Abstract: An iron aluminide fuel injector component such as a nozzle, plunger or other part is manufactured from iron aluminide or includes an iron aluminide coating on at least a portion of a surface in contact with the fuel which passes through the fuel injector. The iron aluminide alloy can include 8 to 32 wt. % Al, up to 5 wt. % refractory metal, B and/or C in amounts sufficient to form borides and/or carbides. The fuel injector component can be formed from powders of the iron aluminide alloy by powder metallurgy techniques and the coating can be formed by a diffusional reaction process, cathodic plasma process, chemical vapor deposition or physical vapor deposition. The fuel injector component is corrosion, carburization, sulfidation and/or coking resistant.

Abstract: A thermal barrier coating for nickel based superalloy articles such as turbine engine vanes and blades that are exposed to high temperature gas is disclosed. The coating includes a columnar grained ceramic layer applied to a platinum modified Ni3Al gamma prime phase bond coat having a high purity alumina scale. The preferred composition of the bond coat is 5 to 16% by weight of aluminum, 5 to 25% by weight of platinum with the balance, at least 50% by weight, nickel. A method for making the bond coat is also disclosed.

Abstract: A method for protecting high temperature stainless steel from coking and corrosion at elevated temperatures in corrosive environments, such as during ethylene production by pyrolysis of hydrocarbons or the reduction of oxide ores, by coating the stainless steel with a coating of MCrAlX in which M is nickel, cobalt, iron or a mixture thereof and X is yttrium, hafnium, zirconium, lanthanum or combination thereof deposited onto and metallurgically bonded to the stainless steel by plasma transferred arc deposition of atomized powder of MCrAlX. The coating has a thick, dense, continuous and smooth transition region providing an effective metallurgically bond of the coating with the stainless steel. The coating retains a relatively high aluminum content which permits generation of an adherent alumina layer on the surface, providing good resistance to high temperature oxidation together with good anti-coking and hot erosion resistance properties.

Abstract: A method for producing a laminated metal ribbon comprises the steps of (a) vapor-depositing a third metal layer on at least one welding surface of a first metal ribbon 4 and a second metal ribbon 5 in a vacuum chamber 1, the third metal being the same as or different from a metal or an alloy of the first and second metal ribbons 4, 5; (b) pressure-welding the first metal ribbon 4 to the second metal ribbon 5; and (c) subjecting the resultant laminate 9 to a heat treatment for thermal diffusion.

Abstract: A magnetically permeable material comprising a substantially amorphous permalloy film is disclosed. The substantially amorphous permalloy film is formed by ion-beam sputtering. The substantially amorphous permalloy film exhibits improved output amplitude and noise characteristics.

Abstract: The invention relates to a method and apparatus for the production of protective coatings on parts. A coating formed in accordance with the invention has a chemical composition and structure gradient across its thickness. The coating is obtained by heating of a composite ingot including a body and at least one insert disposed within the body. As the composite ingot is heated it sequentially evaporates to produce a vapor with a chemical composition varying over the evaporation time period. The composition of the body and composition and location of the insert within the body function to determine the chemical composition of the vapor at any time. Condensation and/or deposition of the vapor onto a substrate forms the inventive coating.

Abstract: A Cu plated ceramic substrate is used in a semiconductor. On a ceramic substrate layer, a thin-film Cr layer is put, and a thin-firm Au layer is put on the Cr layer. The Au layer is plated with Cu. By providing the Au and Cr layers between the ceramic plate and Cu layer, adhesibility is increased. A Pertier element which includes the Cu plated ceramic layer is employed in a semiconductor to absorb and generate heat efficiently.

Abstract: A titanium aluminide turbine blade (10) includes an aerofoil (12), a platform (14) and a root (16). A protective coating (2) is applied to the aerofoil (12) and the platform (14) of the turbine blade (10). The protective coating (2) comprises austenitic stainless steel. A chromium oxide layer (22) is formed on the protective coating (2). The protective coating (20) and chromium oxide layer (22) provides oxidation and sulphidation resistance for the titanium aluminide article (10).

Abstract: The present invention provides an Al alloy thin film for a semiconductor device electrode having an electrical resistivity of as low as 6 &mgr;&OHgr;cm or less, high hillock resistance, high void resistance, and high corrosion resistance against an alkaline solution, which are required for an electrode thin film of large-screen liquid crystal display (LCD) or high-resolution LCD. The present invention also provides a sputtering target to deposit the Al alloy film by sputtering process for a semiconductor device electrode. The Al alloy thin film for a semiconductor device electrode satisfies the conditions of Y≧0.3 at %, IVa group metal element≧0.2 at %, and 0.3Cy+3CIVa≦2 (wherein Cy: Y content (at %), CIVa: content of IVa group metal element (at %)), and the sputtering target is made of an Al alloy satisfying the above conditions.

Abstract: A high-strength lightweight steel and its use for car parts and facade linings is a purely ferritic steel having, in mass %, more than 5 to 9% Al, less than 0.2% Si, and 0.03 to 0.2% Mn.

Abstract: A thin film product having a nanostructured surface, a laminate product including the thin film and a temporary substrate opposite the nanostructured surface, a laminate product including the thin film and a final substrate attached to the nanostructured surface and a method of producing the thin film products. The thin film is particularly useful in the electronics industry for the production of integrated circuits, printed circuit boards and EMF shielding. The nanostructured surface includes surface features that are mostly smaller than one micron, while the dense portion of the thin film is between 10-1000 nm. The thin film is produced by coating a temporary substrate (such as aluminum foil) with a coating material (such as copper) using any process. One such method is concentrated heat deposition or a combustion, chemical vapor deposition process.

Abstract: IC fabrication employs the deposition of aluminum as a metallization layer. Frequently, the aluminum is doped with copper in small amounts to improve electric properties. Low temperature deposition of these layers is preferred to ensure the proper microstructure and surface roughness. Low temperature deposition (below about 300° C.) results in the formation of copper precipitates which can be difficult to remove. Annealing the layer formed, either prior to, or after formation of capping layers and additional layers thereon, drives the copper precipitate back into solution, permitting small dimension fabrication.

Abstract: A method for forming a composite vapor-deposited film which is suitable for the deposition on the fluorescent screen of a color television picture tube and the like and in which one side has a high light-reflectance and the other side has a property of absorbing heat rays, and a composite vapor-deposition material suitable for vacuum vapor deposition therefor are disclosed. This composite vapor-deposition material has an aluminum envelope and a low vapor-pressure metal/metalloid compound powder in the its core region. It is desirable that the low vapor-pressure metal/metalloid compound powder is dispersed and retained with aluminum in the core region.

Abstract: An aluminum alloy composite material includes a higher strength aluminum alloy core material layer and at least one cladding aluminum alloy material layer having a higher electrical conductivity than the core material. The cladding layer is positioned adjacent to the core and the composite is adapted for particular application in heat exchangers where brazing is conducted under controlled atmospheres with special flux materials. The core material has an electrical conductivity less than 50% IACS and the cladding layer has an electrical conductivity greater than 50% IACS. The cladding layer can be on one or both surfaces of the core layer. The thickness of the cladding layer can range between about 2.5 and 40% of the overall composite thickness depending on whether one or more cladding layers are employed. The cladding layer also has a corrosion potential more negative than the core layer for enhanced corrosion resistance.

Abstract: A material for use as a bearing sliding surface and a bearing having the material are described, the material comprises tin and having therein from 1 to 5 wt % of a metal selected from the group comprising nickel, cobalt and iron.

Abstract: An industrial material such as metal, ceramics or plastics whose surface has a film passivated by fluoridation and a process of manufacturing the above industrial material. The industrial material comprises a substrate, a nickel alloy film formed on the substrate and containing nickel, semimetal and/or other metal whose fluoride becomes a volatile compound, and a fluorine passivated film formed at least on a surface of the nickel alloy film in such a manner that the fluorine passivated film contains nickel and does not contain said other metal or the semimetal, and satisfies stoichiometric ratio. The process of manufacturing an industrial material comprises the steps of performing grounding treatment of a surface of a substrate, forming a nickel alloy film, on the surface of the substrate, containing nickel, semimetal and/or other metal, and forming a fluorine passivated film on the nickel alloy film.

Abstract: The invention relates to a method for gloss coating articles or a portion of an article's surface and articles produced from this method. A corrosion-inhibiting polishing base coat is applied in a known fashion, after which a high-gloss layer produced by atomization, preferably magnetron atomization, is applied. Then, a transparent, wear-resistant top coat layer is applied in a known fashion. The articles can also be pretreated, if desired, and given a protective or other layers. By using this method, parts for vehicles, especially vehicle wheels, can be produced in a great variety of colors and with improved qualities.

Abstract: A corrosion-resistant member against a chlorine-based gas, which member is to be exposed to a chlorine-based gas atmosphere at temperatures of not less than 600° C. and includes a sintered body made of aluminum nitride and a film of silicon carbide covering a surface of the sintered body and formed by chemical vapor deposition.

Abstract: The present invention provides a lead frame material and a process for manufacturing a lead frame material. The process includes forming an intermediate layer on a lead frame substrate by vacuum deposition and forming a top protective layer on the intermediate layer by vacuum deposition. By using vacuum deposition, the coating material can be selected from a wider variety of materials; thus, coatings with novel compositions can be formed. The intermediate layer can be Ni, Ag, W, Zn, Cr, Mo, Cu, Sn, Al, Ta, Co, Nb, or alloys thereof, and the top protective layer can be Pt, Ir, Re, Ru, Rh, Pd, Au, Ag, or alloys thereof.

Abstract: A cutting tool having cutting edges made of a high speed tool steel exhibiting very high wear and anti-chipping resistances, and sufficient toughness is provided. The high speed tool steel consists essentially of by weight C:0.6 to 1.8%, Si:1.2% max, Mn:0.5% max, Cr:3.5 to 5.0%, Mo:10% max, W:21% max, V:2 to 4% and Co:7 to 10%, the balance being Fe and incidental impurities, and the steel of the cutting edge comprise MC-type carbide grains each having a maximum equal value diameter of a circle ranging substantially 5 to 14 &mgr;m, and the MC-type carbide grains having an equal value diameter of the circle ranging substantially 5 to 14 &mgr;m have a ratio between short and long diameters ranging over substantially 0.3.

Abstract: The invention relates to an article of manufacture comprising: a substrate composed of a superalloy containing chromium and a base element selected from the group consisting of iron, cobalt, and nickel; and an enrichment layer containing chromium and placed on the substrate. Therein, the enrichment layer comprises a continuous matrix composed of a gamma-phase solid solution of chromium in the base element. The invention also relates to the manufacture of such an article. The article may in particular be a gas turbine component.

Abstract: A protective coating for protecting a component from corrosion and oxidation at a high temperature and from excessive thermal stress, has a heat insulation layer including a ceramic material and an adhesion-promoting layer including a rhenium containing metal alloy. The metal alloy belongs to the alloys covered by the general term MCrAlY, where M represents cobalt and/or nickel and Y represents yttrium and/or at least one equivalent metal from the group including scandium and the rare earth elements. The protective coating is distinguished by high oxidation resistance and corrosion resistance of the alloy, by outstanding thermal fatigue properties and an effective and permanent bond between the alloy and the ceramic heat insulation layer. As a result of the heat insulation, the temperature at the outer surface of the protective coating can be considerably higher than with purely metallic protective coatings, without an increased thermal load being exerted on the component.

Abstract: A CVD outwardly grown platinum aluminide diffusion coating on a nickel or cobalt base superalloy substrate wherein the platinum modified aluminide diffusion coating is modified to include silicon, hafnium, and optionally zirconium and/or other active elements (e.g. Ce, La, Y, etc.) each in a concentration of about 0.01 weight % to about 8 weight % of the outer additive (Ni,Pt)(Al,Si) layer of the coating. A particular coating includes about 0.01 weight % to less than 2 weight % of each of silicon, hafnium, and zirconium in the outer additive layer, preferably with a Hf/Si ratio less than about 1 and, when Zr also is present, a Hf+Zr/Si ratio of less than about 1. A coating microstructure is provided characterized by an inner diffusion zone or region adjacent the substrate and the outer additive (Ni,Pt)(Al,Si) layer including hafnium silicide second phase particles or regions dispersed throughout the outer additive layer of the coating.

Abstract: A white decorative part comprising: a substrate, a white hard coating formed on the substrate according to a dry plating process, and an outermost coating formed on the white hard coating according to a dry plating process, wherein the white hard coating is composed of either a nitride, a carbide, an oxide or a carbonitride of at least one element selected from among Ti, Hf, Zr, Ta, V, Cr and Al or Ti, and wherein the outermost coating is composed of an alloy of gold and any of nickel, tantalum, cobalt, palladium, silver, rhodium, titanium and iron, the proportion of the gold to the outermost coating ranging from 30 to 80 atomic % while the proportion of the nickel, tantalum, cobalt, palladium, silver, rhodium, titanium or iron to the outermost coating ranges to 20 to 70 atomic %. Further, a process for producing the white decorative part.

Abstract: A composition comprising an immobilized biological membrane is provided. The functional immobilized biological membrane consists of a support structure, a metal layered onto a surface of the support structure, an alkanethiol monolayer assembled onto the metal, and a biological membrane deposited on the alkanethiol monolayer. Also provided is a method of producing the immobilized biological membrane, wherein the method involves contacting an alkanethiol with a metal surface of a support structure in forming an alkanethiol monolayer assembled onto the metal, and depositing a biological membrane onto the alkanethiol monolayer such that the biological membrane becomes associated with the alkanethiol monolayer. Uses of the biological membrane include as a sensing indicator in a biosensor, as an adsorbent in a chromatography system, and as a coating for medical devices.

Abstract: A thermal barrier protected nickel based or cobalt based superalloy component for use in a gas turbine engine includes a thermal barrier coating system having a multi-layered structure. The first bondcoat layer of the thermal barrier coating system comprises a chemical vapor deposited, platinum modified diffusion aluminide layer on the superalloy component (substrate). The diffusion aluminide layer includes an inner diffusion zone proximate the substrate and an outer layer region comprising a platinum modified (platinum-bearing) intermediate phase of aluminum and at least one of nickel and cobalt depending on the superalloy composition. The intermediate phase is a non-ordered solid solution having a range of compositions and is free of other phase constituents.

Abstract: A field emitter device formed by a veil process wherein a protective layer comprising a release layer is deposited on the gate electrode layer for the device, with the protective layer overlying the circumscribing peripheral edge of the opening of the gate electrode layer, to protect the edge of the gate electrode layer during etching of the field emitter cavity in the dielectric material layer on a substrate, and during the formation of a field emitter element in the cavity by depositing a field emitter material through the opening. The protective layer is readily removed subsequent to completion of the cavity etching and emitter formation steps, to yield the field emitter device. Also disclosed are various planarizing structures and methods, and current limiter compositions permitting high efficiency emission of electrons from the field emitter elements at low turn-on voltages.

Abstract: Silicon thin films of superior resistivity useful for, e.g., semiconductor elements in solar cells, are formed by coating and drying silicon vaporized in the presence of hydrogen alone or hydrogen and an inert gas, followed by contacting the thus produced silicon particles with solvent to form a silicon colloid. Preferably, the silicon colloid is produced by a process which comprises vaporizing silicon in an atmosphere consisting essentially of hydrogen and up to 10 mol of an inert gas per mol of hydrogen; condensing silicon vaporized in the first step to form fine silicon particles; bringing the silicon particles into contact with a solvent to cover the silicon particles with solvent, and collecting the solvent covered silicon particles to obtain the silicon colloid.

Abstract: An article such as fishing tackle or the like, is provided with an exterior surface which has high strength so that any cracking or separation hardly occurs, has high durability, is light in weight and is decorated to have an aesthetically pleasing appearance. The exterior surface is formed with a synthetic resin coating layer, a thin decorative layer formed through physical vapor deposition with metal, and a transparent or semi-transparent protective layer.

Abstract: A dent (1A) for a reed for use on a high-speed weaving machine, comprises a thin flat strip (3) made of stainless steel, and a hard carbon film (2) formed on only the surface of a working ridge edge portion (3b) of the thin flat strip (3) to come into sliding contact with a yarn. The method of manufacture comprising steps of superposing a plurality of thin flat strips (3) made of a stainless steel in the same shape in a stack with the flat side surfaces (3a) of the adjacent thin flat strips (3) in close contact with each other, placing the stack of thin flat strips (3) in a film forming atmosphere with the ridge edge portions opposite the working edge portions (3b) to come in sliding contact with a yarn trued up by a dent aligning jig, and coating the working ridge edge portions (3b) of the thin flat strips (3) exposed to the film forming atmosphere with a hard carbon film (2).

Abstract: A method is provided for forming a nitride spacer, in which a layer of oxide is grown superjacent a substrate and the semiconductor features disposed thereon. A layer of nitride is deposited superjacent the oxide layer, and a major horizontal portion of the nitride layer anisotropically etched with an ionized fluorocarbon compound. The remainder of the horizontal portion of the nitride layer is removed with NF.sub.3 ions in combination with ionized halogen-containing compound, thereby creating nitride spacers adjacent the features.

Abstract: A composite metal membrane including a first metal layer of Group IVB met or Group VB metals, the first metal layer sandwiched between two layers of an oriented metal of palladium, platinum or alloys thereof is provided together with a process for the recovery of hydrogen from a gaseous mixture including contacting a hydrogen-containing gaseous mixture with a first side of a nonporous composite metal membrane including a first metal of Group IVB metals or Group VB metals, the first metal layer sandwiched between two layers of an oriented metal of palladium, platinum or alloys thereof, and, separating hydrogen from a second side of the nonporous composite metal membrane.

Abstract: A thermal barrier protected nickel based or cobalt based superalloy component for use in a gas turbine engine includes a thermal barrier coating system having a multi-layered structure. The first bondcoat layer of the thermal barrier coating system comprises a chemical vapor deposited, platinum modified diffusion aluminide layer on the superalloy component (substrate). The diffusion aluminide layer includes an inner diffusion zone proximate the substrate and an outer layer region comprising a platinum modified (platinum-bearing) intermediate phase of aluminum and at least one of nickel and cobalt depending on the superalloy composition. The intermediate phase is a non-ordered solid solution having a range of compositions and is free of other phase constituents.

Abstract: A method is provided for forming a nitride spacer, in which a layer of oxide is grown superjacent a substrate and the semiconductor features disposed thereon. A layer of nitride is deposited superjacent the oxide layer, and a major horizontal portion of the nitride layer anisotropically etched with an ionized fluorocarbon compound. The remainder of the horizontal portion of the nitride layer is removed with NF.sub.3 ions in combination with ionized halogen-containing compound, thereby creating nitride spacers adjacent the features.

Abstract: A thin film silver-nickel coating for use as a protective coating on electrical terminals of separable electrical connectors. The silver-nickel coating is a silver-nickel nano-composite material characterized by silver and nickel grains having an average grain size of about five to about fifty nanometers, yielding a silver-rich phase and a harder nickel-rich phase as a result of silver and nickel being immiscible. In accordance with this invention, the volume fraction of nickel significantly influences the fretting wear resistance of the coating, with a preferred nickel content being resulting in the presence of disconnected islands of the nickel phase dispersed within a relatively softer silver matrix.

Abstract: A Zn--Mg binary coating layer formed on a steel sheet has the tri-layered structure that the first sublayer composed of a Zn--Mg alloy having Mg concentration of 0.5 wt. % or less, the second sublayer composed of a Zn--Mg alloy having Mg concentration of 7 wt. % or more and the third sublayer composed of a Zn--Mg alloy having Mg concentration of 0.5 wt. % or less are successively laminated. The coating layer may have the penta-layered structure wherein sublayers composed of a Zn--Mg alloy having Mg concentration of 2-7 wt. % are additionally interposed between the high-Mg and low-Mg sublayers. A Zn--Fe or Zn--Fe--Mg alloy layer may be formed at the boundary between the substrate steel and the coating layer. The adhesion ratio of the first sublayer to the top sublayer is preferably 1.2 or more, while the high-Mg sublayer is preferably conditioned to the mixed structure of a Zn.sub.2 Mg phase with a Mg-dissolved Zn phase.

Abstract: A method is taught for preparing titanium alloys having high temperature oxidation resistance, whereby a coating of a copper bronze containing up to 10 percent aluminum and up to 6 percent silicon is applied to the titanium substrate by cathodic arc deposition or ion vapor deposition.

Abstract: A lead frame material comprises a base plate consisting of copper or copper alloys, and a protective coating formed on the upper or the both surface of the base plate. The protective coating is composed of at least one metal selected from the group consisting of gold, gold alloy, silver, silver alloy, palladium and palladium alloy, and has a thickness of 10-500 angstrom. The protective coating is formed by means of vapor deposition. It is possible to form an intermediate coating of nickel or nickel alloys between the surface of the base plate and the protective coating, by means of vapor deposition or wet plating. The suitable thickness of the intermediate coating is within the range of 50-20000 angstrom.

Abstract: The surface characteristics of an article or substrate produced from a polymeric material, particularly a thermoplastic material, are modified by exposure of the surface to a low temperature plasma gas composition, wherein the gas composition consists essentially of N.sub.2 O and CO.sub.2. After exposure, the modified surface has improved adhesive strength to another similarly treated surface using an adhesive composition and improved receptivity for paint and other coatings.

Abstract: A magnetic recording disk has an improved surface film formed on the disk blank. A sputter-deposited surface coating containing nickel, chromium and oxygen (Ni--Cr--O) is formed on a AlMg disk blank, after which a cobalt alloy magnetic layer is formed over the Ni--Cr--O coating and a protective overcoat is formed over magnetic layer. The use of the Ni--Cr--O coating on the disk blank eliminates the need for a wet electroless deposition process for creation of a surface coating and results in an inherent texturing of the subsequently deposited magnetic film and protective overcoat which conform to the surface texture of the sputter-deposited Ni--Cr--O. The disks made with the Ni--Cr--O surface film exhibit a very low static friction force between the air-bearing slider and the disk surface when the disks are used in contact start/stop (CSS) disk files.

Abstract: A method of forming a highly reflective surface on aluminum alloys, the composition comprising (a) brightening the surface of a body formed from an aluminum alloy; and (b) desmutting the freshly brightened body in a bath. The desmutting bath comprises 10-100 volume percent nitric acid; 0-60 volume percent sulfuric acid; 0-50 volume percent water; and at least 15 grams per liter of a source of bifluoride. Ammonium fluoride is the preferred source of fluoride.

Abstract: The present invention relates to a composite film. More particularly, the present invention relates to a composite compound film and composite compound multilayered film, comprising a metal, an alloy and/or an inorganic substance with an organic substance, which is excellent in decorative properties, protection and functionality. Methods applicable for forming such a composite compound film include the technique of evaporating a metal, an alloy, and/or an inorganic substance and an organic substance, simultaneously exciting the evaporated particles, and causing vapor-deposition in the state of ionized particles, neutral particles or radicals, and a method of sputtering, without excitation, etc.

Abstract: A tanning towel is disclosed which is capable of enhancing suntanning by having a reflective side made of a pliable fabric which can be washed and dried in a normal fashion and which can be attached to a conventional towel using a hook-and-loop (Velcro) type attachment or stitching.

Abstract: Disclosed is a stretchable metallized nonwoven web composed of at least one nonwoven web of non-elastomeric thermoplastic polymer fibers, the nonwoven web having been heated and then necked so that it is adapted to stretch in a direction parallel to neck-down at least about 10 percent more than an identical untreated nonwoven web of fibers; and a metallic coating substantially covering at least a portion of at least one side of the nonwoven web. The nonwoven web of non-elastomeric thermoplastic polymer fibers can be a nonwoven web of non-elastomeric meltblown thermoplastic polymer fibers. The stretchable metallized nonwoven web may be joined with other materials to form multi-layer laminates. Also disclosed is a process of making a stretchable metallized nonwoven web.

Abstract: The present invention relates generally to a structure and a method of making Alpha-Ta films, and more particularly, to a structure and a method of making Alpha-Ta in thin films. A seed layer of Ta reactively sputtered in a nitrogen containing environment is grown on the substrate, and using this seed layer of Ta(N) layers of Alpha-Ta are then formed.

Abstract: An improved thermal barrier coating system is described. A key feature of the invention is the presence of a thin, adherent aluminum oxide scale on the surface of the substrate. An oxide stabilized ceramic coating is present on the surface of the scale. Preferably, the ceramic coating has a columnar grain structure.

Abstract: A steel substrate is provided with an aluminum intermediate layer and a boron layer. The aluminum intermediate layer provides a substantially improved adhesion of the boron layer. The boron layer is provided by a low-temperature CVD process.

Abstract: A steel substrate is provided first with an aluminum intermediate layer and then, by a CVD process, with an outer layer of boron.

Abstract: A magnesium alloy structural member for supporting at least one actuator arm in a hard disk drive and a method for making a shaped magnesium part having a fluorocarbon coating is disclosed. The coating is applied by exposing the member to a reactive gas in the presence of a glow discharge plasma to prevent corrosion. The glow discharge is generated by providing a vacuum environment at a pressure of between 250 and 300 millitorr in a reaction chamber and applying power to a pair of electrodes contained within the reaction chamber. Power is supplied at between about 100 and about 200 watts at about 13.6 megahertz, forming a low temperature glow discharge plasma. A reactive gas comprising a fluorinated alkane is introduced to the reaction chamber, and a pressure of between about 100 and about 300 millitorr is maintained. The structural member is exposed to the reactive gas and the plasma for an amount of time sufficient to form a thin and uniform polymeric fluorocarbon coating on the surface of the part.

Abstract: A highly pure thin metal film having a nanocrystalline structure and a process of preparing such highly pure thin metal films of, e.g., rhodium, iridium, molybdenum, tungsten, rhenium, platinum, or palladium by plasma assisted chemical vapor deposition of, e.g., rhodium(allyl).sub.3, iridium(allyl).sub.3, molybdenum(allyl).sub.4, tungsten(allyl).sub.4, rhenium(allyl).sub.4, platinum(allyl).sub.2, or palladium(allyl).sub.2 are disclosed. Additionally, a general process of reducing the carbon content of a metallic film prepared from one or more organometallic precursor compounds by plasma assisted chemical vapor deposition is disclosed.