Modulating, Varying Or Augmenting Heat Supply During Heat-up Period Patents (Class 432/12)
  • Patent number: 10662105
    Abstract: A device for heating objects and a method that has recourse to the device, particularly for heating and/or bending one or more glass panes positioned one on top of the other, covering each other. The device includes a furnace line, plural supports, particularly transport molds that transport and/or bend the objects, the objects being placed on the supports positioned on transport carriages, a drive device that progresses the transport carriages through the furnace line and plural heating elements provided above the objects in the furnace line. In the device the heating elements are positioned on the whole above the entire furnace line and the heating elements can be operated and regulated so as to form heating zones suited to dimensions of the objects.
    Type: Grant
    Filed: May 21, 2007
    Date of Patent: May 26, 2020
    Assignee: SAINT-GOBAIN GLASS FRANCE
    Inventors: Michael Balduin, Benno Dunkmann, Michael Labrot, Karl-Josef Ollfisch
  • Patent number: 10641553
    Abstract: The controller receives information including a plurality of evaluation indexes, a weight of each evaluation index, the number of times for calculating a value of an evaluation function, and initial parameter values, and performs a simulation based on the received information. Then, the controller calculates a value of an evaluation function based on a result of the simulation, and determines whether the calculated value of the evaluation function is minimum, to update parameters when it is determined that the value of the evaluation function is minimum. In the calculation of a value of the evaluation function, a value of the evaluation function is calculated again based on the number of times for calculating a value of an evaluation function. The controller generates new parameters by a genetic algorithm when a value of an evaluation function is calculated again.
    Type: Grant
    Filed: June 3, 2016
    Date of Patent: May 5, 2020
    Assignee: Tokyo Electron Limited
    Inventors: Yuto Noda, Tatsuya Yamaguchi, Masayoshi Masunaga, Koji Yoshii
  • Patent number: 8900384
    Abstract: In a method for heat treating a metal tube or pipe for a nuclear power plant, the tube or pipe being accommodated in a batch-type vacuum heat treatment furnace, when the tube or pipe is laid down on and is subjected to heat treatment on a plurality of metal cross beams arranged along a longitudinal direction of the tube or pipe, it is possible to suppress scratches to be formed on the outer surface of the tube or pipe and attributable to heat treatment, and to reduce the discoloration on the outer surface of the tube or pipe by holding the tube or pipe and the metal cross beams in indirect contact with each other by virtue of a heat resistant fabric having a thickness of 0.1 to 1.2 mm interposed in between.
    Type: Grant
    Filed: July 23, 2012
    Date of Patent: December 2, 2014
    Assignee: Nippon Steel & Sumitomo Metal Corporation
    Inventors: Shoji Kinomura, Shinichi Takenaka
  • Patent number: 8874254
    Abstract: An object of the present invention is to perform temperature setting of a heating plate so that a wafer is uniformly heated in an actual heat processing time. The temperature of a wafer is measured during a heat processing period from immediately after a temperature measuring wafer is mounted on the heating plate to the time when the actual heat processing time elapses. Whether the uniformity in temperature within the wafer is allowable or not is determined from the temperature of the wafer in the heat processing period, and if the determination result is negative, a correction value for a temperature setting parameter of the heating plate is calculated using a correction value calculation model from the measurement result, and the temperature setting parameter is changed.
    Type: Grant
    Filed: July 11, 2011
    Date of Patent: October 28, 2014
    Assignee: Tokyo Electron Limited
    Inventors: Shuji Iwanaga, Nobuyuki Sata
  • Patent number: 8858740
    Abstract: In a method for heat treating a metal tube or pipe for a nuclear power plant, the tube or pipe being accommodated in a batch-type vacuum heat treatment furnace, when the tube or pipe is laid down on and is subjected to heat treatment on a plurality of metal cross beams arranged along a longitudinal direction of the tube or pipe, it is possible to suppress scratches to be formed on the outer surface of the tube or pipe and attributable to heat treatment, and to reduce the discoloration on the outer surface of the tube or pipe by holding the tube or pipe and the metal cross beams in indirect contact with each other by virtue of a heat resistant fabric having a thickness of 0.1 to 1.2 mm interposed in between.
    Type: Grant
    Filed: July 23, 2012
    Date of Patent: October 14, 2014
    Assignee: Nippon Steel & Sumitomo Metal Corporation
    Inventors: Shoji Kinomura, Shinichi Takenaka
  • Patent number: 8678815
    Abstract: In a method of heating a structure, an interior space of a furnace is heated to an interior temperature which is greater than a desired temperature to which a structure is intended to be heated. The structure is then placed into the furnace while the interior space is at least at the interior temperature at all times. When the structure has been heated to the desired temperature, it can be removed from the furnace at the desired temperature which is lower than the interior furnace temperature.
    Type: Grant
    Filed: October 26, 2010
    Date of Patent: March 25, 2014
    Assignee: Benteler Automobiltechnik GmbH
    Inventor: Georg Frost
  • Publication number: 20130130185
    Abstract: The invention relates to a method and equipment for starting up a strand sintering furnace (1). During start-up, the sintering furnace is heated in order to create suitable production temperatures in the different process zones (I-VII) having different temperatures, said zones including a drying zone (I), a heating zone (II), a sintering zone (III), an equalizing zone (IV), a first cooling zone (V), a second cooling zone (VI) and a third cooling zone (VII). During start-up, the cooling gas to be conducted to the second cooling zone (VI) is heated by means of a heating device (3) up to a temperature that is higher than the ambient temperature.
    Type: Application
    Filed: September 22, 2011
    Publication date: May 23, 2013
    Applicant: OUTOTEC OYJ
    Inventor: Tuomas Herlevi
  • Publication number: 20120264071
    Abstract: A process for pretreatment of biomass and an installation for practicing the process, the process including, as well, the subsequent biological treatment and obtaining of biofuel from the biomass. The process is based on the use of at least one scraped surface exchanger and comprises the following steps: heating the biomass to a temperature equal to or lower than 110° C. in an exchanger; further heating the heated biomass so obtained to a temperature between 150 and 175° C. in a scraped surface exchanger; thermal hydrolyzing the biomass at a temperature between 150 and 175° C.; and cooling the thermal hydrolyzed biomass for the subsequent biological treatment thereof.
    Type: Application
    Filed: April 14, 2010
    Publication date: October 18, 2012
    Inventor: Aart Berthold Kleijn
  • Patent number: 8014895
    Abstract: An object of the present invention is to perform temperature setting of a heating plate so that a wafer is uniformly heated in an actual heat processing time. The temperature of a wafer is measured during a heat processing period from immediately after a temperature measuring wafer is mounted on the heating plate to the time when the actual heat processing time elapses. Whether the uniformity in temperature within the wafer is allowable or not is determined from the temperature of the wafer in the heat processing period, and if the determination result is negative, a correction value for a temperature setting parameter of the heating plate is calculated using a correction value calculation model from the measurement result, and the temperature setting parameter is changed.
    Type: Grant
    Filed: December 7, 2005
    Date of Patent: September 6, 2011
    Assignee: Tokyo Electron Limited
    Inventors: Shuji Iwanaga, Nobuyuki Sata
  • Patent number: 7544058
    Abstract: A method for annealing a multilayer wafer by subjecting the wafer to a high temperature treatment that includes at least a temperature ramp-up between a boat-in temperature and a process of at least 800° C.; at least a processing phase in the range conduct at or above the process temperature; and a temperature ramp-down from the processing phase to a boat-out temperature. The boat-in temperature is sufficiently lower than the boat-out temperature to reduce or avoid tearing-off defects on the wafer and to reduce particle contaminants on the wafer, as well as to reduce or avoid degrading wafer Dit compared to an annealing method where the boat-in and boat-out temperatures are closer in temperature.
    Type: Grant
    Filed: July 13, 2007
    Date of Patent: June 9, 2009
    Assignee: S.O.I.Tec Silicon on Insulator Technologies
    Inventors: Christophe Maleville, Walter Schwarzenbach, Vivien Renauld
  • Patent number: 6793844
    Abstract: The increase of temperature of heat sensitive devices during heat generating conditions is prevented through the absorption of heat, by providing boric acid in an amount sufficient to effect the required heat absorption. Where the heat generating conditions are generated by a heat generator, separate and distinct from the heat sensitive device, the boric acid may be supported in a position between the heat sensitive device and the heat generator. Where the heat sensitive device is itself the heat generator, the boric acid is in contact with the heat sensitive device, either directly or indirectly.
    Type: Grant
    Filed: February 20, 2001
    Date of Patent: September 21, 2004
    Inventor: Claude Q. C. Hayes
  • Patent number: 6780345
    Abstract: The increase of temperature of heat sensitive devices during heat generating conditions is prevented through the absorption of heat, by providing a bicarbonate salt, such as lithium bicarbonate, sodium bicarbonate, potassium bicarbonate, magnesium bicarbonate, calcium bicarbonate, beryllium bicarbonate, aluminum bicarbonate, ammonium bicarbonate and mixtures thereof, in an amount sufficient to effect the required heat absorption. Where the heat generating conditions are generated by a heat generator, separate and distinct from the heat sensitive device, the bicarbonate salt may be supported in a position between the heat sensitive device and the heat generator.
    Type: Grant
    Filed: April 6, 2001
    Date of Patent: August 24, 2004
    Inventor: Claude Q. C. Hayes
  • Patent number: 6773623
    Abstract: The increase of temperature in heat sensitive devices during heat generating conditions is prevented through the absorption of heat, by providing Aldehyde in an amount sufficient to effect the required heat absorption. Where the heat generating conditions are generated by a heat generator, separate and distinct from the heat sensitive device, the Aldehyde is supported in a position between the heat sensitive device and the heat generator. Where the heat sensitive device is itself the heat generator, the Aldehyde is contacted to the heat sensitive device either directly or indirectly.
    Type: Grant
    Filed: March 27, 2001
    Date of Patent: August 10, 2004
    Inventor: Claude Q. C. Hayes
  • Publication number: 20040079917
    Abstract: The increase of temperature of heat sensitive devices during heat generating conditions is prevented through the absorption of heat, by providing boric acid in an amount sufficient to effect the required heat absorption. Where the heat generating conditions are generated by a heat generator, separate and distinct from the heat sensitive device, the boric acid may be supported in a position between the heat sensitive device and the heat generator. Where the heat sensitive device is itself the heat generator, the boric acid is in contact with the heat sensitive device, either directly or indirectly.
    Type: Application
    Filed: February 20, 2001
    Publication date: April 29, 2004
    Inventor: Claude Q.C. Hayes
  • Patent number: 6673260
    Abstract: The increase of temperature in heat sensitive devices during heat generating conditions is prevented through the absorption of heat, by providing Carbonate Salts in an amount sufficient to effect the required heat absorption. Where the heat generating conditions are generated by a heat generator, separate and distinct from the heat sensitive device, the Carbonate Salt is supported in a position between the heat sensitive device and the heat generator. Where the heat sensitive device is itself the heat generator, the Carbonate Salt is contacted to the heat sensitive device either directly or indirectly.
    Type: Grant
    Filed: March 14, 2001
    Date of Patent: January 6, 2004
    Inventor: Claude Q. C. Hayes
  • Patent number: 6662867
    Abstract: In a process to control the heating of a coating material for a roof covering, the coating material is heated using a heat exchange medium in a continuous process. The heat exchange medium is cooled in response to a slowdown or stoppage of the continuous heating process to maintain the temperature of the coating material below a predetermined level.
    Type: Grant
    Filed: October 30, 2000
    Date of Patent: December 16, 2003
    Assignee: Owens-Corning Fiberglas Technology, Inc.
    Inventors: Frank Joseph Macdonald, Ramesh K. Patel, David Paul Aschenbeck
  • Patent number: 6652270
    Abstract: An improved method is disclosed for heat curing a polymerizable impregnant composition within an impregnated porous article. The amount of the article's porosity that is filled with the impregnant composition is maximized by applying successively discrete temperature and pressure increments in a system comprising at least one porous impregnated article and a curing chamber having a heat transfer medium therein. During such curing, both temperature and pressure are controlled for an initial duration and subsequently increased by successive increments wherein each successive temperature and pressure exceeds a previous temperature and pressure, respectively, until a maximum temperature and pressure is achieved. The maximum temperature and pressure are maintained until the impregnant composition is cured, resulting in an improved product having greater structural integrity and surface quality.
    Type: Grant
    Filed: May 16, 2001
    Date of Patent: November 25, 2003
    Assignee: Henkel Loctite Corporation
    Inventor: Michael B. Hogan
  • Patent number: 6652770
    Abstract: The increase of temperature in heat sensitive devices during heat generating conditions is prevented through the absorption of heat, by providing Organic Acids in an amount sufficient to effect the required heat absorption. Where the heat generating conditions are generated by a heat generator, separate and distinct from the heat sensitive device, the Organic Acid is supported in a position between the heat sensitive device and the heat generator. Where the heat sensitive device is itself the heat generator, the Organic Acid is contacted to the heat sensitive device either directly or indirectly.
    Type: Grant
    Filed: March 27, 2001
    Date of Patent: November 25, 2003
    Inventor: Claude Q. C. Hayes
  • Publication number: 20030213932
    Abstract: The increase of temperature of heat sensitive devices during heat generating conditions is prevented through the absorption of heat, by providing a bicarbonate salt, such as lithium bicarbonate, sodium bicarbonate, potassium bicarbonate, magnesium bicarbonate, calcium bicarbonate, beryllium bicarbonate, aluminum bicarbonate, ammonium bicarbonate and mixtures thereof, in an amount sufficient to effect the required heat absorption. Where the heat generating conditions are generated by a heat generator separate and distinct from the heat sensitive device, the bicarbonate salt may be supported in a position between the heat sensitive device and the heat generator.
    Type: Application
    Filed: April 6, 2001
    Publication date: November 20, 2003
    Inventor: Claude Q.C. Hayes
  • Patent number: 6638444
    Abstract: The increase of temperature in heat sensitive devices during heat generating conditions is prevented through the absorption of heat, by providing Hydrated Salt in an amount sufficient to effect the required heat absorption. Where the heat generating conditions are generated by a heat generator, separate and distinct from the heat sensitive device, the Hydrated Salt is supported in a position between the heat sensitive device and the heat generator. Where the heat sensitive device is itself the heat generator, the Hydrated Salt is contacted to the heat sensitive device either directly or indirectly.
    Type: Grant
    Filed: March 27, 2001
    Date of Patent: October 28, 2003
    Inventor: Claude Q. C. Hayes
  • Patent number: 6558568
    Abstract: The increase of temperature in heat sensitive devices during heat generating conditions is prevented through the absorption of heat, by providing a hydroxide such as Lithium Hydroxide, Sodium Hydroxide, Potassium Hydroxide, Magnesium Hydroxide, Calcium Hydroxide, Beryllium Hydroxide, Aluminum Hydroxide, Ammonium Hydroxide and the mixtures thereof, in an amount sufficient to effect the required heat absorption. Where the heat generating conditions are generated by a heat generator, separate and distinct from the heat sensitive device, the hydroxide is supported in a position between the heat sensitive device and the heat generator. Where the heat sensitive device is itself the heat generator, the hydroxide is contacted to the heat sensitive device either directly or indirectly.
    Type: Grant
    Filed: April 26, 2000
    Date of Patent: May 6, 2003
    Inventor: Claude Q. C. Hayes
  • Publication number: 20020093001
    Abstract: The increase of temperature in heat sensitive devices during heat generating conditions is prevented through the absorption of heat, by providing Hydrated Salt in an amount sufficient to effect the required heat absorption. Where the heat generating conditions are generated by a heat generator, separate and distinct from the heat sensitive device, the Hydrated Salt is supported in a position between the heat sensitive device and the heat generator. Where the heat sensitive device is itself the heat generator, the Hydrated Salt is contacted to the heat sensitive device either directly or indirectly.
    Type: Application
    Filed: March 27, 2001
    Publication date: July 18, 2002
    Inventor: Claude Q. C. Hayes
  • Publication number: 20010023055
    Abstract: Firing process and apparatus for uniformly heat-treating a substrate having a film-forming composition thereon, wherein the substrate is subjected to a first soaking step in which the substrate is held for a predetermined time in a first heating chamber whose temperature is maintained at a first value, so that the temperature within the substrate is held at the first value evenly throughout an entire mass of the substrate, and after feeding of the substrate into a second heating chamber whose temperature is maintained at a predetermined second value which is different from the first value by a predetermined difference, the substrate is subjected to a second soaking step in which the substrate is held for a second predetermined time in the second heating chamber, so that the temperature within the substrate is held at the second value evenly throughout the entire mass of the substrate.
    Type: Application
    Filed: May 22, 2001
    Publication date: September 20, 2001
    Applicant: Noritake Co., Ltd. and Kyushu Noritake Co., Ltd.
    Inventors: Susumu Sakamoto, Hiroshi Oshima, Hiroyuki Mori, Hironobu Ichihara, Yoji Sato
  • Patent number: 6283747
    Abstract: The invention relates to a method for heating a furnace comprising at least one burner capable of operating on an oxidant the oxygen content of which can vary; in a first period (P1) the burner is supplied with practically pure oxygen so as to provide a large amount of energy for heating, in a second period (P2) the burner is supplied with an oxidant, the oxygen content of which can vary between about 100% and 21%, in a third period (P3), the burner is supplied with an oxidant, the oxygen content of which is minimal, and which corresponds to a pilot period which requires only a small amount of heating energy. This method makes it possible to optimize the use of the furnace according to the desired thermal performance and oxidant operating costs.
    Type: Grant
    Filed: September 20, 1999
    Date of Patent: September 4, 2001
    Assignee: L'Air Liquide, Societe Anonyme pour l'Etude et l'Exploitation des Procedes Georges Claude
    Inventors: Thierry Legiret, Gérard Le Gouefflec, Thierry Borissoff, Olivier Charon
  • Patent number: 6264854
    Abstract: The increase of temperature in heat sensitive devices during heat generating conditions is prevented through the absorption of heat, by providing Boric acid in an amount sufficient to effect the required heat absorption. Where the heat generating conditions are generated by a heat generator, separate and distinct from the heat sensitive device, the Boric acid is supported in a position between the heat sensitive device and the heat generator. Where the heat sensitive device is itself the heat generator, the Boric acid is contacted to the heat sensitive device either directly or indirectly.
    Type: Grant
    Filed: April 10, 2000
    Date of Patent: July 24, 2001
    Inventor: Claude Q. C. Hayes
  • Patent number: 6261475
    Abstract: The increase of temperature in heat sensitive devices during heat generating conditions is prevented through the absorption of heat, by providing a salt of an organic acid such as lithium formate and its hydrates, beryllium formate and its hydrates, sodium formate and its hydrates, magnesium formate and its hydrates, aluminum formate and its hydrates, potassium formate and its hydrates, calcium formate and its hydrates, ammonium formate and its hydrates, lithium acetate and its hydrates, beryllium acetate and its hydrates, sodium acetate and its hydrates, magnesium acetate and its hydrates, aluminum acetate and its hydrates, potassium acetate and its hydrates, calcium acetate and its hydrates, ammonium acetate and its hydrates, lithium propionate and its hydrates, beryllium propionate and its hydrates, sodium propionate and its hydrates, magnesium propionate and its hydrates, aluminum propionate and its hydrates, potassium propionate and its hydrates, calcium propionate and its hydrates, ammonium propionate a
    Type: Grant
    Filed: April 26, 2000
    Date of Patent: July 17, 2001
    Inventor: Claude Q. C. Hayes
  • Patent number: 6241909
    Abstract: The increase of temperature in heat sensitive devices during heat generating conditions is prevented through the absorption of heat, by providing a hydrated salt such as Lithium Chloride, Magnesium Chloride, Magnesium Sulfate, Sodium Sulfate, Aluminum Oxide, Aluminum Sulfate, Aluminum Fluoride, Aluminum Nitrate, Lithium Nitrate, Sodium Borate, Beryllium Sulfate, Sodium Phosphate, Calcium Chloride, Zinc Sulfate, Aluminum Chloride, Zinc Chloride and the mixtures thereof, in an amount sufficient to effect the required heat absorption. Where the heat generating conditions are generated by a heat generator, separate and distinct from the heat sensitive device, the hydrated salt is supported in a position between the heat sensitive device and the heat generator. Where the heat sensitive device is itself the heat generator, the hydrated salt is contacted to the heat sensitive device either directly or indirectly.
    Type: Grant
    Filed: April 26, 2000
    Date of Patent: June 5, 2001
    Inventor: Claude Q. C. Hayes
  • Patent number: 6241910
    Abstract: The increase of temperature in heat sensitive devices during heat generating conditions is prevented through the absorption of heat, by providing an aldehyde such as formaldehyde (methanol), acetaldehyde (ethanal), propionaldehyde (propanal), n-butyraldehyde (butanal), benzaldehyde, p-Nitrobenzaldehyde, p-tolualdehyde, salicylaldehyde (ortho-hydroxybenzaldehyde), phenylacetalaldehyde (phenylethanal), alpha-methylvaleraldehyde (2-methylpentanal), beta-methyvaleraldehyde (3-methylpentanal), isocaproaldehyde (4-methylpentanal), paraformaldehyde, trioxane, dioxane, paraldehydeand the mixtures thereof, in an amount sufficient to effect the required heat absorption. Where the heat generating conditions are generated by a heat generator, separate and distinct from the heat sensitive device, the aldehyde is supported in a position between the heat sensitive device and the heat generator.
    Type: Grant
    Filed: April 26, 2000
    Date of Patent: June 5, 2001
    Inventor: Claude Q. C. Hayes
  • Patent number: 6238591
    Abstract: The increase of temperature in heat sensitive devices during heat generating conditions is prevented through the absorption of heat, by providing an organic acid such as formic acid, acetic acid, propanoic acid, butyric acid and the mixtures thereof, in an amount sufficient to effect the required heat absorption. Where the heat generating conditions are generated by a heat generator, separate and distinct from the heat sensitive device, the organic acid is supported in a position between the heat sensitive device and the heat generator. Where the heat sensitive device is itself the heat generator, the organic acid is contacted to the heat sensitive device either directly or indirectly.
    Type: Grant
    Filed: April 26, 2000
    Date of Patent: May 29, 2001
    Inventor: Claude Q. C. Hayes
  • Patent number: 6235216
    Abstract: The increase of temperature in heat sensitive devices during heat generating conditions is prevented through the absorption of heat, by providing a bicarbonate salt, such as Lithium Bicarbonate, Sodium Bicarbonate, Potassium Bicarbonate, Magnesium Bicarbonate, Calcium Bicarbonate, Beryllium Bicarbonate, Aluminum Bicarbonate, Ammonium Bicarbonate and the mixtures thereof, in an amount sufficient to effect the required best absorption. Where the heat generating conditions are generated by a heat generator, separate and distinct from the heat sensitive device, the bicarbonate salt is supported in a position between the heat sensitive device and the heat generator. Where the heat sensitive device is itself the heat generator, the bicarbonate salt is contacted to the heat sensitive device either directly or indirectly.
    Type: Grant
    Filed: April 26, 2000
    Date of Patent: May 22, 2001
    Inventor: Claude Q. C. Hayes
  • Patent number: 6224784
    Abstract: The increase of temperature in heat sensitive devices during heat generating conditions is prevented through the absorption of heat, by providing a carbonate salt, such as Lithium Carbonate and its hydrates, Sodium Carbonate and its hydrates, Potassium Carbonate and its hydrates, Magnesium Carbonate and its hydrates, Calcium Carbonate and its hydrates, Beryllium Carbonate and its hydrates, Aluminum Carbonate and its hydrates, and the mixtures thereof, in an amount sufficient to effect the required heat absorption. Where the heat generating conditions are generated by a heat generator, separate and distinct from the heat sensitive device, the carbonate salt is supported in a position between the heat sensitive device and the heat generator. Where the heat sensitive device is itself the heat generator, the carbonate salt is contacted to the heat sensitive device either directly or indirectly.
    Type: Grant
    Filed: April 26, 2000
    Date of Patent: May 1, 2001
    Inventor: Claude Q. C. Hayes
  • Patent number: 6183246
    Abstract: The products (1) pass from a charging end (2) to a discharging end (3); at the discharging end side, the furnace exhibits a heating zone (4) equipped with air/fuel burners (41), possibly doped with oxygen, and, on the charging end side, exhibits a flue-gas recuperation or drainage zone (5) in which the flue gases are removed. At least one fuel body in the gaseous state is incorporated into the flue gases, and oxygen is introduced upstream of that possibly doped air/fuel burner (41) which is situated furthest upstream when referring to the direction of travel of the products (1), so as to burn the gaseous fuel body and thus raise the temperature in the recuperation zone (5). Possible use for heating steel-making products prior to rolling.
    Type: Grant
    Filed: November 4, 1999
    Date of Patent: February 6, 2001
    Assignee: L'Air Liquide, Societe Anonyme pour l'Etude et l'Exploitation des Procedes Georges Claude
    Inventor: Gérard Le Gouefflec
  • Patent number: 5828039
    Abstract: A method and apparatus for heating a chemical used in microelectronic device fabrication processes. The apparatus includes a chemical supply and chemical bath for containing a chemical. A temperature sensor senses the temperature of the chemical contained in the chemical bath. A first heater, powered by a first electric power source, heats the chemical while it is being supplied to the chemical bath. A second heater, powered by a second electric power source, heats the chemical contained in the chemical bath. First and second power controllers regulate the first electric power and the second electric power sources, respectively, through a plurality of electrodes having different intensity levels that are selected according to the temperature of the chemical sensed by the temperature sensor.
    Type: Grant
    Filed: December 30, 1996
    Date of Patent: October 27, 1998
    Assignee: Samsung Electronics Co., Ltd.
    Inventor: Hee-Sun Chae
  • Patent number: 5775889
    Abstract: A heat treatment apparatus comprising a reaction vessel located in a vertical furnace, and a ladder boat for mounting a plurality of semiconductor wafers one above another in parallel with each other. A vertical mounting pitch of mounting the wafers on the ladder boat is set at, e.g., 40 mm. When a treatment temperature is 1000.degree. C., intra-surface temperature differences of the wafers, objects to be treated, can be suppressed to 10.degree. C. at the time of passing 900.degree. C. even when 600.degree. C. is raised to 100.degree. C. at a 100.degree. C./min rate, whereby no slip occurs in large-diameter semiconductor wafers of an above 250 mm diameter even with high temperature increases at high rates in heat treatments, as of oxidation, diffusion, etc.
    Type: Grant
    Filed: October 27, 1995
    Date of Patent: July 7, 1998
    Assignee: Tokyo Electron Limited
    Inventors: Junichi Kobayashi, Eiichiro Takanabe, Harunori Ushikawa, Tomohisa Shimazu
  • Patent number: 5688116
    Abstract: A number of semiconductor wafers are held in a ladder boat at, e.g., a 3/16 inch arrangement pitch of wafers W, and the ladder boat is loaded into a vertical heat treatment furnace. Then an interior of the heat treatment furnace is heated up to 900.degree. C. at a high temperature raising rate of, e.g., 30.degree. C./minute. Subsequently the interior is heated in steps at low temperature raising rates, e.g., at below 14.degree. C./minute up to a temperature region of, e.g., 980.degree. C. and at below 5.degree. C./minute up to a heating temperature of 1100.degree. C. These temperature raising rates are determined, based on results given by observation of presence and absence of slips in the wafers W heat-treated in various temperature raising patterns for different wafer arrangement pitches, so that the wafers can be heat-treated effectively without occurrence of slips. Widening said arrangement pitch to 3/8 inches allows higher temperature raising rates to be set.
    Type: Grant
    Filed: May 15, 1995
    Date of Patent: November 18, 1997
    Assignees: Tokyo Electron Limited, Tokyo Electron Tohoku Limited
    Inventors: Junichi Kobayashi, Eiichiro Takanabe
  • Patent number: 5046946
    Abstract: A process for firing ceramic shaped bodies is disclosed, which comprises the step of making a heating temperature in a temperature range up to a decomposing temperature of a shaping aid contained in the ceramic shaped body smaller than that in a temperature range from the decomposing temperature to a firing temperature. A tunnel kiln is also disclosed, which comprises a preheating zone, a firing zone, a waste heat zone, combustion burners provided at the firing zone, an exhaust means provided at an inlet side of the preheating zone for evacuating combustion gases from the combustion burners outside the kiln, and another exhaust means provided at an outlet side of the preheating zone for evacuating the combustion gases outside the kiln.
    Type: Grant
    Filed: July 23, 1990
    Date of Patent: September 10, 1991
    Assignee: NGK Insulators, Ltd.
    Inventors: Keiji Yasuda, Koji Ogura, Kazuhiro Miyahara
  • Patent number: 5006061
    Abstract: A method for bringing a plurality of steel slabs to rolling temperature uses a furnace having a controllable energy supply. To accommodate variation of slab temperature at entry, especially mixing of cold and hot slabs, at least one virtual slab corresponding to a group of the steel slabs is determined, and the energy supply is adjusted in dependence on the desired mean temperature at exit from the furnace of the virtual slab. Suitably the furnace has at least two zones each with an individually controllable energy supply, and virtual slabs are determined for the slabs in each zone. Then the energy supply in each zone is adjusted in dependence on the desired mean temperature at exit from the furnace of the virtual slab of that zone and preceding zones.
    Type: Grant
    Filed: February 5, 1990
    Date of Patent: April 9, 1991
    Assignee: Hoogovens Groep B.V.
    Inventors: Rudy Westdorp, Frans P. Muysken
  • Patent number: 4966547
    Abstract: The invention relates to the control of a tunnel furnace partitioned into a plurality of zones for heat treatment of, e.g., ceramic or glass workpieces. As usual the temperatures of the respective zones are controllable individually. Furthermore, in each of selected zones the temperature of that zone is varied from a first level to a second level during the stay of each workpiece in that zone and returned to the first level in a predetermined time after letting the workpiece out of that zone, and the length of stay of each workpiece in that zone is controlled such that another workpiece can be introduced into that zone while the preceding workpiece stays in the next zone and such that a number of workpieces can be heat treated in succession under the same time-temperature conditions.
    Type: Grant
    Filed: March 31, 1989
    Date of Patent: October 30, 1990
    Assignee: Central Glass Company, Limited
    Inventors: Takashi Okuyama, Yutaka Yamauchi
  • Patent number: 4773850
    Abstract: A manufacturing method and apparatus is provided for making building and other types of brick. The apparatus requires a minimum of excess (or surge) production, utilizes automated equipment which is highly dependable and which is easily operated and controlled. The apparatus comprises an automated low profile dryer and kiln in conjunction with an automated brick handling system including specially designed lighweight kiln cars.
    Type: Grant
    Filed: August 14, 1987
    Date of Patent: September 27, 1988
    Assignee: Swindell Dressler International Corporation
    Inventors: James D. Bushman, Marion A. Rogallo
  • Patent number: 4678432
    Abstract: A heat treatment method in which a heating furnace is preliminarily heated before carrying an object to be heat-treated in the furnace and an unit heating process is repeated at least twice according to an output program for controlling an output of a heating light source which is stored in a memory so that the heat treatment is uniformly applied to every object to be heat treated.
    Type: Grant
    Filed: September 5, 1985
    Date of Patent: July 7, 1987
    Assignee: Dainippon Screen Mfg. Co., Ltd.
    Inventor: Hideyuki Teraoka
  • Patent number: 4674976
    Abstract: A sheet of a cross-linkable and foamable polyolefin resin is thermally treated on an endless conveyor belt formed of a plain weave wire net. A plurality of parallel, spaced apart rolls are disposed in a direction perpendicular to the direction in which the conveyor belt runs for supporting engagement and rolling contact with the conveyor belt to maintain the flatness of the conveyor belt. The belt is supported to prevent lateral and vertical displacement.
    Type: Grant
    Filed: January 10, 1986
    Date of Patent: June 23, 1987
    Assignee: Japan Styrene Paper Corporation
    Inventors: Junsuke Naohara, Toshiki Horie, Toru Kino
  • Patent number: 4560346
    Abstract: The method relates to the hardening of form substances made of building materials and containing binding agents in a pressure chamber of an autoclave to which is conveyed a gaseous heating medium, the temperature of which is increased during a heating-up phase up to a given upper limit value. During a holding phase, the temperature is maintained at least until a given equalization temperature is reached on the inside of the form substances. Subsequently, during a cooling-down phase, the temperature is reduced by reducing the pressure to the expulsion temperature. Porous light building materials in a conventional process would absorb a high amount of water through the condensation of water resulting from steam having been conveyed into the autoclave for the purpose of hardening.
    Type: Grant
    Filed: July 20, 1984
    Date of Patent: December 24, 1985
    Assignee: Sicowa Verfahrenstechnik fuer Baustoffe GmbH & Co. KG
    Inventor: Eckhard Schulz
  • Patent number: 4549866
    Abstract: A heating device including a flame burner (40) and a nozzle (52) into which the flame (50) from the burner (40) is directed and in which process air is mixed with products of combustion from the flame; the nozzle (52) having hot gas discharge openings (106) through which the hot gases resulting from the mixing action are projected onto articles (10) or other material to be heated.
    Type: Grant
    Filed: May 8, 1984
    Date of Patent: October 29, 1985
    Assignee: Flynn Burner Corporation
    Inventor: Clive W. Granville
  • Patent number: 4547150
    Abstract: A combustion controller (C) controls the relative rates at which a combustion component source (B) supplies fuel, air, and oxygen to nozzles (A). A fuel source (30) supplies fuel to the burners at a rate (50 in FIG. 2) which is appropriate to produce a desired amount of heat. A blower (32) supplies air at a fixed rate (52b) and an oxygen source supplies oxygen gas at a rate (54) in proportion to the fuel supply rate such that stoichiometrically balanced combustion is maintained. To decrease the combustion rate, the air supply rate remains constant (52b) as the fuel and oxygen rich gas supply rates are decreased. After the oxygen rich gas supply rate reaches zero, the combustion rate is further reduced by decreasing the fuel supply rate and the air supply rate (52a) in stoichiometric proportion. In this manner, a relatively high nozzle velocity is maintained over a wide range of combustion rates.
    Type: Grant
    Filed: May 10, 1984
    Date of Patent: October 15, 1985
    Assignee: Midland-Ross Corporation
    Inventor: Frank J. Vereecke
  • Patent number: 4518351
    Abstract: A furnace and method producing a precisely controlled temperature gradient within a central bore by a plurality of heating elements sandwiched between respective insulating layers with each heating element loosely thermally coupled to a thermally conductive ring extending concentrically outward from the furnace bore. Thermal sensors at each layer provide data to data processing equipment which controls and moves temperature gradients within the furnace by program.
    Type: Grant
    Filed: September 22, 1983
    Date of Patent: May 21, 1985
    Inventor: Robert H. Mellen, Sr.
  • Patent number: 4425930
    Abstract: Apparatus and a method for controlling the flow of a fluid to a fluid-actuated system. The system is controlled by a sensor which senses a variable characteristic of the system, such as the air temperature. The apparatus includes a pair of solenoid valves, one valve being set to deliver a first volume of fluid per unit time and the other valve being set to deliver a second volume of fluid per unit time. The solenoid coil of one of the valves responds to the actuation and de-actuation of the sensor. The second valve has a solenoid coil controlled by a pair of switches. One of the switches is responsive to a first timing signal and the second switch is responsive to a second timing signal. One of the switches allows the second valve to be open for a first time interval during which the first valve is open; thereafter, the second valve is closed.
    Type: Grant
    Filed: May 8, 1981
    Date of Patent: January 17, 1984
    Inventor: Donald Kruto
  • Patent number: 4384848
    Abstract: A process for firing ceramic bodies, in particular tiles, is disclosed, consisting in conveying the ceramic bodies through an elongated heat treatment chamber, both main faces thereof being freely exposed to heat transmission, simultaneously heating said bodies and the chamber walls by means of a heating fluid, generally combustion gases, the temperature of the portions of the chamber walls which are in view of the ceramic bodies not being higher than that of the heating fluid and controlling the flow of the heating fluid so that its actual volume flow rate, measured axially of the chamber and at the point thereof where the chamber temperature is 900.degree. C., is comprised between 4500 and 12,000, and preferably between 6000 and 10,000 cu.m. per sq.m. of transverse cross-section. Preferably the surface rate of travel of the tiles, when tiles are fired, is comprised between 22 and 30 sq.m. of tile per hour and per linear meter of inner perimeter of the chamber, for 4.5 mm.
    Type: Grant
    Filed: July 14, 1981
    Date of Patent: May 24, 1983
    Assignee: Marazzi Ceramiche S.p.A.
    Inventor: Filippo Marazzi
  • Patent number: 4367037
    Abstract: A temperature controller for photographic heat fixing unit which may be used in an electrophotographic copying apparatus includes a main temperature for detecting the temperature of a heater or heaters in the fixing unit and an auxiliary temperature sensor for detecting the temperature of a marginal member spaced from the heater or of a record sheet. The temperature level of the fixing unit is controlled in accordance with outputs from the both temperature sensors.
    Type: Grant
    Filed: April 1, 1981
    Date of Patent: January 4, 1983
    Assignee: Olympus Optical Company Ltd.
    Inventor: Masaji Nishikawa
  • Patent number: 4281984
    Abstract: Slabs can be uniformly heated by the use of a side-burner type heating furnace having flame length-variable type burners in the side walls, each burner consisting of an inner air flow nozzle, a fuel gas nozzle and an outer air flow nozzle arranged concentrically, and by adjusting the ratio of the flow rate of air passing through the inner air flow nozzle to the flow rate of air passing through the outer air flow nozzle depending upon the variation of the flow rate of fuel gas.
    Type: Grant
    Filed: July 18, 1979
    Date of Patent: August 4, 1981
    Assignee: Kawasaki Steel Corporation
    Inventors: Zenjiro Kobayashi, Masaki Aihara, Kuniaki Sato
  • Patent number: RE36921
    Abstract: A manufacturing method and apparatus is provided for making building and other types of brick. The apparatus requires a minimum of excess (or surge) production, utilizes automated equipment which is highly dependable and which is easily operated and controlled. The apparatus comprises an automated low profile dryer and kiln in conjunction with an automated brick handling system including specially designed lighweight kiln cars.
    Type: Grant
    Filed: September 5, 1997
    Date of Patent: October 17, 2000
    Assignee: Swindell Dressler International Corporation
    Inventors: James D. Bushman, Marion A. Rogallo