Abstract: A furnace, for instance a reflow soldering oven, in which oxygen concentration is either directly or inferentially sensed within central processing and either one or both of the inlet and outlet sections of the furnace. Signals generated by these sensors are processed in a PID controller to generate a control signal to control the flow rate of inerting gas into the central processing section, thereby to at least inhibit ingress of air into the central processing section. The PID controller is programmed such that its integral error term is set equal to a time average of the oxygen concentrations of the central processing section less an oxygen concentration set point desired for the central processing section. The proportional and differential error terms are set equal to a time average of the concentrations of the central processing section and one or both of the inlet and outlet sections of the furnace less the oxygen concentration set point.

Abstract: A vertical diffusion furnace and a cap therefor are provided to minimize diffusion non-uniformity in a diffusion furnace caused by the positioning of a reaction gas outlet. In the vertical diffusion furnace, a reaction gas outlet is formed in the lower portion of a cap and adapted to extend downward through a flange. Thus, is provided a means to maintain diffusion uniformity in the diffusion furnace to comply with the necessity of processing large diameter wafers needed for highly integrated semiconductor devices. Thereby, a decrease in the rate of productivity for operating such equipment due to its positioning of a reaction gas outlet is prevented.

Abstract: A furnace having a molten material holding tank with sidewall and a tuckstone or other structure above the sidewall upper end leaving a gap, or joint, therebetween. A deflector, or diverter, is provided at the upper end of the sidewall to deflect cooling air directed on the tank sidewall away from the joint and to create a pressure differential between the interior and exterior of the tank thereby reducing air infiltration into the tank through the joint.

Abstract: A vacuum heat treating furnace includes a pressure vessel having a wall that defines a chamber wherein metal parts are vacuum heat treated. A fan is disposed inside the chamber for circulating a cooling gas therein. An electric motor is mounted externally to the pressure vessel for driving the fan. A drive shaft interconnects the fan and the electric motor through an opening in the wall of the pressure vessel. The vacuum furnace incorporates a dual seal for providing a vacuum-tight seal and a gas-tight seal where the drive shafts passes through the pressure vessel wall. The dual seal includes an inflatable seal surrounding the drive shaft for providing a vacuum-tight seal around said drive shaft when the furnace chamber is evacuated to a subatmospheric pressure.

Abstract: The present invention relates to a heat treatment machine for laboratory use which has a cooling chamber incorporated with a heating chamber of a furnace, both chambers are formed with a vacuum tube of simple construction, in which heating and cooling of a test piece are performed in vacuum atmosphere. The cooling process can be effected following the heating process with maintaining the same vacuum atmosphere, whereby a rapid cooling of the test piece is allowed and physical characteristics of the treated metal can be improved.

Abstract: An improved convector plate is provided for a batch coil annealing furnace. The plate includes a top annular plate, an identical bottom annular plate and an annular diverter plate in between. A plurality of slotted openings are provided in the top and bottom plates which extend radially outwardly from a first imaginary circle spaced from the inner peripheral edge of the top and bottom plates to an imaginary second circle spaced inwardly from the top and bottom plate's outer peripheral edge. The annular diverter plate is radially centered within the slotted openings. When the convector plate is placed between the edges of two coils, furnace atmosphere flows into the convector plate in the space between the top and bottom plates and is directed by the diverter plate into the slotted openings which are now covered by the coil edges thus establishing improved convective heat transfer rates with the coil edges resulting in shorter annealing process times.

Abstract: An improved apparatus is provided for adjusting a gas injector of a furnace in connection with oxidation, diffusion and heat treating in semiconductor processing. The apparatus includes a reaction tube for serving as a reaction chamber and heat sink. The gas injector is coupled to the reaction tube on one end and includes openings on the other end for passing source gas. An elongated open tube is secured to the gas injector and has its axis superimposed approximately on the axis of the gas injector.

Abstract: A substrate heat treatment apparatus includes a heat treatment furnace of a flat configuration, and having a cavity in which a substrate is accommodated. The heat treatment furnace includes a gas supply unit at one side end face, an opening for communication between the cavity and the outside world, and a gas discharge unit in the vicinity of the opening for discharging gas from the cavity at the other side end face. The heat treatment furnace further includes a cover for shutting the opening allowing opening/closing thereof. In the gas exhaust unit, an exhaust chamber is formed on the other side end face along the opening with a partition wall between the opening and the exhaust chamber. An exhaust portion is formed in communication with the outside world in the exhaust chamber.

Abstract: Materials containing vaporizable substances are exposed successively in at least two treatment chambers (10, 13, 14), which can be closed off with respect to each other, to a series of decreasing pressures and increasing temperatures. The vaporizable substances are exhausted separately from each treatment chamber (10, 13, 14) and at least partially condensed and collected. The solid materials are discharged from the last treatment chamber (14). The treatment chambers (10, 13, 14) can be closed off against each other, against the atmosphere, and against any other units which may be connected to them downline (17, 18) by vacuum valves (11, 12, 115, 16) and are connected to vacuum lines (10a, 13a, 14a) in which condensers (10b, 13b, 14b) and vacuum pumps (10c, 13c, 14c) are installed.

Abstract: A substrate thermal conditioning apparatus with a chamber, a plate located in the chamber and a gas supply. The plate has a top heat transfer surface with grooves therealong. A substrate is placed on standoffs of the heat transfer surface and gas is pumped into the chamber. The plate is either heated or cooled to change the temperature of the substrate. Heat is transferred between the substrate and the plate primarily by gas conduction heating. Because of the grooves in the plate, the gas can be very quickly and uniformly distributed and evacuated between the substrate and the heat transfer surface.

Abstract: While the interior of a reaction vessel is being deaerated by a first vacuum pump, an inert gas is supplied from an upstream side (reaction gas bottle side) of a flow rate control unit (MFC) to a reaction gas supply pipe. Thus, a reaction gas is substituted with the inert gas. A passageway downstream of the MFC is closed and the interior of the pipe is deaerated from the upstream side through a bypass pipe so that a predetermined degree of vacuum is obtained. Thus, the gas substituting efficiency can be improved. The interior of the reaction vessel and the interior of the reaction gas supply pipe are quickly deaerated without an influence of resistance of the MFC. The inert gas substitution process and the deaerating process are repeated for 10 cycles or more.

Abstract: The temperature of articles in an "environmental" chamber is stabilized by evacuation of the "environmental" chamber, after having stabilized the temperature of such an article to approximate that of a controlled-temperature member spaced from the article by a small gap, to a pressure just sufficient to provide viscous gas behavior, adjusting the temperature of the article to closely match that of the member by gas conduction heat transfer across the gap, and evacuating the chamber to high vacuum.

Abstract: An apparatus for vitrifying a soot preform from which an optical fiber is produced by drawing, is composed of a main vacuum chamber 20 in which a muffle tube 70 for vitrifying the soot preform PF is located, and an auxiliary vacuum chamber 30 mounted on the main vacuum chamber 20 and communicated therewith through a passage, and a gate valve 60 for opening and closing the passage. The muffle tube 70 has a inner surface covered with silicon carbide layer 70a.

Abstract: A heating device used for a gas phase growing mechanism or a heat treatment mechanism comprising a tubular reactor made of a heat resistant and chemically inert material incorporating a support having a plurality of works set and arranged thereon to be put to gas phase growing or heat treatment, a cylindrical main heating furnace body disposed so as to surround the outer circumferential surface of the tubular reactor 1 at the entire length thereof, and a pair of auxiliary heating furnace bodies each closing both longitudinal opening ends of the cylindrical main heating body, whereby the cylindrical main heating furnace body and the pair of auxiliary heating furnace bodies constitute a heating furnace for confining the tubular reactor therein.

Abstract: It is an object of the present invention to provide a vertical heat treatment apparatus having a heat insulator, which has sufficient heat insulation, heat retention and high load pressure bearing properties to cope with increased size dimensions and number of layers of wafer workpieces and can be particularly advantageously used as a semiconductor and TFT substrate heat treatment apparatus. The apparatus features the use of a heat insulator casing 40 supporting a substrate holder 3 on its top and receiving a heat insulator 50 having numerous inner microspaces in its lower space, and defining a substrate holder or boat insulator receiving space A and a heat insulator receiving space B such that these spaces are hermetically sealed with respect to each other by the heat insulator casing.

Abstract: The temperature of articles in an "environmental" chamber is stabilized by evacuation of the "environmental" chamber, after having stabilized the temperature of such an article to approximate that of a controlled-temperature member spaced from the article by a small gap, to a pressure just sufficient to provide viscous gas behavior, adjusting the temperature of the article to closely match that of the member by gas conduction heat transfer across the gap, and evacuating the chamber to high vacuum.

Abstract: A method of sintering ceramic formed bodies, in which a container for sintering is disposed in a sintering space of a sintering furnace, and atmospheric gas is introduced from an atmospheric gas inlet port provided on a bottom surface of the container for sintering into a large number of ceramic formed bodies piled up in the container for sintering, thereby to sinter the large number of ceramic formed bodies piled upon each other while introducing the atmospheric gas into spaces between the ceramic formed bodies.

Abstract: A ventilated conveyor oven is provided. The oven uses a makeup air fan to admit air to the plenum extending across the front of the unit and across the top of the unit. Exhaust channels are provided on the sides spaced above and below the conveyor oven entrance and exit and extending across the top to an exhaust fan outlet. The exhaust channels on the top are superimposed over the air makeup plenum. Vertical exhaust plenums are provided at each of three corners, with the fourth corner mounting a control panel and an air makeup external channel thereover.

Abstract: An improved seal arrangement is disclosed for use in batch coil annealing furnaces. The furnace has extending from its base a pair of cylindrical upright supports having exposed membrane engaging seal edges and between which an underpressure chamber is formed. The inner cover which removably rests on the base, has an annular top plate extending radially outwardly from its sidewall adjacent the cover's bottom end. Extending vertically downwardly from the top plate are concentric inner and outer clamp mechanisms which clamp flat annular elastomer seal therebetween. An overpressure chamber is formed between the seal and the top plate and when the inner cover is seated on the base, an underpressure chamber is formed between the seal and the upright supports.

Abstract: A holder means for the partial thermal treatment in an oven, especially a cuum chamber oven that provides compressed gas quenching, of tools or workpieces, especially drill bits, that have a working portion and a portion that is to be clamped. The workpieces, which are guided by a base plate that is provided with holes, rest upright upon a bottom plate. The base plate is provided with a radiation shield on that side that faces the oven chamber. The upper surface of the radiation shield has a high emission factor for thermal radiation, and the radiation shield is disposed directly on the base plate.

Abstract: A method and apparatus for providing an economical vacuum furnace for heat treating of heat treatable articles including: A vacuum furnace heat treating chamber having reduced thickness at its ends in order to arrest heat transfer at seals at the ends of the chamber; and Heating apparatus exterior of the heat treating chamber for heating the interior of the chamber.

Abstract: The invention discloses a simply designed oven which uses forced air convection as a heating mechanism. One or more drums can be installed in the oven over a catch basin of sufficient volume to include the contents of at least one drum. A gear or similar pump is provided to agitate the contents, as well as to perform the pump-out feature. An inert gas blanketing system is provided for each drum so that additional inert gas is supplied to replace the contents being pumped out of the drum while excess vapors created from the warming process, which could ignite if placed adjacent an ignition source, can be piped to a safe place remote from the oven interior.

Abstract: An oxidation/diffusion processing apparatus includes a processing vessel, arranged such that a longitudinal direction is vertical, for storing a plurality of target objects to be processed, a heater arranged around the processing vessel, for heating the interior of the processing vessel, a process gas supply mechanism for supplying a process gas from the lower portion of the processing vessel into the processing vessel, and an exhaust mechanism for exhausting a processed exhaust gas from the upper portion of the processing vessel. The process gas is supplied to the target objects heated to a predetermined temperature by the heater to perform oxidation/diffusion processing to the target objects.

Abstract: Modifications are provided to a standard, batch type industrial heat treat furnace of a hot wall design which permit the furnace to be operated efficiently at high temperatures. The furnace is of a cylindrical design having a forward heat treat chamber and a rearward plenum chamber with a flat bulkhead plate in-between the chambers. The bulkhead has exit and inlet openings permitting wind mass to flow to the heat treat chamber and back to the plenum chamber. The bulkhead has a plurality of radially extending slits formed therein which permit the bulkhead to remain flat despite temperature and pressure gradients resulting in expansion/contraction of the bulkhead. Additionally, the furnace includes a closed end muffle within the heat treat chamber into which work to be heat treated is placed. A water cooled spring biasing support is provided for the closed end of the muffle to resist downward deformation of the muffle at high temperatures.

Abstract: The present invention describes a method and apparatus in which solid gelatin chunks are liquefied, tempered, and debubbled in a single operation. The debubbling step is accomplished by evacuating and sealing off the loaded solid reservoir and heat exchanger before initiating the liquefying step. After the vacuum is applied, the gelled chunks are pressed into the heat exchanger, where heat is applied to the gelled chunks of photographic material. This liquefies the gelled chunks of photographic material. When the liquefied product gives a positive pressure at the heat exchanger outlet, the liquefied product is allowed to flow from the heat exchanger. Liquefying and tempering are performed as the solid chunks are pushed through the heat exchanger by the reservoir piston.

Abstract: A high temperature vacuum furnace has a circulating path external to the heating chamber for facilitating inert gas circulation during initial convection heating of a high temperature vacuum furnace. The heating chamber of the furnace and a surrounding cooling gas introduction chamber are within a metallic convection shroud in such a way that the space in between defines a heating gas circulation chamber for circulating heated inert gas during low temperature heating for accelerating the heating-up of the hot zone to its normal operating temperatures. Once the hot zone has reached a selected temperature, the inert gas is pumped out and the furnace then operates in a vacuum. Quenching is achieved by introducing cooling gas into the heating chamber via nozzles through the heating chamber walls.

Abstract: A method and apparatus for providing an economical vacuum furnace for heat treating of heat treatable articles including heat transfer arresting means at two ends of a vacuum furnace heat treating chamber such that the construction of said chamber is simplified and said heat transfer arresting means comprise reduced area portions of sealing and exhaust means for said vacuum chamber by reason of which seals are economically protected from deterioration by the heat normally associated with vacuum furnaces, and wherein the heating of the interior of the vacuum furnace is outside the heat treating chamber.

Abstract: A method for economically separating chemical contaminants such as volatile and semivolatile organic chemicals and polychlorinated biphenyls (PCBs), even if the contaminants are present at low concentrations, from inert materials such as soils or sludges is disclosed. The process comprises subjecting inert materials contaminated with chemical compounds to vacuum at a temperature effective to volatilize the contaminants but below incineration temperature, while continuously removing the evolved vapors, for a period of time sufficient to effect the desired degree of separation of contaminants. The evolved vapors may be collected and condensed for off-site disposal.

Abstract: The subject invention encompasses a thermal processing furnace having an elongated cylindrical processing chamber surrounding a tower assembly capable of receiving one or more articles to be processed. A pedestal assembly supports the tower assembly and contains a quartz door thereon which is axially translatable relative to the processing chamber into an inserted position where the tower assembly is inserted into the processing chamber. A quartz flange located along the perimeter of an opening at the end of the processing chamber contacts the quartz door forming a quartz seal therewith when the pedestal assembly is moved into the inserted position. A scavenger cavity is located at the end of the chamber having the opening therein and is in fluid flow relationship with the contact area between the quartz flange and the quartz door forming a quartz seal. Gas from within the processing chamber which may leak through the quartz seal is captured by the scavenger cavity and evacuated by an evacuation means.

Abstract: A standard atmosphere furnace constructed of a steel casing formed as a cylinder with fibrous insulation attached is operated as a vacuum furnace. A plurality of radiant, fuel-fired ceramic heat tubes positioned in a centered but circumferentially spaced arrangement provides heat input to the furnace to permit it to operate at high, vacuum associated temperatures. The ceramic tubes are vacuum sealed to the furnace case by an elastomer seal/water jacket arrangement which uses an outboard clamp arrangement to establish a ceramic-to-metal contact to permit thermal cooling and prevent tube-flange movement so that the integrity of the elastomer seal can be maintained. In addition, an articulated joint connector is provided so that the tube can be supported in a pivotable manner permitting thermal movement while reducing tube stress to prolonged tube life.

Abstract: A heat processing apparatus comprises a heating furnace, a process tube located in the heating furnace and having an open bottom, a manifold connected to the open bottom of the process tube, a sealing member sandwiched between the process tube and the manifold to air-tightly seal the process tube, a fixing member for fixing the process tube to the manifold, a heat transmitting member made of metal and sandwiched between the fixing member and the process tube to radiate heat at that area of the process tube, which is opposed to the fixing member, to the fixing member by heat conduction, and a heat exchange conduit arranged in the fixing member and having a passage through which heat exchanging medium flows to cool the fixing member by heat exchange.

Abstract: A heat treatment apparatus for vacuum and high pressure operation includes a container within a vessel separated by thermal insulation. The vessel has a door for access to the container. Both the container and thermal insulation have separate doors mounted on a common frame pivotally mounted inwardly of the vessel door. The container door can be opened and closed from otuside the vessel when the thermal insulation and vessel doors are closed. Normally the container door is kept open in case of failure of the closing mechanism or in the event of a power failure.

Abstract: A process for the decontamination of a solid product polluted by a contaminant which can be vaporized by heating under vacuum, and devices for carrying out such a process, wherein the product is introduced into a heating and evacuating enclosure (3, 37, 72), said product is heated, substantially in bulk, within a given temperature range, a vacuum being created in said enclosure which is sufficient to reduce the pressure of the enclosure below the vaporization threshold of the contaminant within said temperature range, said temperature and reduced pressure conditions in the enclosure are maintained for a sufficient time to vaporize substantially all the contaminant contained in said product, the vaporized contaminant is extracted by sucking the atmosphere out of the enclosure, and said contaminant which has been sucked out is condensed.

Abstract: The invention relates to a device for cooling of the furnace chamber (4) in a hot isostatic press by means of devices (7, 8) for circulation of a coolant in the furnace chamber (4), the coolant having a temperature which is lower, but not considerably lower, than the temperature of the articles.

Abstract: A hot-isostatic press adapted for rapid cooling of the hot zone after completed pressing and sintering of the material includes a pressure vessel, end closures, and a hot zone surrounded by thermal barriers. Between the thermal barriers and the pressure vessel with end closures there are colder spaces. At least one connection, located in the lower part of the thermal barrier and provided with a valve between the space next to the pressure vessel and the space below the bottom thermal barrier, is provided with an externally controllable valve. In the upper part of the thermal barrier there is an opening with a relatively large cross section and a valve is provided for the opening, which comprises a heat-insulated portion.

Abstract: Volatile compounds such as polychlorinated biphenyls (PCB's) which contaminate a soil can be removed--without incineration--by a process which generally involves: (1) introducing the contaminated soil into a vessel, (2) heating the soil to a temperature greater than about 300.degree. F., but less than 600.degree. F., preferably in the presence of an inert gas, (3) drawing a vacuum on the vessel to such a degree as to cause the contaminant to flash to a contaminant vapor and (4) condensing the contaminate vapor to a liquid and (5) disposing of said liquid.

Abstract: An oven for the partial heat treatment of tools, for example, twist drills, omprises a first section, which contains the heating chamber that is constantly at the desired operating temperature. A second section for the loading and unloading and the quenching is provided. Between the two sections there is arranged a transport device for the charges of tools. The oven may be in the form of a one-chamber or three-chamber vacuum oven. The oven provides a high heat transfer rate, because the heating chamber is constantly at the desired operating temperature and the heat transfer by heat radiation under vacuum is started immediately when the charge is at its final position inside the heating chamber.

Abstract: Two concentric and relatively displaceable cylinders mounted on the center axis of a vacuum furnace between its load chamber and its blower serve to control the gas flows in said furnace, where said gas flows are used to heat and cool the load portions.

Abstract: An atmosphere furnace including a plurality of divided furnace units, work transfer devices connecting the adjacent divided furnace units and those for the divided furnace units at both ends of the furnace. Each transfer device includes a tubular connecting frame and a work transfer member housed therein and the work transfer member has a work housing space in it. The work transfer member is rotatable, receives at a first position the work from outside or from an adjacent divided furnace unit into its work housing space, and send it out of the furnace or pass it to the adjacent divided furnace unit at a second position. When the work transfer member is at a middle position between the first and the second positions, the work housing space thereof faces an inner surface of the connecting frame so as to be sealed against the both end openings of the frame.

Abstract: A gas seal for a bell-type annealing furnace is described. A ring supported by the furnace cover and a resilient pad supported by the base mate to form a gas seal when the cover is rested on the base. A cover-supported cooling jacket and a base-supported cooling jacket cooperate to enclose the seal when the cover is rested on the base. Load bearing structure is provided independent of the seal elements to avoid subjecting the seal elements to the weight of the furnace cover.

Abstract: Semiconductor wafers within a supporting vertical wafer tower are positioned within a vertical process chamber through a lower gate valve fixed to a supporting framework. The gate valve is sealed to a similar gate valve at the upper end of a movable load lock on the framework, within which the wafers are subjected to pre-treatment and post-treatment processes. Two load locks are alternately used in conjunction with the process chamber and a wafer loading station on the framework. In addition, a cleaning element is movably mounted on the framework for periodically maintaining the interior surfaces of the process tube within the process chamber.

Abstract: The present invention provides a covering for a hydraulic ram of a freeze dryer. The freeze dryer of the present invention includes a pressure vessel having a sterile freeze drying chamber for receiving a stack of containers holding a sterile material to be freeze dried. A pressure plate located within the freeze drying chamber is adapted to be driven against the stack of containers for mechanically stoppering the containers. A hydraulic ram is connected to the pressure vessel and has an actuating arm projecting into the freeze drying chamber. The actuating arm is connected to the pressure plate and is extendible for driving the pressure plate against the containers and retractable for removal of the containers from the pressure vessel. The actuating arm has a non-sterile surface that could contaminate the freeze drying chamber and therefore, the sterile material could be freeze dried.

Abstract: An apparatus for heating a sample within a vacuum chamber according to the present invention includes a preliminary exhaust chamber connected with a vacuum chamber of an analyzer and the like through a gate valve. A sample stage is disposed within the vacuum chamber, and a sample holder is detachably disposed on this stage. The preliminary exhaust chamber is provided with a transfer device for transferring the sample holder between the preliminary exhaust chamber and the vacuum chamber to mount the sample holder on the stage and detach the sample holder from the stage. The sample holder is provided with a heater and a temperature-measuring element mounted thereon, the heater and temperature-measuring element being connected with the respective connectors mounted on the sample holder. A fixed connector is connected with the connectors when the sample holder is mounted on the stage by means of the transfer device.

Abstract: A method for circulating a gas in an autoclave which comprises a pressure container (A) having a wind tunnel (7) in which moldable materials (1) are placed and the gas is circulated by a blow fan (33), the pressure container (A) being sealably closed by a door, the layers of each of the materials (1) are compressed, heated, adhered together, and set in the pressure container (A) producing swirling of the gas coming out of an outer duct formed between the inner face Aa of the pressure container (A) and the wind tunnel (7) by guide blades (H), diverting the gas at the inner face (2a) of the door (2), and directing the diverted gas to flow through the inside (7b) of the wind tunnel (7) with the swirl. The apparatus for circulating gas has guide blades (H) for swirling the gas going out of the outer duct (7a) provided in the outer duct, whereby the gas is diverted at the inner face (2a) of the door (2), and is directed to flow through the inside (7b) of the wind tunnel (7) with the swirl.

Abstract: A method and apparatus for vacuum purging bell type furnaces is provided. A vacuum shell unit is provided which is removably emplacible over the inner cover of the furnce and has a vacuum tight seal to the base. A vacuum is pulled both within the inner cover and within the vacuum shell to remove the ambient gas. Nitrogen is then introduced into the inner cover and within the vacuum shell. The vacuum shell is then removed and purging continues within the inner cover either with nitrogen or other desired atmosphere gas, and finally furnace is emplaced over the inner cover to heat treat the work in a conventional manner.

Abstract: Reversing the flow of conventional furnace/retort systems prevents damaging exhaust gases from entering the furnace while still maintaining a gas flow through the retort. The gases exit the retort into a treatment system; preventing contamination of any apparatus and the escape of any hazardous gases.

Abstract: A low cost, improved convective heat transfer furnace is disclosed which includes a cylindrical casing to which is attached blanket insulation and the casing is closed at its ends to define a closed end cylindrical furnace enclosure. An annular fan face plate is positioned within the enclosure to define a pressure zone on one side and a work zone on the other side. A paddle wheel fan in the work zone develops a large mass of circumferentially swirling wind which is initially formed as a stationary swirling mass without an axial force component but which under pressure travels axially in the form of a swirling annulus through the non-orificing annular space. The under pressure zone established by the central opening in the fan face plate causes the swirling wind annulus in the work zone to expand radially inwardly and uniformly impinge the complete surface of the work in an effective heat transfer manner before being recirculated back to the pressure zone.

Abstract: A heat-treating apparatus comprises a heat-treating furnace which include a process tube arranged so as to set its longitudinal direction vertically and having inlet and exhaust ports for a reaction gas, a heater arranged around the process tube, a capping member for capping an opening for allowing an heat-treating object to be loaded therethrough, which is formed in the lower end of the process tube, a case for covering a portion between the process tube and the capping member, and an exhaust nozzle, coupled to the the exhaust port formed in the process tube, for introducing the exhaust waste gas to the outside of the heat-treating apparatus. An exhaust nozzle is arranged in the case so as to introduce the waste gas leaking from between the process tube and the capping member to the outside of the heat-treating apparatus, thereby preventing the leaked gas from being diffused around the heat-treating apparatus.

Abstract: An apparatus for heat treating and quickly cooling substrates. The apparatus includes a cylindrical furnace core tube for containing substrates, a heater enclosing the furnace core tube, and outer cylinder enclosing and containing the furnace core tube and the heater, a blower for drafting cooling air to the space between the furnace core tube and the outer cylinder along the longitudinal direction of the furnace core tube, and a switching valve connected between the blower and both ends of the outer cylinder for switching the direction in which the cooling air travels. Since the direction of the cooling air is changed, the entire furnace core tube is uniformly cooled.

Abstract: A heat treatment furnace for treating metal workpieces has a substantially cylindrical housing. The housing surounds a heating chamber having cooling gas inlets and outlets connected to a cooling gas circulation system for circulating the gas. A plurality of nozzles forming the gas inlets are mounted on the housing on two diametrically opposite sides thereof. The two sets of nozzles simultaneously direct cooling gases towards an impact zone within the heating chamber such that cooling gases meet in the impact zone. The workpieces are also supported in the impact zone of the heating chamber. A plurality of vents forming the gas outlets are placed around the periphery of the impact zone and conduct the cooling gas out of the heating chamber and into a heat exchanger.