Lined, Layered Or Coated Patents (Class 432/264)
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Patent number: 11899033Abstract: The analyzer of the present invention is specifically adapted to provide moisture determinations for foods and other agricultural material. It allows the operator to introduce a precise weight of sample into a crucible in a closed furnace in a controlled environment through an access port in the furnace cover. The access port in the cover can be tapered to allow easy access to an underlying aligned crucible and allow an operator to add and remove sample material from the crucible until a precise desired sample weight is reached as measured by a balance within the furnace. The access port is enclosed by an insulated cover after the samples are sequentially placed in the crucibles.Type: GrantFiled: November 30, 2017Date of Patent: February 13, 2024Assignee: Leco CorporationInventor: Larry S. O'Brien
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Patent number: 9822442Abstract: A method of containing molten aluminum using non-wetting materials comprising depositing MgAl2O4, or one selected from an oxide, Al2O3, nitride, AlN, BN, carbide, and SiC, onto a crucible. An apparatus for containment of molten aluminum using non-wetting materials comprising a layer of MgAl2O4, or one selected from an oxide, Al2O3, nitride, AlN, BN, carbide, and SiC, deposited onto a crucible.Type: GrantFiled: November 24, 2015Date of Patent: November 21, 2017Assignee: The United States of America, as represented by the Secretary of the NavyInventors: Jason D. Myers, Jesse A. Frantz, Guillermo R. Villalobos, Jasbinder S. Sanghera, Bryan Sadowski, Robel Y. Bekele
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Patent number: 9410237Abstract: A thin film deposition apparatus includes a vacuum chamber, a substrate supporter disposed in the vacuum chamber to support a target substrate on which a thin film is deposited, and a deposition source that evaporates a deposition material and supplies the evaporated deposition material to the target substrate. The deposition source includes a crucible that includes a deposition material-containing portion to accommodate the deposition material and a first flange at an upper end of the deposition material-containing portion, a spray nozzle that includes a spray portion through which the evaporated deposition material is sprayed and a second flange at a lower end of the spray portion to make contact with the first flange, and a cooling member attached to an outer surface of the first flange and the second flange.Type: GrantFiled: September 5, 2013Date of Patent: August 9, 2016Assignee: SAMSUNG DISPLAY CO., LTD.Inventors: HeungYeol Na, Jae hong Ahn, Wonsik Hyun
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Patent number: 9227242Abstract: A method of containing molten aluminum using non-wetting materials comprising depositing MgAl2O4, or one selected from an oxide, Al2O3, nitride, AlN, BN, carbide, and SiC, onto a crucible. An apparatus for containment of molten aluminum using non-wetting materials comprising a layer of MgAl2O4, or one selected from an oxide, Al2O3, nitride, AlN, BN, carbide, and SiC, deposited onto a crucible.Type: GrantFiled: November 8, 2013Date of Patent: January 5, 2016Assignee: The United States of America as represented by the Secretary of the NavyInventors: Jason D. Myers, Jesse A. Frantz, Guillermo R. Villalobos, Jasbinder S. Sanghera, Bryan Sadowski, Robel Y. Bekele
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Publication number: 20140227527Abstract: PVD and HPHT methods and apparatus for producing materials, for example nitrides, are disclosed.Type: ApplicationFiled: September 27, 2012Publication date: August 14, 2014Applicant: Nitride Solutions Inc.Inventors: Daniel Brors, Richard Ernest De-Maray, David Slutz
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Patent number: 8696351Abstract: A heat-collecting kiln device includes a housing assembly including a single housing or a plurality of housings having a same height or different heights, with the housings stackable one upon another. A top lid is mounted on a top of the housing assembly to seal the housing assembly and includes an observation hole. A base is mounted to a bottom of the housing assembly to seal the housing assembly. A cover is mounted to the top lid to seal the observation hole. The cover is removable to reveal the observation hole. The heat-collecting kiln device further includes a net and at least one leg. Each housing is comprised of four modular elements each having a mortise engaged with a tenon of another modular element. One of the modular elements includes a temperature detection hole.Type: GrantFiled: October 24, 2011Date of Patent: April 15, 2014Inventors: Kang-Ming Huang, Tsung-Wei Huang
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Patent number: 8664135Abstract: An article including a monolithic crucible body comprising silicon oxynitride (SixNyO, wherein x>0 and y>0), wherein the silicon oxynitride extends throughout the entire volume of the monolithic crucible body.Type: GrantFiled: December 28, 2011Date of Patent: March 4, 2014Assignee: Saint-Gobain Ceramics & Plastics, Inc.Inventors: Edmund A. Cortellini, Christopher J. Reilly, Vimal K. Pujari
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Patent number: 8323559Abstract: A crucible includes a composite of least two materials. The two materials are selected from a group consisting of alumina, calcia, yttria, erbia, gadolinia, magnesia, hafnia, and zirconia in a composition that has better resistance to reaction with hafnium from a molten hafnium-containing alloy than a nominal crucible composition of 70 wt % magnesia and 30 wt % alumina.Type: GrantFiled: November 5, 2010Date of Patent: December 4, 2012Assignee: United Technologies CorporationInventors: Mario P. Bochiechio, John Joseph Marcin, Alan D. Cetel, Dilip M. Shah, Kevin W. Schlichting
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Patent number: 8105078Abstract: A heat treatment jig for semiconductor silicon substrates is configured such that a cristobalitized oxide film is formed in a region where the cristobalitized oxide film is in contact with a silicon substrate backside. When said heat treatment jig is used, generation of a slip can be prevented during heat treatment. In the case where the heat treatment jig is used in combination with a shielding plate, particles are further prevented from adhering to the silicon substrate surface to maintain quality characteristics of the semiconductor silicon substrate at a higher level, and device production yield can largely be improved. The heat treatment jig can easily be manufactured by introducing a cristobalitization promoting agent to a surface or in the vicinity of a surface of the heat treatment jig, performing the heat treatment at temperatures in the range of 1000 to 1380° C., and repeating the introduction of the cristobalitization promoting agent and the heat treatment.Type: GrantFiled: February 6, 2007Date of Patent: January 31, 2012Assignee: Sumco CorporationInventor: Naoshi Adachi
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Publication number: 20110281227Abstract: In a known melting crucible for use in a crucible drawing method, it is provided that the interior face of the crucible wall facing a crucible interior space is covered at least partially with a protective layer made of a noble metal. The known melting crucible does have good corrosion resistance with respect to the quartz glass melt, but the material costs are high because of the expensive coating metals. In order to provide a melting crucible for use in a crucible drawing method for quartz glass that exhibits good corrosion resistance at low material costs, it is proposed that the protective layer (2) be composed of a gas-tight, oxidic material that is not subject to a phase transition in the temperature range of 20° C. to 1800° C., and that the crucible interior space (17) have a gas space (17) above the quartz glass mass (27) to be held, and that the protective layer (2) be provided exclusively on the surface of the melting crucible interior face adjacent to the gas space (17).Type: ApplicationFiled: December 9, 2009Publication date: November 17, 2011Applicant: Heraeus Quarzglas GmbH & Co. KGInventors: Bernhard Franz, Nigel Whippey, Joerg Becker, Helmut Leber
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Patent number: 8048365Abstract: Crucibles for melting titanium alloys having a facecoat including at least one facecoat layer containing an oxide selected from scandium oxide, yttrium oxide, hafnium oxide, a lanthanide series oxide, and combinations thereof, and a backing including at least one backing layer where the crucible has a backing to facecoat thickness ratio of from about 6.5:1 to about 20:1.Type: GrantFiled: September 28, 2007Date of Patent: November 1, 2011Assignee: General Electric CompanyInventors: Bernard Patrick Bewlay, Brian Michael Ellis, Michael Francis Xavier Gigliotti, Thomas Joseph Kelly, Mohamed Rahmane, Stephen Francis Rutkowski, Michael James Weimer, Joseph Carl Wukusick
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Patent number: 8007712Abstract: Reinforced crucibles for melting titanium alloys having a facecoat including at least one facecoat layer, a backing including at least one backing layer, and at least one reinforcing element applied to at least a portion of one or more of the facecoat layer, the backing layer, or a combination thereof where the reinforcing element includes at least one composition selected from ceramic compositions, metallic compositions, and combinations thereof.Type: GrantFiled: September 28, 2007Date of Patent: August 30, 2011Assignee: General Electric CompanyInventors: Bernard Patrick Bewlay, Michael Francis Xavier Gigliotti, Thomas Joseph Kelly, Mohamed Rahmane, Stephen Rutkowski, Michael James Weimer, Sairam Sundaram
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Patent number: 7790101Abstract: Articles for use with highly reactive alloys that include a graphite crucible having an interior, and at least a first protective layer applied to the interior of the graphite crucible in which the graphite crucible having the first protective layer is used for melting highly reactive alloys.Type: GrantFiled: December 27, 2006Date of Patent: September 7, 2010Assignee: General Electric CompanyInventors: Thomas Joseph Kelly, Michael James Weimer, Bernard Patrick Bewlay, Michael Francis Xavier Gigliotti, Jr.
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Patent number: 7761969Abstract: Methods for making refractory crucibles capable of managing thermal stresses and suitable for melting highly reactive alloys, the method involving providing a crucible having at least a facecoat and a backing, heating at least one retaining ring, applying the at least one retaining ring about at least a portion of the backing of the crucible; and allowing the at least one retaining ring to cool and shrink-fit about the crucible.Type: GrantFiled: November 30, 2007Date of Patent: July 27, 2010Assignee: General Electric CompanyInventors: Bernard Patrick Bewlay, Michael Francis Xavier Gigliotti, Mohamed Rahmane, Thomas Joseph Kelly, Michael James Weimer, Sairam Sundaram
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Patent number: 7686887Abstract: An object of the invention is to provide a quartz glass crucible reduced in the generation of vibration occurring on the surface of a silicon melt and free from the generation of rough surface and cristobalite spots, yet capable of pulling up single crystal silicon stably and at high yield even in long-term operations; it is also an object to provide a method for producing the same. In a quartz glass crucible for pulling up single crystal silicon comprising a crucible base body having a bottom part and a straight shell part with an inner layer provided to the inner surface thereof, the quartz glass crucible is characterized by that said inner layer comprises a synthetic quartz glass layer from the lowest end to at least a height of 0.25 H; a naturally occurring quartz glass layer or a mixed layer of naturally occurring quartz glass and synthetic quartz glass extended in a range of from at least 0.5 H to 0.Type: GrantFiled: July 30, 2003Date of Patent: March 30, 2010Assignees: Heraeus Quarzglas GmbH & Co. KG, Shin-Etsu Quartz Products Co., Ltd.Inventors: Yasuo Ohama, Takayuki Togawa
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Patent number: 7582133Abstract: Methods for reducing carbon contamination when melting highly reactive alloys involving providing a graphite crucible having an interior, applying at least a first protective layer to the interior of the graphite crucible, placing a highly reactive alloy into the crucible having the first protective layer, and melting the highly reactive alloy to obtain a melted alloy having reduced carbon contamination.Type: GrantFiled: December 27, 2006Date of Patent: September 1, 2009Assignee: General Electric CompanyInventors: Thomas Joseph Kelly, Michael James Weimer, Bernard Patrick Bewlay, Michael Francis Xavier Gigliotti, Jr.
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Patent number: 7204955Abstract: A casting ladle has a body (2) with a base (3) and walls (4, 6, 8) made of a laminated composite ceramic material that includes multiple layers of a woven fiber reinforcing fabric embedded in a ceramic matrix. A rigid support element (20) for attaching the ladle to a handling device is embedded within the composite ceramic material. In a preferred form, the reinforcing fabric is made of woven glass and the matrix material includes calcium silicate and silica.Type: GrantFiled: September 17, 2004Date of Patent: April 17, 2007Assignee: Pyrotek Engineering Materials LimitedInventor: Mark Vincent
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Patent number: 7195479Abstract: A fixture (30) adapted to permit the heated exchange of a liner (14) from an operating vertical furnace (10). The fixture is adapted to secure to the base of the liner (14) to both unlock and lower the heated liner, such as a silicon carbide liner, at an controlled rate. The fixture is also adapted to elevate a new liner into the operating vertical furnace at a controlled rate to control the rate of heating of the liner as it is inserted into the operating vertical furnace. The fixture includes an inner ring (34), a low-friction Teflon® ring (36), and an outer ring (38) permitting the rotation of the inner ring within the outer ring. Advantageously, the low friction ring comprises a flanged portion and a vertical portion allowing rotation of the inner ring within the outer ring even when elevated at extreme temperatures exceeding 500° C.Type: GrantFiled: January 8, 2004Date of Patent: March 27, 2007Assignee: Texas Instruments IncorporatedInventors: James Hoyt Beatty, Chris Whitesell
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Patent number: 7147910Abstract: A method of forming a pyrolytic boron nitride (PBN) article and an article having layers of PBN separated by layers of PBN having a dopant of sufficient concentration to induce peeling, the steps of introducing vapors of ammonia and a gaseous boron halide in a suitable ratio into a heated furnace reactor to cause boron nitride to be deposited in layers on a substrate, with at least one gaseous dopant injected into furnace at controlled periodic interval(s) such that at least two selected layers of boron nitride are doped with said gaseous dopant(s) at a minimum average concentration of 0.1 atomic wt % at a depth ranging from 1000 to 2000 angstroms in each selected layer, and with the selected layers spaced apart about 0.1 micron to 100 microns.Type: GrantFiled: December 29, 2003Date of Patent: December 12, 2006Assignee: General Electric CompanyInventors: Ajit Y. Sane, Jeffrey Lennartz, Arthur Moore, Thomas Devan
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Patent number: 7118789Abstract: A silica glass crucible is manufactured by introducing into a rotating crucible mold bulk silica grain to form a bulky wall including a bottom wall and a side wall. After heating the interior of the mold to begin to fuse the bulk silica grains, an inner silica grain, doped with aluminum, is introduced. The heat at least partially melts the inner silica grain, allowing it to fuse to the wall to form an inner layer. The crucible is cooled, the fused silica grains forming nuclei of crystalline silica within the inner layer.Type: GrantFiled: July 16, 2001Date of Patent: October 10, 2006Assignee: Heraeus Shin-Etsu AmericaInventors: Katsuhiko Kemmochi, Robert O. Mosier, Paul G. Spencer
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Patent number: 6841210Abstract: Disclosed is a multilayer structured quartz glass crucible, for pulling up silicon single crystal, whose structure has at least three layers comprising: a translucent outer layer made of naturally occurring quartz glass and having a large number of pores, a translucent intermediate layer, made of synthetic quartz glass and having a large number of pores, and a transparent inner layer substantially free from pores and made of a synthetic quartz glass. Thermal convection within the silicon melt is suppressed by use of the quartz glass crucible, thereby preventing oscillation on the surface of the silicon melt. A method for producing the quartz glas crucible is also disclosed.Type: GrantFiled: May 31, 2001Date of Patent: January 11, 2005Assignees: Heraeus Quarzglas GmbH & Co., KG, Shin-Etsu Quartz Products Co.Inventors: Yasuo Ohama, Hiroshi Matsui
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Patent number: 6755911Abstract: A crucible 1 made of a C/C composite material for use in single crystal pulling, the crucible 1 having a lateral cylindrical portion 11 and a bottom portion 12 integrally formed as multiple layers wound by a filament winding method, in which the first layer 2 as the innermost crucible layer, among the multiple layers, is wound such that carbon fibers form tracks passing the polar point O at the bottom 12, the second layer 3 wound on the outer surface of the first layer 2 is wound along tracks to form a first outer circular bottom 8 that extends outwardly from about a middle part of a raised portion 6 where the carbon fibers of the first layer 2 are localized to the polar point O, and the third layer 4 and the succeeding layers wound on the outer surface of the second layer 3 are wound respectively along tracks to form outer circular bottoms that extend stepwise outwardly from about the middle parts of the outer surfaces of layers situated inside the respective layers, and the top for the raised portion of theType: GrantFiled: May 2, 2002Date of Patent: June 29, 2004Assignee: Toyo Tanso Co., Ltd.Inventors: Masatoshi Yamaji, Hisanori Nishi, Yuji Tomita, Shingo Bito, Toshiyuki Miyatani
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Patent number: 6670025Abstract: A method of forming a pyrolytic boron nitride (PBN) article and an article having layers of PBN separated by layers of PBN having a dopant of sufficient concentration to induce peeling, the steps of introducing vapors of ammonia and a gaseous boron halide in a suitable ratio into a heated furnace reactor to cause boron nitride to be deposited in layers on a substrate, with at least one gaseous dopant injected into furnace at controlled periodic interval(s) such that at least two selected layers of boron nitride are doped with said gaseous dopant(s) at a minimum average concentration of 2 atomic wt % at a depth ranging from 1000 to 2000 angstroms in each selected layer, and with the selected layers spaced apart about 0.1 micron to 100 microns apart.Type: GrantFiled: May 24, 2001Date of Patent: December 30, 2003Assignee: General Electric CompanyInventors: Ajit Y. Sane, Jeffrey Lennartz, Arthur Moore, Thomas Devan
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Patent number: 6604941Abstract: Refractory ceramics and composite materials consisting of nitrides, mixed nitrides and oxides, and oxynitrides of Group IV metals Hf, Zr, Ti, and Group III metals Sc, Y, and lanthanides La through Lu, are used to form refractory articles, or as coatings for refractory articles. These materials and articles have high resistance to molten metals, molten salts, erosion, and high temperature corrosive environments, and can be engineered to have desirable thermal and electrical properties. In particular the articles are crucibles, molds, containment vessels, and spray nozzles, and most particularly these articles are made of or coated with the Hf compounds.Type: GrantFiled: June 26, 2001Date of Patent: August 12, 2003Inventor: Garth W. Billings
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Patent number: 6574991Abstract: An article of relatively pure silica, and a furnace and method of producing the article. The article is produced by collecting molten silica particles in a refractory furnace in which at least a portion of the refractory has been exposed to a halogen-containing gas to react with contaminating metal ions in the refractory.Type: GrantFiled: September 8, 2000Date of Patent: June 10, 2003Assignee: Corning IncorporatedInventors: Robert S. Pavlik, Jr., Lawrence H. Kotacska
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Publication number: 20030072973Abstract: This invention relates to a corrosion-resistant member comprising a ceramic substrate and a silicon carbide film formed through a chemical vapor deposition process and having a resistivity at room temperature of 20-500 &OHgr;·cm, and a method of manufacturing the same as well as an heating apparatus using the same.Type: ApplicationFiled: October 23, 1998Publication date: April 17, 2003Applicant: NGK INSULATORS, LTD.Inventors: MASAO NISHIOKA, NAOTAKA KATOH, SHINJI KAWASAKI
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Patent number: 6533993Abstract: A melting liner for an induction melting furnace includes an integral foot portion for locating a lip portion of the melting liner in a convenient position for pouring molten metal.Type: GrantFiled: May 31, 2001Date of Patent: March 18, 2003Assignee: Fireline, Inc.Inventor: Edward J. Ress
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Patent number: 6422861Abstract: A crucible for melting a silica for fusion of said silica into a desired shape. The crucible having a main body with inner and outer surfaces comprised of a refractory material. In addition, the inner surface adjacent at least a melting zone of the furnace includes a substantially gas-tight barrier layer comprised of a material selected from rhenium, osmium, iridium, and mixtures thereof.Type: GrantFiled: November 20, 2000Date of Patent: July 23, 2002Assignee: General Electric CompanyInventors: Stanley M. Antczak, Frederic F. Ahlgren
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Patent number: 6200385Abstract: A crucible 40 having an inner surface 42 not wetted by a melt which shrinks when it solidifies is provided with indentations 41 in the walls of the crucible to support an ingot grown in it. Supporting the crystal provides a gap between the bottom of the ingot 44 and the inner surface of the bottom of the crucible. The gap allows more uniform heat transfer from the bottom of the crucible than is provided when there is no gap; the gap provides a controllable temperature gradient between the interior and exterior of the crucible. To direct propagation of the growth of a macrocrystal, the bottom of the crucible is provided with at least one set of multiple grooves in parallel relationship with each other. Preferably a second set of multiple grooves in parallel relationship with each other intersect the grooves of the first set at an angle chosen depending upon the lattice structure of the macrocrystal to be grown. A macrocrystal grown in a crucible with twin sets of angulated grooves produces single crystals.Type: GrantFiled: March 20, 2000Date of Patent: March 13, 2001Inventor: Carl Francis Swinehart
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Patent number: 6139983Abstract: This invention relates to a corrosion-resistant member having a resistance to plasma of a halogen based corrosive gas, which comprises a main body and a corrosion-resistant layer formed on a surface of the main body and containing a fluoride of at least one element selected from the group consisting of rare earth elements and alkaline earth elements.Type: GrantFiled: June 23, 1998Date of Patent: October 31, 2000Assignee: NGK Insulators, Ltd.Inventors: Tsuneaki Ohashi, Kiyoshi Araki, Sadanori Shimura, Yuji Katsuda
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Patent number: 6136092Abstract: A crucible with 22 inches or more in inner diameter, which has a small deformation of the body under exposure to abundant heat radiation during pulling a single crystal, and which has no practical problem, and a method of producing the same are disclosed.Type: GrantFiled: August 19, 1999Date of Patent: October 24, 2000Assignee: Shin Etsu Quartz Products Co., Ltd.Inventors: Tatsuhiro Sato, Shigeo Mizuno, Mitsuo Matsumura, Hiroyuki Watanabe
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Patent number: 6120286Abstract: The invention concerns a resistance-heated vaporizer boat for vaporizing metal. According to the invention, a reduced temperature is generated in the edge region, i.e., along the longitudinal edge of the vaporizer boat, such that there is only a very slight wetting tendency along this longitudinal edge. Consequently, the melt can be localized such that it cannot overflow over the longitudinal edges of the vaporizer boat, without a cavity necessarily having to be provided in the vaporization surface of the vaporizer boat. As a result, optimum wetting and constantly targeted vaporization of the metal upwards towards the area to be vapor-deposited are attained.Type: GrantFiled: June 8, 1998Date of Patent: September 19, 2000Assignee: Sintec Keramik GmbH & Co. KGInventor: Ulrich Goetz
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Patent number: 6057030Abstract: A porous ceramic body having a ceramic framework is produced having a surface roughness of about 40 microns or less. The ceramic body has a plurality of pores where each pore is interconnected with at least one adjacent pore. The ceramic body is made from a powdered ceramic component and a pore-forming polymeric component such as polymeric beads. The ceramic component is alumina which can contain at least one other component selected from the group consisting of calcium oxide, silicon oxide, magnesium oxide, barium oxide, titanium dioxide, and zirconium dioxide. The pore-forming polymeric beads, such as polymethylmethacrylate beads, each having a particle size of 100 microns or less, are mixed with the ceramic powder. The powdered mixture is compressed under pressure and heated to form a porous ceramic body. A coating of an aqueous dispersion of a metal oxide can be applied to the surface of the ceramic body and heated to produce a smooth and durable coating.Type: GrantFiled: August 18, 1997Date of Patent: May 2, 2000Assignee: Kanebo Ltd.Inventor: Toshimasa Mano
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Patent number: 5989021Abstract: A large diameter quartz crucible with an inner diameter of 22 inches or more comprises an opaque silica glass outer layer having bubbles of 10 .mu.m to 250 .mu.m in diameter and 5 mm to 20 mm in thickness and a transparent silica glass inner layer having 0.5% or less in a bubble content and 0.3 mm or more in thickness which is molten and integrated with an inner surface of the outer layer. The outer layer has an OH group concentration of 80 ppm or less and the gas pressure in a bubble in the outer layer is lower than atmospheric pressure so that a volume expansion ratio of the bubble is minimized when being heated in condition of pulling a single crystal.Type: GrantFiled: September 15, 1998Date of Patent: November 23, 1999Assignees: Shin-Etsu Quartz Products Co., Ltd., Heraeus Quarzglas GmbHInventors: Tatsuhiro Sato, Shigeo Mizuno, Mitsuo Matsumura, Hiroyuki Watanabe
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Patent number: 5934900Abstract: Refractory ceramics and composite materials consisting of nitrides, carbides, mixed carbides and oxides, oxycarbides, mixed nitrides and oxides, and oxynitrides of Group IVB metals Hf, Zr, and Ti, Group IIA metals Be, Mg, Ca, Sr, and Ba, and Group IIIB metals Sc, Y, and lanthanides La through Lu are used to form refractory articles, or as coatings for refractory articles. These materials and articles have high resistance to molten metals, molten salts, erosion, and high temperature corrosive environments, and can be engineered to have desirable thermal and electrical properties. The refractory materials encompass nitrides, carbides, reacted ternary and quaternary oxides, mixed carbides and oxides, oxycarbides, mixed nitrides and oxides, and oxynitrides and have the general chemical formula M.sub.x1 M'.sub.x2 M".sub.x3 N.sub.y C.sub.w O.sub.z where M is Hf, Zr, or Ti, M' is Be, Mg, Ca, Sr, or Ba, M" is Sc, Y, and lanthanides La through Lu, N is nitrogen, C is carbon, O is oxygen.Type: GrantFiled: March 24, 1997Date of Patent: August 10, 1999Assignee: Integrated Thermal Sciences, Inc.Inventor: Garth W. Billings
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Patent number: 5885071Abstract: In order to reduce concentrations of impurities in an inner layer of a quartz crucible for pulling a silicon single crystal which comprises an outer layer made of quartz glass and an inner layer formed on the inner surface of the outer layer, a migration-preventing layer is formed between the outer and inner layers, wherein the migration-preventing layer prevents migration of the impurities such as alkaline metals included in the natural quartz glass in the outer layer to the synthetic quartz glass in the inner layer.Type: GrantFiled: March 6, 1997Date of Patent: March 23, 1999Inventors: Hiroyuki Watanabe, Tatsuhiro Sato
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Patent number: 5882807Abstract: A jig used for heat treatment made from an SiC-coated silicon carbide material, wherein the SiC film is coated by the CVD method on a silicon carbide matrix in which silicon has been impregnated and wherein there are no pores with a diameter of 2 .mu.m or larger in the outer layer of the matrix within 200 .mu.m from the interface of the SiC film and the silicon carbide matrix when observed by a scanning electron microscope at a magnification of 400 times. The jig is manufactured by producing an SiC film on the surface of a silicon carbide matrix in which silicon has been impregnated by introducing a raw material compound for producing the SiC film and forming the SiC film at a temperature from 1000.degree. C. to 1290.degree. C. under a pressure from 500 to 760 Torr in a non-oxidative atmosphere. The jig exhibits superior resistance to high temperature heating cycles and excellent high thermal shock resistance required for heat treatment in semiconductor manufacturing.Type: GrantFiled: December 20, 1996Date of Patent: March 16, 1999Assignees: Asahi Glass Company, Ltd, Tokai Carbon Company, Ltd.Inventors: Yoshio Funato, Koji Furukawa, Hisao Yamamoto, Nobuo Kageyama
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Patent number: 5495550Abstract: A flash evaporator vaporization vessel for flash evaporating metal under conditions of repeated thermal cycling having a graphite body, an outer layer of pyrolytic boron nitride and an intermediate layer of a material selected from the group consisting of pyrolytic graphite, boron carbide (B.sub.4 C), tantalum carbide, and silicon carbide and having a thickness of no greater than about 0,002 inches.Type: GrantFiled: September 28, 1994Date of Patent: February 27, 1996Assignee: Advanced Ceramics CorporationInventors: John T. Mariner, Douglas A. Longworth
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Patent number: 5493630Abstract: A resistance heated evaporator includes a body of graphite having a generally rectangular geometry with opposite ends each of which has four sides. A coating of pyrolytic boron nitride covers substantially the entire surface of three of the sides at each end so as to form a channel which provides structural support at each end. At least one side at each end remains open for electrical contact to a power supply.Type: GrantFiled: September 28, 1994Date of Patent: February 20, 1996Assignee: Advanced Ceramics CorporationInventors: John T. Mariner, Timothy J. Hejl
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Patent number: 5447803Abstract: A titanium nitride film forming method employing an ion-plating method to produce good decorative properties, to a titanium nitride film forming method which can maintain the stability of the color tone even under high temperatures, and to the vessel obtained through the above methods.Type: GrantFiled: December 20, 1993Date of Patent: September 5, 1995Assignee: Niigata Engineering Co., Ltd.Inventors: Hitoshi Nagaoka, Hiroshi Kanno
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Patent number: 5391229Abstract: Graphite substrate holders for employment in apparatus for chemical vapor deposition of diamond decrease the tendency of the formed diamond sheets to crack or shatter upon separation from the substrates. Said holders and the substrates therein preferably have rounded edges, to suppress crack formation at sharp corners. The holders are preferably coated, at least in part, with a tie-layer and a hydride-forming metal such as niobium. Also, certain maximum distances between the edges of the holder and substrates are preferably maintained in order to prevent contact of diamond with a heated filament employed for thermal activation.Type: GrantFiled: July 26, 1993Date of Patent: February 21, 1995Assignee: General Electric CompanyInventors: Philip G. Kosky, David E. Slutz, Friedel S. Knemeyer
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Patent number: 5314599Abstract: A barrier layer for prevention of solid fluorides penetration, e.g. NaF, from the interior of an aluminum production cell holding a fluoride-containing melt into a refractory layer intended to provide heat and electrical insulation for the cell. The barrier layer contains CaO, which may be derived from a CaO precursor such as calcite (CaCO.sub.2) by decomposition during cell start-up. Since CaO does not appear to react with sodium fluoride (NaF), and indeed according to thermodynamic calculations seems incapable of doing so at cell operating temperatures, it is effective for preventing the penetration of that compound when the latter is in the solid state. The barrier layer makes it possible to use insulating low cost refractories which are attacked by solid fluorides in the cell wall lining with improvement of the life of such materials.Type: GrantFiled: July 28, 1992Date of Patent: May 24, 1994Assignee: Alcan International LimitedInventor: Claude Allaire
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Patent number: 5158750Abstract: A boron nitride crucible having a closed end, an open end, an internal surface and an external surface, and wherein at least a portion of the external surface, preferably proximate the open end of the crucible, has a duplex coating comprising an undercoat of pyrolytic graphite and a top coat of pyrolytic boron nitride. A process for making the boron nitride crucible is also disclosed.Type: GrantFiled: August 27, 1991Date of Patent: October 27, 1992Assignee: Praxair S.T. Technology, Inc.Inventor: Robert L. Finicle
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Patent number: 5120029Abstract: A crucible furnace or molten metal transfer vessel is provided with a composite lining having an outer insulating liner and an inner cast working liner. The insulating liner has a high insulating characteristic and the working liner has a high heat-retention characteristic.Type: GrantFiled: July 7, 1989Date of Patent: June 9, 1992Inventor: Robert J. Durbin
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Patent number: 4971772Abstract: An inside lining for the reaction chamber of an electric low shaft furnace, particularly for producing high-purity silicon from silicon oxide by carbothermic reduction, is provided which has a melting crucible of dense graphite and a thermal insulation, whereby at least the floor of the reaction chamber has an inside lining of high-purity carbon. The inside lining is constructed from graphite, graphite grits or lampblack. The inside lining provides good thermal insulation and does not further contaminate the molten metal due to furnace materials. The inside lining prevents a loss of material in that seepage of molten metal into the insulation is prevented by a rapid dropoff of the temperature in the insulation below the melting point of the metal.Type: GrantFiled: February 26, 1990Date of Patent: November 20, 1990Assignee: Siemens AktiengesellschaftInventors: Hubert Aulich, Friedrich-Wilhelm Schulze, Benedikt Strake
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Patent number: 4956208Abstract: A quartz glass crucible adapted for use in a process for pulling a single crystal semiconductor material having an opaque outer substrate of a quartz glass with a relatively high bubble content and an inner transparent glass layer which is substantially free from bubbles. The crucible is produced while the substrate is supported by a rotating mould by forming an atmosphere of high temperature gas and supplying a metered quantity of powders of quartz to the high temperature gas atmosphere to have the quartz powders molten at least partly and directed toward an inner surface of the substrate to be adhered thereon.Type: GrantFiled: July 6, 1989Date of Patent: September 11, 1990Assignees: Shin-Etsu Handotai Co., Ltd., Shin-Etsu Quartz Products Co., Ltd.Inventors: Akira Uchikawa, Atsushi Iwasaki, Toshio Fukuoka, Mitsuo Matsumura, Hiroshi Matsui, Yasuhiko Sato, Masaaki Aoyama, Eiichi Shinomiya, Akira Fujinoki, Nobuyoshi Ogino
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Patent number: 4913652Abstract: A pyrolytic boron nitride crucible is provided. The crucible contains at least five wall layers consisting of first and second wall layers. The thickness of each of the first wall layers is 5 to 100 microns and the thickness of each of the second wall layers is 1/50 to 1/1 of that of the first wall layer. The total thickness of the entire wall layers is 0.5 to 3 mm. The first wall layer is bonded to and laminated alternately with the second wall layer.Type: GrantFiled: March 3, 1989Date of Patent: April 3, 1990Assignee: Denki Kagaku Kogyo Kabushiki KaishaInventors: Hiroaki Tanji, Masaharu Suzuki
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Patent number: 4911896Abstract: A composite fused quartz material is disclosed for processing semiconductor grade silicon material in an improved manner. The modified vitreous material includes a disperse phase of fine size silicon metal particles which are distributed in preselected regions of the fused quartz matrix as a means of exercising temperature control in the various semiconductor processing operations using these fused quartz parts. Such utilization of the modified vitreous material in single crystal silicon rod growth and production of semiconductor grade silicon by diffusion doping is described. A method to produce the modified vitreous material is also disclosed.Type: GrantFiled: July 24, 1986Date of Patent: March 27, 1990Assignee: General Electric CompanyInventors: Peter P. Bihuniak, Gordon E. Dogunke, Robert D. Shelley
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Patent number: 4865682Abstract: In the boat growth method of the IIIb-Vb group compound, the quartz boat is tridymitized on at least the surface thereof so as to prevent wetting of the boat due to the melt of the compound and hence to enhance the yield of a single crystal.Type: GrantFiled: February 26, 1988Date of Patent: September 12, 1989Assignees: Mitsubishi Monsanto Chemical Co., Ltd., Mitsubishi Chemical Industries, Ltd.Inventors: Takeshi Okano, Hisanori Fujita, Eiichiro Nishihara
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Patent number: 4823359Abstract: A refractory product is shown in the form of a dense sintered alumina-chromia, zirconia-alumina-silica, zirconia-alumina body, or zirconia-chromia-alumina having less than about 8% of homogeneously distributed closed porosity formed by sintering an intimate interdispersion of fine particles of alumina-chromia, zirconia-alumina-silica, zirconia-alumina, or zirconia-chromia-alumina.Type: GrantFiled: November 25, 1987Date of Patent: April 18, 1989Assignee: Norton CompanyInventors: Neil N. Ault, Anthony K. Butkus, Louis J. Trostel