Abstract: In a capacitively coupled etch reactor, in which the smaller electrode is etched, the larger electrode is electrically supplied by a very high frequency supply signal and by a high frequency supply signal. The smaller electrode, acting as a substrate carrier, is connected to ground potential.

Abstract: Described herein is a technique capable of improving the uniformity of device characteristics. According to the technique described herein, there is provided a method of processing a substrate, including: (a) loading a substrate having a patterned hard mask into a process chamber; (b) supplying a metal-containing gas at a first pressure into the process chamber; and (c) supplying an inert gas into the process chamber and storing the metal-containing gas at a second pressure lower than the first pressure after performing (b).

Abstract: The invention relates to the field of what are called multiple-chamber ring furnaces, for the baking of carbon blocks, and more particularly to a shutter (13) with inflatable seal (15), for sealing off a port (8) of a hollow partition (7) in a multiple-chamber ring furnace, characterized in that its shutter comprises: a rigid core (14) of a substantially rectangular elongated shape, intended to be placed opposite a port (8) of a hollow partition (7) in said furnace, so as to shut off most of the flow area for gas entering via said port (8); and at least one inflatable air chamber (15), retracted in the deflated state in a housing of the core (14) and forming, in the inflated state, a peripheral seal (16) projecting around the perimeter of the core (15) such that said seal (16) extends around its entire periphery in order to complete the sealing off of said port (8).

Abstract: The invention relates to a roller hearth furnace (1) for heating and/or temperature equilibration of continuous cast products (2), comprising a first series of rollers (13) running in the longitudinal direction (12) and a second parallel series of rollers (15) on the outlet side (14), wherein a buffer zone (16) with lifting elements (17) for the perpendicular transport of the continuous cast product (2) is arranged between the series of rollers (13, 15). Furthermore, alternative arrangements for a further process route (28) are provided.

Abstract: The invention provides a heat treatment apparatus, in which an intake valve (91a) is mounted on an ambient gas feed pipe (91) connected to a heating chamber (12), an exhaust valve (131a) is mounted on an exhaust pipe (131), and a pressure sensor (150) is provided on the heating chamber (12). Through the control of a control unit (80) connected to the pressure sensor (150), to the intake valve (91a) and to the exhaust valve (131a), the intake valve (91a) and the exhaust valve (131a) are opened or closed, thus supplying ambient gas into the heating chamber (12) or exhausting ambient gas from the cooling chamber (13) depending on an internal pressure of the heating chamber (12). Thus, the amount of ambient gas used in heat treating workpieces (1) is minimized and thus operational costs are reduced. It is possible to prevent accidents such as gas explosions as well as to reduce environmental contamination caused by the combustion of ambient gas.

Abstract: The invention relates to a process and an apparatus for calcining solids or sludges in a multiple-deck furnace having a firing region, which has at least one upper heated hearth and at least one lower heated hearth, and having a cooling region, which is provided with one or more unheated hearths, material to be calcined passing first into the firing region and then into the cooling region. A portion of the material to be calcined is delivered to the at least one lower heated hearth and/or to the cooling region, bypassing the at least one upper heated hearth of the firing region.

Abstract: A continuous production vacuum sintering apparatus has a conveyer unit and a plurality of vacuum sintering systems individually transferred by the conveyer unit. Each of the vacuum sintering systems includes a sintering furnace, a vacuum control unit communicating with the sintering furnace via an exhaustion valve, a temperature control unit electrically connecting the sintering furnace, and a partition disposed in the sintering furnace and adjacent to the exhaustion valve. The vacuum sintering systems correspond to respective sintering steps, each of which continues from a previous one with a predetermined period. The vacuum sintering systems are separate from one another. The respective pressure and temperature conditions provided by the corresponding vacuum sintering systems do not interfere with one another.

Abstract: An apparatus for sequential processing of a workpiece comprises an assembly line processing system. The apparatus comprises multiple workpieces moving in an assembly line fashion under multiple process stations. The multiple process stations provide different processes onto the workpieces for a sequential processing of the workpieces. The sequential processing action is carried out by the movement of the workpieces under the various process stations.

Abstract: This invention provides method and apparatus for performing chemical and biochemical reactions in solution using in situ generated photo-products as reagent or co-reagent. Specifically, the method and apparatus of the present invention have applications in parallel synthesis of molecular sequence arrays on solid surfaces.

Abstract: A load lock chamber includes a chamber body having an aperture to allow a substrate to be transferred into or out of the chamber. The load lock chamber is configurable in several configurations, including a base configuration for providing a transition between two different pressures, a heating configuration for heating the substrate and providing a transition between two different pressures, and a cooling configuration for cooling the substrate and providing a transition between two different pressures. Various features of the chamber configurations help increase the throughput of the system by enabling rapid heating and cooling of substrates and simultaneous evacuation and venting of the chamber, and help compensate for thermal losses near the substrate edges, thereby providing a more uniform temperature across the substrate.

Abstract: A device for removing carbon deposits on solid objects, includes an inlet (102) for the objects to be treated, a zone (101a) for heating the objects having a feed (104) and an outlet for the heating gas, a zone (101b) for treating the objects by oxidation and/or gasification having a feed (105) and an outlet (108) for the gasification fluid, an outlet (118) for the treated objects. The heating zone (101a ) and the treating zone (101b) are situated in a single enclosure (100) and comprise a substantially flat-bottomed vibrating element (101) intended for transport of the objects, the bottom allowing support of the objects, diffusion of the fluid through the objects and transmission of the vibrations. A zone (101c) for cooling solids, placed in the enclosure (100) downstream from the treating zone (101b) in relation to the direction of displacement of the solids in the enclosure (100), and a heater (115) external to enclosure (100) is provided.

Abstract: An apparatus for drying moist or wet carbon particles in a series of tubular drying sections by electrical resistance heating where the current is introduced into the column of carbon particles through a graphite block positioned at the center of the top of the column and suspended above the top of the column by attachment to a steel plate that includes a flat or a V-shaped shelf and that is provided with openings to allow the moisture to escape in the form of steam, and wherein the section consisting of graphite block, carbon column, and steel plate may provide entry of the carbon into a second or into a sequential plurality of similar sections provided with similar graphite blocks similarly positioned.

Abstract: A device for transferring a food piece from an upper conveyor to a lower conveyor in an oven includes a slide having a first curved sheet with a continuous transfer surface for guiding a food piece between upper and lower conveyors while reversing the direction of and inverting the food piece. The slide includes a second curved sheet which together with the first curved sheet forms a unitary structure with an insulating layer between the first and second curved sheets. The slide is supported by track followers on a pair of parallel tracks. Also supported on the tracks is a heat shield separating the slide from outside the oven, the heat shield being connected to the slide by the track followers. The slide and heat shield are simultaneously displaceable along the tracks between a transfer position wherein the slide is intermediate to the upper and lower belts for transferring articles between the belts, and a position wherein access is provided to the slide from outside the oven.

Abstract: An oven and method for cooking food products. The oven comprises an elongated housing having an inlet for food products to be cooked in the oven and an outlet for emitting cooked food product from the oven, together with means for heating a gaseous cooking medium in the housing for cooking the food products therein, and a plurality of vertically tiered endless conveyors for passing the food product back and forth through the housing during the cooking process, whereby an oven taking less floor space for a predetermined flow path extent of cooking various food products, is provided.

Abstract: Structure for an incinerator hearth is disclosed where the drop hole area of the hearth can be constructed entirely of standard shape, and thus readily available, fire brick rather than the special shapes previously necessary.

Abstract: The oven includes a baking compartment and a lower compartment located beneath the baking compartment for receiving baked articles therefrom; a horizontal shelf separates the baking compartment from the lower compartment and is formed of a series of pivotable plates; means are provided for pivoting the plates at predetermined time to cause the baked articles in the baking compartment to fall under the action of gravity in the lower compartment.

Abstract: A heat transfer apparatus for controlling the temperature of a formed workpiece is provided. The apparatus is in the form of a multi-tier rotary preheat, quench and heat recovery tunnel which provides for transfer of heat between tiers from workpieces to be cooled to workpieces to be heated, thereby conserving heat energy. Transfer of heat is accomplished by means of fans interconnected with the tier levels of the tunnel. A control system ensures proper temperature of air, passing through a hot-air fan, which is removed from a second level and transferred to a first level. Means are provided for loading slugs to be preheated prior to forming onto a first annular tray on the first level and for removing same after it has completed a single rotation about the cooling tunnel. After being further heated in an induction furnace, the slug is warm formed in a press to a desired configuration.