface of a substrate, in which at least one colloidal sol, in which said nanoparticles are dispersed and stabilized, is injected into a thermal plasma jet which sprays said nanoparticles onto said surface. Nanoporous layer and device, especially a separation device, comprizing said layer.
    Type: Application
    Filed: April 25, 2007
    Publication date: October 1, 2009
    Inventors: Bruno Pintault, David Guenadou, Luc Bianchi, Philippe Belleville, Karine Valle, Christophe Boscher, Jöel Toulc'Hoat
  • Patent number: 7592066
    Abstract: A roofing article is prepared by applying a thin metal or metal oxide film to a base substrate. The thin film has greater than about 80 percent transmission of incident radiation having a wavelength between 300 nm and 700 nm and greater that about 60 percent reflectance of incident radiation having a wavelength between 700 nm and 2500 nm.
    Type: Grant
    Filed: October 5, 2005
    Date of Patent: September 22, 2009
    Assignee: CertainTeed Corporation
    Inventors: Ming Liang Shiao, Keith C. Hong
  • Publication number: 20090233000
    Abstract: Processes for depositing conductive materials on substrates are disclosed which include combusting a premixed fuel and oxidant to form a stagnation flame against a moving article or substrate which stabilizes the stagnation flame and introducing at least one precursor to the flame to form a conducting material onto the substrate.
    Type: Application
    Filed: March 14, 2008
    Publication date: September 17, 2009
    Inventors: Hai Wang, Denis Phares
  • Patent number: 7585575
    Abstract: A heat-insulating layer has a melting point above 2500° C., a thermal expansion coefficient in excess of 8×10?6 K?1, and a sintering temperature greater than 1400° C. This material has a perovskite structure of the general formula A1+r(B?1/2+xB?1/2+y)O3+z in which: A=at least one element of the group (Ba, Sr, Ca, Be), B?=at least one element of the group (Al, La, Nd, Gd, Er, Lu, Dy, Tb), B?=at least one element of the group (Ta, Nb), and 0.1<r,x,y,z<0.1.
    Type: Grant
    Filed: December 19, 2008
    Date of Patent: September 8, 2009
    Assignee: Forschungszentrum Julich GmbH
    Inventors: Robert Vassen, Sigrid Schwartz-Lueckge, Wolfgang Jungen, Detlev Stoever
  • Publication number: 20090214825
    Abstract: Particulate generation has been a problem in semiconductor device processing in highly corrosive plasma environments. The problem is exacerbated when the plasma is a reducing plasma. Empirically produced data has shown that the formation of a plasma spray coated yttrium-comprising ceramic such as yttrium oxide, Y2O3—ZrO2 solid solution, YAG, and YF3 provides a low porosity coating with smooth and compacted surfaces when such ceramics are spray coated from a powder feed having an average effective diameter ranging from about 22 ?m to about 0.1 ?m. These spray-coated materials reduce the generation of particulates in corrosive reducing plasma environments.
    Type: Application
    Filed: February 26, 2008
    Publication date: August 27, 2009
    Inventors: Jennifer Y. Sun, Xiaoming He, Kenneth S. Collins, Thomas Graves, Senh Thach, Jie Yuan, Li Xu, Ren-Guan Duan
  • Publication number: 20090191353
    Abstract: An article comprising a turbine component other than an airfoil having a metal substrate and a ceramic corrosion resistant coating overlaying the metal substrate. This coating has a thickness up to about 5 mils (127 microns) and comprises a ceramic metal oxide selected from the group consisting of zirconia, hafnia and mixtures thereof. This coating can be formed by a method comprising the following steps: (a) providing a turbine component other than an airfoil comprising the metal substrate; (b) providing a gel-forming solution comprising a ceramic metal oxide precursor; (c) heating the gel-forming solution to a first preselected temperature for a first preselected time to form a gel; (d) depositing the gel on the metal substrate; and (e) firing the gel at a second preselected temperature above the first preselected temperature to form the ceramic corrosion resistant coating comprising the ceramic metal oxide.
    Type: Application
    Filed: April 9, 2009
    Publication date: July 30, 2009
    Applicant: General Electric Company
    Inventors: BANGALORE ASWATHA NAGARAJ, BRIAN THOMAS HAZEL, JEFFREY ALLAN PFAENDTNER
  • Publication number: 20090183987
    Abstract: A sputter target is provided having a sputter material based on TiO2 and made such that the sputter material contains 15-60 mol. % Nb2O5. A method for the production of the sputter target includes the following steps: mixing of TiO2 and Nb2O5 powder in a liquid slurry; spray granulating this slurry to form TiO2:Nb2O5 mixed oxide granulate; and plasma spraying this granulate onto a sputter target base body.
    Type: Application
    Filed: June 6, 2007
    Publication date: July 23, 2009
    Applicant: W.C. Heraeus GmbH
    Inventors: Martin Weigert, Christoph Simons, Eckehard Männle
  • Patent number: 7563488
    Abstract: The invention relates to a process for manufacturing a sputter target. The process comprises the steps of—providing a target holder (12); —applying an intermediate layer (14) on said target holder; —applying a top layer (16) on top of said intermediate layer; said top layer comprising a material having a melting point which is substantially higher than the melting point of said target material; —heating the target holder coated with said intermediate layer and said top layer.
    Type: Grant
    Filed: July 10, 2002
    Date of Patent: July 21, 2009
    Assignee: NV Bekaert SA
    Inventors: Wilmert De Bosscher, Hilde Delrue, Johan Vanderstraeten
  • Publication number: 20090176110
    Abstract: A coating system and process capable of providing erosion and corrosion-resistance to a component, particularly a steel compressor blade of an industrial gas turbine. The coating system includes a metallic sacrificial undercoat on a surface of the component substrate, and a ceramic topcoat deposited by thermal spray on the undercoat. The undercoat contains a metal or metal alloy that is more active in the galvanic series than iron, and electrically contacts the surface of the substrate. The ceramic topcoat consists essentially of a ceramic material chosen from the group consisting of mixtures of alumina and titania, mixtures of chromia and silica, mixtures of chromia and titania, mixtures of chromia, silica, and titania, and mixtures of zirconia, titania, and yttria.
    Type: Application
    Filed: January 8, 2008
    Publication date: July 9, 2009
    Applicant: GENERAL ELECTRIC COMPANY
    Inventors: Surinder Singh Pabla, Jon Conrad Schaeffer, Vinod Kumar Pareek, David Vincent Bucci, Thomas Moors, Jane Marie Lipkin
  • Patent number: 7556189
    Abstract: Nano-structured interconnect formation and a reworkable bonding process using solder films. Large area fabrication of nano-structured interconnects is demonstrated at a very fine pitch. This technology can be used for pushing the limits of current flip chip bonding in terms of pitch, number of I/Os, superior combination of electrical and mechanical properties as well as reworkability. Sol-gel and electroless processes were developed to demonstrate film bonding interfaces between metallic pads and nano interconnects. Solution-derived nano-solder technology is an attractive low-cost method for several applications such as MEMS hermetic packaging, compliant interconnect bonding and bump-less nano-interconnects.
    Type: Grant
    Filed: May 26, 2005
    Date of Patent: July 7, 2009
    Assignee: Georgia Tech Research Corporation
    Inventors: Ankur Aggarwal, Isaac Robin Abothu, Pulugurtha Markondeya Raj, Rao R. Tummala
  • Publication number: 20090162670
    Abstract: A method for applying a ceramic coating over a substantially smooth protective coating on a metal substrate is disclosed. The method includes the step of air plasma spraying (APS) particles of the ceramic coating at a pre-selected particle velocity of at least about 500 meters per second. The ceramic coating particles have an average particle size no greater than about 50 microns. An article is also described, including a metal substrate; and a substantially smooth protective coating over the substrate, having a roughness (Ra) less than about 200 micro-inches. An adherent ceramic coating is disposed on the substantially smooth protective coating.
    Type: Application
    Filed: December 20, 2007
    Publication date: June 25, 2009
    Applicant: GENERAL ELECTRIC COMPANY
    Inventors: Yuk-Chiu Lau, Brian Thomas Hazel
  • Publication number: 20090155479
    Abstract: Lubricant-hard-ductile composite coating compositions and methods of making the same are provided. In embodiment, a composite coating composition comprises: a lubricant phase for providing lubrication to a surface; a hard ceramic phase for providing structural integrity and wear resistance to the surface; and a ductile metal phase for providing ductility to the surface.
    Type: Application
    Filed: September 20, 2007
    Publication date: June 18, 2009
    Applicant: Inframat Corporation
    Inventors: T. Danny Xiao, John Broadhead, Xinqing Ma
  • Patent number: 7544631
    Abstract: The present invention provides for titanium oxide-based photocatalysts having a general formula of TiO2-X-?CXN? and self-cleaning materials that are prepared by substituting O of pure TiO2 with C and N. A preparation method comprising a process for forming thin films of TiO2-X-?CXN? by using gases such as Ar, N2, CO2, CO and O are used for reactive sputtering, and a process of heat treating at around 500° C., thereby crystallizing, is provided. The titanium oxide-based photocatalysts having a general formula of TiO2-X-?CXN? and self-cleaning materials according to the present invention have a smaller optical bandgap compared to pure titanium oxides, and therefore, the photocatalysts can be activated under the visible light range. In addition, they comprise only pure anatase crystallization phase, and since the crystallized particles are small in size, the efficiency and self-cleaning effect of the photocatalysts are very high.
    Type: Grant
    Filed: April 26, 2006
    Date of Patent: June 9, 2009
    Assignee: Korea Institute of Science and Technology
    Inventors: Won-Kook Choi, Yeon-Sik Jung, Dong-Heon Kang, Kyung-Ju Lee