Abstract: The present invention relates to a scanner having a flexible probe which is an apparatus capable of being utilized for an inspection on a weld zone of a general ferrite material and a stainless material and allowing an inspection to be performed on a fitting weld zone where it is difficult for a general phased array ultrasonic testing (PAUT) probe to approach.

Abstract: A thermal processing furnace, comprising: a generally bell jar-shaped outer reaction tube having a central axis; and an open-ended inner reaction tube for accommodating a wafer boat holding a plurality of substrates, which inner reaction tube is substantially coaxially disposed within the outer reaction tube, thereby defining a gas passage between an outer wall of the inner reaction tube and an inner wall of the outer reaction tube, wherein at least one of the outer wall of the inner reaction tube and the inner wall of the outer reaction tube is provided with a flow deflector that protrudes radially from the respective wall into the gas passage.

Abstract: Method for heating a fluid, in particular a fluid which is not electrical conductive, where a rotor body (10) which is arranged in a chamber for absorption of the fluid, is rotated with a generally vertical shaft (11). A voltage is applied to a rod shaped electrode (16) which is arranged centrally in a rotor chamber (12) and to an electrode at the bottom (13) of the rotor chamber, for creation of a flame arc, so that a flow of the fluid passing the flame arc is created. The length (L) of the flame arc is held generally stable, preferably constant by controlling the position of the rod shaped electrode (16). The fluid is made enter the rotor chamber (12) so that it is kept outside the flame arc, and that the fluid is provided to flow through the rotor chamber (12).

Abstract: To provide a substrate supporting/transferring tray, which can be placed on a substrate supporting part arranged in a treatment chamber in which the heat treatment is performed to a substrate, especially on a substrate supporting part having a built-in heating means for heating the substrate, and on an upper side of which, the substrate is placed. At the time of heat-treating the substrate, the substrate can be more uniformly heated, and when the heat treatment is completed, the tray can be easily removed from the substrate supporting part without waiting for the temperature of the substrate to be reduced, and can transfer the substrate to other parts from the treatment chamber in which the heat treatment is performed.

Abstract: A thermal treatment furnace is described in which gas leakage does not occur during thermal treatment at a high temperature. A thermal treatment furnace having a reaction tube is provided with an opening at one end and a flange surrounding the opening and covered by a cap abutting on the reaction tube at the flange to cover the opening. The flange is provided with a feature which introduces an inert gas to provide back pressure into the joint portion between the flange and the cap, thus preventing reaction gas from leaking to the outside of the furnace through the gap between the flange and the cap. The flange may be further modified to discharge gas under back pressure from between the joint surfaces of the flange and the cap to prevent the inert gas from affecting the reaction in the tube.