Peripheral Enclosure Or Frame Patents (Class 428/14)
  • Patent number: 10585348
    Abstract: Provided are a pellicle for extreme ultraviolet light lithography, a method for producing the same, and an exposure method. A pellicle according to the present invention includes a first frame having a pellicle film located thereon; a second frame supporting the first frame; a through-hole running through the first frame; and a filter covering the through-hole on the side of a surface of the first frame on which the pellicle film is located. The through-hole may run through the pellicle film; and the filter may be located on the pellicle film. The filter may be located, adjacent to the pellicle film, on the first frame.
    Type: Grant
    Filed: March 9, 2017
    Date of Patent: March 10, 2020
    Assignee: MITSUI CHEMICALS, INC.
    Inventors: Kazuo Kohmura, Daiki Taneichi, Takashi Kozeki, Yosuke Ono, Hisako Ishikawa, Tsuneaki Biyajima, Atsushi Okubo, Yasuyuki Sato, Toshiaki Hirota
  • Patent number: 10534256
    Abstract: The present disclosure provides an apparatus for a semiconductor lithography process in accordance with some embodiments. The apparatus includes a pellicle membrane with a thermal conductive surface; a porous pellicle frame; and a thermal conductive adhesive layer that secures the pellicle membrane to the porous pellicle frame. The porous pellicle frame includes a plurality of pore channels continuously extending from an exterior surface of the porous pellicle frame to an interior surface of the porous pellicle frame.
    Type: Grant
    Filed: August 24, 2017
    Date of Patent: January 14, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Amo Chen, Yun-Yue Lin, Ta-Cheng Lien, Hsin-Chang Lee, Chih-Cheng Lin, Jeng-Horng Chen
  • Patent number: 10488751
    Abstract: Provided are a pellicle for extreme ultraviolet light lithography, a production method thereof, and an exposure method. A pellicle according to the present invention includes a first frame having a pellicle film located thereon; a second frame including a thick portion including a first surface carrying a surface of the first frame opposite to a surface on which the pellicle film is located, and also including a second surface connected with the first surface and carrying a side surface of the first frame, the second frame enclosing the pellicle film and the first frame; a through-hole provided in the thick portion of the second frame; and a filter located on an outer side surface of the second frame and covering the through-hole, the outer side surface crossing the surface of the first frame on which the pellicle film is located.
    Type: Grant
    Filed: March 9, 2017
    Date of Patent: November 26, 2019
    Assignee: MITSUI CHEMICALS, INC.
    Inventors: Kazuo Kohmura, Daiki Taneichi, Yosuke Ono, Hisako Ishikawa, Tsuneaki Biyajima, Atsushi Okubo, Yasuyuki Sato, Toshiaki Hirota
  • Patent number: 10365558
    Abstract: An apparatus for manufacturing a pellicle, the apparatus comprising: a stressing assembly for stressing a film; and a substrate support for supporting a substrate, the stressing assembly and the substrate support being capable of relative movement so as to bring the substrate into contact with the film when the film is stressed.
    Type: Grant
    Filed: November 19, 2014
    Date of Patent: July 30, 2019
    Assignee: ASML Netherlands B.V.
    Inventors: Maarten Mathijs Marinus Jansen, Juan Diego Arias Espinoza, Johannes Peterus Henricus De Kuster
  • Patent number: 10126644
    Abstract: The present disclosure provides an apparatus for a semiconductor lithography process in accordance with some embodiments. The apparatus includes a pellicle membrane, a pellicle frame attached to the pellicle membrane. The pellicle frame has a surface that defines at least one groove. The apparatus further includes a substrate that is in contact with the surface of the pellicle frame such that the grove is positioned between the pellicle frame and the substrate.
    Type: Grant
    Filed: February 9, 2016
    Date of Patent: November 13, 2018
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Yu-Ching Lee, Ching-Fang Yu, Chun-Hung Lin, Ting-Hao Hsu, Ching-Hsiang Chang, Sheng-Chi Chin
  • Patent number: 10126645
    Abstract: A pellicle is proposed in which an adhesive layer is formed of an adhesive which undergoes a hardness change at a rate from ?50% through +50% of its initial hardness, measured after curing, when it is let to sit in atmosphere of a temperature of 300 degrees C. for 7 days on end; the rate of hardness change being defined by a following equation: Rate of hardness change (%)={(hardness after the sitting)?(initial hardness before the sitting)}÷initial hardness before the sitting)×100.
    Type: Grant
    Filed: October 28, 2016
    Date of Patent: November 13, 2018
    Assignee: SHIN-ETSU CHEMICAL CO., LTD.
    Inventor: Jun Horikoshi
  • Patent number: 10065402
    Abstract: A method of manufacturing a pellicle assembly, the method including attaching a carbon-containing thin film onto a transfer membrane in a wet atmosphere; attaching the carbon-containing thin film to a pellicle frame in a dry atmosphere while the carbon-containing thin film is attached onto the transfer membrane; and separating the transfer membrane from the carbon-containing thin film while the carbon-containing thin film is attached to the pellicle frame.
    Type: Grant
    Filed: February 3, 2016
    Date of Patent: September 4, 2018
    Assignees: SAMSUNG ELECTRONICS CO., LTD., RESEARCH & BUSINESS FOUNDATION SUNGKYUNK WAN UNIVERSITY
    Inventors: Mun Ja Kim, Byung-Gook Kim, Hwan Chul Jeon, Ji-Beom Yoo, Dong-Wook Shin, Taesung Kim, Sooyoung Kim
  • Patent number: 9880462
    Abstract: A pellicle includes a pellicle frame, a pellicle membrane, and an attaching element, a first surface of the attaching element having exposed pores.
    Type: Grant
    Filed: September 9, 2015
    Date of Patent: January 30, 2018
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Jae-hyuck Choi, Jin-su Kim, Kyoung-mi Kim, Byung-gook Kim
  • Patent number: 9658525
    Abstract: The purpose of the present invention is to provide a pellicle which has, on the inner surface of the pellicle frame, a pressure-sensitive adhesive layer that has holding performance capable of satisfactorily adhering suspended substances including dust thereto and that has excellent resistance to short-wavelength light. This pellicle comprises a pellicle frame, a pellicle film stretched over the pellicle frame, and a pressure-sensitive adhesive layer disposed inside the pellicle frame, wherein the pressure-sensitive adhesive layer comprises a copolymer having structural units represented by formula (1) and structural units represented by formula (2), the amount of the copolymer being 60 mass % or more of the pressure-sensitive adhesive layer.
    Type: Grant
    Filed: July 31, 2013
    Date of Patent: May 23, 2017
    Assignee: MITSUI CHEMICALS INC.
    Inventors: Masahiro Kondou, Takamasa Tsumoto
  • Patent number: 9606459
    Abstract: An apparatus according to the present invention comprises a membrane layer and a supporting supportive mesh, wherein the membrane layer and the supportive mesh form a monolithic structure that absorbs less than ten percent of EUV (Extreme Ultraviolet) light passing through it in which the membrane layer is composed of a metal-ceramic composite.
    Type: Grant
    Filed: December 29, 2014
    Date of Patent: March 28, 2017
    Assignee: LUXEL CORPORATION
    Inventors: Bruce Lairson, David Grove, Heidi Lopez, Travis Ayers
  • Patent number: 9454227
    Abstract: A haptic control device, particularly for motor vehicles, with a touchpad including at least one contact-sensitive touch. A control signal can be triggered upon contact with the touch region, and the touchpad can be moveably driven by a drive in the plane of the touchpad in a certain rhythm. The touchpad is connected to a stationary carrier by one or more flexible connecting elements. The flexible connecting element or elements are spring arms, one end of which is connected to the carrier and the other end of which is connected to the touchpad.
    Type: Grant
    Filed: October 23, 2009
    Date of Patent: September 27, 2016
    Assignee: Continental Automotive GmbH
    Inventors: Armin Dietz, Heinz Pofahl
  • Patent number: 9418847
    Abstract: The present disclosure provides an apparatus in semiconductor manufacturing. The apparatus includes a mask, a pellicle frame attached to the mask, and a pellicle joined to the pellicle frame thereby forming a sealed enclosure bounded by the pellicle, the pellicle frame, and the mask. The apparatus further includes photo-catalyst particles introduced into the sealed enclosure before the sealed enclosure is formed. The photo-catalyst particles prevent haze formation within the enclosure during lithography exposure processes.
    Type: Grant
    Filed: January 24, 2014
    Date of Patent: August 16, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Ching-Wei Shen, Kuan-Wen Lin, Chi-Lun Lu, Ting-Hao Hsu, Sheng-Chi Chin, Anthony Yen
  • Patent number: 9418452
    Abstract: The present invention obtains subband signals by performing a multiresolution decomposition by a wavelet frame with orientation selectivity or a filterbank with orientation selectivity that is a set of an approximate filter with no orientation and a plurality of detail filters with respective orientations on image data, and, when an image is reconstructed by summing the obtained subband signals, generates reconstructed image data that creates a floating illusion by attenuating or amplifying a subband signal corresponding to at least one of detail filters with a predetermined orientation relative to a floating direction, in which an image is desired to be floated due to an illusion, among the detail filters.
    Type: Grant
    Filed: September 15, 2014
    Date of Patent: August 16, 2016
    Assignee: NATIONAL INSTITUTE OF JAPAN SCIENCE AND TECHNOLOGY AGENCY
    Inventors: Hitoshi Arai, Shinobu Arai
  • Patent number: 9389499
    Abstract: A pellicle was well as an assembly of photomask plus pellicle is proposed in which the conventional agglutinant layer which bonds the pellicle to photomask is replaced by male and female screws and elastic body layer; in particular the pellicle frame is screwed to the photomask while the sealing of the space within the pellicle frame is secured by the elastic body layer.
    Type: Grant
    Filed: April 4, 2014
    Date of Patent: July 12, 2016
    Assignee: SHIN-ETSU CHEMICAL CO., LTD.
    Inventor: Kazutoshi Sekihara
  • Patent number: 9216552
    Abstract: An image displaying device includes a background layer and a display layer. The display layer includes an inner surface and an outer surface. The inner surface is substantially smooth, and the outer surface includes a plurality of raised areas and recessed areas. The display layer has a first zone with a first thickness measured between the inner surface and a raised area and a second zone with a second thickness measured between the inner surface and a recessed area. The display layer also includes a coloring agent having a higher concentration in the first zone as compared to the second zone. The display layer has increased light transmissivity through the recessed areas and decreased light transmissivity through the raised areas such that a contrast of light transmissivity between the raised and recessed areas generates an image.
    Type: Grant
    Filed: July 17, 2013
    Date of Patent: December 22, 2015
    Assignee: NIKE, Inc.
    Inventors: James E. Diepenbrock, Connie A. Sarkinen, Todd A. Waatti
  • Patent number: 9176374
    Abstract: A pellicle is proposed in which the frame is composed of a detachable double structure of an inner frame and an outer frame, and the pellicle membrane is adhered only to the inner frame and the photomask-agglutination layer is laid only to the inner frame, and the outer frame is removed from the inner frame after the pellicle is agglutinated to the photomask.
    Type: Grant
    Filed: October 4, 2013
    Date of Patent: November 3, 2015
    Assignee: SHIN-ETSU CHEMICAL CO., LTD.
    Inventor: Kazutoshi Sekihara
  • Patent number: 9152003
    Abstract: Various types of edge seals for protecting electro-optic displays against environmental contaminants are described. In one type of seal, the electro-optic layer is sandwiched between a backplane and a protective sheet and a sealing material extends between the backplane and the protective sheet. In other seals, the protective sheet is secured to the backplane or to a second protective sheet adjacent the backplane. The electro-optic layer can also be sealed between two layers of adhesive or between one layer of adhesive and the backplane. Other seals make use of flexible tapes extending around the periphery of the display.
    Type: Grant
    Filed: August 8, 2011
    Date of Patent: October 6, 2015
    Assignee: E Ink Corporation
    Inventors: Guy M. Danner, Shamus Ford Patry, Charles Howie Honeyman, Thomas H. Whitesides, Michael D. McCreary, Gregg M. Duthaler
  • Patent number: 8874249
    Abstract: System, method and computer program product for configuring and controlling a facility to perform a manufacturing process and updating a tool controlling the process according to a model employed for mapping calculated coefficients that characterize non-linear variations observed of a product to actual control parameters governing the processes/tools used by the facility during the manufacturing process. The method enables real-time control of variation in an exposure step of a patterning process using an exposure tool to minimize a nonlinear variation in one or more pattern attributes by adjusting the exposure tool or the patterning process corresponding to the calculated coefficients. In the method, measurements of product attributes, obtained by finite sampling over a well defined domain, are projected onto a predefined reference mesh spanning the domain, using a physically based model comprised of functions constructed to be orthogonal and normalized over a discrete set of reference mesh locations.
    Type: Grant
    Filed: November 13, 2013
    Date of Patent: October 28, 2014
    Assignee: International Business Machines Corporation
    Inventor: Christopher P. Ausschnitt
  • Patent number: 8874259
    Abstract: During a carrying operation, the position, transportation origin, and transportation destination of a carrier or a boat can be easily checked. A carrying system is configured to carry a substrate, a manipulation unit is configured to display an operation state of the carrying system on a manipulation screen, and a control unit is configured to control an operation of the carrying system. The manipulation unit displays a carrying system icon indicating the carrying system which is a carrying target object and a carrying-out icon at predetermined positions of the manipulation screen corresponding to a transportation origin of the carrying system, and a carrying-in icon at a predetermined position of the manipulation screen corresponding to the transportation destination of the carrying system.
    Type: Grant
    Filed: October 18, 2013
    Date of Patent: October 28, 2014
    Assignee: Hitachi Kokusai Electric, Inc.
    Inventor: Junichi Kawasaki
  • Publication number: 20140272203
    Abstract: A decorative panel formed from layers comprising a transparent or translucent display panel, a supporting panel, an interchangeable decorative panel disposed between the display panel and the supporting panel, and a retaining band for surrounding the periphery of the panels and retaining the layers in generally abutting relation. The retaining band is removable so as to permit replacement of the decorative layer. The panel system of the invention provides a cost effective means of changing the look of cabinetry that is easy to implement and results in little wastage of materials.
    Type: Application
    Filed: March 14, 2014
    Publication date: September 18, 2014
    Inventor: Stephen Boychuk
  • Publication number: 20140248446
    Abstract: An image display apparatus (10) comprising a backing panel (12), one or more first raised portions (14) located on the backing panel (12), each first raised portion (14) having an image (18) for display secured thereto; one or more second raised portions (16) located on the backing panel (12), each second raised portion (16) including a mounting panel (20), each mounting panel (20) having at least one inner edge (24) arranged to surround a perimeter of each first raised portion (14) such that the image (18) is located within, and spaced apart from said mounting panel (20) to create a channel (30) therebetween, where in said mounting panel (20) is formed from two or more panel components (20a, 20b, 20c, 20d).
    Type: Application
    Filed: October 19, 2012
    Publication date: September 4, 2014
    Applicant: The Shadow Gap Company LLP
    Inventor: Brendan Vallar
  • Patent number: 8795929
    Abstract: A pellicle including a frame having a square shape; and a buffer zone in the frame, the buffer zone dividing a lower surface of the frame into a plurality of portions.
    Type: Grant
    Filed: July 16, 2012
    Date of Patent: August 5, 2014
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Sung-Hyuck Kim, In-Kyun Shin, Bum-Hyun An
  • Publication number: 20140212602
    Abstract: A display case housing a display board for displaying a variety of differently sized medal articles and their ribbon widths, where the display board is constructed of a plurality of rectangular chip-board or other like material slats, horizontally arranged, where each is over-lapped in stepped fashion, the lower edge of the first slat extending in front of the top edge of the second slat; where the outer edges of the overlapped slats are fixed in place; where the medallions are inserted through a vertical slot from the backside of the display-mounting board, positioned as preferred, and are displayed on the front side of the display board.
    Type: Application
    Filed: December 26, 2013
    Publication date: July 31, 2014
    Inventor: Terry G. Thornton
  • Publication number: 20140154431
    Abstract: A method for creating an artistic image involving printing a digital image on the front surface of a regionally stylized metallic sheet. The method includes the steps of preparing a preparatory image, selecting one or more regions of the front surface for stylization, placing the preparatory image on the front surface of the metallic sheet, stylizing the selected regions with techniques such as physical abrasion, chemical reaction, or heat, and then digitally printing the digital image upon the regionally stylized front surface of the metallic sheet to produce the artistic image. The invention also includes articles produced by this method.
    Type: Application
    Filed: December 2, 2013
    Publication date: June 5, 2014
    Applicant: Shinkle Fine Art, LLC
    Inventors: Theodore M Shinkle, Linda K. Shinkle Rodney
  • Patent number: 8722285
    Abstract: A pellicle for lithography, in which an agglutinant layer is so controlled that the deformation of the pellicle frame is prevented from transferring to an exposure original plate to which the pellicle is attached so that pattern transferred scarcely undergoes deformation; in particular the agglutinant layer has a Young's modulus of 0.02 to 0.08 MPa and a tensile bond strength of 0.04 to 0.08 N/mm2.
    Type: Grant
    Filed: April 25, 2012
    Date of Patent: May 13, 2014
    Assignee: Shin-Etsu Chemical Co., Ltd
    Inventors: Junichi Tsukada, Toru Shirasaki
  • Publication number: 20140127426
    Abstract: A multi-in-one decorative painting, consists of mother decorative painting, which is composed by the canvas and frame, the canvas is taken up to the frame, and evenly fixed connecting in the inwall of the frame with nails, the front of the canvas is the mother decorative painting, the back of the canvas and the frame is the multi-in-one area of the child decorative painting. The child one is smaller than the mother one, in usual, the number of child one can be from one to four, and there is an invisibility carry apparatus which is installed outside of the frame, it can achieve the effect of several different sizes inconsistent, but the overall style is same. It can meet the needs of matching use for customer, while increasing the effective use of raw materials.
    Type: Application
    Filed: July 11, 2013
    Publication date: May 8, 2014
    Inventor: Yun Luo
  • Patent number: 8663756
    Abstract: There is provided a pellicle kit for manufacturing a pellicle which comprises a pellicle frame having a jig hole in the outer wall of its frame bar and a jig having a jig pin which is adjusted to enter the respective jig hole until the front end of the jig pin is abutted against the tapered bottom face of the jig hole to thereby fix said pellicle frame.
    Type: Grant
    Filed: February 7, 2012
    Date of Patent: March 4, 2014
    Assignee: Shin-Etsu Chemical Co., Ltd.
    Inventors: Yuichi Hamada, Tatsuya Sema
  • Patent number: 8597859
    Abstract: A method for reducing contamination of a photomask that has a pellicle frame holding a pellicle film to cover the photomask, and a sealed space defined by the pellicle frame, the pellicle film and the photomask, includes: (a) providing a pressure regulating hole in the pellicle frame; (b) disposing the photomask into a receiving space of a chamber to fluidly connect the sealed space with the receiving space of the chamber; and (c) varying a temperature of the photomask to change a gas pressure within the sealed space and to thereby produce a gas transfer between the sealed space and the receiving space through the pressure regulating hole.
    Type: Grant
    Filed: May 18, 2011
    Date of Patent: December 3, 2013
    Assignee: Sanyu Technology Co., Ltd.
    Inventor: Tian-Xing Huang
  • Patent number: 8551675
    Abstract: A pellicle membrane is mounted between an outer frame and an inner frame. At least one of the frames is attached to the reticle without using conventional adhesives. The pellicle and reticle may be used in a lithography system. The pellicle allows radiation to pass through the pellicle to the reticle and may prevent particles from passing through the pellicle.
    Type: Grant
    Filed: August 11, 2011
    Date of Patent: October 8, 2013
    Assignee: Intel Corporation
    Inventors: Florence Eschbach, Paul Zimmerman, Alexander Tregub, Fu-Chang Lo
  • Patent number: 8535545
    Abstract: A method for fabricating a pellicle of an EUV mask is provided. An insulation layer is formed over a silicon substrate, and a mesh is formed over the insulation layer. A frame exposing a rear surface of the insulation layer is formed by selectively removing a center portion of a rear surface of the silicon substrate. A membrane layer is deposited over the mesh and an exposed top surface of the insulation layer which is adjacent to the mesh. A rear surface of the membrane layer is exposed by selectively removing the portion of the insulation layer which is exposed by the frame.
    Type: Grant
    Filed: July 16, 2010
    Date of Patent: September 17, 2013
    Assignee: Hynix Semiconductor Inc.
    Inventor: Yong Dae Kim
  • Publication number: 20130216735
    Abstract: A decoration system that includes a base object to be decorated and a rim capable of receiving a decorative insert. A user selects or creates a decorative insert, inserts the decorative insert into the rim, and then couples the rim to the base object. The decorative insert may be easily removed and replaced when the user desires a new style. A single rim may be coupled to multiple types of base objects.
    Type: Application
    Filed: February 18, 2012
    Publication date: August 22, 2013
    Applicant: INNOVERSA CORPORATION
    Inventors: Philip B. Fleet, Mark T. MacLean-Blevins
  • Publication number: 20130202817
    Abstract: An antistatic article including a substrate having a first surface, a sputtered conductive layer arranged on the first surface and having a thickness ranging from approximately 0.5 nanometers to approximately 10 nanometers, and an outer layer or a series of layers arranged atop the sputtered conductive layer, wherein, the antistatic article exhibits a surface resistivity of less than approximately 1012 ohms/square. A method of making an antistatic article includes pretreating a surface of the substrate, sputtering the conductive layer onto the surface to a thickness ranging from approximately 0.5 nanometers to approximately 10 nanometers, and sputtering the outer layer and one or more additional layers atop the conductive layer, wherein, the antistatic article exhibits a surface resistivity of less than approximately 1012 ohms/square.
    Type: Application
    Filed: February 2, 2012
    Publication date: August 8, 2013
    Inventors: James DeCoux, Roger Gave
  • Publication number: 20130186346
    Abstract: A decorative water display includes a container for holding water, an art piece adapted to be immersed in the water, and a sound module mounted on the container operable to play a prerecorded audio recording through a speaker device. The water display may further include a light source, the light may further be varied in coordination with the audio recording to produce a synergistic artistic expression. The water display may comprise an aquarium. The invention also encompasses storing the audio recording on a removable memory component to accommodate different tastes.
    Type: Application
    Filed: January 20, 2012
    Publication date: July 25, 2013
    Applicant: KOLLER ENTERPRISES, INC.
    Inventors: Dennis R. Milford, J. David Wharton, Chunlin Xiao
  • Patent number: 8449966
    Abstract: A new kind of pellicle frame is proposed which is made up of a core body and a clad body; the core body consists of a composite of carbon fiber plus resin, and it is preferred that the carbon fiber exists in the form of a laminated body of carbon fiber sheets in which the resin is impregnated; and the clad body is the outer layer sealing the core body such that no carbon is exposed through the clad body.
    Type: Grant
    Filed: September 16, 2011
    Date of Patent: May 28, 2013
    Assignee: Shin-Etsu Chemical Co., Ltd.
    Inventor: Kazutoshi Sekihara
  • Patent number: 8425992
    Abstract: Diorama having a focal zone and a plurality of inclined panels on which different areas of a two-dimensional image are displayed. The panels are disposed about the focal zone, which can be an area, a line, or a point, and the image flows continuously between the panels with no physical seams between areas of the image displayed on adjacent ones of the panels. The panels are rotated away from a seam line that extends between the focal zone and an outer edge of the image, and outwardly diverging edges of the panels along edges of the image created by the rotation are brought together along the seam line to tilt the panels to their inclined positions and create an enhanced perspective effect.
    Type: Grant
    Filed: December 9, 2011
    Date of Patent: April 23, 2013
    Assignee: Axial-Digital Corp.
    Inventor: Anthony D. Williams
  • Patent number: 8415001
    Abstract: A decorative member composing a casing includes: a resin layer (2) having a front surface (2b) and a back surface (2a); and a reflective layer (3) formed on the back surface (2a) of the resin layer (2). The back surface (2a) of the resin layer (2) includes a receding surface (21) formed therein. The receding surface recedes gradually toward the front surface (2b) to change a thickness of the resin layer (2). The receding surface (21) is a concave surface forming a depression that opens while broadening. The back surface (2a) of the resin layer (2) has a reference surface (22) around the receding surface (21), and a portion of the reference surface (22) facing an internal space of the casing is a roughened area (4).
    Type: Grant
    Filed: December 25, 2009
    Date of Patent: April 9, 2013
    Assignee: Panasonic Corporation
    Inventors: Shuji Yamashita, Suguru Nakao, Takehiko Yamashita, Takashi Nagashima
  • Patent number: 8404405
    Abstract: A pellicle frame, including aluminum, aluminum oxide, and a transition metal.
    Type: Grant
    Filed: September 10, 2010
    Date of Patent: March 26, 2013
    Assignees: Samsung Electronics Co., Ltd., Fine Semitech Corp.
    Inventors: Jung-jin Kim, Bum-hyun An, Chan-uk Jeon, Jang-dong You, Sung-wan Kim, Ik-jun Kim, Jae-hyuck Choi, Han-shin Lee
  • Patent number: 8372493
    Abstract: An emblem assembly configured for attachment to a vehicle includes a first element having a first surface and a second surface recessed from the first surface, wherein the first element defines at least one void therethrough extending through the second surface. The emblem assembly includes a second element having a third surface, a fourth surface spaced apart from the third surface, and a fifth surface extending between the third surface and the fourth surface, wherein the second surface is spaced apart from the fifth surface to define a channel therebetween. The emblem assembly includes a coating disposed on the third surface and a sealant disposed adjacent and in contact with at least a portion of each of the void, the second surface, the coating, and the fifth surface to thereby fill at least a portion of the channel. A method of forming the emblem assembly is also disclosed.
    Type: Grant
    Filed: September 28, 2010
    Date of Patent: February 12, 2013
    Assignee: GM Global Technology Operations LLC
    Inventor: Bruce N. Greve
  • Patent number: 8352069
    Abstract: During a carrying operation, the position, transportation origin, and transportation destination of a carrier or a boat can be easily checked. A carrying system is configured to carry a substrate, a manipulation unit is configured to display an operation state of the carrying system on a manipulation screen, and a control unit is configured to control an operation of the carrying system. The manipulation unit displays a carrying system icon indicating the carrying system which is a carrying target object and a carrying-out icon at predetermined positions of the manipulation screen corresponding to a transportation origin of the carrying system, and a carrying-in icon at a predetermined position of the manipulation screen corresponding to the transportation destination of the carrying system.
    Type: Grant
    Filed: December 7, 2009
    Date of Patent: January 8, 2013
    Assignee: Hitachi Kokusai Electric Inc.
    Inventor: Junichi Kawasaki
  • Patent number: 8343405
    Abstract: The invention relates to a production method for incorporating an object into a multi-part, transparent casing. According to the method, an object is aligned on a first joint surface of a first casing part and is pressed into said part using a second casing part with a second joint surface. The first joint surface of the first casing part and the second joint surface of the second casing part are then fused by pressure and temperature, forming a region between the casing parts that is devoid of a visible seam.
    Type: Grant
    Filed: September 18, 2006
    Date of Patent: January 1, 2013
    Assignee: Montblanc-Simplo GmbH
    Inventors: Dietmar Podszuweit, Manfred Martens, Holger Wuttke
  • Patent number: 8273507
    Abstract: There is provided a pellicle in which the frame is chamfered along all of its horizontal edges (as viewed when the pellicle frame is laid flat), and in particular those edges of the frame where the membrane-bonding frame face meets the external side walls of the frame are chamfered to the extent of C:0.01 mm-C:0.12 mm; in relation to this chamfer, a method is also provided wherein, after attaching a preformed pellicle membrane to the membrane-bonding frame face, the excessive part of the preformed membrane which extends beyond outer edges of the frame face is cut off in a manner wherein a blade of a knife is caused to scour the chamfer over the membrane in a manner such that the knife blade is kept in such an angle that the blade gets in a face-to-face contact with the chamfer face or that the blade touches only that edge of the frame where the chamfer face meets the first frame face while the knife blade is moved along the chamfered edge of the frame.
    Type: Grant
    Filed: November 22, 2010
    Date of Patent: September 25, 2012
    Assignee: Shin-Etsu Chemical Co., Ltd.
    Inventor: Yoshihiko Nagata
  • Patent number: 8247518
    Abstract: A multi-layer polymer film for printing and copying of the present invention comprising a two-layer polymer base film composed of layer A and layer B laminated on one side of the layer A, the layer B containing a filler in an amount of 50 to 3000 ppm and the layer A containing no filler or a filler in an amount of at least 1000 ppm and less than the B layer; an image receiving layer coated on the exposed surface of the layer A; and an antistatic layer coated on the exposed surface of the layer B, wherein the layer A having the image receiving coating layer and the layer B having the antistatic coating layer have average degrees of surface roughness (Ra) ranging from 10 to 60 nm and 50 to 150 nm, respectively, exhibits improved properties in terms of runnability, printing, optical (haze), antistatic, friction coefficient and anti-blocking properties, which can be advantageously used as an OHP film.
    Type: Grant
    Filed: May 29, 2009
    Date of Patent: August 21, 2012
    Assignee: SKC Inc.
    Inventors: Taehoung Jeong, Kwang Soo Choi, Mary Elizabeth Klima
  • Publication number: 20120183704
    Abstract: A cut-resistant exhibit board comprises a substrate having a first side surface provided with a cut-resistant layer, and a second side surface of the substrate is provided with an exhibit frame and an adhesive layer located in the exhibit frame. By such an arrangement, the cut-resistant layer can serve as a backing pad for assisting cutting operation during the production of the exhibit object, reducing the cost in additionally preparing the backing pad while making the production easier and more convenient. In addition, since the exhibit frame is made of soft material having anti-slip function, it can avoid the danger that the user is probably cut when the cutter slips while allowing the user to easily perform the line pressing operations by using line pressing tool. In the exhibit frame is provided a detachable plate element which will be flush with the exhibit frame after being place therein.
    Type: Application
    Filed: January 13, 2011
    Publication date: July 19, 2012
    Inventor: Tsai-Lian Chen Lin
  • Patent number: 8173330
    Abstract: A pellicle is provided that includes an aluminum pellicle frame having an anodized layer on its entire surface; and a pellicle film stretched over and affixed to an end face of the pellicle frame, the anodized layer having a thickness of 4 to 8 ?m.
    Type: Grant
    Filed: April 20, 2010
    Date of Patent: May 8, 2012
    Assignee: Shin-Etsu Chemical Co., Ltd.
    Inventor: Toru Shirasaki
  • Publication number: 20120088042
    Abstract: A decorative architectural glass panel comprises a two or more glass sheets separated by a resin in which one or more decorative objects are suspended. A method of making the glass panel comprises positioning one or more spacers and one or more decorative objects on a first glass sheet, placing a second glass sheet about the first glass sheet, sealing the edges of the first glass sheet and second glass sheet, and filling the space between the first and second glass sheets with a curable liquid resin. The resin can be poured using a substantially horizontal pour in order to keep the decorative objects from substantially shifting when pouring the liquid resin. The resin can also be poured in combination with a vacuum force. In some implementations, the glass panel may also be substituted with a resin panel using polymeric resin sheets.
    Type: Application
    Filed: December 13, 2011
    Publication date: April 12, 2012
    Applicant: 3form, Inc.
    Inventor: Eric Adickes
  • Patent number: 8026023
    Abstract: A lithographic pellicle is provided that includes a pellicle frame, a pellicle film stretched over one end face of the pellicle frame via a pellicle film adhesive, and an exposure master plate adhesive provided on the other end face, wherein corners formed between a pellicle film adhesion face and exposure master plate adhesion face of the pellicle frame and inside and outside faces of the frame are subjected to C chamfering, and the chamfer dimension on the exposure master plate adhesion face is greater than C0.35 (mm) but no greater than C0.55 (mm).
    Type: Grant
    Filed: March 31, 2009
    Date of Patent: September 27, 2011
    Assignee: Shin-Etsu Chemical Co., Ltd.
    Inventor: Yuichi Hamada
  • Publication number: 20110229663
    Abstract: A panel includes a fiberglass substrate encapsulating an aesthetic material. The fiberglass substrate and the aesthetic material are both impregnated with resin to form the solid-core of the panel. The solid-core panel can be manufactured by arranging multiple layers of a fiberglass material between multiple plates, interleaving aesthetic material between at least two of the layers of fiberglass material, applying resin to the multiple layers of fiberglass material and the aesthetic material, and then allowing the combination of the resin, multiple layers of fiberglass material, and the aesthetic material to cure between the plates, forming a solid-core panel encapsulating the aesthetic material.
    Type: Application
    Filed: March 17, 2010
    Publication date: September 22, 2011
    Inventor: Jesse Villarreal, JR.
  • Patent number: 8012651
    Abstract: A pellicle membrane is mounted between an outer frame and an inner frame. At least one of the frames is attached to the reticle without using conventional adhesives. The pellicle and reticle may be used in a lithography system. The pellicle allows radiation to pass through the pellicle to the reticle and may prevent particles from passing through the pellicle.
    Type: Grant
    Filed: December 14, 2007
    Date of Patent: September 6, 2011
    Assignee: Intel Corporation
    Inventors: Florence Eschbach, Paul Zimmerman, Alexander Tregub, Fu-Chang Lo
  • Patent number: 7992331
    Abstract: An optical illusion device such as a drinking glass/cup for providing a multi-dimensional visual display. The device includes a body with tubular sidewalls extending from an opening at a first end to an opening at a second end. A base assembly is provided at the second end. The base assembly includes a top wall, a bottom wall, and a sidewall that together form or define an inner chamber. A visual display assembly is provided with a mirror element with a convex reflective surface or mirror positioned within the chamber with the reflective surface facing the top wall of the base assembly. A primary image element is provided proximate to the reflective surface such that the primary image and mirror element can be observed via the opening in the body. A framing element is included proximate to the top wall of the base assembly including background images facing the reflective surface.
    Type: Grant
    Filed: December 20, 2010
    Date of Patent: August 9, 2011
    Assignee: Disney Enterprises, Inc.
    Inventor: Gary W. Schnuckle
  • Patent number: 7951513
    Abstract: A silicon single crystal film having a crystal plane as its principal plane, the crystal plane being inclined at 3 to 5° from any lattice plane belonging to {100} planes or {111} planes is used as a pellicle film. The silicon single crystal having such a crystal plane as its principal plane has effective bond density and Young's modulus thereof which are about 40% to about 50% higher than those of a silicon single crystal with <100> orientation, and therefore a cleavage and crack do not easily occur. Moreover, the silicon single crystal has a high chemical resistance such as hydrofluoric acid resistance, and hardly causes an etch pit and void. Accordingly, the present invention can provide a pellicle comprising a pellicle film for EUV having high transmission, and excellent mechanical and chemical stability, as well as having a high yield, and being practical also in cost.
    Type: Grant
    Filed: May 1, 2009
    Date of Patent: May 31, 2011
    Assignee: Shin-Etsu Chemical Co., Ltd.
    Inventors: Yoshihiro Kubota, Shoji Akiyama, Toshihiko Shindo